CN101833135B - Transmission-type grating phase shifter - Google Patents
Transmission-type grating phase shifter Download PDFInfo
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- CN101833135B CN101833135B CN201010177651XA CN201010177651A CN101833135B CN 101833135 B CN101833135 B CN 101833135B CN 201010177651X A CN201010177651X A CN 201010177651XA CN 201010177651 A CN201010177651 A CN 201010177651A CN 101833135 B CN101833135 B CN 101833135B
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Abstract
The invention relates to a transmission-type grating phase shifter, which is characterized by consisting of a first transmission-type grating, a second transmission-type grating and a third transmission-type grating which have the same grating structure, wherein the second grating and the third grating are positioned on the same plane; a grating surface of the first grating is opposite and mutually parallel to those of the second grating and the third grating and is vertically fixed on a device with an incident light beam; the device is provided with a precise fine-adjustment mechanism for controlling the second grating to move along a direction which is vertical the incident light beams and a grating groove; and the first grating, the second grating and the third grating have the same grating period d, duty ratio f and grating depth h, and d meets a relation formula, namely d is more than lambda and is less than 2 lambda, wherein lambda is the wavelength of incident light, the duty ratio f is equal to 0.4, and the grating depth h is equal to 1.074. The transmission-type grating phase shifter not only can be used for continuous phase shifting of continuous laser interference areas, but also can be used for the interference measurement of two-beam short pulses and ultra-short pulse lasers.
Description
Technical field
The present invention relates to transmission grating, particularly a kind of transmission-type grating moves phase-shifter.
Background technology
As everyone knows, laser makes it have widely in laser accurate detection, high-accuracy processing, scientific research and industrial various fields and uses with numerous advantages such as its exclusive coherence, high brightness, monochromaticity and good directivity.
Fast development along with laser technology, laser interferometry technology correspondingly also reaches its maturity, but the phase-shifter device that in the past was configured to laser interferometry comprises semi-transparent semi-reflecting lens, the quartz plate of plane mirror, plated film and many optical elements complicated to the laser interference light path.The use of these optical elements has not only increased the complexity that light path is regulated, has increased the cost of phase-shifter device, but also has increased the error of experimental result.
In recent years, Zhou Changhe etc. have invented fused quartz transmission 1 x2 grating and have successfully realized the polarization beam splitting function.This device has efficiency of transmission height, low cost and other advantages [referring to technology 1: Zhou Changhe formerly, Wang Bo, patent of invention, application number: 200710048186.8].Ding Zhihua etc. propose to adopt the whole-field optically coherent chromatographic imaging device of no-dispersion phase shifter, but phase-shifter wherein used two fast axles from the horizontal by λ/4 wave plates of 45 degree, the two rotatable λ of quick shaft direction/2 wave plates etc. than the element of complex and expensive [referring to formerly technology 2: Ding Zhihua, Yang Yaliang, Wu Ling, patent of invention, application number: 200610052451.5].H.U. employing optical mask plates such as A Erpulai, R.H. French, F.D. Ka Erke have been invented a kind of phase-shifter, but need to plate uneven decay film on its mask plate, the complicated coating technique of this Technology Need is [referring to formerly technology 3:H.U. A Erpulai, R.H. French, F.D. Ka Erke, patent of invention, application number: 93112904.4].
In the patented technology of above-mentioned relevant composition phase-shifter, major part all is to use more optical element such as deflection microslide, λ/4 wave plates, λ/2 wave plates or needs complicated optical coating technology.
Summary of the invention
The technical matters that the present invention mainly solves is to overcome the function that the above-mentioned phase-shifter of technology formerly can not be realized continuous phase shift, and a kind of phase-shifter based on transmission-type grating is provided, and can realize the characteristics of continuous phase shift, has important application prospects.
Technical solution of the present invention is as follows:
A kind of transmission-type grating phase shifter, its characteristics are first grating by the identical transmission-type of optical grating construction, second grating and the 3rd optical grating constitution, described second grating and the 3rd grating be in same plane, the grating face of the grating face of described first grating and described second grating and the 3rd grating in opposite directions, be parallel to each other and be vertically fixed on the device with incident beam, this device has control second grating along the Precision trimming mechanism that moves perpendicular to incident beam direction and grating groove, described first grating, the grating cycle d of second grating and the 3rd grating, dutycycle f is identical with grating degree of depth h, d satisfies relational expression λ＜d＜2 λ, wherein λ is a lambda1-wavelength, dutycycle f=0.4, grating degree of depth h=1.074 micron.
For certain wavelengths, can be by optimizing dutycycle, cycle and the degree of depth of grating, the feasible first-order diffraction efficient of just (bearing) is maximum and equal.For example, for the laser of 800 nano wave lengths, draw dutycycle f=0.4 when grating by optimization, when cycle d=1.501 micron and degree of depth h=1.074 micron (this degree of depth is controlled easily), just (to bear) first-order diffraction efficient be maximal value and equate.
Foundation of the present invention is as follows:
Parallel beam D and the phasic difference between the light beam E by three grating phase shifters or generation can prove by the theoretical accurate Calculation of rigorous coupled wave.
When coordinate x direction of principal axis is set at the incident beam direction vertical with the grating groove, getting positive one-level light beam is the true origin of x axle at the intersection point of the 3rd grating, then incident light by first grating and diffraction the negative one-level light of second grating and the positive one-level light of the 3rd grating can be expressed as respectively:
E
-1＝E
0?exp[-i(wt-k
xx)]
E
+1＝E
0?exp[-i(wt)]
E
+ 1And E
-1Between phase differential can be expressed as
This shows, change the position x of second grating, can change the phase relation between two diffracted beams, this is a basis of the present invention.
Technique effect of the present invention:
By adjusting the control second grating Precision trimming mechanism, make second grating along the accurately mobile phase place that can continuously change between two diffracted beams perpendicular to incident beam direction and grating groove.The present invention not only can be used for the continuous phase shift of continuous laser interference region, can also be used for the interferometry of two-beam short pulse and ultra-short pulse laser.In the past device relatively, advantage such as it is low, simple in structure to have a cost, and easy of integrationization is convenient to regulate, and volume is little, and is in light weight is in laser interferometry with in the micro-nano processing boundless application prospect is arranged fast.
Description of drawings
Fig. 1 is the structural representation of transmission-type grating phase shifter embodiment 1 of the present invention
" G1 ", " G2 " and " G3 " indication cycle transmission-type grating identical with the degree of depth are fixed in the light path to these grating parallel opposed longer sides.Cycle λ＜the d of grating＜2 λ.Wherein grating " G2 " is assemblied on the accurate transfer table, can move towards the vertical direction X-axis.H and d are respectively the groove depth and the cycle of grating, and B and C are respectively the positive and negative first-order diffraction light of A light.θ is an angle of diffraction.
Fig. 2 is the synoptic diagram of phase-shifter real-time monitored of the present invention system.
Fig. 3 be in the phase-shifter device of the present invention used grating just (bear) one-level and Zero-order diffractive efficient variation relation figure with the grating degree of depth;
Fig. 4 sees interference fringe picture and the variation diagram of the positive first-order diffraction light E of the negative first-order diffraction light D of the second grating G2 tear open and the 3rd grating G3 at focal zone by the systematic observation of Fig. 2 real-time monitored.
Fig. 5 sees interference fringe picture and the variation diagram of the positive first-order diffraction light E of the negative first-order diffraction light D of the second grating G2 tear open and the 3rd grating G3 at focal zone by the systematic observation of Fig. 2 real-time monitored
Embodiment
The invention will be further described below in conjunction with embodiment and accompanying drawing, but should not limit protection scope of the present invention with this.
See also Fig. 1 earlier, Fig. 1 is the structural representation of transmission-type grating phase shifter embodiment 1 of the present invention, as seen from the figure, transmission-type grating phase shifter of the present invention, the first grating G1 by the identical transmission-type of optical grating construction, the second grating G2 and the 3rd grating G3 constitute, described second grating G2 and the 3rd grating G3 are in same plane, the grating face of the grating face of the described first grating G1 and described second grating G2 and the 3rd grating G3 in opposite directions, be parallel to each other and be vertically fixed on one and install on the s with incident beam, this device s has the control second grating G2 along the Precision trimming mechanism that moves perpendicular to incident beam direction and grating groove, the described first grating G1, the grating cycle d of the second grating G2 and the 3rd grating G3, dutycycle f is identical with grating degree of depth h, d satisfies relational expression λ＜d＜2 λ, wherein λ is a lambda1-wavelength, dutycycle f=0.4, grating degree of depth h=1.074 micron.
Grating among the present invention adopts the quartzy grating of micronano optical fabrication techniques high density 1x2 transmission-type, at first utilize holographic technique scribbling positive photoetching rubber (Shipley S1818, USA) write down high dencity grating on the chromium film, then it is developed, spend chrome liquor subsequently the photoetching grating pattern is transferred on the chromium film, and use chemical method that residual photoresist is removed.At last, utilize the microelectronics etching technics, manufactured samples is put into inductively coupled plasma etching machine carry out etching, further remove the residue chromium on the quartz substrate again, be made into the quartzy grating of required 1x2 transmission-type.
Two grating dutycycle f=0.4, their cycle all is 1＜d＜2 micron, depth range 0.8＜h＜1.2 micron made high dencity grating is easy to operate to structure phase-shifter measurement mechanism.
In an embodiment, the second grating G2 is fixed on the precise mobile platform, phase shift between twin-beam D and the E can be regulated moving of X-direction by controlling the second grating G2 like this, and the mobile accuracy of fixing the mobile platform of the second grating G2 is tens nanometers, and this just means that the phase-shifter of being made up of two gratings can realize π/4 or littler phase-shift phase between light beam D and the light beam E.
As shown in Figure 2, light beam A forms light beam B and light beam C by the first grating G1, and light beam B passes through second grating G2 and the three grating G3 identical with the first grating G1 cycle and the degree of depth again with light beam C.According to grating equation, the light beam D and the light beam E of outgoing are parallel to each other respectively from the second grating G2 and the 3rd grating G3.After scioptics L1 focused on again, light beam D and E interference fringe occurred at the zone of convergence of lens L1.
Phase change between light beam D and the light beam E can prove by the rigorous coupled wave Theoretical Calculation.Phase-shifter device of the present invention not only can be applied to laser interferometry, laser speckle phase shift detection aspect, and can be used as a kind of interferometer and be widely used in the Technology of Precision Measurement.
Fig. 3 be in the phase-shifter device of the present invention used grating just (bear) one-level and Zero-order diffractive efficient variation relation figure with the grating degree of depth;
The second grating G2 and the 3rd grating G3 be about incident ray A fully during symmetry in the transmission-type grating phase shifter of the present invention (as Fig. 1), the negative first-order diffraction light beam E of the positive first-order diffraction light beam D of the second grating G2 and the 3rd grating G3 in the interference fringe of focal zone shown in Fig. 4 (last figure).After the second grating G2 groove staggers 1/2 grating during the cycle at X axis, and incident laser passes through the second grating G2 and the 3rd grating G3, owing to there is the phase differential of π between two bundle diffracted beam D and the diffracted beam E, cause the deepening of interference region bright fringes, dark fringe brightens.Be that the whole along continuous straight runs of striped has moved a fringe spacing.This situation analysis the results are shown in Figure figure below of 4.
Fig. 5 sees interference fringe picture and the variation diagram of the positive first-order diffraction light E of the negative first-order diffraction light D of the second grating G2 tear open and the 3rd grating G3 at focal zone by the systematic observation of Fig. 2 real-time monitored, less than a striped.
This device has been avoided other optical elements such as use beam splitter and wave plate, and is easy to operate, is convenient to realize the continuous phase shift of interference region.This device can produce fields such as being used for laser accurate detection technique, high-accuracy processing and laser interferometry, has very strong practical value.
Claims (1)
1. transmission-type grating phase shifter, be characterised in that first grating (G1) of the transmission-type that its formation comprises that optical grating construction is identical, second grating (G2) and the 3rd grating (G3), described second grating (G2) and the 3rd grating (G3) are in same plane, the grating face of the grating face of described first grating (G1) and described second grating (G2) and the 3rd grating (G3) in opposite directions, be parallel to each other and be vertically fixed on the same device (S) with incident beam, described first grating (G1), the grating groove direction of second grating (G2) and the 3rd grating (G3) is parallel to each other, this device (S) has control second grating (G2) along the Precision trimming mechanism that moves with all vertical direction of described incident beam direction and grating groove direction, described first grating (G1), the grating cycle d of second grating (G2) and the 3rd grating (G3), dutycycle f is identical with grating degree of depth h, d satisfies relational expression λ＜d＜2 λ, wherein λ is a lambda1-wavelength, dutycycle f=0.4, grating degree of depth h=1.074 micron.
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| CN201010177651XA CN101833135B (en) | 2010-05-14 | 2010-05-14 | Transmission-type grating phase shifter |
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| CN201010177651XA CN101833135B (en) | 2010-05-14 | 2010-05-14 | Transmission-type grating phase shifter |
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| CN101833135B true CN101833135B (en) | 2011-09-14 |
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| CN102222856A (en) * | 2011-04-15 | 2011-10-19 | 中国科学院上海光学精密机械研究所 | Femtosecond laser multi-pulse generating device |
| CN108181676B (en) * | 2016-07-24 | 2020-02-28 | 哈尔滨理工大学 | Duty ratio continuous adjusting method of duty ratio continuous adjusting grating |
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