CN101798679B - Preparation method of composite coating used for gas bearing - Google Patents
Preparation method of composite coating used for gas bearing Download PDFInfo
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Abstract
The invention discloses a preparation method of a composite coating used for a gas bearing, which adopts a mid-frequency reactive magnetron sputtering system to deposit a Ti/AlTiN/Ti: DLC high- hardness and high-abrasion-resistance composite membrane. The smaller the friction coefficient between a rotor and a stator of the dynamic gas bearing is, the better to the starting of a motor, and in the high-speed rotation process, the stator and the rotor can possibly collide with each other or even have instant melting lock faults. The dynamic gas bearing made of single material can not satisfy the current requirements, and the surface modification technique of the bearing material is the key technology that limits the application of the dynamic gas bearing. The coating prepared through the method reduces the friction coefficient, improves the abrasion resistance and at the same time solves the problems of corrosion resistance and abrasive resistance of the coating. The preparation method is easy to realize and all the materials are common, so the preparation method can realize industrial production.
Description
Technical field
The present invention relates to the preparation of hard wear-resistant coating, particularly be used for low friction, the high abrasion of air-bearing surface-treated, the preparation of solidity to corrosion compound coating.
Background technology
The more little motor starting that helps more of frictional coefficient between kinetic pressure air-float bearing of inner rotor and the stator, in the high speed rotating process, stator and rotor possibly bump even occur instant melting locking fault.The contact friction of start-stop moment has remarkable influence to the life-span of air-bearing.The kinetic pressure air-float bearing of inner of single-material can not satisfy present demand, and the process for modifying surface of bearing materials is to limit one of its key technologies for application.Mainly concentrate on the design of structure, body material and appurtenances at present for the research of air-bearing; For example; The Tang Xiuqing of Guangzhou Han's high-precision Motor Co discloses a kind of patent (CN200993163) of following air bearing of air supporting electricity main shaft; Be provided with grommet type seals more than the middle part of axis body periphery, and the middle part is provided with cooling water circulation groove to have down grommet type seals in the axis body between last grommet type seals and the following grommet type seals.It can keep main shaft under lower temperature, to work, and keeps operating accuracy, and security is good.People such as the Yang Jinfu of Institute of Engineering Thernophysics, Academia Sinica disclose a kind of patent of kinetic pressure air-float bearing of inner (101413540) of flow passage self-lubricating structure; Offer supercharging flow path groove structure at the bearing body internal surface, adopt the structure design of rubber ring, metal-rubber and elastic composite vibration reducing measure.The bearing of this invention can improve air-bearing bearing stability and safety, has further widened the scope of air-bearing application etc.Can know through above research contents, the research of air-bearing is also mainly concentrated on the structure design that to the air-bearing surface-treated, the coating technology that improves performance such as wear-resisting, high temperature resistant also is not applied to air-bearing.
Vacuum plating is a kind of film coating method efficiently that guarantees surfaceness and precision, is widely applied in the industry at present.The vacuum plating coating since with the body material different in kind; Their thermal expansivity differs more than the one magnitude; There are very big-difference in Young's modulus and hardness, and can there be very big internal stress in coating after being coated with, as effectively not adjusting and control the inefficacy that possibly cause device.Corresponding; Need prolonged preservation behind some equipment; For guaranteeing that effective request for utilization possesses very high safety; Prevent the accident of component failure at crisis, force us to have to the safety of coating is carried out deep research, prepare high reliability, rub resistance wearing and tearing coating according to result of study.Mid-tier system through one or more layers acts on the flexibility of improving them between hard coating material and the body material, alleviates the difference of performances such as chemical bond, thermal expansivity, the dominant ideas of Here it is multilayer film.Compare with unitary film, multilayer film all demonstrates superior performance at aspects such as surface stress, crackle intensity, surface toughness and unrelieved stresss.Multilayer film can buffer thin film and matrix between not the matching of physicals; Improve film-substrate cohesion, prevent the growth of column crystal and coarse grain in the unitary film; Crystal grain thinning; The interface of improving between the plastic deformation ability multilayer film has inhibition to dislocation glide, has increased the intensity of rete, prevents formation and the expansion and the impact resistance etc. of crackle.
The variety of DLC film (DLC) structure and composition makes the wide range of its mechanical property, and its Young's modulus has from tens to hundreds of GPa.The content that increases hydrogen can reduce hardness and Young's modulus simultaneously.In other words, the ratio that increases sp3 can improve the consistency and elasticity modulus, and most of DLC films are all high than metal material hardness, and is particularly high than steel.The content of sp3 key, sp2 key is unusual important parameters in the DLC film.The character of film receives the influence of these two kinds of linkage contents bigger.According to the two phase structure model theory, the sp3 key in the DLC film affects the mechanical property of DLC film, and the sp2 key control the electricity and the optical property of DLC film.The content of sp3 key is many more, and the performance of film approaches diamond more.Deposition method and technology is to the structure important influence of film, thereby influences the performance of film.
The DLC film has high internal stress, stress normally, stress value-0.5～-12.5GPa.The existence of high internal stress has limited the thickness and the sticking power of DLC film.The DLC film produces the stress that the physical properties of higher internal stress and film base does not match and causes in process of growth, make the poor adhesive force of DLC film and matrix (particularly metallic substance), has limited the application of DLC film; The poor heat stability of DLC film is easy to take place greying when temperature is higher than 250 ℃, limited its use range.Wherein the problem of film base adhesion property is the urgency key issue to be solved that DLC film practicability is faced, and film base adhesion property depends primarily on the internal stress of the sticking power and the film of film base.When internal stress was excessive, the influence that excessive internal stress is brought can't be born in film base interface, tended to cause film to break away from matrix.
In order to address this problem, carried out many explorations abroad, the sticking power that focuses on increasing the film base of some researchs, some research then focuses on the internal stress that reduces film.Doping method is the simplest and effectively reduce the method for film internal stress, discovers, and an amount of a certain amount of boron, silicon, nitrogen or the metallic element of mixing in preparation DLC film process, the internal stress of rete can be along with the amount of the mixing atom decline that is directly proportional.The preparation DLC film reduces the research and the imperfection of internal stress mechanism owing to mix; Different alloying elements to the Different Effects of Properties of Diamond like Carbon study system not, and the internal stress that the preparation DLC film that mixes reduces obtains through sacrificing a part of hardness.Therefore, how to make under the Properties of Diamond like Carbon condition with higher that obtains, the internal stress that reduces it is a main research work.It is less that but domestic this respect research is carried out, and more lacks the research of practicability aspect.
Advantages such as the AlTiN film is the new development of ganoine thin film research behind the TiN film, and this film has the hardness height, high temperature oxidation resistance is strong, internal stress is low and high-temperature stability is good are at present in widespread use and the high speed and dry cutting tool top coat.Because the introducing of Al element makes the AlTiN film possess the characteristic of the many TiN of being superior to films, like: the raising of film hardness, high temperature oxidation resistance, erosion resistance, good cutting property etc.It is that the Ti atom that the Al atom has replaced in the part TiN lattice causes lattice distortion to cause because the grain-size of AlTiN film is more tiny that the microhardness of AlTiN film is significantly improved.Under high-temperature condition, interact at film surface formation sull owing to be solid-solubilized in atom and the Sauerstoffatom of Al in the TiN lattice, film is protected, improve the high-temperature stability of film, so the hot hardness of AlTiN film will be apparently higher than the TiN film.Its use temperature is up to more than 800 ℃, and rete any peeling off can not taken place yet, and the resistance to high temperature oxidation temperature of TiN coating reaches about 600 ℃ only.The AlTiN film is because the adding of Al atom can reduce unrelieved stress filmily effectively; Because it is less with the wimet expansion coefficient difference; So on the AlTiN surface that carbide surface is coated with; Can obtain very low internal stress through process optimization, discharge the probability that causes the film Cracking Failure, improve the safety of film thereby reduce membrane stress.
In sum; The kinetic pressure air-float bearing of inner of single-material can not satisfy present demand; The coating research that is used for the process for modifying surface of bearing materials seems particularly important; And single-layer coating is because thereby a certain performance defect limits its popularization in industry, thereby the multi-layer composite coatings of research with excellent comprehensive performance seems and become more and more important.
Summary of the invention
The friction problem that the present invention mainly adopts Ti/AlTiN/Ti:DLC high firmness, high abrasion composite package to solve between kinetic pressure air-float bearing of inner rotor and the stator reaches in the high speed rotating process, and stator and rotor possibly bump even occur instant melting locking fault.
Realize that preparation method of the present invention is following:
Adopt intermediate frequency reaction magnetocontrol sputtering system deposition compound coating, target is that the atom mass rate of Ti and the Al/Ti of purity 99.9% is 67: 33 an AlTi alloy target material, nitrogen, purity of argon＞99.9%, and the steel cylinder internal gas pressure is greater than 10MPa; The Vakuumkammer background pressure is less than 3 * 10
-4Pa, cooling water outlet temperature are lower than 25 ℃, and return water temperature is lower than 40 ℃, and work rest revolution rotating speed is adjustable continuously in 0-20 rev/min of scope, and step is following:
1) plating workpiece cleaning and workpiece are installed
With washing composition, deionized water, acetone, absolute ethyl alcohol workpiece to be plated is carried out ultrasonic cleaning and processed respectively, each scavenging period is 10-20min, and power density 40-60W/ spare is reprinted on the movements and postures of actors to be plated after the drying; Open mechanical pump, molecular pump is evacuated down to pressure and is lower than 3 * 10
-4Behind the Pa, input argon gas 20-30sccm in Vakuumkammer, making the pressure in the Vakuumkammer is 1Pa; Open bias voltage, radio-frequency power supply, regulate adaptation, photoglow takes place in the Vakuumkammer; Increase incident power;, workpiece surface is carried out plasma etching clean time length 5-15 minute greater than 500V up to bias value;
2) the titanium metal adhesive linkage is coated with
Reduce argon gas feed-in amount, make gas pressure in vacuum be reduced to 4 * 10
-1Pa opens the work rest turn switch, and work rest is rotated, and slewing rate is 10rpm; Start Work-piece heating arrangement, workpiece is heated to 300 ℃, open the workpiece bias power supply, the workpiece rf bias is increased to 200-600V; Open titanium target radio-frequency power supply, apply the small power radiofrequency signal, regulate adaptation, make the magnetic control sputtering cathode build-up of luminance to sputter cathode; Strengthen incident power gradually to 200-400W, be coated with the titanium metal adhesive linkage 5-10 minute, its thickness is at 100-200nm;
3) be coated with the AlTiN supporting layer
Close titanium target driving power, open aluminium titanium target intermediate frequency driving power, electric current is 1.0A, and dutycycle is 60%, is coated with the AlTiN supporting layer 30-60 minute;
4) be coated with the adulterated friction resistant wearing and tearing of metal titanium DLC layer
Close aluminium titanium target driving power and nitrogen gas mass flowmeter; Close Work-piece heating arrangement, when workpiece temperature dropped to below 200 ℃, feed-in acetylene gas in Vakuumkammer to 10-20sccm, was opened titanium target radio-frequency power supply, strengthens incident power gradually to 100-200W, was coated with the adulterated friction resistant wearing and tearing of metal titanium DLC layer;
Close radio-frequency power supply, treat that the Vakuumkammer temperature is reduced to below 100 ℃, open Vakuumkammer, take out workpiece.
The crystalline structure of coating adopts D/Max-RB to change the analysis of target X-ray diffractometer, and the hardness of coating, surface topography adopt Triboindenter nanometer mechanics test macro to measure through AFM (AFM).Polishing machine adopts the dish of cutting of UMT friction and wear test system to test.
Description of drawings
Fig. 1 (a) is the cross section pattern of embodiment 1
Fig. 1 (b) is the cross section pattern of embodiment 2
Fig. 1 (c) is the cross section pattern of embodiment 3
Fig. 2 (a) is the surface topography of embodiment 1
Fig. 2 (b) is the surface topography of embodiment 2
Fig. 2 (c) is the surface topography of embodiment 3
Table 1 is hardness, the Young's modulus of embodiment
Fig. 3 is the variation of embodiment frictional coefficient
Fig. 4 is embodiment film and high base strength
Hardness, the Young's modulus of table 1 embodiment sample
| Hardness/GPa | Young's modulus/GPa | |
| Embodiment 1 | 28.9±1.2 | 233.8±7.1 |
| Embodiment 2 | 30.1±0.9 | 241.2±8.0 |
| Embodiment 3 | 27.6±1.5 | 229.1±9.2 |
Embodiment
Embodiment 1
Adopt intermediate frequency reaction magnetocontrol sputtering system depositing Ti/AlTiN/Ti:DLC high firmness, high abrasion composite package; Target is the Ti and the AlTi alloy target material (Al: Ti=67: 33 (atm%)) of purity 99.9%; Nitrogen, purity of argon＞99.9%, the steel cylinder internal gas pressure is greater than 10MPa; The Vakuumkammer background pressure is less than 3 * 10
-4Pa, cooling water outlet temperature are lower than 25 ℃, and return water temperature is lower than 40 ℃, and work rest revolution rotating speed is adjustable continuously in 0-20 rev/min of scope.Workpiece cleaning to be plated and workpiece are installed: with washing composition, deionized water, acetone, absolute ethyl alcohol workpiece to be plated is carried out ultrasonic cleaning and processed respectively, each scavenging period is 10-20min, power density 40W/ spare.Reprint on the movements and postures of actors to be plated after the drying.Open mechanical pump, molecular pump is evacuated down to pressure and is lower than 3 * 10
-4Behind the Pa, input argon gas 20sccm in Vakuumkammer, making the pressure in the Vakuumkammer is 1Pa.Open bias voltage, radio-frequency power supply, regulate adaptation, photoglow takes place in the Vakuumkammer, increase incident power, greater than 500V, workpiece surface is carried out plasma etching clean 5 minutes time length up to bias value.The titanium metal adhesive linkage is coated with: reduce argon gas feed-in amount, make gas pressure in vacuum be reduced to 4 * 10
-1Pa opens the work rest turn switch, and work rest is rotated, and slewing rate is 10rpm; Start Work-piece heating arrangement, workpiece is heated to 300 ℃, open the workpiece bias power supply, the workpiece rf bias is increased to 350V; Open the titanium target power supply, apply the small power radiofrequency signal, regulate adaptation, make the magnetic control sputtering cathode build-up of luminance to sputter cathode; Strengthen incident power gradually to 200W, be coated with the titanium metal adhesive linkage 5-10 minute, its thickness is at 100-200nm.Close the titanium target power supply, open aluminium titanium target intermediate frequency driving power, electric current is 1.0A, and dutycycle is 60%, is coated with the AlTiN supporting layer 30-60 minute.Close aluminium titanium target driving power and nitrogen gas mass flowmeter.Close Work-piece heating arrangement, when workpiece temperature dropped to below 200 ℃, feed-in acetylene gas in Vakuumkammer to 10sccm, was opened the titanium target power supply, strengthens incident power gradually to 100W, was coated with the adulterated friction resistant wearing and tearing of metal titanium DLC layer.Close radio-frequency power supply, treat that the Vakuumkammer temperature is reduced to below 100 ℃, open Vakuumkammer, take out workpiece, coating process finishes.
Fig. 1 (a) is the fracture apperance of embodiment 1 film-coating workpiece, in order to the information such as thickness, weave construction and surfaceness of analysed film.That can find out metal sticking layer Ti and workpiece substrate combines fine and closely, does not have defectives such as cavity between the interface.Combine between Ti, AlTiN and the DLC layer successively all very closely, and the DLC film evenly, densification and surfaceness be all very little.The thickness of metal sticking layer is 100nm, and the thickness of AlTiN supporting layer is 1um, and the thickness of Ti:DLC lubricant film is 2.3um.The AlTiN layer presents tangible columnar structure, and its columnar structure equivalent diameter is between 20～50nm.
Fig. 2 (a) provides the surface topography of embodiment 1, can find out the film surface even compact by figure, does not have obvious defects.Table 1 provides hardness, the Young's modulus of embodiment sample, can know that by table hardness, the modulus of embodiment 1 are respectively 28.9,233.8GPa.Provide the variation of the The friction coefficient fraction time of embodiment like Fig. 3, in the film friction process, frictional coefficient is by high step-down, and after friction proceeded to for some time, frictional coefficient tended towards stability.The stable frictional coefficient of DLC film remains between 0.10～0.12 basically.According to the analysis of cut place stressed condition, can be by the higher film of critical load, it is better to judge its sticking power.Fig. 4 provides the film of embodiment 1 and the bonding strength of collective is about 41N.
Embodiment 2
Adopt intermediate frequency reaction magnetocontrol sputtering system depositing Ti/AlTiN/Ti:DLC high firmness, high abrasion composite package; Target is the Ti and the AlTi alloy target material (Al: Ti=67: 33 (atm%)) of purity 99.9%; Nitrogen, purity of argon＞99.9%, the steel cylinder internal gas pressure is greater than 10MPa; The Vakuumkammer background pressure is less than 3 * 10
-4Pa, cooling water outlet temperature are lower than 25 ℃, and return water temperature is lower than 40 ℃, and work rest revolution rotating speed is adjustable continuously in 0-20 rev/min of scope.Workpiece cleaning to be plated and workpiece are installed: with washing composition, deionized water, acetone, absolute ethyl alcohol workpiece to be plated is carried out ultrasonic cleaning and processed respectively, each scavenging period is 10-20min, power density 50W/ spare.Reprint on the movements and postures of actors to be plated after the drying.Open mechanical pump, molecular pump is evacuated down to pressure and is lower than 3 * 10
-4Behind the Pa, input argon gas 25sccm in Vakuumkammer, making the pressure in the Vakuumkammer is 1Pa.Open bias voltage, radio-frequency power supply, regulate adaptation, photoglow takes place in the Vakuumkammer, increase incident power, greater than 500V, workpiece surface is carried out plasma etching clean time length 5-15 minute up to bias value.The titanium metal adhesive linkage is coated with: reduce argon gas feed-in amount, make gas pressure in vacuum be reduced to 4 * 10
-1Pa opens the work rest turn switch, and work rest is rotated, and slewing rate is 10rpm; Start Work-piece heating arrangement, workpiece is heated to 300 ℃, open the workpiece bias power supply, the workpiece rf bias is increased to 450V; Open titanium target radio-frequency power supply, apply the small power radiofrequency signal, regulate adaptation, make the magnetic control sputtering cathode build-up of luminance to sputter cathode; Strengthen incident power gradually to 300W, be coated with the titanium metal adhesive linkage 5-10 minute, its thickness is at 100-200nm.Close titanium target driving power, open aluminium titanium target intermediate frequency driving power, electric current is 1.0A, and dutycycle is 60%, is coated with the AlTiN supporting layer 30-60 minute.Close aluminium titanium target driving power and nitrogen gas mass flowmeter.Close Work-piece heating arrangement, when workpiece temperature dropped to below 200 ℃, feed-in acetylene gas in Vakuumkammer to 10-20sccm, was opened titanium target radio-frequency power supply, strengthens incident power gradually to 150W, was coated with the adulterated friction resistant wearing and tearing of metal titanium DLC layer.Close radio-frequency power supply, treat that the Vakuumkammer temperature is reduced to below 100 ℃, open Vakuumkammer, take out workpiece, coating process finishes.
Fig. 1 (b) is the fracture apperance of embodiment 1 film-coating workpiece, in order to the information such as thickness, weave construction and surfaceness of analysed film.That can find out metal sticking layer Ti and workpiece substrate combines fine and closely, does not have defectives such as cavity between the interface.Combine between Ti, AlTiN and the DLC layer successively all very closely, and the DLC film evenly, densification and surfaceness be all very little.The thickness of metal sticking layer is 200nm, and the thickness of AlTiN supporting layer is 1um, and the thickness of Ti:DLC lubricant film is 2.1um.The AlTiN layer presents tangible columnar structure, and its columnar structure equivalent diameter is between 20～50nm.
Fig. 2 (b) provides the surface topography of embodiment 2, can find out the film surface even compact by figure, does not have obvious defects.Table 2 provides hardness, the Young's modulus of embodiment sample, can know that by table hardness, the modulus of embodiment 2 are respectively 30.1,241.2GPa.Provide the variation of the The friction coefficient fraction time of embodiment like Fig. 3, in the film friction process, frictional coefficient is by high step-down, and after friction proceeded to for some time, frictional coefficient tended towards stability.The stable frictional coefficient of DLC film remains between 0.10～0.12 basically.According to the analysis of cut place stressed condition, can be by the higher film of critical load, it is better to judge its sticking power.Fig. 4 provides the film of embodiment 2 and the bonding strength of collective is about 38N.
Embodiment 3
Adopt intermediate frequency reaction magnetocontrol sputtering system depositing Ti/AlTiN/Ti:DLC high firmness, high abrasion composite package; Target is the Ti and the AlTi alloy target material (Al: Ti=67: 33 (atm%)) of purity 99.9%; Nitrogen, purity of argon＞99.9%, the steel cylinder internal gas pressure is greater than 10MPa; The Vakuumkammer background pressure is less than 3 * 10
-4Pa, cooling water outlet temperature are lower than 25 ℃, and return water temperature is lower than 40 ℃, and work rest revolution rotating speed is adjustable continuously in 0-20 rev/min of scope.Workpiece cleaning to be plated and workpiece are installed: with washing composition, deionized water, acetone, absolute ethyl alcohol workpiece to be plated is carried out ultrasonic cleaning and processed respectively, each scavenging period is 10-20min, power density 40-60W/ spare.Reprint on the movements and postures of actors to be plated after the drying.Open mechanical pump, molecular pump is evacuated down to pressure and is lower than 3 * 10
-4Behind the Pa, input argon gas 30sccm in Vakuumkammer, making the pressure in the Vakuumkammer is 1Pa.Open bias voltage, radio-frequency power supply, regulate adaptation, photoglow takes place in the Vakuumkammer, increase incident power, greater than 500V, workpiece surface is carried out plasma etching clean time length 5-15 minute up to bias value.The titanium metal adhesive linkage is coated with: reduce argon gas feed-in amount, make gas pressure in vacuum be reduced to 4 * 10
-1Pa opens the work rest turn switch, and work rest is rotated, and slewing rate is 10rpm; Start Work-piece heating arrangement, workpiece is heated to 300 ℃, open the workpiece bias power supply, the workpiece rf bias is increased to 600V; Open titanium target radio-frequency power supply, apply the small power radiofrequency signal, regulate adaptation, make the magnetic control sputtering cathode build-up of luminance to sputter cathode; Strengthen incident power gradually to 400W, be coated with the titanium metal adhesive linkage 5-10 minute, its thickness is at 100-200nm.Close titanium target driving power, open aluminium titanium target intermediate frequency driving power, electric current is 1.0A, and dutycycle is 60%, is coated with the AlTiN supporting layer 30-60 minute.Close aluminium titanium target driving power and nitrogen gas mass flowmeter.Close Work-piece heating arrangement, when workpiece temperature dropped to below 200 ℃, feed-in acetylene gas in Vakuumkammer to 20sccm, was opened titanium target radio-frequency power supply, strengthens incident power gradually to 200W, was coated with the adulterated friction resistant wearing and tearing of metal titanium DLC layer.Close radio-frequency power supply, treat that the Vakuumkammer temperature is reduced to below 100 ℃, open Vakuumkammer, take out workpiece, coating process finishes.
Fig. 1 (c) is the fracture apperance of embodiment 1 film-coating workpiece, in order to the information such as thickness, weave construction and surfaceness of analysed film.That can find out metal sticking layer Ti and workpiece substrate combines fine and closely, does not have defectives such as cavity between the interface.Combine between Ti, AlTiN and the DLC layer successively all very closely, and the DLC film evenly, densification and surfaceness be all very little.The thickness of metal sticking layer is 150nm, and the thickness of AlTiN supporting layer is 4.2um, and the thickness of Ti:DLC lubricant film is 1.8um.The AlTiN layer presents tangible columnar structure, and its columnar structure equivalent diameter is between 20～50nm.
Fig. 2 (c) provides the surface topography of embodiment 3, can find out the film surface even compact by figure, does not have obvious defects.Table 1 provides hardness, the Young's modulus of embodiment sample, can know that by table hardness, the modulus of embodiment 3 are respectively 27.6,229.1GPa.Provide the variation of the The friction coefficient fraction time of embodiment like Fig. 3, in the film friction process, frictional coefficient is by high step-down, and after friction proceeded to for some time, frictional coefficient tended towards stability.The stable frictional coefficient of DLC film remains between 0.10～0.12 basically.According to the analysis of cut place stressed condition, can be by the higher film of critical load, it is better to judge its sticking power.Fig. 4 provides the film of embodiment 3 and the bonding strength of collective is about 36N.
We can see by above embodiment, and intermediate frequency reaction magnetocontrol sputtering system depositing Ti/AlTiN/Ti:DLC high firmness, high abrasion composite package have high firmness, modulus, high bond strength, and advantages such as low-friction coefficient, its technology is simple, and cost is low.
Claims (1)
1. preparation method of composite coating that is used for kinetic pressure air-float bearing of inner; It is characterized in that; Adopt intermediate frequency reaction magnetocontrol sputtering system deposition compound coating; Target is that the atom mass rate of Ti and the Al/Ti of purity 99.9% is 67: 33 an AlTi alloy target material, nitrogen, purity of argon＞99.9%, and the steel cylinder internal gas pressure is greater than 10MPa; The Vakuumkammer background pressure is less than 3 * 10
-4Pa, cooling water outlet temperature are lower than 25 ℃, and return water temperature is lower than 40 ℃, and work rest revolution rotating speed is adjustable continuously in 0-20 rev/min of scope, and step is following:
1) plating workpiece cleaning and workpiece are installed
With washing composition, deionized water, acetone, absolute ethyl alcohol workpiece to be plated is carried out ultrasonic cleaning and processed respectively, each scavenging period is 10-20min, and power density 40-60W/ spare is reprinted on the movements and postures of actors to be plated after the drying; Open mechanical pump, molecular pump is evacuated down to pressure and is lower than 3 * 10
-4Behind the Pa, input argon gas 20-30sccm in Vakuumkammer, making the pressure in the Vakuumkammer is 1Pa; Open bias voltage, radio-frequency power supply, regulate adaptation, photoglow takes place in the Vakuumkammer; Increase incident power;, workpiece surface is carried out plasma etching clean time length 5-15 minute greater than 500V up to bias value;
2) the titanium metal adhesive linkage is coated with
Reduce the argon gas influx, make gas pressure in vacuum be reduced to 4 * 10
-1Pa opens the work rest turn switch, and work rest is rotated, and slewing rate is 10rpm; Start Work-piece heating arrangement, workpiece is heated to 300 ℃, open the workpiece bias power supply, the workpiece rf bias is increased to 200-600V; Open titanium target radio-frequency power supply, apply the small power radiofrequency signal, regulate adaptation, make the magnetic control sputtering cathode build-up of luminance to sputter cathode; Strengthen incident power gradually to 200-400W, be coated with the titanium metal adhesive linkage 5-10 minute, its thickness is at 100-200nm;
3) be coated with the AlTiN supporting layer
Close titanium target driving power, open aluminium titanium target intermediate frequency driving power, electric current is 1.0A, and dutycycle is 60%, is coated with the AlTiN supporting layer 30-60 minute;
4) be coated with the adulterated friction resistant wearing and tearing of metal titanium DLC layer
Close aluminium titanium target driving power and nitrogen gas mass flowmeter; Close Work-piece heating arrangement, when workpiece temperature drops to below 200 ℃, in Vakuumkammer, feed acetylene gas,, open titanium target radio-frequency power supply, strengthen incident power gradually, be coated with the adulterated friction resistant wearing and tearing of metal titanium DLC layer to 100-200W to 10-20sccm;
Close radio-frequency power supply, treat that the Vakuumkammer temperature is reduced to below 100 ℃, open Vakuumkammer, take out workpiece.
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| CN109538631B (en) * | 2018-11-29 | 2023-09-05 | 上海千歌环保科技有限公司 | Anti-lock pneumatic bearing |
| CN113463046A (en) * | 2021-07-05 | 2021-10-01 | 大连德泰控股有限公司 | Coating material for enhancing wear resistance of water pump impeller and coating method |
| CN115233158B (en) * | 2022-06-23 | 2023-12-26 | 安徽工业大学 | Composite coating for surface layer of valve rod of internal combustion engine and preparation method thereof |
| CN118407020A (en) * | 2024-07-02 | 2024-07-30 | 成都中云世纪科技有限责任公司 | Preparation method of wear-resistant self-lubricating coating for inner hole of undercarriage of aircraft |
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