CN101805884A - Glow discharge conductive rod used for vacuum aluminizing - Google Patents
Glow discharge conductive rod used for vacuum aluminizing Download PDFInfo
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- CN101805884A CN101805884A CN 201010128354 CN201010128354A CN101805884A CN 101805884 A CN101805884 A CN 101805884A CN 201010128354 CN201010128354 CN 201010128354 CN 201010128354 A CN201010128354 A CN 201010128354A CN 101805884 A CN101805884 A CN 101805884A
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Abstract
The invention relates to a glow discharge conductive rod used for a vertical vacuum aluminizing device, which comprises a conductive rod body, wherein a mounting cavity used for fixing an aluminium rod, a conductive pressing plate and a lower conductive guide rod used for the aluminium rod arranged in the mounting cavity and the aluminium rod sleeved with the lower conductive guide rod are formed at the bottom end of the conductive rod body, the lower end of the conductive rod body is provided with a limit plate, the cross section of the top part of the aluminium rod is in a butterfly-shaped structure, and a butterfly-shaped through hole corresponding to the butterfly-shaped structure on the top part of the aluminium rod is formed on the limit plate and is used for hanging and fixing the aluminium rod on the limit plate. According to the invention, the installation is convenient, current and voltage are stable, the design is reasonable, and sparking fault does not appear easily in the production process.
Description
Technical field
The present invention relates to vacuum evaporation equipment, relate to the electrode device that is used for vacuum aluminum-plating equipment specifically, more specifically, the present invention relates to a kind of vacuum aluminum-coated glow discharge current conducting rod of vertical type aluminium plating machine that is used for.Described to be used for the vacuum aluminum-coated glow discharge current conducting rod of vertical type aluminium plating machine reasonable in design, and production process is difficult for taking place the sparking fault.
Background technology
Vacuum aluminum-coated technology is to adopt at the metallic aluminium in the container heat under vacuum condition when being molten state, and its atom that disperses condenses in the refrigerative Nonconductor surface, the processing method of formation polycrystal film.The vacuum aluminum-coated development work of China is started in the seventies, and aluminized products at that time is the paper of aluminizing, and is mainly used in the internal liner package of cigarette.Development along with vacuum aluminum-coated technology.The base material of aluminizing develops into polyester (PET), polypropylene (BfiPP), polyethylene (PE) by single paper substrate, multiple materials such as polyvinyl chloride (PVC), fiber cloth, aluminized products also is widely used in the packing of products such as food, medicine, printing, chemical industry, electronics.
Vacuum aluminum-coated machine is the coating equipment equipment that generates the aluminium film on the workpiece to be plated surface. mainly by vacuum chamber, and vacuum evacuating system, rotating mechanism, aluminum evaporation source, formations such as electrical control system.Vacuum aluminum-coated machine (comprising optics and metal) commonly used at present comprises horizontal aluminum-spraying machine and vertical type aluminium plating machine, and the utilization of horizontal aluminum-spraying machine is comparative maturity, so produce relatively stable.The production of vertical type aluminium plating machine and research and development starting are slow, remain at improvements at aspects such as equipment.
The vertical vacuum aluminum-spraying machine has easy and simple to handle, film forming speed is fast, the efficient height, 2 door for vacuum chamber all have 6 from revolving round the sun anchor clamps and aluminium filament electrode, in a door for vacuum chamber, aluminize in the processing, also can carry out operations such as workpiece loading and unloading and installation aluminum at the another one door for vacuum chamber. so at the preferential employing of the industry vertical type aluminium plating machine of aluminizing.
The vacuum aluminum-coated technology of automobile industry is a vacuum aluminum-coated coating technique, the vacuum aluminum-coated filming process of in the car light production this is an operation crucial in the car light production, it is that the blank illumination is plated the layer of aluminum film after this operation processing, makes the blank illumination reach the transmitting mirror with certain reflectivity.Simultaneously, this vacuum aluminum-coated filming process also carries out decoration film coating for the decoration of car light.
As shown in Figure 1, the general aluminized basic procedure of vacuum resistance heating evaporation is:
1. glow discharge (ion bombardment), gas molecule and electron impact produce ion under the high-voltage electric field, and the ion bombardment workpiece surface is removed the workpiece surface oxide compound, increases the bonding force that is subjected to surfacing and aluminium lamination.
2. the heat that has a resistance after the electrifying electrodes makes solid metal aluminium be melt into liquid metal aluminium, for next operation of aluminizing is done necessary preparation.
3. electrode strengthens electric current, thereby make the resistance heat temperature raise the distillation of liquid metal aluminium is gasiform metallic aluminium molecule, and the aluminium molecule is point-blank substantially under vacuum state, runs into workpiece surface and deposits the very thin aluminium lamination of formation one deck owing to the reason of the temperature difference.
Protective membrane be prevent the aluminium lamination oxidation and on aluminium lamination the organic silicone oil of spraying one deck homogeneous transparent, silicone oil (hexamethyldisilane) is decomposed into silicon oxide compounds under rough vacuum adds high pressure electric field, be deposited on and form protective membrane on the aluminium lamination.
The vacuum aluminum-coated coating technique of automobile industry adopts the glow discharge current conducting rod usually; the glow discharge current conducting rod is mainly made of pure metallic aluminum; its major cause is that aluminium bar is lighter and conductivity is also fine; owing to have protective membrane influence electroconductibility on the aluminium bar, therefore must every stove all change the aluminium-foil paper (aluminium-foil paper mainly is the effect that is wrapped in the very thin conduction of the surperficial last layer of aluminium bar and puts pollution) on aluminium bar surface after every stove product process finishing.
The glow discharge current conducting rod requires as follows:
Easy to operate, very convenient during operator's dismounting aluminium bar, do not need loaded down with trivial details step preface.
Current conduction is stable during suspension, guarantees vertical direction substantially, guarantees to keep certain distance with electrode.
Aluminium-foil paper after the packing is difficult for landing.Prevent to produce sparking after the short circuit.
Avoid because the pollution of aluminium molecule makes the insulated part conduction easily.
Yet the glow discharge device of original vertical type aluminium plating machine is because design is unreasonable, owing to have protective membrane influence electroconductibility on the aluminium bar, so must every stove all changes the aluminium-foil paper on aluminium bar surface after every stove product process finishing.Again, after aluminium-foil paper packaged, aluminium-foil paper glided easily, because the downslide of aluminium-foil paper produces the conduction short circuit.Cause the production engineering fault of often striking sparks, the whole glow discharge device of often breaking has a strong impact on quality product and production efficiency.
In addition, in the past,, made operator's nose aluminium bar must be installed in the vertical lower of current conducting rod main body because described aluminium bar top end part cooperates in the hook mode with described limiting plate.Inconvenience is installed.
In addition, in the past, because in hook-hang type current conducting rod occasion, aluminium bar causes electrically contacting instability because of rocking appears in installation, gravity etc., or when electrode strengthens electric current overheating effect took place.Make the work-ing life and the result of use of current conducting rod reduce thus.
Summary of the invention
For addressing the above problem, the invention provides that a kind of to be convenient to install to adjust contact good, the intensity height, long service life be used for the aluminize glow discharge current conducting rod of equipment of vertical vacuum.Described to be used for the vacuum aluminum-coated glow discharge current conducting rod of vertical type aluminium plating machine reasonable in design, and production process is difficult for taking place the sparking fault.
For achieving the above object, the present invention adopts following technical scheme:
A kind of aluminize glow discharge current conducting rod of equipment of vertical vacuum that is used for, comprise current conducting rod main body, described current conducting rod main body bottom be formed with the installation cavity that is used for fixing aluminium bar, be disposed at the aluminium bar installed in the cavity with conductive pressing plate and conduction guide rod, with described conduction guide rod belled aluminium bar, it is characterized in that
Be provided with limiting plate in described current conducting rod main body lower end, described limiting plate is used for that aluminium bar is spacing, be connected and fixed on current conducting rod main body lower end,
The cross section of described aluminium bar top end part is butterfly structure, is formed with the butterfly through hole corresponding with the butterfly structure of described aluminium bar top end part on the described limiting plate,
There is gap between the corresponding butterfly through hole of the butterfly structure that forms on the butterfly structure of described aluminium bar top end part and the described limiting plate less than 0.5mm with described aluminium bar top end part,
The butterfly structure of described aluminium bar top end part can run through the butterfly through hole that forms on the described limiting plate, and aluminium bar is hung and is fixed on the limiting plate.
Because the gap that existence is convenient to pass through flexibly between the corresponding butterfly through hole of the butterfly structure with described aluminium bar top end part that forms on the butterfly structure of described aluminium bar top end part and the described limiting plate, for example, 0.2-0.5mm the gap, make operator easily aluminium bar be hung and be fixed on the limiting plate, soon aluminium bar is done skewed suspension and is fixed on the limiting plate, and needn't as hook-hang type current conducting rod in the past, must install in the vertical lower of current conducting rod main body.
In addition, because the cross section of described aluminium bar top end part is butterfly structure, after running through the butterfly through hole of correspondence on the limiting plate, can stably carry out face and contact cooperation, thus, can make that the electrical connection of this junction is stable, reliable with the limiting plate upper face, and can be as hook-hang type current conducting rod in the past, aluminium bar causes electrically contacting instability because of rocking appears in installation, gravity etc., or when electrode strengthens electric current overheating effect takes place.Can increase the work-ing life and the result of use of current conducting rod thus.
According to the aluminize glow discharge current conducting rod of equipment of vertical vacuum that is used for of the present invention, it is characterized in that, described butterfly structure is 8 font butterfly structures, and the cross section 8 font butterfly structures of described aluminium bar top end part are that two ends have the arcuation convex part than long radius.
Thus, it is convenient that install at 8 font aluminium bar tops after the improvement, and current/voltage is stable.
In addition, current conduction is stable during suspension, guarantees vertical direction substantially, guarantees to keep certain distance with electrode.And can avoid because the pollution of aluminium molecule makes the insulated part conduction easily.
According to the aluminize glow discharge current conducting rod of equipment of vertical vacuum that is used for of the present invention, it is characterized in that described emptying aperture two edges are formed with the spacing fastener that limits aluminium bar.
Thus, it is stable to make aluminium bar install, reliable.
According to the aluminize glow discharge current conducting rod of equipment of vertical vacuum that is used for of the present invention, it is characterized in that described aluminium bar is provided with annular antiskid groove near the outer surface of bottom.
Thus, the aluminium bar bottom is modified into spill, and aluminium bar bottom aluminium-foil paper is inlayed the place, firmly clutches aluminium-foil paper when aluminium-foil paper just packages, and makes its surface form groove, produces resistance when aluminium-foil paper glides, and prevents because the downslide of aluminium-foil paper produces the conduction short circuit.
According to the aluminize glow discharge current conducting rod of equipment of vertical vacuum that is used for of the present invention, it is characterized in that described limiting plate is positioned at conduction guide rod upper end, bottom, is fixedly mounted on the conductive pressing plate lower surface.
According to the aluminize glow discharge current conducting rod of equipment of vertical vacuum that is used for of the present invention, it is characterized in that,
The top conduction guide rod that is through to conductive pressing plate is set in conductive seat.Thus, add a top conduction guide rod on the top of conductive pressing plate, thereby increased the stability of conduction guiding.
According to the aluminize glow discharge current conducting rod of equipment of vertical vacuum that is used for of the present invention, it is characterized in that be provided with spring in the cavity of described current conducting rod main body, described spring is pressed on conductive pressing plate on the limiting plate, described limiting plate is a conductive material.
According to the aluminize glow discharge current conducting rod of equipment of vertical vacuum that is used for of the present invention, it is characterized in that described limiting plate is a conductive material, described spacing fastener is projection or buckle.
Thus, it is stable to make aluminium bar install, reliable.
According to a kind of aluminize glow discharge current conducting rod of equipment of vertical vacuum that is used for of the present invention, it is characterized in that described installation cavity arranged outside has insulation covering, the described insulation covering outside forms groove shape structure.
Thus, can avoid injecting of aluminium lamination, thereby reduce insulation covering external conductive probability, guarantee and the simplified insulation of vacuum chamber.
According to a kind of aluminize glow discharge current conducting rod of equipment of vertical vacuum that is used for of the present invention, it is characterized in that described installation cavity and interior aluminium bar thereof are petal with conductive pressing plate.
Thus, it is stable to make aluminium bar install, reliable.
According to the aluminize glow discharge current conducting rod of equipment of vertical vacuum that is used for of the present invention, the aluminium bar bottom is modified into spill, prevents because the downslide of aluminium-foil paper produces the conduction short circuit.In addition, when electrode strengthens electric current, since between the butterfly structure of the described aluminium bar top end part butterfly through hole corresponding with limiting plate with running fit less than 0.5mm, make aluminium bar install easily, and the conduction of this junction is unlikely to cause excessive gain of heat effect, can increase the work-ing life and the effect of current conducting rod.Described to be used for the vacuum aluminum-coated glow discharge current conducting rod of vertical type aluminium plating machine reasonable in design, and production process is difficult for taking place the sparking fault.
Description of drawings
Fig. 1 is original aluminize synoptic diagram of electrode device of equipment of vertical vacuum that is used for;
Fig. 2 is the aluminize installation explosive view of glow discharge current conducting rod of equipment of vertical vacuum that is used for of the present invention.
Fig. 3 is the aluminize sectional view of glow discharge current conducting rod of equipment of vertical vacuum that is used for of the present invention.
Fig. 4 a, b are the front view and the side-view of limiting plate.
Fig. 5 is the cross section 8 font butterfly structure figure of aluminium bar top end part.
Fig. 6 installs, is limited to the synoptic diagram on the limiting plate for the cross section 8 font butterfly structures of aluminium bar top end part.
Fig. 7 a, b are respectively current conducting rod main body bottom and corresponding conductive pressing plate synoptic diagram.
Among the figure, 1 is the current conducting rod main body, 2,3 are respectively and are used for the current conducting rod main body is hung on retaining plate and mounting blocks in the vacuum chamber, and 4 for being formed at current conducting rod main body bottom, being used for fixing the installation cavity of aluminium bar, and 5 for being disposed at the conductive pressing plate of installing in the cavity, 6 are the conduction guide rod, 7 is aluminium bar, and 8 is limiting plate, and 9 is spacing fastener, 10 is the annular antiskid groove of aluminium bar near the outer surface of bottom, 11 is spring, and 12 is insulation covering, and 13 are top conduction guide rod.
Embodiment
Below in conjunction with the drawings and specific embodiments the aluminize glow discharge current conducting rod of equipment of vertical vacuum that is used for of the present invention is described further.
Embodiment 1
Shown in Fig. 2-6, a kind of aluminize glow discharge current conducting rod of equipment of vertical vacuum that is used for, comprise: current conducting rod main body 1, current conducting rod main body 1 is hung on top cover in the vacuum chamber, retaining plate 2, mounting blocks 3, described current conducting rod main body 1 comprises conductive seat and is used for fixing the installation cavity 4 of aluminium bar down, be disposed at the aluminium bar of installing in the cavity 4 conductive pressing plate 5 and conduction guide rod (inner chamber bus) 6, with described conduction guide rod belled aluminium bar 7, be coated at the insulation covering 12 of described glow discharge current conducting rod outer circumferential side, aluminium bar inserts and is installed in the described limiting plate butterfly hole.
The cross section of described aluminium bar top end part is 8 font butterfly structures.Described 8 font petal design specifically, are that two ends have the arcuation convex part than long radius, can play fixed action.Aluminium bar is provided with annular recesses 10 near the outer surface of bottom.It act as the frictional force that increases aluminium bar and its surface parcel tinfoil, prevents that tinfoil from gliding.The diameter of described aluminium bar is 9-11mm.
Conductive pressing plate 5 upsides promptly are formed with briquetting near cavity one side is installed, and it is circular and cylindrical that described conductive pressing plate and briquetting thereof are respectively, and its center has cylindrical hole respectively, can embed or insert the inner chamber bus.
The installation cavity (slot) of described current conducting rod main body bottom and described conductive pressing plate and upper holder block form fit thereof are to embed or to insert conductive pressing plate and briquetting thereof respectively.The insertion slot type of current conducting rod main body is installed in the cavity and between the briquetting and is provided with spring, and spring can be pressed on described briquetting on the limiting plate 8.
Described limiting plate is a conductive material, is fixedly mounted on current conducting rod main body lower surface, the position of restriction conductive pressing plate and briquetting.
Installation method is as follows:
At first, operator use mounting blocks and top cover, the current conducting rod main body is hung on the retaining plate in the vacuum chamber, then, the aluminium bar conductive pressing plate that spring reaches is set in the installation cavity that is used for fixing aluminium bar that is formed at described current conducting rod main body bottom, insert the conduction guide rod, the limiting plate that is spirally connected is in described current conducting rod main body bottom.Hand-held aluminium bar, with the angle that slightly tilts, owing to be formed with the butterfly through hole corresponding on the described limiting plate with the butterfly structure of described aluminium bar top end part, the butterfly structure of described aluminium bar top end part can run through the butterfly through hole that forms on the described limiting plate, behind the butterfly through hole by the limiting plate correspondence, rotation aluminium bar certain angle, spacing fastener 9 butts on the butterfly structure of aluminium bar top end part and the limiting plate block.Aluminium bar can be hung and is fixed on the limiting plate.The installation of whole aluminium bar is just finished.
As shown in Figure 7, except following difference, other are as embodiment 1.
It is block petal and cylindrical that described conductive pressing plate and inner chamber briquetting thereof are respectively the four directions, and its center has cylindrical hole respectively, can embed or insert the inner chamber bus.
With the installation cavity (slot) of the described current conducting rod main body bottom of described conductive pressing plate form fit also be that the four directions is block petal, can embed conductive pressing plate and upper holder block thereof respectively.
According to the aluminize glow discharge current conducting rod of equipment of vertical vacuum that is used for of the present invention, the aluminium bar bottom is modified into spill, prevents because the downslide of aluminium-foil paper produces the conduction short circuit.In addition, when electrode strengthens electric current, since between the butterfly structure of the described aluminium bar top end part butterfly through hole corresponding with limiting plate with running fit less than 0.5mm, make aluminium bar install easily, and the conduction of this junction is unlikely to cause excessive gain of heat effect, can increase the work-ing life and the effect of current conducting rod.Described to be used for the vacuum aluminum-coated glow discharge current conducting rod of vertical type aluminium plating machine reasonable in design, and production process is difficult for taking place the sparking fault.
Claims (10)
1. one kind is used for the aluminize glow discharge current conducting rod of equipment of vertical vacuum, comprise: the current conducting rod main body, described current conducting rod main body bottom is formed with the installation cavity that is used for fixing aluminium bar, be disposed at the conductive pressing plate installed in the cavity and conduction guide rod, with described conduction guide rod belled aluminium bar, it is characterized in that
Be provided with limiting plate in described current conducting rod main body lower end, described limiting plate is used for that aluminium bar is spacing, be fixedly connected on current conducting rod main body lower end,
The cross section of described aluminium bar top end part is butterfly structure, is formed with the butterfly through hole corresponding with the butterfly structure of described aluminium bar top end part on the described limiting plate,
There is the gap of being convenient to pass through flexibly between the corresponding butterfly through hole of the butterfly structure that forms on the butterfly structure of described aluminium bar top end part and the described limiting plate with described aluminium bar top end part,
The butterfly structure of described aluminium bar top end part can run through the butterfly through hole that forms on the described limiting plate, and aluminium bar is hung and is fixed on the limiting plate.
2. the aluminize glow discharge current conducting rod of equipment of vertical vacuum that is used for as claimed in claim 1, it is characterized in that, described butterfly structure is 8 font butterfly structures, and cross section 8 font butterfly structures, two ends of described aluminium bar top end part have the arcuation convex part than long radius.
3. the aluminize glow discharge current conducting rod of equipment of vertical vacuum that is used for as claimed in claim 1 is characterized in that described butterfly structure lateral margin is formed with the spacing fastener that limits aluminium bar.
4. the aluminize glow discharge current conducting rod of equipment of vertical vacuum that is used for as claimed in claim 1 is characterized in that described aluminium bar is provided with annular antiskid groove near the outer surface of bottom.
5. the aluminize glow discharge current conducting rod of equipment of vertical vacuum that is used for as claimed in claim 1 is characterized in that, the top conduction guide rod that is through to conductive pressing plate is set in conductive seat.
6. according to described the aluminize glow discharge current conducting rod of equipment of vertical vacuum that is used for of claim 2, it is characterized in that be provided with spring in the cavity of described current conducting rod main body, described spring is pressed on conductive pressing plate on the limiting plate, described limiting plate is a conductive material.
7. according to described the aluminize glow discharge current conducting rod of equipment of vertical vacuum that is used for of claim 2, it is characterized in that described spacing fastener is projection or buckle shape.
8. according to described a kind of the aluminize glow discharge current conducting rod of equipment of vertical vacuum that is used for of claim 1, it is characterized in that described installation cavity arranged outside has insulation covering, the described insulation covering outside forms groove shape structure.
9. according to described a kind of the aluminize glow discharge current conducting rod of equipment of vertical vacuum that is used for of claim 1, it is characterized in that described installation cavity and the aluminium bar conductive pressing plate that is mated are petal.
10. according to described a kind of the aluminize glow discharge current conducting rod of equipment of vertical vacuum that is used for of claim 1, it is characterized in that, have gap between the corresponding butterfly through hole of the butterfly structure that forms on the butterfly structure of described aluminium bar top end part and the described limiting plate less than 0.5mm with described aluminium bar top end part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010128354 CN101805884B (en) | 2010-03-18 | 2010-03-18 | Glow discharge conductive rod used for vacuum aluminizing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010128354 CN101805884B (en) | 2010-03-18 | 2010-03-18 | Glow discharge conductive rod used for vacuum aluminizing |
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| CN101805884A true CN101805884A (en) | 2010-08-18 |
| CN101805884B CN101805884B (en) | 2012-01-04 |
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| CN 201010128354 Expired - Fee Related CN101805884B (en) | 2010-03-18 | 2010-03-18 | Glow discharge conductive rod used for vacuum aluminizing |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102877037A (en) * | 2012-09-18 | 2013-01-16 | 铜陵其利电子材料有限公司 | Fixing lock key for metallized film plating machines |
| CN105755436A (en) * | 2014-12-16 | 2016-07-13 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Membrane deposition method |
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| JP2002004063A (en) * | 2000-06-19 | 2002-01-09 | Toyota Industries Corp | Method of forming metallic film |
| CN101104919A (en) * | 2007-08-20 | 2008-01-16 | 上海小糸车灯有限公司 | Electrode instrument used for vacuum aluminizing device |
| TW200813241A (en) * | 2006-09-07 | 2008-03-16 | Metal Ind Res & Dev Ct | Vacuum sliding-type electricity introduction apparatus |
| CN201201967Y (en) * | 2008-04-30 | 2009-03-04 | 上海小糸车灯有限公司 | Revolving rack apparatus for vertical type aluminum plating machine |
| CN101570848A (en) * | 2008-04-30 | 2009-11-04 | 上海小糸车灯有限公司 | Rotating stand for vertical type aluminium plating machine |
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2010
- 2010-03-18 CN CN 201010128354 patent/CN101805884B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002004063A (en) * | 2000-06-19 | 2002-01-09 | Toyota Industries Corp | Method of forming metallic film |
| TW200813241A (en) * | 2006-09-07 | 2008-03-16 | Metal Ind Res & Dev Ct | Vacuum sliding-type electricity introduction apparatus |
| CN101104919A (en) * | 2007-08-20 | 2008-01-16 | 上海小糸车灯有限公司 | Electrode instrument used for vacuum aluminizing device |
| CN201201967Y (en) * | 2008-04-30 | 2009-03-04 | 上海小糸车灯有限公司 | Revolving rack apparatus for vertical type aluminum plating machine |
| CN101570848A (en) * | 2008-04-30 | 2009-11-04 | 上海小糸车灯有限公司 | Rotating stand for vertical type aluminium plating machine |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102877037A (en) * | 2012-09-18 | 2013-01-16 | 铜陵其利电子材料有限公司 | Fixing lock key for metallized film plating machines |
| CN105755436A (en) * | 2014-12-16 | 2016-07-13 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Membrane deposition method |
| CN105755436B (en) * | 2014-12-16 | 2018-08-24 | 北京北方华创微电子装备有限公司 | Membrane deposition method |
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| CN101805884B (en) | 2012-01-04 |
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Address after: 201800 Yecheng Road, Jiading District, Jiading District, Shanghai Patentee after: HUAYU VISION TECHNOLOGY (SHANGHAI) Co.,Ltd. Address before: 201800 Yecheng Road, Jiading District, Jiading District, Shanghai Patentee before: SHANGHAI KOITO AUTOMOTIVE LAMP Co.,Ltd. |
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Granted publication date: 20120104 |