CN101865291B - Magnetic fluid sealing structure applied to high-cleanliness environment - Google Patents
Magnetic fluid sealing structure applied to high-cleanliness environment Download PDFInfo
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- CN101865291B CN101865291B CN2010102259031A CN201010225903A CN101865291B CN 101865291 B CN101865291 B CN 101865291B CN 2010102259031 A CN2010102259031 A CN 2010102259031A CN 201010225903 A CN201010225903 A CN 201010225903A CN 101865291 B CN101865291 B CN 101865291B
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- fluid sealing
- magnetic fluid
- sealing circle
- magnet fluid
- magnet
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Abstract
The invention discloses a magnetic fluid sealing structure applied to a high-cleanliness environment, which comprises a magnetic fluid sealing ring retainer ring (1), a flux sleeve (2), an O-shaped sealing ring (3), a magnetic fluid sealing ring external sleeve (4), a connection screw (5) and a magnetic fluid sealing ring (6), wherein in the magnetic fluid sealing structure, the O-shaped sealing ring (3) is sleeved in a ring-shaped groove of the outside diameter of the magnetic fluid sealing ring external sleeve (4); the magnetic fluid sealing ring (6) is arranged in an inside diameter hole of the magnetic fluid sealing ring external sleeve (4), and is pushed to get close to the bottom surface; a bottom surface flange of the magnetic fluid sealing ring retainer ring (1) is matched with the inside diameter of the magnetic fluid sealing ring external sleeve (4) and is screwed down by using the connection screw (5); and the flux sleeve (2) is arranged on a mandrel which rotates relative to a magnetic fluid sealing mechanism. The assembly accuracy in a system (such as an R shaft big arm) of the magnetic fluid sealing structure is acquired by using an accuracy substitution method. The magnetic fluid sealing structure is sealed and reliable.
Description
Technical field
The present invention relates under the high-cleanness, high environment of field of semiconductor manufacture, a kind ofly reliably locate to seal, do not make equipment to reveal the magnetic fluid sealing structure that causes environmental pollution movingly equipment.
Background technique
In the manufacturing line of vlsi circuit, environmental index is the important foundation index that guarantees quality of product, has reached the requirement of Class1 level cleanliness at present, and the dirty bits of dirty grain that apparatus for production line produces in transmission process do not allow at all and leak.Therefore, various magnetic fluid sealing structures arise at the historic moment, and are used for different IC production lines.
Summary of the invention
The object of the present invention is to provide a kind of magnetic fluid sealing structure that is applied under the high-cleanness, high environment; Can reliable sealing, have high coaxial rotating precision, high reliability, saving space and effectively reduce cost, be used for the big arm of R axle of chip transmission robot, the motive sealing of R axle forearm.
Goal of the invention of the present invention is achieved in that a kind of magnetic fluid sealing structure that is applied under the high clean environment, comprises the external cover of magnet fluid sealing circle back-up ring 1, concentrating flux sleeve 2, O RunddichtringO 3, magnet fluid sealing circle 4, joint bolt 5, magnet fluid sealing circle 6; It is characterized in that: said magnetic fluid sealing structure is enclosed within O RunddichtringO 3 in the ring shaped slot of external cover 4 external diameters of magnet fluid sealing circle; Said external diameter quality of fit is h
6Pack into the internal diameter of the external cover 4 of magnet fluid sealing circle of magnet fluid sealing circle 6 be H
6In the hole, be pushed into and be adjacent to the bottom surface; The bottom surface flange of said magnet fluid sealing circle back-up ring 1 matches with external cover 4 internal diameters of magnet fluid sealing circle, and the counterbore above the magnet fluid sealing circle back-up ring 1 is aligned with the screw of external cover 4 end faces of magnet fluid sealing circle, and use joint bolt 5 is tightened; Said concentrating flux sleeve 2 be through interference fit on axle with respect to magnet fluid sealing mechanism rotation; The internal diameter of its external diameter and magnet fluid sealing circle has the diameter difference of 0.4mm; In the torus space of this 0.2mm, inject the magnetic current body fluid of thickness, form the motive sealing band.
The external cover external diameter of magnet fluid sealing circle matches with the big arm of R axle (or R axle forearm) lower cover plate sheath, and quality of fit is h
7, internal diameter matches with magnet fluid sealing circle external diameter, and quality of fit is H as requested
6The recessed edge in bottom is the following locating face of magnet fluid sealing circle, and position constraint is provided.
In the groove of magnet fluid sealing circle external diameter the O RunddichtringO is housed, is used for expanding the static seal of cover with lower cover plate.
With the magnet fluid sealing circle internal diameter of the external cover of magnet fluid sealing circle of packing into, and push and be close to the bottom surface constraint.
The bottom surface flange of magnet fluid sealing circle back-up ring is matched with the external cover internal diameter of magnet fluid sealing circle, and counterbore and the screw of the external cover end face of magnet fluid sealing circle above the magnet fluid sealing circle back-up ring are aligned, assembling magnet fluid sealing circle interstage sleeve.
Joint bolt is screwed in the counterbore, accomplishes the assembling of magnetic fluid sealing structure.
Concentrating flux sleeve be through interference fit on axle with respect to magnet fluid sealing mechanism rotation.Concentrating flux sleeve is with special magnetic stainless steel manufacturing, and the internal diameter of its external diameter and magnet fluid sealing circle has the diameter difference of 0.4mm, in the space of this 0.4mm, injects the magnetic current body fluid of thickness, forms the motive sealing band.
Assembly precision in the system of magnetic fluid sealing structure (like big arm of R axle or forearm) obtains through precision replacement method; Specific practice is: boundary dimension and the quality of fit of pressing earlier magnetic fluid sealing structure are made 1 assembling mold; Alternative magnetic fluid sealing structure assembles, and confirms the assembly relation of outside correlated parts with this.Dismounting assembling mold is equipped with on the fixed correlated parts with magnetic fluid sealing structure then, with the assembly precision that keeps requiring.
A kind of magnetic fluid sealing structure that is applied under the high-cleanness, high environment of the present invention has following advantage:
1, since the motive sealing band of structure of the present invention be 1 be full of magnet fluid sealing liquid, width is in the closed circular of 0.2mm, so motive sealing is reliable, does not have the reason that produces seal failure.
2, because magnetic fluid sealing structure of the present invention is to do untouchable rotatablely moving, do not have mechanical friction, so working life is longer, generally can be lower than the actual life of equipment.
3, because in magnetic fluid structure of the present invention; The magnet fluid sealing circle is not directly to use on the sealing transmission; But place it in the protection box of forming by the external cover of magnet fluid sealing circle, magnet fluid sealing circle back-up ring, the specification of the magnet fluid sealing circle that therefore uses can be selected less model, can use the magnet fluid sealing circle of ting model comparatively speaking; Realize the function of big model magnet fluid sealing circle, reduced cost.
Description of drawings
The last figure of Fig. 1 is the main sectional view of magnetic fluid structure of the present invention;
Fig. 2 is a plan view;
Fig. 3 is the application of magnetic fluid sealing structure at the big arm of the R of chip transmission robot axle.
In Fig. 1～Fig. 3, concrete numeral: 1-magnet fluid sealing circle back-up ring; The 2-concentrating flux sleeve; The 3-O RunddichtringO; The external cover of 4-magnet fluid sealing circle; The 5-joint bolt; 6-magnet fluid sealing circle.
Embodiment
In conjunction with accompanying drawing the present invention is described further:
Shown in accompanying drawing 1, accompanying drawing 2, a kind of magnetic fluid sealing structure that is applied under the high clean environment comprises the external cover of magnet fluid sealing circle back-up ring 1, concentrating flux sleeve 2, O RunddichtringO 3, magnet fluid sealing circle 4, joint bolt 5, magnet fluid sealing circle 6.Earlier O RunddichtringO 3 being enclosed within the ring shaped slot of external cover 4 external diameters of magnet fluid sealing circle, is h with the external diameter quality of fit then
6Pack into the internal diameter of the external cover 4 of magnet fluid sealing circle of magnet fluid sealing circle 6 be H
6In the hole, be pushed into and be adjacent to the bottom surface.The bottom surface flange of magnet fluid sealing circle back-up ring 1 is matched with external cover 4 internal diameters of magnet fluid sealing circle; And counterbore and the screw of external cover 4 end faces of magnet fluid sealing circle above the magnet fluid sealing circle back-up ring 1 are aligned; Joint bolt 5 is screwed in the counterbore, accomplishes the assembling of magnetic fluid sealing structure.
Like accompanying drawing 3, a kind of working principle that is applied to magnetic fluid sealing structure under the high clean environment is the gap of locating movingly through sealing, reaches the purpose of sealing.Concentrating flux sleeve 2 passes through interference fit on the axle with respect to the rotation of magnet fluid sealing mechanism; The magnetic stainless steel manufacturing that concentrating flux sleeve 2 usefulness are special; The internal diameter of its external diameter and magnet fluid sealing circle has the diameter difference of 0.4mm; In the torus space of this 0.2mm, inject the magnet fluid sealing liquid of thickness, magnet fluid sealing liquid relies on powerful magnetic field; Firmly be adsorbed on the interior ring of concentrating flux sleeve 2 and magnet fluid sealing circle 6, forming neither influences axle rotation, the effective motive sealing band of sealed inner again.
The assembly precision of magnetic fluid sealing structure in system's (like big arm of R axle) obtains through precision replacement method; Specific practice is: boundary dimension and the quality of fit of pressing earlier magnetic fluid sealing structure are made 1 assembling mold; Alternative magnetic fluid sealing structure assembles, and confirms the assembly relation of outside correlated parts with this.Dismounting assembling mold is equipped with on the fixed correlated parts with magnetic fluid sealing structure then, with the assembly precision that keeps requiring.
Claims (2)
1. magnetic fluid sealing structure that is applied under the high clean environment; Comprise magnet fluid sealing circle back-up ring (1), concentrating flux sleeve (2), O RunddichtringO (3), the external cover of magnet fluid sealing circle (4), joint bolt (5), magnet fluid sealing circle (6), it is characterized in that: said magnetic fluid sealing structure is enclosed within O RunddichtringO (3) in the ring shaped slot of the external cover of magnet fluid sealing circle (4) external diameter; Said magnet fluid sealing circle (6) is packed in the inner diameter hole of the external cover of magnet fluid sealing circle (4), is pushed into and is adjacent to the bottom surface; Said magnet fluid sealing circle back-up ring (1) has the bottom surface flange; The bottom surface flange matches with the external cover of magnet fluid sealing circle (4) internal diameter; And the top counterbore of magnet fluid sealing circle back-up ring (1) and the screw of the external cover of magnet fluid sealing circle (4) end face are aligned, and use joint bolt (5) to tighten, said concentrating flux sleeve (2) passes through interference fit on the axle with respect to the magnetic fluid sealing structure rotation; The internal diameter of its external diameter and magnet fluid sealing circle has the diameter difference of 0.4mm; In the torus space of this 0.2mm, inject the magnetic current body fluid of thickness, form the motive sealing band.
2. a kind of magnetic fluid sealing structure that is applied under the high clean environment according to claim 1 is characterized in that: said concentrating flux sleeve (2) uses the magnetic stainless steel manufacturing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010102259031A CN101865291B (en) | 2010-07-14 | 2010-07-14 | Magnetic fluid sealing structure applied to high-cleanliness environment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010102259031A CN101865291B (en) | 2010-07-14 | 2010-07-14 | Magnetic fluid sealing structure applied to high-cleanliness environment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101865291A CN101865291A (en) | 2010-10-20 |
| CN101865291B true CN101865291B (en) | 2012-08-29 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010102259031A Expired - Fee Related CN101865291B (en) | 2010-07-14 | 2010-07-14 | Magnetic fluid sealing structure applied to high-cleanliness environment |
Country Status (1)
| Country | Link |
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| CN (1) | CN101865291B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102720841A (en) * | 2011-12-20 | 2012-10-10 | 北京交通大学 | Large-diameter magnetic liquid rotating seal assembly method |
| FR3010118B1 (en) | 2013-09-03 | 2016-02-26 | Getinge La Calhene | SEALED SPEAKER HAVING AN OPENING AND CLOSING CONTROL MECHANISM FOR A SEALED CONNECTION DEVICE BETWEEN TWO CLOSED VOLUMES |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2302921A (en) * | 1995-07-04 | 1997-02-05 | Advanced Fluid Systems Ltd | Labyrinth and magnetic seal |
| CN2474814Y (en) * | 2000-11-03 | 2002-01-30 | 罗喜梅 | Magnet fluid sealing device for monocrystalline silicon furnace driving shaft |
| CN1437712A (en) * | 2000-06-21 | 2003-08-20 | Nok株式会社 | Magnetic fluid sealer and method for mounting magnetic fluid sealer |
| CN1614239A (en) * | 2004-08-09 | 2005-05-11 | 中国航天科技集团公司第一研究院第十五研究所 | Magnetic liquid sealing structure of cryogenic pump |
| CN1834505A (en) * | 2006-04-18 | 2006-09-20 | 北京交通大学 | Sealing anti-drip device of high temp magnetic liquid |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001004035A (en) * | 1999-06-23 | 2001-01-09 | Ferrotec Corp | Seal device |
-
2010
- 2010-07-14 CN CN2010102259031A patent/CN101865291B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2302921A (en) * | 1995-07-04 | 1997-02-05 | Advanced Fluid Systems Ltd | Labyrinth and magnetic seal |
| CN1437712A (en) * | 2000-06-21 | 2003-08-20 | Nok株式会社 | Magnetic fluid sealer and method for mounting magnetic fluid sealer |
| CN2474814Y (en) * | 2000-11-03 | 2002-01-30 | 罗喜梅 | Magnet fluid sealing device for monocrystalline silicon furnace driving shaft |
| CN1614239A (en) * | 2004-08-09 | 2005-05-11 | 中国航天科技集团公司第一研究院第十五研究所 | Magnetic liquid sealing structure of cryogenic pump |
| CN1834505A (en) * | 2006-04-18 | 2006-09-20 | 北京交通大学 | Sealing anti-drip device of high temp magnetic liquid |
Non-Patent Citations (1)
| Title |
|---|
| JP特开2001-4035A 2001.01.09 |
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| Publication number | Publication date |
|---|---|
| CN101865291A (en) | 2010-10-20 |
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| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120829 Termination date: 20130714 |