CN101859721B - Broken wire detection system - Google Patents
Broken wire detection system Download PDFInfo
- Publication number
- CN101859721B CN101859721B CN201010197149A CN201010197149A CN101859721B CN 101859721 B CN101859721 B CN 101859721B CN 201010197149 A CN201010197149 A CN 201010197149A CN 201010197149 A CN201010197149 A CN 201010197149A CN 101859721 B CN101859721 B CN 101859721B
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- electric brush
- detection system
- shaft
- brush
- broken wire
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Abstract
The invention relates to a broken wire detection system, in particular to a broken wire detection system applied in a multiwire cutter device in the special equipment manufacturing industry of semiconductors. The broken wire detection system comprises an electric brush, a compression spring, an electric brush holder, a support shaft, a fixed plate and a fixed shaft, wherein the electric brush is arranged on a rotating shaft, the compression spring is fixedly connected with the electric brush, the electric brush holder is connected with the electric brush in a sleeving way, the support shaft is vertical to a central shaft of the electric brush holder and connected with the electric brush holder in a sleeving way, the fixed plate is spliced at one end of the support shaft, and the fixed shaft is fixedly connected with the fixed plate; and an insulation sleeve and an insulation ring are arranged between the electric brush holder and the support shaft, and the electric brush, a steel wire to be detected and the rotating shaft form a closed loop circuit. The invention can accurately detect a signal emitted from a broken steel wire, thereby preventing the damage of a main roller due to a broken wire and the generation of a great amount of unqualified silicon slices by cutting.
Description
Technical field
The present invention relates to a kind of broken wire detection system, particularly be applied in the broken wire detection system in the multi-line cutting machine equipment of semiconductor manufacturing equipment manufacturing.
Background technology
Along with the fast development of modern processing industry, new material, new technology are constantly emerged in large numbers in the semiconductor manufacturing.More semi-conducting material needs high-quality, high efficiency cutting, thereby has produced multi-thread cutting equipment, and multi-line cutting machine exists following point in the cutting process of semi-conducting material:
1, burn out detection loop resistance resistance fluctuation range is big, and detection signal is measured inaccurate.
2, disconnection signal obtain difficultly, error is big.
Summary of the invention
The technical problem that the present invention will solve provides a kind of broken string that can accurately detect and provides signal, causes that home roll damages and cut out the broken wire detection system of a large amount of defective silicon chips thereby avoid breaking.
In order to realize goal of the invention; The present invention adopts following technical scheme: broken wire detection system comprises the brush that is arranged on the rotating shaft, the stage clip that is fixedly connected with brush, the brush carrier that is connected with the brush suit, perpendicular to the back shaft that is connected with the brush carrier suit of brush carrier central shaft, be plugged on the fixed axis that the fixed head of back shaft one end is fixedly connected with fixed head; Be provided with insulating case and insulated ring between brush carrier and the back shaft, rotating shaft and steel wire, brush to be detected constitute the closed-loop path.
Stage clip top is provided with reed.
Employing the invention has the beneficial effects as follows: the present invention adopts brush directly to contact with rotating shaft and obtains signal; Rely on the resistance size to obtain signal; Separate brush carrier and back shaft by insulating case and insulated ring; It jointly plays insulating effect, make the present invention be with the state of multi-line cutting machine insulation under detect.The steel wire of multi-line cutting machine is arranged on the home roll through actinobacillus wheel, and again through another take-up pulley take-up, the present invention has constituted a closed loop with steel wire and rotating shaft behind the circulation cutting material; This closed loop has weak current to pass through; When steel wire broke, circuit did not have electric current to pass through, and line detection apparatus detects less than little electric current; The complete machine electric-control system quits work machine system, thereby silicon materials are cut in protection and home roll is not damaged.Reasonable in design of the present invention is reliable, and input is accurate, can effectively practice thrift cost.
Description of drawings
Fig. 1 is a structural representation of the present invention.
In the drawings: 1 locknut, 2 brushes, 3 stage clips, 4 brush carriers, 5 packing rings, 6 trip bolts, 7 insulating cases, 8 insulated rings, 9 clamp nuts, 10 back shafts, 11 fixed heads, 12 fixed axis, 13 reeds, 14 rotating shafts.
Embodiment
Shown in accompanying drawing 1; Rotating shaft 14 is provided with brush 2; Be fixedly connected with stage clip 3 with brush 2, be connected with brush carrier 4, be arranged on brush carrier 4 inner stage clip 3 tops and be provided with a reed 13 with brush 2 suits; Be used to compress stage clip 3 and make it closely to contact, avoid broken string and provide rub-out signal with rotating shaft 14.The locknut 1 that is arranged on the brush carrier 4 is positioned on the certain position of brush carrier 4 brush 2, makes it on the upper-lower position of brush carrier 4, to move.Perpendicular to brush carrier 4 central shafts be connected with back shaft 10 with brush carrier 4 suits, with packing ring 5 and trip bolt 6 back shaft 10 and brush carrier 4 are fixed together.Be provided with insulating case 7 and insulated ring 8 between brush carrier 4 and the back shaft 10; Insulating case 7 makes detection system and the multi-line cutting machine insulation that is fixedly connected with fixed axis 12 with insulated ring 8; The effect of insulation be make the present invention with the state of multi-line cutting machine insulation under detect; Such effect is that the steel wire and the machine system of multi-line cutting machine formed state of insulation, and steel wire is connected little electric current, is convenient to detect.End at back shaft 10 is plugged with fixed head 11, and an end of fixed head 11 is fixed with fixed axis 12 with clamp nut 9, and fixed axis 12 is fixedly connected with the multi-line cutting machine complete machine.
The steel wire of multi-line cutting machine is arranged on the home roll through actinobacillus wheel, and again through another take-up pulley take-up, as shown in Figure 1, steel wire, rotating shaft 14 and brush 2 have constituted a closed loop behind the circulation cutting material; Loop one end is connected with rotating shaft 14, and an end is connected with brush carrier 4, and inside is connected with steel wire, when steel wire is closed; This closed loop has weak current to pass through, and when steel wire ruptured, circuit did not have electric current to pass through; Line detection apparatus detects less than electric current, and the complete machine electric-control system shuts down complete machine, thereby realizes shutting down; Thereby realize shutting down, protect home roll and avoid cutting out a large amount of defective materials, avoid unnecessary loss.Reasonable in design of the present invention is reliable, and input is accurate, can effectively practice thrift cost.
Claims (2)
1. broken wire detection system; It is characterized in that; It comprises the brush (2) that is arranged on the rotating shaft (14), the stage clip (3) that is fixedly connected with brush (2), the brush carrier (4) that is connected with brush (2) suit, the fixed axis (12) that is fixedly connected with fixed head (11) perpendicular to the back shaft (10) that is connected with brush carrier (4) suit of brush carrier (4) central shaft, the fixed head (11) that is plugged on back shaft (10) one ends; Be provided with insulating case (7) and insulated ring (8) between said brush carrier (4) and the back shaft (10), said rotating shaft (14) constitutes the closed-loop path with steel wire, brush (2) to be detected.
2. broken wire detection system according to claim 1 is characterized in that described stage clip (3) top is provided with reed (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010197149A CN101859721B (en) | 2010-06-11 | 2010-06-11 | Broken wire detection system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010197149A CN101859721B (en) | 2010-06-11 | 2010-06-11 | Broken wire detection system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101859721A CN101859721A (en) | 2010-10-13 |
| CN101859721B true CN101859721B (en) | 2012-10-03 |
Family
ID=42945520
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010197149A Expired - Fee Related CN101859721B (en) | 2010-06-11 | 2010-06-11 | Broken wire detection system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101859721B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102343632B (en) * | 2011-09-29 | 2015-09-16 | 中国电子科技集团公司第四十五研究所 | A kind of method of Multi-wire wafer cutting burn out detection |
| CN103203394A (en) * | 2012-01-13 | 2013-07-17 | 长沙富晨机器制造有限公司 | Wire breakage automatic detection device |
| CN105097265B (en) * | 2015-08-31 | 2017-10-31 | 木林森股份有限公司 | A kind of lead loop of automatic threading device |
| CN105047399B (en) * | 2015-08-31 | 2017-11-10 | 木林森股份有限公司 | Automatic threading device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004114249A (en) * | 2002-09-27 | 2004-04-15 | Ishii Hyoki Corp | Wire breakage detector for wire saw |
| JP2008183806A (en) * | 2007-01-30 | 2008-08-14 | Toyo Advanced Technologies Co Ltd | Wire saw |
| CN101607423A (en) * | 2009-07-09 | 2009-12-23 | 常州天合光能有限公司 | The thread-breakage protecting of silicon ingot cutting fret saw and use the scroll saw of this method |
-
2010
- 2010-06-11 CN CN201010197149A patent/CN101859721B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004114249A (en) * | 2002-09-27 | 2004-04-15 | Ishii Hyoki Corp | Wire breakage detector for wire saw |
| JP2008183806A (en) * | 2007-01-30 | 2008-08-14 | Toyo Advanced Technologies Co Ltd | Wire saw |
| CN101607423A (en) * | 2009-07-09 | 2009-12-23 | 常州天合光能有限公司 | The thread-breakage protecting of silicon ingot cutting fret saw and use the scroll saw of this method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101859721A (en) | 2010-10-13 |
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| Date | Code | Title | Description |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20101013 Assignee: Sanhe Jianhua Hi Tech Co Ltd Assignor: No.45 Inst., China Electronic science and Technology Group Corp. Contract record no.: 2015990000114 Denomination of invention: Broken wire detection system Granted publication date: 20121003 License type: Exclusive License Record date: 20150320 |
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| LICC | Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121003 Termination date: 20160611 |