CN101887160B - Supporting system for machining of large-caliber space optical reflectors - Google Patents

Supporting system for machining of large-caliber space optical reflectors Download PDF

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CN101887160B
CN101887160B CN 201010214560 CN201010214560A CN101887160B CN 101887160 B CN101887160 B CN 101887160B CN 201010214560 CN201010214560 CN 201010214560 CN 201010214560 A CN201010214560 A CN 201010214560A CN 101887160 B CN101887160 B CN 101887160B
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supporting
support
detection
space optical
catoptron
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CN101887160A (en
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黄启泰
余景池
张耀明
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Suzhou University
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Suzhou University
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Abstract

The invention discloses a supporting system for the machining of large-caliber space optical reflectors, which comprises a machining supporting device, a detection supporting device and a conversion mechanism (2), wherein the conversion mechanism is arranged on the upper surface of a machining supporting bottom plate (1), and supports the detection supporting device; the bottom plate of a detection supporting frame (8) is provided with a floating active supporting mechanism (6), a rigid supporting rod penetration hole (4) and a counter weight penetration hole (7); a rigid supporting rod (3) supports a work piece through the rigid supporting rod penetration hole in the machining of the reflector; and in detection, the conversion mechanism holds the detection supporting device up and the floating active supporting mechanism supports the work piece. By adopting a supporting way and a supporting structure which are mutually independent and adjustable, the supporting system can design schemes and accurately regulate supporting forces at each supporting point according to own characteristics of the reflectors to be machined, and also can regulate surface shape errors, caused by gravity deformation, of the reflectors to be acceptable for space usage, thereby greatly reducing ground detection errors.

Description

The support system that is used for large-caliber space optical reflectors processing
Technical field
The present invention relates to the support technology of a kind of large-aperture optical catoptron in processing and detection, belong to processing of ultraprecise optics and detection range.
Background technology
Development along with optical technology; The bore of processed optical mirror constantly increases; The supported design of catoptron and enforcement become a very important sport technique segment; This is because the distortion of catoptron self will directly have influence on minute surface face shape under action of gravity, and when such distortion acquires a certain degree after, can make a big impact and directly influence final mirror image quality detecting and processing.
Large diameter optical mirror face supporting way commonly used at present mainly contains single-row multiple row support, multi-point support.
Single-row support is meant circular optical mirror is lain in a horizontal plane on the very narrow cylindrical support ring that the radius of support ring is smaller or equal to the optical mirror radius.Catoptron is being placed on the support ring of complete " freedom ", is a kind of supporting way of passive support.Research shows, what support ring was positioned at catoptron radius 2/3 locates to be the maximum support position.When single-row support can not be satisfied the surface deformation requirement, then can adopt multiple row to support, as being disbursed from the cost and expenses pushing out ring when being separately positioned on optical mirror 1/3 endless belt, 2/3 endless belt and edge with three, they have born 0.253,0.484 and 0.263 of mirror general assembly (TW) separately.The Support Position is not what be uniformly distributed with under this supporting way, supports to be prone between the endless belt local gravity distortion takes place, and is difficult to satisfy the requirement of complete discharge gravity.
Multi-point support is to adopt a plurality of strong points to bear the gravity of catoptron, like supported at three point, 6 supports, 9 supports etc.As everyone knows, 3 surfaces that can support Any shape on same straight line not, if add the 4th strong point then need accurately adjust, this is difficulty very.So the simplest supporting way is that catoptron directly is placed on three rigid support points, can three strong points be distributed on the same circumference for the rotational symmetry optical mirror.In fact, three rigid support points only can play positioning action, then are difficult to guarantee that its deflection is controlled in the tolerance interval as all being used to bear catoptron gravity.If on three fixed support points, triangle bracket is installed respectively, adopt the connection of bulb hinge between carriage and the fixed support point and on each summit of carriage, indication is set, so just become the support that two-layer 3 * 3=9 is ordered.Can be extended to multi-point support such as 27 points, by that analogy at 81.This simple in structure clear; Performance is also more stable, but confirms that the distribution of anchorage force on (supporting construction and catoptron are confirmed) each strong point is just definite in case its shortcoming is a system, can't intervene; Can't proofread and correct for local large deformation, also be a kind of passive supported design.
Above-mentioned method for supporting has all been realized successful Application in the telescopical large diameter optical mirror face manufacturing of ground; But do not see that success is used for the pertinent literature of spacing reflection mirror processing; Its reason is that passive supporting way anchorage force can't human intervention by the automatic distribution of system; Therefore be difficult to make the stress of optical mirror to approach the zero-g state, local large deformation is difficult to proofread and correct.
In sum, though separate multi-point support can freely be arranged supporting point position with apply the anchorage force size, rationally proofread and correct each regional local deformation but adjustment is complicated, be under the equilibrium state in system and can't bear tonnage, bring difficulty to processing.Another kind of multi-point support design is that all strong points all are installed in on one deck; Separate; Utilize lever principle that the strong point and weight are arranged on the two ends of lever, realize the anchorage force at adjustment strong point place through changing the weight end arm of force, the anchorage force at each strong point place is all independent adjustable.This supporting way in the adjustment with anchorage force of arranging of the strong point relatively flexibly; But its shortcoming also very obviously is a system reach the after-applied any external force of mechanical balance state all can the destruction of balance state; Thereby can't bear the pressure of machining tool, inapplicable processing.
Simultaneously, because detection is depended in the processing of mirror mirror, detection therefore reasonable in design is supported and is effectively implemented and seems particularly important.For optical mirror, best supported design should be can realize processing, detection adopts identical support scheme with practical application, promptly can the external environment condition of above-mentioned three kinds of states be unified.The processing detection of ground telescope principal reflection mirror and user mode ratio are easier to unified; But the space-based Space Optical System then can't realize; This is in weightlessness of space or microgravity environment, to work because of spacing reflection mirror, and the mechanical environment on space and ground is different fully.The consistance of face shape in the face shape that as long as the catoptron of based optical systems can guarantee to detect and the holding state basically identical that uses can guarantee to accomplish processing in a sense and actual the use; Deformation control to minute surface itself does not need very strict; And to realize ground accomplish after the processing reflecting mirror surface shape with get into space back shape and be consistent and just must guarantee that its technical difficulty is based optical systems much larger than ground through the accurate support power of unloading.
Summary of the invention
The objective of the invention is to change the existing limitation of supporting way of present large-aperture optical catoptron processing; Provide a kind of and be used for space large caliber optical mirror processing and can have enough anchorage forces to bear tonnage, eliminate the support system of gravity deformation during detection basically near the weightless stress in space.
For reaching the foregoing invention purpose; The technical scheme that the present invention adopts is: a kind of support system that is used for large-caliber space optical reflectors processing is provided; Comprise the process support device of forming by process support base plate and rigid supporting rod, also comprise and detect bracing or strutting arrangement and throw-over gear; Described detection bracing or strutting arrangement comprises detection support frame and floating active supporting mechanism; Detect on the base plate of support frame floating active supporting mechanism is installed, have also on the base plate that rigid supporting rod is passed the hole and weight passes the hole; Detect bracing or strutting arrangement and supported by throw-over gear, be installed in the top of process support device, rigid supporting rod is passed the hole through rigid supporting rod and is added the supporting workpiece in man-hour at large-caliber space optical reflectors; Throw-over gear be fixedly mounted on the process support base plate above, when large-caliber space optical reflectors detects, will detect bracing or strutting arrangement and hold up, by the floating active supporting mechanism supporting workpiece.
Described detection bracing or strutting arrangement, the method that floating active supporting mechanism is installed on the base plate of its detection support frame comprises the steps:
(1) confirm that three strong points carry out detection and location as the fixed support point to large-caliber space optical reflectors, these 3 are uniformly distributed with on same circumference, and anchorage force equates;
Power such as (2) position of tentatively definite other each unsteady strong point, the anchorage force of each unsteady strong point are are uniformly distributed with, and press ∑ F n+ 3F z=G, wherein: F nBe the anchorage force of each unsteady strong point, F zBe the anchorage force at three fixed support point places, G is the gravity that catoptron receives, and obtains the initial boundary condition of catoptron to be processed;
The initial boundary condition of the catoptron to be processed that (3) will confirm adopts finite element method, obtains the surface deformation result under the initial support state;
(4) by the identical method of the anchorage force that is distributed in the strong point on the same circumference; The anchorage force of adjustment unsteady number of support points, Support Position and each strong point; Treat the initial boundary condition of machined mirrors and carry out the iteration optimization processing, obtain the final boundary condition of catoptron to be processed.
Described throw-over gear is three hydraulic jack and the control system that are installed under the base plate that detects support frame.
Described floating active supporting mechanism comprises the unsteady strong point, lever arm, weight and fine-tuning nut.
Compared with prior art, the present invention has following tangible advantage:
1, the present invention has adopted separate adjustable supporting way and supporting construction in detecting bracing or strutting arrangement; Can and carry out the accurate adjustment of each strong point place anchorage force according to the own characteristic design proposal of the catoptron of required processing; Can the face shape error that catoptron causes because of gravity deformation be adjusted to the space and use acceptable state, reduce the ground detection error greatly.
2, the present invention adopts two cover support subsystem to form, and can realize respectively detecting and support and process support, and can overlap conversion fast between subsystems two, under the prerequisite that guarantees machining precision, has improved conversion efficiency and conversion security greatly.
3, adopt support system provided by the present invention, in processing and the transfer process that detects, the position of catoptron is only along detecting light path light axis direction generation translation, therefore detects light path and need not to adjust repeatedly and can reach the detection requirement, improves detection efficiency greatly.
Description of drawings
Fig. 1 is a kind of structural profile synoptic diagram that is used for the support system of large-caliber space optical reflectors processing that the embodiment of the invention provides;
Wherein, 1, process support base plate; 2, throw-over gear; 3, rigid supporting rod; 4, support bar passes the hole; 5, the unsteady strong point; 6, floating active supporting mechanism; 7, weight passes the hole; 8, detect support frame.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is further described.
Embodiment one:
Referring to accompanying drawing 1, it is a kind of structural profile synoptic diagram that is used for the support system of large-caliber space optical reflectors processing that present embodiment provides.Can be seen that by Fig. 1 the catoptron workpiece sensing adopts two cover support systems respectively with processing, rigid supporting rod 3 is installed on the process support base plate 1, forms the process support device, and this device adopts the passive support of rigidity, is used to the power of providing support and bears tonnage; Detect support frame 8 and floating active supporting mechanism 6; Form and detect bracing or strutting arrangement, on the base plate of detection support frame 8 floating active supporting mechanism 6 is installed, three strong points wherein are the fixed support point; They are evenly distributed on same circumference, and anchorage force equates; Also having rigid supporting rod on the base plate passes hole 4 and passes hole 7 with weight; Detect bracing or strutting arrangement and adopt the Active support of floating,, be used to unload carrying force and eliminate distortion by the unsteady strong point 5 supporting workpieces; Two cover bracing or strutting arrangements are implemented under the situation that does not change the catoptron laying state quick conversion each other through throw-over gear; In the present embodiment, 3 hydraulic jack 2 are adopted in throw-over gear, are fixedly mounted on the process support base plate 1; Simultaneously; To detect support frame 8 and fix on it and picking-up, by its motion of control system control, rigid supporting rod 3 is passed hole 4 through rigid supporting rod and is added the supporting workpiece in man-hour at large-caliber space optical reflectors; Throw-over gear will detect bracing or strutting arrangement and hold up when workpiece sensing, by floating active supporting mechanism 6 supporting workpieces.This support system can realize process support and the automatic conversion that detects holding state, has improved conversion efficiency greatly.
The design of process support considers that mainly each zone bears the ability of tonnage, and the strong point need be uniformly distributed with and adopt rigid support, because gravity deformation is very little to the influence of processing itself, when design, can give no thought to.The rigid supporting rod of process support device passed the support frame that detects bracing or strutting arrangement and through throw-over gear the rigid support base plate is connected with support frame form a whole set of support system.
Detect bracing or strutting arrangement with three fixed support points as the catoptron anchor point; The separate power of providing support of other strong points; Arrange and the application of force size of the strong point are carried out preanalysis through FEM calculation, require to realize surface deformation amount PV≤λ/20 (λ is a 632.8nm He-Ne Lasers wavelength).Detect bracing or strutting arrangement and adopt floating active supporting mechanism, be the adjustable support of lever, comprise the float strong point 5, lever arm, weight and fine-tuning nut, guarantee the equal accurate and adjustable of anchorage force at each strong point place.Hollow out design in support frame bottom surface detects and has support bar on the base of support frame 8 and pass hole 4 and pass hole 7 with weight, so that the suspension weight passes through with the rigid supporting rod that allows process support.
Throw-over gear is the stable jacking system of a cover, realizes the mutual conversion of two cover bracing or strutting arrangements through the up-down detection subsystem.When catoptron detects, throw-over gear will detect bracing or strutting arrangement and rise, and realize the support to catoptron by detecting supporting mechanism, and this state can be eliminated the influence of gravity deformation down, obtains face shape testing result accurately; Add and to detect bracing or strutting arrangement man-hour and put down, accept the support of catoptron and enough rigidity are provided, can bear tonnage by the process support device.
The practical implementation step is following:
1, process support Design of device, processing and assembling
(1) according to the mirror back surface lightweight structure with detect the strong point and arrange, the position of arranging of design rigid support point, owing to need not considering problem on deformation, so supporting point position to arrange to be uniformly distributed be principle.
(2) machine supporting baseplate and rigid supporting rod, and support bar is installed in the base plate relevant position.
2, detect design, processing and the assembling of bracing or strutting arrangement
(1) according to the back side lightweight structure of the spacing reflection mirror of required processing; Anchorage force according to circle distribution primary design supporting point position and strong point place; Choose therein and be three strong points that are uniformly distributed with on the same circumference, their anchorage force equates, as fixed support point catoptron is positioned; Other strong point is as the strong point that floats, the unsteady strong point also according to the mirror back surface lightweight structure according to annular spread on different circumference.The application of force principle at strong point place is: ∑ F n+ 3F z=G, wherein F nBe the anchorage force of each unsteady strong point, F zBe the anchorage force at three fixed support point places, G is the gravity that catoptron receives.Under the starting condition each unsteady strong point anchorage force according to etc. power be uniformly distributed with, obtain the initial boundary condition (stressed and constraint) of catoptron to be processed.
(2) the initial boundary condition with above-mentioned catoptron adopts the finite element process software to carry out modeling, and carries out analyzing and processing, obtains the surface deformation result under the initial support state.According to the surface deformation situation, the anchorage force through adjustment number of support points, Support Position and each strong point is optimized support scheme.Three principles are followed in the optimization of support scheme:
A. the strong point anchorage force on the same circumference is identical;
B. the zone that deflection is big increases the quantity and the anchorage force of this zone strong point, and the zone that deflection is little reduces this regional number of support points and anchorage force;
C. the surface density of the catoptron after the lightweight is inhomogeneous, and the zone that surface density is big increases anchorage force, and the zone that surface density is little reduces anchorage force.
(3) according to mentioned above principle with optimize the support scheme of direction and carry out repeatedly computation optimization catoptron, till the deflection that support scheme can meet the demands.
(4) design detects supporting construction and support frame, and carries out both assemblings.
3, the safe interferometer that is installed in of process support base plate is detected tower bottom, three hydraulic lifting lifting jack peaces are uniformly distributed with for 120 ° are installed on the base plate, will detect the safe arrangement of support frame more again on the lifting jack elevating lever.So far support system assembling is accomplished.According to The results, the anchorage force that detects each strong point place on the bracing or strutting arrangement is adjusted to designing requirement.
4, fall the detection bracing or strutting arrangement, catoptron is positioned on the process support rigid supporting rod according to set angle, can process catoptron under this state.Slowly evenly rise three hydraulic jack, make the equal contact reflex mirror of each strong point back side gradually the power of providing support know that catoptron breaks away from the process support device fully, this moment, catoptron got into detected state.Through going up and down to detect the quick conversion that bracing or strutting arrangement can realize detecting support and process support state.
Good effect is supported and has obtained in spacing reflection mirror processing and detection that this support system is used for about bore 1m.
The catoptron bore is 1.07m, micro crystal material, and the centre has light hole, and has carried out the lightweight processing, and the back side has processed 156 not lightweight holes of even depth altogether, and weight reduction rate reaches more than 50%.Concrete parameter is seen table 1.
Table 1 non-spherical reflector parameter
Bore Material Density (T/mm 3) Quality (kg) Poisson ratio Elastic modulus
1070mm Crystallite 2.52e-9 188.8 0.4 9e4Gpa
Utilize mechanical drawing software (like CATIA) to set up the catoptron geometric model, and adopt Finite Element Method to handle (like software PATRAN), adopt ten node tetrahedron elements to carry out the grid discretization of model.Node surplus the life of model common property has 220,000, surplus in the of 130,000 a unit.
To this catoptron model, 30 supports of primary design, 42 supports, 48 are supported and 54 supports, and on different circumference, and the anchorage force of adjusting each strong point under the different supporting way carries out, and a large amount of finite element simulations calculates and contrast with each strong point planning.
According to 3 principles of confirming planes, in finite element model, 3 that choose the circumference symmetry as the fixed constraint point, the degree of freedom of three directions of about beam steering mirror, and other strong point places unload catoptron gravity through applying static(al).Application of force principle is:
∑F n+3F z=G
F wherein nBe the anchorage force of each unsteady strong point, F zBe the anchorage force at three fixed support point places, G is the gravity that catoptron receives.
Respectively the supported design of above-mentioned four kinds of number of support points is carried out FEM calculation and analysis under operating mode such as support such as the power of grade, application of force distribution and result of calculation are following:
1,30 supports in mirror bottom surface
The support distribution situation:
The strong point is distributed on 4 circumference; 6 places on
Figure BSA00000185852100081
350; 6 places on
Figure BSA00000185852100082
570; 6 places on
Figure BSA00000185852100083
790; 1; 12 places on 010, strong point application of force 61.4N floats.
Result of calculation:
Minute surface largest deformation 1.21e-4mm
The minimum deformation 6.03e-5mm of minute surface
Minute surface PV value 6.07e-5mm
2,42 supports in catoptron bottom surface
The support distribution situation:
The strong point is distributed on 5 circumference; 6 places on
Figure BSA00000185852100085
430; 6 places on
Figure BSA00000185852100086
600; 6 places on
Figure BSA00000185852100087
815; 6 places on
Figure BSA00000185852100088
850; 1; 18 places on 010, strong point application of force 43.9N floats.
Result of calculation:
Minute surface largest deformation 6.98e-5mm
The minimum deformation 1.40e-5mm of minute surface
Minute surface PV value 5.58e-5mm
3,45 supports in catoptron bottom surface
The support distribution situation:
The strong point is distributed on 6 circumference; 6 places on 350; 6 places on
Figure BSA000001858521000812
600 of 3 places on 430; 6 places on
Figure BSA000001858521000813
815; 6 places on
Figure BSA000001858521000814
850;
Figure BSA000001858521000815
1; 18 places on 010, strong point application of force 40.9N floats.
Result of calculation:
Minute surface largest deformation 3.91e-5mm
The minimum deformation 1.22e-5mm of minute surface
Minute surface PV value 2.69e-5mm
4,51 places, catoptron bottom surface support
The support distribution situation:
The strong point is distributed on 7 circumference; 6 places on
Figure BSA000001858521000816
350; 6 places on 430; 6 places on
Figure BSA000001858521000818
600; 6 places on 815; 6 places on 850; 3 places on 890;
Figure BSA000001858521000822
1; 18 places on 010, strong point application of force 36.1N floats.
Result of calculation:
Minute surface largest deformation 7.03e-5mm
The minimum deformation 9.38e-6mm of minute surface
Minute surface PV value 6.09e-5mm
Above-mentioned several kinds of operating modes are compared see table 2:
Several kinds of surface deformations that support under the operating mode of table 2 compare
Number of support points The minute surface maximum distortion The minute surface minimal deformation Minute surface PV value
30 1.21e-4mm 6.03e-5mm 6.07e-5mm
42 6.98e-5mm 1.40e-5mm 5.58e-5mm
45 3.91e-5mm 1.22e-5mm 2.69e-5mm
51 7.03e-5mm 9.38e-6mm 6.09e-5mm
Can know by the The above results comparison, increase the strong point and help improving the influence of gravity minute surface face shape.But the anchorage force that after being increased to some, applies owing to point that each is floated diminishes gradually; Can not effectively unload the primary mirror self gravitation at regional area; Big poor trend has appearred becoming in surface deformation amount on the contrary; So we need choose optimized number of support points and the big or small combination of anchorage force is effectively improved face shape, meet the demands.
Through FEM calculation optimization, finally take following support scheme:
6 supports of
Figure BSA00000185852100091
350 circumference; 3 supports of
Figure BSA00000185852100092
430 circumference; 6 supports of
Figure BSA00000185852100093
600 circumference; 6 supports of
Figure BSA00000185852100094
815 circumference; 6 supports of
Figure BSA00000185852100095
850 circumference; Wherein three fixed support points are positioned at
Figure BSA00000185852100096
850 circumference; Each the circumference float strong point application of force 39.57 newton; 18 supports on
Figure BSA00000185852100097
1010 circumference; The application of force 43 newton on each unsteady strong point, the catoptron residual gravity is born by three fixed support points.Calculating minute surface PV value is 1.21e-5mm.
After scheme is confirmed, according to catoptron self structure design support frame and strong point supporting mechanism.The supporting mechanism at strong point place adopts the lever weighting principle, can accurately adjust the anchorage force on each strong point through adjustment weight quality and afterbody knob position.Support frame and strong point supporting mechanism are assembled into the detection bracing or strutting arrangement.
Bore 1.07m spacing reflection mirror detects in this processing and accomplishes final surface shape in support system and repair throwing, surface figure accuracy reach RMS1/40 λ (=632.8nm).

Claims (3)

1. a support system that is used for large-caliber space optical reflectors processing comprises the process support device of being made up of process support base plate and rigid supporting rod, it is characterized in that: it also comprises detects bracing or strutting arrangement and throw-over gear (2); Described detection bracing or strutting arrangement comprises detection support frame (8) and floating active supporting mechanism (6); Detect on the base plate of support frame (8) floating active supporting mechanism (6) is installed, have also on the base plate that rigid supporting rod is passed hole (4) and weight passes hole (7); Detect bracing or strutting arrangement and supported by throw-over gear (2), be installed in the top of process support device, rigid supporting rod (3) is passed hole (4) through rigid supporting rod and is added the supporting workpiece in man-hour at large-caliber space optical reflectors; Throw-over gear (2) be fixedly mounted on process support base plate (1) above, when large-caliber space optical reflectors detects, will detect bracing or strutting arrangement and hold up, by floating active supporting mechanism (6) supporting workpiece.
2. a kind of support system that is used for large-caliber space optical reflectors processing according to claim 1 is characterized in that: described throw-over gear is three hydraulic jack and the control system that are installed under the base plate that detects support frame.
3. a kind of support system that is used for large-caliber space optical reflectors processing according to claim 1, it is characterized in that: described floating active supporting mechanism (6) comprises the unsteady strong point (5), lever arm, weight and fine-tuning nut.
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