CN101762564A - Biochemical sensor based on thin-covering layer long-period fiber grating coupling resonant cavity - Google Patents
Biochemical sensor based on thin-covering layer long-period fiber grating coupling resonant cavity Download PDFInfo
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- CN101762564A CN101762564A CN200910243117A CN200910243117A CN101762564A CN 101762564 A CN101762564 A CN 101762564A CN 200910243117 A CN200910243117 A CN 200910243117A CN 200910243117 A CN200910243117 A CN 200910243117A CN 101762564 A CN101762564 A CN 101762564A
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Abstract
The invention provides a biochemical sensor based on a thin-covering layer long-period fiber grating coupling resonant cavity, which comprises a microsphere resonant cavity, a thin-covering layer long-period fiber grating and a carrying silicon substrate, wherein the microsphere resonant cavity is coated with nano-pore zeolite coatings, the microsphere resonant cavity coated with nano-pore zeolite coatings and the thin-covering layer long-period fiber grating are fixed on the carrying silicon substrate engraved with micro grooves and hole grooves, and the distance between the microsphere resonant cavity and the thin-covering layer long-period fiber grating is controlled in a range between dozens of nanometers and hundreds of nanometers through the micro positioning of the carrying silicon substrate, wherein the resonant cavity is in a fractographic resonant mode, and the surface of the resonant cavity generates the fractographic change when the nano-pore zeolite coatings absorb molecules to be detected, so the resonant wavelength is deviated, and the detection is further carried out. The detection on the specified molecules can be realized according to the different hole diameters of the coatings of a zeolite molecular sieve, in addition, the sensitivity can reach the ppm range level or even the ppb range level, and the invention can be widely used in the fields of environment control, industrial process treatment, public safety and the like.
Description
Invention field
The invention belongs to the microsensor field, relate in particular to the evanescent wave coupling and silicon chip microposition of light, utilization thin-covering layer long-period fiber grating and the surperficial coupling that is coated with zeolite membrane microballoon resonator cavity are realized the detection of specific molecular concentration by the side-play amount of resonance wavelength.
Technical background
Cavity resonator structure commonly used has dish, ring, post, ball etc., and these solid of revolution resonator cavitys are supported the whispering gallery modes (whispering gallery modes is called for short WGMs) of high-quality-factor.WGMs is a kind of pattern that depends on pattern resonance, and the resonance mode frequency of microcavity depends on the size of resonator cavity, and the mode frequency of microcavity can come tuning by the surface topography that changes the chamber.Excite the waveguide common structure of resonator cavity WGM that (Ilchenko V S such as optical taper, prism, side polishing fibre are arranged by evanscent field, et al.Optical Resonators WithWhispering-Gallery Modes--Part II:Applications.IEEE, Journal of Selected Topicsin Quantum Electronics, 12 (1): 15-32,2006).Also the someone proposes to excite resonator cavity WGM with long period fiber grating (LPFG), but polishes the same too low defective of launching efficiency that exists of fine mode with prism, side.The launching efficiency of optical taper (the several microns of diameter) is very high, but optical taper is easy to brittle failure, and operating difficulties has brought very big difficulty to practical application.
General ball/dish/resonator sensors such as ring, can realize detection (the HanumegowdaN M of extremely low concentration, et al.Refractometric sensors based on microsphere resonators, AppliedPhysics Letters, 87 (201107): 1-3,2005), still can not realize the detection of specific sized molecules.By can realize the detection of specific sized molecules in resonator cavity surface plating one deck zeolite membrane, the aluminosilicate that the zeolite coating is a kind of crystal type that plates, have regular in the crystal structure and uniform duct, the aperture is the order of magnitude (being generally less than 1 nanometer) of molecular diameter, only allow the diameter molecule littler to enter, therefore the molecule in the potpourri can be sieved by size than the aperture.Utilize this characteristic, zeolite can be prepared into thickness is micron-sized film molecular sieve, the detected material molecule is adsorbed selectively because of big or small and shape, thereby cause the optical texture of zeolite pore and optical property change to cause that the resonator cavity surface topography changes, for example refractive index changes, and then cause resonance wavelength to be offset, make it possess the potential of making sensor.
Exciting between the waveguide of resonator cavity WGMs and the resonator cavity is by evanscent field generation coupling, and both optimum coupling spacings all are to utilize the accurate fiber adjusting mount of multidimensional to regulate in the length range of a coupling light wavelength usually.The required accuracy of instrument of this adjusting requires high, is difficult to accurately control actual range size between the two, and operating difficulties, is difficult to guarantee that the equatorial plane of waveguide and resonator cavity is tangent, and is repeatable poor.
Summary of the invention
The present invention seeks in order to overcome above-mentioned defective, realize a kind of high sensitivity chemistry of micro-organisms sensor that selectivity absorbs that has.The existence and the concentration (as explosive steam, tunnel gas molecule) that can be used for specific molecular in the testing environment, can be widely used in fields such as environment control, industrial process processing, mine production, public safety facility, Homeland Security, sensitivity reaches ppm even ppb magnitude.
For realizing above purpose, the technical solution adopted in the present invention is:
A kind of biochemical sensor based on thin-covering layer long-period fiber grating coupling resonant cavity, this biochemical sensor is by thin-covering layer long-period fiber grating (3), the microballoon resonator cavity (6) and the carrying silicon chip (1) that are coated with nano-pore zeolite coated film are formed, wherein, one end of described thin-covering layer long-period fiber grating (3) is light source input end (13), the other end (14) is the transducing signal test side, when the light of specific wavelength when coupling takes place with described microballoon resonator cavity (6) in grating region (2), just can detect the situation of change that export light from the sensor signal detection end of described thin-covering layer long-period fiber grating (3).
This biochemical sensor also comprises, described thin-covering layer long-period fiber grating (3) is to go to the optical fiber process HF acid solution corrosion back of coat to inscribe in the corrosion region pointwise with femtosecond laser, or with the corrosion of HF acid solution its grating region cladding diameter is attenuated with femtosecond laser pointwise inscription back.
This biochemical sensor also comprises, be that described microballoon resonator cavity (6) has an operation microbot (9), the diameter of described microballoon resonator cavity is 50 to 70 microns, and zeolite molecular sieve film (5) thickness that described nano-pore zeolite coating is broadcast mill is 5 to 10 microns, and average pore size is less than 1 nanometer.
This biochemical sensor comprises that also described operation microbot (9) passes described micropore groove (7).
This biochemical sensor also comprises, is that described microballoon resonator cavity (6) is positioned at the rear portion of grating region (2), and the equatorial plane of plain line of the cylindrical of described thin-covering layer long-period fiber grating (3) and described microballoon resonator cavity (6) is on same surface level.
This biochemical sensor also comprises, is that the described thin-covering layer long-period fiber grating (3) and the spacing of described microballoon resonator cavity (6) can be by micropore groove (7) adjustings, and both spacings are 50 to 200 nanometers.
Description of drawings
The present invention is further detailed explanation below in conjunction with drawings and embodiments.
Fig. 1 is an one-piece construction synoptic diagram of the present invention.
Fig. 2 is the shape synoptic diagram of corrosion back long period fiber grating.
Fig. 3 is the microballoon resonator cavity that is coated with zeolite membrane.
Fig. 4 is the structure vertical view of carrying silicon chip.
Fig. 5 is the detection synoptic diagram of sensor.
Embodiment
Thin-covering layer long-period fiber grating is that cladding diameter is the grating of 102 μ m, and the thin-covering layer long-period fiber grating after the corrosion (3) becomes certain taper shape (10), and grating region (2) is main taper portion.
The little shank diameter of band optical fiber is the microballoon of 60 μ m, and little handle is that the bottom diameter is the bar (9) that 20 μ m have certain taper, as shown in Figure 3.
The thickness of the zeolite molecular sieve plated film in the nano-pore zeolite coating is 2.5 μ m.Fig. 3 is for being coated with the microballoon resonator of zeolite coated film (5).
Silicon chip, as shown in Figure 4, the A/F of a V groove (4) of location thin-covering layer long-period fiber grating is 146.79 μ m, the A/F of the 2nd V groove (8) of location microballoon is 70.89 μ m.
Locate in flat (12) of the 2nd V groove (8) then, carve micropore groove (7) with 355nm laser, the width of groove is 22 μ m, and the center line of front end and first microflute (4) flat (11) is tangent, flute length 200 μ m, as shown in Figure 5.
Infrared optical fiber portion (3) branch of thin-covering layer long-period fiber grating is dropped in the first V-type groove (4), the cylindrical of optical fiber and groove inwall are tangent, ultraviolet glue on the part point that blocks, irradiation 6min solidifies it under uviol lamp, after the curing fiber grating is connected in the test macro of being made up of tunable laser source and light intensity detector.
Coat a little ultraviolet glue in the microballoon resonator cavity (6) and the junction of microbot (9), the microbot of microballoon is inserted in the micropore groove (7) at microscopically by the microoperation of light tweezer, make the equatorial plane of the plain line of cylindrical of optical fiber and ball tangent, both are in same surface level, microballoon resonator cavity (6) places the rear portion of grating region (2), microballoon is moved along micropore groove (7), while is according to the demonstration of detector, make both reach the optimum coupling state, promptly when resonance peak was minimum, the ultraviolet glue with ultra violet lamp ball and microbot junction was solidificated on the carrying substrates it then.Sensor main body part synoptic diagram after the assembling of location as shown in Figure 1.
When sensor of the present invention being used in the environment of chemistry, biomolecule concentration of testing environment, wavelength continually varying incident light is when the incident end (13) of grating enters into the coupled zone of resonator cavity and grating, the light of some specific wavelength forms whispering gallery modes in microballoon resonator cavity (6), " transmissivity-wavelength " curve of the spectrum of output terminal (14) output light will produce a series of resonance absorption bands, and the wavelength of these resonant belt correspondences is very responsive to the variations in refractive index of zeolite coatings.When in the optics microballoon resonator absorption environment during certain material molecule, the refractive index of zeolite rete changes, and variation has also taken place the optical wavelength that produces whispering gallery modes.To the analytical calculation of its spectrum change, can obtain the change amount of refractive index, and the change of refractive index answers material molecule concentration corresponding with environmental facies, can detect the concentration of surveying chemistry, biomolecule in the gas thus.
Claims (6)
1. biochemical sensor based on thin-covering layer long-period fiber grating coupling resonant cavity, it is characterized in that, described biochemical sensor is by thin-covering layer long-period fiber grating (3), the microballoon resonator cavity (6) and the carrying silicon chip (1) that are coated with nano-pore zeolite coated film are formed, wherein, described thin-covering layer long-period fiber grating (3) is positioned on the V groove (4) that carries in the silicon chip (1), microballoon resonator cavity (6) is positioned on the micropore groove (7) that carries in the silicon chip (1), one end of described thin-covering layer long-period fiber grating (3) is light source input end (13), the other end (14) is the transducing signal test side, when the light of specific wavelength when coupling takes place with described microballoon resonator cavity (6) in grating region (2), just can detect the situation of change that export light from the sensor signal detection end of described thin-covering layer long-period fiber grating (3).
2. chemical biosensor according to claim 1, it is characterized in that described thin-covering layer long-period fiber grating (3) is to go to the optical fiber process HF acid solution corrosion back of coat to inscribe in the corrosion region pointwise with femtosecond laser, or with the corrosion of HF acid solution its grating region cladding diameter is attenuated with femtosecond laser pointwise inscription back.
3. chemical biosensor according to claim 1, it is characterized in that described microballoon resonator cavity (6) has an operation microbot (9), the diameter of described microballoon resonator cavity is 50 to 70 microns, zeolite molecular sieve film (5) thickness of described nano-pore zeolite coated film is 5 to 10 microns, and average pore size is less than 1 nanometer.
4. chemical biosensor according to claim 3 is characterized in that described operation microbot (9) passes described micropore groove (7).
5. new chemical biology sensor according to claim 1, it is characterized in that described microballoon resonator cavity (6) is positioned at the rear portion of grating region (2), and the equatorial plane of plain line of the cylindrical of described thin-covering layer long-period fiber grating (3) and described microballoon resonator cavity (6) is on same surface level.
6. chemical biosensor according to claim 1 is characterized in that the described thin-covering layer long-period fiber grating (3) and the spacing of described microballoon resonator cavity (6) can be by micropore groove (7) adjustings, and both spacings are 50 to 200 nanometers.
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Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102012366A (en) * | 2010-11-03 | 2011-04-13 | 北京理工大学 | Zeolite membrane optical fiber resonator-based biochemical sensor |
| CN102095759A (en) * | 2010-11-18 | 2011-06-15 | 大连理工大学 | Sensor of gas harmful to neuron based on Y-type zeolite film material |
| CN103439262A (en) * | 2013-07-16 | 2013-12-11 | 深圳大学 | Volatile organic compound detection device based on optical fiber evanescent field and manufacturing method thereof |
| CN104359858A (en) * | 2014-12-02 | 2015-02-18 | 山东省科学院生物研究所 | Method for quickly regulating refractive index sensitivity of long period fiber gratings |
| CN104359859A (en) * | 2014-12-02 | 2015-02-18 | 山东省科学院生物研究所 | Method for improving refractive index detecting sensitivity of long period fiber gratings |
| TWI485385B (en) * | 2012-10-31 | 2015-05-21 | Univ Nat Pingtung Sci & Tech | A solution detector |
| CN106052727A (en) * | 2016-05-26 | 2016-10-26 | 中国计量大学 | Senor device based on fiber miniature Fabry-Perot cavity |
| CN108801851A (en) * | 2018-05-25 | 2018-11-13 | 南京邮电大学 | A kind of micro liquid concentration sensor of thin-walled column symmetry microcavity |
| CN108844655A (en) * | 2018-04-20 | 2018-11-20 | 武汉中航传感技术有限责任公司 | A kind of fiber grating Temperature Humidity Sensor |
| WO2019122006A1 (en) * | 2017-12-19 | 2019-06-27 | Vn Jr-Ip Limited | A sensor comprising a nanoporous material and method for detecting an analyte using the sensor |
| CN110441869A (en) * | 2019-08-02 | 2019-11-12 | 福州腾景光电科技有限公司 | A kind of precise adjustable optical fibre coupler |
| CN111649840A (en) * | 2020-05-08 | 2020-09-11 | 上海交通大学 | Optical resonator low-temperature sensor and preparation and packaging methods thereof |
| CN112945904A (en) * | 2021-01-22 | 2021-06-11 | 中新苏州工业园区清城环境发展有限公司 | Hydrocarbon optical fiber chemical detection probe and preparation method thereof |
| CN113003531A (en) * | 2021-02-08 | 2021-06-22 | 清华大学 | Device for realizing frequency regulation and control |
| CN114136348A (en) * | 2021-11-15 | 2022-03-04 | 复旦大学 | Nano-pore fiber Bragg grating sensor and preparation method thereof |
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2009
- 2009-12-25 CN CN200910243117A patent/CN101762564A/en active Pending
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102012366A (en) * | 2010-11-03 | 2011-04-13 | 北京理工大学 | Zeolite membrane optical fiber resonator-based biochemical sensor |
| CN102095759A (en) * | 2010-11-18 | 2011-06-15 | 大连理工大学 | Sensor of gas harmful to neuron based on Y-type zeolite film material |
| TWI485385B (en) * | 2012-10-31 | 2015-05-21 | Univ Nat Pingtung Sci & Tech | A solution detector |
| CN103439262A (en) * | 2013-07-16 | 2013-12-11 | 深圳大学 | Volatile organic compound detection device based on optical fiber evanescent field and manufacturing method thereof |
| CN104359858A (en) * | 2014-12-02 | 2015-02-18 | 山东省科学院生物研究所 | Method for quickly regulating refractive index sensitivity of long period fiber gratings |
| CN104359859A (en) * | 2014-12-02 | 2015-02-18 | 山东省科学院生物研究所 | Method for improving refractive index detecting sensitivity of long period fiber gratings |
| CN106052727A (en) * | 2016-05-26 | 2016-10-26 | 中国计量大学 | Senor device based on fiber miniature Fabry-Perot cavity |
| CN106052727B (en) * | 2016-05-26 | 2024-04-02 | 中国计量大学 | Sensor device based on optical fiber miniature Fabry-Perot cavity |
| WO2019122006A1 (en) * | 2017-12-19 | 2019-06-27 | Vn Jr-Ip Limited | A sensor comprising a nanoporous material and method for detecting an analyte using the sensor |
| CN108844655A (en) * | 2018-04-20 | 2018-11-20 | 武汉中航传感技术有限责任公司 | A kind of fiber grating Temperature Humidity Sensor |
| CN108801851A (en) * | 2018-05-25 | 2018-11-13 | 南京邮电大学 | A kind of micro liquid concentration sensor of thin-walled column symmetry microcavity |
| CN110441869A (en) * | 2019-08-02 | 2019-11-12 | 福州腾景光电科技有限公司 | A kind of precise adjustable optical fibre coupler |
| CN111649840A (en) * | 2020-05-08 | 2020-09-11 | 上海交通大学 | Optical resonator low-temperature sensor and preparation and packaging methods thereof |
| CN111649840B (en) * | 2020-05-08 | 2021-09-21 | 上海交通大学 | Optical resonator low-temperature sensor and preparation and packaging methods thereof |
| CN112945904A (en) * | 2021-01-22 | 2021-06-11 | 中新苏州工业园区清城环境发展有限公司 | Hydrocarbon optical fiber chemical detection probe and preparation method thereof |
| CN113003531A (en) * | 2021-02-08 | 2021-06-22 | 清华大学 | Device for realizing frequency regulation and control |
| CN113003531B (en) * | 2021-02-08 | 2022-06-28 | 清华大学 | Device for realizing frequency regulation and control |
| CN114136348A (en) * | 2021-11-15 | 2022-03-04 | 复旦大学 | Nano-pore fiber Bragg grating sensor and preparation method thereof |
| CN114136348B (en) * | 2021-11-15 | 2023-08-01 | 复旦大学 | Nanopore optical fiber Bragg grating sensor and preparation method thereof |
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Open date: 20100630 |