CN101830495A - Comprehensive utilization method of chlorosilane - Google Patents

Comprehensive utilization method of chlorosilane Download PDF

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CN101830495A
CN101830495A CN 201010158767 CN201010158767A CN101830495A CN 101830495 A CN101830495 A CN 101830495A CN 201010158767 CN201010158767 CN 201010158767 CN 201010158767 A CN201010158767 A CN 201010158767A CN 101830495 A CN101830495 A CN 101830495A
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chlorosilane
comprehensive utilization
reaction
calcium chloride
calcium
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CN101830495B (en
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沈俊
赵燕
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NINGXIA SHENGLAN CHEMICAL ENVIRONMENTAL PROTECTION TECHNOLOGY Co Ltd
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NINGXIA SHENGLAN CHEMICAL ENVIRONMENTAL PROTECTION TECHNOLOGY Co Ltd
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Abstract

The invention relates to a comprehensive utilization method of chlorosilane, in particular to a method for producing calcium chloride and calcium silicate by using chlorosilane, especially chlorosilane byproducts in the production processes of organic silicon, trichlorosilane and polycrystalline silicon as raw materials. The technical scheme of the invention comprises the following steps: enabling the chlorosilane and calcium-containing materials to be subject to a gas-solid-liquid or solid-liquid reaction in water or water vapor medium at 30-350 DEG C under a pressure condition ranging from normal pressure to 5MPa, and adopting solid-liquid separation to obtain the calcium chloride and the calcium silicate after the completion of the reaction, wherein the chlorosilane is SinHmCl2n+2-m, m is 0, 1, or 2, and n is 1, 2 or 3. The chlorosilane can be safely and effectively treated by the method, the chlorine element in the chlorosilane can be used for producing the calcium chloride, and the silicon element in the chlorosilane can be used for producing the calcium silicate, thereby eliminating the potential environmental hazard of the chlorosilane byproduct of the organic silicon, trichlorosilane and polycrystalline silicon, and simultaneously achieving the purpose of maximizing resources.

Description

The method of comprehensive utilization of chlorosilane
Technical field
The present invention relates to a kind of method of comprehensive utilization of chlorosilane, more specifically, relate to a kind of chlorosilane that utilizes and especially utilize the method for the chlorosilane of organosilicon, trichlorosilane and polysilicon production process by-product for raw material production calcium chloride and Calucium Silicate powder.
Background technology
The production of organosilicon, trichlorosilane and polysilicon is a large amount of by-product chlorosilane of by-product all, and especially along with the continuous operation of polycrystalline silicon device, the consequent is with SiCl 4It is the rapid increase of master's by-product chlorosilane quantity.1 ton of polysilicon of every according to statistics production with by-product with SiCl 4Be 10~15 tons of main chlorosilanes, a large amount of by-product chlorosilanes have become the bottleneck of restriction polysilicon industry development, also environment are caused potential harm simultaneously.
In the world to the polysilicon by-product with SiCl 4Several technology has been developed in the processing that is master's chlorosilane, wherein at SiCl 4Processing developed cold hydro-reduction and two kinds of technologies of hot hydro-reduction.Cold hydro-reduction technology is to utilize hydrogen with SiCl under lower temperature and higher pressure 4Be reduced to SiHCl 3, disclose at nickel catalyzator and silica flour as patent CN85107465, CN1436725 and to have existed under the situation, at 400~500 ℃, reduce SiCl with hydrogen under 1~2MPa pressure condition 4Be SiHCl 3Method.This method is because needs use silica flour, and silica flour continuous charging problem under the still unresolved at present high pressure, therefore domestic have only minority enterprise to adopt this class methods.In addition, other polysilicon enterprises have introduced another and have been called as the technology of hot hydro-reduction from external, are promptly carrying out hydro-reduction up to the temperature more than 1000 ℃.Existing production practice show that there are shortcomings such as the single transformation efficiency is low, by product complexity in hot hydro-reduction technology.Production data shows, whenever obtains 1 ton of SiHCl 3With 0.1~0.2 ton of more unmanageable Si of by-product 2H 2Cl 4, Si 2Cl 6, Si 3Cl 8Deng chlorosilane, and energy consumption height, cost are also high.
Another processing mode to chlorosilane is to be used for the production derived product, as thermal silica, and photoconductive fiber, organosilicon etc.It is that raw material (wherein also comprises SiCl that Chinese patent CN1686791 discloses with the by product in the organosilicon production 4And SiHCl 3) technology of producing thermal silica; Chinese patent CN1208016 discloses with SiCl 4Technology for the raw material production thermal silica.The market study of dialogue sooty shows that the thermal silica consumption is not as good as 5% of the white carbon black aggregate consumption, and market capacity is very limited.Another uses SiCl 4The important derived product of producing is the tetraethyl silicate in the organosilicon, utilizes SiCl 4Producing tetraethyl silicate is sophisticated technology, but there is the little problem of market capacity equally in tetraethyl silicate.Therefore, no matter be thermal silica or tetraethyl silicate, all be difficult to consume polysilicon enterprise by-product with SiCl 4It is main chlorosilane.
In addition, the production utilization of thermal silica and tetraethyl silicate all be element silicon in the chlorosilane, with SiCl 4Be example, element silicon only accounts for 16.5% of its molecular mass, and all the other chlorine elements of 83.5% all are not fully utilized.Therefore, from the utilization of resources, the angle of atom economy is set out, and how effectively to utilize the chlorine element in the chlorosilane, and it is big to obtain market capacity simultaneously, and the chlorinated products that added value is high seems even more important.
Meanwhile, calcium chloride is a kind of important chloride Chemicals, and market capacity is big, is widely used in aspects such as freezing, road snow removing, oil recovery auxiliary agent, sewage disposal, cement antifreezing agent.The in the past technologies of hydrochloric acid and Wingdale reaction of using of the production of calcium chloride make more, announced a kind of method as Chinese patent CN91106411.7 with hydrochloric acid and Wingdale ore pulp prepared in reaction liquid calcium chloride, the calcium chloride quality product height that this method makes, but single cost is also high.Using the waste ammonia-soda solution legal system to get calcium chloride in recent years becomes main flow, but alkali metal chloride content is higher in the calcium chloride product that the waste ammonia-soda solution method makes, and especially the content of sodium-chlor has limited the quality and the purposes of this series products up to 7%.
Summary of the invention
Technical problem to be solved by this invention provides a kind of chlorosilane comprehensive utilization method, and is not only safe but also effective.Promptly utilize the chlorosilane of organosilicon, trichlorosilane and polysilicon production process by-product to be raw material production calcium chloride and Calucium Silicate powder, improved the comprehensive utilization value of chlorosilane.
Technical scheme of the present invention: with the chlorosilane is raw material, prepares calcium chloride and Calucium Silicate powder with the calcic raw material reaction.Gas-solid-liquid or solid-liquid reaction (10~200min) take place in 30~350 ℃, normal pressure~5MPa condition in chlorosilane and calcic material in water or the water vapor medium; The reaction products therefrom obtains calcium chloride and Calucium Silicate powder through liquid-solid separation.Calcium chloride at liquid phase, Calucium Silicate powder in solid phase.
Wherein, described chlorosilane is Si nH mCl 2n+2-m, m=0,1 or 2 wherein; N=1,2 or 3.
Further, described chlorosilane can be SiCl 4, Si 2Cl 6, Si 3Cl 8, SiH 2Cl 2, SiHCl 3Or Si 2H 2Cl 4In at least a.
Can obtain the amorphous structure Calucium Silicate powder according to the inventive method.
Temperature of reaction is controlled at 30~350 ℃.Preferred temperature of reaction is 50-180 ℃, when temperature is too high reaction violent, be difficult to control, it is slow excessively that temperature is crossed when low speed of reaction.
Reaction pressure is controlled at normal pressure~5MPa, adds pressure energy and improves speed of reaction to a certain extent, uses too high pressure can increase the reactor cost.
Reaction time is controlled at 10~200min, adopt lower temperature to need long reaction time, as adopt 30 ℃ of the reaction times to reach 200min, improve temperature and then can shorten reaction time, as when adopting 350 ℃, reaction time only needs 10min.
Chlorosilane and calcic material use magnitude relation: M Ca=2M Cl+ M Si, M wherein CaBe the molar weight of Ca in the calcic material, M ClAnd M SiIt is the molar weight of chlorine and silicon in the chlorosilane.
The consumption of reaction medium water or water vapour is 50%~350% of chlorosilane and a calcic material gross weight.
The present invention is used to prepare its main component of calcic material of calcium chloride by CaO, Ca (OH) 2, CaCO 3In one or more formations, specifically comprise Wingdale, lime, lime white, calcium hydroxide, carbide slag etc.
The Calucium Silicate powder of the present invention's preparation belongs to amorphous structure.
Though organosilicon, trichlorosilane and polysilicon by-product chlorosilane are by products, elementary composition middle content of Cl element is high, with SiCl 4Be example, its content of Cl element is up to 83.5%, and other impurity contents can be controlled very lowly; Therefore, the technology of utilizing chlorosilane to produce calcium chloride can not only reach the resource maximum using, realizes the purpose of recycling economy, and has opened up the novel process that calcium chloride, Calucium Silicate powder are produced.
The inventive method is safety but also effectively handle chlorosilane not only, utilize chlorine element production calcium chloride in the chlorosilane, the method of utilizing element silicon wherein to produce Calucium Silicate powder, eliminate the potential hazard that organosilicon, trichlorosilane and polysilicon by-product chlorosilane cause environment with this, reach the purpose of resource maximum using simultaneously.
Description of drawings
Fig. 1 is the XRD figure that adopts the inventive method gained calcium silicate products.
Fig. 2 is the SEM figure that adopts the inventive method gained calcium silicate products.
Embodiment
Below by embodiment the specific embodiment of the present invention is carried out more specific description, but it only is used to illustrate embodiments more of the present invention, and should not be construed as qualification protection domain of the present invention.
Embodiment 1
Chlorosilane is taken from polysilicon factory, and main component is SiCl 4, also contain a small amount of Si 2Cl 6And Si 3Cl 8, what calcareous raw material used is calcium oxide.Chlorosilane, calcium oxide, water vapor feed reactor simultaneously, and delivery rate is 90kg/h, 100kg/h and 95kg/h.The reactor front end is elevated to 180 ℃ with temperature of charge, and back segment is reduced to 50 ℃ by the internal cooling pipe with temperature, and reaction pressure is controlled at 0.5MPa, reaction time 30min.Reaction product obtains calcium chloride and calcium silicate products through separating, the total alkali metal chloride of calcium chloride (in NaCl) 0.5% after testing, and total magnesium is (with MgCl 2Meter) 0.2%, basicity is [with Ca (OH) 2Meter] 0.2%, water-insoluble 0.2%.The crystalline structure of Calucium Silicate powder uses the XRD test, and the XRD test result is seen Fig. 1, and test result shows that sample is an amorphous structure.The granularity of Calucium Silicate powder uses scanning electronic microscope (SEM) to observe, and test result is seen Fig. 2, and the result shows, the loose bulk structure that the product Calucium Silicate powder is reunited and formed by 0.1 micron primary particle.
Embodiment 2
Chlorosilane is that the purity of taking from polysilicon factory is 99.9999% SiCl 4, calcareous use be dry powder (limestone powder).In the disposable adding reactor of 1760kg limestone powder, SiCl 4Reach water and feed reactor with vapor form, the feed total amount is that 900kg and 5000kg temperature of reaction are controlled at 350 ℃, and reaction pressure is controlled at about 5MPa, reaction time 10min.Reaction product obtains calcium chloride and Calucium Silicate powder through separating.The total alkali metal chloride of calcium chloride (in NaCl) 0.5% after testing, total magnesium is (with MgCl 2Meter) 0.5%, basicity is [with Ca (OH) 2Meter] 0.2%, water-insoluble 0.1%, calcium silicate products is amorphous structure through the XRD test.
Embodiment 3
Chlorosilane is taken from the product of trichlorine hydrogen producer light constituent rectifying tower cat head, and its composition is SiH 2Cl 270%, SiHCl 330%, calcareous use be calcium hydroxide.Chlorosilane, calcium hydroxide and water add in the reactor continuously, for preventing SiH 2Cl 2Be subjected to the danger of thermal explosion, temperature of reaction is controlled at 30 ℃, and reaction pressure is controlled at normal pressure, reaction time 200min.Reaction product obtains calcium chloride and Calucium Silicate powder through separating.The total alkali metal chloride of calcium chloride (in NaCl) 0.5% after testing, total magnesium is (with MgCl 2Meter) 0.1%, basicity is [with Ca (OH) 2Meter] 0.2%, water-insoluble 0.1%.Calcium silicate products is amorphous structure through the XRD test.
Embodiment 4
Chlorosilane is that to take from the rectifying still of trichlorosilane factory residual, and main component is SiCl 4, also contain a small amount of SiHCl 3, what calcareous raw material used is the dry powder of carbide slag.Chlorosilane, carbide slag and water add in the reactor continuously, chlorosilane feeding rate 30kg/h, calcium carbide ground-slag feeding rate 50kg/h, the feeding rate 280kg/h of water, temperature of reaction is controlled at 250~255 ℃, and reaction pressure maintains about 3MPa, and reaction time is controlled at 20min.Reaction product obtains calcium chloride and calcium silicate products through separation, the total alkali metal chloride of calcium chloride (in NaCl) 3.5% after testing, and total magnesium is (with MgCl 2Meter) 0.2%, basicity is [with Ca (OH) 2Meter] 0.2%, water-insoluble 0.2% meets the chemical industry standard HG/T 2327-2004 of calcium chloride.The crystalline structure of Calucium Silicate powder uses the XRD test, and the result is indicated as amorphous structure.
Embodiment 5
Chlorosilane is the Si that purifies through separating 2Cl 6, contain a spot of Si 3Cl 8And Si 2H 2Cl 4, what calcareous raw material used is lime white.Chlorosilane, lime white, water add reactor simultaneously, and feed rate is 90kg/h, 200kg/h and 350kg/h.The reactor front end is elevated to 130 ℃ with temperature of charge, and back segment is reduced to 50 ℃ by the internal cooling pipe with temperature, and reaction pressure is controlled at 0.2MPa, reaction time 50min.Reaction product obtains calcium chloride and calcium silicate products through separating, the total alkali metal chloride of calcium chloride (in NaCl) 0.6% after testing, and total magnesium is (with MgCl 2Meter) 0.3%, basicity is [with Ca (OH) 2Meter] 0.2%, water-insoluble 0.3%.The crystalline structure of Calucium Silicate powder uses the XRD test, and the result is indicated as amorphous structure.

Claims (6)

1. the method for comprehensive utilization of chlorosilane, it is characterized in that: chlorosilane and calcic material are under 30~350 ℃, normal pressure~5MPa condition, gas-solid-liquid or solid-liquid reaction take place in water or the water vapor medium, adopt solid-liquid separation to obtain calcium chloride, Calucium Silicate powder after reaction is finished; Wherein, described chlorosilane is Si nH mCl 2n+2-m, m=0,1 or 2 wherein; N=1,2 or 3.
2. according to the method for comprehensive utilization of the described chlorosilane of claim 1, it is characterized in that: described chlorosilane is SiCl 4, Si 2Cl 6, Si 3Cl 8, SiH 2Cl 2, SiHCl 3Or Si 2H 2Cl 4In at least a.
3. according to the method for comprehensive utilization of the described chlorosilane of claim 1, it is characterized in that: the main component of described calcic material is by CaO, Ca (OH) 2And CaCO 3In at least a composition.
4. according to the method for comprehensive utilization of the described chlorosilane of claim 3, it is characterized in that: described calcic material is Wingdale, lime, lime white, calcium hydroxide or carbide slag.
5. according to the method for comprehensive utilization of each described chlorosilane of claim 1-4, it is characterized in that: chlorosilane and calcic material use magnitude relation: M Ca=2M Cl+ M Si, M wherein CaBe the molar weight of Ca in the calcic material, M ClAnd M SiIt is the molar weight of chlorine and silicon in the chlorosilane.
6. according to the method for comprehensive utilization of the described chlorosilane of claim 5, it is characterized in that: the consumption of reaction medium water or water vapour is 50%~350% of chlorosilane and a calcic material gross weight.
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102500213A (en) * 2011-10-27 2012-06-20 内蒙古锋威硅业有限公司 Waste gas and waste liquid treatment method in polycrystalline silicon production
CN105253864A (en) * 2015-11-13 2016-01-20 宁波盛优科技服务有限公司 Silicon nitride powder preparation method
CN108502887A (en) * 2018-04-28 2018-09-07 福州大学 A kind of preparation method of the silicide of chemical method synthesis calcium
CN108863267A (en) * 2018-07-19 2018-11-23 河北科技大学 A kind of preparation method of heavy metal curing agent

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101172610A (en) * 2007-11-22 2008-05-07 中国矿业大学(北京) Method of producing high-temperature silica flour body
CN101386415A (en) * 2008-10-21 2009-03-18 魏昭荣 Method for preparing inorganic chemical product using waste produced by polycrystalline silicon

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101172610A (en) * 2007-11-22 2008-05-07 中国矿业大学(北京) Method of producing high-temperature silica flour body
CN101386415A (en) * 2008-10-21 2009-03-18 魏昭荣 Method for preparing inorganic chemical product using waste produced by polycrystalline silicon

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102500213A (en) * 2011-10-27 2012-06-20 内蒙古锋威硅业有限公司 Waste gas and waste liquid treatment method in polycrystalline silicon production
CN102500213B (en) * 2011-10-27 2013-12-11 内蒙古锋威硅业有限公司 Waste gas and waste liquid treatment method in polycrystalline silicon production
CN105253864A (en) * 2015-11-13 2016-01-20 宁波盛优科技服务有限公司 Silicon nitride powder preparation method
CN105253864B (en) * 2015-11-13 2017-07-11 宁夏胜蓝化工环保科技有限公司 A kind of preparation method of beta-silicon nitride powder
CN108502887A (en) * 2018-04-28 2018-09-07 福州大学 A kind of preparation method of the silicide of chemical method synthesis calcium
CN108863267A (en) * 2018-07-19 2018-11-23 河北科技大学 A kind of preparation method of heavy metal curing agent

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