CN101859868A - Interdigited electrode - Google Patents

Interdigited electrode Download PDF

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Publication number
CN101859868A
CN101859868A CN201010187081A CN201010187081A CN101859868A CN 101859868 A CN101859868 A CN 101859868A CN 201010187081 A CN201010187081 A CN 201010187081A CN 201010187081 A CN201010187081 A CN 201010187081A CN 101859868 A CN101859868 A CN 101859868A
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CN
China
Prior art keywords
electrode
interdigited
board
flexible base
negative pole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201010187081A
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Chinese (zh)
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CN101859868B (en
Inventor
张斗
林秀娟
周科朝
张晓泳
危安
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Central South University
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Central South University
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Publication date
Application filed by Central South University filed Critical Central South University
Priority to CN2010101870812A priority Critical patent/CN101859868B/en
Publication of CN101859868A publication Critical patent/CN101859868A/en
Application granted granted Critical
Publication of CN101859868B publication Critical patent/CN101859868B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The invention discloses an interdigited electrode, which comprises a flexible substrate and an electrode, the electrode is prepared on the flexible substrate and comprises anodes and a cathode, a finger parts of the anodes and the finger part of the cathode are staggered, the lateral direction of the electrode is provided with two anodes and one cathode, and the cathode is arranged between the two anodes. The continuity of the control to a piezoelectric material or the continuity of the receiving of deformation signals of the piezoelectric material can be improved at the lateral direction, thus the precision on applying the piezoelectric material is improved. In addition, the invention has the advantages of simple structure, low manufacturing cost, environmental protection, energy saving and convenient use.

Description

Interdigited electrode
Technical field
The present invention relates to a kind of interdigited electrode, particularly be applied to the interdigited electrode on the piezoelectric.
Background technology
Piezoelectric is a kind of material that mechanical energy and electric energy can be changed mutually.Can make it produce distortion if material is applied certain stress, thereby cause that material surface is charged; Otherwise if material is applied electric field, material also will produce mechanical deformation.Piezoelectric comprises the composite material that piezoelectric ceramic, piezoelectric monocrystal, piezoelectric polymeric materials and piezoelectric and resin form etc.On many piezoelectrics, adopted interdigited electrode.Interdigited electrode provides approach for the d33 performance of well utilizing piezoelectric.As shown in Figure 1, present interdigited electrode is made up of flexible base, board and the staggered electrode material in anodal finger and negative pole finger (being generally copper) of preparation on flexible base, board.In the time need controlling or receive the deformation signal of its zones of different, need interdigited electrode with some being arranged in together energising respectively and controls or receive respectively deformation signal the distortion of the main body zones of different of piezoelectric.Flexible base, board rises electrode and supports and insulating effect, therefore all can reserve the zone of flexible base, board at the periphery of the electrode of interdigited electrode.In these regional electrodeless existence, therefore can cause the discontinuous of control or can not receive deformation signal continuously.
Summary of the invention
The purpose of this invention is to provide and a kind ofly can laterally improve the continuity of piezoelectric control or receive the successional interdigited electrode of its deformation signal.
For achieving the above object, the present invention includes flexible base, board and electrode, electrode preparation is in flexible base, board, electrode comprises positive pole and negative pole, and anodal finger and negative pole finger are staggered, and laterally being arranged by two positive poles and a negative pole of described electrode forms, and negative pole is arranged in the middle of two positive poles.
As improvement of the present invention, the anodal positive pole arrangement by two or more of row that vertically has at least of described electrode material forms.
As a further improvement on the present invention, described flexible base, board is polyimide film material or polyester film material.
Because interdigited electrode of the present invention is transversely arranged two positive poles and negative pole on a flexible base, board, negative pole is arranged in the middle of two positive poles, be equivalent to like this two interdigited electrodes transversely arranged, yet but do not have adjacent two interelectrode flexible base, board zones.Thereby can improve the precision of applying piezoelectric material in the horizontal continuity that improves the continuity that piezoelectric is controlled or receive its deformation signal.In addition, the present invention also has simple in structure, and cost of manufacture is cheap, environmental protection and energy saving and beneficial effect easy to use.
Description of drawings
Fig. 1 is the schematic diagram of the interdigited electrode of prior art.
Fig. 2 is the schematic diagram of a kind of embodiment of interdigited electrode of the present invention.
Fig. 3 is the schematic diagram of the another kind of embodiment of interdigited electrode of the present invention.
Embodiment
Below in conjunction with accompanying drawing interdigited electrode of the present invention is described further.
Fig. 1 is the schematic diagram of the interdigited electrode of prior art, and interdigited electrode is by flexible base, board 1 and electrode, and electrode preparation is in flexible base, board 1, and electrode comprises anodal 2 and negative pole 3, and anodal finger 4 and negative pole finger 5 are staggered.All can reserve the zone of flexible base, board 1 at the periphery of the electrode of interdigited electrode.Regional at these owing to electrodeless, so do not produce actual effect between interdigited electrode and the piezoelectric.When need were arranged in together the transversely deforming of energising control piezoelectric respectively with two interdigited electrodes or receive the horizontal deformation signal of piezoelectric respectively, the flexible base, board between adjacent two interdigited electrodes can cause the discontinuous of control or can not receive deformation signal.
As shown in Figure 2, interdigited electrode of the present invention comprises flexible base, board 11 and electrode, electrode preparation is in flexible base, board 11, electrode material comprises positive pole 12 and negative pole 13, and anodal finger 14 and negative pole finger 15 are staggered, electrode is by two positive poles 12,12 ' and negative pole 13 transversely arranged forming, and negative pole 13 is arranged in the middle of two positive poles 12,12 '.Be equivalent to two interdigited electrodes transversely arranged like this, yet but there are not adjacent two interelectrode flexible base, board 11 zones, thereby can improve the precision of applying piezoelectric material in the horizontal continuity that improves the continuity that piezoelectric is controlled or receive its deformation signal.The present invention also has simple in structure, and cost of manufacture is cheap, environmental protection and energy saving and beneficial effect easy to use.Flexible base, board of the present invention can adopt the polyester film material, and electrode material adopts copper.
Fig. 3 is the schematic diagram of the another kind of embodiment of interdigited electrode of the present invention.Electrode material is not only laterally being arranged and is being formed by two positive poles 16,16 ' and negative pole 17 among the figure, and negative pole 17 is arranged in the middle of two positive poles 16,16 ', and is formed by two positive poles 16,18 and 16 ', 18 ' arrangement in that vertical every row are anodal.So not only can be in the horizontal continuity that improves the continuity that piezoelectric is controlled or receive its deformation signal, also can improve the precision of applying piezoelectric material greatly in vertical continuity that realizes the continuity that piezoelectric is controlled or receive its deformation signal.Wherein flexible base, board can adopt polyimide film material, and electrode material adopts copper.
The invention is not restricted to the content described in accompanying drawing 2 and shown in Figure 3 and the embodiment,, reach its technique effect, all within protection range of the present invention so long as can realize technical scheme of the present invention as previously mentioned.

Claims (3)

1. interdigited electrode, comprise flexible base, board and electrode, electrode preparation is on flexible base, board, electrode comprises positive pole and negative pole, and anodal finger and negative pole finger are staggered, it is characterized in that laterally being arranged by two positive poles and a negative pole of described electrode forms, negative pole is arranged in the middle of two positive poles.
2. according to the interdigited electrode of claim 1, it is characterized in that the anodal positive pole arrangement by two or more of row that vertically has at least of described electrode forms.
3. according to the interdigited electrode of claim 1 or 2, it is characterized in that described flexible base, board is polyimide film material or polyester film material.
CN2010101870812A 2010-05-31 2010-05-31 Interdigited electrode Expired - Fee Related CN101859868B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2010101870812A CN101859868B (en) 2010-05-31 2010-05-31 Interdigited electrode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2010101870812A CN101859868B (en) 2010-05-31 2010-05-31 Interdigited electrode

Publications (2)

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CN101859868A true CN101859868A (en) 2010-10-13
CN101859868B CN101859868B (en) 2011-11-23

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CN2010101870812A Expired - Fee Related CN101859868B (en) 2010-05-31 2010-05-31 Interdigited electrode

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102163687A (en) * 2010-12-10 2011-08-24 清华大学 High-voltage electrical response zinc oxide flexible pressure sensor and manufacturing method thereof
CN105997058A (en) * 2016-05-28 2016-10-12 惠州市力道电子材料有限公司 Polymer flexible interdigital electrode and processing method thereof

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014079071A1 (en) * 2012-11-26 2014-05-30 东莞市钛隆电子科技有限公司 Contact-type electrically-conductive power supply board structure

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1604468A (en) * 2003-09-29 2005-04-06 富士通媒体部品株式会社 Filter using piezoelectric material
JP2008122215A (en) * 2006-11-13 2008-05-29 Aisin Seiki Co Ltd Piezoelectric sensor and method of manufacturing the same
WO2009098840A1 (en) * 2008-02-05 2009-08-13 Murata Manufacturing Co., Ltd. Elastic boundary wave device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1604468A (en) * 2003-09-29 2005-04-06 富士通媒体部品株式会社 Filter using piezoelectric material
JP2008122215A (en) * 2006-11-13 2008-05-29 Aisin Seiki Co Ltd Piezoelectric sensor and method of manufacturing the same
WO2009098840A1 (en) * 2008-02-05 2009-08-13 Murata Manufacturing Co., Ltd. Elastic boundary wave device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102163687A (en) * 2010-12-10 2011-08-24 清华大学 High-voltage electrical response zinc oxide flexible pressure sensor and manufacturing method thereof
CN105997058A (en) * 2016-05-28 2016-10-12 惠州市力道电子材料有限公司 Polymer flexible interdigital electrode and processing method thereof

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CN101859868B (en) 2011-11-23

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Granted publication date: 20111123

Termination date: 20130531