CN101813628A - Ultraviolet biological chip integrated sensor - Google Patents
Ultraviolet biological chip integrated sensor Download PDFInfo
- Publication number
- CN101813628A CN101813628A CN 201010141645 CN201010141645A CN101813628A CN 101813628 A CN101813628 A CN 101813628A CN 201010141645 CN201010141645 CN 201010141645 CN 201010141645 A CN201010141645 A CN 201010141645A CN 101813628 A CN101813628 A CN 101813628A
- Authority
- CN
- China
- Prior art keywords
- ultraviolet
- light
- layer
- biological
- ultraviolet light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
The invention provides an ultraviolet biological chip integrated sensor, and relates to the field of design and manufacturing of biological warfare agent sensors. In the field, all light sources of the conventional LIF detection systems generate ultraviolet light by frequency multiplication of impulsive visible or infrared light; the conventional LIF detection system has the defects of high price, low efficiency, large volume and crispness, and is inconvenient for real-time detection and outdoor use; and the impulsive ultraviolet light is low in duty ratio, and has low detection sensitivity to biological suspended particles, and the light intensity of the conventional continuous ultraviolet light is not high enough to excite the biological suspended particles to fluoresce; and all these problems are great obstacles in the application of the detection system. The ultraviolet biological chip integrated sensor of the invention uses multi-wavelength ultraviolet LEDs as excitation light sources and overcomes the defects of the conventional light source; the multi-wavelength ultraviolet LEDs, an Si-PIN detector and an ultraviolet filter plate are integrated on the same substrate, so that the sensor has the capability of detecting and identifying various biological warfare agents and can meet the light, firm, quick-response and high-sensitivity use requirements of the field environmental on the detector while improving the detection efficiency and lowering a detection false alarm rate.
Description
Technical field
The present invention relates to a kind of integrated bio war agent sensor, particularly the manufacture craft of biological warfare agent sensor and structural design field.
Background technology
Along with the development of genetic engineering and other biological technology, a large amount of productions of biological warfare agent become than being easier to.Chemical and biological weapons have constituted serious threat to society and regional stability and world peace.Therefore the protection that strengthens biological warfare agent in the national defence system is extremely urgent.
Forbid having listed in the chemical weapons meeting nearly 400 kinds of toxin in the world of holding for the end of the year 1993, studies show that, several toxin are arranged, not only have high toxicity (only several kilograms or tens kilograms personnel's injuries that just can constitute in 100 square kilometres), and can produce (several tons to tens tons) in enormous quantities.Also improve day by day to the importance of biological weapons Protective Research and urgent understanding various countries.Aspect this, the U.S. just develops towards the direction of biochemistry and inspection, long-haul telemetry, instant alarming and report automatically.The U.S. proposes to submit the NBC protection annual report by Ministry of National Defence to Congress in " defense report " in recent years, and this protection that shows biological warfare agent occupies special consequence with nuclear weapon and chemical weapons protection in U.S. national defense.The interior integrated detection of the biological warfare agent system of air transport shelter that is contained in of French CE B research institution research dropped into army in 2005 and uses.The CIBADSlI type detection system that Canada's Suffield Protective Research is developed utilizes the Ultra-Violet Laser irradiation to measure the fluorescence volume and the spectrum of particle, to determine whether particle derives from biological warfare agent.This system can differentiate 5 kinds and contain the biological warfare agent particle, is no more than 3 seconds resolving time.
The method of biological agent detection has many kinds, and what wherein be used for remote remote sensing has mode transmission and functional fiber probe method and laser-induced fluorescence (LIF) (LIF) probe method.Because the LIF probe method is suitable for scene, real-time, remote sensing, so countries in the world generally adopt this method to carry out the detection of biological warfare agent.
But up to the present, the light source of most of LIF detection systems all is to adopt the visible or infrared light frequency multiplication of pulse to produce ultraviolet light.These LIF detection systems all be cost an arm and a leg, inefficiency, bulky and frangible system is unfavorable in real time and the field environment use, and the application of system is caused great obstacle.Also have a significant disadvantages because the dutycycle of pulsed ultraviolet light is not high, lower to the detection sensitivity of biological suspension particle.The light intensity of traditional continuous uviol lamp is not enough to excite little biological suspension particle to send fluorescence again.The development of LED epitaxial growth technology technology makes the emission wavelength of LED constantly expand to the ultraviolet direction, has thoroughly solved the variety of problems of conventional light source, also makes the ultraviolet source in the design's thought become possibility.
Summary of the invention
The present invention is a kind of new biological warfare agent acquisition sensor structural design and method for making.In this invention, we have not only adopted multi-wavelength, ultraviolet light-emitting diode as excitation source, and multi-wavelength ultraviolet light-emitting diode, Si-PIN detector, ultraviolet filtering sheet be integrated on the same substrate, make sensor have the ability of surveying and discerning multiple biological warfare agent, improve detection efficiency, reduced the alert rate of mistake of surveying.Simultaneously satisfied field environment preferably to light firm, the quick response of detector, highly sensitive request for utilization.Make the LIF detection system enter the complete practicability stage.
Description of drawings
Fig. 1: excimer laser is peeled off the ultra-violet light-emitting plumber step of planting.The implication of each digitized representation wherein: 1, temporarily weld 2, excimer laser peels off 3, be sent to new substrate 4, the 6H-SiC/ITO/SiO of interim substrate 5, interim scolder 6, ultraviolet LED 7, Sapphire Substrate 8, excimer laser 9, scolder Pd-In 10, Si-PIN detector
2Layer
Fig. 2: ultraviolet biological chip integrated sensor structural drawing.The implication of each digitized representation wherein: 1, Si-PIN detector 2, detector active region 3,6H-SiC/ITO/SiO
2Layer 4, reflection and weld layer 5,340nm 385nmUV led chip 6, glass plate 7, PDMS microchannel
Embodiment
1, the making of ultraviolet light filter
(1) utilize the method for plasma enhanced chemical vapor deposition (PECVD) on the Si-PIN detector, to deposit the SiO of 150nm thickness earlier
2Layer is as insulation course and diffusion barrier layer.
(2) then utilize tin indium oxide (ITO) layer of magnetic control platform sputter 200nm thickness, as the conductive layer and the reflection horizon of ultra-violet light-emitting pipe.
(3) at last at SiO
2Deposition 6H-SiC layer on the rete is as the ultraviolet light filtering layer.
2, peel off ultraviolet light-emitting diode
Adopt pulse KrF excimer laser to peel off the ultraviolet light-emitting diode of 340nm, two wave bands of 385nm from Sapphire Substrate.
Excimer laser is peeled off the ultra-violet light-emitting plumber and is planted step as shown in Figure 1.
3, the making of dimethyl siloxane (PDMS) micro-fluidic chip
Utilizing the deep ion lithographic technique to make different in width is 50 μ m, and the PDMS microchannel of 100 μ m, 1mm, 2mm improves detection efficiency.
4, the making of ultraviolet biological chip integrated sensor
(1) elder generation is sent to the ultraviolet light-emitting diode of peeling off in the step 2 and has ITO/6H-SiC/SiO
2On the filtering layer of the Si-PIN detector of rete.Scolder adopts the Pd-In scolder.
(2) glass plate that will have the PDMS microchannel again integrates with the Si-PIN detector that has led light source and 6H-SiC ultraviolet light filter.
Finally make ultraviolet biological chip integrated sensor, its structure as shown in Figure 2.
Claims (6)
1. a ultraviolet biological chip integrated sensor comprises the making of ultraviolet light filter, the making of peeling off ultraviolet light-emitting diode, dimethyl siloxane (PDMS) micro-fluidic chip and ultraviolet biological chip integrated sensor making.
2. according to claim 1, in the making of ultraviolet light filter, it is characterized in that,
(1) SiO that on the Si-PIN detector, grows successively
2Layer, tin indium oxide (ITO) layer and 6H-SiC layer.
(2) with SiO
2Layer is as insulation course and diffusion barrier layer, and its thickness is 150nm.
(3) with conductive layer and the reflection horizon of tin indium oxide (ITO) layer as the ultra-violet light-emitting pipe, and its thickness is 200nm.
(4) be filter layer with the 6H-SiC layer, and its thickness is 200nm.
3. according to claim 1, in peeling off ultraviolet light-emitting diode, it is characterized in that, carry out the ultraviolet light-emitting diode Sapphire Substrate when peeling off, utilization be the KrF excimer laser.
4. according to claim 1, in the making of dimethyl siloxane (PDMS) micro-fluidic chip, it is characterized in that, make 50 μ m, the PDMS microchannel of 100 μ m, 1mm, 2mm width, research different in width PDMS microchannel is to the influence of detection efficiency.
5. according to claim 1, adopted multi-wavelength burst of ultraviolel light source, it is characterized in that,
(1) the excitation source emission wavelength is in ultraviolet range.
(2) emission wavelength is respectively 340nm and 385nm.
6. according to claim 1, ultraviolet biological chip integrated sensor is made, it is characterized in that,
Multi-wavelength ultraviolet light-emitting diode, Si-PIN detector, ultraviolet filtering sheet are integrated on the same substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101416459A CN101813628B (en) | 2010-04-08 | 2010-04-08 | Manufacture method of ultraviolet biological chip integrated sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101416459A CN101813628B (en) | 2010-04-08 | 2010-04-08 | Manufacture method of ultraviolet biological chip integrated sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101813628A true CN101813628A (en) | 2010-08-25 |
| CN101813628B CN101813628B (en) | 2012-07-25 |
Family
ID=42620941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010101416459A Expired - Fee Related CN101813628B (en) | 2010-04-08 | 2010-04-08 | Manufacture method of ultraviolet biological chip integrated sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101813628B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104101588A (en) * | 2014-07-25 | 2014-10-15 | 山东省科学院海洋仪器仪表研究所 | Integrated seawater chlorophyll microfluidic chip sensor and manufacturing method thereof |
| CN105973823A (en) * | 2016-06-22 | 2016-09-28 | 苏州汶颢芯片科技有限公司 | UV-visible absorption detection system based on micro-fluidic chip and detection method thereof |
| CN109231610A (en) * | 2018-09-30 | 2019-01-18 | 厦门理工学院 | Multi-wavelength UV-LED light bar cooperates with chlorine water processing unit and processing method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002088673A2 (en) * | 2001-05-02 | 2002-11-07 | University Of Hertfordshire | Detector for airborne biological particles |
| CN101101970A (en) * | 2007-06-20 | 2008-01-09 | 中国科学院长春光学精密机械与物理研究所 | Organic ultraviolet optical sensor based on phosphorescence material light diode |
| US20080265177A1 (en) * | 2004-10-18 | 2008-10-30 | Macquarie University | Fluorescence Detection |
| CN101441177A (en) * | 2008-12-25 | 2009-05-27 | 重庆大学 | Minitype fluorescence detector of LED induction optical fiber type integrated PIN photo detector |
-
2010
- 2010-04-08 CN CN2010101416459A patent/CN101813628B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002088673A2 (en) * | 2001-05-02 | 2002-11-07 | University Of Hertfordshire | Detector for airborne biological particles |
| US20080265177A1 (en) * | 2004-10-18 | 2008-10-30 | Macquarie University | Fluorescence Detection |
| CN101101970A (en) * | 2007-06-20 | 2008-01-09 | 中国科学院长春光学精密机械与物理研究所 | Organic ultraviolet optical sensor based on phosphorescence material light diode |
| CN101441177A (en) * | 2008-12-25 | 2009-05-27 | 重庆大学 | Minitype fluorescence detector of LED induction optical fiber type integrated PIN photo detector |
Non-Patent Citations (2)
| Title |
|---|
| 《发光学报》 20090630 姜代武 等 Tb3+掺杂硅酸盐闪烁玻璃发光特性 363-367 1-6 第30卷, 第3期 * |
| 《红外与激光工程》 20070630 刘国军 等 高功率半导体激光器技术发展与研究 4-6 1-6 第36卷, * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104101588A (en) * | 2014-07-25 | 2014-10-15 | 山东省科学院海洋仪器仪表研究所 | Integrated seawater chlorophyll microfluidic chip sensor and manufacturing method thereof |
| CN105973823A (en) * | 2016-06-22 | 2016-09-28 | 苏州汶颢芯片科技有限公司 | UV-visible absorption detection system based on micro-fluidic chip and detection method thereof |
| CN109231610A (en) * | 2018-09-30 | 2019-01-18 | 厦门理工学院 | Multi-wavelength UV-LED light bar cooperates with chlorine water processing unit and processing method |
| CN109231610B (en) * | 2018-09-30 | 2022-08-09 | 厦门理工学院 | Multi-wavelength UV-LED lamp strip and chlorine water treatment device and treatment method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101813628B (en) | 2012-07-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4546662B2 (en) | Aerosol characterization and early warning network, and methods for providing early warning of aerosol threats approaching specified physical domains | |
| Bodewits et al. | Collisional excavation of asteroid (596) Scheila | |
| US7339670B2 (en) | Wavelength normalized depolarization ratio lidar | |
| Niu et al. | Seasonal variation and light absorption property of carbonaceous aerosol in a typical glacier region of the southeastern Tibetan Plateau | |
| US20070221863A1 (en) | Emission detector for the remote detection of explosives and illegal drugs | |
| CN101813628B (en) | Manufacture method of ultraviolet biological chip integrated sensor | |
| US8124935B2 (en) | Procedure for the detection of ionizing radiation | |
| Evans et al. | Swift follow-up observations of candidate gravitational-wave transient events | |
| CN101925934A (en) | Evacuation device and escape route display therefor | |
| Green et al. | The time domain spectroscopic survey: changing-look quasar candidates from multi-epoch spectroscopy in SDSS-IV | |
| Bogue | Sensors for fire detection | |
| CN107462555A (en) | A kind of airborne microorganisms laser detection and alarm system | |
| Tiwari et al. | Atmospheric heating due to black carbon aerosol during the summer monsoon period over Ballia: A rural environment over Indo-Gangetic Plain | |
| Hilario et al. | Characterizing weekly cycles of particulate matter in a coastal megacity: The importance of a seasonal, size‐resolved, and chemically speciated analysis | |
| DK1405029T3 (en) | Method and arrangement for specifying hits | |
| Miller et al. | Observations of supermicron-sized aerosols originating from biomass burning in southern Central Africa | |
| Götz et al. | The scientific performance of the microchannel X-ray telescope on board the SVOM mission | |
| CN110044559A (en) | A kind of Oil Leakage Detecting method, system and device | |
| US7893960B1 (en) | Smart sensors for perimeter and border security | |
| US6700484B2 (en) | Networked miniature chemical optical sensors | |
| Hou et al. | Oil-spill detection sensor using ultraviolet-induced fluorescence for routine surveillance in coastal environments | |
| Winkler et al. | Evidence for large-scale transport of biomass burning aerosols from sunphotometry at a remote South African site | |
| US20020071625A1 (en) | Wave-guided miniature spectrophotometer transducer | |
| Soderberg | The radio properties of type Ibc supernovae | |
| Yang et al. | Study on Bioagents or Bioaerosols standoff detection by lidar |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120725 Termination date: 20130408 |