CN101893568A - 环境洁净度监测设备 - Google Patents
环境洁净度监测设备 Download PDFInfo
- Publication number
- CN101893568A CN101893568A CN 200910084610 CN200910084610A CN101893568A CN 101893568 A CN101893568 A CN 101893568A CN 200910084610 CN200910084610 CN 200910084610 CN 200910084610 A CN200910084610 A CN 200910084610A CN 101893568 A CN101893568 A CN 101893568A
- Authority
- CN
- China
- Prior art keywords
- monitoring equipment
- environment cleanliness
- light
- cleanliness monitoring
- environment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003749 cleanliness Effects 0.000 title claims abstract description 99
- 238000012544 monitoring process Methods 0.000 title claims abstract description 66
- 230000003287 optical effect Effects 0.000 claims description 49
- 238000004140 cleaning Methods 0.000 claims description 21
- 230000005540 biological transmission Effects 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 abstract description 16
- 239000004973 liquid crystal related substance Substances 0.000 abstract description 4
- 239000010409 thin film Substances 0.000 abstract description 3
- 239000000428 dust Substances 0.000 description 40
- 230000000694 effects Effects 0.000 description 15
- 239000012535 impurity Substances 0.000 description 11
- 238000010586 diagram Methods 0.000 description 8
- 239000002245 particle Substances 0.000 description 7
- 230000003760 hair shine Effects 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 6
- 238000002834 transmittance Methods 0.000 description 6
- 238000005286 illumination Methods 0.000 description 5
- 230000007812 deficiency Effects 0.000 description 4
- 230000001105 regulatory effect Effects 0.000 description 4
- 230000001235 sensitizing effect Effects 0.000 description 4
- 230000000087 stabilizing effect Effects 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 230000035807 sensation Effects 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000011897 real-time detection Methods 0.000 description 1
Images
Landscapes
- Geophysics And Detection Of Objects (AREA)
Abstract
Description
Claims (14)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 200910084610 CN101893568B (zh) | 2009-05-19 | 2009-05-19 | 环境洁净度监测设备 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 200910084610 CN101893568B (zh) | 2009-05-19 | 2009-05-19 | 环境洁净度监测设备 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101893568A true CN101893568A (zh) | 2010-11-24 |
CN101893568B CN101893568B (zh) | 2013-04-24 |
Family
ID=43102830
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN 200910084610 Expired - Fee Related CN101893568B (zh) | 2009-05-19 | 2009-05-19 | 环境洁净度监测设备 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN101893568B (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013181819A1 (zh) * | 2012-06-06 | 2013-12-12 | 深圳市华星光电技术有限公司 | 液晶生产设备的内部环境检测系统及方法 |
CN107817224A (zh) * | 2017-09-28 | 2018-03-20 | 保定立中东安轻合金部件制造有限公司 | 泡沫过滤网检测仪器及其检测方法 |
CN108292465A (zh) * | 2015-10-05 | 2018-07-17 | 概念形成有限公司 | 卫生推动系统 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201034933Y (zh) * | 2007-05-18 | 2008-03-12 | 北京中检康安科技有限公司 | 光电检测器 |
CN101109704A (zh) * | 2007-08-03 | 2008-01-23 | 聚光科技(杭州)有限公司 | 一种应用新型滤光片的激光粉尘仪的检测和标定方法 |
CN201210132Y (zh) * | 2008-06-04 | 2009-03-18 | 太原中绿环保技术有限公司 | 激光后向散射测尘仪 |
-
2009
- 2009-05-19 CN CN 200910084610 patent/CN101893568B/zh not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013181819A1 (zh) * | 2012-06-06 | 2013-12-12 | 深圳市华星光电技术有限公司 | 液晶生产设备的内部环境检测系统及方法 |
CN108292465A (zh) * | 2015-10-05 | 2018-07-17 | 概念形成有限公司 | 卫生推动系统 |
CN107817224A (zh) * | 2017-09-28 | 2018-03-20 | 保定立中东安轻合金部件制造有限公司 | 泡沫过滤网检测仪器及其检测方法 |
Also Published As
Publication number | Publication date |
---|---|
CN101893568B (zh) | 2013-04-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN202471015U (zh) | 一种积尘检测装置 | |
JP5349759B2 (ja) | 液体検知センサ | |
CN101893568B (zh) | 环境洁净度监测设备 | |
CN101958263B (zh) | 半导体晶粒点测机台检验方法及该机台 | |
CN101004879B (zh) | 显示屏检测方法及装置 | |
CN208206728U (zh) | 一种传感器自动老化标定系统 | |
CN106249089A (zh) | 故障检测装置及方法 | |
CN201233264Y (zh) | 探头为热敏电阻的液位传感器及其液位测量装置 | |
CN106781339A (zh) | 一种燃气报警器检测装置及其方法 | |
JPH07175984A (ja) | 光電式感知器及び火災感知システム | |
WO1999057693A1 (en) | Sensor device providing indication of device health | |
JP5818758B2 (ja) | Plcシステム | |
CN203489902U (zh) | 一种具有自检功能的检测器及检测系统 | |
JP5046266B2 (ja) | 検出装置 | |
CN210571032U (zh) | 一种用于受限空间的热灾害检测装置 | |
JP2016023994A (ja) | 電子部品搬送装置および電子部品検査装置 | |
CN110681443B (zh) | 磨浆机砂轮间隙调整装置 | |
KR20080073111A (ko) | 터치보드 장애 표시 장치 및 방법 | |
CN203773368U (zh) | 流量自动监控装置 | |
CN205645206U (zh) | 用于检测显示屏电流过载的装置 | |
CN220239330U (zh) | 一种高速筛选机检测设备 | |
JP2007147519A (ja) | 粒子計数装置及び粒子計数システム | |
CN105606199B (zh) | 一种光感玻璃球筛盘振幅检测仪 | |
CN221131473U (zh) | 一种脉冲喷吹控制仪智能监控系统 | |
US4951030A (en) | Monitoring system |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY Effective date: 20150626 Owner name: JINGDONGFANG SCIENCE AND TECHNOLOGY GROUP CO., LTD Free format text: FORMER OWNER: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY CO., LTD. Effective date: 20150626 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20150626 Address after: 100015 Jiuxianqiao Road, Beijing, No. 10, No. Patentee after: BOE TECHNOLOGY GROUP Co.,Ltd. Patentee after: BEIJING BOE OPTOELECTRONICS TECHNOLOGY Co.,Ltd. Address before: 100176 No. 8 West Central Road, Beijing economic and Technological Development Zone, Beijing Patentee before: BEIJING BOE OPTOELECTRONICS TECHNOLOGY Co.,Ltd. |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130424 |
|
CF01 | Termination of patent right due to non-payment of annual fee |