CN101817180B - Wall-climbing wheel type mechanism based on MEMS (Micro-Electro Mechanical System) - Google Patents
Wall-climbing wheel type mechanism based on MEMS (Micro-Electro Mechanical System) Download PDFInfo
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- CN101817180B CN101817180B CN201010151424XA CN201010151424A CN101817180B CN 101817180 B CN101817180 B CN 101817180B CN 201010151424X A CN201010151424X A CN 201010151424XA CN 201010151424 A CN201010151424 A CN 201010151424A CN 101817180 B CN101817180 B CN 101817180B
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Abstract
The invention relates to a wall-climbing wheel type mechanism based on an MEMS (Micro-Electro Mechanical System), comprising a rotating wheel, windings, wheel stands, a rotating shaft, bearings and a connecting plate, wherein the rotating wheel is fixed in the center of the rotating shaft; the wheel stands are respectively arranged at two sides of the rotating wheel and fixed to the connecting plate; the annular windings with through holes in the centers are disposed on the inner surfaces of the wheel stands by adopting a UV-LIGA (Ultraviolet-Liga Galvanik Abformung) technology; the bearings are fixed on the wheel stands; the rotating shaft is sleeved to the center through holes of the windings, and two ends of the rotating shaft are fixed in the bearings. By adopting a structure that the rotating wheel is clamped between the windings, the invention obviously increases the action area of an electromagnetic field, thereby improving the moment for electromagnet driving of the mechanism. Due to the driving and suction integrated design of the mechanism, an intermediate driving link is reduced, so that the invention has the advantages of simple structure, easy assembly, smaller size, high output efficiency, high load capacity, and the like.
Description
Technical field
What the present invention relates to is a kind of device of field of micro electromechanical technology, in particular a kind ofly climbs the wheeled mechanism of wall based on MEMS.
Background technology
Miniature climbing robot is as a kind of special mobile robot, ground mobile robot technology and adsorption technology are organically combined, can on vertical walls, move flexibly, thereby realize moving freely in three dimensions, expand the application of mobile microrobot greatly.Because miniature climbing robot belongs to MEMS (Micro Electro Mechanical Systems MEMS) technical field, is subjected to the influence of dimensional effect, the design of its adsorbent equipment and driving mechanism and larger-size climbing robot are inevitable different.The research of present miniature climbing robot mainly is divided into three types: vacuum suction, magnetic force adsorb and imitate the gecko sole and adsorbs.
The magnetic force suction type is simple in structure, and absorption affinity is bigger, and is strong to the concavo-convex adaptability of wall, do not have the problem of vacuum suction gas leakage.Particularly permanent magnetism absorption is adsorbed with the electromagnet mode and to be compared, it also have absorption do not consume energy, simple in structure, safe, be not subjected to advantages such as outage influences.Though though but can only be applied on the wall of some magnetic conductions based on the climbing robot of this suction type, but in view of a lot of mechanical apparatus all be the material manufacturing of adopting magnetic conduction, so this type of climbing robot has more wide application prospect.
Find through retrieval the prior art document, Takeda.M etc. deliver at " Micro Electro Mechanical Systems " (microelectromechanical systems) in January, 2000: Development of chain-type micromachine forinspection of outer tube surfaces (basic performance of the 1st prototype) (a kind of chain type robot (key property of first prototype robot) that is used for the detection of pipe outer surface, this technology discloses the miniature wall climbing mechanism that a kind of electromagnetic micromotor drives, its overall dimension is 5mm * 9mm * 6.5mm, the output of electromagnetic micromotor by a gearratio be 201 planetary reduction gear to come driving diameter be the permanent magnetic wheels of 5mm, it is moved on the wall of magnetic conduction.Though this plant bulk is very little, its structure is very complicated, and efficiency of transmission is very low, and the processing of its required parts than higher, must be adopted expensive LIGA Micrometer-Nanometer Processing Technology to the requirement of process equipment.
Summary of the invention
The objective of the invention is to overcome the deficiencies in the prior art, provide a kind of and climb the wheeled mechanism of wall based on MEMS, by Electromagnetic Drive and permanent magnetism sorption wheel are carried out integrated design, utilize the MEMS fabrication techniques to reduce overall dimensions, adopt the mode that directly drives in limited volume, to improve its load capacity greatly, make it be suitable as the miniature travel mechanism of climbing the wall people of magnetic adsorption type.
The present invention is achieved by the following technical solutions, the present invention includes: moving runner, winding, wheel carrier, rotating shaft, bearing and connecting plate, wherein: moving runner is fixed in the central authorities of rotating shaft, the both sides of moving runner are respectively equipped with wheel carrier, wheel carrier fixing with connecting plate on, the inner surface of wheel carrier is provided with winding with the UV-LIGA technology, rigid bearing on the wheel carrier, rotating shaft is socketed on the center through hole of winding, and the two ends of rotating shaft are fixed in the bearing.
Described winding is an annular, is made up of many groups coil, and central authorities are provided with through hole.
Described coil links to each other with external power source by lead-in wire.
Described coil central authorities are provided with magnetic core.
Described moving runner comprises: multi-pole magnet and magnetic guiding loop, wherein: the central authorities of discoid multi-pole magnet are fixed in the rotating shaft, and magnetic guiding loop is around in around the multi-pole magnet.
Be embedded with permanent-magnetic clamp on the described magnetic guiding loop.
The vertical disc surfaces of the direction of magnetization of described multi-pole magnet, each magnetic pole equal angles distributes, and two adjacent pole orientation are opposite.
Described lead-in wire is that copper becomes with coil, and magnetic core is that iron-nickel alloy is made.
Described wheel carrier is that silicon is made.
Described multi-pole magnet material is that the SmCo rare earth is made, and magnetic guiding loop is that iron-nickel alloy is made, and the SmCo rare earth of permanent-magnetic clamp is made.
Described rotating shaft and connecting plate are that titanium is made.
When the work of this mechanism, at first by two coil electricities of lead-in wire to 180 ° of relative one-tenth, therefore hot-wire coil can be subjected to the effect of electromagnetic force owing to be in the magnetic field of moving runner of its top.Because winding is fixed on the wheel carrier, moving runner is subjected to reaction force and rotates a certain angle.Because the magnetic pole of moving runner is symmetrically distributed, when relative two coils series connection energisings, the suffered torque of moving runner also increases and is twice.When this a pair of magnetic pole produces the coil upper surface of energising, stop this group coil electricity, to next group coil electricity, the direction of moving runner institute torque suspension is constant, still can continue to rotate forward simultaneously.Therefore as long as the phase sequence of energising is correct, moving runner just can continue rotation.
The present invention has the following advantages compared to existing technology: the present invention adopts the structure of winding therebetween a slice moving runner, has enlarged markedly the active area of electromagnetic field, thereby has improved the moment that this mechanism electromagnetic drives.This mechanism drives the incorporate design of absorption, has reduced middle transmission link, make its have simple in structure, be easy to assembling, advantage such as size is less, delivery efficiency is high, load capacity is strong.
Description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2 is the partial schematic diagram of winding;
Fig. 3 is the partial schematic diagram of moving runner.
The specific embodiment
Below embodiments of the invention are elaborated, present embodiment is being to implement under the prerequisite with the technical solution of the present invention, provided detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
As shown in Figure 1, present embodiment comprises: connecting plate 1, wheel carrier 2, winding 3, rotating shaft 4, bearing 5 and moving runner 6, wherein: moving runner 6 is fixed in the central authorities of rotating shaft 4, the both sides of moving runner 6 are respectively equipped with wheel carrier 2, wheel carrier 2 fixing with connecting plate 1 on, the inner surface of wheel carrier 2 adopts UV-LIGA technology processing central authorities to be provided with the Circular Winding 3 of through hole, rigid bearing 5 on the wheel carrier 2, rotating shaft 4 is socketed on the center through hole of winding 3, and the two ends of rotating shaft 4 are fixed in the bearing 5.
As shown in Figure 2, winding 3 is made up of six groups of coils 7, and coil 7 links to each other with external power source by lead-in wire 8, and coil 7 central authorities are provided with magnetic core 9 and are used to strengthen magnetic.
As shown in Figure 3, moving runner 6 comprises: multi-pole magnet 10 and magnetic guiding loop 11, wherein: discoid multi-pole magnet 10 is positioned at central authorities, writes eight magnetic poles by magnet charger, the vertical disc surfaces of the direction of magnetization, the magnetic pole equal angles evenly distributes, two adjacent pole orientation are opposite, and magnetic guiding loop 11 is around in around the multi-pole magnet 10, can directly contact with the magnetic conduction wall, be embedded with permanent-magnetic clamp 12 on the magnetic guiding loop 11, be used to increase absorption affinity the magnetic conduction wall.
Described lead-in wire 8 is that copper becomes with coil 7, and magnetic core 9 is that iron-nickel alloy is made.
Described wheel carrier 2 is that silicon is made.
Described multi-pole magnet 10 materials are that the SmCo rare earth is made, and magnetic guiding loop 11 is that iron-nickel alloy is made, and the SmCo rare earth of permanent-magnetic clamp 12 is made.
Described rotating shaft 4 and connecting plate 1 are that titanium is made.
By to coil 7 energising, make multi-pole magnet 10 in the moving runner 6 be subjected to the effect of magnetic field force and rotate, according to certain phase sequence energising, just can make moving runner 6 continue to rotate.This mechanism is located on the miniature climbing robot, just can realizes climbing the function of wall.
The minimum dimension of present embodiment: length * wide * height is 2mm * 1mm * 2.5mm, and size is big more, and it climbs wall and driving force is also strong more.
Claims (3)
1. climb the wheeled mechanism of wall based on MEMS for one kind, it is characterized in that, comprise: moving runner, the winding of forming by many groups coil, wheel carrier, rotating shaft, bearing and connecting plate, wherein: moving runner is fixed in the central authorities of rotating shaft, the both sides of moving runner are respectively equipped with wheel carrier, wheel carrier is fixed on the connecting plate, the inner surface of wheel carrier is provided with the winding of being made up of many groups coil, rigid bearing on the wheel carrier, rotating shaft is socketed on the center through hole of the winding of being made up of many groups coil, the two ends of rotating shaft are fixed in the bearing, and described coil links to each other with external power source by lead-in wire, is embedded with permanent-magnetic clamp on the described magnetic guiding loop;
Described moving runner comprises: multi-pole magnet and magnetic guiding loop, and the central authorities of multi-pole magnet are fixed in the rotating shaft, the vertical disc surfaces of the direction of magnetization of multi-pole magnet, each magnetic pole equal angles distributes, and two adjacent pole orientation are opposite, and magnetic guiding loop is around in around the multi-pole magnet;
Described multi-pole magnet is discoid;
When the work of this mechanism, at first by two coil electricities of lead-in wire to 180 ° of relative one-tenth, therefore hot-wire coil can be subjected to the effect of electromagnetic force owing to be in the magnetic field of moving runner of its top; Because winding is fixed on the wheel carrier, moving runner is subjected to reaction force and rotates a certain angle; Because the magnetic pole of moving runner is symmetrically distributed, when relative two coils series connection energisings, the suffered torque of moving runner also increases and is twice; When this a pair of magnetic pole produces the coil upper surface of energising, stop this group coil electricity, to next group coil electricity, the direction of moving runner institute torque suspension is constant, still can continue to rotate forward simultaneously; Therefore as long as the phase sequence of energising is correct, moving runner just can continue rotation;
By to coil (7) energising, make multi-pole magnet (10) in the moving runner (6) be subjected to the effect of magnetic field force and rotate, according to certain phase sequence energising, just can make moving runner (6) continue to rotate; This mechanism is located on the miniature climbing robot, just can realizes climbing the function of wall.
2. according to claim 1 based on MEMS climb the wheeled mechanism of wall, it is characterized in that described winding is an annular.
3. according to claim 1 and 2 based on MEMS climb the wheeled mechanism of wall, it is characterized in that described coil central authorities are provided with magnetic core.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010151424XA CN101817180B (en) | 2010-04-21 | 2010-04-21 | Wall-climbing wheel type mechanism based on MEMS (Micro-Electro Mechanical System) |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201010151424XA CN101817180B (en) | 2010-04-21 | 2010-04-21 | Wall-climbing wheel type mechanism based on MEMS (Micro-Electro Mechanical System) |
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| CN101817180A CN101817180A (en) | 2010-09-01 |
| CN101817180B true CN101817180B (en) | 2011-05-18 |
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| CN201010151424XA Expired - Fee Related CN101817180B (en) | 2010-04-21 | 2010-04-21 | Wall-climbing wheel type mechanism based on MEMS (Micro-Electro Mechanical System) |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105690401B (en) * | 2015-12-07 | 2019-01-18 | 山东科技大学 | A kind of flexible steel wall surface Work robot |
| CN107838566B (en) * | 2017-12-01 | 2023-10-20 | 浙江工业大学 | Wall climbing type laser manufacturing platform capable of providing steady-state magnetic field assistance |
| CN109436122A (en) * | 2018-12-29 | 2019-03-08 | 衡昇科技有限公司 | A kind of climbing robot of ellipse magnet-wheel |
| CN110086275B (en) * | 2019-04-22 | 2024-02-23 | 上海海洋大学 | Magnetic adsorption driving wheel structure with controllable adsorption force |
| CN113635313B (en) * | 2021-06-23 | 2022-07-22 | 南京理工大学 | Magnetic field driven wheel type paper folding robot |
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| JPH0556509A (en) * | 1991-01-11 | 1993-03-05 | Aisin Aw Co Ltd | Vehicle provided with noncontact drive mechanism and traffic system therefor |
| CN1702008A (en) * | 2005-06-14 | 2005-11-30 | 胡广怀 | Magnetizing walking wheel unit for magnetic adsorption type wall-climbing device |
| CN101478195B (en) * | 2009-01-08 | 2012-02-29 | 上海交通大学 | Axial magnetic flux electromagnetic type micro driver based on double layer planar coil |
| CN101565063B (en) * | 2009-05-21 | 2010-08-11 | 上海交通大学 | Permanent magnetic adsorption wheel-type wall-climbing robot |
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