CN101760744B - Separating and recycling device of multiple kinds of chemical liquid medicines - Google Patents
Separating and recycling device of multiple kinds of chemical liquid medicines Download PDFInfo
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- CN101760744B CN101760744B CN2008102301027A CN200810230102A CN101760744B CN 101760744 B CN101760744 B CN 101760744B CN 2008102301027 A CN2008102301027 A CN 2008102301027A CN 200810230102 A CN200810230102 A CN 200810230102A CN 101760744 B CN101760744 B CN 101760744B
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Abstract
The invention relates to a technology of recycling multiple kinds of chemical liquid medicines applied in the etching part during production process of semiconductor, specifically to a separating and recycling device of multiple kinds of chemical liquid medicines which is capable of separating multiple kinds of chemical liquid medicines and preparing the recycled chemical liquid medicine to recyclable concentration to be recycled; and the technology can greatly reduce the chemical liquid medicine waste during the etching process. The device is mainly provided with a liquid medicine cup, a rotating motor, a guide motor, a recycled liquid tank and a regenerative liquid tank; the guide motor is connected with a segment of pipeline, the upper end of the pipeline is communicated with the liquid medicine cup, and the lower end of the pipeline is rotated in different directions by the guide motor corresponding to the center of at least one collection cup opening at the lower side; the inlets of the recycled liquid tank and the regenerative liquid tank are connected with each other through the pipeline, a pipeline is inserted at the outlet of the regenerative liquid tank, and the other end of the pipeline is stretched to the upper side of the liquid medicine cup corresponding to a wafer. In the invention, the chemicals in different recycle container chemical liquid medicine tanks are recycled according to the developing solution through recycling and switching devices of different liquid medicines.
Description
Technical field
The present invention is applied in the manufacture of semiconductor etched portions at the technology that the number of chemical soup is recycled, and is specially one kind of multiple chemical liquid medicines and separates, reuses device.
Background technology
With the slot type etching is the conventional wet etching of representative, and etching precision is difficult to control, because the contamination of solvent particulate causes high defect level, the wafer that can not be used for the little feature of major diameter is processed.And the monolithic etching can be avoided the contamination of solvent particulate, but can produce a large amount of chemical waste fluids, is blank aspect utilizing in chemical recovery.
Summary of the invention
For realizing the repeated use of chemical, the object of the present invention is to provide one kind of multiple chemical liquid medicines to separate, reuse device, can be with the number of chemical separating liquid medicine, again the chemical liquid proportioning that reclaims is become reusable concentration, realize utilizing, this technology can significantly reduce the waste of chemical liquid in the etching process again.
Technical scheme of the present invention is:
One kind of multiple chemical liquid medicines separate, reuse device, this device mainly is provided with liquid medicine cup, rotation motor, guide motor, recovery flow container, regeneration flow container, guide motor is connected with one section pipeline, the pipeline upper end is communicated with liquid medicine cup, and the pipeline lower end is corresponding with at least one following collection rim of a cup center by the different direction of guide motor rotation; Reclaim flow container and link to each other by pipeline with an inlet of regeneration flow container, the outlet of regeneration flow container is inserted with pipeline, and this pipeline the other end is to the liquid medicine cup top, and is corresponding with wafer.
Described number of chemical product separating liquid medicine, repeated use device also comprise the proportioning flow container, mend sour controller, and another inlet of regeneration flow container links to each other with the proportioning flow container by pipeline, on this pipeline pump is housed; The input terminus of mending sour controller places by transmitter and reclaims flow container, and the output terminal of mending sour controller connects described pump, the unlatching of control pump or close.
Described number of chemical product separating liquid medicine, reuse device, pump is installed reclaiming on the pipeline that the inlet of flow container with the regeneration flow container link to each other.
Described number of chemical product separating liquid medicine, repeated use device are equipped with pump on the pipeline that the outlet of regeneration flow container plugs.
Described number of chemical product separating liquid medicine, reuse device, blow-off pipe is installed reclaiming on the pipeline that the inlet of flow container with the regeneration flow container link to each other, on this blow-off pipe, waste valve is installed.
Described number of chemical product separating liquid medicine, repeated use device, collection cups is three, and first collection cups is communicated with a recovery flow container, and second collection cups reclaims flow container with another and is communicated with, and the 3rd collection cups connects blow-off pipe.
Described number of chemical product separating liquid medicine, repeated use device, the inboard of liquid medicine cup is provided with rotation motor, and wafer-supporting platform is installed on the axle of rotation motor, and wafer is placed on the wafer-supporting platform.
The invention has the beneficial effects as follows:
1, be that the conventional wet etching yield rate of representative is low with the slot type etching, and the monolithic etching mode of using the whizzer rotation causes a large amount of chemical wastes, apparatus of the present invention can realize that chemical liquid utilizes again.This device mainly be provided with wafer-supporting platform (CHUCK), rotation motor, recovery chemical liquid medicine liquid tank, mend sour controller, chemical liquid pump etc.The present invention is by the recovery shifter of the different soups in the bottom of being located at liquid medicine cup (CUP), and chemical is belonged to during different returnable chemical liquids irritates according to developing solution.The repeated use of number of chemical product is by the chemical compensating controller, and the concentration that detects corresponding soup realizes.
2, the present invention utilizes guide motor to connect the separation of different pipelines realizations to chemical liquid, mend the chemical liquid in the sensor detecting medicine liquid tank of sour controller, regulate liquor strength by the soup in two pump proportioning flow containers again, re-use the sprinkling once more that the 3rd pump realizes reusing soup.
Description of drawings
Fig. 1 is a structural representation of the present invention.Among the figure, 1, wafer; 2, wafer-supporting platform (CHUCK); 3, liquid medicine cup (CUP); 4, rotation motor; 5, guide motor; 6, mend sour controller; 7, pump I; 8, pump II; 9, pump III; 10, waste valve; 11, proportioning flow container; 12, reclaim flow container B; 13, regeneration flow container; 14, reclaim flow container A; 15, collection cups; 16, pipeline.
Embodiment:
As shown in Figure 1, number of chemical product separating liquid medicine of the present invention, repeated use device mainly comprise: wafer 1, wafer-supporting platform (CHUCK) 2, liquid medicine cup (CUP) 3, rotation motor 4, guide motor 5, the sour controller 6 of benefit, pump I7, pump II8, pump III9, waste valve 10, proportioning flow container 11, recovery flow container B12, regeneration flow container 13, recovery flow container A14 etc., and concrete structure is as follows:
Among the present invention, the effect of reclaiming flow container A14 is to collect and the different soup of recovery flow container B12; Like this, can link to each other by pipeline, pump and blow-off pipe are housed on this pipeline reclaiming the inlet of flow container A14 with regeneration flow container 13.At this moment, the transmitter of mending sour controller can be placed and reclaim flow container A14, transmitter inputs to the strength of fluid value of measuring and mends sour controller, replenishes soup by proportioning flow container 11 in regeneration flow container 13.As required, more recovery flow container can also be set, realize the separation and the repeated use of number of chemical product soup.
Working process of the present invention is as follows:
The liquid medicine cup 3 inboard rotation motors 4 that are provided with drive wafer 1 rotation of installing on the wafer-supporting platform 2, and soup is sprayed onto wafer 1 in the top, carry out the coating of soup.Guide motor 5 drives rotatable pipeline 16, pipeline 16 upper ends connect the bottom opening of liquid medicine cup 3, the pipeline lower end can be corresponding with 15 mouthfuls of centers of following three collection cups by the different direction of guide motor 5 rotations, and the chemical liquid medicines that liquid medicine cup 3 is collected is input in the collection cups 15 by pipeline.Collect the rim of a cup diameter than pipeline 16 slightly larger in diameter, can prevent effectively that liquid from spilling.Reclaiming flow container B12 is a transferring device, mend sour controller 6 and measure the strength of fluid that reclaims flow container B12 the inside, pump I7 squeezes into regeneration flow container 13 to the liquid that reclaims flow container B12, the benefit acid controller 6 that is connected with pump II8 is squeezed into the liquid in the proportioning flow container 11 in the regeneration flow container 13 by conversion control pump II8, and the flow container 13 of regenerating this moment has been reusable pharmaceutical chemicals.At last, by pump III9 the pharmaceutical chemicals in the regeneration flow container 13 is sprayed onto on the wafer 1, realizes recycling, discarded pharmaceutical chemicals is discharged by waste valve 10 controls.
Claims (2)
1. one kind of multiple chemical liquid medicines separate, reuse device, it is characterized in that: this device mainly is provided with liquid medicine cup, rotation motor, guide motor, recovery flow container, regeneration flow container, guide motor is connected with one section pipeline, the pipeline upper end is communicated with liquid medicine cup, and the pipeline lower end is corresponding with at least one following collection rim of a cup center by the different direction of guide motor rotation; Reclaim flow container and link to each other by pipeline with an inlet of regeneration flow container, the outlet of regeneration flow container is inserted with pipeline, and this pipeline the other end is to the liquid medicine cup top, and is corresponding with wafer;
Also comprise the proportioning flow container, mend sour controller, another inlet of regeneration flow container links to each other with the proportioning flow container by pipeline, on this pipeline pump is housed; The input terminus of mending sour controller places by transmitter and reclaims flow container, and the output terminal of mending sour controller connects described pump, the unlatching of control pump or close;
The inboard of liquid medicine cup is provided with rotation motor, and wafer-supporting platform is installed on the axle of rotation motor, and wafer is placed on the wafer-supporting platform;
Pump is installed reclaiming on the pipeline that the inlet of flow container with the regeneration flow container link to each other, exports on the pipeline that plugs at the regeneration flow container pump is installed.
According to the described number of chemical product of claim 1 separating liquid medicine, reuse device, it is characterized in that: blow-off pipe is installed reclaiming on the pipeline that the inlet of flow container with the regeneration flow container link to each other, on this blow-off pipe, waste valve is installed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008102301027A CN101760744B (en) | 2008-12-24 | 2008-12-24 | Separating and recycling device of multiple kinds of chemical liquid medicines |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008102301027A CN101760744B (en) | 2008-12-24 | 2008-12-24 | Separating and recycling device of multiple kinds of chemical liquid medicines |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101760744A CN101760744A (en) | 2010-06-30 |
| CN101760744B true CN101760744B (en) | 2011-07-20 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2008102301027A Active CN101760744B (en) | 2008-12-24 | 2008-12-24 | Separating and recycling device of multiple kinds of chemical liquid medicines |
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI418657B (en) * | 2011-09-16 | 2013-12-11 | Grand Plastic Technology Co Ltd | An apparatus for distributing recycle glass etching solution |
| CN103091044A (en) * | 2011-10-27 | 2013-05-08 | 沈阳芯源微电子设备有限公司 | Automatic detection and recovery device for chemical leakage |
| CN107546148A (en) * | 2016-06-28 | 2018-01-05 | 上海新昇半导体科技有限公司 | A kind of semiconductor wafer wet clean equipment |
| CN106399984B (en) * | 2016-08-30 | 2019-06-25 | 嘉善天晟精密铸件有限公司 | A kind of metal casting surface passivation device and method |
| CN106399999B (en) * | 2016-08-30 | 2019-07-16 | 嘉善天晟精密铸件有限公司 | A kind of recycling component for metal casting surface treatment |
| CN106399998B (en) * | 2016-08-30 | 2019-03-12 | 嘉善天晟精密铸件有限公司 | A kind of metal casting surface passivation method |
| CN106245010B (en) * | 2016-08-30 | 2019-02-19 | 嘉善天晟精密铸件有限公司 | A kind of metal casting surface passivation device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2506655Y (en) * | 2001-10-11 | 2002-08-21 | 财团法人工业技术研究院 | Chemical liquid recovery regenerator for rotary etching machine |
| CN2762864Y (en) * | 2005-01-28 | 2006-03-08 | 云南昆船设计研究院 | Solid/liquid separator |
| CN201330281Y (en) * | 2008-12-24 | 2009-10-21 | 沈阳芯源微电子设备有限公司 | Multi-chemical separation and recycling device |
-
2008
- 2008-12-24 CN CN2008102301027A patent/CN101760744B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2506655Y (en) * | 2001-10-11 | 2002-08-21 | 财团法人工业技术研究院 | Chemical liquid recovery regenerator for rotary etching machine |
| CN2762864Y (en) * | 2005-01-28 | 2006-03-08 | 云南昆船设计研究院 | Solid/liquid separator |
| CN201330281Y (en) * | 2008-12-24 | 2009-10-21 | 沈阳芯源微电子设备有限公司 | Multi-chemical separation and recycling device |
Non-Patent Citations (2)
| Title |
|---|
| JP特开2006-315931A 2006.11.24 |
| JP特开2008-285733A 2008.11.27 |
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| CN101760744A (en) | 2010-06-30 |
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Address after: 110168 No. 16 Feiyun Road, Hunnan District, Shenyang City, Liaoning Province Patentee after: Shenyang Core Source Microelectronic Equipment Co., Ltd. Address before: 110168 No. 16 Feiyun Road, Hunnan New District, Shenyang City, Liaoning Province Patentee before: Shenyang Siayuan Electronic Equipment Co., Ltd. |
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