CN101831621B - Chemical vapor densification furnace body - Google Patents
Chemical vapor densification furnace body Download PDFInfo
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- CN101831621B CN101831621B CN201010144907A CN201010144907A CN101831621B CN 101831621 B CN101831621 B CN 101831621B CN 201010144907 A CN201010144907 A CN 201010144907A CN 201010144907 A CN201010144907 A CN 201010144907A CN 101831621 B CN101831621 B CN 101831621B
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Abstract
The invention discloses a chemical vapor densification furnace body which is capable of improving the workpiece densification effect and reducing the workpiece densification quality difference. The chemical vapor densification furnace body is characterized in by comprising a box body (1) and a trolley (7), the trolley (7) gets in and out along the length direction of the box body (1), an air inlet (8) is arranged at the bottom of the trolley (7), an air outlet (11) is arranged on the top of the trolley (7), heating elements (2) are arranged on the two sides, i.e. in the length direction of the box body (1), and the ratio of the height to the width of the box body (1) is 0.6-1.5. The chemical vapor densification furnace body has simple structure, is changed into the box shape from the round shape, improves the workpiece densification effect, and reduces the workpiece densification quality difference. In addition, because the chemical vapor densification furnace body is provided with heating zones which are controlled independently relatively, the energizing and heating time and the power of the heating elements in each heating zone can be conveniently adjusted and controlled independently according to the process requirement so as to keep the temperature in the working zone consistent and the quality of the product of the whole chemical vapor densification furnace body uniform.
Description
Technical field:
The present invention relates to a kind of chemical vapor densification furnace, specifically a kind of chemical vapor densification furnace body.
Background technology:
Carbon/carbon compound material is a kind of novel material, is made up of the carbon fiber reinforced carbon matrix body, and it is low to have density, and specific tenacity is high, and premium propertiess such as wear-resistant corrosion-resistant and high-temperature resistant are increasingly extensive in the application in fields such as aerospace, powder metallurgy and sun power.This novel material is made skeleton with thomel earlier usually; Then it is put in the densifier that feeds carbon-source gas; Carbon-source gas cracking at high temperature produces RESEARCH OF PYROCARBON, and skeleton is carried out the chemical gas phase density, the thomel skeletal density is progressively increased and becomes carbon/carbon compound material.At present, be used for the stove of density to be generally round vertical heater, during use, the one, the comparatively trouble of feeding; The 2nd, because the height and the diameter ratio of this body of heater are too big; Its ratio is generally about 1.5~3; The differing greatly of workpiece its air temperature and current in the stove in the different heights position, the product quality variance of quality product and lower floor that is put in upper strata in the stove is bigger, and the density difference on effect is also bigger.Because during the work of this kind type of furnace, fresh carbon-source gas gets into from furnace bottom, discharges from furnace roof; Be positioned at burner hearth bottom workpiece contact be fresh carbon-source gas, its RESEARCH OF PYROCARBON concentration is higher, and is positioned at the workpiece of burner hearth middle and upper part; Along with increase its position in burner hearth, carbon concentration reduces in the gas that is contacted, and the density effect weakens thereupon; Quality also can be different, and this difference can increase with the height of burner hearth and become big, thereby influences quality product and production efficiency.When selecting height and diameter ratio hour, then production efficiency is too low, also is difficult to meet the needs of production.
Summary of the invention:
The purpose of this invention is to provide a kind of enhancing workpiece density effect, reduce the chemical vapor densification furnace body of workpiece density mass discrepancy.
The present invention adopts following technical scheme to realize its goal of the invention; A kind of chemical vapor densification furnace body; Described body of heater comprises casing, along the chassis of casing length direction turnover, the bottom of chassis is provided with inlet mouth, the top of casing is provided with the air outlet; The both sides of casing are that heating element is installed on the length direction, and the height and the width ratio of said casing is 0.6~1.5.
Temperature is tending towards evenly the base plate heating element being installed on the base plate of chassis in the casing in order to make in the present invention, and casing termination and chassis termination are provided with heating element.
The present invention is for control temperature in the casing better, and the both sides of casing are that length direction is provided with 1 pair~4 pairs heating elements, in casing, forms 1~4 heating zone, and corresponding heating zone, the bottom of chassis is provided with 1~4 inlet mouths.
Heating zone of the present invention is respectively equipped with temperature control unit.
Heating element of the present invention, base plate heating element are processed by graphite or carbon/carbon compound material, and heating element can be made into tabular, also can be combined into palisading type through link block by rod or bar.
Because adopt technique scheme, the present invention has realized goal of the invention preferably, it is simple in structure; Body of heater changes box-shaped into by circle, has strengthened the density effect of workpiece, has reduced the density mass discrepancy of workpiece; Simultaneously, owing to be provided with the heating zone of relatively independent control, be convenient to according to processing requirement; The heating power time and the watt level of each heating zone heating element of regulation and control guarantee that the temperature of WS reaches unanimity separately, in the hope of reaching whole stove product quality homogeneity.
Description of drawings:
Accompanying drawing 1 is a structural representation of the present invention.
Embodiment:
Below in conjunction with accompanying drawing the present invention is described further.
Embodiment 1:
Can know by accompanying drawing 1, a kind of chemical vapor densification furnace, it comprises body of heater, temperature control unit, vacuum unit, carbon-source gas e Foerderanlage, electric control gear and water cooling plant.Described body of heater comprises casing 1, along the chassis 7 of casing 1 length direction turnover; The bottom of chassis 7 is provided with inlet mouth 8; The top of casing 1 is provided with air outlet 11; The both sides of casing 1 are that heating element 2 is installed on the length direction, and the height and the width ratio of said casing 1 is 0.6~1.5 (present embodiment is 0.8).
Temperature is tending towards evenly in the casing 1 in order to make in the present invention, on the base plate 10 of chassis 7 base plate heating element 6 is installed.
The present invention is for control temperature in the casing better; The both sides of casing 1 are that length direction is provided with 1 pair~4 pairs heating elements 2 (present embodiment is 2 pairs); In casing 1, form 1~4 heating zone (present embodiment is 2 separate heating zone), corresponding heating zone, the bottom of chassis 7 is provided with 1~4 inlet mouths 8 (present embodiment is 2).
Heating zone of the present invention is respectively equipped with temperature control unit.
Heating element of the present invention 2, base plate heating element 6 are processed by graphite or carbon/carbon compound material, and heating element can be made into tabular, also can be combined into palisading type (present embodiment heating element 2 and base plate heating element 6 are tabular) through link block by rod or bar.
Chassis 7 of the present invention can pass in and out casing 1 through being laid on the ground guide rail 3 in casing 1 inner bottom part and below thereof, and panel 5 is located on the chassis base plate 10, and workpiece 9 just is put on the panel 5, passes in and out casing 1 with chassis 7.The heating element 2 that is installed in casing 1 both sides has been formed 2 heating zone with the base plate heating element 6 that is installed on the base plate 10, and base plate heating element 6 is installed between base plate 10 and the panel 5.For the temperature that makes body of heater internal heating district (being the WS) is tending towards evenly, the heating zone all is provided with separate temperature detection and gear, and casing 1 top and chassis 7 bottoms are equipped with thermopair 4 and carry out temperature detection.According to processing requirement, can regulate and control the heating power frequency and the watt level thereof of casing 1 each heating zone heating element 2 and base plate heating element 6 separately, guarantee that the temperature of WS in the body of heater reaches unanimity, in the hope of reaching whole stove product quality homogeneity.
Workpiece 9 is put on the panel 5, get into casing 1 with chassis 7 after, earlier chemical vapor densification furnace hearth is evacuated; Be warming up to 1100 ℃ of insulations by processing requirement then, feed carbon-source gas again, carbon-source gas gets into burner hearth from two inlet mouths 8 of the bottom of chassis 7; Cracking at high temperature takes place; The RESEARCH OF PYROCARBON that produces penetrates in the workpiece 9, and workpiece 9 density are progressively increased, and reacted gas is discharged by venting port 11.
Embodiment 2:
The height and the width ratio of said casing 1 is 0.6~1.5 (present embodiment is 1.3), and casing 1 termination and chassis 7 terminations are provided with heating element 2, are regulated and control by separate temperature detection and gear respectively.Surplus with embodiment 1.
Claims (7)
1. chemical vapor densification furnace body; It is characterized in that described body of heater comprise casing (1), along the chassis (7) of casing (1) length direction turnover; The bottom of chassis (7) is provided with inlet mouth (8); The top of casing (1) is provided with air outlet (11), and the both sides of casing (1) are equipped with heating element (2), and the height and the width ratio of said casing (1) is 0.6~1.5.
2. a kind of chemical vapor densification furnace body according to claim 1 is characterized in that on the base plate (10) of chassis (7) base plate heating element (6) being installed.
3. a kind of chemical vapor densification furnace body according to claim 1 is characterized in that casing (1) termination and chassis (7) termination also are provided with heating element (2).
4. according to claim 1 or 2 or 3 described a kind of chemical vapor densification furnace bodies; The both sides that it is characterized in that casing (1) are provided with 1 pair to 4 pairs heating element (2); In casing (1), form 1 to 4 heating zone, the bottom of chassis (7) and heating zone correspondence position are provided with 1 to 4 inlet mouth (8).
5. a kind of chemical vapor densification furnace body according to claim 4 is characterized in that described heating zone is respectively equipped with temperature control unit.
6. according to claim 1 or 3 described a kind of chemical vapor densification furnace bodies; It is characterized in that described each heating element (2) processed by graphite or carbon/carbon compound material; Described carbon/carbon compound material is made up of the carbon fiber reinforced carbon matrix body; Heating element is tabular, perhaps is combined into palisading type by rod or bar through link block.
7. a kind of chemical vapor densification furnace body according to claim 2; It is characterized in that described base plate heating element (6) processed by graphite or carbon/carbon compound material; Described carbon/carbon compound material is made up of the carbon fiber reinforced carbon matrix body; Heating element is tabular, perhaps is combined into palisading type by rod or bar through link block.
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CN201010144907A CN101831621B (en) | 2010-04-08 | 2010-04-08 | Chemical vapor densification furnace body |
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CN201010144907A CN101831621B (en) | 2010-04-08 | 2010-04-08 | Chemical vapor densification furnace body |
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CN101831621A CN101831621A (en) | 2010-09-15 |
CN101831621B true CN101831621B (en) | 2012-10-17 |
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1784767A (en) * | 2003-05-02 | 2006-06-07 | 石川岛播磨重工业株式会社 | Substrate transfer device for thin-film deposition apparatus |
CN1971844A (en) * | 2003-05-30 | 2007-05-30 | 东京毅力科创株式会社 | Lid body opening/closing mechanism of vacuum processing chamber and method for opening/closing lid body |
CN101392366A (en) * | 2008-11-07 | 2009-03-25 | 中南大学 | Method for preparing rapid chemical vapor infiltration of carbon/carbon composite material flat plate |
Family Cites Families (1)
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US20040253377A1 (en) * | 2002-10-24 | 2004-12-16 | Bok Lowell D. | Batch and continuous CVI densification furnace |
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1784767A (en) * | 2003-05-02 | 2006-06-07 | 石川岛播磨重工业株式会社 | Substrate transfer device for thin-film deposition apparatus |
CN1971844A (en) * | 2003-05-30 | 2007-05-30 | 东京毅力科创株式会社 | Lid body opening/closing mechanism of vacuum processing chamber and method for opening/closing lid body |
CN101392366A (en) * | 2008-11-07 | 2009-03-25 | 中南大学 | Method for preparing rapid chemical vapor infiltration of carbon/carbon composite material flat plate |
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Address after: 413000 Hunan province Yiyang Yingbin Road No. 2 Patentee after: Hunan gold carbon Limited by Share Ltd Address before: 413000 Hunan province Yiyang Yingbin Road No. 2 Patentee before: Hunan KBCarbon Composite Science and Technology Co., Ltd. |