CN101865740A - Capacitance type pressure sensor - Google Patents
Capacitance type pressure sensor Download PDFInfo
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- CN101865740A CN101865740A CN200910049490A CN200910049490A CN101865740A CN 101865740 A CN101865740 A CN 101865740A CN 200910049490 A CN200910049490 A CN 200910049490A CN 200910049490 A CN200910049490 A CN 200910049490A CN 101865740 A CN101865740 A CN 101865740A
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- plate
- capacitance
- elastic body
- fixed
- capacitor plate
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Abstract
The invention discloses a capacitance type pressure sensor, which comprises a force arm plate, an elastomer, a dowel steel and a capacitance polar plate mounted below the elastomer. The elastomer is provided with a moving end and a fixed end. The dowel steel penetrates through one end of the force arm plate and the middle of the elastomer and the capacitance polar plate. The capacitance polar plate is in a three-layer structure, wherein the upper and lower polar plate are immovable fixed plates and the middle polar plate is a movable plate which is connected with a hinge pin at the moving end of the elastomer through an insulating gasket. The two immovable plates are connected with hinge pin at the moving end through the insulating gasket. The capacitance pressure sensor has variable distance, and the capacitance polar plates are differential type structures with high sensitivity, little error and temperature compensation function.
Description
Technical field
The present invention relates to a kind of sensor, particularly relate to a kind of capacitance pressure transducer.
Background technology
The structure of existing capacitance pressure transducer, is to pull down after stressed by drive link, because elastic body one end is fixed, depress elastomeric not stiff end and arm board is stressed, elastic body deformation, the movable plate electrode that drives electric capacity moves, produce changes in capacitance, thereby pass out stressed and electric signal that change, finish the sensing process of power.This structure is at first little owing to capacitance between dynamic and static two capacitor plates, is again single capacitor, is subjected to the influence of factors such as circuit distributed capacitance easily, and sensitivity is lower, and precision is also low.In addition, existing elastomeric strain position is the rectangle slotted eye, so the strain variation amount is not obvious, also is difficult to make hold the parallel displacement of pole plate generation, causes the reduction of precision and the raising of error once more.
The utility model content
The technical problem to be solved in the present invention is in order to overcome the defective of prior art, a kind of capacitance pressure transducer, to be provided, and it has pole-changing is differential structure apart from, capacitor plate, and it is highly sensitive, and error is little, and has temperature compensation function.
The present invention solves above-mentioned technical matters by following technical proposals: a kind of capacitance pressure transducer,, it comprises arm board, elastic body, transmission rod and the capacitor plate that is installed in the elastic body below, elastic body has moved end and fixed end, transmission rod passes an end of arm board and passes elastic body and the centre of capacitor plate, it is characterized in that, described capacitor plate is a three-decker, wherein go up, bottom crown is fixed fixed plate, and middle plate is a movable plate electrode, movable plate electrode is connected with elastomeric moved end bearing pin by insulating washer, and two fixed plates are connected with elastomeric fixed end bearing pin by insulating washer.
Preferably, offer parallel double pass slotted eye in the middle part of the described elastomeric strain regions.
Preferably, the affixed elastomeric moved end of an end of described arm board.
Positive progressive effect of the present invention is: the present invention overcomes the interference of intrinsic factor because the differential capacitance electrode plate structure has the function of tc compensation, obviously improves sensitivity and degree of accuracy.In addition, the distortion sensitivity that the structure of elastic body strain regions of the present invention improves greatly simultaneously can make the pole plate parallel displacement, further improves the levels of precision of signal.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Fig. 2 is a floor map of the present invention.
Embodiment
Provide preferred embodiment of the present invention below in conjunction with accompanying drawing, to describe technical scheme of the present invention in detail.
As depicted in figs. 1 and 2, the present invention is a kind of capacitive force transducer, it comprises arm board 1, elastic body 2, first capacitor plate 5, second capacitor plate 6, the 3rd capacitor plate 7 and the transmission rod 8 that bears pressure, elastic body 2 has moved end 3 and fixed end 4, parallel double pass slotted eye 9 is offered at the strain regions middle part of elastic body 2, the moved end 3 of the affixed elastic body 2 of one end of arm board 1, arm board 1 are provided with for the sheathed hole of transmission rod 8; First capacitor plate 5, second capacitor plate 6, the 3rd capacitor plate 7 are installed in elastic body 2 belows; Transmission rod 8 passes the centre of elastic body 2 and first capacitor plate 5, second capacitor plate 6, the 3rd capacitor plate 7, and this transmission rod 8 also passes an end of arm board 1.Capacitor plate of the present invention is three layers, first top capacitor plate 5 and the 3rd following capacitor plate 7 are fixed fixed plate, and the second middle capacitor plate 6 is a movable plate electrode, second capacitor plate 6 is connected with moved end 3 bearing pins by insulating washer, have corresponding perforations on first capacitor plate 5 and the 3rd capacitor plate 7, first capacitor plate 5 does not contact with moved end 3 with the 3rd capacitor plate 7; First capacitor plate 5 is connected with fixed end 4 bearing pins by insulating washer with the 3rd capacitor plate 7, and fixed end 4 bearing pins do not contact with second capacitor plate 6.When transmission rod 8 stressed, when pulling down power arm plate 1, elastic body 2 stress and deformations, second capacitor plate 6 is along with moved end 3 bearing pin displacements, because its upper and lower first capacitor plate 5 and the 3rd capacitor plate 7 that is fixed plate, so the total displacement variable quantity of its upper and lower relatively pole plate becomes both closing, thereby improved the simultaneously relative differential values of sensitivity, deduct the influence of temperature coefficient and intrinsic parameter influence, further improved its degree of accuracy.
Though more than described the specific embodiment of the present invention, it will be understood by those of skill in the art that these only illustrate, under the prerequisite that does not deviate from principle of the present invention and essence, can make numerous variations or modification to these embodiments.Therefore, protection scope of the present invention is limited by appended claims.
Claims (3)
1. capacitance pressure transducer,, it comprises arm board, elastic body, transmission rod and is installed in the capacitor plate of elastic body below, elastic body has moved end and fixed end, transmission rod passes an end of arm board and passes elastic body and the centre of capacitor plate, it is characterized in that, described capacitor plate is a three-decker, wherein upper and lower pole plate is fixed fixed plate, and middle plate is a movable plate electrode, movable plate electrode is connected with elastomeric moved end bearing pin by insulating washer, and two fixed plates are connected with elastomeric fixed end bearing pin by insulating washer.
2. capacitance pressure transducer, as claimed in claim 1 is characterized in that, parallel double pass slotted eye is offered at described elastomeric strain regions middle part.
3. capacitance pressure transducer, as claimed in claim 1 is characterized in that, the affixed elastomeric moved end of an end of described arm board.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910049490A CN101865740A (en) | 2009-04-17 | 2009-04-17 | Capacitance type pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910049490A CN101865740A (en) | 2009-04-17 | 2009-04-17 | Capacitance type pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101865740A true CN101865740A (en) | 2010-10-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200910049490A Pending CN101865740A (en) | 2009-04-17 | 2009-04-17 | Capacitance type pressure sensor |
Country Status (1)
| Country | Link |
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| CN (1) | CN101865740A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102607747A (en) * | 2012-03-04 | 2012-07-25 | 江南大学 | Disk target beating sensor |
| CN102944352A (en) * | 2012-11-12 | 2013-02-27 | 中国航天科技集团公司第五研究院第五一〇研究所 | Capacitance film type pressure sensor capable of enhancing stability of electrode plate |
| CN103674405A (en) * | 2013-12-13 | 2014-03-26 | 中北大学 | Differential type HTCC wireless passive high-temperature pressure sensor and manufacturing method thereof |
| CN104422551A (en) * | 2013-09-03 | 2015-03-18 | 昆山爱都思电子科技有限公司 | Electrostatic volume type force sensor |
| CN108375445A (en) * | 2018-02-01 | 2018-08-07 | 山东理工大学 | A kind of heart-shaped tubular structure for gas electric transducer |
| CN108489372A (en) * | 2018-05-23 | 2018-09-04 | 中地装（重庆）地质仪器有限公司 | A kind of capacitance displacement sensor |
-
2009
- 2009-04-17 CN CN200910049490A patent/CN101865740A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102607747A (en) * | 2012-03-04 | 2012-07-25 | 江南大学 | Disk target beating sensor |
| CN102944352A (en) * | 2012-11-12 | 2013-02-27 | 中国航天科技集团公司第五研究院第五一〇研究所 | Capacitance film type pressure sensor capable of enhancing stability of electrode plate |
| CN102944352B (en) * | 2012-11-12 | 2014-05-28 | 中国航天科技集团公司第五研究院第五一〇研究所 | Capacitance film type pressure sensor capable of enhancing stability of electrode plate |
| CN104422551A (en) * | 2013-09-03 | 2015-03-18 | 昆山爱都思电子科技有限公司 | Electrostatic volume type force sensor |
| CN103674405A (en) * | 2013-12-13 | 2014-03-26 | 中北大学 | Differential type HTCC wireless passive high-temperature pressure sensor and manufacturing method thereof |
| CN108375445A (en) * | 2018-02-01 | 2018-08-07 | 山东理工大学 | A kind of heart-shaped tubular structure for gas electric transducer |
| CN108375445B (en) * | 2018-02-01 | 2019-12-27 | 山东理工大学 | Heart-shaped tubular structure for pneumoelectric sensor |
| CN108489372A (en) * | 2018-05-23 | 2018-09-04 | 中地装（重庆）地质仪器有限公司 | A kind of capacitance displacement sensor |
| CN108489372B (en) * | 2018-05-23 | 2024-04-09 | 中地装（重庆）地质仪器有限公司 | Capacitance displacement sensor |
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Legal Events
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20101020 |