CN101873079B - Vibration type actuator and manufacturing method thereof - Google Patents
Vibration type actuator and manufacturing method thereof Download PDFInfo
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- CN101873079B CN101873079B CN 201010165705 CN201010165705A CN101873079B CN 101873079 B CN101873079 B CN 101873079B CN 201010165705 CN201010165705 CN 201010165705 CN 201010165705 A CN201010165705 A CN 201010165705A CN 101873079 B CN101873079 B CN 101873079B
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Abstract
The invention provides a vibration type actuator with incapability of reducing a propelling force and capabilities of being stably supported and miniaturized and a manufacturing method thereof. An actuator main body (1) is kept inside a supporting component (10) consisting of a group of retainers (11) and a cover body (12) in a hollow state. Adhesives (21, 22) are coated in a clearance between the inner surface of each retainer (11) and the actuator main body (1) and a clearance between the inner surface of the cover body (12) and the actuator main body (1) by adopting a distributor and the like. The adhesives (21, 22) are silicone rubber and the like and exert elasticity after being hardened. The actuator main body (1) can be elastically supported inside the supporting component (10) by an adhesive force without pressure, so the actuator main body (1) can be stably supported without reducing the propelling force. In addition, the support is performed by coating the adhesives (21, 22)in the clearances so as to realize the small vibration type actuator.
Description
Technical field
The present invention relates to driver be encouraged vibration-type actuator and the manufacture method thereof of shaking moving body being moved by driving elements such as piezoelectric elements.
Background technology
In following patent documentation 1, a kind of vibration-type actuator is disclosed, its have via the threaded portion mutually chimeric driver and shifter, described driver encouraged the piezoelectric element that shakes.
When the driver with described piezoelectric element carries out two and when having the bending motion (or flexural vibrations, below identical) of phase difference repeatedly, the motion of driver is for being rotated motion, and to the shifter transmission, and shifter is moved.Shifter is chimeric via threaded portion and driver, so shifter is under the effect of revolving force own, to moving axially of screw thread.In this vibration-type actuator, shifter can move to the direction advance and retreat along described central shaft, and have the advantage that can obtain big driving torque and bring into play big advance and retreat locomotivity (propulsive force) simultaneously with than low speed rotation.
There is for example following patent documentation 2 etc. in supporting member as the actuator that is made of elongate in shape of such bending motion.
In patent documentation 2, disclose a kind of vibration type revolving instrument that utilizes piezoelectric vibrator, this piezoelectric vibrator is made of the cylindrical piezo pottery of strip, be formed with at its outer peripheral face and drive the electrode pattern of using with, detection and shared grounding, and if to apply between each electrode assigned voltage then integral body carry out bending motion.
Piezoelectric vibrator has be used to the node that carries out bending motion (vibration node) in two positions that are separated with predetermined distance from its two ends, near this node, be inserted with the annular support member that comprises elastic material outside respectively, and this annular support member is secured to respectively in bearing support is erect the installing hole of the two place's flange parts that arrange, and is supported fixing.
Patent documentation 1: Japanese Unexamined Patent Application Publication 2007-505599 communique
Patent documentation 2: Japanese Unexamined Patent Application Publication 2002-22451 communique
As mentioned above, under the situation of the vibrator of strip, respectively near the node (vibration node) by elastomeric material supporting two ends, can the good bending motion of implementation efficiency.
Yet, though the position of supporting vibrator is suitable, have such problem: when plus-pressure is too small, each bending motion bearing position can produce deviation at long side direction, cause bending motion to become unstable, consequently, the advance and retreat locomotivity (propulsive force) of vibrator reduces.
In addition, have such problem on the contrary with it: when plus-pressure was excessive, the action of vibrator was restricted in, and can't carry out the good bending motion of efficient, thereby the locomotivity (propulsive force) that causes advancing and retreat reduces.
And then, also there is such problem: the member of the special use of vibrators such as supporting ring-type supporting member need be set, and the space that need take in these members, so cause being difficult to miniaturization and then be difficult to manufacturing as if miniaturization.
Summary of the invention
The present invention makes in view of above-mentioned existing issue, and its purpose is, a kind of propulsive force that can not reduce is provided, and can stably support the vibration-type actuator of vibrator (moving body).
The present invention also aims to provide a kind of passing through with little space supporting vibrator (moving body), thereby realize the vibration-type actuator of miniaturization.
The present invention also aims to provide a kind of method that can make small-sized vibration-type actuator simply.
The present invention relates to a kind of vibration-type actuator, it has the supporting member of actuator body and the described actuator body of supporting, this actuator body have the moving body of cylindrical shell, the inside that is arranged on described cylindrical shell free to advance or retreat and be located at described cylindrical shell around give the piezoelectric element of bending motion to described cylindrical shell, described vibration-type actuator is characterised in that
Described actuator body is supported to the state that can carry out described bending motion with respect to described supporting member by the rubber-like bonding agent.
In the present invention, by coming the supporting actuator main body by after sclerosis, having appropriate flexible bonding agent, and do not need as existing, to support by plus-pressure.Thus, need not to carry out stressed adjustment, and can make the bending motion of actuator body stable.Consequently, can prevent the reduction of the propulsive force of moving body.
For example, in structure of the present invention, described supporting member is made of one group of bearing support and cover body, and described actuator body is supported in the inboard of the framework that is combined to form by described bearing support and cover body.
In this case, can constitute, described adhesive applicating is between the inner surface that is formed on described actuator body and described bearing support and in the gap between the inner surface of described actuator body and described cover body.
In aforesaid way, by can the supporting actuator main body at the gap adhesive-applying that is formed between actuator body and bearing support and the cover body.Thus, need not to guarantee for the space that elastomeric special use is installed, and can the miniaturization vibration-type actuator.
For example, in structure of the present invention, flexible cable be located at described piezoelectric element around, described adhesive applicating is in the outer surface of described flexible cable.
In aforesaid way, supporting actuator main body when can guarantee with being electrically connected of each piezoelectric element.
In addition, in the present invention preferably, described bearing support and described cover body all have sidepiece, the be combined outer surface of the sidepiece that is positioned at described bearing support of the sidepiece of described cover body,
The outer surface of the sidepiece of described bearing support be formed with and described cover body between concavo-convex chimeric and protuberance that locate between with described bearing support and described cover body, be formed with that resin as described bonding agent accumulates portion and the recess of bringing into play function at the sidepiece of described bearing support with the opposed inner surface of described protuberance.
Thus, can be simply and carry out cover body accurately with respect to the location of bearing support, and can suppress the situation that bonding agent exposes to the outside.
In addition, in the present invention preferably, described bearing support has: first planar portions; First sidepiece and second sidepiece that form towards short transverse in the both sides of the left and right directions (Y1-Y2) of described first planar portions,
Described cover body has: second planar portions; The 3rd sidepiece and the 4th sidepiece that form towards the direction opposite with described first sidepiece and second sidepiece in the both sides of the left and right directions (Y1-Y2) of described second planar portions,
In the space that is surrounded by described first planar portions, described first sidepiece, described second sidepiece and described second planar portions, described actuator body is supported in the inner surface of the inner surface of the inner surface of described first planar portions, described second planar portions, described first sidepiece and the inner surface of described second sidepiece respectively via described bonding agent.
Can be via bonding agent between actuator body and supporting member the supporting actuator main body up and down, thus, can be with respect to external force and supporting actuator main body stably.In addition, can form bonding agent is difficult to the structure of outside outflow.
In addition, in the present invention preferably, be formed with the guide portion that the interval of described left and right directions is expanded gradually towards cardinal extremity in the skirt section of described the 3rd sidepiece and described the 4th sidepiece.Thus, in that being slided, the sidepiece of cover body moves to the sidepiece of bearing support 11 and when packing into, when the guide portion of described cover body and the protuberance butt of outer surface that is formed at bearing support, described guide portion is to the directive effect of the interval of the left and right directions between the 3rd sidepiece that makes described cover body and the 4th sidepiece expansion, thus can be swimmingly with the sidepiece of cover body along the outer surface of the sidepiece of the bearing support concavo-convex chimeric position of packing into.
In addition, in the present invention preferably, described first sidepiece and described second sidepiece are respectively with respect to a plurality of separation of fore-and-aft direction (X1-X2) of described left and right directions quadrature and form, between separated described first sidepiece or between described second sidepiece at least one is formed with the installation portion that extends with the described first planar portions one
Be coated with described bonding agent respectively between each first sidepiece and the described actuator body and between each second sidepiece and the described actuator body.
In addition, in the present invention preferably, be coated between described first sidepiece and the described actuator body respectively, between described second sidepiece and the described actuator body, between described first planar portions and the described actuator body and the described bonding agent between described second planar portions and the described actuator body be positioned at same one side with respect to fore-and-aft direction (X1-X2) quadrature.
Thus, can be at the balance up and down of actuator body adhesive-applying well, particularly, can be in the joint balance up and down of the position of (vibration node) apply described bonding agent well, can cross efficient and make cylindrical shell carry out bending motion well, thereby can increase the advance and retreat locomotivity of moving body effectively.
In addition, in the present invention preferably, at least one in the inner surface of described first planar portions and described second planar portions is formed with the recess of the described bonding agent that is kept for applying.
In aforesaid way, can accumulate presclerotic bonding agent in advance at recess, therefore, can prevent the waste of bonding agent.
Or, bonding agent is embedded recess, so even actuator body is carried out bending motion, bonding agent can not misplace yet.Thus, the relative position relation on the moving direction of actuator body and supporting member can be maintained initial condition.
In addition, can limit the position of adhesive-applying by recess.For example, described bonding agent is silicone rubber.
In addition, the present invention relates to a kind of manufacture method of vibration-type actuator, it is characterized in that, comprising:
(a) form the operation of the supporting member that is constituted by framework by combination support frame and cover body;
(b) in the inside of described supporting member, do not join with the inner surface of the inner surface of described bearing support and described cover body and keep the operation of actuator body respectively across predetermined gap;
(c) to the gap of the inner surface of described bearing support and described actuator body and the operation of the gap adhesive-applying of the inside of described cover body and actuator body.
Or the manufacture method of the vibration-type actuator that the present invention relates to is characterised in that, comprising:
(d) operation of maintenance actuator body;
(e) configuration of the side in described actuator body both sides retainer is in the operation of opposite side arranged opposite cover body;
(f) operations of adhesive-applyings respectively in the inner surface of the inner surface of described bearing support and one and described cover body in the described actuator body and the described actuator body;
(g) by making up the operation that described bearing support and described cover body form the supporting member that is made of framework.
In said method, preferably described bonding agent is silicone rubber.
In the present invention, can make vibration-type actuator by bonding agent elastic bearing actuator body simply.
In the present invention preferably, form sidepiece at described bearing support, form protuberance at the outer surface of this sidepiece, this sidepiece form recess with the opposed inner surface of described protuberance,
Make the sidepiece of described cover body be positioned at the outer surface of the sidepiece of described bearing support, at this moment, by the sidepiece of the concavo-convex chimeric described bearing support of described protuberance and the sidepiece of described cover body, will locate between described bearing support and the described cover body,
Use described recess as the portion that accumulates of the described bonding agent of the inner surface of the sidepiece that is coated in described bearing support.
By said structure, can will be between cover body and the bearing support reliably and assembling simply, in addition, can be simply and carry out cover body accurately with respect to the location of bearing support.In addition, even be mobile high material for example at the described bonding agent of the inner surface coating of the sidepiece of described bearing support, also can cross in described recess and accumulate, thereby can suppress bonding agent to the situation of outside outflow.
In addition, in the present invention preferably, described bearing support has: the bottom; At the both sides of the left and right directions (Y1-Y2) of described bottom (Z1) forms towards the top first sidepiece and second sidepiece;
Described cover body has: top; At the both sides of the left and right directions (Y1-Y2) on described top (Z2) forms towards the below the 3rd sidepiece and the 4th sidepiece;
Wherein, the manufacture method of described vibration-type actuator comprises:
Apply the operation of presclerotic bonding agent respectively at the inner surface of the inner surface of the inner surface of the described bottom of described bearing support, described first sidepiece and described second sidepiece;
In the space that is surrounded by the described bottom of described bearing support, described first sidepiece and described second sidepiece, keep described actuator body with the state across described bonding agent, and then apply the operation of presclerotic bonding agent at the upper surface of described actuator body;
Make the outer surface of first sidepiece of the 3rd sidepiece of described cover body and the 4th sidepiece and described bearing support and second sidepiece opposed and concavo-convex chimeric, thereby with the operation of locating between described bearing support and the cover body.
Thus, can be between actuator body and supporting member via bonding agent the supporting actuator main body up and down, thus, can be with respect to external force and supporting actuator main body stably.In addition, at the inner surface adhesive-applying than the sidepiece of the bearing support of the sidepiece position more in the inner part of cover body, therefore, can form bonding agent and be difficult to the structure that flows out to the outside.
In addition, in the present invention preferably, the position above the recess than the inner surface of the sidepiece that is formed at described bearing support more leans on is provided with the mark of adhesive applicating.
Thus, can easily carry out bonding agent to the coating of the inner surface of the sidepiece of bearing support.In addition, by with the described basis that is labeled as, for example at the labeled surface adhesive-applying, and when via bonding agent actuator body being remained between the sidepiece of bearing support, perhaps under the effect of the deadweight of bonding agent, bonding agent is along described sidepiece downwards under the mobile situation, owing to have recess below described, therefore can in described recess, accumulate bonding agent effectively, thereby can suitably suppress the situation that described bonding agent flows out to the outside.
The invention effect
In the present invention, can come the supporting actuator main body by the bonding force that bonding agent has.Thus.Need not to carry out stressed adjustment, and can all-the-time stable ground supporting actuator body.Therefore, can prevent the reduction of propulsive force.
In addition, by at the gap of actuator body and supporting member adhesive-applying, can the supporting actuator main body, therefore, can cross and realize small-sized vibration-type actuator.
Description of drawings
Fig. 1 is the stereogram of actuator body of the oscillating mode of expression embodiments of the present invention.
Fig. 2 is the exploded perspective view of actuator body of the oscillating mode of Fig. 1.
Fig. 3 is the stereogram of the vibration-type actuator (actuator body of oscillating mode is by the state of supporting members supports) of expression first execution mode.
Fig. 4 is the exploded perspective view of the vibration-type actuator of Fig. 3.
Fig. 5 is the front view from the state of the observed vibration-type actuator of arrow V direction of Fig. 3.
Fig. 6 is the stereogram of the vibration-type actuator of second execution mode.
Fig. 7 is the front view of vibration-type actuator shown in Figure 6.
Fig. 8 is the exploded perspective view (not shown bonding agent) of vibration-type actuator shown in Figure 6.
Fig. 9 is the exploded perspective view (not shown bonding agent) of vibration-type actuator shown in Figure 6 and a process chart that shows its manufacture method.
Figure 10 shows a process chart (stereogram) of the manufacture method of the vibration-type actuator that then Fig. 9 carries out.
Figure 11 (a) is the schematic diagram of preferred coated position of bonding agent that is illustrated in the sidepiece coating of actuator body, and Figure 11 (b) is the schematic diagram of expression comparative example.
Figure 12 is the front view of summary of the mounting structure of expression vibration-type actuator.
Drawing reference numeral
1 actuator body
2 moving bodys
4 vibration cylindrical shells
The 4a through hole
6,7,8,9 piezoelectric elements
The lateral electrode of 6a, 7a, 8a, 9a piezoelectric element
The medial electrode of 6b, 7b, 8b, 9b piezoelectric element
10 supporting members
11 bearing supports (supporting member)
The 11A bottom
The 11B front side portion
The 11C rear sides
The 11D installation portion
The 11E extension
The 11F fastener
11G1,1,1G2 first sidepiece
11H1,1,1H2 second sidepiece
The 11a recess
The 11b protuberance
The 11c card ends protuberance
The 11d installing hole
The 11e recess
12 cover bodies (supporting member)
12A top
The 12B sidepiece
The 12D guide portion
12a dodges portion
12b dodges recess
The 12c stop hole
12d dodges the hole
The 12f stage portion
21,22,40,61～68,70,71 bonding agents
30 baskets
31 fasteners
32 recesses
33 screwed holes
50 flexible cables
The 50A wiring part
51,52,53,54 connecting portions
56 scolders
69 marks
Embodiment
Fig. 1 is the stereogram of actuator body of the oscillating mode of expression embodiments of the present invention.Fig. 2 is the exploded perspective view of actuator body of the oscillating mode of Fig. 1.
At first, the basic structure with reference to the actuator body of figure 1 and the oscillating mode of Fig. 2 describes.
As shown in Figures 1 and 2, the actuator body 1 of oscillating mode has: vibration cylindrical shell (driver) 4; Be inserted in the moving body 2 of the inside of this vibration cylindrical shell 4.
Vibration cylindrical shell 4 has four sides, and the shape of the end face of observing from X1 direction or X2 direction (fore-and-aft direction) is roughly square shape.Center at vibration cylindrical shell 4 is formed with vertically the through hole 4a that connects, and is formed with internal thread part 4a1 at the inner peripheral surface of this through hole 4a.And vibration cylindrical shell 4 has a pair of joint (vibration node) respectively.One distolateral (X1) of the vibration cylindrical shell 4 of strip is located in one joint, and another distolateral (X2) of the vibration cylindrical shell 4 of strip is located in another joint.
In addition, be separately installed with four piezoelectric elements 6,7,8,9 as driving element performance function in four sides of vibration cylindrical shell 4. Piezoelectric element 6,7,8,9 piezoelectric ceramic by the performance electrostriction effect form, and piezoelectric element 6,7,8,9 dielectric polarization separately be oriented thickness direction.
Four piezoelectric elements 6,7,8,9 around be wound with flexible cable 50.Flexible cable 50 is formed by films such as having insulating properties and flexual polyimides, and distribution has a plurality of conductive patterns in the inside of film.
In flexible cable 50, have along a plurality of connecting portions 51,52,53,54 setting continuously on the Y1-Y2 direction of the part of X1 direction extension, and extended to form wiring part 50A to the outside from an end of connecting portion 51.Connecting portion 51,52,53,54 has Rack respectively and forms.Be formed with through hole 55 respectively at connecting portion 51,52,53,54, around the inner surface side of through hole 55, be formed with the connection electrode (not shown) that is connected with arbitrary Wiring pattern in the inside.
And, when across piezoelectric element 6,7,8,9 flexible cable 50 is wound in vibration cylindrical shell 4 around the time, four each connecting portions 51,52,53,54 and four each piezoelectric elements 6,7,8,9 opposed.At this moment, it is opposed to be formed at lateral electrode 6a, 7a, 8a, the 9a of connecting portion 51,52,53,54 connection electrode and piezoelectric element 6,7,8,9 outer surface side.Thus, in each through hole 55, flow into scolder 56 (for example with reference to figure 4), thus lateral electrode 6a, 7a, 8a, the 9a that can distinguish solder piezoelectric element 6,7,8,9 outer surface side and connecting portion 51,52,53,54 respectively be connected electrode.And medial electrode 6b, 7b, 8b, the 9b of piezoelectric element 6,7,8,9 inner surface side are earthy, for example are connected with grounding electrode (not shown) on being located at flexible cable 50 via wire harness (not shown).
Moving body 2 is axis body, and its center is linearly.And, be formed with towards axial (X1-X2 direction) continuous external thread part 2a at the outer peripheral face of moving body 2.
And as mentioned above, internal thread part 4a1 can be formed on the whole length in the through hole 4a of vibration cylindrical shell 4 sides, but also can only be respectively formed at the juxtra-articular at the two ends in the through hole 4a.Like this, can reduce the frictional resistance between internal thread part 4a1 and the external thread part 2a, therefore, can efficient well and swimmingly carry out the screw thread conveying.
Or, also can constitute the structure that only forms internal thread part 4a1 at the central part of through hole 4a.
Never illustrated drive circuit is given the driving signal of regulation via 50 pairs of piezoelectric elements 6 of flexible cable, 7,8,9.That is, when piezoelectric element 6 being given driving vibration that makes its generation stretching force, give the driving signal that makes its generation convergent force to being located at the piezoelectric element 8 of this piezoelectric element 6 opposed positions.Then, to giving when making the driving signal that it produces stretching force with the piezoelectric element 7 of piezoelectric element 6 adjacency, make it produce the driving signal of convergent force to being located to give with the piezoelectric element 9 of this piezoelectric element 7 opposed positions.
Below identical, then give convergent force to another piezoelectric element simultaneously if give stretching force to a piezoelectric element opposite one another, and when such mode is switched in the cycle of regulation in the direction of the clock or counterclockwise, when namely giving the driving signal of 90 ° of phase phasic differences to each piezoelectric element 6,7,8,9, can on vibration cylindrical shell 4, produce bending motion repeatedly.Thus, be the state that can carry out bending motion by vibrating cylindrical shell 4 supportings in advance, thereby screw thread is carried the moving body of being located in the through hole 4a 2 in the axial direction.That is, moving body 2 is configured to along moving direction free to advance or retreat in the inside of vibration cylindrical shell 4.
In such actuator body 1, by the moving body 2 of screw thread conveying vertically, and can produce large driving force.Thus, in filming apparatus for example, can reckon with to be applied in to make in Focusing mechanism that lens move etc.
Then, the supporting member to above-mentioned vibration-type actuator describes.
Fig. 3 is the stereogram of the vibration-type actuator (actuator body of oscillating mode is by the state of supporting members supports) of expression first execution mode, Fig. 4 is the exploded perspective view of the vibration-type actuator of Fig. 3, and Fig. 5 is the front view from the state of the observed vibration-type actuator of arrow V direction of Fig. 3.
As Fig. 3～shown in Figure 5, actuator body 1 of the present invention has the supporting member 10 of the frame shape that is made of one group of bearing support 11 and cover body 12, and is supported in the inside of the framework that is made of these supporting members 10.
Bearing support 11 and cover body 12 form by metallic plate being carried out sheet metal processing.
Bearing support 11 has: tabular bottom (first planar portions) 11A; The position of (X1 side) stands vertically front side portion 11B, the 11B of the pair of plate-shaped of setting respectively from the both sides of bottom 11A forwardly; The position of (X2 side) stands vertically rear sides 11C, the 11C of the pair of plate-shaped of setting respectively from the both sides of bottom 11A in the wings; The tabular installation portion 11D of the part of bottom 11A from extending to the Y1 direction of a side between front side portion 11B, 11B and rear sides 11C, the 11C; To the tabular extension 11E that another Y2 direction is extended, wherein, above-mentioned these members all can be processed to form by metallic plate is carried out sheet metal.
Inner surface at bottom 11A is formed with recess 11a, is formed with protuberance 11b at outer surface.Recess 11a and protuberance 11b form the relation (with reference to figure 5) with table back of the body one by bottom 11A being carried out punch process.
In addition, the outer surface at front side portion 11B, 11B and rear sides 11C, 11C is formed with card only protuberance 11c, 11c, 11c, 11c respectively.And then, be provided with installing hole 11d in installation portion 11D perforation.In addition, as shown in Figure 5, installation portion 11D is bent to form towards front end from cardinal extremity, and its front end is positioned at the position more on the lower than horizontal H P.In addition, be formed with to overlook at the front end of extension 11E and be the roughly fastener 11F of T word shape down.The width dimensions of the front end of fastener 11F is wideer than the width dimensions of the wiring part 50A of flexible cable 50.Thus, even if from above when observing, the wiring part 50A that extension 11E is configured on the extension 11E hides, and also can make fastener 11F outstanding to the both sides (X1 and X2 direction) of wiring part 50A, therefore, the operation in the time of can carrying out afterwards described the installation well.
Then, the manufacture method of the vibration-type actuator that forms utilizing 1 supporting of 10 pairs of actuator body of supporting member describes.
As shown in Figure 4, utilize not shown jig that actuator body 1 is remained hollow state.Then, dispose bearing support 11 across actuator body 1 in a side, at opposite side arranged opposite cover body 12.
Then, adopt distributor, in the surface of the connecting portion 52 of the inner surface of the top 12A of for example cover body 12 or flexible cable 50 one on adhesive-applying 21.Similarly, in the surface of the connecting portion 54 of the inner surface of the bottom 11A of for example bearing support 11 or flexible cable 50 one on adhesive-applying 22.In this state, make bearing support 11 and cover body 12 chimeric.Then, by making bonding agent 21,22 sclerosis, thus can be in the inside of supporting member 10 (bearing support 11 with cover body 12) with hollow state elastic bearing actuator body 1.
And, can will be under the state of removal moving body 2 on the actuator body 1, namely have piezoelectric element 6,7,8,9 and the vibration cylindrical shell 4 of flexible cable 50 be configured in bearing support 11 and the cover body 12 opposed spaces, and adopt bonding agent 21,22 the gap of these members is fixing after, namely after bonding agent 21,22 sclerosis, moving body 2 is installed in the vibration cylindrical shell 4.
Or, adopt not shown jig with actuator body 1 or unload that actuator body 1 except moving body 2 does not contact with the inner surface of bearing support 11 and cover body 12 and remain on the inside of supporting member 10 with the hollow state that suspends, this supporting member 10 is in advance under the state that bearing support 11 and cover body 12 is chimeric.Then, adopt distributor, at the inner surface of the top of cover body 12 12A and the surperficial opposed gap adhesive-applying 21 of flexible cable 50, similarly, at the inner surface of the bottom of bearing support 11 11A and the surperficial opposed gap adhesive-applying 22 of flexible cable 50.
And as shown in Figure 3, the wiring part 50A of flexible cable 50 is via the gap that is formed between extension 11E and the stage portion 12f, and drawn to the outside of supporting member 10.
Herein, preferred bonding agent 21,22 is for keeping soft as far as possible state to bring into play the material of elastic force after sclerosis.As bonding agent 21,22 hardness, the hardness that is preferably based on hardometer A is about 43.In addition, adopting under the situation of distributor, preferably adopting with single fluidity and have the material of paste, in addition, preferred sclerosis at normal temperatures and the short material of firm time.As such bonding agent 21,22, for example silicone rubber etc. but is not to be confined to silicone rubber suitably.
As mentioned above, be formed with recess 11a, 11a at the inner surface of the bottom of bearing support 11 11A, be formed with at the inner surface of the top of cover body 12 12A and dodge recess 12b, 12b.Thus, can and dodge and accumulate coated bonding agent 21 and bonding agent 22 among recess 12b, the 12b at recess 11a, 11a, and can prevent from flowing into unnecessary part and the waste of the bonding agent that causes.That is, recess 11a, 11a and dodge recess 12b, 12b and have and keep presclerotic bonding agent 21,22 function.Thereby, can prevent that bonding agent 21,22 amount from increasing to more than necessity, thereby can reliably actuator body 1 be kept, be fixed in the supporting member 10 with less amount.
And, preferably, recess 11a, the 11a of bearing support 11 and cover body 12 dodge the two structure that all forms of recess 12b, 12b, but also formation at least.Particularly, it is suitable forming recess 11a, 11a at the bottom of bearing support 11 11A.In addition, presclerotic bonding agent 21,22 viscosity is high and mobile low situation under, also can constitute the structure that does not have recess 11a, 11a and dodge recess 12b, 12b, but the structure that has recess 11a, 11a and dodge recess 12b, 12b be from visually can limiting adhesive-applying 21,22 position, so be preferred on the one hand at this.
In the gap that is formed between supporting member 10 and the actuator body 1, by the bonding force that has of bonding agent 21,22 after the sclerosis with actuator body 1 elastic bearing for by from the bonding agent 21 of above-below direction softness, the state of 22 clampings.
Like this, in the present invention, for the bonding force that has by bonding agent 21,22 keeps the structure of actuator body 1, rather than by the structure that plus-pressure keeps, therefore, can eliminate the problem that as existing, causes because of stressed size.That is to say that bonding agent 21,22 also has elasticity after sclerosis, can supporting actuator main body 1.Thus, the actuator body 1 in the vibratory drive can be stably supported, thereby the reduction of propulsive force can be prevented.
In addition, can support by adhesive-applying in the gap, therefore, need not in supporting member 10, to guarantee in advance the space for the special use of configuration elastic component.Thus, can the miniaturization vibration-type actuator.
In order to obtain big propulsive force, the position of preferred coated bonding agent is the part in the joint (vibration node) of vibration cylindrical shell 4, but is not limited to joint (vibration node) part.In addition, as bonding agent 21, the shape of bonding agent can be shape such as hemispherical or coniform, also can be as bonding agent 22, for having the shape of the bond area longer than left and right directions (Y1-Y2) at fore-and-aft direction (X1-X2) with respect to actuator body 1 and supporting member 10.
And, in the above-described embodiment, for example show four piezoelectric elements 6,7,8,9 around the connecting portion 52,54 surface applied bonding agent 21,22 structure of the flexible cable 50 of reeling, but constitute under the situation of actuator in the structure by the flexible cable 50 of not reeling, also can be in four piezoelectric elements 6,7,8,9 the surface applied bonding agent 21,22 structure of the lateral electrode (for example, lateral electrode 6a, 8a) of opposed any two piezoelectric elements.
Or, also can be the structure that bonding agent 21,22 is applied directly to vibration cylindrical shell 4.In this case, vibration cylindrical shell 4 by in four chamfered parts (for example, the side 4A of adjacency and the part between the 4B of side), any two chamfered part adhesive-applyings opposite one another, also can similarly support with hollow state with above-mentioned.
Be maintained in actuator body 1 under the state of inside of supporting member 10, the scolder 56 on surface of connecting portion 54 that is formed at flexible cable 50 is opposed with the recess 11a of the X1 side of bearing support 11, similarly, it is opposed with the 12a of the portion that dodges of the X1 side of cover body 12 to be formed at the scolder 56 on surface of connecting portion 52.And then, the scolder 56 that is formed at connecting portion 51,53 surface and the sidepiece 12B, the 12B that are formed at bearing support 11 to dodge hole (dodging portion) 12d, 12d opposed.Thus, even actuator body 1 with the direction of moving direction quadrature on bending motion, the top of each scolder 56 also not can with each inner surface butt of the top 12A of bottom 11A, front side portion 11B, 11B and the cover body 12 of the bearing support 11 that forms supporting member 10, thereby, the interference of actuator body 1 and supporting member 10 in the vibratory drive can be avoided, and the reduction of propulsive force can be prevented.
In the supporting structure of the actuator body 1 of Fig. 3～shown in Figure 5, there is such structure: adhesive-applying 21,22 between the inner surface of the top 12A of the upper surface of the inner surface of the bottom 11A of the lower surface of actuator body 1 and bearing support 11 and actuator body 1 and cover body 12 respectively.
But, only up and down actuator body 1 is being supported in the structure of supporting member 10, under situation about for example applying from the external force of side direction, not only a little less than Shang Xia bonding agent 21,22 the bonding force, even the power that actuator body 1 is remained in supporting member 10 also a little less than, so exist actuator body 1 in the inside of supporting member 10 problems such as dislocation to take place.
To this, for example inject bonding agent from the hole 12d that dodges that is formed at cover body shown in Figure 3 12, and the both sides of the left and right directions (Y1-Y2) of actuator body 1 also are bearing on the supporting member 10 via described bonding agent, by this structure, can address the above problem.
Wherein, in the structure of Fig. 3, the described hole 12d that dodges is formed on the sidepiece 11B that is positioned at bearing support 11, the sidepiece 12B of the cover body 12 of the outer surface of 11C, on the 12B, therefore, shown in the schematic diagram of Figure 11 (b), when injecting mobile height or the low presclerotic bonding agent 40 of viscosity from dodging hole 12d, 40 o'clock, there is bonding agent 40, the 40 sidepiece 11B along bearing support 11, the sidepiece 12B of 11C and cover body 12, the possibility that flows out to the outside between the 12B, or bonding agent 40 is easy to expose laterally from the described hole 12d that dodges, and causes existing the outward appearance damage, or when vibration-type actuator uses, be judged as and have foreign matter and become the situation that defective products is handled.
To this, the structure of the vibration-type actuator of above-mentioned execution mode is carried out following improvement.
Fig. 6 is the stereogram of the vibration-type actuator of second execution mode, Fig. 7 is the front view of vibration-type actuator shown in Figure 6, Fig. 8 is the exploded perspective view (not shown bonding agent) of vibration-type actuator shown in Figure 6, Fig. 9 is the exploded perspective view (not shown bonding agent) of vibration-type actuator shown in Figure 6 and a process chart that shows its manufacture method, and Figure 10 shows a process chart (stereogram) of the manufacture method of the vibration-type actuator that then Fig. 9 carries out.And in Fig. 6 to Figure 10, the part identical with Fig. 1 to Fig. 5 is marked with identical label.
Have to vibration-type actuator shown in Figure 8 at Fig. 6: actuator body 1, bearing support 11 and cover body 12.The structure of actuator body 1 and Fig. 1, Fig. 2 and actuator body 1 shown in Figure 4 do not have anything to change its explanation of Therefore, omited.
Fig. 7, bearing support 11 shown in Figure 8 have: tabular bottom (first planar portions) 11A; (Z1) the tabular first sidepiece 11G1,11G2 of extending upward from the both sides of the left and right directions (Y1-Y2) of bottom 11A; The tabular second sidepiece 11H1,11H2.
As shown in Figure 8, the first sidepiece 11G1,11G2 separate to form at fore-and-aft direction (X1-X2), at the first sidepiece 11G1 that is formed at the front side and be formed between the first sidepiece 11G2 of rear side and be formed with extension 11E and the fastener 11F integrally formed with bottom 11A towards the Y1 direction.
In addition, as shown in Figure 8, at the second sidepiece 11H1 that is formed at the front side and be formed between the second sidepiece 11H2 of rear side and be formed with the installation portion 11D integrally formed with bottom 11A towards the Y2 direction.
Be formed with a plurality of recess 11a, 11a that the end is arranged at 11A upper edge, bottom fore-and-aft direction (X1-X2) shown in Figure 8.
In addition, as shown in Figure 8, the outer surface that reaches each the second sidepiece 11H1,11H2 at each the first sidepiece 11G1,11G2 is formed with only protuberance 11c of card, ends the opposed inner surface of protuberance 11c with card and be formed with recess 11e on the thickness of slab direction.That is, card ends protuberance 11c and is in the relation that table is carried on the back one with recess 11e.Card be can simply form by punch process etc. and protuberance 11c and recess 11e ended.For example, the position that makes as shown in Figure 8 card end protuberance 11c is positioned at position that card than Fig. 4 ends protuberance 11c more by the position of top.
To shown in Figure 8, cover body 12 has: tabular top (second planar portions) 12A as Fig. 6; (Z2) the 3rd tabular sidepiece 12B and the 4th sidepiece 12B of extending downwards from the both sides of the left and right directions (Y1-Y2) of top 12A.
As Fig. 6, shown in Figure 8, be formed with only recess 12c of card respectively at the 3rd sidepiece 12B and the 4th sidepiece 12B.In this embodiment, only blocking, recess 12c forms by through hole.Card ends recess 12c and is formed at combination support frame 11 and ends the opposed position of protuberance 11c with each card that is formed at bearing support 11 during with cover body 12.
As Fig. 6, Fig. 7, shown in Figure 8, be formed with guide portion 12D, 12D that the interval of left and right directions (Y1-Y2) is expanded gradually towards cardinal extremity (following direction) in the skirt section of the 3rd sidepiece 12B of cover body 12 and the 4th sidepiece 12B.
In described guide portion 12D, 12D, as shown in Figure 6, when combination support frame 11 and cover body 12, each guide portion 21D separates formation at fore-and-aft direction (X1-X2), and between each guide portion 12D separated along fore-and-aft direction, be formed with spatial portion 12E, this spatial portion 12E is used for the wiring part 50A of described flexible cable 50 is suitably drawn laterally so that guide portion 12D, 12D not with the wiring part 50A of flexible cable 50 and extension 11E, the fastener 11F butt of bearing support 11.
In the present embodiment, for example as shown in Figure 9, on bearing support 11, apply presclerotic bonding agent 61～66 in advance.The bonding agent 61,62 of inner surface that is coated on the bottom 11A of bearing support 11 is coated on the recess 11a of the inner surface that is formed on described bottom 11A, the position of 11a.Thus, even under the low bonding agent 61 of mobile height or viscosity, 62 situation, also can suppress described bonding agent 61,62 and flow out outside situation to the expansion of bottom 11A surface.
In addition, as shown in Figure 9, the inner surface that reaches each the second sidepiece 11H1,11H2 at each the first sidepiece 11G1,11G2 applies each bonding agent 63～66.
As Fig. 8, shown in Figure 9, preferably the position above more leaning on than recess 11e on the inner surface of each the first sidepiece 11G1,11G2 and each the second sidepiece 11H1,11H2 is provided with the mark 69 of the coating position of informing bonding agent.For example, the mark of mark 69 for carving, but the mark mode of mark 69 is not particularly limited.Mark 69 promptings are as long as adhesive-applying namely is preferred mode in its vicinity.
In Fig. 9, constituted in the surface applied of each recess 11e of the inner surface that is formed at each the first sidepiece 11G1,11G2 and each the second sidepiece 11H1,11H2 the figure of bonding agent 63～66, but, particularly, under the situation that is the low bonding agent of mobile height or viscosity 63～66, the position adhesive-applying 63～66 above more leaning on than each recess 11e is better.At this moment, also can also can apply described bonding agent 63～66 in the position slightly on the lower of mark 69 at the described bonding agent 63～66 of the surface applied of each mark 69.No matter under any situation, the bonding agent 63～66 that is coated on the inner surface of each the first sidepiece 11G1,11G2 and each the second sidepiece 11H1,11H2 all can't effectively utilize the recess 11e that accumulates portion's performance function as resin below recess 11e, therefore, bonding agent 63～66 can be coated in surface or the top position more than it of recess 11e.
As shown in Figure 9, at six place's adhesive-applyings 63～66 of bearing support 11.At this moment, as shown in Figure 9, be positioned at mode with the same one side of fore-and-aft direction (X1-X2) quadrature (plane that is formed by Y1-Y2 direction and Z1-Z2 direction) with each bonding agent 61,63,65 that is coated on front side (X1) and limit each bonding agent 61,63,65 coating position, in addition, be positioned at mode with the same one side of fore-and-aft direction (X1-X2) quadrature (plane that is formed by Y1-Y2 direction and Z1-Z2 direction) with each bonding agent 62,64,66 that is coated on rear side (X2) and limit each bonding agent 62,64,66 coating position.
In addition, as shown in Figure 9, at two place's adhesive- applyings 67,68 of the upper surface of actuator body 1.
Front side (X1) at the upper surface of actuator body 1 respectively applies place's bonding agent 67 respectively with rear side (X2), 68, but in the time of in supporting member 10 that actuator body 1 is packed into, bonding agent 67 and each bonding agent 61 that is coated on the front side of bearing support 11 with the front side that is coated on actuator body 1,63,65 all are positioned at and the same one side of fore-and-aft direction (X1-X2) quadrature (plane that is formed by Y1-Y2 direction and Z1-Z2 direction), and be coated on the bonding agent 68 and each bonding agent 62 that is coated on the rear side of bearing support 11 of the rear side of actuator body 1,64,66 all are positioned at the mode with the same one side of fore-and-aft direction (X1-X2) quadrature (plane that is formed by Y1-Y2 direction and Z1-Z2 direction), come in advance to being coated on each bonding agent 67 of actuator body 1,68 coating position limits.
Then, as shown in figure 10, in the space that is surrounded by the bottom 11A of bearing support 11, each the first sidepiece 11G1,11G2 and each the second sidepiece 11H1,11H2, via the bonding agent 61～66 at six places, and adopt the jig of regulation to keep actuator body 1.
At this moment, when actuator body 1 is moved to the assigned position of bearing support 11, there is each the sidepiece 11G1 that is coated on bearing support 11 in advance, 11G2,11H1, each bonding agent 63～66 of the inner surface of 11H2 is pulled by the movement of actuator main body 1 and possibility mobile or that flow downwards because of deadweight downwards, but, in the present embodiment, at each sidepiece 11G1,11G2,11H1, the inner surface of 11H2 arranges recess 11e (with reference to figure 8), therefore, described recess 11e accumulates portion's performance function as resin, and can suitably suppress each bonding agent 63～66 at each sidepiece 11G1,11G2,11H1, situation about flowing out to the outside along following direction on the surface of 11H2.
Then, as shown in figure 10, cover body 12 downward directions are moved, and in the bearing support 11 of packing into.At this moment, make each sidepiece 12B of cover body 12 slide mobile along the outer surface of the first sidepiece 11G1 of bearing support 11,11G2,11H1,11H2.At this moment, be formed at the guide portion 12D in skirt section of each sidepiece 12B of cover body 12 at the first sidepiece 11G1 of retainer 11,11G2 and the second sidepiece 11H1, downward direction is slided mobile on the outer surface of 11H2, afterwards, when be formed at the first sidepiece 11G1,11G2 and the second sidepiece 11H1, when the card of the outer surface of 11H2 ends protuberance 11c butt, the width of left and right directions (Y1-Y2) is expanded the guide portion 12D that forms gradually towards cardinal extremity (below) and is collided with the surface that card ends protuberance 11c easily, thereby so that the mode that the interval of the 3rd sidepiece 12B of cover body 12 and the left and right directions (Y1-Y2) between the 4th sidepiece 12B is expanded play a role.Consequently, each sidepiece 12B, 12B of cover body 12 are moved swimmingly along each sidepiece 11G1,11G2 of bearing support 11, the outer surface of 11H1,11H2.
Then, to end recess 12c concavo-convex when chimeric when the card that is formed at retainer 11 ends protuberance 11c and the card that is formed at cover body 12, and cover body 12 is fixed in bearing support 11 and is positioned.
At this moment, be coated on the bonding agent 67,68 and the inner surface butt of the top 12A of cover body 12 of the upper surface of actuator body 1.
Afterwards, when passing through the stipulated time with normal temperature, each bonding agent 61～68 sclerosis, and can the removal jig.And, in the scope of the performance of not damaging vibration-type actuator, can implement with respect to the sclerosis of bonding agent heat treatment, add wet process, UV illumination and the sclerosis of bonding agent such as penetrate and promote to handle.
In the vibration-type actuator of the Fig. 6 that forms via the manufacturing process of Fig. 9, Figure 10, present embodiment shown in Figure 7, actuator body 1 up and down in the inside of supporting member 10, the state that formation is supported via bonding agent 61～68, thus can be with respect to external force supporting actuator main body 1 stably.
In addition, in the present embodiment, be formed with only protuberance 11c of card at each sidepiece 11G1,11G2 of bearing support 11, the outer surface of 11H1,11H2, be formed with recess 11e at inner surface, and, end protuberance 11c and recess 11e by the integrally formed described card of tables such as the punch process back of the body.
In the present embodiment, it is concavo-convex chimeric with each sidepiece 11G1,11G2,11H1, the 11H2 of each sidepiece 12B, 12B of cover body 12 and bearing support 11 to end protuberance 11c by described card, and can will be between cover body 12 and the bearing support 11 location, and make and be formed at the recess 11e conduct that card ends the back side of protuberance 11c and play a role for the resin portion of accumulating of each bonding agent 63～66 of the inner surface of each sidepiece 11G1,11G2 of being coated on bearing support 11,11H1,11H2.Thus, protuberance and the recess at the table back side by being formed at sidepiece can be simply and carry out cover body 12 accurately with respect to the location of bearing support 11, and can suppress the situation that bonding agent 63～66 flows out to the outside effectively.
In Fig. 6, present embodiment shown in Figure 7, shown in the schematic diagram of Figure 11 (a), to giving bonding agent 70,71 between the sidepiece that is coated on actuator body 2 and supporting member 10 at the inner surface of sidepiece 11G, the 11H of the bearing support 11 of actuator body 2 sides in the described sidepiece, and be provided with the recess of the portion that accumulates as resin in the present embodiment at this sidepiece 11G, 11H, therefore, compare with the structure of the supporting member shown in Figure 11 (b), can suppress the situation that bonding agent flows out to the outside effectively.
In the present embodiment, as shown in Figure 8, the first sidepiece 11G1, the 11G2 and the second sidepiece 11H1, the 11H2 that are formed at bearing support 11 separate formation at fore-and-aft direction (X1-X2), thereby can be by between each the first sidepiece 11G1,11G2 and each the second sidepiece 11H1,11H2, to be formed for being installed on installation portion 11D and the fastener 11F of electronic equipment etc. with the bottom simple structure of 11A one.
And, in Fig. 6, vibration-type actuator shown in Figure 7, constituted in the inside of supporting member 10 the front side up and down, the amounting to eight places up and down of rear side and come the structure of supporting actuator main body 1 through bonding agent 61～68, thereby supporting actuator main body 1 more stably.
In addition, each bonding agent 61 with the front side that is coated on actuator body 1,63,65,67 modes that are positioned at the same one side of fore-and-aft direction (X1-X2) quadrature (plane that is formed by Y1-Y2 direction and Z1-Z2 direction) limit each bonding agent 61,63,65,67 coating position, and each bonding agent 62 with the rear side that is coated on actuator body 1,64,66,68 modes that are positioned at the same one side handed over fore-and-aft direction (X1-X2) (plane that is formed by Y1-Y2 direction and Z1-Z2 direction) limit each bonding agent 62,64,66,68 coating position, thus, can cross the coating position that makes each bonding agent 61～68 and the location matches of joint (vibration node), and can make vibration cylindrical shell 4 effectively carry out bending motion, and can increase the advance and retreat locomotivity of moving body 2 effectively.
As Fig. 8, shown in Figure 9, be formed with the bonding agent 61 that keeps coated, 62 recess 11a, 11a that the end is arranged at the inner surface of the bottom of retainer 11 11A.Thus, can cross suitably presclerotic bonding agent 61,62 is accumulated among recess 11a, the 11a, and can suppress situation about flowing out to the outside.
In Fig. 6, vibration-type actuator shown in Figure 7, as shown in Figure 9, the bonding agent 61,63,65,67 that is coated on the front side (X1) of actuator body 1 is endowed the surface of each connecting portion 51～54 of the flexible cable 50 of being located at described actuator body 1.At this moment, can give bonding agent 61,63,65,67 with the location overlap of scolder 56.On the other hand, the bonding agent 62,64,66,68 that is coated on the rear side (X2) of actuator body 1 is endowed each surface of each piezoelectric element 6～9 of being located at described actuator body 1.
Wherein, bonding agent does not limit especially with respect to the position of giving of actuator body 1.In addition, in aforesaid way, give bonding agent 61,63,65,67 to the position of scolder 56, therefore different with the structure of Fig. 3, Fig. 4, in the position with scolder 56 opposed supporting members 10 portion that dodges is not set.
Then, vibration-type actuator is described to the fixing fixing means of other electronic equipments.
The retainer 11 of vibration-type actuator of the present invention is fixed in the basket of electronic equipment such as camera for example.
As shown in figure 12, the basket in electronic equipment 30 is provided with fastener 31, recess 32, screwed hole 33.In vibration-type actuator, the fastener 11F that will bloat to the Y1 direction inserts and is limited in the fastener 31 of basket 30 sides and will be embedded in the recess 32 of basket 30 sides to the outstanding protuberance 11b of outer surface of the bottom 11A of retainer 11.
At this moment, as shown in Figure 3, the wide cut of fastener 11F part is exposed in the both sides of the wiring part 50A of flexible cable 50, can simultaneously fastener 11F be inserted in the fastener 31 observed, thus the operation can realize good installation the time.
In aforesaid way, be embedded in by the protuberance 11b with retainer 11 sides in the recess 32 of basket 30 sides, can under the state with supporting member 10 location, basket 30 be installed accurately.In addition, the protuberance 11b of the outer surface of retainer 11 sides and the recess 11a of its inner surface are in the relation of table back of the body one, so limit supporting member 10 with respect to the installation site of basket 30 at outer surface protuberance 11b, in the coating position of inner surface recess 11a restriction as bonding agent 22.That is, in the present invention, recess 11a and protuberance 11b bring into play function as being used for the reference for installation portion that vibration-type actuator integral body is installed well with respect to basket 30 precision.
Then, the installing hole 11d that is formed at installation portion 11D is overlapped with the screwed hole 33 of basket 30 sides.Then, with screw 35 be spirally connected installing hole 11d and screwed hole 33.From horizontal direction towards the installation portion 11D under the state of down direction displacement when fastening with screw 35, be deformed into level and produce plus-pressure, therefore, needn't use spring washer (stop washer) or lock washer (wave washer) and vibration-type actuator is securely fixed on the basket.
In addition, installation portion 11D and extension 11E form to the Y-direction with respect to moving direction (directions X) quadrature and bloat.Therefore, when vibration-type actuator is installed to basket 30, the interference of the instrument such as screwdriver that can avoid trip bolt 35 and moving body 2 butts that extend along moving direction etc.Thus, can smooth and easy and reliably vibration-type actuator be installed on the basket.
And, also can make vibration-type actuator be installed in electronic equipment etc. from Fig. 3, state shown in Figure 6 with the states of 180 degree about the rotation or the state that tilts with predetermined angular.Particularly, as shown in Figure 6, with actuator body 1 up and down in the structure that supports via bonding agent between itself and the supporting member 10, can stably actuator body 1 supporting be neutral condition, thereby, can improve the degree of freedom of the installation of vibration-type actuator.
As implied above, in the present invention, the actuator body 1 that keeps with hollow state of the inside of the supporting member 10 that will be made of one group of bearing support 11 and cover body 12 is by in the gap of the inner surface of retainer 11 and actuator body 1 and the bonding agent 21 that applies of the gap of the inner surface of cover body 12 and actuator body 1,22 and by elastic bearing.Need not plus-pressure, just can be with actuator body 1 elastic bearing in the inside of supporting member 10 by bonding force, therefore can not reduce propulsive force and can stably support.
In addition, can be only by coming supporting actuator main body 1 at gap adhesive-applying 21,22, thereby can realize small-sized vibration-type actuator.
Claims (18)
1. vibration-type actuator, it has the supporting member of actuator body and the described actuator body of supporting, this actuator body have cylindrical shell, free to advance or retreat be arranged on the moving body of described inner barrel and be located at described cylindrical shell around give the piezoelectric element of bending motion to described cylindrical shell
Described vibration-type actuator is characterised in that,
Described actuator body is supported to the state that can carry out described bending motion with respect to described supporting member by the rubber-like bonding agent, described cylindrical shell is the vibration cylindrical shell, be formed with the through hole that connects vertically at the center of described vibration cylindrical shell, inner peripheral surface at this through hole is formed with internal thread part, outer peripheral face at described moving body is formed with towards axial continuous external thread part, be the state that can carry out bending motion with described vibration cylinder bearing in advance, thereby screw thread is carried the interior described moving body of through hole of being located at described vibration cylindrical shell in the axial direction.
2. vibration-type actuator as claimed in claim 1, wherein,
Described supporting member is made of one group of bearing support and cover body, and described actuator body is supported in the inboard of the framework that is combined to form by described bearing support and cover body.
3. vibration-type actuator as claimed in claim 2, wherein,
Described adhesive applicating is between the inner surface that is formed on described actuator body and described bearing support and in the gap between the inner surface of described actuator body and described cover body.
4. vibration-type actuator as claimed in claim 3, wherein,
Flexible cable be located at described piezoelectric element around, described adhesive applicating is in the outer surface of described flexible cable.
5. vibration-type actuator as claimed in claim 2, wherein,
Described bearing support and described cover body all have sidepiece, the sidepiece of described cover body be positioned at described bearing support sidepiece outer surface and by with the combination of the sidepiece of described cover body,
The outer surface of the sidepiece of described bearing support be formed with and described cover body between concavo-convex chimeric and protuberance that locate between with described bearing support and described cover body, be formed with that resin as described bonding agent accumulates portion and the recess of bringing into play function at the sidepiece of described bearing support with the opposed inner surface of described protuberance.
6. vibration-type actuator as claimed in claim 5, wherein,
Described bearing support has: first planar portions; First sidepiece and second sidepiece that form towards short transverse in the both sides of the left and right directions (Y1-Y2) of described first planar portions,
Described cover body has: second planar portions; The 3rd sidepiece and the 4th sidepiece that form towards the direction opposite with described first sidepiece and second sidepiece in the both sides of the left and right directions (Y1-Y2) of described second planar portions,
In the space that is surrounded by described first planar portions, described first sidepiece, described second sidepiece and described second planar portions, described actuator body is supported in the inner surface of the inner surface of the inner surface of described first planar portions, described second planar portions, described first sidepiece and the inner surface of described second sidepiece respectively via described bonding agent.
7. vibration-type actuator as claimed in claim 6 is characterized in that,
Be formed with the guide portion that the interval of described left and right directions is expanded gradually towards cardinal extremity in the skirt section of described the 3rd sidepiece and described the 4th sidepiece.
8. vibration-type actuator as claimed in claim 6, wherein,
Described first sidepiece and described second sidepiece are being gone up a plurality of separation with respect to the fore-and-aft direction (X1-X2) of described left and right directions quadrature and are being formed respectively, between separated described first sidepiece or between described second sidepiece at least one is formed with the installation portion that extends with the described first planar portions one
Be coated with described bonding agent respectively between each first sidepiece and the described actuator body and between each second sidepiece and the described actuator body.
9. vibration-type actuator as claimed in claim 6, wherein,
Be coated between described first sidepiece and the described actuator body respectively, between described second sidepiece and the described actuator body, between described first planar portions and the described actuator body and the described bonding agent between described second planar portions and the described actuator body be positioned at same one side with respect to fore-and-aft direction (X1-X2) quadrature.
10. vibration-type actuator as claimed in claim 6, wherein,
In the inner surface of described first planar portions and described second planar portions at least one is formed with the recess of the described bonding agent that is kept for applying.
11. as each described vibration-type actuator in the claim 1～10, wherein,
Described bonding agent is silicone rubber.
12. the manufacture method of a vibration-type actuator is characterized in that, comprising:
(a) form the operation of the supporting member that is constituted by framework by combination support frame and cover body;
(b) in the inside of described supporting member, do not join with the inner surface of the inner surface of described bearing support and described cover body and keep the operation of actuator body respectively across predetermined gap;
(c) to the gap of the inner surface of described bearing support and described actuator body and the operation of the gap adhesive-applying of the inside of described cover body and actuator body,
Wherein, be formed with the through hole that connects vertically at the center of the vibration cylindrical shell of described actuator body, inner peripheral surface at this through hole is formed with internal thread part, be formed with towards axial continuous external thread part at the outer peripheral face of the moving body that is arranged on described vibration inner barrel of described actuator body free to advance or retreatly, be the state that can carry out bending motion with described vibration cylinder bearing in advance, thereby screw thread is carried the interior described moving body of through hole of being located at described vibration cylindrical shell in the axial direction.
13. the manufacture method of a vibration-type actuator is characterized in that, comprising:
(d) operation of maintenance actuator body;
(e) configuration of the side in described actuator body both sides bearing support is in the operation of opposite side arranged opposite cover body;
(f) operations of adhesive-applyings respectively in the inner surface of the inner surface of described bearing support and one and described cover body in the described actuator body and the described actuator body;
(g) by making up the operation that described bearing support and described cover body form the supporting member that is made of framework,
Wherein, be formed with the through hole that connects vertically at the center of the vibration cylindrical shell of described actuator body, inner peripheral surface at this through hole is formed with internal thread part, be formed with towards axial continuous external thread part at the outer peripheral face of the moving body that is arranged on described vibration inner barrel of described actuator body free to advance or retreatly, be the state that can carry out bending motion with described vibration cylinder bearing in advance, thereby screw thread is carried the interior described moving body of through hole of being located at described vibration cylindrical shell in the axial direction.
14. the manufacture method of vibration-type actuator as claimed in claim 12, wherein,
Form sidepiece at described bearing support, form protuberance at the outer surface of this sidepiece, this sidepiece form recess with the opposed inner surface of described protuberance,
Make the sidepiece of described cover body be positioned at the outer surface of the sidepiece of described bearing support, at this moment, by the sidepiece of the concavo-convex chimeric described bearing support of described protuberance and the sidepiece of described cover body, and will locate between described bearing support and the described cover body,
Use described recess as the portion that accumulates of the described bonding agent of the inner surface of the sidepiece that is coated in described bearing support.
15. the manufacture method of vibration-type actuator as claimed in claim 13, wherein,
Form sidepiece at described bearing support, form protuberance at the outer surface of this sidepiece, this sidepiece form recess with the opposed inner surface of described protuberance,
Make the sidepiece of described cover body be positioned at the outer surface of the sidepiece of described bearing support, at this moment, by the sidepiece of the concavo-convex chimeric described bearing support of described protuberance and the sidepiece of described cover body, and will locate between described bearing support and the described cover body,
Use described recess as the portion that accumulates of the described bonding agent of the inner surface of the sidepiece that is coated in described bearing support.
16. the manufacture method of vibration-type actuator as claimed in claim 14, wherein,
Described bearing support has: the bottom; At the both sides of the left and right directions (Y1-Y2) of described bottom (Z1) forms towards the top first sidepiece and second sidepiece;
Described cover body has: top; At the both sides of the left and right directions (Y1-Y2) on described top (Z2) forms towards the below the 3rd sidepiece and the 4th sidepiece;
The manufacture method of described vibration-type actuator comprises:
Apply the operation of presclerotic bonding agent respectively at the inner surface of the inner surface of the inner surface of the described bottom of described bearing support, described first sidepiece and described second sidepiece;
In the space that is surrounded by the described bottom of described bearing support, described first sidepiece and described second sidepiece, keep described actuator body with the state across described bonding agent, and then apply the operation of presclerotic bonding agent at the upper surface of described actuator body;
Make the outer surface of first sidepiece of the 3rd sidepiece of described cover body and the 4th sidepiece and described bearing support and second sidepiece opposed and concavo-convex chimeric, thereby with the operation of locating between described bearing support and the cover body.
17. the manufacture method of vibration-type actuator as claimed in claim 14, wherein,
Position above the recess than the inner surface of the sidepiece that is formed at described bearing support more leans on is provided with the mark of adhesive applicating.
18. as the manufacture method of each described vibration-type actuator in the claim 12～17, wherein,
Described bonding agent is silicone rubber.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009-106103 | 2009-04-24 | ||
| JP2009106103 | 2009-04-24 | ||
| JP2009213634A JP2010273529A (en) | 2009-04-24 | 2009-09-15 | Oscillatory actuator and manufacturing method of the same |
| JP2009-213634 | 2009-09-15 |
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| CN101873079A CN101873079A (en) | 2010-10-27 |
| CN101873079B true CN101873079B (en) | 2013-09-04 |
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| WO2012140967A1 (en) * | 2011-04-11 | 2012-10-18 | 株式会社村田製作所 | Actuator-support structure and pump device |
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| WO2003075445A1 (en) * | 2002-03-04 | 2003-09-12 | Seiko Epson Corporation | Linear actuator |
| US6710950B2 (en) * | 2002-06-05 | 2004-03-23 | Nokia Mobile Phones Limited | Piezoelectric actuator for digital camera optical system |
| JP4496091B2 (en) * | 2004-02-12 | 2010-07-07 | 株式会社東芝 | Thin film piezoelectric actuator |
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