CN101104919A - Electrode instrument used for vacuum aluminizing device - Google Patents

Electrode instrument used for vacuum aluminizing device Download PDF

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Publication number
CN101104919A
CN101104919A CNA2007100450535A CN200710045053A CN101104919A CN 101104919 A CN101104919 A CN 101104919A CN A2007100450535 A CNA2007100450535 A CN A2007100450535A CN 200710045053 A CN200710045053 A CN 200710045053A CN 101104919 A CN101104919 A CN 101104919A
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electrode
tungsten filament
sliding sleeve
vacuum aluminum
plating equipment
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CN100513631C (en
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邓龙
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Huayu vision technology (Yantai) Co.,Ltd.
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Shanghai Koito Automotive Lamp Co Ltd
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Abstract

An electrode device used for vacuum aluminizing equipment is provided, which comprises an electrode (20), a fixed connector (21) and a tungsten filament fastener (22). The electrode (20) is integrally shaped to a shaft with an outward-protruding rim portion (24) in the middle and a tungsten filament mount portion (35) at the right end. The fixed connector (21) is arranged at the left end of the electrode (20) and serves to fixedly connect the electrode (20) with a main electrode rod. The tungsten filament fastener (22) comprises a sliding sleeve (41), a return spring (18) and a limiter (43). The invention replaces the prior threadedly-connected split electrode by the integrated shaft-shaped electrode; fixes the electrode and the main electrode rod by means of locking two semi-circular slots; and replaces the prior tungsten filament mount hole by the sliding chute, to allow the two ends of tungsten filament to be embedded in the V-shaped chute, avoiding the prior point-to-point contact. The invention has the advantages of convenient adjustment and fabrication, increased contact area of electrode and upper/lower cover, better electrical conductivity, high strength, no risk of deformation, long service life, and minimized production cost.

Description

The electrode device that is used for vacuum aluminum-plating equipment
Technical field
The present invention relates to vacuum evaporation equipment, relate to the electrode device that is used for vacuum aluminum-plating equipment specifically.
Background technology
Vacuum aluminum-coated technology is to adopt at the metallic aluminium in the container heat under vacuum condition when being molten state, and its atom that disperses condenses in the refrigerative Nonconductor surface, the processing method of formation polycrystal film.The vacuum aluminum-coated development work of China is started in the seventies, and aluminized products at that time is the paper of aluminizing, and is mainly used in the internal liner package of cigarette.Development along with vacuum aluminum-coated technology.The base material of aluminizing develops into polyester (PET), polypropylene (BfiPP), polyethylene (PE) by single paper substrate, multiple materials such as polyvinyl chloride (PVC), fiber cloth, aluminized products also is widely used in the packing of products such as food, medicine, printing, chemical industry, electronics.
Vacuum aluminum-coated machine is the coating equipment equipment that generates the aluminium film on the workpiece to be plated surface. mainly by vacuum chamber, and vacuum evacuating system, rotating mechanism, aluminum evaporation source, formations such as electrical control system.Vacuum aluminum-coated machine (comprising optics and metal) commonly used at present comprises horizontal aluminum-spraying machine and vertical type aluminium plating machine, and the utilization of horizontal aluminum-spraying machine is comparative maturity, so produce relatively stable.The production of vertical type aluminium plating machine and research and development starting are slow, remain at improvements at aspects such as equipment.
The vertical vacuum aluminum-spraying machine has easy and simple to handle, film forming speed is fast, the efficient height, 2 doors all have 6 from revolving round the sun anchor clamps and aluminium filament electrode, in a door, aluminize in the processing, also can carry out operations such as workpiece loading and unloading and installation aluminum at the another one door. so at the preferential employing of the industry vertical type aluminium plating machine of aluminizing.
In the production process of above-mentioned existing vertical vacuum aluminum-spraying machine, we find the design defect because of equipment itself, and it is bad to cause aluminum-spraying machine in enormous quantities to aluminize.The main problem of waste product comprises variable color (should be snow-white and reflectivity is strong, be that flavescence becomes blue stain five colours looks now) or the like, makes production cost too high.
The contriver has carried out about 20 improvement and has re-designed the part parts existing aluminum-spraying machine, and wherein the aluminum-spraying machine electrode is a more typical design.
As shown in Figure 1, the battery lead rod 1 of the electrode device of original vertical vacuum aluminum-spraying machine is the perfect thread bar of the M8 of a red copper material, be with permanent sleeve 2 on its left-hand component, permanent sleeve 2 is regulated the matching relationship of its open holes 3 and axial main electrode bar (not shown) by the nut 5,6 at its two ends.Top electrode 10 is a minor axis, its left end has a flange spiro union portion 7, flange spiro union portion 7 has an internal thread hole that is threaded and cooperates with battery lead rod 1 right-hand member, top electrode 10 right-hand members have two holes perpendicular to axis and mistake axis, the hole 12 on the left side is used to insert tungsten filament, connects positive and negative two electrode (not shown); The hole 13 on the right is a cylinder pin hole.Top electrode 10 is fixed on the right-hand member of battery lead rod 1 by being threaded, spacing in the stop nut 14 of battery lead rod 1 right-hand member by same setting (being spirally connected).Sliding sleeve 16 is a cylindrical drum, and its right-hand member has an inward flange portion 8.Sliding sleeve 16 (inner tube wall) can slide along top electrode 10 left end flange spiro union portions 7, and the inward flange portion 8 of sliding sleeve 16 right-hand members can slide along top electrode 10.Between the inward flange portion 8 of the portion of outward flange portion 7 of sliding sleeve 16 and top electrode 10, return spring 18 is installed.Sliding sleeve 16 right-hand members are limit (deciding) position by the straight pin (not shown) in the hole 13, so that it is unlikely to slippage outside top electrode 10 right sides when sliding.
Required solid aluminum is fixed on the tungsten filament that connects positive and negative two electrodes in the vacuum aluminum-coated operation.After the counter electrode energising, the heating tungsten filament, thus make the solid aluminum gasification of fixing on it, provide required aluminium to workpiece.
In actual application, find that the kind electrode device has following shortcoming:
1, install in the suit mode, adjust and dismounting all inconvenient, simultaneously, be stained with aluminium on the nut after, the dismounting difficulty.
2, it is fastening that the red copper electrode uses nut, and the conduction contact is not good.
3, battery lead rod adopts two places to be threaded, and conduction can become resistance, the thermo-efficiency of influence point.And the complete processing complexity, intensity is low.
4, adopt the threaded rod of M8, minimum diameter has only 6.7MM, and intensity is low, the back easy deformation bending of being heated.
5, top electrode adopts the hole that tungsten filament is installed, and installs inconvenient.
6, tungsten filament contacts with sliding sleeve point, the conduction loose contact.
The electrodes conduct loose contact is to influence one of reason of the result of use of above-mentioned electrode device.Original electrode contact surface is little, and the junction is many, and this causes and uses some cycles after-current instability, has influence on the coating quality (variable color is one of them) of workpiece accordingly.
In addition, electrode necessary cleaning after use after a while maintained, and electrode is owing to its peripheral zone screw thread oblique crank Z shape, and easy deformation, and adjusting inconvenience clean and maintain length consuming time.
The contriver finds: by the fixed form of counter electrode and the integrated transformation of electrode, can overcome the problems referred to above, promptly, use integral shaft shape electrode to replace the detachable electrode with battery lead rod and top electrode in the past by being threaded, the mode fixed electorde and the battery lead rod that adopt two half slots to fasten, replace original tungsten filament open holes with chute, make the two ends of tungsten filament be absorbed in V-shaped groove, some contact before having changed, thus, a kind of adjustment of being convenient to install is provided, the conduction contact is good, the intensity height, the electrode device that is used for vacuum aluminum-plating equipment of long service life has significantly reduced the main in the past problem of the large batch of bad grade of aluminizing that comprises variable color etc.
Summary of the invention
For addressing the above problem, the invention provides a kind of adjustment of being convenient to install, contact is good, intensity height, the electrode device that is used for vacuum aluminum-plating equipment of long service life.
For achieving the above object, the present invention adopts following technical scheme:
A kind of electrode device that is used for vacuum aluminum-plating equipment comprises electrode 20, fixed connection apparatus 21 and tungsten filament gripping mechanism 22, it is characterized in that, described electrode 20 is the integral shaft shape that a middle part is formed with outward flange portion 24, and right-hand member has a tungsten filament installation portion 35; Described fixed connection apparatus 21 is installed in the left end of electrode 20, and electrode 20 is fixedlyed connected with main electrode bar 38; Described tungsten filament gripping mechanism 22 is installed in electrode outward flange portion 24 right sides, described tungsten filament gripping mechanism 22 comprises sliding sleeve 41, return spring 18 and a stop means 43, return spring 18 is set in electrode outward flange portion 24 right sides, sliding sleeve 41 is enclosed within on the return spring 18, can be along electrode axis to doing horizontal slip, stop means 43 is positioned at the right side of the tungsten filament installation portion 35 of electrode, is used to limit moving right of sliding sleeve 41.
Use integral shaft shape electrode to replace the detachable electrode by being threaded with battery lead rod and top electrode in the past, its effect is: electrode is easy to process on the one hand, need not assembling, has reduced cost; On the other hand, conducting electricity very well of integral shaft shape electrode can not produce the influence of resistance sudden change.
When described stop means 43 does not have tungsten filament to install, can be used for preventing the slippage that moves right of sliding sleeve 41 on electrode.
According to the electrode device that is used for vacuum aluminum-plating equipment of the present invention, preferably, the mode fixed electorde (not shown) that described fixed connection apparatus 21 adopts two half slots 33,34 to fasten.
According to the electrode device that is used for vacuum aluminum-plating equipment of the present invention, preferably, the mode that two half slots of described fixed connection apparatus 21 employings 31,34 fasten is main electrode bar 38 fixedly.
According to the electrode device that is used for vacuum aluminum-plating equipment of the present invention, described fixed connection apparatus 21 shared lower covers, this lower cover upper surface has the half slot 34 that cooperates with electrode, and the lower surface has the half slot 31 that cooperates with the main electrode bar with above-mentioned half slot vertical direction.
Because the fixed installation mode of using two half slots to fasten replaces the mode with two nut lockings, strengthened the contact area with electrode greatly, make conductivity more reliable, stablize.At whole connection procedure, conduct electricity by web member, whole connection area increases, and the conduction reliability of whole electricity is increased greatly, thereby reduced electric losses.
In addition, be used for the fastening of electrode device electrode of vacuum aluminum-plating equipment and the fastening of main electrode bar and control respectively, make and install and debug more convenient.In addition, take manner, make used bolt vertical with electrode direction, the aluminium of gasification can not stick the bonding surface of screw bolt and nut, makes adjustment process more laborsaving, saves time.
According to the electrode device that is used for vacuum aluminum-plating equipment of the present invention, preferably, tungsten filament installation portion 35 is a corner groove along the perforation of electrode axis diameter of section direction, and its horizontal section is crossed the electrode axis, vertical section extends downwardly into the electrode lower surface, upper end and horizontal section left side smooth transition.
Owing to replace original tungsten filament open holes with chute, need not to aim at last locating point, make easier for installation fast, save the required time of tungsten filament of changing.
According to the electrode device that is used for vacuum aluminum-plating equipment of the present invention, preferably, on the described sliding sleeve right-hand member longitudinal axis, have one relatively and the perforation V-shaped groove 54 of tungsten filament embedded hole, described V-type groove 54 is the V-arrangement of undergauge from right to left in described sliding sleeve right-hand member longitudinal cross-section.Gap at the bottom of the V font of described V-type groove right side is for being not less than 1.0mm.
Owing to V-shaped groove is set in the right part of sliding sleeve, using tungsten filament gripping mechanism 22 by the corner groove of the diameter of axle on the tungsten filament installation portion 35 to perforation, by sliding sleeve is moved to left, after in the V-type groove 54 that the right part that makes the two ends of tungsten filament be absorbed in the sliding sleeve corresponding with its open holes 25 is provided with, can be again by loosening sliding sleeve 41, under the spring force effect of return spring 18, the two ends of tungsten filament are tightly embedded in the V-type groove.Thus, the tungsten filament point contact before having changed increases contact area, and electroconductibility is better.And, need not to aim at last locating point, make easier for installation fast, save the required time of tungsten filament of changing.
Preferably, according to the electrode device that is used for vacuum aluminum-plating equipment of the present invention, described stop means is the shaft block ring 59 that is installed on the electrode.
Adopt shaft block ring to replace straight pin in the past and make axial limiting, easy accessibility is laborsaving, and is more reliable than original straight pin simultaneously.
Preferably, according to the electrode device that is used for vacuum aluminum-plating equipment of the present invention, the diameter of described electrode is 9-11mm.
Original battery lead rod adopts the screw rod of M8, and actual smallest shaft diameter has only 6.7mm, in heat-processed, very easily produces distortion, and bending causes quality product not reach requirement, produces substandard products, and the loss in the production is very big, and cost is increased greatly.Now select for use the red copper bar of 9-11mm to make electrode, increased the intensity of electrode self greatly, need not frequent replacing, reduced the consumption of consumable accessory, simultaneously, reduced the quantity of substandard product, significantly reduced the production loss, make the corresponding attenuating of production cost.
Preferably, according to the electrode device that is used for vacuum aluminum-plating equipment of the present invention, between described sliding sleeve 41 and described return spring 18, be provided with tubular sheath 19, nearly outward flange portion 24 1 ends of described tubular sheath 19 have a deck that is used for fixing spring pedestal, and its jacket inner wall is inclination undergauge shape from left to right.
Thus, in described sliding sleeve 41 electrode axis when doing horizontal slip, can protect described return spring 18 do not dripped aluminum oxide pickup and influence.
Again, the inwall of described tubular sheath 19 is undergauge shape, can be used for the limit function of spring when the electrode axis right-hand member moves.
Compared with prior art, the present invention uses integral shaft shape electrode to replace the detachable electrode by being threaded with battery lead rod and top electrode in the past, and its effect is: electrode is easy to process on the one hand, need not assembling, has reduced cost; On the other hand, conducting electricity very well of integral shaft shape electrode can not produce the influence of resistance sudden change; The mode of using half slot up and down to fasten, make electrode fixing and main electrode fixedly be separated from each other adjustment, easy to adjust, and manner makes the contact surface of electrode and upper and lower covers connect increase, electroconductibility is better; Electrode uses the red copper bar of 9-11MM, and is easy to process, and intensity increases, and is not yielding, long service life, and good conductivity; Adopt chute to substitute original jack and install, make installation more convenient, save time.Thus, greatly reduce production cost, reduced that main in the past problem comprises variable color etc. large batch of aluminize bad.
Description of drawings
Fig. 1 is original sectional view that is used for the electrode device of vacuum aluminum-plating equipment;
Fig. 2 is the sectional view that is used for the electrode device of vacuum aluminum-plating equipment of the present invention;
Fig. 3 is the part sectioned view of another embodiment of the present invention;
Fig. 4 is the right side view of the sliding sleeve among Fig. 3;
Embodiment
Below in conjunction with the drawings and specific embodiments the electrode device that is used for vacuum aluminum-plating equipment of the present invention is described further.
Embodiment one
As shown in Figure 2, the electrode device that is used for vacuum aluminum-plating equipment of the present invention comprises electrode 20, fixed connection apparatus 21 and tungsten filament gripping mechanism 22.
Electrode 20 is that a diameter is the whole major axis of 10MM, and its middle part is formed with an outward flange portion 24, and there are two vertical axis the nearly right part of axle and cross the through hole of axis, and the hole 25 on the left side is used to install tungsten filament, and the hole 26 on right side is a cylinder pin hole.
Fixed connection apparatus 21 comprises electrode connecting parts 30 and main electrode mounting block 31, and electrode connecting parts 30 comprises loam cake 33 and lower cover 34, and loam cake 33 is a rectangle substantially, and there is the horizontal half slot that (promptly axial) connects about a lower surface; Lower cover 34 is a rectangular parallelepiped substantially, there is the horizontal half slot that connects about a upper surface, the horizontal half slot 36 that the lower surface has front and back (promptly radially) to connect, loam cake 33 is fixing up and down by bolt with lower cover 34, and the left end of electrode 20 is fixed in two horizontal half slots that cooperatively interact.
Main electrode mounting block 31 is a rectangular parallelepiped substantially, the horizontal half slot 37 that the upper surface has front and back to connect.The half slot 37 of main electrode mounting block 31 and 36 cooperations of the half slot of lower cover 34 are fixed on the main electrode (not shown), and are fixing by the bolt 39 of both sides.
Tungsten filament gripping mechanism 22 comprises sliding sleeve 41, return spring 18 and straight pin 43.Sliding sleeve 41 is one cylindric, is provided with tubular sheath 19 between described sliding sleeve 41 and described return spring 18, and nearly outward flange portion 24 1 ends of described tubular sheath 19 have a deck that is used for fixing spring pedestal.(left side) side is formed with an inward flange 45 in its right-hand end, is used to tighten return spring 18.Described jacket inner wall is inclination undergauge shape from left to right.
In described sliding sleeve 41 electrode axis when doing horizontal slip, described sheath can protect described return spring 18 do not dripped aluminum oxide pickup and influence.
Sliding sleeve 41 internal diameters cooperate with the external diameter of the flange 24 of electrode 20, and the internal diameter of the inward flange 45 of sliding sleeve 41 cooperates with the diameter of axle on flange 24 right sides of electrode 20, horizontally slips along electrode 20.Return spring 18 is enclosed within on the right-hand axis of flange 24 of electrode 20, and its right-hand member is fixed by the deck of nearly outward flange portion 24 1 ends of described tubular sheath 19, and its right-hand member is spacing by inward flange 45, and is fixing.Straight pin 43 is installed in the hole 26 of electrode 20 right-hand members, by this, when tungsten filament not being installed on electrode, can be used for preventing the slippage that moves right of sliding sleeve 41.
Embodiment two
Fig. 3 and 4 is an alternative embodiment of the invention.Present embodiment has improved the mounting means of tungsten filament.
There is an annular recesses 55 the nearly right part of electrode 20, there is a chute 57 on the groove right side, chute 57 is the corner groove that connects along fore-and-aft direction, the horizontal section 53 of chute 57 is crossed the medullary ray of axle, and along continuous straight runs extends to perforation to the both sides, front and back of axle, and the right-hand member of horizontal section 53 is semicircle, the vertical section 56 of chute 57 extends the perforation axle downwards, form an opening 58 with the downside of axle, upper end and smooth connection of horizontal section 53 left sides extend to perforation before and after the centerline direction perpendicular to axle.
Tungsten filament gripping mechanism 22 comprises sliding sleeve 41, return spring 18 and shaft block ring 59.The cylinder its right end face that is formed with inward flange 45 of sliding sleeve 41 is stated on the sliding sleeve right-hand member longitudinal axis, and the perforation V-shaped groove 54 of a relative tungsten filament embedded hole is arranged, and described V-type groove 54 is the V-arrangement of undergauge from right to left in described sliding sleeve right-hand member longitudinal cross-section.Gap at the bottom of the V font of described V-type groove right side is for being not less than 1.0mm.
See Fig. 3, sliding sleeve 41 internal diameters cooperate with the external diameter of the flange 24 of electrode 20, and the internal diameter of inward flange 45 cooperates with the diameter of axle on flange 24 right sides of electrode 20, and sliding sleeve 41 can horizontally slip along electrode 20.Return spring 18 is enclosed within on the right-hand axis of flange 24 of electrode 20, and the inner flange of right-hand member 45 is spacing.
Have a shaft block ring 59 to be installed in the annular recesses 55 of electrode 20 right-hand members, restriction sliding sleeve 41 is vertically outside the slippage electrode.
Embodiment three
Except electrode 20 is that a diameter is the whole major axis of 11MM, other are as embodiment one.
In addition, the tungsten filament installation portion 35 of the nearly right-hand member of electrode 20 has an annular recesses 55, and there is a chute 57 on the groove right side, the corner groove that chute 57 connects for (be shaft section radially) direction along front and back.The horizontal section 53 of chute 57 is crossed the medullary ray of axle, and along continuous straight runs (promptly axial) extends to perforation to the both sides, front and back of axle.The right-hand member of horizontal section 53 is semicircle, and the vertical section 56 of chute 57 extends downwards and connects axle, forms an opening 58 with the downside of axle, and upper end and smooth connection of horizontal section 53 left sides extend to perforation along the centerline direction front and back perpendicular to axle.
Tungsten filament gripping mechanism 22 comprises sliding sleeve 41, return spring 18 and shaft block ring 59.On the described sliding sleeve right-hand member of the cylinder its right end face axis that is formed with inward flange 45 of sliding sleeve 41, the perforation V-shaped groove 54 of a relative tungsten filament embedded hole is arranged, described V-type groove 54 is the V-arrangement of undergauge from right to left in described sliding sleeve right-hand member longitudinal cross-section.Gap at the bottom of the V font of described V-type groove right side is for being not less than 1.0mm.
See Fig. 3, sliding sleeve 41 internal diameters cooperate with the external diameter of the flange 24 of electrode 20, and the internal diameter of inward flange 45 cooperates with the diameter of axle on flange 24 right sides of electrode 20, and sliding sleeve 41 can horizontally slip along electrode 20.Return spring 18 is enclosed within on the right-hand axis of flange 24 of electrode 20, and the inner flange of right-hand member 45 is spacing.
In the present embodiment,, adopt a shaft block ring 59, be installed in the annular recesses 55 of electrode 20 right-hand members, when on electrode, not having tungsten filament to install thus, can be used for preventing the slippage that moves right of sliding sleeve 41 as stop means 43.
Make use-case
At first determine the position of tungsten filament apart from the main electrode (not shown), determine by the position of adjusting loam cake 33 and lower cover 34, then two electrode devicies are separately fixed on the positive and negative main electrode by main electrode mounting block 31 and bolt 39, sliding sleeve 41 slides left, return spring 18 shrinks, the V-shaped groove 54 of sliding sleeve 41 ends retreats left, overcomes the opening 58 that return spring 18 elastic force expose the chute 57 of electrode 20.After the tungsten filament (not shown) put into opening 58, slide into the right-hand member of horizontal section along chute 41.Unclamp sliding sleeve 41, under the effect of return spring 18, sliding sleeve slides to the right, promotes the V-shaped groove 54 of sliding sleeve 41 ends, and the two ends of tungsten filament are embedded in the V-shaped groove 54 of sliding sleeve 41 ends.Then solid aluminum is fixed on the tungsten filament, at last to the main electrode energising, positive and negative main electrode conducting makes the tungsten filament heating, thereby makes the solid aluminum gasification.
Originally make in the use-case, owing to use integral shaft shape electrode to replace the detachable electrode by being threaded with battery lead rod and top electrode in the past, electrode is easy to process, and the conductivity of integral shaft shape electrode is good, can not produce the influence of resistance sudden change.
Originally make in the use-case,, strengthened the contact area with electrode greatly, making conductivity more reliable, stablizing because the fixed installation mode of using two half slots to fasten replaces the mode with two nut lockings.Thus, reduced that main in the past problem comprises variable color etc. large batch of aluminize bad.
Originally make in the use-case, owing to replace original tungsten filament open holes, need not to aim at last locating point, making easier for installation fast, saving the required time of tungsten filament of changing with chute.
Originally make in the use-case, tungsten filament contacts with the V-type groove with electrode.Thus, the tungsten filament point contact before having changed increases contact area, and electroconductibility is better.And, need not to aim at last locating point, make easier for installation quick.
Originally make in the use-case, described sheath can protect described return spring 18 do not dripped aluminum oxide pickup and influence.
, but should be understood that under the situation that does not break away from relevant protection domain defined by the claims that those skilled in the art can make change and/or revise according to inventive embodiment describing the present invention property and nonrestrictive description.

Claims (10)

1. electrode device that is used for vacuum aluminum-plating equipment, comprise electrode (20), fixed connection apparatus (21) and tungsten filament gripping mechanism (22), it is characterized in that described electrode (20) is the integral shaft shape that a middle part is formed with outward flange portion (24), right-hand member has a tungsten filament installation portion (35); Described fixed connection apparatus (21) is installed in the left end of electrode (20), and electrode (20) is fixedlyed connected with main electrode bar (38); Described tungsten filament gripping mechanism (22) is installed in electrode outward flange portion (24) right side, described tungsten filament gripping mechanism (22) comprises sliding sleeve (41), return spring (18) and a stop means (43), return spring (18) is set in electrode outward flange portion (24) right side, sliding sleeve (41) is enclosed within on the return spring (18), can be along electrode axis to doing horizontal slip, stop means (43) is positioned at the tungsten filament installation portion right side of electrode, is used to limit moving right of sliding sleeve.
2. the electrode device that is used for vacuum aluminum-plating equipment according to claim 1 is characterized in that, the mode fixed electorde (20) that described fixed connection apparatus (21) adopts two half slots to fasten.
3. the electrode device that is used for vacuum aluminum-plating equipment according to claim 1 is characterized in that, the mode that two half slots of described fixed connection apparatus (21) employing fasten is main electrode bar (38) fixedly.
4. the electrode device that is used for vacuum aluminum-plating equipment according to claim 2 is characterized in that, the mode that two half slots of described fixed connection apparatus (21) employing fasten is main electrode bar (38) fixedly.
5. the electrode device that is used for vacuum aluminum-plating equipment according to claim 4, it is characterized in that, the shared lower cover of described fixed connection apparatus, this lower cover upper surface has the half slot (34) that cooperates with electrode, and the lower surface has the half slot (31) that cooperates with the main electrode bar with above-mentioned half slot vertical direction.
6. according to the described electrode device that is used for vacuum aluminum-plating equipment of one of claim 1 to 5, it is characterized in that, tungsten filament installation portion (35) is a corner groove along the perforation of electrode axis diameter of section direction, its horizontal section (53) is crossed the electrode axis, vertical section (56) extends downwardly into the electrode lower surface, vertical section upper end (57) and horizontal section (53) left side smooth transition.
7. according to the described electrode device that is used for vacuum aluminum-plating equipment of one of claim 1 to 5, it is characterized in that, be formed with one in described sliding sleeve right-hand member longitudinal axis position relatively and the perforation V-shaped groove (54) of tungsten filament embedded hole, described V-type groove (54) is the V-arrangement of undergauge from right to left in described sliding sleeve right-hand member longitudinal cross-section.
8. the electrode device that is used for vacuum aluminum-plating equipment according to claim 7, it is characterized in that, between described sliding sleeve (41) and described return spring 18, be provided with tubular sheath (19), nearly outward flange portion (24) one ends of described tubular sheath (19) have a deck that is used for fixing spring pedestal, and its jacket inner wall is undergauge shape.
9. according to the described electrode device that is used for vacuum aluminum-plating equipment of one of claim 1 to 5, it is characterized in that described stop means (43) is for being installed in the shaft block ring (59) on the electrode.
10. according to the described electrode device that is used for vacuum aluminum-plating equipment of one of claim 1 to 5, it is characterized in that the diameter of described electrode is 9-11mm.
CNB2007100450535A 2007-08-20 2007-08-20 Electrode instrument used for vacuum aluminizing device Active CN100513631C (en)

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Cited By (4)

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Publication number Priority date Publication date Assignee Title
CN101805884A (en) * 2010-03-18 2010-08-18 上海小糸车灯有限公司 Glow discharge conductive rod used for vacuum aluminizing
CN102618835A (en) * 2012-03-28 2012-08-01 常州星宇车灯股份有限公司 Tungsten wire clamping device of vacuum aluminum plating device
CN104099566A (en) * 2014-07-31 2014-10-15 上海宝镀真空设备科技有限公司 Track guiding electrode
CN117626214A (en) * 2024-01-25 2024-03-01 沈阳松陵三航机械制造有限公司 Coating device for aluminum alloy surface

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CN2538813Y (en) * 2002-04-26 2003-03-05 彩虹彩色显像管总厂 Projecting tube aluminium evaporation heater
US20060219172A1 (en) * 2005-04-05 2006-10-05 Taiwan Semiconductor Manufacturing Co., Ltd. PVD equipment and electrode and deposition ring thereof

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101805884A (en) * 2010-03-18 2010-08-18 上海小糸车灯有限公司 Glow discharge conductive rod used for vacuum aluminizing
CN102618835A (en) * 2012-03-28 2012-08-01 常州星宇车灯股份有限公司 Tungsten wire clamping device of vacuum aluminum plating device
CN102618835B (en) * 2012-03-28 2014-03-26 常州星宇车灯股份有限公司 Tungsten wire clamping device of vacuum aluminum plating device
CN104099566A (en) * 2014-07-31 2014-10-15 上海宝镀真空设备科技有限公司 Track guiding electrode
CN117626214A (en) * 2024-01-25 2024-03-01 沈阳松陵三航机械制造有限公司 Coating device for aluminum alloy surface

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