CN101834117B - Cavity door locking device - Google Patents
Cavity door locking device Download PDFInfo
- Publication number
- CN101834117B CN101834117B CN2010101075435A CN201010107543A CN101834117B CN 101834117 B CN101834117 B CN 101834117B CN 2010101075435 A CN2010101075435 A CN 2010101075435A CN 201010107543 A CN201010107543 A CN 201010107543A CN 101834117 B CN101834117 B CN 101834117B
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- China
- Prior art keywords
- chamber door
- connecting rod
- cavity
- cavity wall
- spring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 238000007789 sealing Methods 0.000 claims abstract description 38
- 230000006835 compression Effects 0.000 abstract 1
- 238000007906 compression Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 13
- 238000005516 engineering process Methods 0.000 description 10
- 239000000758 substrate Substances 0.000 description 8
- 238000004049 embossing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
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Abstract
The invention discloses a cavity door locking device, which is suitable for locking a cavity door on a cavity wall and can release the locking. The cavity door locking device comprises a handle, a stopper and a spring; the handle is outwards protruded out of a lug boss, the lug boss is outwards protruded out of a connecting rod, the tail end of the connecting rod is provided with a screw thread and forms a threaded part, and the lug boss is provided with a first ring groove surrounding the connecting rod; the spring passes through the connecting rod, one end of the spring is arranged in the first ring groove, and the other end of the spring is protruded out of the first ring groove; and the cavity door is penetrated and provided with a mounting hole, an internal thread is formed in the mounting hole, the cavity wall opposite to the mounting hole is provided with a threaded hole with an internal thread, a seal ring is provided with the cavity wall, the threaded part of the connecting rod is in threaded connection with the mounting hole, and the lug boss is separately contacted with the external surface of the cavity door. The cavity door locking device can share the compression quantity of a sealing ring on the cavity door, does not fall when the cavity door is opened, has a simple structure, and is labor-saving and convenient to operate.
Description
Technical field
The present invention relates to a kind of fixture of plate base part, relate in particular to a kind of cavity door locking device that tightly locks in the chamber door on the cavity wall and can remove interlocking that is applicable to.
Background technology
In the manufacturing process of semiconductor device or flat-panel display device, in order to guarantee higher cleannes, usually need in vacuum equipment, finish various technologies, therefore be used for producing the semiconductor devices or the equipment of flat-panel display device, generally be designed to be transported to substrate in the vacuum equipment and utilize plasma that substrate is carried out required technology, with OLED (Organic Light-Emitting Diode, Organic Light Emitting Diode) vacuum evaporation is example, the board transport that processes is indoor to the vacuum technology of sealing, under vacuum condition, the solid material heating evaporation that vacuum technology is indoor, atom that is evaporated or molecule freely are adsorbed on and form film on the substrate gradually, and then form each material layer of OLED.
Existing vacuum processing apparatus generally includes three kinds of vacuum chambers, be load cell, transfer chamber and process chamber, load cell is used for receiving the substrate that will process at equipment so that mounting substrate from outside platform, or the substrate that is used for machining in the output equipment is so that unload carried base board; Transfer chamber is used for transmitting substrate between each chamber; Process chamber is used for utilizing under vacuum environment plasma or heat energy that substrate is carried out required technology, as vacuum evaporation or etch process etc.Because process chamber utilizes various processing gas or plasma gas to come a large amount of technologies of repetition, therefore, the equipment in the process chamber is easy to impaired or contaminated, thereby needs periodic replacement or maintenance.Therefore, process chamber generally is designed to be made of the cavity of hollow structure and able to turn on or off chamber door sealing, the chamber door can be opened so that to safeguarding or change in process chamber inside, and the sealing of process chamber inside is closed and wanted to guarantee to the chamber door when carrying out processing step, therefore usually at chamber door installed inside sealing ring, when closing, the chamber door guarantees chamber door and cavity sealing, after closing, the chamber door also need a fixture that the chamber door is fixedlyed connected with cavity, with the sealing of further reinforcement vacuum technology chamber and the fail safe of assurance operation.
Existing being used for is fixed in device on the cavity wall with the chamber door, the general knob that adopts head to have screw thread, the middle part of knob has embossing, on the door of chamber, run through and offer and the corresponding installing hole of knob, offer on the cavity wall and the corresponding screwed hole of installing hole, be used for being connected, when the chamber door is closed with knob, to in the screwed hole on the head screw-in cavity wall of knob chamber door and cavity wall be fixed, chamber door and cavity wall compress the sealing that realizes the vacuum technology chamber; Yet, for the sealing needs that keep vacuum technology chamber precession embossing knob to greatest extent, all like this pressure all need be born by the sealing ring on the door of chamber, causes sealing ring compressing amount excessive and influence sealing effectiveness, has also shortened the useful life of sealing ring simultaneously; When needing to open the chamber door, knob need be screwed out the screwed hole on the cavity wall, in the door opening process of chamber, break away from the installing hole on the door of chamber like this under the effect of knob at gravity easily, for use brings inconvenience.
Therefore, be badly in need of a kind ofly sharing sealing ring compressing amount, when the chamber door is opened, can prevent to come off and locking device easy and simple to handle.
Summary of the invention
The object of the present invention is to provide and a kind ofly can share sealing ring compressing amount, when the chamber door is opened, can prevent to come off and fixture easy and simple to handle.
For achieving the above object, technical scheme of the present invention is: a kind of cavity door locking device is provided, be applicable to and tightly lock in the chamber door on the cavity wall and can remove interlocking, it comprises handle and spring, described handle outwards protrudes out boss, described boss outwards protrudes out connecting rod, the end of described connecting rod offers screw thread and forms the threaded portion, described boss offers first annular groove around described connecting rod, described spring is arranged on the described connecting rod and an end is installed in described first annular groove, the other end of described spring protrudes out described first annular groove, described chamber door runs through and offers installing hole, offer internal thread in the described installing hole, described cavity wall offers the screwed hole with internal thread over against described installing hole, on the described cavity wall sealing ring is installed, the threaded portion of described connecting rod is threaded with described installing hole, and described boss contacts discretely with the outer surface of described chamber door.
Preferably, have on the outer surface of described chamber door and corresponding second annular groove of described first annular groove, described second annular groove is used to hold the end that described spring stretches out first annular groove, the threaded portion of handle screws in the installing hole on the cavity wall and when being connected with cavity wall, the outer surface of the boss of handle and described chamber door is inconsistent, the end that spring stretches out first annular groove is placed in second annular groove on the door of chamber and is compressed, the elastic force that spring produces reduces the boss of handle to chamber door applied pressure, make chamber door and cavity wall keep the distance that is fit to, share the compressing amount of the sealing ring between chamber door and the cavity wall, be that sealing ring between holding chamber door and the cavity wall has suitable compressing amount, guarantee good sealing effectiveness between chamber door and the cavity wall, and increase the useful life of sealing ring.
When chamber door and cavity wall pressing, sealing ring is exerted pressure, make between chamber door and the cavity wall to keep good sealing property, keep processing chamber inside to have good vacuum.
Compared with prior art, because cavity door locking device of the present invention comprises handle and spring, described handle outwards protrudes out boss, described boss outwards protrudes out connecting rod, the end of described connecting rod offers screw thread and forms the threaded portion, described boss offers first annular groove around described connecting rod, described spring is arranged on the described connecting rod and an end is installed in described first annular groove, the other end of described spring protrudes out described first annular groove, described chamber door runs through and offers installing hole, offer internal thread in the described installing hole, described cavity wall offers the screwed hole with internal thread over against described installing hole, the threaded portion of described connecting rod is threaded with described installing hole, and described boss contacts discretely with the outer surface of described chamber door; When the chamber door is closed, rotary handle makes the threaded portion stretch out installing hole on the door of chamber, and with in the screwed hole on the threaded portion precession cavity wall, the threaded portion is threaded with cavity wall, the chamber door is fixed on the cavity wall, the outer surface of the boss of handle and described chamber door is inconsistent, spring of installing on the boss and chamber door are inconsistent and be compressed, the elastic force that spring produces reduces the boss of handle to chamber door applied pressure, make chamber door and cavity wall keep the distance that is fit to, make the sealing ring between chamber door and the cavity wall maintain suitable compressing amount, and then guarantee the sealing effectiveness of chamber door and cavity wall, prolong the useful life of sealing ring simultaneously; When opening the chamber door, rotary handle makes the threaded portion withdraw from the screwed hole of cavity wall, and the threaded portion is threaded with installing hole on the door of chamber, the outer surface of the boss of handle and chamber door is separated, in the process that the chamber door is opened, cavity door locking device can not break away from the chamber door, makes things convenient for the frequent unlatching of chamber door, this cavity door locking device is simple in structure simultaneously, and is easy and simple to handle laborsaving.
Description of drawings
Fig. 1 is the schematic cross-section of cavity door locking device of the present invention.
Fig. 2 is the exploded cross-sectional schematic diagram of cavity door locking device shown in Figure 1.
Fig. 3 is the schematic cross-section of the user mode of cavity door locking device shown in Figure 1.
Embodiment
With reference now to accompanying drawing, describe embodiments of the invention, the similar elements label is represented similar elements in the accompanying drawing.
As Fig. 1, shown in Figure 2, cavity door locking device 300 of the present invention is used for chamber door 200 lockings of closure on cavity wall 100, and can remove institute connects chamber door 200 is opened, cavity door locking device 300 comprises handle 310 and spring 320, handle 310 outwards protrudes out boss 311, boss 311 outwards protrudes out connecting rod 312, the end of connecting rod 312 offers screw thread and forms threaded portion 313, offer first annular groove 314 on the boss 311 around connecting rod 312, spring 320 is arranged on the connecting rod 312 and an end is installed in first annular groove 314, and the other end of spring 320 protrudes out first annular groove 314; Chamber door 200 has inner surface 201 and outer surface 202, and inner surface 201 is connected with cavity wall 100, runs through offering and handle 310 corresponding installing holes 203 on chamber door 200, offers in the installing hole 203 and threaded portion 313 corresponding internal threads; Offer the screwed hole 101 with internal thread over against installing hole 203 on the cavity wall 100, screwed hole 101 is used for being threaded with the threaded portion 313 of connecting rod 312 ends; The threaded portion 313 of handle 310 ends is stretched in the installing hole 203 on the chamber door 200 and with installing hole 203 by chamber door exterior surface 202 and is threaded, and boss 311 is conflicted discretely with the outer surface 202 of chamber door 200; On the outer surface 202 of chamber door 200, also be provided with first annular groove, 314 corresponding second annular groove, 204, the second annular grooves 204 and be used to hold the end that spring 320 stretches out first annular groove 314.During installation, spring 320 is arranged on the connecting rod 312 and the one end is packed in first annular groove 314 on the boss 311, the other end of spring 320 stretches out first annular groove 314, after installing spring 320, stretch into installing hole 203 in by the outer surface 202 of chamber door 200 threaded portion 313 of connecting rod 312 ends and threaded portion 313 is threaded with installing hole 203, the outer surface 202 of boss 311 and chamber door 200 is conflicted discretely; Sealing ring 102 also is installed on the cavity wall 100.
As shown in Figure 3, during use, door 200 closures in chamber are in reaching sealing by the sealing ring 102 that is installed on the cavity wall 100 on the cavity wall 100 and between the two, cavity door locking device 300 is used for the chamber door 200 of closure on cavity wall 100 fixing, when chamber door 200 is closed, rotary handle 310, make the threaded portion 313 of connecting rod 312 ends pass installing hole 203 and screw in the screwed hole 101 on the cavity wall 100, handle 310 is threaded with cavity wall 100, chamber door 200 is fixedlyed connected with cavity wall 100, the pressure that the sealing ring of installing on the cavity wall 100 102 is subjected to chamber door 200 seals cavity wall 100 and chamber door 200 well, behind the screwed hole 101 that the threaded portion 313 of handle 310 screws on the cavity wall 100, the end that spring 320 stretches out first annular groove 314 is contained in second annular groove 204 on the chamber door 200, boss 311 contacts with chamber door 200 outer surfaces 202, spring 320 is compressed, the elastic force that spring 320 produces reduces 311 pairs of chamber door 200 applied pressures of boss, make and keep suitable distance between chamber door 200 and the cavity wall 100, and then alleviation is installed on the pressure of the sealing ring 102 on the cavity wall 100, improve the compressing amount of sealing ring 102, make the sealing effectiveness between chamber door 200 and the cavity wall 100 better, and improve the useful life of sealing ring 102; When needs are opened chamber door 200, rotary handle 310 makes the threaded portion 313 of connecting rod 312 ends withdraw from screwed hole 101 on the cavity wall 100, and threaded portion 313 is threaded with installing hole 203 on the chamber door 200, boss 311 is separated with chamber door 200 outer surfaces 202, after chamber door 200 is opened, since the threaded portion of handle 310 be threaded with installing hole 203 on the chamber door 200, handle 310 can not break away from chamber door 200, make things convenient for the frequent unlatching of chamber door 200, and convenient for assembly and replacing, easy and simple to handle laborsaving.
Because cavity door locking device 300 of the present invention comprises handle 310 and spring 320, handle 310 outwards protrudes out boss 311, boss 311 outwards protrudes out connecting rod 312, the end of connecting rod 312 offers screw thread and forms threaded portion 313, offer first annular groove 314 on the boss 311 around connecting rod 312, spring 320 is arranged on the connecting rod 312 and an end is installed in first annular groove 314, the other end of spring 320 protrudes out first annular groove 314, chamber door 200 runs through and offers installing hole 203, offer in the installing hole 203 and threaded portion 313 corresponding internal threads, cavity wall 100 offers the screwed hole 101 with internal thread over against installing hole 203, the threaded portion 313 of connecting rod 312 is threaded with installing hole 203, and boss 311 contacts discretely with the outer surface 202 of chamber door 200; When chamber door 200 is closed, the bar 312 that is rotatably connected makes the threaded portion 313 of its front end stretch out installing hole 203, and with in the screwed hole 101 on the 313 precession cavity walls 100 of threaded portion, threaded portion 313 is threaded with cavity wall 100, chamber door 200 is fixed on the cavity wall 100, the boss 311 of handle 310 is inconsistent with the outer surface 202 of chamber door 200, the spring of installing on the boss 311 320 and chamber door 100 are inconsistent and be compressed, the elastic force that spring 320 produces reduces 311 pairs of chamber door 200 applied pressures of boss, make chamber door 200 and cavity wall 100 keep the distance that is fit to, make the sealing ring 102 that is installed on the cavity wall 100 maintain suitable compressing amount, and then guarantee the sealing effectiveness of chamber door 200 and cavity wall 100, prolong the useful life of sealing ring 102 simultaneously; When opening chamber door 200, rotary handle 310 makes threaded portion 313 withdraw from the screwed hole 101 of cavity wall 100, and threaded portion 313 is threaded with installing hole 203 on the chamber door 200, the boss 311 of handle 310 is separated with the outer surface 202 of chamber door 200, in the process that chamber door 200 is opened, handle 310 can not break away from chamber door 200, makes things convenient for the frequent unlatching of chamber door 200, and convenient for assembly and replacing, easy and simple to handle laborsaving.
Cavity door locking device 300 of the present invention is not limited to the chamber door 200 of closure on cavity wall 100 fixing, also can be used for the fixing of similar plate base part according to actual needs.
The lumen door 200 of the present invention and the mounting means of cavity wall 100, the mounting means of sealing ring 102 etc. are well known to those of ordinary skill in the art, no longer are described in detail at this.
Above disclosed only is the preferred embodiments of the present invention, can not limit the present invention's interest field certainly with this, and therefore the equivalent variations of being done according to the present patent application claim still belongs to the scope that the present invention is contained.
Claims (2)
1. cavity door locking device, be applicable to and tightly lock in the chamber door on the cavity wall and can remove interlocking, it is characterized in that: described cavity door locking device comprises handle and spring, described handle outwards protrudes out boss, described boss outwards protrudes out connecting rod, the end of described connecting rod offers screw thread and forms the threaded portion, described boss offers first annular groove around described connecting rod, described spring is arranged on the described connecting rod and an end is installed in described first annular groove, the other end of described spring protrudes out described first annular groove, described chamber door runs through and offers installing hole, offer internal thread in the described installing hole, described cavity wall offers the screwed hole with internal thread over against described installing hole, on the described cavity wall sealing ring is installed, the threaded portion of described connecting rod is threaded with described installing hole, and described boss contacts discretely with the outer surface of described chamber door.
2. cavity door locking device as claimed in claim 1 is characterized in that: have on the outer surface of described chamber door and corresponding second annular groove of described first annular groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101075435A CN101834117B (en) | 2010-01-29 | 2010-01-29 | Cavity door locking device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101075435A CN101834117B (en) | 2010-01-29 | 2010-01-29 | Cavity door locking device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101834117A CN101834117A (en) | 2010-09-15 |
| CN101834117B true CN101834117B (en) | 2011-12-14 |
Family
ID=42718145
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010101075435A Expired - Fee Related CN101834117B (en) | 2010-01-29 | 2010-01-29 | Cavity door locking device |
Country Status (1)
| Country | Link |
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| CN (1) | CN101834117B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114631730B (en) * | 2022-03-21 | 2022-12-13 | 宁波方太厨具有限公司 | Water tank assembly of household appliance and household appliance |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6394779B1 (en) * | 2001-06-28 | 2002-05-28 | Toyo Tire & Rubber Co., Ltd. | Molding tool for molding with cylindrical core |
| CN2778769Y (en) * | 2003-09-19 | 2006-05-10 | 黄健 | Slow retracting device of automatic pipe crimping equipment |
| CN1769515A (en) * | 2004-11-05 | 2006-05-10 | 应用菲林股份有限两合公司 | Cathode arrangement for atomizing a rotatable target pipe |
| CN101032798A (en) * | 2007-05-10 | 2007-09-12 | 中国人民解放军第二炮兵装备研究院第四研究所 | Exchanging interface device of automatization tool |
| CN201629299U (en) * | 2010-01-29 | 2010-11-10 | 东莞宏威数码机械有限公司 | Locking mechanism |
-
2010
- 2010-01-29 CN CN2010101075435A patent/CN101834117B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6394779B1 (en) * | 2001-06-28 | 2002-05-28 | Toyo Tire & Rubber Co., Ltd. | Molding tool for molding with cylindrical core |
| CN2778769Y (en) * | 2003-09-19 | 2006-05-10 | 黄健 | Slow retracting device of automatic pipe crimping equipment |
| CN1769515A (en) * | 2004-11-05 | 2006-05-10 | 应用菲林股份有限两合公司 | Cathode arrangement for atomizing a rotatable target pipe |
| CN101032798A (en) * | 2007-05-10 | 2007-09-12 | 中国人民解放军第二炮兵装备研究院第四研究所 | Exchanging interface device of automatization tool |
| CN201629299U (en) * | 2010-01-29 | 2010-11-10 | 东莞宏威数码机械有限公司 | Locking mechanism |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101834117A (en) | 2010-09-15 |
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