CN101780654A - Tool setting device used for wafer grinding machine - Google Patents
Tool setting device used for wafer grinding machine Download PDFInfo
- Publication number
- CN101780654A CN101780654A CN 201010121135 CN201010121135A CN101780654A CN 101780654 A CN101780654 A CN 101780654A CN 201010121135 CN201010121135 CN 201010121135 CN 201010121135 A CN201010121135 A CN 201010121135A CN 101780654 A CN101780654 A CN 101780654A
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- Prior art keywords
- guide rod
- spring
- turning cylinder
- tool setting
- setting device
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Abstract
The invention relates to a tool setting device used for a wafer grinding machine, which can improve the precision of tool setting and the generality of a tool setting device, and comprises a sensor and a sensor base, wherein the sensor base is connected with a link block by a side arm; the link block is connected with a rotating shaft; the rotating shaft is connected with a lower driving mechanism; and the driving mechanism is connected with a support. The tool setting device is characterized in that the sensor base is sleeved in the mounting hole of the side arm; the sensor base is axially oriented on the side arm by evenly distributed guide bar shafts with springs; the link block is supported on an adjustable axial adjusting mechanism in the axial direction of the rotating shaft; and the axial adjusting mechanism is connected with the rotating shaft.
Description
(1) technical field
The present invention relates to the apparatus field of wafer grinding machine, be specially a kind of tool setting device that is used for wafer grinding machine.
(2) background technology
The tool setting device of existing wafer grinding machine, it makes by the feeding emery wheel behind the emery wheel feeler seat, with whole fork toward pressing down, sensor contact contacts with the bottom vacuum cup then, in entire work process, fork has a flexural deformation, causes sensor that the micro-strain of a vertical direction to incline direction is arranged, and has reduced the accuracy of tool setting.Simultaneously, existing tool setting device can't carry out the adjustment of upper-lower position to sensor, makes that the versatility of tool setting device is low.
(3) summary of the invention
At the problems referred to above, the invention provides a kind of tool setting device that is used for wafer grinding machine, it can improve the precision of tool setting, the versatility of raising tool setting device.
Its technical scheme is such: it comprises sensor, sensor holder, described sensor holder connects contiguous block by side arm, described contiguous block connects turning cylinder, described turning cylinder connects the driving mechanism of bottom, described driving mechanism is connected in support, it is characterized in that: described sensor holder is set in the installing hole of described side arm, the guide rod shaft of described sensor holder by uniform band spring is to being oriented to described side arm, described contiguous block be supported on turning cylinder axially on adjustable axial adjustment structure, described axial regulating mechanism connects described turning cylinder;
It is further characterized in that: described sensor holder has the guide rod mounting flange, described guide rod mounting flange is evenly equipped with the guide rod locating hole, described side arm upper surface has and described guide rod locating hole corresponding spring locating hole, the guide rod of described band spring specifically comprises guide rod, spring, the straight bar part of described guide rod runs through the guide rod locating hole of described sensor, and the top of described guide rod is anchored on described guide rod mounting flange upper surface by nut;
The straight-bar outer end of described guide rod is set with described spring, and described spring lower surface is lower than the lower surface of described guide rod, and the upper end of described spring is mounted on described guide rod mounting flange lower surface, and the lower end of described spring is mounted on the bosom of described location hole of the spring;
Described location hole of the spring is a through hole, and the lower surface of described side arm is fastenedly connected with support chip by screw, and described support chip is around described sensor, and the lower end of described spring is mounted on the upper surface of described support chip;
Described side arm and described contiguous block are solidly connected with locking by screw;
Described axial regulating mechanism specifically comprises two nuts, cushion block, described contiguous block have an open type looping pit with coupling part described turning cylinder, the screwed end of thread is arranged at the top of described turning cylinder, described two nut sleeve are loaded on the described end of thread, described turning cylinder runs through the installing hole of described cushion block, described cushion block is supported on the upper surface of the upper nut in described two nuts, described turning cylinder runs through the described open type looping pit of described contiguous block, and screw is fastenedly connected the both sides of the opening of described open type looping pit;
Described driving mechanism specifically comprises double-acting cylinder, connection strap, connecting plate, lining, bearing block, bucker, described connection strap is fastenedly connected a side of the upper end of described support, described double-acting cylinder is fastenedly connected by T shape seat and described connection strap, the piston head of described double-acting cylinder connects described connecting plate, described connecting plate connects described turning cylinder by knuckle joint, described bearing block support is in the upper surface of described support, the outer cover of described bearing block is equipped with described bucker, described bearing block inside is equipped with described lining, and described turning cylinder runs through the described lining of described bearing block inside.
After adopting said structure of the present invention, because described sensor holder is set in the installing hole of described side arm, the guide rod shaft of described sensor holder by uniform band spring is to being oriented to described side arm, side arm rotates, behind emery wheel feeler seat, sensor holder acts on the guide rod of uniform band spring, after the spring compression, guide rod play the guiding role, and drives the whole sensor seat and presses down, make the contact of sensor contact with the bottom vacuum cup, finish tool setting, in the whole process, when it presses down, side arm can not produce the micro-strain of vertical direction to incline direction, so improved the accuracy of tool setting; Since described contiguous block be supported on turning cylinder axially on adjustable axial adjustment structure, described axial regulating mechanism connects described turning cylinder, the axial adjustment of described axial adjustment structure on described turning cylinder, cause described contiguous block adjustable up and down, and then the drive side arm is adjustable up and down, and then sensor can carry out the upper-lower position adjustment, so the versatility of tool setting device is improved; It has guaranteed the dynamics and the rigidity that drive the driving mechanism of double-acting cylinder, has further guaranteed the precision of tool setting.
(4) description of drawings
Fig. 1 is a front view structural representation of the present invention;
Fig. 2 is the vertical view structural representation (removal tank) of Fig. 1;
Fig. 3 is the left view structural representation (removal tank) of Fig. 1;
Fig. 4 is the structural representation (part) of the A of Fig. 1 to view;
Fig. 5 is the B place partial enlarged drawing of Fig. 3;
Fig. 6 is the structural representation (part) of the C of Fig. 3 to view.
(5) specific embodiment
See Fig. 1, Fig. 2, Fig. 3, Fig. 4, Fig. 5, Fig. 6, sensor 1 is loaded in the sensor holder 2, sensor holder 2 connects contiguous block 4 by side arm 3, contiguous block 4 connects turning cylinder 5, turning cylinder 5 connects the driving mechanism of bottom, driving mechanism is installed on support 6, sensor holder 2 is set in the installing hole 7 of side arm 3, guide rod 9 axial orientation of sensor holder 2 by uniform band spring 8 are in side arm 3, contiguous block 4 be supported on turning cylinder 5 axially on adjustable axial adjustment structure, axial regulating mechanism connects turning cylinder 5;
Location hole of the spring 12 is a through hole, and the lower surface of side arm 3 is fastenedly connected with support chip 14 by screw 13, and support chip 14 is around sensor 1, and the lower end of spring 8 is mounted on the upper surface of support chip 14;
Axial regulating mechanism specifically comprises two nuts 15, cushion block 16, the coupling part with turning cylinder 5 of contiguous block 4 has an open type looping pit 17, the screwed end of thread is arranged at the top of turning cylinder 5, two nuts 15 are set in the end of thread, turning cylinder 5 runs through the installing hole of cushion block 16, cushion block 16 is supported on the upper surface of two upper nut in the nut 15, and turning cylinder 5 runs through the open type looping pit 17 of contiguous block 4, and screw 18 is fastenedly connected the both sides of the opening of open type looping pit 17; Driving mechanism specifically comprises double-acting cylinder 19, connection strap 20, connecting plate 21, lining 22, bearing block 23, bucker 24, connection strap 20 is fastenedly connected a side of the upper end of support 6, double-acting cylinder 19 is fastenedly connected by T shape seat 25 and connection strap 20, the piston head of double-acting cylinder 19 connects connecting plate 21, connecting plate 21 connects turning cylinder 5 by knuckle joint 26, bearing block 23 is supported on the upper surface of support 6, the outer cover of bearing block 23 is equipped with bucker 24, bearing block 23 inside are equipped with lining 22, and turning cylinder 5 runs through the lining 22 of bearing block 23 inside; 27 is tank among Fig. 1.
Its operation principle is as follows: double-acting cylinder 19 effects, drive connecting plate 21 motions, and then drive turning cylinder 5 rotates, turning cylinder 5 is passed to contiguous block 4 with rotation, contiguous block 4 is passed to side arm 3 with amount of spin, realize the rotation of sensor holder 2, vacuum cup until sensor 1 aligned with lower, after this after the feeding emery wheel made its feeler seat 2, sensor holder 2 acted on the guide rod 9 of uniform band spring 8, after spring 8 compressions, guide rod 9 play the guiding role, drive whole sensor seat 8 and press down, make the contact of sensor 1 contact, finish tool setting with the bottom vacuum cup.
Simultaneously, when sensor 1 highly improper up and down, can adjust sensor 1 purpose of height up and down by adjusting the upper-lower position of two nuts 15, arriving at the end of thread of turning cylinder 5.
Claims (7)
1. tool setting device that is used for wafer grinding machine, it comprises sensor, sensor holder, described sensor holder connects contiguous block by side arm, described contiguous block connects turning cylinder, described turning cylinder connects the driving mechanism of bottom, described driving mechanism is connected in support, it is characterized in that: described sensor holder is set in the installing hole of described side arm, the guide rod shaft of described sensor holder by uniform band spring is to being oriented to described side arm, described contiguous block be supported on turning cylinder axially on adjustable axial adjustment structure, described axial regulating mechanism connects described turning cylinder.
2. a kind of tool setting device that is used for wafer grinding machine according to claim 1, it is characterized in that: described sensor holder has the guide rod mounting flange, described guide rod mounting flange is evenly equipped with the guide rod locating hole, described side arm upper surface has and described guide rod locating hole corresponding spring locating hole, the guide rod of described band spring specifically comprises guide rod, spring, the straight bar part of described guide rod runs through the guide rod locating hole of described sensor, and the top of described guide rod is anchored on described guide rod mounting flange upper surface by nut.
3. a kind of tool setting device that is used for wafer grinding machine according to claim 2, it is characterized in that: the straight-bar outer end of described guide rod is set with described spring, described spring lower surface is lower than the lower surface of described guide rod, the upper end of described spring is mounted on described guide rod mounting flange lower surface, and the lower end of described spring is mounted on the bosom of described location hole of the spring.
4. a kind of tool setting device that is used for wafer grinding machine according to claim 3, it is characterized in that: described location hole of the spring is a through hole, the lower surface of described side arm is fastenedly connected with support chip by screw, described support chip is around described sensor, and the lower end of described spring is mounted on the upper surface of described support chip.
5. a kind of tool setting device that is used for wafer grinding machine according to claim 4 is characterized in that: described side arm and described contiguous block are solidly connected with locking by screw.
6. a kind of tool setting device that is used for wafer grinding machine according to claim 5, it is characterized in that: described axial regulating mechanism specifically comprises two nuts, cushion block, described contiguous block have an open type looping pit with coupling part described turning cylinder, the screwed end of thread is arranged at the top of described turning cylinder, described two nut sleeve are loaded on the described end of thread, described turning cylinder runs through the installing hole of described cushion block, described cushion block is supported on the upper surface of the upper nut in described two nuts, described turning cylinder runs through the described open type looping pit of described contiguous block, and screw is fastenedly connected the both sides of the opening of described open type looping pit.
7. a kind of tool setting device that is used for wafer grinding machine according to claim 6, it is characterized in that: described driving mechanism specifically comprises double-acting cylinder, connection strap, connecting plate, lining, bearing block, bucker, described connection strap is fastenedly connected a side of the upper end of described support, described double-acting cylinder is fastenedly connected by T shape seat and described connection strap, the piston head of described double-acting cylinder connects described connecting plate, described connecting plate connects described turning cylinder by knuckle joint, described bearing block support is in the upper surface of described support, the outer cover of described bearing block is equipped with described bucker, described bearing block inside is equipped with described lining, and described turning cylinder runs through the described lining of described bearing block inside.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101211355A CN101780654B (en) | 2010-03-10 | 2010-03-10 | Tool setting device used for wafer grinding machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101211355A CN101780654B (en) | 2010-03-10 | 2010-03-10 | Tool setting device used for wafer grinding machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101780654A true CN101780654A (en) | 2010-07-21 |
| CN101780654B CN101780654B (en) | 2011-11-09 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010101211355A Expired - Fee Related CN101780654B (en) | 2010-03-10 | 2010-03-10 | Tool setting device used for wafer grinding machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101780654B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107953159A (en) * | 2017-12-15 | 2018-04-24 | 台州美日新能源有限公司 | A kind of machine for inactivating |
| CN110169588A (en) * | 2019-05-24 | 2019-08-27 | 云南昆船烟草设备有限公司 | A kind of tool setting device and presetting cutter method that filament cutter can be automatically controled |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10105360A1 (en) * | 2000-12-03 | 2002-06-13 | Iht Innovationsgesellschaft Fu | System to position a tool in relation to the workpiece surface, before working starts, registers the tool movements to give a programmed extrapolation to prepare the coordinates of the start position for the next stage |
| CN2923170Y (en) * | 2005-12-13 | 2007-07-18 | 陈志林 | Cutter-adjusting instrument of numerical control machine tool |
| CN200951522Y (en) * | 2006-10-09 | 2007-09-26 | 北京第二机床厂有限公司 | Micro precision repairing and maintaining tool setting device of abrasion wheel |
| CN201009118Y (en) * | 2007-03-23 | 2008-01-23 | 浙江日发数码精密机械股份有限公司 | Machine tool setting device |
| CN101633152A (en) * | 2009-07-29 | 2010-01-27 | 无锡机床股份有限公司 | Tool setter of sharpening grinding wheel of semiconductor wafer |
-
2010
- 2010-03-10 CN CN2010101211355A patent/CN101780654B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10105360A1 (en) * | 2000-12-03 | 2002-06-13 | Iht Innovationsgesellschaft Fu | System to position a tool in relation to the workpiece surface, before working starts, registers the tool movements to give a programmed extrapolation to prepare the coordinates of the start position for the next stage |
| CN2923170Y (en) * | 2005-12-13 | 2007-07-18 | 陈志林 | Cutter-adjusting instrument of numerical control machine tool |
| CN200951522Y (en) * | 2006-10-09 | 2007-09-26 | 北京第二机床厂有限公司 | Micro precision repairing and maintaining tool setting device of abrasion wheel |
| CN201009118Y (en) * | 2007-03-23 | 2008-01-23 | 浙江日发数码精密机械股份有限公司 | Machine tool setting device |
| CN101633152A (en) * | 2009-07-29 | 2010-01-27 | 无锡机床股份有限公司 | Tool setter of sharpening grinding wheel of semiconductor wafer |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107953159A (en) * | 2017-12-15 | 2018-04-24 | 台州美日新能源有限公司 | A kind of machine for inactivating |
| CN110169588A (en) * | 2019-05-24 | 2019-08-27 | 云南昆船烟草设备有限公司 | A kind of tool setting device and presetting cutter method that filament cutter can be automatically controled |
| CN110169588B (en) * | 2019-05-24 | 2022-01-25 | 云南昆船烟草设备有限公司 | Automatic-control tool setting device and method for filament cutter |
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| Publication number | Publication date |
|---|---|
| CN101780654B (en) | 2011-11-09 |
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Granted publication date: 20111109 Termination date: 20160310 |