CN101771393B - Manufacturing method of piezoelectric ceramic energy sinking vibrator - Google Patents
Manufacturing method of piezoelectric ceramic energy sinking vibrator Download PDFInfo
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- 239000000919 ceramic Substances 0.000 title claims abstract description 176
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 19
- 239000002131 composite material Substances 0.000 claims abstract description 38
- 239000011521 glass Substances 0.000 claims abstract description 11
- 238000000034 method Methods 0.000 claims abstract description 7
- 229910052573 porcelain Inorganic materials 0.000 claims description 6
- 238000011282 treatment Methods 0.000 claims description 5
- 230000007797 corrosion Effects 0.000 claims description 4
- 238000005260 corrosion Methods 0.000 claims description 4
- 230000010287 polarization Effects 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims description 4
- 239000003292 glue Substances 0.000 claims description 3
- 229910010293 ceramic material Inorganic materials 0.000 abstract description 13
- 238000005520 cutting process Methods 0.000 abstract description 5
- 238000000605 extraction Methods 0.000 abstract 2
- 238000010586 diagram Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- SXSVTGQIXJXKJR-UHFFFAOYSA-N [Mg].[Ti] Chemical compound [Mg].[Ti] SXSVTGQIXJXKJR-UHFFFAOYSA-N 0.000 description 1
- VNSWULZVUKFJHK-UHFFFAOYSA-N [Sr].[Bi] Chemical compound [Sr].[Bi] VNSWULZVUKFJHK-UHFFFAOYSA-N 0.000 description 1
- QAKMMQFWZJTWCW-UHFFFAOYSA-N bismuth titanium Chemical compound [Ti].[Bi] QAKMMQFWZJTWCW-UHFFFAOYSA-N 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
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Abstract
Description
技术领域 technical field
本发明涉及一种压电陶瓷频率器件的振子的制造方法,一种压电陶瓷能陷型振子的制造方法。The invention relates to a method for manufacturing a vibrator of a piezoelectric ceramic frequency device, and a method for manufacturing a piezoelectric ceramic energy trapping vibrator.
背景技术 Background technique
压电陶瓷频率器件作为频率选择和频率控制器件广泛应用于通讯、电视、计算机、工业自动化等领域。压电陶瓷频率器件的关键部件是压电陶瓷振子。通常,压电陶瓷能陷型振子的结构如图1所示,是在一块压电陶瓷板9的两面制作互相对称的两个金属电极2作为振动电极,振动电极由引出电极3引出。振动电极2也叫做点电极,点电极的面积很小,只占整块压电陶瓷板的极小部分,振子的中心的振动有效区域4(图中虚线内区域)比点电极2的面积稍大,约大20%左右,振动有效区域的面积不到整个片状振子的1/6。常用的压电陶瓷材料为含铅陶瓷,如何减少铅的用量,甚至不用铅,是当前压电陶瓷频率器件制造必须考虑的问题。目前已有不含铅的压电陶瓷,但无铅压电陶瓷的价格较高,用其制作压电陶瓷频率器件时成本较高。另外,压电陶瓷振子的引出电极也制作在同一块压电陶瓷板上,由于压电陶瓷材料与金属引出电极的结合力不很好,再加上高温、粘结等处理,常常产生松动脱落等缺陷。Piezoelectric ceramic frequency devices are widely used in communication, television, computer, industrial automation and other fields as frequency selection and frequency control devices. The key component of the piezoelectric ceramic frequency device is the piezoelectric ceramic vibrator. Usually, the structure of a piezoelectric ceramic sinkable vibrator is shown in Figure 1. Two
发明内容 Contents of the invention
本发明旨在提出一种使用少量压电陶瓷材料的压电陶瓷能陷型振子的制造方法。The present invention aims to propose a manufacturing method of a piezoelectric ceramic sinkable vibrator using a small amount of piezoelectric ceramic material.
这种压电陶瓷能陷型振子的制造方法的具体步骤如下:The specific steps of the manufacturing method of the piezoelectric ceramic energy trapping vibrator are as follows:
A、用压电陶瓷制作压电陶瓷棒,压电陶瓷棒的截面稍大于振子有效振动区的面积;A. Piezoelectric ceramic rods are made of piezoelectric ceramics, and the cross-section of the piezoelectric ceramic rods is slightly larger than the area of the effective vibration area of the vibrator;
B、用普通陶瓷制作一般陶瓷板,一般陶瓷板的宽度与压电陶瓷棒的长度相同,一般陶瓷板的厚度稍大于一块振子的宽度;对一般陶瓷板进行厚度和端面研磨,在一般陶瓷板的表面制作数条互相平行的凹槽,凹槽的截面形状与A步所制得的压电陶瓷棒的截面形状相一致,凹槽截面的大小比压电陶瓷棒的截面稍大,相邻的两条凹槽之间的中心距稍大于一块振子的长度;B. Use ordinary ceramics to make a general ceramic plate. The width of the general ceramic plate is the same as the length of the piezoelectric ceramic rod. The thickness of the general ceramic plate is slightly larger than the width of a vibrator; Make several parallel grooves on the surface of the groove, the cross-sectional shape of the groove is consistent with the cross-sectional shape of the piezoelectric ceramic rod prepared in step A, the size of the groove cross-section is slightly larger than that of the piezoelectric ceramic rod, adjacent The center distance between the two grooves is slightly larger than the length of a vibrator;
C、用玻璃釉在B步所制得的一般陶瓷板的每条凹槽中各粘入一条A步所得的压电陶瓷棒,再用玻璃釉将数块粘合了压电陶瓷棒的一般陶瓷板相粘合在一起,加压加热固化,成为复合瓷块;C. Use glass glaze to stick a piezoelectric ceramic rod obtained in step A into each groove of the general ceramic plate obtained in step B, and then use glass glaze to glue several general ceramic rods bonded to the piezoelectric ceramic rod. The ceramic plates are bonded together, pressurized and heated to solidify, and become a composite ceramic block;
D、将C步所得的复合瓷块沿与压电陶瓷棒的轴线相垂直的方向进行切割,将复合瓷块切割成比振子的厚度稍厚的复合瓷片,再对复合瓷片表面进行研磨加工;D. Cut the composite ceramic block obtained in step C along the direction perpendicular to the axis of the piezoelectric ceramic rod, cut the composite ceramic block into a composite ceramic piece slightly thicker than the vibrator, and then grind the surface of the composite ceramic piece processing;
E、对D步所得的复合瓷片进行溅射、极化、印刷、腐蚀处理,制成引出电极和点电极;E, carry out sputtering, polarization, printing, corrosion treatment to the composite tile gained in step D, make lead-out electrode and point electrode;
F、将E步所得的复合瓷片切割成单个能陷型压电振子。F. Cut the composite tile obtained in step E into a single energy trapping piezoelectric vibrator.
用这种压电陶瓷能陷型振子制造方法制成的振子,由于只在振子的中心的振动有效区域采用压电陶瓷材料,所用的压电陶瓷材料不到整个片状振子的1/6,因而可大大减少压电陶瓷的用量;并且,由于一般陶瓷与金属引出电极的结合力较好,能减少引出电极松动脱落的现象,提高压电陶瓷能陷型振子的正品率。The vibrator made by this piezoelectric ceramic energy-sinking vibrator manufacturing method uses piezoelectric ceramic material only in the effective vibration area of the center of the vibrator, and the piezoelectric ceramic material used is less than 1/6 of the entire chip vibrator. Therefore, the consumption of piezoelectric ceramics can be greatly reduced; moreover, since general ceramics and metal lead-out electrodes have a better bonding force, the phenomenon of loosening and falling off of lead-out electrodes can be reduced, and the authenticity rate of piezoelectric ceramic energy-sinking vibrators can be improved.
附图说明 Description of drawings
图1为已有技术的压电陶瓷能陷型振子的结构图;FIG. 1 is a structural diagram of a piezoelectric ceramic energy trap vibrator in the prior art;
图2为本发明提出的压电陶瓷能陷型振子的结构图;Fig. 2 is the structural diagram of the piezoelectric ceramic energy sink type vibrator proposed by the present invention;
图3为图2所示的压电陶瓷能陷型振子的剖面图;FIG. 3 is a cross-sectional view of the piezoelectric ceramic energy trapping vibrator shown in FIG. 2;
图4为压电陶瓷能陷型振子的另一种结构图;Fig. 4 is another structural diagram of a piezoelectric ceramic energy sinking vibrator;
图5为圆柱形压电陶瓷棒;Fig. 5 is a cylindrical piezoelectric ceramic rod;
图6为方柱形压电陶瓷棒;Fig. 6 is a square cylindrical piezoelectric ceramic rod;
图7为开有半圆柱形槽的陶瓷板;Fig. 7 is the ceramic plate that has semi-cylindrical groove;
图8为开有方柱形槽的陶瓷板;Fig. 8 is the ceramic plate that has square cylindrical groove;
图9为压电陶瓷棒粘合到陶瓷板上的槽中的示意图;Figure 9 is a schematic diagram of piezoelectric ceramic rods bonded to grooves on a ceramic plate;
图10为两面都开有槽的陶瓷板;Fig. 10 is the ceramic plate that all has groove on both sides;
图11为复合瓷块;Figure 11 is a composite porcelain block;
图12为复合瓷片。Figure 12 is a composite tile.
具体实施方式 Detailed ways
这种压电陶瓷能陷型振子的制造方法的具体步骤如下:The specific steps of the manufacturing method of the piezoelectric ceramic energy trapping vibrator are as follows:
A、用压电陶瓷制作图5所示的圆柱形或图6所示的方柱形的压电陶瓷棒,压电陶瓷棒的截面稍大于振子有效振动区的面积;方柱形的压电陶瓷棒可以用压电陶瓷块切割而成,圆柱形的压电陶瓷棒可以用方柱形的压电陶瓷棒用无心磨床磨制加工而成。A. Use piezoelectric ceramics to make the cylindrical piezoelectric ceramic rod shown in Figure 5 or the square columnar piezoelectric ceramic rod shown in Figure 6. The section of the piezoelectric ceramic rod is slightly larger than the area of the effective vibration area of the vibrator; Ceramic rods can be cut from piezoelectric ceramic blocks, and cylindrical piezoelectric ceramic rods can be processed by grinding square cylindrical piezoelectric ceramic rods with a centerless grinder.
B、如图7所示,用普通陶瓷制作一般陶瓷板6。一般陶瓷板制作可以采用常规的压制成型后再烧结的方法。一般陶瓷板的宽度与压电陶瓷棒的长度相同,一般陶瓷板的厚度稍大于一块振子的宽度(约等于一块振子的宽度加一条切割缝)。对一般陶瓷板进行厚度和端面研磨;在一般陶瓷板的表面制作数条平行的凹槽7,凹槽的截面形状与A步所制得的压电陶瓷棒的截面相一致,凹槽的大小比压电陶瓷棒的截面稍大,相邻的两条凹槽之间的中心距稍大于一块振子的长度(约等于一块振子的长度加一条切割缝)。上述一般陶瓷板上的凹槽可以用划片机或外圆切割机来加工。B. As shown in FIG. 7 , make a general
C、如图9所示,用玻璃釉在B步所制得的一般陶瓷板的每条凹槽中各粘入一条A步所得的压电陶瓷棒8,再将数块粘合了压电陶瓷棒的一般陶瓷板用玻璃釉多层相叠粘合在一起,加压加热固化,成为如图11所示的复合瓷块;粘合所用的玻璃釉可采用本行业常用玻璃釉。C, as shown in Figure 9, use glass glaze to stick a piezoelectric
D、将C步所得的复合瓷块沿与压电陶瓷棒的轴线相垂直的方向切割成如图12所示的比振子的厚度稍厚的复合瓷片,再对复合瓷片表面进行研磨加工。D. Cut the composite ceramic block obtained in step C along the direction perpendicular to the axis of the piezoelectric ceramic rod into a composite ceramic piece slightly thicker than the thickness of the vibrator as shown in Figure 12, and then grind the surface of the composite ceramic piece .
E、对D步所得的复合瓷片进行溅射、极化、印刷、腐蚀处理,制成引出电极和点电极。E. Perform sputtering, polarization, printing, and corrosion treatment on the composite tile obtained in step D to make lead electrodes and point electrodes.
F、将E步所得的复合瓷片切割成图2所示的符合要求的单个压电陶瓷能陷型振子。F. Cut the composite tile obtained in step E into a single piezoelectric ceramic sinkable vibrator that meets the requirements as shown in FIG. 2 .
这种压电陶瓷能陷型振子的制造方法中,A步中所述的压电陶瓷棒的截面为图5所示的圆形时,B步中所述的一般陶瓷板上的凹槽的截面可加工成半圆形,C步中的复合瓷块中,最上层的一般陶瓷板的下表面上有凹槽,最下层的一般陶瓷板的上表面上有凹槽,它们的结构如图6所示。中间的部位的一般陶瓷板的上、下表面上都有凹槽,其结构如图9所示。In the manufacturing method of this piezoelectric ceramic energy sink type vibrator, when the cross section of the piezoelectric ceramic rod described in step A is circular as shown in Figure 5, the grooves on the general ceramic plate described in step B The cross-section can be processed into a semicircle. In the composite ceramic block in step C, there are grooves on the lower surface of the uppermost general ceramic plate, and grooves on the upper surface of the lowermost general ceramic plate. Their structures are shown in the figure 6. There are grooves on the upper and lower surfaces of the general ceramic plate in the middle part, and its structure is shown in FIG. 9 .
这种压电陶瓷能陷型振子的制造方法中,A步中所述的压电陶瓷棒的截面为图6所示的正方形时,B步中所述的一般陶瓷板上的凹槽的截面可加工成正方形,C步中的复合瓷块中,最上层的一般陶瓷板上不加工凹槽,其余的一般陶瓷板的上表面上加工如图8所示的凹槽。In the manufacturing method of this piezoelectric ceramic energy sink type vibrator, when the cross section of the piezoelectric ceramic rod described in step A is a square as shown in Figure 6, the cross section of the groove on the general ceramic plate described in step B Can be processed into a square, in the composite porcelain block in step C, no groove is processed on the uppermost general ceramic plate, and grooves as shown in Figure 8 are processed on the upper surface of the remaining general ceramic plates.
这种压电陶瓷能陷型振子的制造方法中,A步中所述的压电陶瓷棒的截面为正方形时,B步中所述的一般陶瓷板上的凹槽的截面也可以加工成半个正方形,C步中的复合瓷块中,最上层的一般陶瓷板的下表面上有凹槽,最下层的一般陶瓷板的上表面上有凹槽,中间的部位的一般陶瓷板的上、下表面上都有凹槽。In the manufacturing method of this piezoelectric ceramic energy sink type vibrator, when the cross section of the piezoelectric ceramic rod described in step A is a square, the cross section of the groove on the general ceramic plate described in step B can also be processed into a half square. A square, in the composite porcelain block in the C step, grooves are arranged on the lower surface of the general ceramic plate of the uppermost layer, grooves are arranged on the upper surface of the general ceramic plate of the lowermost layer, and the upper and lower surfaces of the general ceramic plate of the middle part There are grooves on the lower surface.
这种压电陶瓷能陷型振子的制造方法中,压电陶瓷棒可以用钛酸铅之类的含铅压电陶瓷材料来制作,也可以用铌酸锶铋(SrBi2Nb2O9)、钛铌酸铋(Bi3-xMxNb1+yTi1-yO9)之类的无铅压电陶瓷材料来制作。一般陶瓷板可以用钛镁瓷之类的不合铅的普通陶瓷材料来制作。In the manufacturing method of the piezoelectric ceramic energy trapping vibrator, the piezoelectric ceramic rod can be made of lead-containing piezoelectric ceramic materials such as lead titanate, or strontium bismuth niobate (SrBi 2 Nb 2 O 9 ) , bismuth titanium niobate (Bi 3-x M x Nb 1+y Ti 1-y O 9 ) and other lead-free piezoelectric ceramic materials. General ceramic plates can be made of lead-free common ceramic materials such as titanium-magnesium porcelain.
用这种压电陶瓷能陷型振子制造方法制成的压电陶瓷能陷型振子的结构如图2、图3和图4所示,它包括一块片状振子,片状振子的上表面和下表面的中心有两个互相对称的点电极2,上述点电极由引出电极3引出。片状振子由两部分组成:片状振子中心的振动有效区域为压电陶瓷材料块5,片状振子的其它区域1为一般陶瓷材料。这种压电陶瓷能陷型振子的实际大小是2.5×2.0~8.0×6.0mm,点电极的直径为0.6~1.6mm,压电陶瓷材料块的直径(或边长)为1.0~2.0mm,压电陶瓷材料占整个片状振子的不到1/6,因而可大大减少压电陶瓷的用量。并且一般陶瓷与金属引出电极的结合力较好,减少了引出电极松动脱落的现象,提高了压电陶瓷能陷型振子的正品率。The structure of the piezoelectric ceramic sinkable vibrator made by this piezoelectric ceramic sinkable vibrator manufacturing method is shown in Figure 2, Figure 3 and Figure 4, which includes a piece of vibrator, the upper surface of the piece vibrator and There are two mutually
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Citations (3)
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JPS61212908A (en) | 1985-03-18 | 1986-09-20 | Matsushita Electric Ind Co Ltd | Manufacture of piezoelectric ceramic vibrator |
CN2442249Y (en) * | 2000-09-08 | 2001-08-08 | 长江水利委员会长江工程地球物理勘测研究院(武汉) | Medium hole radial composite piezoelectric ceramic wave detector |
CN1728549A (en) * | 2005-06-27 | 2006-02-01 | 严盛喜 | small-size chip high-frequency piezoelectric ceramic resonator |
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Publication number | Priority date | Publication date | Assignee | Title |
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JPS61212908A (en) | 1985-03-18 | 1986-09-20 | Matsushita Electric Ind Co Ltd | Manufacture of piezoelectric ceramic vibrator |
CN2442249Y (en) * | 2000-09-08 | 2001-08-08 | 长江水利委员会长江工程地球物理勘测研究院(武汉) | Medium hole radial composite piezoelectric ceramic wave detector |
CN1728549A (en) * | 2005-06-27 | 2006-02-01 | 严盛喜 | small-size chip high-frequency piezoelectric ceramic resonator |
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