CN101753146B - Microcomputer inductive capacitance-to-voltage conversion device - Google Patents
Microcomputer inductive capacitance-to-voltage conversion device Download PDFInfo
- Publication number
- CN101753146B CN101753146B CN 200810183030 CN200810183030A CN101753146B CN 101753146 B CN101753146 B CN 101753146B CN 200810183030 CN200810183030 CN 200810183030 CN 200810183030 A CN200810183030 A CN 200810183030A CN 101753146 B CN101753146 B CN 101753146B
- Authority
- CN
- China
- Prior art keywords
- electric capacity
- diverter switch
- integrator
- difference
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Abstract
The invention provides a microcomputer inductive capacitance-to-voltage conversion device which is used to convert the sensed analog voltage on a microcomputer electric component into digital signals, and comprises an analog-to-digital converter, a reference voltage circuit and a controller; the conversion device generates the digital signals by integrating the switch signals generated by the controller with the reference voltage generated by the reference voltage circuit through an integrator and a comparator of the analog-to-digital converter, and simultaneously, can be integrated into a single chip together with the microcomputer electric component to form a microcomputer electric system single chip.
Description
Technical field
The present invention relates to a kind of conversion equipment of microcomputer inductive capacitance-to-voltage, particularly convert digital signal to through analog-to-digital converter.
Background technology
In recent years; Micro electronmechanical (Micro Electro Mechanical Systems; MEMS) be widely used in different consumer electronics field, the Wii game machine of wherein attracting attention most that has Nintendo to release recently, its characteristic is the 3-axis acceleration sensor that is the basis with the MEMS technology; And the cooperation wireless controller, to reach the entertainment effect of height novelty.
MEMS is the system of an intelligent microminiaturization; Usually have sensor, processor or actuator; Therefore in single wafer or polycrystalline sheet, integrate the function of a plurality of electronics, machinery, optics, chemistry, biology, magnetics, can be applied to manufacturing industry, automation, information and communication, aerospace industry, communications and transportation, building construction, environmental protection, farming, forestry, fishing animal husbandry.
For the function of bringing into play; Need suitable analog-to-digital converter (Analog-to-digital converter; ADC) analog output signal with MEMS converts digital signal to; Carry out appropriate data for follow-up digital processing unit and handle, and ∑-Δ (Sigma-Delta) ADC is the wherein normal ADC that uses.
Fig. 1 is the functional block diagram of microcomputer inductive capacitance-to-voltage conversion equipment in the prior art.As shown in Figure 1; Microcomputer inductive capacitance-to-voltage conversion equipment 1 comprises micro electronmechanical sensor 10, sensing amplifier 20, bias circuit 30 and ADC 40; Wherein sensing amplifier 20 carries out processing and amplifying with the output signal of micro electronmechanical sensor 10; Convert digital signal to through ADC 40 again, and bias circuit 30 provides suitable bias voltage to sensing amplifier 20 and ADC 40.
Fig. 2 be Fig. 1 than detailed maps; The electrical model of wherein micro electronmechanical sensor 10 is to represent with micro electronmechanical capacitor C S and bias voltage input impedance R; Micro electronmechanical capacitor C S is about 50f because of external environment changes the capacitance variations Δ CS that is caused; And be under the 10V at bias voltage Vbias, the about 1mV of change in voltage Δ VCS of micro electronmechanical capacitor C S inputs to ADC 40 after sensing amplifier 20 amplifies.Framework with single order ∑-Δ ADC is an example; ADC 40 has first order change-over circuit 41 and comparator 45; Wherein first order change-over circuit 41 comprise subtracter 42, adder 43, delayer 44 and digital to analog converter (Digital-to-analog converter, DAC) 46, DAC 46 converts the digital output voltage V out of comparator 45 to analog signal; Take out the difference of output signal of output signal and the DAC 46 of sensing amplifiers 20 through subtracter 42; Add the output signal of delayer 44 again through adder 43, and export to delayer 44, to accomplish whole ADC operation.Because of ∑-Δ ADC is a known technology, in this only making an abstract property explanation.
In addition, in general ∑-Δ ADC framework, for improving the resolution of ADC, usually use the framework of multi-stage serial connection, promptly the output signal of first order change-over circuit 41 can send the change-over circuit of next stage to, and the transducer of afterbody just is connected to comparator.
Yet; The bias circuit (approximately 10V more than) of the shortcoming of prior art for needing to produce high-tension bias voltage; Improving sensing sensitivity, because of the sensitivity of the MEMS rising along with the bias voltage value improves, for general integrated circuit manufacture process to MEMS; Have quite harsh challenge, and be not easy to be incorporated in other existing low voltage operated function square.
Another shortcoming of prior art is for needing high-quality amplifier; So that MEMS that will about 1mV output conversion of signals is in the accessible voltage range of ADC; Put this amplifier and need take sizable chip area and build, make chip cost raise, biasing (Offset) of amplifier simultaneously and gain (Gain); Noise (Noise) all can increase the error of signal.
Therefore, need a kind ofly can be directly the low-level output conversion of signals of MEMS to be become the conversion equipment of digital signal, save sensing amplifier and bias circuit, and then dwindle chip area through ADC.
Summary of the invention
The main purpose of the embodiment of the invention is to provide a kind of conversion equipment of microcomputer inductive capacitance-to-voltage; Utilize analog-to-digital converter, reference voltage circuit, a plurality of diverter switch and controller; Convert the induced voltage on the micro electronmechanical electric capacity to digital signal, and do not need extra bias circuit and the high-quality sensing amplifier of putting high pressure of building, wherein this analog-to-digital converter has plural number level integrator and comparator; Utilize reference voltage circuit to produce required reference voltage; Cooperate the switching signal that controller produced, diverter switch is carried out the diverter switch operation, to produce digital signal with respect to microcomputer inductive capacitance-to-voltage.
Another purpose of the embodiment of the invention is to provide a kind of conversion equipment of microcomputer inductive capacitance-to-voltage; Utilize the difference type analog-to-digital converter of tool difference integrator; Convert microcomputer inductive capacitance-to-voltage to digital signal with the difference mode, to improve the antinoise interference capability.
Another purpose of the embodiment of the invention is to provide a kind of conversion equipment of microcomputer inductive capacitance-to-voltage; Can be with a plurality of microcomputer inductive capacitance-to-voltages; Utilize the difference type analog-to-digital converter of tool difference integrator, convert digital signal to, to save chip area with the difference mode; Improve integration function, and then the expanding application field.
The embodiment of the invention provides a kind of conversion equipment of microcomputer inductive capacitance-to-voltage; Microcomputer inductive capacitance-to-voltage in order to an electric component of microcomputer converts a digital signal to; Wherein, Said conversion equipment comprises a first order integrator, a comparator and at least one second level integrator, and wherein, said first order integrator produces an output signal; Said second level integrator receives the said output signal of said first order integrator and produces an output signal, and said comparator receives the said output signal of said second level integrator and produces digital signal;
Wherein, Said second level integrator comprises a first integral electric capacity and a first integral amplifier; One end of said first integral electric capacity and an inverting input of said first integral amplifier are connected to the input signal of said second level integrator; One non-inverting input of said first integral amplifier is a ground connection, and an other end of said first integral electric capacity and an output of said first integral amplifier are connected to the said output signal of said second level integrator.
Wherein, Preferably; Said first order integrator comprises an input module, a charge and discharge capacitance, a third level integrator, a reference circuit, a controller, one first diverter switch, one second diverter switch, one the 3rd diverter switch, one the 4th diverter switch and one the 5th diverter switch; Said input module comprises an equivalent micro electronmechanical electric capacity of said electric component of microcomputer; One end of the micro electronmechanical electric capacity of said equivalence is connected to a first node; One other end of the micro electronmechanical electric capacity of said equivalence is connected to a Section Point; Said reference circuit produces one first reference voltage, a low reference voltage and a high reference voltage, and said controller produces one first switching signal and a second switch signal, and the high levels of the high levels of said first switching signal and said second switch signal does not overlap; Said first switching signal is controlled said first diverter switch, said second diverter switch and said the 4th diverter switch; Said the 3rd diverter switch of said second switch signal controlling and said the 5th diverter switch, said third level integrator comprise a second integral electric capacity and a second integral amplifier, and an end of said second integral electric capacity is connected to an output of said second integral amplifier; Said output produces the said output signal of said first order integrator; One other end of said second integral electric capacity is connected to an inverting input of said second integral amplifier, and a non-inverting input of said second integral amplifier is a ground connection, and an end of said charge and discharge capacitance is connected to said first node; One other end of said charge and discharge capacitance is connected to said high reference voltage through said first diverter switch when said first switching signal is high levels; And when said second switch signal is high levels, be connected to said low reference voltage through said first diverter switch, and an end of said second diverter switch is a ground connection, an other end of said second diverter switch is connected to said first node; One end of said the 3rd diverter switch is connected to said first node, and an other end of said the 3rd diverter switch is connected to the said inverting input of said second integral amplifier; Said input module further comprises one first electric capacity and one second electric capacity; One end ground connection of said first electric capacity; One other end of said first electric capacity is received a Section Point; One end of said second electric capacity is a ground connection; One other end of said second electric capacity is connected to said first node, and said Section Point is connected to said first reference voltage via said the 4th diverter switch when said first switching signal is high levels, and said Section Point also is connected to ground connection via said the 5th diverter switch when said second switch signal is high levels.
The embodiment of the invention provides a kind of conversion equipment of microcomputer inductive capacitance-to-voltage; Microcomputer inductive capacitance-to-voltage in order to an electric component of microcomputer converts a digital signal to; Wherein, Said conversion equipment comprises a first order difference integrator, a balance comparator and at least one second level difference integrator, and wherein, said first order difference integrator produces a pair of difference output signal; Said second level difference integrator receive said first order difference integrator this to difference output signal and produce a pair of difference output signal, said balance comparator receive said second level difference integrator this to difference output signal and produce digital signal;
Wherein, Said second level difference integrator comprises a first integral electric capacity, a second integral electric capacity and a third level difference integral amplifier; One inverting input of one end of said first integral electric capacity and said third level difference integral amplifier is connected to this rp input signal to the difference input signal of said second level difference integrator; One reversed-phase output of one other end of said first integral electric capacity and said third level difference integral amplifier is connected to this reversed-phase output signal to difference output signal of said second level difference integrator; One non-inverting input of one end of said second integral electric capacity and said third level difference integral amplifier is connected to this noninverting input signal to the difference input signal of said second level difference integrator, and a noninverting output of an other end of said second integral electric capacity and said third level difference integral amplifier is connected to this noninverting output signal to difference output signal of said second level difference integrator.
Wherein, preferably, said first order difference integrator comprises:
One reference circuit produces one first reference voltage, a bias voltage, a low reference voltage and a high reference voltage;
One controller produces one first switching signal and a second switch signal, and the high levels of the high levels of said first switching signal and said second switch signal does not overlap;
One first digital to analog converter; Comprise one first charge and discharge capacitance, one first diverter switch, one second diverter switch; Said first diverter switch is controlled by said first switching signal; Said second diverter switch is by said first switching signal and the control of said second switch signal controlling; One end of said first diverter switch is connected to a first node, and an other end of said first diverter switch is connected to said bias voltage, and said first diverter switch is connected to said bias voltage during for high levels in said first switching signal; One end of said first charge and discharge capacitance is connected to said first node; Said first charge and discharge capacitance an other end be connected to an end of said second diverter switch, an other end of said second diverter switch is connected to said low reference voltage during for high levels in said first switching signal, the said other end of said second diverter switch is connected to said high reference voltage during for high levels at said second switch signal;
One second digital to analog converter; Comprise one second charge and discharge capacitance, one the 3rd diverter switch, one the 4th diverter switch; Said the 3rd diverter switch and said the 4th diverter switch are controlled by said first switching signal; One end of said the 3rd diverter switch is connected to one the 3rd node; One other end of said the 3rd diverter switch is connected to said bias voltage, and an end of said second charge and discharge capacitance is connected to said the 3rd node, and an other end of said second charge and discharge capacitance is connected to an end of said the 4th diverter switch; One other end of said the 4th diverter switch is connected to said low reference voltage during for high levels in said first switching signal, and the said other end of said the 4th diverter switch is connected to said high reference voltage during for high levels at said second switch signal;
One difference integrator; Have an inverting input, a non-inverting input, a reversed-phase output and a noninverting output; Said difference integrator comprises a first integral electric capacity, a second integral electric capacity and a fourth stage difference integral amplifier; One inverting input of one end of said first integral electric capacity and said fourth stage difference integral amplifier is connected to the said inverting input of said difference integrator; One reversed-phase output of one other end of said first integral electric capacity and said fourth stage difference integral amplifier is connected to the said reversed-phase output of said difference integrator; One non-inverting input of one end of said second integral electric capacity and said fourth stage difference integral amplifier is connected to the said non-inverting input of said difference integrator, and a noninverting output of an other end of said second integral electric capacity and said fourth stage difference integral amplifier is connected to the said noninverting output of said difference integrator;
One first node controller; Comprise one the 5th diverter switch; Said the 5th diverter switch is by said second switch signal controlling; One end of said the 5th diverter switch is connected to said first node, and an other end of said the 5th diverter switch is connected to the said inverting input of said difference integrator;
One Section Point controller; Comprise one the 7th diverter switch and one the 8th diverter switch; Said the 7th diverter switch is controlled by said first switching signal, and said the 8th diverter switch is by said second switch signal controlling, and an end of said the 7th diverter switch and an end of said the 8th diverter switch are connected to a Section Point; One other end of said the 7th diverter switch is connected to said first reference voltage, and an other end of said the 8th diverter switch is connected to said bias voltage;
One the 3rd Node Controller; Comprise one the 6th diverter switch; Said the 6th diverter switch is by said second switch signal controlling; One end of said the 6th diverter switch is connected to said the 3rd node, and an other end of said the 6th diverter switch is connected to the said non-inverting input of said difference integrator; And
One input module; Comprise an equivalent micro electronmechanical electric capacity of one first electric capacity, one second electric capacity and said electric component of microcomputer, an end of the micro electronmechanical electric capacity of said equivalence is connected to said first node, and an other end of the micro electronmechanical electric capacity of said equivalence is connected to said Section Point; One of said first electric capacity terminates to said first node; One other end of said first electric capacity is a ground connection, and an end of said second electric capacity is connected to said Section Point, and an other end of said second electric capacity is a ground connection.
The embodiment of the invention also provides a kind of conversion equipment of microcomputer inductive capacitance-to-voltage; Convert a digital signal in order to microcomputer inductive capacitance-to-voltage with a plurality of electric component of microcomputer; Wherein, Said conversion equipment comprises a first order difference integrator, a balance comparator and at least one second level difference integrator, and wherein, said first order difference integrator produces a pair of difference output signal; Said second level difference integrator receive said first order difference integrator this to difference output signal and produce a pair of difference output signal, said balance comparator receive said second level difference integrator this to difference output signal and produce said digital signal;
Wherein, Said second level difference integrator comprises a first integral electric capacity, a second integral electric capacity and a difference integral amplifier; One end of said first integral electric capacity and an inverting input of said difference integral amplifier are connected to this rp input signal to the difference input signal of said second level difference integrator; One other end of said first integral electric capacity and a reversed-phase output of said difference integral amplifier are connected to this reversed-phase output signal to difference output signal of said second level difference integrator; One end of said second integral electric capacity and a non-inverting input of said difference integral amplifier are connected to this noninverting input signal to the difference input signal of said second level difference integrator, and a noninverting output of an other end of said second integral electric capacity and said difference integral amplifier is connected to this noninverting output signal to difference output signal of said second level difference integrator.
Wherein, preferably, said first order difference integrator comprises:
One reference circuit produces one first reference voltage, a bias voltage, a low reference voltage and a high reference voltage;
One controller produces one first switching signal and a second switch signal, and the high levels of the high levels of said first switching signal and said second switch signal does not overlap;
One first digital to analog converter; Comprise one first charge and discharge capacitance, one first diverter switch, one second diverter switch; Said first diverter switch and said second diverter switch are controlled by said first switching signal; One end of said first diverter switch is connected to a first node; One other end of said first diverter switch is connected to said bias voltage, and an end of said first charge and discharge capacitance is connected to said first node, said first charge and discharge capacitance an other end be connected to an end of said second diverter switch; One other end of said second diverter switch is connected to said low reference voltage during for high levels in said first switching signal, and the said other end of said second diverter switch is connected to said high reference voltage during for high levels at said second switch signal;
One second digital to analog converter; Comprise one second charge and discharge capacitance, one the 3rd diverter switch, one the 4th diverter switch; Said the 3rd diverter switch and said the 4th diverter switch are controlled by said first switching signal; One end of said the 3rd diverter switch is connected to one the 3rd node; One other end of said the 3rd diverter switch is connected to said bias voltage, and an end of said second charge and discharge capacitance is connected to said the 3rd node, and an other end of said second charge and discharge capacitance is connected to an end of said the 4th diverter switch; One other end of said the 4th diverter switch is connected to said low reference voltage during for high levels at said second switch signal, and the said other end of said the 4th diverter switch is connected to said high reference voltage during for high levels in said first switching signal;
One third level difference integrator; Have an inverting input, a non-inverting input, a reversed-phase output and a noninverting output; Said third level difference integrator comprises a first integral electric capacity, a second integral electric capacity and a difference integral amplifier; One end of said first integral electric capacity and an inverting input of said difference integral amplifier are connected to the said inverting input of said third level difference integrator; One other end of said first integral electric capacity and a reversed-phase output of said difference integral amplifier are connected to the said reversed-phase output of said third level difference integrator; One end of said second integral electric capacity and a non-inverting input of said difference integral amplifier are connected to the said non-inverting input of said third level difference integrator, and a noninverting output of an other end of said second integral electric capacity and said difference integral amplifier is connected to the said noninverting output of said third level difference integrator;
One first node controller; Comprise one the 5th diverter switch; Said the 5th diverter switch is by said second switch signal controlling; One end of said the 5th diverter switch is connected to said first node, and an other end of said the 5th diverter switch is connected to the said inverting input of said third level difference integrator;
One Section Point controller; Comprise one the 7th diverter switch and one the 8th diverter switch; Said the 7th diverter switch is controlled by said first switching signal, and said the 8th diverter switch is by said second switch signal controlling, and an end of said the 7th diverter switch and an end of said the 8th diverter switch are connected to a Section Point; One other end of said the 7th diverter switch is connected to said first reference voltage, and an other end of said the 8th diverter switch is connected to said bias voltage;
One the 3rd Node Controller; Comprise one the 6th diverter switch; Said the 6th diverter switch is by said second switch signal controlling; One end of said the 6th diverter switch is connected to said the 3rd node, and an other end of said the 6th diverter switch is connected to the said non-inverting input of said third level difference integrator; And
An and input module; The micro electronmechanical electric capacity of a plurality of corresponding equivalence that comprises one first electric capacity, one second electric capacity, one the 3rd electric capacity, one the 4th electric capacity and said electric component of microcomputer; The micro electronmechanical electric capacity of said equivalence comprises that one first equivalent micro electronmechanical electric capacity, one second equivalent micro electronmechanical electric capacity, a C grade imitate micro electronmechanical electric capacity, one first group of equivalent micro electronmechanical electric capacity of parallel connection equivalent micro electronmechanical electric capacity and one second group parallel connection; One end of the said first equivalent micro electronmechanical electric capacity is connected to said first node; One other end of the said first equivalent micro electronmechanical electric capacity is connected to said the 3rd node, and an end of said first electric capacity is connected to said first node, and an other end of said first electric capacity is a ground connection; One end of said second electric capacity is connected to said the 3rd node; One other end of said second electric capacity is a ground connection, and an end of said the 3rd electric capacity is a ground connection, and an other end of said the 3rd electric capacity is connected to an end of the said second equivalent micro electronmechanical electric capacity; One end of said the 4th electric capacity is a ground connection; One other end of said the 4th electric capacity is connected to the end that said C grade is imitated micro electronmechanical electric capacity, and an other end of the said second equivalent micro electronmechanical electric capacity is connected to said first node, and the other end that said C grade is imitated micro electronmechanical electric capacity is connected to said the 3rd node; One end of said first group of equivalent micro electronmechanical electric capacity of parallel connection is connected to said first node; One other end of said first group of equivalent micro electronmechanical electric capacity of parallel connection is connected to said Section Point, and an end of said second group of equivalent micro electronmechanical electric capacity of parallel connection is connected to said the 3rd node, and an other end of said second group of equivalent micro electronmechanical electric capacity of parallel connection is connected to said Section Point.
Description of drawings
Fig. 1 is the functional block diagram of microcomputer inductive capacitance-to-voltage conversion equipment in the prior art.
Fig. 2 be Fig. 1 than detailed maps.
Fig. 3 is the sketch map of the microcomputer inductive capacitance-to-voltage conversion equipment of first embodiment of the invention.
Fig. 4 is the sketch map of first order integrator among Fig. 3.
Fig. 5 is the oscillogram of embodiment of the invention microcomputer inductive capacitance-to-voltage conversion equipment.
Fig. 6 is the first order integrator sketch map of second embodiment of the invention.
Fig. 7 is the sketch map of the input module of third embodiment of the invention.
[main element symbol description]
1,2 microcomputer inductive capacitance-to-voltage conversion equipments
10 micro electronmechanical sensors
20 sensing amplifiers
30 bias circuits
40 analogies to digital converter (ADC)
41 first order change-over circuits
42 subtracters
43 adders
44 delayers
45 comparators
46,47,48 digital to analog converters (DAC)
50,52 first order integrators
60,62,64 input modules
70 single-ended integrators
72 difference integrators
80,82 reference circuits
90 controllers
AMP1, AMP2 amplifier
C1, C21, C22 integrating capacitor
CE1, CE2, CP1, CP2, CR electric capacity
CS, CS1, CS1N, CS2, the micro electronmechanical electric capacity of CS2N
The P node
The P1 first node
The P2 Section Point
P3 the 3rd node
R input impedance
The T switching signal cycle
V1 first reference voltage
The Vbias bias voltage
Vout numeral output voltage
VR+ high levels reference voltage
VR-low level reference voltage
Embodiment
The microcomputer inductive capacitance-to-voltage conversion equipment of the embodiment of the invention; Be that sensing amplifier of the prior art is incorporated in the first order integrator of ADC; Save bias circuit of the prior art simultaneously, and produce required reference voltage, and further micro electronmechanical electric capacity is cooperated front end circuit and forms input module with the interior reference circuit of building; With the design of simplification integrated circuit, and reach the purpose that does not need high-tension bias voltage.
Fig. 3 is the sketch map of the microcomputer inductive capacitance-to-voltage conversion equipment of first embodiment of the invention.As shown in Figure 3; Microcomputer inductive capacitance-to-voltage conversion equipment 2 comprises first order integrator 50, second level integrator 52 and comparator 45; Wherein second level integrator 52 can be made up of amplifier and integrating capacitor commonly used; And comparator 45 can use existing comparator commonly used, and digital output voltage V out is the output signal of comparator 45, so the principal character of the embodiment of the invention is the brand-new framework of first order integrator 50.
Fig. 4 is the sketch map of first order integrator among Fig. 3.As shown in Figure 4, the integrator of the single-ended framework of first order integrator 50 tools, and also first order integrator 50 has DAC 46, input module 60, single-ended integrator 70, reference circuit 80, controller 90 and a plurality of diverter switch.Input module 60 comprises micro electronmechanical capacitor C S, capacitor C P1 and CP2, and the voltage of node P is the induced voltage of micro electronmechanical capacitor C S.Single-ended integrator 70 comprises integrating capacitor C1 and amplifier AMP1.Reference circuit 80 produces the first reference voltage V1, high levels reference voltage VR+ and low level reference voltage VR-, and controller 90 produces the first switching signal φ 1 and second switch signal psi 2, in order to control these diverter switches.
For clearly demonstrating the operation of embodiment of the invention technical scheme, see also Fig. 5.Fig. 5 is the oscillogram of the microcomputer inductive capacitance-to-voltage conversion equipment of the embodiment of the invention.Fig. 5 demonstrates the operation waveform of the first switching signal φ 1 and second switch signal psi 2; When wherein the first switching signal φ 1 makes corresponding diverter switch conducting and second switch signal psi 2 that corresponding diverter switch is opened circuit; First order integrator 50 carries out charging operations; And the first switching signal φ 1 opens circuit corresponding diverter switch and second switch signal psi 2 when making corresponding diverter switch conducting, and first order integrator 50 carries out integration operation.
When charging operations; Capacitor C R charges to high reference voltage VR+ or low reference voltage VR-via the first switching signal φ 1 or second switch signal psi 2, and micro electronmechanical capacitor C S also charges to the first reference voltage V1, and when integration operation; Capacitor C R attendes the integrating capacitor C1 that institute's charges accumulated flows to single-ended integrator 70; Produce the DAC effect, the integrating capacitor C1 of the single-ended integrator 70 of the flow of charge on the micro electronmechanical capacitor C S produces the signal cumulative function.In the ADC of single-stage integrator structure; The output signal of single-ended integrator 70 sends comparator to; Producing required digital signal, and in the ADC of multi-stage integrator structure, the output signal of single-ended integrator 70 is the integrators that are sent to next stage; Serial connection is gone down in regular turn, and sends the output signal of the integrator of afterbody to comparator.
The first switching signal φ 1 is T with the cycle of second switch signal psi 2; Therefore the first switching signal φ 1 makes corresponding diverter switch conducting in T/2; And second switch signal psi 2 makes corresponding diverter switch conducting in another T/2; And the first switching signal φ 1 does not overlap with second switch signal psi 2, and promptly the first switching signal φ 1 and second switch signal psi 2 can not let the conducting simultaneously of corresponding diverter switch.
Be noted that the next stage integrator that can first order integrator 50 be concatenated into a plurality of prior aries, to constitute the ADC of the high analysis feature of tool.
Fig. 6 is the first order integrator sketch map of second embodiment of the invention.As shown in Figure 6; First order integrator 52 is the integrator of difference type; It comprises DAC 47, input module 62, difference integrator 72, reference circuit 82, controller 90 and a plurality of diverter switch; The function of its middle controller 90 is identical with first embodiment, and the function class of reference circuit 82 is similar to first embodiment, except exportable bias voltage Vbias.
Fig. 7 is the sketch map of the input module of third embodiment of the invention.As shown in Figure 7; The embodiment of the invention is applicable to the conversion of signals of a plurality of MEMS; Wherein the interface of input module 64 has first node P1, Section Point P2 and the 3rd node P3; And first node P1, Section Point P2 and the 3rd node P3 are connected to other function square except that input module 62 among Fig. 6, such as DAC 47, DAC 48, difference integrator 72, reference circuit 82, controller 90 and a plurality of diverter switch.
This input module 64 comprise a plurality of micro electronmechanical capacitor C S, CS1 ..., CS1N, CS2 ..., CS2N and four capacitor C P1, CP2, CP3 and CP4, wherein micro electronmechanical capacitor C S and two capacitor C P1 are connected with shown in Figure 6 with CP2's.Micro electronmechanical capacitor C S1 ..., the end of CS1N is connected to first node P1; And the other end of micro electronmechanical capacitor C S1N is connected to the end of capacitor C P3; The other end of capacitor C P3 is connected to ground connection, and micro electronmechanical capacitor C S1 ..., the other end of all the other the micro electronmechanical electric capacity among the CS1N except that micro electronmechanical capacitor C S1N is connected to Section Point P2.Micro electronmechanical capacitor C S2 ..., the connected mode of CS2N and capacitor C P4 be similar to above-mentioned micro electronmechanical capacitor C S1 ..., the connected mode of CS1N and capacitor C P3.In addition, the first switching signal φ 1 is as shown in Figure 5 with the operation waveform of second switch signal psi 2, makes the embodiment of the invention to convert the induced voltage of a plurality of MEMS to digital signal.
Therefore; The first order integrator of single-ended integrator of the tool that the embodiment of the invention provides or difference integrator; In conjunction with in the reference voltage circuit built produce required reference voltage and bias voltage, and utilize controller to produce control signal, to realize the ADC function in order to control its switch; Have the advantage of saving sensing amplifier and bias circuit, utilization simultaneously reduces the micro electronmechanical electric capacity of additional circuit direct sample and obtains highly sensitive effect.
The above is a preferred implementation of the present invention; Should be pointed out that for those skilled in the art, under the prerequisite that does not break away from principle according to the invention; Can also make some improvement and retouching, these improvement and retouching also should be regarded as protection scope of the present invention.
Claims (3)
1. the conversion equipment of a microcomputer inductive capacitance-to-voltage; Microcomputer inductive capacitance-to-voltage in order to an electric component of microcomputer converts a digital signal to; It is characterized in that; Said conversion equipment comprises a first order integrator, a comparator and at least one second level integrator, and wherein, said first order integrator produces an output signal; Said second level integrator receives the said output signal of said first order integrator and produces an output signal, and said comparator receives the said output signal of said second level integrator and produces digital signal;
Wherein, Said second level integrator comprises a first integral electric capacity and a first integral amplifier; One end of said first integral electric capacity and an inverting input of said first integral amplifier are connected to the input signal of said second level integrator; One non-inverting input of said first integral amplifier is a ground connection, and an other end of said first integral electric capacity and an output of said first integral amplifier are connected to the said output signal of said second level integrator;
Said first order integrator comprises an input module, a charge and discharge capacitance, a third level integrator, a reference circuit, a controller, one first diverter switch, one second diverter switch, one the 3rd diverter switch, one the 4th diverter switch and one the 5th diverter switch; Said input module comprises an equivalent micro electronmechanical electric capacity of said electric component of microcomputer; One end of the micro electronmechanical electric capacity of said equivalence is connected to a first node; One other end of the micro electronmechanical electric capacity of said equivalence is connected to a Section Point; Said reference circuit produces one first reference voltage, a low reference voltage and a high reference voltage; Said controller produces one first switching signal and a second switch signal; The high levels of the high levels of said first switching signal and said second switch signal does not overlap; Said first switching signal is controlled said first diverter switch, said second diverter switch and said the 4th diverter switch; Said the 3rd diverter switch of said second switch signal controlling and said the 5th diverter switch, said third level integrator comprise a second integral electric capacity and a second integral amplifier, and an end of said second integral electric capacity is connected to an output of said second integral amplifier; Said output produces the said output signal of said first order integrator; One other end of said second integral electric capacity is connected to an inverting input of said second integral amplifier, and a non-inverting input of said second integral amplifier is a ground connection, and an end of said charge and discharge capacitance is connected to said first node; One other end of said charge and discharge capacitance is connected to said high reference voltage through said first diverter switch when said first switching signal is high levels; And when said second switch signal is high levels, be connected to said low reference voltage through said first diverter switch, and an end of said second diverter switch is a ground connection, an other end of said second diverter switch is connected to said first node; One end of said the 3rd diverter switch is connected to said first node, and an other end of said the 3rd diverter switch is connected to the said inverting input of said second integral amplifier; Said input module further comprises one first electric capacity and one second electric capacity; One end ground connection of said first electric capacity; One other end of said first electric capacity is received a Section Point; One end of said second electric capacity is a ground connection; One other end of said second electric capacity is connected to said first node, and said Section Point is connected to said first reference voltage via said the 4th diverter switch when said first switching signal is high levels, and said Section Point also is connected to ground connection via said the 5th diverter switch when said second switch signal is high levels.
2. the conversion equipment of a microcomputer inductive capacitance-to-voltage; Microcomputer inductive capacitance-to-voltage in order to an electric component of microcomputer converts a digital signal to; It is characterized in that; Said conversion equipment comprises a first order difference integrator, a balance comparator and at least one second level difference integrator, and wherein, said first order difference integrator produces a pair of difference output signal; Said second level difference integrator receive said first order difference integrator this to difference output signal and produce a pair of difference output signal, said balance comparator receive said second level difference integrator this to difference output signal and produce digital signal;
Wherein, Said second level difference integrator comprises a first integral electric capacity, a second integral electric capacity and a third level difference integral amplifier; One inverting input of one end of said first integral electric capacity and said third level difference integral amplifier is connected to a rp input signal of a pair of difference input signal of said second level difference integrator; One reversed-phase output of one other end of said first integral electric capacity and said third level difference integral amplifier is connected to this reversed-phase output signal to difference output signal of said second level difference integrator; One non-inverting input of one end of said second integral electric capacity and said third level difference integral amplifier is connected to this noninverting input signal to the difference input signal of said second level difference integrator, and a noninverting output of an other end of said second integral electric capacity and said third level difference integral amplifier is connected to this noninverting output signal to difference output signal of said second level difference integrator;
Said first order difference integrator comprises:
One reference circuit produces one first reference voltage, a bias voltage, a low reference voltage and a high reference voltage;
One controller produces one first switching signal and a second switch signal, and the high levels of the high levels of said first switching signal and said second switch signal does not overlap;
One first digital to analog converter; Comprise one first charge and discharge capacitance, one first diverter switch, one second diverter switch; Said first diverter switch is controlled by said first switching signal; Said second diverter switch is by said first switching signal and the control of said second switch signal controlling; One end of said first diverter switch is connected to a first node, and an other end of said first diverter switch is connected to said bias voltage, and said first diverter switch is connected to said bias voltage during for high levels in said first switching signal; One end of said first charge and discharge capacitance is connected to said first node; Said first charge and discharge capacitance an other end be connected to an end of said second diverter switch, an other end of said second diverter switch is connected to said low reference voltage during for high levels in said first switching signal, the said other end of said second diverter switch is connected to said high reference voltage during for high levels at said second switch signal;
One second digital to analog converter; Comprise one second charge and discharge capacitance, one the 3rd diverter switch, one the 4th diverter switch; Said the 3rd diverter switch and said the 4th diverter switch are controlled by said first switching signal; One end of said the 3rd diverter switch is connected to one the 3rd node; One other end of said the 3rd diverter switch is connected to said bias voltage, and an end of said second charge and discharge capacitance is connected to said the 3rd node, and an other end of said second charge and discharge capacitance is connected to an end of said the 4th diverter switch; One other end of said the 4th diverter switch is connected to said low reference voltage during for high levels in said first switching signal, and the said other end of said the 4th diverter switch is connected to said high reference voltage during for high levels at said second switch signal;
One difference integrator; Have an inverting input, a non-inverting input, a reversed-phase output and a noninverting output; Said difference integrator comprises a first integral electric capacity, a second integral electric capacity and a fourth stage difference integral amplifier; One inverting input of one end of said first integral electric capacity and said fourth stage difference integral amplifier is connected to the said inverting input of said difference integrator; One reversed-phase output of one other end of said first integral electric capacity and said fourth stage difference integral amplifier is connected to the said reversed-phase output of said difference integrator; One non-inverting input of one end of said second integral electric capacity and said fourth stage difference integral amplifier is connected to the said non-inverting input of said difference integrator, and a noninverting output of an other end of said second integral electric capacity and said fourth stage difference integral amplifier is connected to the said noninverting output of said difference integrator;
One first node controller; Comprise one the 5th diverter switch; Said the 5th diverter switch is by said second switch signal controlling; One end of said the 5th diverter switch is connected to said first node, and an other end of said the 5th diverter switch is connected to the said inverting input of said difference integrator;
One Section Point controller; Comprise one the 7th diverter switch and one the 8th diverter switch; Said the 7th diverter switch is controlled by said first switching signal, and said the 8th diverter switch is by said second switch signal controlling, and an end of said the 7th diverter switch and an end of said the 8th diverter switch are connected to a Section Point; One other end of said the 7th diverter switch is connected to said first reference voltage, and an other end of said the 8th diverter switch is connected to said bias voltage;
One the 3rd Node Controller; Comprise one the 6th diverter switch; Said the 6th diverter switch is by said second switch signal controlling; One end of said the 6th diverter switch is connected to said the 3rd node, and an other end of said the 6th diverter switch is connected to the said non-inverting input of said difference integrator; And
One input module; Comprise an equivalent micro electronmechanical electric capacity of one first electric capacity, one second electric capacity and said electric component of microcomputer, an end of the micro electronmechanical electric capacity of said equivalence is connected to said first node, and an other end of the micro electronmechanical electric capacity of said equivalence is connected to said Section Point; One of said first electric capacity terminates to said first node; One other end of said first electric capacity is a ground connection, and an end of said second electric capacity is connected to said Section Point, and an other end of said second electric capacity is a ground connection.
3. the conversion equipment of a microcomputer inductive capacitance-to-voltage; Convert a digital signal in order to microcomputer inductive capacitance-to-voltage with a plurality of electric component of microcomputer; It is characterized in that; Said conversion equipment comprises a first order difference integrator, a balance comparator and at least one second level difference integrator, and wherein, said first order difference integrator produces a pair of difference output signal; Said second level difference integrator receive said first order difference integrator this to difference output signal and produce a pair of difference output signal, said balance comparator receive said second level difference integrator this to difference output signal and produce said digital signal;
Wherein, Said second level difference integrator comprises a first integral electric capacity, a second integral electric capacity and a difference integral amplifier; One end of said first integral electric capacity and an inverting input of said difference integral amplifier are connected to a rp input signal of a pair of difference input signal of said second level difference integrator; One other end of said first integral electric capacity and a reversed-phase output of said difference integral amplifier are connected to this reversed-phase output signal to difference output signal of said second level difference integrator; One end of said second integral electric capacity and a non-inverting input of said difference integral amplifier are connected to this noninverting input signal to the difference input signal of said second level difference integrator, and a noninverting output of an other end of said second integral electric capacity and said difference integral amplifier is connected to this noninverting output signal to difference output signal of said second level difference integrator;
Said first order difference integrator comprises:
One reference circuit produces one first reference voltage, a bias voltage, a low reference voltage and a high reference voltage;
One controller produces one first switching signal and a second switch signal, and the high levels of the high levels of said first switching signal and said second switch signal does not overlap;
One first digital to analog converter; Comprise one first charge and discharge capacitance, one first diverter switch, one second diverter switch; Said first diverter switch and said second diverter switch are controlled by said first switching signal; One end of said first diverter switch is connected to a first node; One other end of said first diverter switch is connected to said bias voltage, and an end of said first charge and discharge capacitance is connected to said first node, said first charge and discharge capacitance an other end be connected to an end of said second diverter switch; One other end of said second diverter switch is connected to said low reference voltage during for high levels in said first switching signal, and the said other end of said second diverter switch is connected to said high reference voltage during for high levels at said second switch signal;
One second digital to analog converter; Comprise one second charge and discharge capacitance, one the 3rd diverter switch, one the 4th diverter switch; Said the 3rd diverter switch and said the 4th diverter switch are controlled by said first switching signal; One end of said the 3rd diverter switch is connected to one the 3rd node; One other end of said the 3rd diverter switch is connected to said bias voltage, and an end of said second charge and discharge capacitance is connected to said the 3rd node, and an other end of said second charge and discharge capacitance is connected to an end of said the 4th diverter switch; One other end of said the 4th diverter switch is connected to said low reference voltage during for high levels at said second switch signal, and the said other end of said the 4th diverter switch is connected to said high reference voltage during for high levels in said first switching signal;
One third level difference integrator; Have an inverting input, a non-inverting input, a reversed-phase output and a noninverting output; Said third level difference integrator comprises a first integral electric capacity, a second integral electric capacity and a difference integral amplifier; One end of said first integral electric capacity and an inverting input of said difference integral amplifier are connected to the said inverting input of said third level difference integrator; One other end of said first integral electric capacity and a reversed-phase output of said difference integral amplifier are connected to the said reversed-phase output of said third level difference integrator; One end of said second integral electric capacity and a non-inverting input of said difference integral amplifier are connected to the said non-inverting input of said third level difference integrator, and a noninverting output of an other end of said second integral electric capacity and said difference integral amplifier is connected to the said noninverting output of said third level difference integrator;
One first node controller; Comprise one the 5th diverter switch; Said the 5th diverter switch is by said second switch signal controlling; One end of said the 5th diverter switch is connected to said first node, and an other end of said the 5th diverter switch is connected to the said inverting input of said third level difference integrator;
One Section Point controller; Comprise one the 7th diverter switch and one the 8th diverter switch; Said the 7th diverter switch is controlled by said first switching signal, and said the 8th diverter switch is by said second switch signal controlling, and an end of said the 7th diverter switch and an end of said the 8th diverter switch are connected to a Section Point; One other end of said the 7th diverter switch is connected to said first reference voltage, and an other end of said the 8th diverter switch is connected to said bias voltage;
One the 3rd Node Controller; Comprise one the 6th diverter switch; Said the 6th diverter switch is by said second switch signal controlling; One end of said the 6th diverter switch is connected to said the 3rd node, and an other end of said the 6th diverter switch is connected to the said non-inverting input of said third level difference integrator; And
One input module; The micro electronmechanical electric capacity of a plurality of corresponding equivalence that comprises one first electric capacity, one second electric capacity, one the 3rd electric capacity, one the 4th electric capacity and said electric component of microcomputer; The micro electronmechanical electric capacity of said equivalence comprises that one first equivalent micro electronmechanical electric capacity, one second equivalent micro electronmechanical electric capacity, a C grade imitate micro electronmechanical electric capacity, one first group of equivalent micro electronmechanical electric capacity of parallel connection equivalent micro electronmechanical electric capacity and one second group parallel connection; One end of the said first equivalent micro electronmechanical electric capacity is connected to said first node; One other end of the said first equivalent micro electronmechanical electric capacity is connected to said the 3rd node, and an end of said first electric capacity is connected to said first node, and an other end of said first electric capacity is a ground connection; One end of said second electric capacity is connected to said the 3rd node; One other end of said second electric capacity is a ground connection, and an end of said the 3rd electric capacity is a ground connection, and an other end of said the 3rd electric capacity is connected to an end of the said second equivalent micro electronmechanical electric capacity; One end of said the 4th electric capacity is a ground connection; One other end of said the 4th electric capacity is connected to the end that said C grade is imitated micro electronmechanical electric capacity, and an other end of the said second equivalent micro electronmechanical electric capacity is connected to said first node, and the other end that said C grade is imitated micro electronmechanical electric capacity is connected to said the 3rd node; One end of said first group of equivalent micro electronmechanical electric capacity of parallel connection is connected to said first node; One other end of said first group of equivalent micro electronmechanical electric capacity of parallel connection is connected to said Section Point, and an end of said second group of equivalent micro electronmechanical electric capacity of parallel connection is connected to said the 3rd node, and an other end of said second group of equivalent micro electronmechanical electric capacity of parallel connection is connected to said Section Point.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200810183030 CN101753146B (en) | 2008-12-03 | 2008-12-03 | Microcomputer inductive capacitance-to-voltage conversion device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200810183030 CN101753146B (en) | 2008-12-03 | 2008-12-03 | Microcomputer inductive capacitance-to-voltage conversion device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101753146A CN101753146A (en) | 2010-06-23 |
| CN101753146B true CN101753146B (en) | 2012-12-26 |
Family
ID=42479622
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200810183030 Active CN101753146B (en) | 2008-12-03 | 2008-12-03 | Microcomputer inductive capacitance-to-voltage conversion device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101753146B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113029207B (en) * | 2021-03-17 | 2022-06-28 | 上海睿奈电子科技有限公司 | High-sensitivity and configurable sensor driving and signal processing integrated circuit |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1127804C (en) * | 1999-11-18 | 2003-11-12 | 合邦电子股份有限公司 | Sampling/holder circuit with low dynamic error for D/A converter |
| CN2615962Y (en) * | 2003-04-11 | 2004-05-12 | 潘伟潮 | Double-integral analog-to-digital conversion circuit |
| CN101123436A (en) * | 2006-07-14 | 2008-02-13 | 美国凹凸微系有限公司 | Analog to digital converter with interference rejection capability |
-
2008
- 2008-12-03 CN CN 200810183030 patent/CN101753146B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1127804C (en) * | 1999-11-18 | 2003-11-12 | 合邦电子股份有限公司 | Sampling/holder circuit with low dynamic error for D/A converter |
| CN2615962Y (en) * | 2003-04-11 | 2004-05-12 | 潘伟潮 | Double-integral analog-to-digital conversion circuit |
| CN101123436A (en) * | 2006-07-14 | 2008-02-13 | 美国凹凸微系有限公司 | Analog to digital converter with interference rejection capability |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101753146A (en) | 2010-06-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7817075B2 (en) | Apparatus for converting MEMS inductive capacitance | |
| US7454967B2 (en) | Signal conditioning methods and circuits for a capacitive sensing integrated tire pressure sensor | |
| US7782243B1 (en) | Direct capacitance-to-digital converter | |
| CN102221646B (en) | Capacitance detecting device and capacitance detecting method | |
| EP2391898B1 (en) | Capacitance-to-voltage interface circuit, and related operating methods | |
| CN102692883B (en) | An analog input circuit for engineering-machinery-dedicated controller | |
| CN101776713B (en) | Direct capacitance-digital converter | |
| CN101753146B (en) | Microcomputer inductive capacitance-to-voltage conversion device | |
| CN101750054B (en) | Flexible gyro digital rebalancing device based on DSP | |
| CN101699380B (en) | Detecting circuit for touch panel and touch panel | |
| CN107192850A (en) | A kind of accelerometer capacitive detection circuit | |
| CN107192851B (en) | Capacitance detection system of charge modulator accelerometer | |
| CN104048795A (en) | Process measurement system with variable amplitude sensor excitation | |
| CN113507287A (en) | Sample-and-hold circuit and electronic device with same | |
| CN202268070U (en) | Novel isolated pressure transmitter | |
| US20140000364A1 (en) | Hybrid analog to digital converter and sensing apparatus using the same | |
| CN107290566A (en) | One kind is used for the basic capacitor compensating circuit of digital accelerometer | |
| CN202940789U (en) | Frequency current isolation conversion module | |
| US8456337B1 (en) | System to interface analog-to-digital converters to inputs with arbitrary common-modes | |
| CN106323263A (en) | Bandpass sigma-delta closed-loop detection circuit of silicon micro gyroscope | |
| CN111538356B (en) | Time division multiplexing triaxial accelerometer and control method thereof | |
| CN111510143A (en) | Front-end circuit for direct conversion from capacitance to digital quantity | |
| CN208043963U (en) | A kind of vehicle device side's control voltage analog detecting system | |
| Ye et al. | Electromechanical closed-loop with high-Q capacitive micro-accelerometers and pulse width modulation force feedback | |
| Zhao et al. | A 0.084% nonlinearity open-loop capacitive micro-accelerometer with on-chip digital nonlinearity calibration and embedded EEPROM |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| ASS | Succession or assignment of patent right |
Owner name: WANGJIU SCIENCE + TECHNOLOGY CO., LTD. |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20110928 Address after: Hsinchu County, Taiwan, China Applicant after: Windtop Technology Corp. Co-applicant after: Wangjiu Science & Technology Co., Ltd. Address before: Hsinchu City, Taiwan, China Applicant before: Windtop Technology Corp. |
|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |