CN101899648A - Workpiece roll-over unit, vacuum film formation apparatus and workpiece assembly unit - Google Patents
Workpiece roll-over unit, vacuum film formation apparatus and workpiece assembly unit Download PDFInfo
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- CN101899648A CN101899648A CN 201010188299 CN201010188299A CN101899648A CN 101899648 A CN101899648 A CN 101899648A CN 201010188299 CN201010188299 CN 201010188299 CN 201010188299 A CN201010188299 A CN 201010188299A CN 101899648 A CN101899648 A CN 101899648A
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Abstract
The invention provides a kind of workpiece roll-over unit, vacuum film formation apparatus and workpiece assembly unit, be held in directly two sides alternate repetition ground film forming in the table of workpiece of vacuum in the chamber of workpiece roll-over unit with vacuum film formation apparatus.Vacuum film formation apparatus is directly implemented film forming serially with the vacuum state in the holding chamber in the table of workpiece.A plurality of workpiece department of assembly (18) assembling workpiece assembly unit (20) on the scarp of the vault in being formed at the chamber that is configured in vacuum film formation apparatus.Workpiece assembly unit (20) comprise by pair of rotary shafts rotation supporting freely be fixed with the workholder (22) of sheet glass (21) fixture supports frame (25), have the only card of the rotation of fixture supports frame (25) the ball lead-frame (50) of ending member (60) of card.In ball lead-frame (50) mounting steel ball (58) is arranged, and remain on position by rib (56) institute mounting.If accelerate the speed of rotation of vault, then steel ball (58) is crossed rib (56) by centrifugal force and is ended ball impact portions (62) collision of member (60) with card, at this moment, card claw stop (63) is put from the card stop bit of workholder (22) and is moved and workholder (22) overturns.
Description
Technical field
The present invention relates to a kind of being used for is forming circle, square etc. tabular by the workpiece roll-over unit of the vacuum film formation apparatus in the table of film forming matter (workpiece) and workpiece assembly unit with the filmogen film forming.
Background technology
It is the rotation vault that is umbellate form shape roughly of center rotation or the workpiece holding trays such as going barrel that are the polygon cartridge type that general vacuum film formation apparatus is provided with the turning axle in the chamber that becomes vacuum state by vacuum pump, makes the filmogen of emitting from the filmogen generation source that is arranged in the chamber equably attached to the surface of workpiece such as sheet glass.Be provided with under the situation that the source takes place a plurality of filmogens, different separately filmogens is deposited in described workpiece successively by shutter etc., forms the film that multilayer is deposited in described workpiece.In the workpiece holding tray a plurality of workpiece are installed, by with the turning axle being the center rotation, can disposable enforcement film forming to a plurality of workpiece.For the upper layer at workpiece such as thin plate substrate such as glass substrate or semiconductor wafers builds up membrane substance, and use vacuum film formation apparatus.
At this, when only keeping, being fixed on the state of workpiece holding tray of described vault at workpiece, only the one side at workpiece forms film.When making film in the two sides film forming, open described chamber and turn over behind the described workpiece, must after being set as vacuum in the chamber once more, carry out film forming, take time and energy very much.And, when described workpiece is extremely thin sheet glass, on sheet glass, produce warpage sometimes.Be head it off, the applicant proposed to be set as with the vacuum state in the holding chamber can be directly in the table of workpiece the film forming vacuum film formation apparatus of two sides shape and be shown in the structure of following patent documentation 1.
Patent documentation 1: No. 4140270 communique of Japanese Patent
Yet, though in a vacuum can be in the table of workpiece film forming, upset only is 1 time, film-formable is respectively to do for oneself 1 time in the table, so for laminated coating a plurality of filmogens as described, 1 layer of needs of every coating are opened the chamber and reset the film forming posture.And, for opening the chamber vacuum state is removed, and internal temperature also is reduced near room temperature from high temperature (for example, 100～400 ℃), so must be set as high temperature and vacuum once more after resetting workpiece, waste is for a long time.
And, when making a plurality of different filmogen film forming, sometimes (for example according to filmogen, after 400 ℃ of film forming in 100 ℃ of film forming etc.) temperature difference during film forming, if be taken at after the continuous multilayer film forming, then implement the film forming stage and cause on workpiece, producing warpage in one side in the film forming method of another side continuous multilayer.Especially under the situation of workpiece, cause significantly warpage sometimes and be not durable for thin sheet glass.
And the device of described patent documentation 1 record is in order to make the workpiece driving mechanisms such as must having electric motor that overturn in the chamber, even transformation device so far also needs large-scale change, spatially, the cost aspect also can increase very big burden.
Summary of the invention
The present invention is a point in view of the above problems, propose not use large-scale device, to keep vacuum state that workpiece is overturn continuously in the chamber, can not produce the workpiece roll-over unit of the laminated coating of warpage by two sides alternate repetition film forming in table simply.
Proposing does not in addition need driving mechanisms such as electric motor to the upset of workpiece, directly implements film forming vacuum film formation apparatus serially with the vacuum state in the holding chamber in the table of workpiece.
Workpiece roll-over unit of the present invention, it is characterized in that, it has: workholder, it is fixed in the workpiece holding tray of the chamber of vacuum film formation apparatus internal rotation and uses, loading and unloading keep workpiece freely, this workpiece in table, be provided with make that the filmogen that disperses from filmogen generation source piles up by film forming face; Supporting frame, it is fixed in the workpiece holding tray, and is freely supported described workholder by film forming face towards the upturned position rotation that the source takes place filmogen with another at a described starting position that the source is taken place towards filmogen by film forming face; Switching mechanism, it has damper weight, and described workholder is switched to described starting position and described upturned position by moving of described damper weight, described damper weight is moved and is bearing in freely on the direction parallel with the sense of rotation of described workpiece holding tray, and under the action of inertia of the acceleration of following described workpiece holding tray or deceleration and move.
Described supporting frame has first slicer that described workholder remained on described starting position with the locator protrusions butt that is formed on described workholder, described workholder is remained on second slicer of described upturned position with described locator protrusions butt, and under the effect of the gravity of damper weight self, supporting make described damper weight with described locator protrusions to first location that described first slicer is pushed with between the second position that described second slicer is pushed mobile freely.
Described switching mechanism can be set as to have: follower gear, its be fixed in one of the pair of rotary shafts of rotating the described workholder of ground axle suspension freely and with described workholder one rotation; Driving gear, it rotates freely that the earth's axis is supported on described supporting frame and with described follower gear engagement and make described workholder rotation; Arm member, it is the fixing described driving gear of side and in another distolateral fixing described damper weight at one end.Or, also can be set as and have: pinion(gear), its be fixed on one of the pair of rotary shafts of rotating the described workholder of ground axle suspension freely and with described workholder one rotation; The tooth bar pair, it is arranged on described damper weight and with described pinion described workholder is rotated.
Described switching mechanism can be made as, respond described workpiece holding tray speed of rotation rapid variation and repeatedly carry out the upset of described workholder repeatedly so that a plurality of filmogens that multilayer is piled up in the table of described workpiece are alternately piled up.
Workpiece assembly unit of the present invention, it is assemblied in, and the axle around Z-axis switches and the vault of rotation with speed different more than two in the chamber of vacuum film formation apparatus, and has the scarp configuration of the workpiece of film forming two film forming face of shape along described vault.The workpiece assembly unit is characterised in that, have: workholder, its loading and unloading keep described workpiece freely, and a described film forming face starting position in source is being taken place and displacement another film forming face is being taken place between the upturned position in source freely towards described filmogen towards filmogen; Damper weight, it remains on described starting position with described workholder when described vault rotates with first speed, make described workholder move to described upturned position at described vault under action of centrifugal force with than the rotation of the described first fireballing second speed time; The fixture supports frame, it rotates the described workholder of ground axle suspension freely, and has the direction that works along described centrifugal force and move the guiding elements that guides described damper weight freely.
Described fixture supports frame is set as following getting final product, and promptly has the slicer that described workholder is remained on described upturned position with being formed at the locator protrusions butt of described workholder.Described workpiece assembly unit is set as following getting final product, and promptly has: turnover spring, and it is to the direction application of force of described workholder to described upturned position; Card ends member, the reactive force that its opposing is applied by described turnover spring, and described workholder card is ended at described starting position, and by being pressed in because of on the mobile described damper weight of described centrifugal force, and the card of removing described workholder ends.
Described damper weight is the ball with definite quality, described guiding elements is as comprising that the direction that works along described centrifugal force erects a pair of wall portion that is provided with and be provided with the groove shape member of the base plate of described wall portion in described scarp side continuously, constitute following getting final product, promptly be provided with the ball mounting portion of the described ball of mounting in the described Z-axis side of described base plate, described card ends member and comprises: the ball rolled portion, this ball rolled portion is positioned in the base plate of described groove shape member, and the described ball under described ball mounting clan rolls and slides freely in the direction that described centrifugal force works in this ball rolled portion; Setting is arranged on the described ball mounting of the distance portion of a described ball rolled portion side far away and the ball impact portions that described ball collided of rolling; The card claw stop that stops the rotation of described workholder with described workholder butt.
Or, be set as following getting final product, promptly have: be arranged at described fixture supports frame and engage with described locator protrusions and keep first slicer of described workholder at described starting position; Second slicer that keeps described workholder at described upturned position, above-mentioned damper weight makes described workholder to the first location of direction that described locator protrusions engages with described first slicer rotation with make that described workholder is mobile between the second position that the direction that described locator protrusions engage with described second slicer is rotated to be directed freely under the effect of self gravitation.
And be set as following getting final product, promptly have: first gear, its rotate freely the described workholder of ground axle suspension by pair of rotary shafts and be fixed on one of described pair of rotary shafts and with described workholder one rotation; Second gear, itself and described first toothing and rotate freely that the earth's axis is supported on described fixture supports frame, it is distolateral that described second gear is fixed in another of arm member of the fixing described damper weight of side at one end.When described damper weight is positioned at described first location and described vault during with the rotation of described first speed, the gravity of the described damper weight of described workholder by being positioned at described first location remains on described starting position, described damper weight moves and described second gear rotates to the described second position by centrifugal force with the rotation of described second speed the time, and described locator protrusions engages with described second slicer and described workholder becomes described upturned position.
Vacuum film formation apparatus of the present invention is characterised in that, has above-mentioned workpiece assembly unit among each, when making described vault, carry out film forming to a film forming face with the rotation of first speed, then, make described vault after making the workpiece upset, carry out film forming to another film forming face with described second speed rotation.
Based on workpiece roll-over unit of the present invention, be held in vacuum in the chamber with vacuum film formation apparatus and can directly carry out the continuous upset of workpiece simply, so can be in the table of workpiece two sides alternate repetition film forming, even the different a plurality of filmogens of multilayer filming condition can not produce warpage yet on workpiece.
And,,, can directly in the table of workpiece, implement film forming continuously by the interior vacuum state of holding chamber by having the speed of rotation that described workpiece assembly unit only changes vault based on vacuum film formation apparatus of the present invention.
Description of drawings
Fig. 1 is the synoptic diagram of the structure of expression vacuum film formation apparatus.
Fig. 2 is the stereo appearance figure of workpiece roll-over unit.
Fig. 3 is the exploded perspective view of the structure of expression workholder.
Fig. 4 is the exploded perspective view of workpiece roll-over unit.
Fig. 5 is the synoptic diagram of relation of the starting position of explanation first location of damper weight and workholder.
Fig. 6 is the synoptic diagram of relation of the upturned position of the explanation second position of damper weight and workholder.
Fig. 7 is the unitary exploded perspective view of driving gear.
Fig. 8 is the figure of the time diagram of each function of expression.
Fig. 9 is the synoptic diagram to the rotation of starting position of the workholder that moves based on damper weight of explanation.
Figure 10 is the synoptic diagram to the rotation of upturned position of the workholder that moves based on damper weight of explanation.
Figure 11 is the figure of the time diagram of expression when vault braking being made the workholder upset.
Figure 12 is that expression is quickened vault and the figure of time diagram when making the workholder upset.
Figure 13 is the stereo appearance figure of the other workpiece roll-over unit of expression.
Figure 14 is the exploded perspective view to the supporting frame installation of explanation workholder.
Figure 15 is the exploded perspective view of the structure of explanation switching mechanism.
Figure 16 is the sectional view of switching mechanism.
Figure 17 is the synoptic diagram of the position of explanation damper weight and workholder.
Figure 18 be the explanation damper weight when being positioned at first location steel ball be positioned at synoptic diagram on the scarp.
Figure 19 is the synoptic diagram that the explanation damper weight moves.
Figure 20 is the synoptic diagram of explanation based on the upset of the workholder of the deceleration of vault.
Figure 21 be explanation upturned position place to by the synoptic diagram of the accumulation of the filmogen of film forming face.
Figure 22 is the synoptic diagram that the workholder of starting position is returned in explanation.
Figure 23 is the synoptic diagram that expression has the structure of the bulging vacuum film formation apparatus of tubular.
Figure 24 is the stereo appearance figure of the 3rd workpiece roll-over unit.
Figure 25 is the exploded perspective view of the structure of explanation switching mechanism.
Figure 26 is the sectional view of switching mechanism.
The synoptic diagram of the damper weight when Figure 27 is explanation acceleration tubular drum and the position of workholder.
Figure 28 is the synoptic diagram of the upset of explanation workholder.
Figure 29 is the stereo appearance figure of the 4th workpiece roll-over unit.
Figure 30 is the exploded view of the 4th workpiece roll-over unit.
Figure 31 is the unitary exploded perspective view of driving gear.
Figure 32 is the synoptic diagram of expression based on the structure of vacuum film formation apparatus of the present invention.
Figure 33 is the stereo appearance figure of workpiece assembly unit.
Figure 34 is the synoptic diagram of the structure of expression workpiece assembly unit.
Figure 35 is the exploded perspective view of the structure of expression workholder.
Figure 36 is the exploded perspective view of the structure of expression workholder and fixture supports frame.
Figure 37 is the exploded perspective view of workpiece assembly unit.
Figure 38 is the synoptic diagram of the effect of explanation workpiece assembly unit.
Figure 39 is the synoptic diagram of the effect of explanation workpiece assembly unit.
Figure 40 is the synoptic diagram of the effect of explanation workpiece assembly unit.
Figure 41 is the synoptic diagram of the effect of explanation workpiece assembly unit.
Figure 42 is the synoptic diagram of the effect of explanation workpiece assembly unit.
Figure 43 is the synoptic diagram of the effect of explanation workpiece assembly unit.
Figure 44 is the stereo appearance figure of the other embodiment of expression ball mounting portion.
Figure 45 is the synoptic diagram of the other embodiment of expression ball mounting portion.
Figure 46 is the figure of the example of the expression installation direction that changes workholder.
Figure 47 is the stereo appearance figure of the other embodiment of expression workpiece assembly unit.
Figure 48 is the exploded perspective view of other workpiece assembly unit.
Figure 49 is the exploded perspective view of second gear unit.
Figure 50 is the synoptic diagram of the effect of the other workpiece assembly unit of explanation.
Figure 51 is the synoptic diagram of the effect of the other workpiece assembly unit of explanation.
Among the figure: 10, the 150-vacuum film formation apparatus, 12-chamber (vacuum chamber), 13, the 153-Z-axis, the 14-scarp, 15-vault (workpiece holding tray), 16,156-pilot hole (department of assembly), 18-mounting ring, 19-3 root supporting arm, 21-reduction gearing (speed change mechanism), the 22-electric motor, 24,24A, 24B, 24C, the 24D-filmogen, 25, the source takes place in the 155-filmogen, 30,110,160,190-workpiece roll-over unit, 31-sheet glass (workpiece), 32-workholder, 33,34,118,198, the 201-turning axle, 35,115, the 195-supporting frame, the 36-hold-down arm, the 37-open holes, 40,112,162, the 191-switching mechanism, 41,113,163, the 193-damper weight, 45,46-is by film forming face, 50-clamp base, 51-anchor clamps cover, 55, the 56-opening, 57,58,202-axle support holes, the 60-locator protrusions, 61-first slicer, 62-second slicer, 66-support, 68-supporting plate, 70,192-driving gear unit, the 71-follower gear, 73-driving gear, 83, the 205-arm member, the 116-orbit portion, the 120-pinion(gear), 125-tooth bar pair, 126, the 170-guide box, the 128-steel ball, 130, the 166-elongated slot, 131,167-hole portion, 132, the 168-bottom surface, 137,171, the 200-installation portion, 138, the 172-open holes, 140, the 173-accommodation section, 141, the 174-lower surface, 142, the 175-planar portions, 143, the 176-scarp, 151-tubular drum (workpiece holding tray), 152-fitting surface, the 157-mounting table, the 158-pedestal, 194-awl tooth driving gear, 196-awl tooth follower gear, the 210-vacuum film formation apparatus, the 211-chamber, 212-Z-axis, 213-scarp, the 215-vault, source, 217-filmogen, 218-workpiece department of assembly take place in the 216-filmogen, 220,270-workpiece assembly unit, 221-sheet glass (workpiece), 222-workholder, 223,224, the 274-turning axle, 225,269,271-fixture supports frame, 226,251-hold-down arm, 230-medullary ray, the radial line of 231-(direction that centrifugal force works), 233-workholder base, 234-workholder cover, 238, the 239-opening, 241, the 242-rotating hole, 243, the 244-screw hole, 245-slicer, 246-locator protrusions, the 247-turnover spring, the 248-groove, 250-ball lead-frame (guiding elements, groove shape member), 254-wall portion, the 255-base plate, 256-rib (ball mounting portion), 258-steel ball (ball, damper weight), the 260-card ends member, 261-ball rolled portion, 262-ball impact portions, 263-card claw stop, 264-is provided with portion continuously, the 265-guiding groove, leg-of-mutton 2 tracks of 268-(ball mounting portion), 272-switching mechanism, the 273-maintaining part, 275-first slicer, 276-second slicer, 277-first gear, 278-second gear, the 280-holding plate, 281-second gear unit, 285-arm member, the 286-packing ring, the 287-damper weight, 288-axle, 289-fitting portion, 290,291-riveted holes, 292-are riveted axle.
Embodiment
As shown in Figure 1, in vacuum film formation apparatus 10, the vault (workpiece holding tray) 15 have around the scarp 14 of the umbrella of the axle rotation of Z-axis 13 is set in inside being set as the chamber (vacuum chamber) 12 of vacuum, and 14 inclination (for example 35 °) forms a plurality of along the scarp in pilot hole (department of assembly) 16 of assembling workpiece roll-over unit 30 of the present invention.Vault 15 is fixed on the mounting ring 18, by 3 supporting arms 19 from the chamber rotation of 12 top board hang freely.3 supporting arms 19 can carry out rapid acceleration and deceleration when rotating with constant speed by reduction gearing (speed change mechanism) 21 and electric motor 22.Reduction gearing 21 has drift stop (not shown).Lower position at vault 15 disposes the filmogen generation source 25 that filmogen 24 is dispersed.In addition, can use the drift stop that has the device of electro-magnetic braking functions and omit reduction gearing 21 at electric motor 22.
As shown in Figure 2, workpiece roll-over unit 30 have fastening glass panels (workpiece) 31 workholder 32, to workholder 32 give revolving force switching mechanism 40, support the supporting frame 35 of these mechanisms, supporting frame 35 is assemblied in pilot hole 16.Supporting frame 35 rotates holding workpieces anchor clamps 32 freely by pair of rotary shafts 33,34 (with reference to Fig. 4).Supporting frame 35 with the orthogonal direction of the travel direction of pilot hole 16 on configuration turning axle 33,34 (medullary ray 44), so that the travel direction of the damper weight 41 of switching mechanism 40 (arrow 42) becomes the identical direction of travel direction (arrow 43) with pilot hole 16, in the open holes 37 of the hold-down arm 36 that is arranged at supporting frame 35, insert logical screw 38, and 14 slope is fixed on vault 15 along the scarp.
As shown in Figure 3, in table, have by sheet glass 31 loading and unloading of film forming face 45,46 and remain on freely between clamp base 50 and the anchor clamps cover 51, insert screw 53 that leads in the hole 52 that is formed at anchor clamps cover 51 and the screw hole 54 that is formed at clamp base 50 and screw togather, and sheet glass 31, clamp base 50 and anchor clamps cover 51 are become one.Form in the central authorities of clamp base 50 and anchor clamps cover 51 and to make the opening 55,56 that is appeared respectively by film forming face 45,46, and become and from filmogen the filmogen 24 that source 25 emits takes place and be deposited in by film forming face 45,46.
As shown in Figure 4, be formed with at supporting frame 35: allow turning axle 33,34 insert logical axle support holes 57,58; First slicer 61, it engages with the locator protrusions 60 (with reference to Fig. 3) that is formed at clamp base 50 and workholder 32 is remained on starting position (with reference to Fig. 5); Second slicer 62, it engages with locator protrusions 60 at the upturned position (with reference to Fig. 6) of workholder 32 from starting position Rotate 180 °.Form the screw hole 63,64 (with reference to Fig. 3) of assembling turning axle 33,34 in clamp base 50.Be pressed into follower gear 71 at turning axle 34, if follower gear 71 Rotate 180s °, workholder 32 Rotate 180s ° then.
As shown in Figure 5, when damper weight 41 was positioned at first location, the load of damper weight 41 worked and gives the revolving force of arrow 74 directions to driving gear 73 to arrow 72 direction, and 73 pairs of follower gears 71 of driving gear are given the revolving force of arrow 75 directions.With follower gear 71 banded workholders 32 locator protrusions 60 pushed by first slicer 61 and be positioned at make by film forming face 45 towards below starting position.As shown in Figure 6, when damper weight 41 was positioned at the second position, the load of damper weight 41 worked and gives the revolving force of arrow 77 directions to driving gear 73 to arrow 72 direction, and 73 pairs of follower gears 71 of driving gear are given the revolving force of arrow 78 directions.With follower gear 71 banded workholders 32 locator protrusions 60 pushed by second slicer 62 and be positioned at make by film forming face 46 towards below upturned position.
As shown in Figure 7, driving gear unit 70 is made of following structure: driving gear 73; Arm member 83, it forms embedded hole 81,82 at two ends; Packing ring 84, itself and driving gear 73 same thickness; Damper weight 41.Root in axle 85 the both sides of being fixed in driving gear 73 forms fitting portion 86 respectively, forms the riveted holes 87 of fixed arm members 83 at driving gear 73.Fitting portion 86 is entrenched in the embedded hole 81 of arm member 83, clamps driving gear 73 from both sides by 2 arm members 83.Riveted joint axle 89 is communicated with at riveted holes 87 and 2 riveted holes 88, driving gear 73 is fixed on the distolateral of 2 arm members 83.
The embedded hole 82 of hole that screw 90 inserts another the distolateral embedded hole 82 lead at the hole 91 that is formed at damper weight 41, arm member 83 successively, be formed at packing ring 84 92, second arm member 83, be formed at the hole 91 of second damper weight 41, and screw togather with nut 93 and these members are fixed.The driving gear unit 70 of Gou Chenging makes driving gear 73 rotations by the load (gravity) of damper weight 41 like this, and makes locator protrusions 60 be connected to first slicer 61 or second slicer 62.
Secondly, with reference to time diagram shown in Figure 8 to as first embodiment pass through vacuum film formation apparatus 10 be arranged at 2 of sheet glass 31 by a plurality of filmogens 24 of film forming face 45,46 laminated coatings (24A, 24B, 24C, 24D ...) order describe.As shown in Figure 9, the workpiece roll-over unit 30 of installation sheet glass 31 is fixed in the scarp 14 of vault 15.Damper weight 41 is set in first location and vault 15 right (being counter clockwise direction in Fig. 1) rotation and acceleration in figure.At this moment, though mass force to arrow 97 directive effects in damper weight 41, damper weight 41 remains first location, workholder 32 remains on that locator protrusions 60 is connected to first slicer 61 and by the described starting position of film forming face 45 towards the below.
If vault 15 reaches fixing speed, then keep this speed directly to continue rotation to counterclockwise.Source 25 radiation filmogen 24A (filmogen 24 that will pile up at first is set as 24A) take place from the filmogen that is configured in vault 15 lower positions, the opening 55 from the workholder 32 that remains on described starting position appear by film forming face 45 on filmogen 24A film forming.
As shown in figure 10, if vault 15 is a significant slowdown, then in damper weight 41, damper weight 41 moves as arrow 76 and driving gear 73 is rotated to arrow 77 directions mass force to arrow 98 directive effects.Driving gear 73 makes follower gear 71 rotate to arrow 78 directions, and makes workholder 32 upsets.Workholder 32 remains on that locator protrusions 60 is connected to second slicer 62 and from the upturned position of described starting position Rotate 180 °, by film forming face 46 towards the below.Vault 15 continues right (being counter clockwise direction) rotation in figure with the speed of slowing down in Fig. 1, from filmogen source 25 radiation filmogen 24A (with reference to Fig. 8) take place once more, is being piled into membrane substance 24A by opening 56 by film forming face 46.Like this, be piled into membrane substance 24A by the two sides of film forming face 45 and 46.
As shown in Figure 9, if finish to by the accumulation of the filmogen 24A on film forming face 45,46 two sides, then vault 15 quickens once more, and mass force works and damper weight 41 moves to arrow 79 directions to arrow 97 directions, and driving gear 73 is rotated to arrow 74 directions.Driving gear 73 makes follower gear 71 workholder 32 upsets to the rotation of arrow 75 directions and is set as starting position.Locator protrusions 60 is connected to first slicer 61 and workholder 32 remains on described starting position.The other filmogen 24B of filmogen 24 selections of source 25 radiation takes place from filmogen at this moment.According to filmogen 24, the envrionment temperature during film forming (chamber 12 in temperature) is different sometimes, fits in the selection of membrane substance 24 and changes temperature in the chamber 12.
Shown in the time diagram of Fig. 8, utilization is by the acceleration and the decelerating effect of vault 15 overturn workholder 32 in the mass force of damper weight 41 repeatedly repeatedly, filmogen 24A is deposited in next filmogen 24B is piled up, then be overlapped into membrane substance 24C, filmogen 24D and a plurality of filmogen and carry out laminated coating.In addition, identical filmogen is deposited in by film forming face 45 and 46, diverse filmogen is deposited in by film forming face 45 and 46.For example, also can be set as after being piled into membrane substance 24A and be piled into membrane substance 24B, after being piled into membrane substance 24C, piled up by filmogen 24D by film forming face 46 by film forming face 45 by film forming face 46 by film forming face 45.
Secondly, following situation being described, promptly is not to make vault 15 to direction rotation but hocket and rotate and reverse, by just change by switching, decelerating effect when reverse rotates workholder 32 in the inertia of damper weight 41.Vault 15 hockets by electric motor 22 and rotates and reverse.The time diagram of each member of this moment becomes figure as shown in figure 11.In addition, the just commentaries on classics (counterclockwise) of vault 15, the switching of counter-rotating (clockwise direction) are not relied on just commentaries on classics, the counter-rotating of electric motor, can use the just member of the structure of the sense of rotation of anti-switching output shaft yet at reduction gearing 21.
As shown in Figure 9, the workpiece roll-over unit 30 that is assemblied in vault 15 is set damper weight 41 in first location, and vault 15 right (positive veer counterclockwise) in figure is rotated and is accelerated.From with fixing speed to the below of the vault 15 of positive veer rotation towards the workholder 32 radiation filmogen 24A that remain on described starting position, be piled into membrane substance 24A at the sheet glass 31 that remains in workholder 32 by film forming face 45.If finish to by the accumulation of film forming face 45, then vault 15 is braked and stops after slowing down.When this slowed down, mass force (arrow 98) acted on damper weight 41.The mass force that damper weight 41 is passed through to be acted on moves to arrow 76 directions, and makes workholder 32 upsets and workholder 32 is remained on upturned position (with reference to Figure 10) by driving gear 73 and follower gear 71.
The vault 15 that stops after the deceleration reverses immediately (left of Fig. 9 to, be clockwise direction in Fig. 1) and rotates with fixing speed.From filmogen source 25 radiation filmogen 24A take place once more, filmogen 24A is deposited in by film forming face 46.If finish to by the accumulation of film forming face 46, then vault 15 is braked and slows down.When this slowed down, mass force (arrow 97) acted on damper weight 41.Damper weight 41 moves to arrow 79 directions, and driving gear 73 and follower gear 71 are rotated and make workholder 32 upsets to arrow 74,75 directions, and workholder 32 is remained on starting position (with reference to Fig. 9).
The vault 15 that stops after the deceleration continues rotation to positive veer (right of Fig. 9) with fixing speed immediately.At this moment, the filmogen 24 that source 25 radiation take place from filmogen is selected other filmogen 24B, and filmogen 24B is deposited in by film forming face 45.If finish to by the accumulation of film forming face 45, then vault 15 is braked and slows down, and damper weight 41 moves, and makes workholder 32 upsets by driving gear 73 and follower gear 71, and workholder 32 is remained on upturned position (with reference to Figure 10).
The vault 15 that stops after the deceleration quickens rotation to reverse directions immediately, and continues rotation with fixing speed.From filmogen source 25 radiation filmogen 24B take place once more, filmogen 24B is deposited in by film forming face 46.If finish to by the accumulation of film forming face 46, then vault 15 is braked and slows down, and damper weight 41 moves, and makes workholder 32 upsets by driving gear 73 and follower gear 71, and workholder 32 is remained on starting position (with reference to Fig. 9).
After being implemented to pile up by a side of film forming face 45,46, vault 15 braking made workholder 32 upsets and make filmogen 24A be deposited in two sides in the table of sheet glass 31, be piled into and pile up next filmogen 24B behind the membrane substance 24A, then can overlappingly continuously be piled into membrane substance 24C and a plurality of filmogen and carry out laminated coating.Like this, make vault 15 forward or reverse and only the time make sheet glass 31 upsets, need not powerfully to quicken vault 15 and can use the advantage of smaller powers electric motor 22 so have in braking.
And, be not when deceleration vault 15, to make sheet glass 31 upsets, also can when quickening vault 15, make sheet glass 31 upsets.Do not need drift stop at reduction gearing 21 this moment.Shown in the time diagram of Figure 12 owing to do not have drift stop, so when just changeing and the deceleration during counter-rotating slow, the mass force of effect when damper weight 41 is not slowed down and moving, the only mass force that acts on when quickening and moving.
Secondly, the situation that other workpiece roll-over unit 110 is installed in vacuum film formation apparatus 10 is described.As shown in figure 13, workpiece roll-over unit 110 has: the workholder 32 of fastening glass panels 31; Workholder 32 is given the switching mechanism 112 of revolving force; Support the supporting frame 115 of these mechanisms.Supporting frame 115 is fixed in described pilot hole 16, so that the travel direction of the damper weight 113 of switching mechanism 112 (arrow 114) becomes the identical direction of travel direction (arrow 43) with pilot hole 16.
As shown in figure 14, be formed with at supporting frame 115: axle support holes 57,58, insert logical turning axle 33,118; First slicer 61 engages with the locator protrusions 60 that is formed at clamp base 50 and workholder 32 is remained on starting position (with reference to Figure 17); Second slicer 62 engages with locator protrusions 60 at the upturned position (with reference to Figure 21) of workholder 32 from starting position Rotate 180 °.Turning axle 33 is inserted to lead in axle support holes 57 and is fixed on the screw hole 64 that is formed at clamp base 50, and turning axle 118 is inserted to lead in axle support holes 58 and pinion(gear) 120 and is fixed on the screw hole 63 that is formed at clamp base 50.The rib shape key 119 that is arranged on turning axle 118 engages with the keyway of the axis hole 121 that is formed at pinion(gear) 120, the rotation that becomes one of pinion(gear) 120, turning axle 118 and clamp base 50.
As Figure 15 and shown in Figure 16, rotating mechanism 112 following formations: damper weight 113, be formed on damper weight 113 tooth bar pair 125, hold damper weight 113 guide box 126, be used for easy slide balance and weigh 113 steel ball 128.Make the elongated slot 130 that is formed on damper weight 113 be entrenched in the orbit portion 116 that is formed at supporting frame 115.Damper weight 113 has 2 hole portions 131 that hold steel ball 128, and the diameter of the depth ratio steel ball 128 of hole portion 131 is shallow, and the part of steel ball 128 is outstanding from the bottom surface 132 of hole portion 131.The damper weight 113 of inserting steel ball 128 in hole portion 131 is contained in the accommodation section 140 of guide box 126.
Describe with reference to time diagram shown in Figure 8 order a plurality of filmogens 24 of laminated coating.As shown in figure 17, if vault 15 right (in Fig. 1 be counterclockwise) in figure rotates, then mass force to arrow 97 directive effects in damper weight 113.Damper weight 113 moves and becomes first location to arrow 97 directions, makes workholder 32 to rotation counterclockwise by tooth bar secondary 125 and pinion(gear) 120 (with reference to Figure 15).Workholder 32 remain on that locator protrusions 60 is connected to first slicer 61 of supporting frame 115 and sheet glass 31 by the starting position of film forming face 45 towards the below.Vault 15 continues rotation and from filmogen 25 radiation described filmogen 24A in source takes place, filmogen 24A be deposited in from the opening 55 of the workholder 32 that remains on starting position appear by film forming face 45.
As shown in figure 18, when damper weight 113 was positioned at first location, a steel ball 128 was positioned at a scarp 143.The steel ball 128 that is positioned at scarp 143 is implemented the deadweight of damper weights 113, produce the power that adipping moves by its component.By this power, even do not act under the state of damper weight 113 with constant speed rotation and mass force at vault 15, damper weight 113 also continues holding capacity on arrow 97 directions, and gives pinion(gear) 120 by tooth bar pair 125 with revolving force.
As shown in figure 19, if vault 15 in rotation in figure right be a significant slowdown, then mass force to arrow 98 directive effects in damper weight 113.Weigh 113 by this balance of shaking force and move to arrow 98 directions, the steel ball 128 that is positioned at a scarp 143 moves to planar portions 142.As shown in figure 20, damper weight 113 makes workholder 32 rotate to arrow 145 directions by tooth bar secondary 125 and pinion(gear) 120.As shown in figure 21, in addition steel ball 128 arrives another scarp 143 if damper weight 113 moves, then workholder 32 remain on that locator protrusions 60 is connected to second slicer 62 and from the upturned position of starting position Rotate 180 ° and by film forming face 46 towards the below.Vault 15 continues rotation with the speed of slowing down, and from filmogen source 25 radiation filmogen 24A takes place once more, is being piled into membrane substance 24A by opening 56 by film forming face 46.Like this, be piled into membrane substance 24A by the two sides of film forming face 45 and 46.
As shown in figure 22, if finish to by the film forming of the filmogen 24A on the two sides of film forming face 45,46, then vault 15 quickens once more, mass force to arrow 97 directive effects in damper weight 113.Damper weight 113 moves to arrow 97 directions thus.Damper weight 113 makes workholder 32 rotate to arrow 146 directions by tooth bar secondary 125 and pinion(gear) 120.If move to by 113, one steel balls 128 of damper weight and to arrive a scarp 143, then locator protrusions 60 be connected to first slicer 61 and remain on starting position and by film forming face 45 towards the below.The other filmogen 24B of filmogen 24 selections of source 25 radiation takes place from filmogen at this moment.
And, as previously mentioned, be not to make vault 15 to direction rotation but hocket and rotate and reverse, also can by just change by switching, decelerating effect when reverse rotates workholder 32 in the inertia of damper weight 113.The time diagram of the working order of expression each member at this moment as shown in figure 11.Vault 15 is being deposited in being slowed down afterwards by film forming face 45 of sheet glass 31 to positive veer (with reference to Figure 17, right among the figure) rotation and filmogen 24A, and mass force (arrow 98) acts on damper weight 113 (with reference to Figure 19).The mass force that damper weight 113 is passed through to be acted on moves to arrow 98 directions, and makes workholder 32 to arrow 145 directions upsets (with reference to Figure 20) by driving gear 73 and follower gear 71, and workholder 32 is remained on upturned position.
The vault 15 that stops after the deceleration quickens rotation to reverse directions immediately, with fixing speed (with reference to Figure 21, in figure left to) continue rotation.From filmogen source 25 radiation filmogen 24A taking place, is being piled into membrane substance 24A by film forming face 46 once more.If finish to by the accumulation of film forming face 46, then vault 15 slows down, and damper weight 113 moves to arrow 97 directions by mass force (arrow 97), and workholder 32 overturns and remains on starting position (with reference to Figure 22) to arrow 146 directions.The vault 15 that stops after the deceleration continues rotation to positive veer acceleration and with fixing speed immediately.At this moment, the filmogen 24 that source 25 radiation take place from filmogen is selected other filmogen 24B, is deposited in by film forming face 45.
And, be not when deceleration vault 15, to make sheet glass 31 upsets, also can when quickening vault 15, make sheet glass 31 upsets.Shown in the time diagram of Figure 12, thus since do not have drift stop when just changeing and the deceleration during counter-rotating relax the mass force of effect when damper weight 113 is not slowed down and moving, but the mass force that acts on when quickening and moving.
Then, to describing at the 3rd workpiece roll-over unit 160 that is assemblied in when having the vacuum film formation apparatus 150 of tubular drum as the workpiece holding tray.As shown in figure 23, tubular drum 151 is set as the inboard with a plurality of rectangle fitting surfaces 152 and arranges with tubular, is the center rotation with the axle of Z-axis 153.Be formed with the pilot hole (department of assembly) 156 of a plurality of assembling workpiece roll-over units 160 at each fitting surface 152.Tubular drum 151 rotation is fixed on mounting table 157 freely, and acceleration and deceleration that can be rapid when rotating with constant speed by interior reduction gearing 21 that is loaded on pedestal 158 and electric motor 22.Source 155 takes place in the filmogen that filmogen 24 is dispersed in the side of tubular drum 151 position configuration.
As shown in figure 24, the 3rd workpiece roll-over unit 160 is vertically mounted on the inboard of tubular drum 151.Workpiece roll-over unit 160 have fastening glass panels 31 workholder 32, to workholder 32 give revolving force switching mechanism 162, support the supporting frame 115 of these mechanisms.The travel direction that supporting frame 115 is fixed into the damper weight 163 of switching mechanism 162 becomes the identical direction of travel direction (sense of rotation of tubular drum 151) with pilot hole 156.Because supporting frame 115 and workholder 32 are identical with workpiece roll-over unit 110, the detailed so add same-sign.
Shown in Figure 25 and 26, switching mechanism 162 has damper weight 163, is formed on the tooth bar pair 125 of damper weight 163,, be fixed on the pinion(gear) 120 of workholder 32.Workholder 32 is assembled in supporting frame 115 making locator protrusions 60 be connected to the initial position fix of first slicer 61.Make the elongated slot 166 of damper weight 163 be entrenched in the orbit portion 116 that is formed at supporting frame 115, and the pinion(gear) 120 that tooth bar pair 125 is fastened on be fixed in workholder 32.Damper weight 163 is contained in guide box 170 with the steel ball 128 that is inserted in the hole portion 167 that is formed at damper weight 163.
Because the 3rd workpiece roll-over unit 160 is installed in the inboard of tubular drum 151, though so damper weight 163 and guide box 170 horizontal arrangement, but workholder 32 arranged perpendicular is a bit different with workpiece roll-over unit 110, but identical with the vacuum film formation apparatus 10 with workpiece roll-over unit 110 to the stacking method (in proper order) of the filmogen 24 of sheet glass 31.
For example, when carrying out film forming according to time diagram shown in Figure 8, as shown in figure 27, if tubular drum 151 right (in Figure 23 for counterclockwise) in figure rotate then mass force to arrow 97 directive effects in damper weight 163.Damper weight 163 moves and becomes first location to arrow 97 directions, and makes workholder 32 to rotation counterclockwise by tooth bar secondary 125 and pinion(gear) 120.Workholder 32 remain on that locator protrusions 60 is connected to first slicer 61 of supporting frame 115 and sheet glass 31 by the starting position of film forming face 45 towards the below.Tubular drum 151 continues rotation, and from filmogen source 155 radiation filmogen 24A takes place, and is piled into membrane substance 24A what the opening 55 from the workholder 32 that remains on starting position appeared by film forming face 45.
If tubular drum 151 is a significant slowdown, then mass force to arrow 98 directive effects in damper weight 163.Weighing 163 by this balance of shaking force moves to arrow 98 directions.Damper weight 163 makes workholder 32 rotate to arrow 145 directions by tooth bar secondary 125 and pinion(gear) 120.As shown in figure 28, if damper weight 163 forwards moves, then workholder 32 remain on that locator protrusions 60 is connected to second slicer 62 and from the upturned position of starting position Rotate 180 ° and by film forming face 46 towards the below.Tubular drum 151 continues rotation with the speed of slowing down, and from filmogen source 25 radiation filmogen 24A takes place once more, and is being piled into membrane substance 24A by film forming face 46.
If tubular drum 151 quickens once more, then in damper weight 163, damper weight 163 moves to arrow 97 directions mass force to arrow 97 directive effects, and workholder 32 is rotated and remains on starting position.From filmogen the source 25 other filmogen 24B that disperses taking place, is being piled into membrane substance 24B by film forming face 45.Can utilize like this by the acceleration and the decelerating effect of tubular drum 151 overturn workholder 32 in the mass force of damper weight 163 repeatedly repeatedly, filmogen 24A is deposited on the basis on two sides in the table of sheet glass 31 next filmogen 24B is piled up, follow and overlappingly be piled into membrane substance 24C and a plurality of filmogen and carry out laminated coating.
And, also can make workholder 32 by change by making vault 15 just change, reverse and just switch, deceleration when reversing or booster action be in the inertia rotation of damper weight 113.Time diagram such as Figure 13 or shown in Figure 12 of the working order of expression each member at this moment.
Secondly, (the 4th) the in addition workpiece roll-over unit 190 that is assemblied in tubular drum 151 is described.As shown in figure 29, workpiece roll-over unit 190 is identical with workpiece roll-over unit 30 except that switching mechanism 191, and switching mechanism 191 has the driving gear unit 192 of fixed balance weight 193 and makes the awl tooth follower gear 196 of workholder 32 rotations.The workholder 32 of supporting frame 195 supporting driving gear unit 192, awl tooth follower gear 196, fastening glass panels 31.Supporting frame 195 is fixed in pilot hole 156 by screw 38 from the inboard of tubular drum 151, so that the travel direction of damper weight 193 becomes the identical direction of travel direction (arrow 43) with pilot hole 156.
As shown in figure 30, supporting frame 195 is identical with supporting frame 35 except that the installation portion 200 that driving gear unit 192 is installed, and workholder 32 (with reference to Fig. 3) is installed freely by inserting turning axle 33,201 rotations of leading in axle support holes 57,58.Turning axle 201 fixed cone tooth follower gears 196, if awl tooth follower gear 196 Rotate 180s °, also Rotate 180 ° of workholder 32 then.Awl tooth follower gear 196 meshes with awl tooth driving gear 194, and makes workholder 32 upsets by damper weight 193.Explanation is omitted in upset based on the workholder 32 of damper weight 193.
As shown in figure 31, driving gear unit 192 arm member 205 that forms embedded hole 206,207 by damper weight 193, awl tooth driving gear 194, at two ends constitutes.Screw 208 is inserted to lead in the hole 209 that is formed on damper weight 193 and embedded hole 207 and is screwed togather with nut 93, thereby fixes these members.The arm member 205 of fixed balance weight 193 is chimeric with the groove 210A that is formed on awl tooth driving gear 194.Turning axle 198 is inserted and is led to after the hole 211A and embedded hole 206 that are formed on awl tooth driving gear 194, the axle support holes 202 that is formed on installation portion 200 with fore-end 212A is chimeric, screw division meshes across packing ring 203 and nut 93, and is fixed on installation portion 200 (with reference to Figure 30).
Described workpiece roll-over unit 30,110,160,190 is the member that vault 15 that workpiece (sheet glass 31) is installed or 151 rotations of tubular drum are driven, but also can workpiece roll-over unit 30,110,160,190 be installed and be controlled to as Fig. 8 or Figure 11 or time diagram shown in Figure 12 sheet glass 31 is overturn repeatedly constituting workpiece installation component that sheet glass 31 advances mobile before and after a direction in vacuum chamber.
Shown in figure 32, based on vacuum film formation apparatus 210 of the present invention the axle that has with Z-axis 212 being set in the chamber 211 that inside is set as vacuum is the vault 215 on the umbrella scarp 213 of center rotation, is configured to membrane substance at the lower position of described vault 215 source 216 takes place.Described vault 215 can be rotated the switching of speed, to allow to speed of rotation slow first speed and the fast second speed rotation of Bi Qi.A plurality of workpiece department of assembly 218 is formed on described scarp 213 along the slope (for example, 30 °) on scarp.The 218 assembling workpiece assembly units 220 in described workpiece department of assembly.
As Figure 33 and shown in Figure 34, workpiece assembly unit 220 is inserted through the fixture supports frame 225 that pair of rotary shafts 223,224 rotations supporting freely is fixed on the workholder 222 of the sheet glass (workpiece) 221 that has film forming face in the table in described workpiece department of assembly 218, and, install along the slope on described scarp 213 by inserting the screw 228 that leads at the open holes 227 of the hold-down arm 226 that is formed at fixture supports frame 225.The medullary ray 230 of described turning axle 223,224 is configured to and becomes vertical from described Z-axis 212 towards the radial line (that is the direction of centrifugal action when, described vault 215 rotates) 231 of peripheral direction.
As Figure 35 and shown in Figure 36, described sheet glass 221 loading and unloading remain between workholder base 233 and the workholder cover 234 freely, insert the screw 236 that leads in the hole 235 that is formed on workholder cover 234 and screw togather, and described sheet glass 221, workholder base 233, workholder cover 234 are become one with the screw hole 237 that is formed on workholder base 233.Central authorities at described workholder base 233 and workholder cover 234 form opening 238,239 respectively, by the filmogen 217 that source 216 emits taking place, make described filmogen 217 film forming in each film forming face that is formed in described sheet glass 221 tables from described filmogen.
Be formed with at described workholder base 233: screw hole 243,244, assembling are inserted and are led in the described turning axle 223,224 of the rotating hole 241,242 that is formed on described fixture supports frame 225; Locator protrusions 246 engages with the slicer 245 that is formed on described fixture supports frame 225 when with described turning axle 223,224 being the center rotation; Groove 248, card end an end of the turnover spring 247 of inserting logical described turning axle 224 and supporting.Described workholder 222 displacements remain on freely described opening 238 starting position in source 216 are taken place and described opening 239 is taken place towards described filmogen the upturned position in source 216 towards described filmogen.
As Figure 37 and shown in Figure 34, in described workpiece assembly unit 220, after the fixture supports frame 225 that described workholder 222 is installed is mounted, ball lead-frame (guiding elements, groove shape member) 250 screws 253 that screw togather by the screw hole 252 with the hold-down arm 251 that is formed on described fixture supports frame 225 are fixed in described fixture supports frame 225.Described ball lead-frame 250 forms to be had and will be set as long rectangular a pair of wall portion 254 to the direction parallel with described radial line 231 and the groove shape of the base plate 255 of described wall portion 254 is set continuously in described scarp 213 sides, and be provided with mounting in described Z-axis 212 sides of described base plate 255 and become to make steel ball (ball, damper weight) 258 ribs that do not roll (ball mounting portion) 256 with definite quality.
Secondly to describing based on effect of the present invention, effect.As shown in figure 37, the described ball lead-frame 250 of the workpiece assembly unit of installing along the slope on the scarp 213 of described vault 215 220 is with the slope identical with described scarp 213, for example with 30 ° of inclinations, but described steel ball 258 is by described Z-axis 212 sides of described rib 256 mountings in described ball lead-frame 250.Card ends member 260 by described Z-axis 212 sides configuration so that described card claw stop 263 with by the edge butt of turnover spring 247 to the described workholder 222 of the clockwise direction application of force.Described card claw stop 263 by described workholder 222 by on push away, the described portion 264 that is provided with is continuously pushed by the described wall portion 254 of described guiding groove 265 and produces friction.By this friction, centrifugal force works even described vault 215 rotates, and described card ends member 260 and also can not move to described peripheral direction.
As shown in figure 39, described workpiece assembly unit 220 is installed in described scarp 213 and described vault 215 rotates with first speed.From the filmogen of the lower position that is configured in described vault 215 source 216 radiation filmogens 217 take place, a film forming face of the described sheet glass 221 that appears at the described opening 238 from the described workholder 222 that remains in described starting position is implemented film forming.If finish film forming to a film forming face of described sheet glass 221, then temporarily stop to take place the emitting of filmogen in source 216 from filmogen, the speed of rotation of described vault 215 switches to than the described first fireballing second speed.As shown in figure 40, the centrifugal force of the vault 215 by described rotation, steel ball 258 is crossed described rib 256, and the right-hand member that ends the ball rolled portion 261 of member 260 at described card falls.The steel ball that falls 258 is by described centrifugal force and slope, rolls left on described ball rolled portion 261 and collides in described ball impact portions 262, makes described card end member 260 and is moved to the left.
As shown in figure 41, if described card ends that member 260 is moved to the left described card claw stop 263 from the clamped position skew of described workholder 222, then described workholder 222 rotates to clockwise direction by the reactive force of described turnover spring 247.As shown in figure 42, described workholder 222 remains on that the described locator protrusions 246 that is formed at described workholder base 233 is connected to the slicer 245 that is formed on described fixture supports frame 225 and the described upturned position of Rotate 180 °.As shown in figure 43, after 222 upsets of described workholder, from described filmogen source 216 radiation filmogens 217 take place, the film forming of being undertaken to the other film forming face of described sheet glass 221 by described opening 239 once more.Only change the speed of rotation of described vault 215 like this based on vacuum film formation apparatus 210 of the present invention, can keep the vacuum states in the described chamber 211 and directly implement film forming in the table to described sheet glass 221 continuously.
In addition, in said embodiment, described card ends member 260 and constitutes as follows, be that described card claw stop 263 is pushed up by described workholder 222, the described portion 264 that is provided with is continuously pushed by the described wall portion 254 of described guiding groove 265 and produces friction, by this friction, even described vault 215 rotations and centrifugal force works, described card ends member 260 and also can not move, but also can be provided with described card is ended the spring that member 260 is pushed to described rib 256 sides.And, used steel ball 258 as the damper weight that moves by centrifugal force, but replaced steel ball 258 also can use the ball (spheroid) of other materials based on second speed, also can be cylinder, polyhedron or the cubes of non-spheroid.
Described embodiment has used rib 256 as the ball mounting portion that is arranged on ball lead-frame 250, but as Figure 44 or shown in Figure 45, can be leg-of-mutton 2 tracks 268, as long as described steel ball 258 remains on described starting position with the centrifugal force based on described first speed, and move by centrifugal force based on described second speed, can be other shapes also just, for example can use cubes, can use friction plate as described ball mounting portion as described damper weight.
In the described embodiment, be installed in described fixture supports frame 225, so that the medullary ray 230 of described turning axle 223,224 becomes vertical with described radial line 231, but the sense of rotation of described workholder 222 is not limited thereto, as shown in figure 46, also can be set as the structure that described workholder 222 is installed on fixture supports frame 269, so that described medullary ray 230 becomes parallel with described radial line 231.
Secondly, other embodiment is described.When adding same-sign, omit the member identical with described embodiment explanation.As shown in figure 47, at the fixture supports frame 271 that constitutes workpiece assembly unit 270 maintaining part 273 that maintenance makes the switching mechanism 272 of described workholder 222 upsets is set.Described workholder 222 is bearing in described fixture supports frame 271 freely by pair of rotary shafts 223,274 (with reference to Figure 48) rotation, described workholder 222 is installed in described fixture supports frame 271, so that the medullary ray 230 of described turning axle 223,274 becomes vertical with described radial line 231.
As Figure 48 and shown in Figure 49, be formed with at described fixture supports frame 271: first slicer 275, it engages with the described locator protrusions 246 that is formed on described workholder 222 and described workholder 222 is remained on starting position; Second slicer 276, it engages with described locator protrusions 246 at the upturned position of described workholder 222 from described starting position Rotate 180 °.First gear 277 is pressed in the described turning axle 274, if described first gear, 277 Rotate 180s °, and then described workholder 222 Rotate 180s °.Described first gear 277 is seized on both sides by the arms by described maintaining part 273 with by holding plate 280 rotation that screw 279 is fixed on described maintaining part 273 freely with second gear 278 that is meshed.
Described first gear 277 constitutes described switching mechanism 272 with second gear unit 281.Second gear unit 281 comprises: described second gear 278; Arm member 285, it forms embedded hole 283,284 at two ends; Packing ring 286, itself and described second gear, 278 same thickness; Damper weight 287.Root in axle 288 both sides of being fixed in described second gear 278 forms the chimeric fitting portion 289 of described embedded hole 283 respectively, forms the riveted holes 290 of fixing described arm member 285 at described second gear 278.Make the described embedded hole 283 of 2 described arm member 285 each My Worlds be entrenched in 2 described fitting portions 289, and be configured to clamp described second gear 278 from both sides by 2 described arm members 285, and make riveted joint axle 292 be communicated in riveted holes 291 and the described riveted holes 290 that is formed on described arm member 285, described second gear 278 is fixed on the distolateral of 2 described arm members 285.
Screw 293 insert successively lead in: be formed on another distolateral embedded hole 284 of hole 294, the described arm member 285 of described damper weight 287, the hole 295 that is formed on described packing ring 286, second described arm member 285 embedded hole 284, be formed on the hole 294 of second described damper weight 287, and screw togather, thereby fix these members with nut 296.The described damper weight 287 of Gou Chenging is by the gravity of self thus, when making described second gear 278 rotation, make described second gear 278 push the first direction rotation of described first slicer 275 and described workholder 222 is set as the first location of described starting position and makes described second gear 278 push the second direction rotation of described second slicer 276 and described workholder 222 is set as become between the second position of described upturned position and moves freely to described locator protrusions 246 to described locator protrusions 246.
As shown in figure 50, himself gravity of described damper weight 287 is to the directive effect of A and described second gear 278 is rotated to clockwise direction B.The rotation of described second gear 278 is delivered to described first gear 277, and described first gear 277 makes described workholder 222 to rotation counterclockwise to counter clockwise direction C rotation.Described workholder 222 makes described locator protrusions 246 by being pressed in described first slicer 275 described workholder 222 be remained on described starting position.In this state, described vault 215 rotates with first speed, take place from described filmogen that source 216 emits filmogen and after a film forming face of described sheet glass 221 was implemented film forming, the speed of rotation of described vault 215 switched to than the described first fireballing second speed.
Shown in Figure 51, described damper weight 287 moves to the D direction from described first location by the centrifugal force of the described vault 215 of rotation.Described second gear 278 makes described first gear 277 rotate to clockwise direction F to counter clockwise direction E rotation.Described workholder 222 is to the clockwise direction rotation, and the described locator protrusions 246 that is formed on described workholder 222 is connected to described second slicer 276.Described workholder 222 remains on the upturned position from described starting position Rotate 180 °.If described workholder 222 remains on described upturned position, then from described filmogen source 216 takes place once more and emit filmogen, and implement film forming in the other film forming face of the described sheet glass 221 that is assemblied in described workholder 222.
Described embodiment is made of workholder 222 workholder base 233 and workholder cover 234, and be set as described sheet glass 221 is contained between these, but the structure of workholder 222 is not limited thereto, and also can suitably adopt best installation method to making film forming workpiece shape.
Claims (13)
1. workpiece roll-over unit is characterized in that having:
Workholder, its loading and unloading keep workpiece freely, this workpiece in table, be provided with make that the filmogen that disperses from filmogen generation source piles up by film forming face;
Supporting frame, it is fixed in the workpiece holding tray at the vacuum chamber internal rotation, and is freely supported described workholder by film forming face towards the upturned position rotation that the source takes place filmogen with another at a described starting position that the source is taken place towards filmogen by film forming face;
Switching mechanism, it has damper weight, and described workholder is switched between described starting position and described upturned position by moving of described damper weight, described damper weight is moved and automatically is bearing on the direction parallel with the sense of rotation of described workpiece holding tray, and under the action of inertia of the acceleration of following described workpiece holding tray or deceleration and move.
2. workpiece roll-over unit as claimed in claim 1 is characterized in that,
Described supporting frame has: first slicer that described workholder is remained on described starting position with the locator protrusions butt that is formed on described workholder; Described workholder is remained on second slicer of described upturned position with described locator protrusions butt.
3. workpiece roll-over unit as claimed in claim 2 is characterized in that,
Described damper weight is moving described locator protrusions freely to first location that described first slicer is pushed and between the second position that described second slicer is pushed under the effect of self gravitation.
4. as each described workpiece roll-over unit in the claim 1～3, it is characterized in that,
Described switching mechanism has: follower gear, its be fixed on one of the pair of rotary shafts of rotating the described workholder of ground axle suspension freely and with described workholder one rotation; Driving gear, it rotates freely that the earth's axis is supported on described supporting frame and with described follower gear engagement and make described workholder rotation; Arm member, it is the fixing described driving gear of side and in another distolateral fixing described damper weight at one end.
5. as each described workpiece roll-over unit in the claim 1～3, it is characterized in that,
Described switching mechanism has: pinion(gear), its be fixed on one of the pair of rotary shafts of rotating the described workholder of ground axle suspension freely and with described workholder one rotation; The tooth bar pair, it is arranged on described damper weight and with described pinion described workholder is rotated.
6. as each described workpiece roll-over unit in the claim 1～5, it is characterized in that,
Described switching mechanism respond described workpiece holding tray speed of rotation rapid variation and repeatedly carry out the upset of described workholder repeatedly so that a plurality of filmogens that multilayer is piled up in the table of described workpiece are alternately piled up.
7. workpiece assembly unit, it is assemblied in, and the axle around Z-axis switches and the vault of rotation with speed different more than two in the chamber of vacuum film formation apparatus, and has the scarp configuration of the workpiece of film forming two film forming face of shape along described vault,
Described workpiece assembly unit is characterised in that to have:
Workholder, its loading and unloading keep described workpiece freely, and a described film forming face starting position in source is being taken place and displacement another film forming face is being taken place between the upturned position in source freely towards described filmogen towards filmogen;
Damper weight, it remains on described starting position with described workholder when described vault rotates with first speed, make described workholder move to described upturned position at described vault under action of centrifugal force with than the rotation of the described first fireballing second speed time;
The fixture supports frame, it rotates the described workholder of ground axle suspension freely, and has the direction that works along described centrifugal force and move the guiding elements that guides described damper weight freely.
8. workpiece assembly unit as claimed in claim 7 is characterized in that,
Described fixture supports frame has the slicer that described workholder is remained on described upturned position with being formed on the locator protrusions butt of described workholder.
9. as claim 7 or 8 described workpiece assembly units, it is characterized in that having:
Turnover spring, it is to the direction application of force of described workholder to described upturned position;
Card ends member, the reactive force that its opposing is applied by described turnover spring, and described workholder card is ended at described starting position, and being pushed because of the mobile described damper weight of described centrifugal force, and the card of removing described workholder ends.
10. workpiece assembly unit as claimed in claim 9 is characterized in that,
Described damper weight is the ball with definite quality,
Described guiding elements is a groove shape member, and this groove shape member comprises that the direction that works along described centrifugal force erects a pair of wall portion that is provided with and be provided with the base plate of described wall portion continuously in described scarp side,
Be provided with the ball mounting portion of the described ball of mounting in the described Z-axis side of described base plate,
Described card ends member and comprises: the ball rolled portion, and this ball rolled portion is positioned in the base plate of described groove shape member, and the described ball under described ball mounting clan rolls and slides freely in the direction that described centrifugal force works in this ball rolled portion; Setting is arranged on the described ball mounting of the distance portion of a described ball rolled portion side far away and the ball impact portions that described ball collided of rolling; The card claw stop that stops the rotation of described workholder with described workholder butt.
11. workpiece assembly unit as claimed in claim 8 is characterized in that,
Have: be located at described fixture supports frame and engage with described locator protrusions and described workholder is remained on first slicer of described starting position; Described workholder is remained on second slicer of described upturned position,
Described damper weight makes described workholder to the first location of direction that described locator protrusions engages with described first slicer rotation with make that described workholder is mobile between the second position that the direction that described locator protrusions engage with described second slicer is rotated to be directed freely under the effect of self gravitation.
12. workpiece assembly unit as claimed in claim 11 is characterized in that having:
First gear, its be fixed on one of the pair of rotary shafts of rotating the described workholder of ground axle suspension freely and with described workholder one rotation;
Second gear, its rotate freely that the earth's axis is supported on described fixture supports frame and with described first toothing to the described first gear transmission revolving force;
Arm member, it is fixing described second gear of side and in another distolateral fixing described damper weight at one end,
In described damper weight in described first location and at described vault during with the rotation of described first speed, under the effect of the gravity of the described damper weight that is positioned at described first location, described workholder is remained on described starting position, when described vault rotates with described second speed, under action of centrifugal force, described damper weight moves to the described second position, and described second gear rotates, described locator protrusions engages with described second slicer, and described workholder is remained on described upturned position.
13. a vacuum film formation apparatus is characterized in that,
Have each described workpiece assembly unit in the claim 7～12,
When making described vault, implement film forming, then, make described vault after making the workpiece upset, implement film forming in another film forming face with described second speed rotation in a film forming face of described workpiece with the rotation of first speed.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009128726A JP2010275584A (en) | 2009-05-28 | 2009-05-28 | Vacuum vapor deposition apparatus and workpiece attaching unit |
| JP2009-128726 | 2009-05-28 | ||
| JP2009215173A JP5238657B2 (en) | 2009-09-17 | 2009-09-17 | Work reversing unit |
| JP2009-215173 | 2009-09-17 |
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| Publication Number | Publication Date |
|---|---|
| CN101899648A true CN101899648A (en) | 2010-12-01 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201010188299 Pending CN101899648A (en) | 2009-05-28 | 2010-05-25 | Workpiece roll-over unit, vacuum film formation apparatus and workpiece assembly unit |
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| CN (1) | CN101899648A (en) |
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| CN102644058A (en) * | 2012-04-23 | 2012-08-22 | 北京遥测技术研究所 | Substrate overturning device for vacuum coating equipment |
| CN104404471A (en) * | 2014-11-14 | 2015-03-11 | 广西大学 | Multifunctional clamp for preparation of PVD and CVD coatings and method thereof |
| CN104775099A (en) * | 2014-01-11 | 2015-07-15 | 烟台力凯电子科技有限公司 | Turnover-type sputtering coater |
| CN106774218A (en) * | 2017-01-10 | 2017-05-31 | 深圳市思榕科技有限公司 | A kind of equipment prescription system |
| CN107313001A (en) * | 2017-08-18 | 2017-11-03 | 上海克来机电自动化工程股份有限公司 | A kind of turning device |
| CN117144301A (en) * | 2023-10-10 | 2023-12-01 | 苏州佑伦真空设备科技有限公司 | Experimental vacuum evaporator |
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| JP2008240105A (en) * | 2007-03-28 | 2008-10-09 | Showa Shinku:Kk | Substrate holder, film deposition apparatus, and film deposition method |
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| CN1690244A (en) * | 2004-04-30 | 2005-11-02 | 鸿富锦精密工业（深圳）有限公司 | Vacuum coating device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102644058A (en) * | 2012-04-23 | 2012-08-22 | 北京遥测技术研究所 | Substrate overturning device for vacuum coating equipment |
| CN104775099A (en) * | 2014-01-11 | 2015-07-15 | 烟台力凯电子科技有限公司 | Turnover-type sputtering coater |
| CN104775099B (en) * | 2014-01-11 | 2017-05-17 | 烟台力凯智能科技有限公司 | Turnover-type sputtering coater |
| CN104404471A (en) * | 2014-11-14 | 2015-03-11 | 广西大学 | Multifunctional clamp for preparation of PVD and CVD coatings and method thereof |
| CN106774218A (en) * | 2017-01-10 | 2017-05-31 | 深圳市思榕科技有限公司 | A kind of equipment prescription system |
| CN107313001A (en) * | 2017-08-18 | 2017-11-03 | 上海克来机电自动化工程股份有限公司 | A kind of turning device |
| CN107313001B (en) * | 2017-08-18 | 2019-03-01 | 上海克来机电自动化工程股份有限公司 | A kind of turnover device |
| CN117144301A (en) * | 2023-10-10 | 2023-12-01 | 苏州佑伦真空设备科技有限公司 | Experimental vacuum evaporator |
| CN117144301B (en) * | 2023-10-10 | 2024-01-23 | 苏州佑伦真空设备科技有限公司 | Experimental vacuum evaporator |
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