CN101840076A - Optical switch structure - Google Patents

Optical switch structure Download PDF

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Publication number
CN101840076A
CN101840076A CN 201010128843 CN201010128843A CN101840076A CN 101840076 A CN101840076 A CN 101840076A CN 201010128843 CN201010128843 CN 201010128843 CN 201010128843 A CN201010128843 A CN 201010128843A CN 101840076 A CN101840076 A CN 101840076A
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microchannel
metal electrode
substrate
optical waveguide
fluid
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CN 201010128843
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CN101840076B (en
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黎永前
王宁博
丁丽娟
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Jiangsu Sunlike Equipment Group Co ltd
Northwestern Polytechnical University
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Northwestern Polytechnical University
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Abstract

The invention discloses an optical switch structure based on liquid waveguide. The optical switch structure sequentially comprises a base I, a structural layer and a base II; the structural layer is provided with at least three sections of micro pipelines parallel with the base I and the base II; one ends of the micro pipelines are communicated with each other at the same position; the other end of one micro pipeline is communicated with an input port (7); the other ends of the rest micro pipelines are communicated with an output port (8); a plurality of pairs of metal electrodes having the same number with the sections of the micro tubes are respectively arranged on the corresponding positions of the first base I and the second base II or on a plurality of the inner walls of the structural layer; and openings are distributed on the base I corresponding to the input port (7) and the output port (8) on the structural layer. In the invention, the liquid waveguide is made of any liquid of the same kind, so that the selectivity of the material of the waveguide is more flexible; the stable transmission and switching function of the light is realized through the control of the simple circuit; and the possibility is provided for realizing the low-cost and large-scale integration of the all-optical network.

Description

Optical switch construction
Affiliated field
The present invention relates to a kind of optical switch construction, relate in particular to a kind of optical switch construction, belong to the technical field of optical cross connect in the optical internet, Optical Add Drop Multiplexer device based on optical waveguide.
Prior art
Photoswitch plays crucial effect as the elementary cell of optical switching system in all-optical network.The waveguide type photoswitch is a kind of as photoswitch, because its volume is little, is convenient to integrated advantage, is with a wide range of applications aspect large scale integration.The existing method for preparing the waveguide type photoswitch: form the waveguide type photoswitch based on thermo-optic effect, form photoswitch, form photoswitch, form photoswitch and form photoswitch etc. based on microflow control technique based on the light luminous effect based on acoustooptic effect based on electrooptical effect.
(1) photoswitch that forms based on thermo-optic effect.In the article that people such as Chen Yuanyuan delivered in 2009 a kind of waveguide type photoswitch that utilizes the thermo-optic effect preparation has been proposed on laser and infrared the 39th volume the 1st phase 46-49 page or leaf, utilize the modulation of the thermo-optic effect realization of waveguide material to the waveguide material refractive index, the path that changes light reaches switching purposes.The Chinese patent (200810061435.1) that people such as Xiao Simiao obtain has proposed a kind of Mach-Zehnder type waveguide type photoswitch based on narrow slit wave-guide, makes the Si waveguide realize switching function according to thermo-optic effect.The Chinese patent (200520102222.0) that people such as Yang Jianyi obtain has proposed a kind of waveguide type photoswitch based on the multi-mode interference coupler structure, realizes light switch function by polymer waveguide.
(2) photoswitch that forms based on electrooptical effect.A kind of waveguide type photoswitch that utilizes the electrooptical effect preparation has been proposed in the United States Patent (USP) (US7317848B2) that people such as Shinji Lio obtain, the method of injecting by charge carrier realizes the modulation to the waveguide material refractive index, and the path that changes light reaches switching purposes.Can also consult the article that people such as article that people such as Qi Wei delivers and Yi-Hsin Lin deliver at Materials 1662-1673 page or leaf in 2009 on No. the 3rd (2009) 034215, CHIN.PHYS.LETT the 26th volume in 2009.
(3) form photoswitch based on acoustooptic effect.People such as David A.Smith have proposed a kind of photoswitch that forms based on acoustooptic effect in the article of delivering on JOURNAL OFLIGHTWAVE TECHNOLOGY the 14th volume the 6th phase 1005-1020 page or leaf in 1996.
(4) form photoswitch based on the light luminous effect.People such as M.J.Potasek have proposed a kind of based on light luminous effect formation photoswitch in the article of delivering on QUANTUM ELECTRONICS the 8th volume the 3rd phase 714-722 page or leaf in 2002.The United States Patent (USP) (5091984) that people such as YujiKobayashi obtain has proposed a kind of photoswitch, utilize light to cause photochromic compound generation photochromic reactions, realization is to the modulation of photochromic compound surrounding medium refractive index, and the path that changes light reaches switching purposes.Can also consult the article that people such as Yuji Kobayashi deliver on MRS.
(5) form photoswitch based on microflow control technique.The Chinese patent (200910191063.X) that people such as Xu Nin obtain utilizes the acting force between the electric charge, controls the variation of material in the tubule that intersects with fluid channel, realizes light switch function.People such as Alex Groisman roll up in the article of delivering on the 18th phase at OPTICS EXPRESS the 16th in 2008 and have proposed a kind of light fluid switch based on diffraction.Can also consult the article that people such as Kyle Campbell delivers on the 85th the 25th phase of volume at APL in 2004.
Above-mentioned based on hot light, electric light, the photoswitch that acousto-optic and light luminous effect form is restricted to material, is not easy to integrated.
Summary of the invention
The objective of the invention is: the waveguide type photoswitch at preparations such as the existing thermo-optic effect of utilizing waveguide material, electrooptical effects is strict to waveguide material, be not easy to integrated present situation, propose a kind of simple in structurely, be convenient to integrated optical switch construction based on optical waveguide.
Consult accompanying drawing 1, accompanying drawing 2 and accompanying drawing 5, technical scheme of the present invention is: a kind of optical switch construction, comprise substrate I 1, structural sheet 2 and substrate II 3 successively, the at least 3 section microchannels parallel with substrate I 1 and substrate II 3 are arranged on the structural sheet 2, one end of each section microchannel interconnects at same position, and wherein the other end of one section microchannel is communicated with input port 7, and the other end of all the other each section microchannels is communicated with delivery outlet I8; Be full of fluid in the microchannel; Identical with the microchannel hop count some metal electrode is in respectively on substrate I 1 and the substrate II 3 on the corresponding position with the fluid in the corresponding microchannel of direct heating; Metal electrode also can be on a plurality of inwalls of structural sheet 2; On the substrate I 1 with structural sheet 2 on input port 7 and the corresponding position of delivery outlet I8 be furnished with perforate.
In order to guarantee metal electrode and fluid insulation, can consult accompanying drawing 5 and accompanying drawing 6 at surface of metal electrode overlie polymer film 10.
Beneficial effect of the present invention is: the principle that changes along with variation of temperature based on the fluid refracting rate, adopt the method for heated by electrodes, cause the metal electrode temperature to raise by metal electrode being applied steady current, because heat transferred, raise with metal electrode fluid in contact regional temperature in the microchannel, make the refractive index of this regional fluid reduce, fluid in microchannel forms the zone with different refractivity, the zone that contacts with metal electrode forms the fluid overlayer, and the fluid mass that is clipped between the fluid overlayer is the fluid ducting layer.Because the refractive index gradient that exists between fluid ducting layer and the fluid overlayer makes light stable propagation in the fluid ducting layer to form optical waveguide, realizes ' opening ' action; When metal electrode was not applied steady current, the refractive index of fluid did not change in the microchannel, can not form optical waveguide, so light scatters out realization ' pass ' action by the medium around the microchannel.
The photoswitch based on optical waveguide that the present invention proposes owing to use any fluid of the same race to make optical waveguide, makes that the material selectivity of optical waveguide is more flexible in microchannel; By simple circuit control, realize the stable propagation and the switching function of light, for all-optical network realizes that large scale integration provides possibility cheaply.
Description of drawings:
Fig. 1 is the structural representation of the photoswitch of the present invention's proposition;
Fig. 2 is the cross sectional representation of optical waveguide among the embodiment 1;
The cut-open view that Fig. 3 cuts for C-C among Fig. 2;
Fig. 4 is the structural representation that structural sheet 2 and metal electrode distribute among the embodiment 1;
Fig. 5 is the cross sectional representation of optical waveguide among embodiment 2 and the embodiment 3;
Fig. 6 is the cut-open view in B-B cross section among Fig. 5;
Fig. 7 is the structural representation that structural sheet 2 and metal electrode distribute among the embodiment 2;
Fig. 8 is the structural representation of photoswitch among the embodiment 3;
Among the figure: 1-substrate I, 2-structural sheet, 3-substrate II, 4-metal electrode I, 5-metal electrode II, 6-metal electrode III, 7-input port, 8-delivery outlet I, 9-solid optical waveguide I, 10-thin polymer film, 11-optical waveguide I, 12-optical waveguide II, 13-optical waveguide III, 14 optical waveguide IV, 15-metal electrode IV, 16-microchannel I, 17-microchannel II, 18-microchannel III, 19-solid optical waveguide II, 20-microchannel IV, 21-delivery outlet II, 22-delivery outlet III.
Specific implementation method
Embodiment 1:
Consult accompanying drawing 1, accompanying drawing 2 and accompanying drawing 4, the optical switch construction based on optical waveguide that the present invention proposes comprises substrate I 1, structural sheet 2 and substrate II 3 successively, and described substrate I 1 and substrate II 3 materials are PI, and structural sheet 2 materials are PDMS; The 3 section microchannels that become y-type structure---the microchannel I16 parallel with substrate I 1 and substrate II 3 arranged on the structural sheet 2, microchannel II17 and microchannel III18, one end of 3 sections microchannels interconnects at same position, wherein the other end of microchannel I16 is communicated with input port 7, and the other end of microchannel II17 and microchannel III18 is communicated with delivery outlet I8; Be full of deionized water in the microchannel; 3 pairs of nickel metal electrodes---nickel metal electrode I4, nickel metal electrode II5 and nickel metal electrode III6 are in respectively on the inwall of structural sheet 2 with the fluid in the corresponding microchannel of direct heating.On the substrate I 1 with structural sheet 2 on be furnished with perforate on input port 7 and the corresponding position of delivery outlet I8.Solid optical waveguide I9 is in the end of microchannel I16, and 2 sections solid optical waveguide II19 are in the end of microchannel II17 and microchannel III18 respectively.
Consult accompanying drawing 4, deionized water is 7 inflow microchannel I16 from the input port, flow into delivery outlet I8 through microchannel II17 and microchannel III18.The principle that changes along with variation of temperature based on the fluid refracting rate, adopt the method for heated by electrodes, cause nickel metal electrode I4 temperature to raise by nickel metal electrode I4 being applied steady current, because heat transferred, the deionized water regional temperature that contacts with nickel metal electrode I 4 among the microchannel I16 raises, make the refractive index of this zone deionized water reduce, deionized water in microchannel I16 forms the zone with different refractivity, the zone that contacts with nickel metal electrode I4 constitutes the fluid overlayer, and the deionized water zone that is clipped between the fluid overlayer constitutes the fluid ducting layer.Owing to have refractive index gradient between fluid ducting layer and the fluid overlayer, make light stable propagation in the fluid ducting layer to form optical waveguide I11, by solid optical waveguide I9 incident light is coupled to stable propagation the among the microchannel I16, realize ' opening ' action; When nickel metal electrode I4 was not applied steady current, the refractive index of deionized water did not change among the microchannel I16, therefore can not form optical waveguide I11, and light scatters out by the medium around the microchannel I16, realized ' pass ' action.And optical waveguide I11 plays the effect of master switch.
When optical waveguide I11 is in ' opening ' state, when nickel metal electrode III6 not applied steady current when nickel metal electrode II5 is applied steady current, the refractive index that causes deionized water among the microchannel II17 changes, and forms optical waveguide II12, realizes ' opening ' action.Light by optical waveguide I11 partly is coupled to stable propagation the among the microchannel II17, finally spreads out of by one section solid optical waveguide II19; And, therefore can not form optical waveguide III13 owing to the refractive index of deionized water among the microchannel III18 does not change, light scatters out by the medium around the microchannel III18, realizes ' pass ' action.
When optical waveguide I11 is in ' opening ' state, when nickel metal electrode II5 not applied steady current when nickel metal electrode III6 is applied steady current, the refractive index that causes deionized water among the microchannel III18 changes, and forms optical waveguide III13, realizes ' opening ' action.Light by optical waveguide I11 partly is coupled to stable propagation the among the microchannel III18, finally spreads out of by one section solid optical waveguide II19; And, therefore can not form optical waveguide II12 owing to the refractive index of deionized water among the microchannel II17 does not change, light scatters out by the medium around the microchannel II17, realizes ' pass ' action.
Embodiment 2:
Consult accompanying drawing 1, accompanying drawing 5 and accompanying drawing 7, the optical switch construction based on optical waveguide that present embodiment proposes comprises substrate I 1, structural sheet 2 and substrate II 3 successively, and described substrate I 1 and substrate II 3 materials are glass, and structural sheet 2 materials are SU-8; The 3 section microchannels that become y-type structure---the microchannel I16 parallel with substrate I 1 and substrate II 3 arranged on the structural sheet 2, microchannel II17 and microchannel III18, one end of 3 sections microchannels interconnects at same position, wherein the other end of microchannel I16 is communicated with input port 7, and the other end of microchannel II17 and microchannel III18 is communicated with delivery outlet I8; Be full of deionized water in the microchannel; 3 pairs of nickel metal electrodes---nickel metal electrode I4, nickel metal electrode II5 and nickel metal electrode III6 are in respectively on substrate I 1 and the substrate II 3 on the corresponding position with the fluid in the corresponding microchannel of direct heating.On the substrate I 1 with structural sheet 2 on be furnished with perforate on input port 7 and the corresponding position of delivery outlet I8.Solid optical waveguide I 9 is positioned at the two ends of microchannel, is used for the input and output of light.In order to guarantee the insulation of nickel metal electrode and deionized water, be the thin polymer film 10 of PI at nickel surface of metal electrode cladding material.
Consult accompanying drawing 7, deionized water is 7 inflow microchannel I16 from the input port, flow into delivery outlet I8 through microchannel II17 and microchannel III18.The principle that changes along with variation of temperature based on the fluid refracting rate, adopt the method for heated by electrodes, cause nickel metal electrode I4 temperature to raise by nickel metal electrode I4 being applied steady current, because heat transferred, the deionized water regional temperature that contacts with nickel metal electrode I4 among the microchannel I16 raises, make the deionized refractive index in this zone reduce, deionized water in microchannel I16 forms the zone with different refractivity, the zone that contacts with nickel metal electrode I4 constitutes the fluid overlayer, and the deionized water zone that is clipped between the fluid overlayer constitutes the fluid ducting layer.Owing to have refractive index gradient between fluid ducting layer and the fluid overlayer, make light stable propagation in the fluid ducting layer to form optical waveguide I11, by solid optical waveguide I9 incident light is coupled to stable propagation the among the microchannel I16, realize ' opening ' action; When nickel metal electrode I4 was not applied steady current, the refractive index of deionized water did not change among the microchannel I16, can not form optical waveguide I11, so light scatters out realization ' pass ' action by the medium around the microchannel I16.
When optical waveguide I11 is in ' opening ' state, when nickel metal electrode III6 not applied steady current when nickel metal electrode II5 is applied steady current, the refractive index that causes deionized water among the microchannel II17 changes, and forms optical waveguide II12, realizes ' opening ' action.Light by optical waveguide I11 partly is coupled to stable propagation the among the microchannel II17, finally spreads out of by one section solid optical waveguide I9; And owing to the refractive index of deionized water among the microchannel III18 does not change, can not form optical waveguide III13, so light scatters out realization ' pass ' action by the medium around the microchannel III18.
When optical waveguide I11 is in ' opening ' state, when nickel metal electrode II5 not applied steady current when nickel metal electrode III6 is applied steady current, cause deionized water change of refractive among the microchannel III18, form optical waveguide III13, realize ' opening ' action.Light by optical waveguide I11 partly is coupled to stable propagation the among the microchannel III18, finally spreads out of by one section solid optical waveguide I9; And owing to the refractive index of deionized water among the microchannel II17 does not change, can not form optical waveguide II12, so light scatters out realization ' pass ' action by the medium around the microchannel II17.
Embodiment 3.:
Consult accompanying drawing 5 and accompanying drawing 8, the optical switch construction based on optical waveguide that present embodiment proposes comprises substrate I 1, structural sheet 2 and substrate II 3 successively, and described substrate I 1 and substrate II 3 materials are PMMA, and structural sheet 2 materials are PDMS; 4 section microchannels---microchannel I16, microchannel II17, microchannel III18 and the microchannel IV20 parallel with substrate I 1 and substrate II 3 are arranged on the structural sheet 2.One end of 4 sections microchannels interconnects at same position, and wherein the other end of microchannel I16 is communicated with input port 7, and the other end of microchannel III18 is communicated with delivery outlet I8; The other end of microchannel IV20 is communicated with delivery outlet II21; The other end of microchannel II17 is communicated with delivery outlet III22; Be full of calcium chloride solution in the microchannel; 4 pairs of nickel alumin(i)um alloy metal electrodes---nickel alumin(i)um alloy metal electrode I4, nickel alumin(i)um alloy metal electrode II5, nickel alumin(i)um alloy metal electrode III6 and nickel alumin(i)um alloy metal electrode IV15 are in respectively on substrate I 1 and the substrate II 3 on the corresponding position with the fluid in the corresponding microchannel of direct heating.On the substrate I 1 with structural sheet 2 on input port 7, delivery outlet I8 is furnished with perforate on delivery outlet II21 and the corresponding position of delivery outlet III22.Solid optical waveguide I9 is in the end of microchannel I16, and 3 sections solid optical waveguide II19 are in microchannel II17 respectively, the end of microchannel III18 and microchannel IV20.
Consult accompanying drawing 8, the principle that changes along with variation of temperature based on the fluid refracting rate, adopt the method for heated by electrodes, cause nickel alumin(i)um alloy metal electrode I4 temperature to raise by nickel alumin(i)um alloy metal electrode I4 being applied steady current, because heat transferred, the calcium chloride solution regional temperature that contacts with nickel alumin(i)um alloy metal electrode I4 among the microchannel I16 raises, make the refractive index of this zone calcium chloride solution reduce, calcium chloride solution in microchannel I16 forms the zone with different refractivity, the zone that contacts with nickel alumin(i)um alloy metal electrode I4 constitutes the fluid overlayer, and the calcium chloride solution zone that is clipped between the fluid overlayer constitutes the fluid ducting layer.Owing to have refractive index gradient between fluid ducting layer and the fluid overlayer, make light stable propagation in the fluid ducting layer to form optical waveguide I11, by solid optical waveguide I9 incident light is coupled to stable propagation the among the microchannel I16, realize ' opening ' action; When nickel alumin(i)um alloy metal electrode I4 was not applied steady current, the refractive index of the calcium chloride solution among the microchannel I16 did not change, and therefore can not form optical waveguide I11, and light scatters out by the medium around the microchannel I16, realized ' closing action.And optical waveguide I11 plays the effect of master switch.
When optical waveguide I11 is in ' opening ' state, by to nickel alumin(i)um alloy metal electrode II5, any nickel alumin(i)um alloy metal electrode applies steady current and remaining does not apply steady current among nickel alumin(i)um alloy metal electrode III6 and the nickel alumin(i)um alloy metal electrode IV15, the refractive index that can cause calcium chloride solution in the corresponding microchannel changes, form optical waveguide, realize ' opening ' action.Light by optical waveguide I11 partly is coupled in the corresponding microchannel, finally by one section solid optical waveguide II19 output.And not applying the nickel alumin(i)um alloy metal electrode of steady current, the refractive index of calcium chloride solution does not change in its corresponding microchannel, therefore can not form optical waveguide, realizes that ' passs ' move.

Claims (3)

1. optical switch construction, comprise substrate I (1), structural sheet (2) and substrate II (3) successively, the at least 3 section microchannels parallel with substrate II (3) with substrate I (1) are arranged on the structural sheet (2), one end of each section microchannel interconnects at same position, wherein the other end of one section microchannel is communicated with input port (7), and the other end of all the other each section microchannels is communicated with delivery outlet (8); Be full of fluid in the microchannel; Identical with the microchannel hop count some metal electrode is in substrate I (1) respectively and substrate II (3) goes up on the corresponding position with the fluid in the corresponding microchannel of direct heating; Substrate I (1) goes up and structural sheet (2) is gone up input port (7) and delivery outlet (8) is furnished with perforate on the position accordingly.
2. an optical switch construction as claimed in claim 1 is characterized in that, described metal electrode position replaces with on the inwall that is on the structural sheet (2).
3. an optical switch construction as claimed in claim 1 or 2 is characterized in that, described surface of metal electrode overlie polymer film (10).
CN2010101288431A 2010-03-19 2010-03-19 Optical switch structure Expired - Fee Related CN101840076B (en)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4887884A (en) * 1989-02-23 1989-12-19 Unisys Corporation Capillary non-linear optical waveguide device
US4988157A (en) * 1990-03-08 1991-01-29 Bell Communications Research, Inc. Optical switch using bubbles
US5444807A (en) * 1993-03-29 1995-08-22 World Precision Instruments, Inc. Micro chemical analysis employing flow through detectors
CN101120275A (en) * 2005-02-17 2008-02-06 皇家飞利浦电子股份有限公司 An optical waveguide
CN101187717A (en) * 2007-12-07 2008-05-28 南京邮电大学 Micro-fluidic array optical switch chip
US20090097808A1 (en) * 2004-07-30 2009-04-16 President And Fellows Of Harvard College Fluid waveguide and uses thereof

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4887884A (en) * 1989-02-23 1989-12-19 Unisys Corporation Capillary non-linear optical waveguide device
US4988157A (en) * 1990-03-08 1991-01-29 Bell Communications Research, Inc. Optical switch using bubbles
US5444807A (en) * 1993-03-29 1995-08-22 World Precision Instruments, Inc. Micro chemical analysis employing flow through detectors
US20090097808A1 (en) * 2004-07-30 2009-04-16 President And Fellows Of Harvard College Fluid waveguide and uses thereof
CN101120275A (en) * 2005-02-17 2008-02-06 皇家飞利浦电子股份有限公司 An optical waveguide
CN101187717A (en) * 2007-12-07 2008-05-28 南京邮电大学 Micro-fluidic array optical switch chip

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