CN101882568B - Division mechanism - Google Patents
Division mechanism Download PDFInfo
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- CN101882568B CN101882568B CN2010102190708A CN201010219070A CN101882568B CN 101882568 B CN101882568 B CN 101882568B CN 2010102190708 A CN2010102190708 A CN 2010102190708A CN 201010219070 A CN201010219070 A CN 201010219070A CN 101882568 B CN101882568 B CN 101882568B
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- motor
- division mechanism
- encoder
- dish
- vacuum control
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Abstract
The invention discloses a division mechanism, comprising a B disk division plane for placing materials, a division fixing shaft of which one end is connected with the B disk division plane; a vacuum control device connected with the other end of the division fixing shaft and used for controlling the materials to be adsorbed on the B disk division plane, a motor fixing seat matched with the vacuum control device, and a motor arranged below the motor fixing seat, wherein an output shaft of the motor is connected with a main shaft of the vacuum control device, and the motor is provided with an encoder; and the encoder is used for detecting whether the materials are positioned on the B disk division plane. Seen from the technical scheme, in the invention, since the motor directly drives the B disk division plane and the vacuum control device to carry out division operation, the accumulated error is little, and the drive is precise. In addition, since the control behaviour of the motor is realized through an internally-arranged encoder, the detection of the position is more accurate.
Description
Technical field
The present invention relates to semiconductor production manufacturing equipment field, more particularly, relate to a kind of B dish division mechanism.
Background technology
Traditional B dish division mechanism adopts cam mechanism to realize the mode of being synchronized with the movement; B dish division mechanism as depicted in figs. 1 and 2; Comprise: axle 101, cut apart card 102, go into power rotating shaft 103, vacuum (-tight) housing 104 and vacuum chamber seat 105, axle 101 with cut apart card and link to each other with vacuum (-tight) housing 104, vacuum chamber seat 105 links to each other with vacuum (-tight) housing 104; The motor transmission mechanism rotates through going into power rotating shaft 103 driving cam means 106; Cam mechanism 106 drives axle 101 and does intermittent movement, cuts apart card 102 and under axle 101 drives, does the calibration action, accomplishes needed station.Vacuum (-tight) housing 104 cooperates vacuum chamber seat 105 to do the vacuum switching, and the assurance material is being cut apart on the card 102 and can stablized.Cut apart when action, go into power rotating shaft 103 by belt gear drive cut apart card 102, axle 101, vacuum (-tight) housing 104 is cut apart synchronously and the vacuum motion switch.Come the kind of drive of driving cam means through belt transmission, its accumulated error is big; Because belt transmission is easy to generate to skid and causes segmentation precision wayward; , very big when cutting apart calibration in aspect limitation such as stability, usefulness, maintenances owing to being to increase the decline of easy generation speed and the lengthening of the dwell time that puts in place through cam mechanism gearing friction power.The transmission position is prone to cause wearing and tearing also can motor overload take place and causes the B dish to cut apart phenomenon not in place.
Summary of the invention
In view of this, the present invention provides a kind of division mechanism, and it is little that this division mechanism has driving error, advantage of high segmentation accuracy.
For realizing above-mentioned purpose, the present invention provides following technical scheme:
A kind of division mechanism comprises:
Be used to place the B dish divisional plane of material;
One end links to each other with said B dish divisional plane cuts apart fixed axis;
Cut apart the vacuum control unit that the fixed axis other end links to each other with said, said vacuum control unit is used to control said material and is adsorbed on said B dish divisional plane;
The motor fixing base that cooperatively interacts with said vacuum control unit, and said vacuum control unit and said motor fixing base are the mechanical structure of one;
Be installed in said motor fixing base below, its output shaft and the motor that said vacuum control unit main shaft links to each other are equipped with encoder on the said motor, and said encoder is used for test material and whether places said B dish divisional plane.
Preferably, in above-mentioned division mechanism, on the said B dish divisional plane fan-shaped pylone that is evenly distributed on the center of circle is set.
Preferably, in above-mentioned division mechanism, the number of said fan-shaped pylone is 12.
Preferably, in above-mentioned division mechanism, also be provided with strip hole between the said adjacent fan-shaped pylone.
Preferably, in above-mentioned division mechanism, also be provided with support, said support is installed on the said motor fixing base.
Preferably, in above-mentioned division mechanism, said support is installed on the said motor fixing base through bolt.
Preferably, in above-mentioned division mechanism, said support below also is equipped with base.
Preferably, in above-mentioned division mechanism, also be provided with installing hole on the said base.
Preferably, in above-mentioned division mechanism, said encoder is a photoelectric encoder.
Can find out that from technique scheme directly drive B dish divisional plane through motor among the present invention and vacuum control unit is cut apart action, so accumulated error is little, transmission is accurate.The control action of motor is to realize through the encoder of establishing in it, so position Detection is more accurate.
Description of drawings
In order to be illustrated more clearly in the embodiment of the invention or technical scheme of the prior art; To do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below; Obviously, the accompanying drawing in describing below only is some embodiments of the present invention, for those of ordinary skills; Under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the stereogram of division mechanism in the prior art;
Fig. 2 is the front view of division mechanism in the prior art;
The stereogram of the division mechanism that Fig. 3 provides for the embodiment of the invention;
The front view of the division mechanism that Fig. 4 provides for the embodiment of the invention;
The vertical view of the division mechanism that Fig. 5 provides for the embodiment of the invention.
Embodiment
To combine the accompanying drawing in the embodiment of the invention below, the technical scheme in the embodiment of the invention is carried out clear, intactly description, obviously, described embodiment only is the present invention's part embodiment, rather than whole embodiment.Based on the embodiment among the present invention, those of ordinary skills are not making the every other embodiment that is obtained under the creative work prerequisite, all belong to the scope of the present invention's protection.
In order to reduce the driving error of division mechanism, improve segmentation precision, the present invention provides a kind of division mechanism.
Please with reference to Fig. 3 to Fig. 5, wherein, Fig. 3 is the stereogram of division mechanism, and Fig. 4 is the front view of division mechanism, and Fig. 5 is the vertical view of division mechanism.
In above-mentioned accompanying drawing, 201 are B dish divisional plane, and 202 for cutting apart fixed axis, and 203 is vacuum control unit, and 204 is motor fixing base, and 205 is motor, and 206 is support, and 207 is base.
The disclosed segmenting device of accompanying drawing comprises: B coils divisional plane 201, cuts apart fixed axis 202, vacuum control unit 203, motor fixing base 204 and motor 205.
Cut apart fixed axis 202 1 ends and link to each other with B dish divisional plane 201, the other end links to each other with vacuum control unit 203;
Vacuum control unit cooperates motor fixing base can adsorb the material on the B dish divisional plane 201;
On the motor 205 encoder is installed, encoder will stop to continue sorbing material, and material is transported to subsequent processing when having detected material and be transported to B dish divisional plane 201.
Encoder (encoder) is that signal (like bit stream) or data are worked out, converted into can be in order to communication, transmission and signal stored form of device.Encoder converts angular displacement or straight-line displacement to the signal of telecommunication, and the former becomes code-disc, and the latter claims yardstick.Can be divided into contact and contactless two kinds according to the playback mode encoder.Contact adopts brush output, and brush contact conduction region or insulation layer represent that the state of code is " 1 " or " 0 "; The contactless senser of accepting is light-sensitive element or magneto sensor; Represent that with transparent area and light tight district the state of code is " 1 " or " 0 " when adopting light-sensitive element, the binary coding through " 1 " and " 0 " converts the physical signalling of collection into the signal of telecommunication that machine code can read in order to communication, transmission and storage.
Can find out that from technique scheme directly drive B dish divisional plane through motor among the present invention and vacuum control unit is cut apart action, so accumulated error is little, transmission is accurate.The control action of motor is to realize through the encoder of establishing in it, so position Detection is more accurate.
Preferred in the present embodiment encoder is a photoelectric encoder, and photoelectric encoder is made up of grating dish and photoelectric detection system.The grating dish is on the plectane of certain diameter, to open several slots five equilibrium.Because photoelectric code disk is coaxial with motor; During the motor rotation; Grating dish and motor are with the speed rotation, and the electric detection means of forming through electronic components such as light-emitting diodes detects the some pulse signals of output, just can reflect the rotating speed of current motor through the number of calculating per second photoelectric encoder output pulse.The two pulse signals that photoelectric encoder provides can be judged the direction of rotation of motor, can control the rotary speed and the direction of rotation of motor through the installation of above-mentioned photoelectric encoder.
As shown in Figure 5, B coils divisional plane 201, is provided with the fan-shaped pylone 211 that is evenly distributed on the center of circle, is convenient to the control of precision.Preferably, the number of fan-shaped pylone 211 is 12.And on adjacent fan-shaped pylone 211, offer strip hole 212, being provided with of strip hole 212 can reduce the quality that B coils divisional plane 201, so the mass inertia of B dish divisional plane 201 is less, and it stops than is easier to realizing in control.
In addition, this division mechanism also is provided with support 206, and said support 206 is installed on the said motor fixing base 204, is used for the parts of supporting bracket more than 206.And in order to change conveniently; Support 206 formulas are installed on the motor fixing base 204 through bolt; Can also select suitable support 206 according to the motor 205 of different model, this support can also be arranged to have the structure of telescopicing performance, regulates through stretching motion; B dish divisional plane is apart from the height on ground, with better adaptation subsequent processing desired height.
At above-mentioned division mechanism base is installed also below support 206, also is provided with installing hole on the base, be convenient to the fixing of base.
Present embodiment has been cancelled traditional motor and has been done the action of B dish branch through belt driving band moving cam mechanism, and vacuum storehouse seat also from original a plurality of parts combinations, makes the mechanical mechanism that vacuum control unit and motor fixing base are one into.The present invention further simplifies action sequence on action sequence, has promoted the action that splitting speed and precision have been simplified division mechanism, has reduced the wearing and tearing of mechanical structure; Can further promote splitting speed and lead the accumulated error that belt gear brings with reducing.Whole mechanical mechanism is simpler than original mechanism design simultaneously, at the bottom of the cost.
Each embodiment adopts the mode of going forward one by one to describe in this specification, and what each embodiment stressed all is and the difference of other embodiment that so description is fairly simple, relevant part is partly explained referring to method and got final product.
To the above-mentioned explanation of the disclosed embodiments, make this area professional and technical personnel can realize or use the present invention.Multiple modification to these embodiment will be conspicuous concerning those skilled in the art, and defined General Principle can realize under the situation that does not break away from the spirit or scope of the present invention in other embodiments among this paper.Therefore, the present invention will can not be restricted to these embodiment shown in this paper, but will meet and principle disclosed herein and features of novelty the wideest corresponding to scope.
Claims (9)
1. a division mechanism is characterized in that, comprising:
Be used to place the B dish divisional plane of material;
One end links to each other with said B dish divisional plane cuts apart fixed axis;
Cut apart the vacuum control unit that the fixed axis other end links to each other with said, said vacuum control unit is used to control said material and is adsorbed on said B dish divisional plane;
The motor fixing base that cooperatively interacts with said vacuum control unit, and said vacuum control unit and said motor fixing base are the mechanical structure of one;
Be installed in said motor fixing base below, its output shaft and the motor that said vacuum control unit main shaft links to each other are equipped with encoder on the said motor, and said encoder is used for test material and whether places said B dish divisional plane.
2. division mechanism according to claim 1 is characterized in that, on the said B dish divisional plane fan-shaped pylone that is evenly distributed on the center of circle is set.
3. division mechanism according to claim 2 is characterized in that, the number of said fan-shaped pylone is 12.
4. division mechanism according to claim 3 is characterized in that, also is provided with strip hole between the said adjacent fan-shaped pylone.
5. division mechanism according to claim 4 is characterized in that, also is provided with support, and said support is installed on the said motor fixing base.
6. division mechanism according to claim 5 is characterized in that said support is installed on the said motor fixing base through bolt.
7. division mechanism according to claim 6 is characterized in that, said support below also is equipped with base.
8. division mechanism according to claim 7 is characterized in that, also is provided with installing hole on the said base.
9. division mechanism according to claim 8 is characterized in that, said encoder is a photoelectric encoder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010102190708A CN101882568B (en) | 2010-07-07 | 2010-07-07 | Division mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010102190708A CN101882568B (en) | 2010-07-07 | 2010-07-07 | Division mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101882568A CN101882568A (en) | 2010-11-10 |
| CN101882568B true CN101882568B (en) | 2012-07-04 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010102190708A Expired - Fee Related CN101882568B (en) | 2010-07-07 | 2010-07-07 | Division mechanism |
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| Country | Link |
|---|---|
| CN (1) | CN101882568B (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2522346Y (en) * | 2002-01-15 | 2002-11-27 | 禾咏丰科技股份有限公司 | Cutting-disc driving device of passive element packaging machine |
| CN101192557A (en) * | 2006-11-30 | 2008-06-04 | 佳能安内华股份有限公司 | Power supply apparatus and deposition method using the power supply apparatus |
-
2010
- 2010-07-07 CN CN2010102190708A patent/CN101882568B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2522346Y (en) * | 2002-01-15 | 2002-11-27 | 禾咏丰科技股份有限公司 | Cutting-disc driving device of passive element packaging machine |
| CN101192557A (en) * | 2006-11-30 | 2008-06-04 | 佳能安内华股份有限公司 | Power supply apparatus and deposition method using the power supply apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101882568A (en) | 2010-11-10 |
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| C14 | Grant of patent or utility model | ||
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120704 Termination date: 20130707 |