CN101771393B - Manufacturing method of piezoelectric ceramic energy sinking vibrator - Google Patents

Abstract

A method for manufacturing a piezoelectric ceramic energy trap type vibrator comprises the following steps: A. manufacturing a piezoelectric ceramic rod; B. manufacturing a common ceramic plate, and manufacturing a plurality of parallel grooves on the surface of the common ceramic plate; C. glass glaze is used for respectively sticking a piezoelectric ceramic rod in each groove of a common ceramic plate, then a plurality of common ceramic plates stuck with the piezoelectric ceramic rods are overlapped and stuck together, and are pressurized, heated and solidified to form a composite ceramic block; D. cutting the composite ceramic block into composite ceramic chips along the direction vertical to the axis of the piezoelectric ceramic rod, and then grinding the surfaces of the composite ceramic chips; E. making an extraction electrode and a point electrode on the composite ceramic chip; F. and cutting the composite ceramic chip into single piezoelectric ceramic energy trap type vibrators. The piezoelectric ceramic material used by the manufactured piezoelectric ceramic energy trap type vibrator is less than 1/6 of the whole vibrator, so that the using amount of the piezoelectric ceramic can be greatly reduced; moreover, the phenomenon that the extraction electrode is loosened and falls off can be reduced, and the rate of qualified products of the oscillator is improved.

Description

Manufacturing method of piezoelectric ceramic energy sinking vibrator

technical field

The invention relates to a method for manufacturing a vibrator of a piezoelectric ceramic frequency device, and a method for manufacturing a piezoelectric ceramic energy trapping vibrator.

Background technique

Piezoelectric ceramic frequency devices are widely used in communication, television, computer, industrial automation and other fields as frequency selection and frequency control devices. The key component of the piezoelectric ceramic frequency device is the piezoelectric ceramic vibrator. Usually, the structure of a piezoelectric ceramic sinkable vibrator is shown in Figure 1. Two symmetrical metal electrodes 2 are made on both sides of a piezoelectric ceramic plate 9 as vibrating electrodes, and the vibrating electrodes are drawn out from the lead-out electrodes 3. The vibrating electrode 2 is also called a point electrode. The area of the point electrode is very small, accounting for only a very small part of the whole piezoelectric ceramic plate. Large, about 20% larger, the area of the effective vibration area is less than 1/6 of the entire chip vibrator. The commonly used piezoelectric ceramic materials are lead-containing ceramics. How to reduce the amount of lead, or even eliminate lead, is a problem that must be considered in the manufacture of piezoelectric ceramic frequency devices. At present, there are lead-free piezoelectric ceramics, but the price of lead-free piezoelectric ceramics is relatively high, and the cost of making piezoelectric ceramic frequency devices with them is relatively high. In addition, the lead-out electrode of the piezoelectric ceramic vibrator is also made on the same piezoelectric ceramic plate. Due to the poor bonding force between the piezoelectric ceramic material and the metal lead-out electrode, coupled with high temperature, bonding and other treatments, it often loosens and falls off. and other defects.

Contents of the invention

The present invention aims to propose a manufacturing method of a piezoelectric ceramic sinkable vibrator using a small amount of piezoelectric ceramic material.

The specific steps of the manufacturing method of the piezoelectric ceramic energy trapping vibrator are as follows:

A. Piezoelectric ceramic rods are made of piezoelectric ceramics, and the cross-section of the piezoelectric ceramic rods is slightly larger than the area of the effective vibration area of the vibrator;

B. Use ordinary ceramics to make a general ceramic plate. The width of the general ceramic plate is the same as the length of the piezoelectric ceramic rod. The thickness of the general ceramic plate is slightly larger than the width of a vibrator; Make several parallel grooves on the surface of the groove, the cross-sectional shape of the groove is consistent with the cross-sectional shape of the piezoelectric ceramic rod prepared in step A, the size of the groove cross-section is slightly larger than that of the piezoelectric ceramic rod, adjacent The center distance between the two grooves is slightly larger than the length of a vibrator;

C. Use glass glaze to stick a piezoelectric ceramic rod obtained in step A into each groove of the general ceramic plate obtained in step B, and then use glass glaze to glue several general ceramic rods bonded to the piezoelectric ceramic rod. The ceramic plates are bonded together, pressurized and heated to solidify, and become a composite ceramic block;

D. Cut the composite ceramic block obtained in step C along the direction perpendicular to the axis of the piezoelectric ceramic rod, cut the composite ceramic block into a composite ceramic piece slightly thicker than the vibrator, and then grind the surface of the composite ceramic piece processing;

E, carry out sputtering, polarization, printing, corrosion treatment to the composite tile gained in step D, make lead-out electrode and point electrode;

F. Cut the composite tile obtained in step E into a single energy trapping piezoelectric vibrator.

The vibrator made by this piezoelectric ceramic energy-sinking vibrator manufacturing method uses piezoelectric ceramic material only in the effective vibration area of the center of the vibrator, and the piezoelectric ceramic material used is less than 1/6 of the entire chip vibrator. Therefore, the consumption of piezoelectric ceramics can be greatly reduced; moreover, since general ceramics and metal lead-out electrodes have a better bonding force, the phenomenon of loosening and falling off of lead-out electrodes can be reduced, and the authenticity rate of piezoelectric ceramic energy-sinking vibrators can be improved.

Description of drawings

FIG. 1 is a structural diagram of a piezoelectric ceramic energy trap vibrator in the prior art;

Fig. 2 is the structural diagram of the piezoelectric ceramic energy sink type vibrator proposed by the present invention;

FIG. 3 is a cross-sectional view of the piezoelectric ceramic energy trapping vibrator shown in FIG. 2;

Fig. 4 is another structural diagram of a piezoelectric ceramic energy sinking vibrator;

Fig. 5 is a cylindrical piezoelectric ceramic rod;

Fig. 6 is a square cylindrical piezoelectric ceramic rod;

Fig. 7 is the ceramic plate that has semi-cylindrical groove;

Fig. 8 is the ceramic plate that has square cylindrical groove;

Figure 9 is a schematic diagram of piezoelectric ceramic rods bonded to grooves on a ceramic plate;

Fig. 10 is the ceramic plate that all has groove on both sides;

Figure 11 is a composite porcelain block;

Figure 12 is a composite tile.

Detailed ways

The specific steps of the manufacturing method of the piezoelectric ceramic energy trapping vibrator are as follows:

A. Use piezoelectric ceramics to make the cylindrical piezoelectric ceramic rod shown in Figure 5 or the square columnar piezoelectric ceramic rod shown in Figure 6. The section of the piezoelectric ceramic rod is slightly larger than the area of the effective vibration area of the vibrator; Ceramic rods can be cut from piezoelectric ceramic blocks, and cylindrical piezoelectric ceramic rods can be processed by grinding square cylindrical piezoelectric ceramic rods with a centerless grinder.

B. As shown in FIG. 7 , make a general ceramic plate 6 with common ceramics. Generally, ceramic plates can be made by conventional pressing and then sintering methods. Generally, the width of the ceramic plate is the same as the length of the piezoelectric ceramic rod, and the thickness of the general ceramic plate is slightly larger than the width of a vibrator (approximately equal to the width of a vibrator plus a cutting slit). Carry out thickness and end face grinding to general ceramic plate; Make several parallel grooves 7 on the surface of general ceramic plate, the cross-sectional shape of groove is consistent with the cross-section of the piezoelectric ceramic rod that A step makes, and the size of groove It is slightly larger than the section of the piezoelectric ceramic rod, and the center-to-center distance between two adjacent grooves is slightly larger than the length of a vibrator (approximately equal to the length of a vibrator plus a cutting slit). The grooves on the above-mentioned general ceramic plate can be processed with a dicing machine or an outer circle cutting machine.

C, as shown in Figure 9, use glass glaze to stick a piezoelectric ceramic rod 8 obtained in step A respectively in each groove of the general ceramic plate obtained in step B, and then several pieces are bonded to the piezoelectric ceramic rod 8. The general ceramic plates of the ceramic rods are bonded together with multiple layers of glass glaze, pressurized and heated to solidify, and become a composite porcelain block as shown in Figure 11; the glass glaze used for bonding can be the commonly used glass glaze in this industry.

D. Cut the composite ceramic block obtained in step C along the direction perpendicular to the axis of the piezoelectric ceramic rod into a composite ceramic piece slightly thicker than the thickness of the vibrator as shown in Figure 12, and then grind the surface of the composite ceramic piece .

E. Perform sputtering, polarization, printing, and corrosion treatment on the composite tile obtained in step D to make lead electrodes and point electrodes.

F. Cut the composite tile obtained in step E into a single piezoelectric ceramic sinkable vibrator that meets the requirements as shown in FIG. 2 .

In the manufacturing method of this piezoelectric ceramic energy sink type vibrator, when the cross section of the piezoelectric ceramic rod described in step A is circular as shown in Figure 5, the grooves on the general ceramic plate described in step B The cross-section can be processed into a semicircle. In the composite ceramic block in step C, there are grooves on the lower surface of the uppermost general ceramic plate, and grooves on the upper surface of the lowermost general ceramic plate. Their structures are shown in the figure 6. There are grooves on the upper and lower surfaces of the general ceramic plate in the middle part, and its structure is shown in FIG. 9 .

In the manufacturing method of this piezoelectric ceramic energy sink type vibrator, when the cross section of the piezoelectric ceramic rod described in step A is a square as shown in Figure 6, the cross section of the groove on the general ceramic plate described in step B Can be processed into a square, in the composite porcelain block in step C, no groove is processed on the uppermost general ceramic plate, and grooves as shown in Figure 8 are processed on the upper surface of the remaining general ceramic plates.

In the manufacturing method of this piezoelectric ceramic energy sink type vibrator, when the cross section of the piezoelectric ceramic rod described in step A is a square, the cross section of the groove on the general ceramic plate described in step B can also be processed into a half square. A square, in the composite porcelain block in the C step, grooves are arranged on the lower surface of the general ceramic plate of the uppermost layer, grooves are arranged on the upper surface of the general ceramic plate of the lowermost layer, and the upper and lower surfaces of the general ceramic plate of the middle part There are grooves on the lower surface.

In the manufacturing method of the piezoelectric ceramic energy trapping vibrator, the piezoelectric ceramic rod can be made of lead-containing piezoelectric ceramic materials such as lead titanate, or strontium bismuth niobate (SrBi ₂ Nb ₂ O ₉ ) , bismuth titanium niobate (Bi _3-x M _x Nb _1+y Ti _1-y O ₉ ) and other lead-free piezoelectric ceramic materials. General ceramic plates can be made of lead-free common ceramic materials such as titanium-magnesium porcelain.

The structure of the piezoelectric ceramic sinkable vibrator made by this piezoelectric ceramic sinkable vibrator manufacturing method is shown in Figure 2, Figure 3 and Figure 4, which includes a piece of vibrator, the upper surface of the piece vibrator and There are two mutually symmetrical point electrodes 2 in the center of the lower surface, and the above point electrodes are drawn out by the lead-out electrodes 3 . The chip vibrator is composed of two parts: the effective vibration area in the center of the chip vibrator is a piezoelectric ceramic material block 5, and the other area 1 of the chip vibrator is a general ceramic material. The actual size of this piezoelectric ceramic sinkable vibrator is 2.5×2.0～8.0×6.0mm, the diameter of the point electrode is 0.6～1.6mm, and the diameter (or side length) of the piezoelectric ceramic material block is 1.0～2.0mm. Piezoelectric ceramic materials account for less than 1/6 of the entire chip vibrator, so the amount of piezoelectric ceramics can be greatly reduced. In addition, the bonding force between ceramics and metal lead-out electrodes is generally better, which reduces the phenomenon of lead-out electrodes loosening and falling off, and improves the authenticity rate of piezoelectric ceramic sinkable vibrators.

Claims (2)

1. A method for manufacturing a piezoelectric ceramic energy sink type vibrator is characterized in that the specific steps are as follows: A. Use piezoelectric ceramics to make piezoelectric ceramic rods. The cross-section of the piezoelectric ceramic rods perpendicular to its axis is a square, which is slightly larger than the area of the effective vibration zone of the vibrator; B. Use ordinary ceramics to make a general ceramic plate. The width of the general ceramic plate is the same as the length of the piezoelectric ceramic rod. The thickness of the general ceramic plate is slightly larger than the width of a vibrator; Several parallel grooves are made on the surface of the groove. The shape of the cross-section perpendicular to the parallel direction of the groove is square. The size of the groove cross-section is slightly larger than that of the piezoelectric ceramic rod. Two adjacent grooves The center distance between them is slightly larger than the length of a vibrator; C. Use glass glaze to stick a piezoelectric ceramic rod obtained in step A into each groove of the general ceramic plate obtained in step B, and then use glass glaze to glue several general ceramic rods bonded to the piezoelectric ceramic rod. The ceramic plates are bonded together, and the uppermost general ceramic plate has no grooves, and it is solidified under pressure and heat to become a composite ceramic block; D. Cut the composite ceramic block obtained in step C along the direction perpendicular to the axis of the piezoelectric ceramic rod, cut the composite ceramic block into a composite ceramic piece slightly thicker than the vibrator, and then grind the surface of the composite ceramic piece processing; E, carry out sputtering, polarization, printing, corrosion treatment to the composite tile gained in step D, make lead-out electrode and point electrode; F. Cut the composite tile obtained in step E into a single piezoelectric ceramic sinkable vibrator. 2. A method for manufacturing a piezoelectric ceramic energy trapping vibrator, characterized in that the specific steps are as follows: A. Use piezoelectric ceramics to make piezoelectric ceramic rods. The cross-section of the piezoelectric ceramic rods perpendicular to its axis is circular, and this cross-section is slightly larger than the area of the effective vibration zone of the vibrator; B. Use ordinary ceramics to make a general ceramic plate. The width of the general ceramic plate is the same as the length of the piezoelectric ceramic rod. The thickness of the general ceramic plate is slightly larger than the width of a vibrator; Make several grooves parallel to each other on the surface of the groove, the shape of the cross section of the groove perpendicular to the parallel direction of the groove is a semicircle, and the diameter of the semicircle is smaller than the cross section of the piezoelectric ceramic rod made in step A The diameter of the groove is slightly larger, and the center-to-center distance between two adjacent grooves is slightly larger than the length of a vibrator; C. Use glass glaze to stick a piezoelectric ceramic rod obtained in step A into each groove of the general ceramic plate obtained in step B, and then use glass glaze to glue several general ceramic rods bonded to the piezoelectric ceramic rod. The ceramic plates are bonded together, wherein the uppermost general ceramic plate has grooves on the lower surface, the lowermost general ceramic plate has grooves on the upper surface, and the middle part of the general ceramic plate has grooves on the upper and lower surfaces. All have grooves, pressurized and heated to solidify, and become a composite porcelain block; D. Cut the composite ceramic block obtained in step C along the direction perpendicular to the axis of the piezoelectric ceramic rod, cut the composite ceramic block into a composite ceramic piece slightly thicker than the vibrator, and then grind the surface of the composite ceramic piece processing; E, carry out sputtering, polarization, printing, corrosion treatment to the composite tile gained in step D, make lead-out electrode and point electrode; F. Cut the composite tile obtained in step E into a single piezoelectric ceramic sinkable vibrator.

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