CN101767236B - Brazing process of ceramic vacuum pipe with diameter greater than 300mm and device - Google Patents

Brazing process of ceramic vacuum pipe with diameter greater than 300mm and device Download PDF

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Publication number
CN101767236B
CN101767236B CN2009102473776A CN200910247377A CN101767236B CN 101767236 B CN101767236 B CN 101767236B CN 2009102473776 A CN2009102473776 A CN 2009102473776A CN 200910247377 A CN200910247377 A CN 200910247377A CN 101767236 B CN101767236 B CN 101767236B
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China
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ceramic
brazing process
vacuum
vacuum pipe
diameter
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CN2009102473776A
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CN101767236A (en
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张红辉
邵任杰
蒋道满
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SHANGHAI COILLION TECHNOLOGY DEVELOPMENT Co Ltd
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SHANGHAI COILLION TECHNOLOGY DEVELOPMENT Co Ltd
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Abstract

The invention provides a brazing process of a ceramic vacuum pipe with diameter greater than 300mm and a device, comprising the following steps: firstly, cleaning the ceramic pipe and a titanium ring, then putting them into a vacuum furnace, conducting temperature-rising weld under vacuum condition, providing shielding gas after welding, taking the ceramic pipe out from the furnace, and completing the butt-weld of two ceramic vacuum pipes. The device provided by the invention comprises a first-class mechanical rotary vane pump, a second-class Roots pump, and a third-class oil diffusion pump; the pumps are arranged in serial, meanwhile, the device is provided with a pipeline for transmitting high-purity inert gas (such as nitrogen and argon) into the furnace. The advantages of the invention are as follows: the brazing process of the ceramic vacuum pipe with diameter greater than 300mm and the device is provided, the vacuum leak rate at welded joint of the welded ceramic pipes is less than 5 * 10-12Pa. M3 / s, and no crack exists on the ceramic pipe.

Description

A kind of diameter is greater than brazing process of ceramic vacuum pipe and the device of 300mm
Technical field
The present invention relates to brazing process of ceramic vacuum pipe and this method employed device of a kind of diameter greater than 300mm, be used for the ceramic vacuum pipeline under vacuum state to welded together, belong to brazing process of ceramic vacuum pipe and device technique field.
Background technology
Because the activating effect that stainless steel and aluminium alloy produce under the electron radiation state is fewer, the large diameter vacuum pipe that uses on the domestic large-scale accelerator is all based on stainless steel and aluminium alloy at present.But the activating effect that stainless steel and aluminium alloy produce under the proton irradiation state is very big, causes extremely serious neutron to pollute to environment on every side.Ceramic-vacuum tube does not then have activating effect, but does not have a kind of technology and device of ceramic soldering vacuum tube of maturation now.
Summary of the invention
The purpose of this invention is to provide brazing process of ceramic vacuum pipe and the device of a kind of diameter, be about to the spallation neutron source project that begins to build to be applicable to China greater than 300mm.
In order to achieve the above object, method and technology scheme of the present invention provides the brazing process of ceramic vacuum pipe of a kind of diameter greater than 300mm, the steps include:
Step 1, metallized earthenware duct is cleaned, removes the dirt on surface, to the face of weld of earthenware duct 100~120 ℃ of dry down processing 5~10 minutes;
Step 2, clean the titanium ring surface, and, it is characterized in that 100~120 ℃ of dry down processing 5~10 minutes with strong acid,
Step 3, the earthenware duct after will cleaning and titanium ring are packed in the frock clamp, place a titanium ring between two earthenware ducts, earthenware duct and titanium ring are fixed, and prepared cored solder, again frock is hung in the vacuum drying oven in unsettled mode at the joint of earthenware duct and titanium ring;
Step 4, vacuum drying oven vacuumized until vacuum be not more than 10 -3Begin heating behind the Pa, be warming up to 490~510 ℃, be incubated 15~25 minutes, be warming up to 848~852 ℃ again, confirm to be incubated 15~25 minutes behind the solder fusing, cooling causes 140~160 ℃ naturally again, towards inert gas, comes out of the stove.
A kind of product technology scheme provided by the invention has provided a kind of device that is used for said method, mechanical type sliding vane rotary pump by the first order, partial lobe pump, the oil diffusion pump of the third level constitutes, pumps at different levels carry out arranged in series, its concrete structure is: comprise vertical vacuum furnace body, workpiece places in the vacuum furnace body, in vacuum furnace body, be provided with heating system, heating system is distributed in around the workpiece, heating system connects controller and body of heater power supply respectively, is connected with first valve on vacuum furnace body, and an end of first valve connects diffusion pump, the other end pipeline of first valve connects the 3rd valve, the 3rd valve pipeline connects mechanical pump, and an end of lobe pump connects diffusion pump by second valve, and the other end of lobe pump connects the pipeline between the 3rd valve and the mechanical pump.
Device of the present invention adopts vertical Proper Design, makes workpiece lift in unsettled mode, thereby can guarantee the natural capillary phenomenon of scolder, makes at the face of weld scolder that can both evenly distribute, and satisfies vacuum requirements; Method provided by the invention (promptly two earthenware duct between) in weld seam is added a titanium ring, can reduce the stress distribution of butt welding place, guarantees that crackle does not appear in the ceramic welding position; Frock clamp of the present invention can guarantee the position of part in the welding process; Method of the present invention keeps vacuum to be not more than 10 in temperature-rise period -3Pa is incubated 15~25 minutes behind solder fusing, so that scolder fully melts, and do not produce bubble.
The invention has the advantages that provides brazing process of ceramic vacuum pipe and the device of a kind of diameter greater than 300mm, and the earthenware duct commissure vacuum leak rate after the welding is less than 5*10- 12Pa.M 3/ s, no any crackle on earthenware duct.
Description of drawings
Figure 1A is the structural representation of frock clamp;
Figure 1B is Figure 1A side view;
Fig. 2 is the structural representation of a kind of device provided by the invention;
Fig. 3 is the circuit block diagram of a kind of device provided by the invention.
The specific embodiment
Specify the present invention below in conjunction with embodiment.
Embodiment 1
As shown in Figures 2 and 3, a kind of diameter that is used for provided by the invention comprises vertical vacuum furnace body 2 greater than the device of the ceramic-vacuum tube soldering of 300mm, workpiece 4 places in the vacuum furnace body 2, in vacuum furnace body 2, be provided with heating system 3, heating system 3 is distributed in around the workpiece 4, heating system 3 connects controller and body of heater power supply respectively, on vacuum furnace body 2, be connected with first valve 5, one end of first valve 5 connects diffusion pump 6, the other end pipeline of first valve 5 connects the 3rd valve 9, the 3rd valve 9 pipelines connect mechanical pump 10, one end of lobe pump 8 connects diffusion pump 6 by second valve 7, and the other end of lobe pump 8 connects the pipeline between the 3rd valve 9 and the mechanical pump 10.Heating system 3 is an electric heater unit, and controller is a single-chip microcomputer.
A kind of diameter provided by the invention is greater than the brazing process of ceramic vacuum pipe of 300mm,, needing two external diameters of butt joint be 302mm, and internal diameter is 282mm, and the ceramic vacuum pipeline of long 450mm the steps include:
Step 1, metallized earthenware duct is cleaned, removes the dirt on surface, to the face of weld of earthenware duct 120 ℃ of dry down processing 8 minutes;
Step 2, clean the titanium ring surface, and 120 ℃ of dry down processing 8 minutes, strong acid is that concentration is 35% hydrochloric acid with strong acid.
Step 3, earthenware duct after cleaning and titanium ring are packed in the frock clamp, place a titanium ring between two earthenware ducts, earthenware duct and titanium ring are fixed, and prepare cored solder at the joint of earthenware duct and titanium ring, cored solder is a conventional material, use the AgCu28 scolder of Beijing non-ferrous metal company in the present embodiment, again frock is hung in the vacuum drying oven in unsettled mode, the structure of frock clamp is shown in Figure 1A and Figure 1B, comprise housing 11, be respectively equipped with loam cake 13 and lower cover 12 in the both sides of housing 11, middle part in housing 11 is level and vertically be provided with dividing plate 21 and backstay 14 respectively, the two ends of backstay 14 are located at outside loam cake 13 and the lower cover 12, on an end of backstay 14, be provided with nut 19, on the other end of backstay 14, be provided with suspension ring 18, outside this end of backstay 14, be with chock 15 successively, spring 16 and spring base 17, chock 15 is located on the loam cake 13, and loam cake 13 and lower cover 12 are located on the housing 11 by bolt 20.
Step 4, vacuum drying oven is vacuumized until vacuum 10 -3Begin heating behind the Pa, be warming up to 490 ℃, be incubated 15 minutes, be warming up to 848 ℃ with 150 ℃/hour speed again, confirmed behind the solder fusing insulation 15 minutes, cool off naturally again and cause 140 ℃,, come out of the stove towards nitrogen with 50 ℃/hour speed.Vacuumizing until vacuum 10 -3Between the Pa, can also vacuumize and detect on the body of heater whether have leak source.
Through detecting, earthenware duct commissure vacuum leak rate is less than 5*10- 12Pa.M 3/ s, through long vacuum test, the pipeline joint does not have any crackle.
Embodiment 2
The device of present embodiment is identical with embodiment 1, and the difference of its step is that the baking temperature in the step 1 is 100 ℃, and the time is 10 minutes; Baking temperature is 100 ℃ in the step 2, and the time is 10 minutes; Step 4, vacuum drying oven is vacuumized until vacuum 10 -5Begin heating behind the Pa,, be incubated 25 minutes, be warming up to 852 ℃ with 150 ℃/hour speed again, confirmed behind the solder fusing insulation 25 minutes, cool off naturally again and cause 160 ℃,, come out of the stove towards argon gas with 50 ℃/hour be warming up to 510 ℃.
Through detecting, earthenware duct commissure vacuum leak rate is less than 5*10- 12Pa.M 3/ s, through long vacuum test, the pipeline joint does not have any crackle.
Embodiment 3
The device of present embodiment is identical with embodiment 1, and the difference of its step is: the baking temperature in the step 1 is 120 ℃, and the time is 5 minutes; Baking temperature is 120 ℃ in the step 2, and the time is 5 minutes; Step 4, vacuum drying oven is vacuumized until vacuum 10 -3Begin heating behind the Pa, be warming up to 500 ℃, be incubated 20 minutes, be warming up to 850 ℃ again, confirm to be incubated 20 minutes behind the solder fusing, cooling causes 150 ℃ naturally again, towards nitrogen, comes out of the stove, and other steps of present embodiment are identical with embodiment 1.Through detecting, earthenware duct commissure vacuum leak rate is less than 5*10- 12Pa.M 3/ s, through long vacuum test, the pipeline joint does not have any crackle.

Claims (6)

1. a diameter the steps include: greater than the brazing process of ceramic vacuum pipe of 300mm
Step 1, metallized earthenware duct is cleaned, removes the dirt on surface, to the face of weld of earthenware duct 100~120 ℃ of dry down processing 5~10 minutes;
Step 2, clean the titanium ring surface, and, it is characterized in that 100~120 ℃ of dry down processing 5~10 minutes with strong acid,
Step 3, the earthenware duct after will cleaning and titanium ring are packed in the frock clamp, place a titanium ring between two earthenware ducts, earthenware duct and titanium ring are fixed, and prepared cored solder, again frock is hung in the vacuum drying oven in unsettled mode at the joint of earthenware duct and titanium ring;
Step 4, vacuum drying oven vacuumized until vacuum be not more than 10 -3Begin heating behind the Pa, be warming up to 490~510 ℃, be incubated 15~25 minutes, be warming up to 848~852 ℃ again, confirm to be incubated 15~25 minutes behind the solder fusing, cooling causes 140~160 ℃ naturally again, towards inert gas, comes out of the stove.
2. a kind of diameter as claimed in claim 1 is characterized in that greater than the brazing process of ceramic vacuum pipe of 300mm the described strong acid of step 2 is that mass concentration is 35% hydrochloric acid.
3. a kind of diameter as claimed in claim 1 is greater than the brazing process of ceramic vacuum pipe of 300mm, it is characterized in that, the described frock clamp of step 3 comprises housing (11), be respectively equipped with loam cake (13) and lower cover (12) in the both sides of housing (11), middle part in housing (11) is level and vertically be provided with dividing plate (21) and backstay (14) respectively, the two ends of backstay (14) are located at outside loam cake (13) and the lower cover (12), on an end of backstay (14), be provided with nut (19), on the other end of backstay (14), be provided with suspension ring (18), outside this end of backstay (14), be with chock (15) successively, spring (16) and spring base (17), chock (15) is located on the loam cake (13).
4. a kind of diameter as claimed in claim 1 is characterized in that greater than the brazing process of ceramic vacuum pipe of 300mm the described heating rate that is warming up to 490~510 ℃ of step 4 is 50 ℃/hour.
5. a kind of diameter as claimed in claim 1 is characterized in that greater than the brazing process of ceramic vacuum pipe of 300mm the described heating rate that is warming up to 848~852 ℃ of step 4 is 150 ℃/hour.
6. a kind of diameter as claimed in claim 1 is characterized in that greater than the brazing process of ceramic vacuum pipe of 300mm the described inert gas of step 4 is nitrogen or argon gas.
CN2009102473776A 2009-12-29 2009-12-29 Brazing process of ceramic vacuum pipe with diameter greater than 300mm and device Expired - Fee Related CN101767236B (en)

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Application Number Priority Date Filing Date Title
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CN101767236B true CN101767236B (en) 2011-11-23

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Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102581411B (en) * 2012-03-28 2014-04-09 常州布拉迪纺织机械有限公司 Method for preparing vacuum brazing process for cam link parts of automatic winder
CN102873421B (en) * 2012-09-13 2015-04-15 无锡四方集团真空炉业有限公司 Vacuum carrier gas aluminum brazing furnace
CN103537773B (en) * 2013-10-12 2016-02-03 合肥聚能电物理高技术开发有限公司 Superconductive cable vacuum tin soldering equipment
CN109182937B (en) * 2018-11-05 2020-04-07 浙江飞剑科技有限公司 Titanium cup surface crystallization treatment method
CN113020840B (en) * 2021-03-02 2022-11-25 中国工程物理研究院材料研究所 Brazing method between beryllium material and metal piece

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