CN101750651B - Electromagnetic wave transmission device with regulative and controllable magnetic field based on sub-monolayer wavelength metal grating and preparation - Google Patents

Electromagnetic wave transmission device with regulative and controllable magnetic field based on sub-monolayer wavelength metal grating and preparation Download PDF

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CN101750651B
CN101750651B CN2009102346234A CN200910234623A CN101750651B CN 101750651 B CN101750651 B CN 101750651B CN 2009102346234 A CN2009102346234 A CN 2009102346234A CN 200910234623 A CN200910234623 A CN 200910234623A CN 101750651 B CN101750651 B CN 101750651B
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王慧田
白强
陈璟
程晨
丁剑平
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Nanjing University
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Abstract

Disclosed is an electromagnetic wave transmission device with regulative and controllable magnetic field based on sub-monolayer wavelength metal grating; the device comprises a sub-monolayer wavelength metal grating and magnetoactive medium filled in the slit of the sub-monolayer metal grating; the metal part of the device and the magnetoactive medium have the same thickness, the thickness at least meets and supports the lowest-level Fabry-Perot cavity resonance demand of the designed work wavelength in the grating slit; the period and slit of the grating are shorter than the wavelength of the electromagnetic wave. By changing the size of the additional magnetic field, the propagation constant of the waveguide mode in the metal grating slit can be regulated to change the electromagnetic transmission characteristic of the device and realize the purpose of initial regulation of polarization-independent electromagnetic wave transmission spectrum and the electromagnetic wave transmission spectrum magnetic field.

Description

Device and preparation based on the Electromgnetically-transparent of the controllable magnetic field of sub-monolayer wavelength metal grating
Technical field
The present invention relates to the Electromgnetically-transparent device, especially a kind of device of polarization irrelevant Electromgnetically-transparent of the controllable magnetic field based on the sub-monolayer wavelength metal grating.
Background technology
1998, people such as French scientist T.W.Ebbesen on Nature, publish an article (Extraordinary opticaltransmission through sub-wavelength hole arrays), they find in experiment after electromagnetic wave incides on the metallic film with two-dimentional sub-wavelength array of orifices, electromagnetic zero level transmission spectrum shows as a series of transmission peaks with abnormality of high transmitance at the wavelength place greater than the array cycle, and the magnitude of transmitance is much larger than the theoretical institute of the aperture transmission prediction result of classics.This phenomenon is commonly called unusual transmission phenomenon.They think that this is because when electromagnetic wave incides on the metallic film, the array of orifices of two dimension provides necessary reciprocal lattice vector, make the wave vector of incident electromagnetic wave and the wave vector of surface plasma excimer satisfy the momentum matching condition, thereby excited the surface plasma excimer on metallic film surface, thereby utilized surface plasma excimer to realize the unusual transmission of corresponding wavelength.
1999, people such as J.A.Porto have delivered the article that is entitled as " Transmission Resonanceson Metallic Gratings with Very Narrow Slits " on Phys.Rev.Lett., they have studied the unusual transmission phenomenon in the one-dimensional sub length metal grid, point out the p-polarization electromagnetic unusual transmission exist two possible paths: one is to have excited the energy local at the metallic film surface plasma excimer of the coupling on two surfaces up and down; Another is to have excited the waveguide mode of energy local in the metal gate slit.The mechanism of these two kinds of transmission approach is different, corresponding to the different transmission peaks in the transmission spectrum.Particularly corresponding to waveguide mode, it can realize the unusual transmission of the arrowband in the full ranges of incidence angles.
Delivering and huge researching value and important use value that unusual transmission effect itself is had of above-mentioned two pieces of experiments and theoretical work, particularly all have boundless application prospect in the fields such as electromagnetic wave filtering of storage, the optical interference offset printing of sun power, the sub-wavelength imaging that surmounts diffraction limit, scanning optical microscope, no diffraction, greatly excited the research enthusiasm of numerous scientists in the world wide, they have carried out system to the unusual transmission phenomenon in the different wavelength range and experiment and theoretical research widely.
In microwave region, 2002, people such as F.Yang have delivered work (ResonantTransmission of Microwaves through a Narrow Metallic Slit) on Phys.Rev.Lett.. and they have studied the resonance transmission of the microwave of single metal slit experimentally, have proved the unusual transmission of Wave guide resonance experimentally.
2006, people such as A.P.Hibbins delivered the article that is entitled as " MicrowaveTransmission of a Compound Metal Grating " on Phys.Rev.Lett..They have studied the unusual transmission of the microwave of composite structure metal gate from experiment and two aspects of numerical simulation, find in contrast to monocyclic metal gate, exist the resonance of three kinds of Fabry-Perot-like in the composite structure metal gate.
2009, people such as K.Aydin publish an article on Phys.Rev.Lett. (Split-Ring-Resonator-Coupled Enhanced Transmission through a Single SubwavelengthAperture). and they pass through to place a splitting ring resonator at the near field in the hole of sub-wavelength annex, excite the electric resonance of splitting ring resonator or the unusual transmission of the single sub-wavelength aperture that magnetic resonance has successfully realized microwave by incident electromagnetic wave.
At terahertz wave band, 2004, people such as D.Qu (the Terahertztransmission properties of thin that on Opt.Lett., publishes an article, subwavelength metallic hole arrays). they have studied the unusual transmission of electromagnetic wave on the metallic film with sub-wavelength array of orifices of Terahertz experimentally, find that the shape in hole has tremendous influence to transmission.
2006, people such as A.K.Azad delivered the work that is entitled as " Effect of dielectric properties ofmetals on terahertz transmission in subwavelength hole arrays " on Opt.Lett..Their experimental study the dielectric function of different metal to the influence of the unusual transmission phenomenon of THz wave, find that the transmitance of THz wave increases along with the increase of the specific inductive capacity of metal reality and empty specific inductive capacity ratio.
2009, people such as T.H.Isaac deliver work (Surface-mode lifetime andthe terahertz transmission of subwavelength hole arrays) on Phys.Rev.B.. and they have studied the unusual transmission phenomenon of the metallic film of the two-dimentional sub-wavelength array of orifices with different pore sizes at terahertz wave band experimentally, discovery is along with the aperture reduces, life-span of surface modes increases, and the resonance transmission of assist by surface modes is to the contribution increase of transmitance.
In optical band, 2002, people such as A.Barbara delivered the article that is entitled as " Opticaltransmission through subwavelength metallic gratings " on Phys.Rev.B.Their experimental study the unusual transmission phenomenon of one-dimensional sub length metal grid of infrared band, proved the waveguide mode of resonance and the enhancing transmission that surface plasma excimer is being controlled optical band experimentally.
2005, people such as K.L.van der Molen publish an article on Phys.Rev.B (Role of shape andlocalized resonances in extraordinary transmission through periodic arrays ofsubwavelength holes:Experiment and theory). and they are from testing and having studied the influence of the length breadth ratio of rectangular opening to the unusual transmission effect of the metal film of the two-dimentional sub-wavelength array of orifices of having of optical band aspect theoretical two, and the discovery dimensional resonace is being played the part of very important role in unusual transmission.
2007, people such as Y.Ekinci deliver work (Extraordinary optical transmissionin the ultraviolet region through aluminum hole arrays) on Opt.Lett.. and they have studied aluminium film with the two-dimentional sub-wavelength array of orifices unusual transmission phenomenon at ultraviolet band experimentally, find that the surface plasma excimer of transmission and the surface plasma resonance of local contribute to unusual transmission effect jointly.
2009, people such as S.G.Rodrigo delivered the article that is entitled as " Extraordinary opticaltransmission through hole arrays in optically thin metal films " on Opt.Lett..They have studied optically thin metallic film with the square array of orifices unusual transmission phenomenon in optical band in theory, discovery is along with thickness of metal film reduces, because the coupling of the surface plasma of light and short scope, red shift has taken place in unusual transmission peaks, even the ratio of minimum and maximum transmitance keeps the thickness of a high value metallic film to be reduced to the thickness of a skin depth simultaneously.
In sum, people have carried out a large amount of experiments and theoretical research to the unusual transmission phenomenon in one-dimensional sub wave length metal grating and the two-dimentional sub-wavelength array of orifices metallic film, have disclosed to be hidden in unusual transmission phenomenon various physical mechanisms behind; The understanding of people to each factor of influencing unusual transmission physical mechanism has also been deepened in these research work simultaneously.The wave band that exists of unusual transmission effect can be from the microwave region to the optical band, and it has huge using value in the design of the storage unit of sun power and sub-wavelength electromagnetic device.
Summary of the invention
In order to solve the Electromgnetically-transparent spectrum regulatable problem initiatively that does not have a kind of simple mode to realize polarization irrelevant in the prior art, the present invention seeks to: the device and the preparation method that propose a kind of polarization irrelevant Electromgnetically-transparent of the controllable magnetic field based on the sub-monolayer wavelength metal grating.
The concrete technical scheme of the present invention is, based on the device of the polarization irrelevant Electromgnetically-transparent of the controllable magnetic field of sub-monolayer wavelength metal grating, this device comprises the sub-monolayer wavelength metal grating and is filled in magnetoactive medium in the sub-wave length metal grating slit; The externally-applied magnetic field B of this device 0The direction and its adjustable size that are parallel to the grating slit; The metal part of this device partly has identical thickness with magnetoactive medium, and this thickness size satisfies the requirement of the Fabry-Perot chamber resonance of the lowest-order of minimum support design effort wavelength in the grating slit; The cycle of described grating and slit are less than described electromagnetic wavelength; The metal material of described grating is low-loss metal, for example gold, silver or aluminium etc.; The dielectric material of described grating is the electromagnetic magnetoactive medium of transmissive, in microwave region, and for example microwave ferrite material YIG and microwave ferrite etc.; At terahertz wave band, for example semiconductor material InSb and InAs etc.; At infrared and visible light wave range, for example magneto-optic memory technique Bi:GdIG and magnetic semiconductor material CdMnTe etc.; The transmissison characteristic of this device is based on the waveguide mode in the grating slit, and regulatable incident electromagnetic wave is s-polarization or p-polarization; The slit width that this light is deleted satisfies the simultaneous condition of waveguide mode of two kinds of polarized electromagnetic waves; This device is realized the required external magnetic field B that applies of function 0Scope depend on selected magnetoactive medium, scope in 0 tesla to 1 tesla; Along with externally-applied magnetic field B 0Increase, corresponding to the transmission peaks generation blue shift or the red shift of the polarization of the active waveguide mode of magnetic; The externally-applied magnetic field B of this device 0Big I wait by electromagnet and regulate.
The applicable wavelengths scope of device of the present invention can be from the microwave region to the visible light wave range; The range of size of this metal grating and concrete values of the structural parameters depend on the operating wavelength range of designing requirement, and for microwave region and terahertz wave band, range of size and values of the structural parameters are bigger, in the magnitude of millimeter and micron; For infrared and visible light wave range, range of size and values of the structural parameters are less, in the magnitude of nanometer.
Preparation of devices method of the present invention, described device for microwave and terahertz wave band, can adopt technologies such as metal etch or femtosecond laser parallel micromachining to produce one dimension cycle sub-wave length metal grating, adopt fine setting control system directly to fill methods such as magnetoactive medium rod or employing pulsed laser deposition then in slit and fill magnetoactive medium in slit, the structural parameters of grating are controlled according to designing requirement; For infrared and described device visible light wave range, can adopt technology such as magnetron sputtering to produce the single-layer metal film earlier; Adopt methods such as focused-ion-beam lithography to produce the individual layer grating then; Adopt methods such as pulsed laser deposition to fill the medium of magnetic activity again in the metal grating slit, the structural parameters of grating are controlled according to designing requirement.
Device of the present invention can be by changing externally-applied magnetic field B 0Size, the position and the transmitance of the transmission peaks of s-polarization or p-polarization incident electromagnetic wave are regulated.Corresponding to different wavelength regulation scopes, the cycle of grating, stitch and widely can adopt different values with thickness, the medium of filling also can be selected the magnetoactive medium of corresponding wave band for use, thereby realizes the special filtering requirements from the microwave to the visible light wave range.
Mechanism of the present invention is, when the electromagnetic wave of s-polarization (p-polarization) with angle θ oblique incidence to the sub-monolayer wavelength metal grating the time, incident electromagnetic wave will be coupled with the intrinsic waveguide mode in the grating slit, when satisfying the requirement of appropriate mode symmetry, incident electromagnetic wave will excite the waveguide mode in its slit.This waveguide mode direction along grating thickness in the grating slit is propagated, when arriving the opening part of slit, because the discontinuous generation reflection and the transmission of structure, the waveguide mode that is reflected is along propagating with opposite before direction, reflection and transmission take place once more up to another opening part that arrives slit, waveguide mode is constantly repeating this process, has formed the distribution of stable stationary field between the opening of two slits.On this meaning, two openings of slit are equivalent to two mirrors with certain reflectivity, have formed the Fabry-Perot chamber of a waveguide mode between two openings.When the resonant condition in Fabry-Perot chamber is satisfied in the phase shift of waveguide mode in a circulation, the resonance transmission will take place.The transmission peaks that a correspondence on electromagnetic transmission spectrum, will occur.Usually the different waveguide mode that has a plurality of wavelength satisfies Fabry-Perot chamber resonant condition simultaneously, so the Electromgnetically-transparent of counter structure spectrum has a plurality of transmission peaks usually.
On the other hand, the DIELECTRIC CONSTANT of magnetoactive medium or magnetic permeability μ are generally a tensor, and wherein each tensor element all is externally-applied magnetic field B 0Function, their value will be along with externally-applied magnetic field B 0Variation and change, therefore can be by changing externally-applied magnetic field B 0The size characteristic of regulating magnetoactive medium.For example, the magnetic permeability tensor of the ferrite material YIG of microwave is externally-applied magnetic field B 0Function, so this magnetoactive medium can be realized the electromagnetic regulation and control to the s-polarization; And the specific inductive capacity tensor of semiconductor material InSb is externally-applied magnetic field B 0Function, so this magnetoactive medium can be realized the electromagnetic regulation and control to the p-polarization.
After in the metal grating slit of sub-monolayer wavelength, inserting medium, by changing externally-applied magnetic field B with magnetic activity 0Size, can change the specific inductive capacity or the magnetic permeability of magnetoactive medium, with a kind of activity with magnetic that makes in the waveguide mode that is present in two kinds of polarizations in the grating slit simultaneously, this propagation constant with waveguide mode of magnetic activity will be along with externally-applied magnetic field B 0Variation and change its reflection phase shift simultaneously at grating slit opening place
Figure G2009102346234D00041
Also along with externally-applied magnetic field B 0Variation and change because the transmissison characteristic in Fabry-Perot chamber is sensitive to the variation of these conditions, therefore can use externally-applied magnetic field B 0Regulate the transmission peaks and the transmitance of the active waveguide mode of magnetic on one's own initiative, the transmissison characteristic of the waveguide mode of another polarization does not then change.When changing externally-applied magnetic field B 0Big or small the time, blue shift or red shift will take place corresponding to the transmission peaks of the polarization of the active waveguide mode of magnetic, the transmission peaks of another polarization then is not moved, by the appropriate externally-applied magnetic field B that chooses 0Value, can make corresponding to the transmission peaks of the polarization of the active waveguide mode of magnetic and the transmission peaks of another polarization to overlap; Further can be by choosing different magnetic field B 0Value, the transmission peaks that makes some polarizations corresponding to the active waveguide mode of magnetic selectively with a plurality of different transmission peaks of another polarization in any one is overlapping, thereby realize the polarization irrelevant Electromgnetically-transparent of controllable magnetic field.The magnetic field B that these are appropriate 0Value all can be worth accurately by the mode expansion theory, therefore very convenient in the operation of reality.Because the transmissison characteristic of this structure is based on the waveguide mode in the grating slit, therefore (vertical and oblique incidence) all is suitable for for all incident angles.
In sum, the sub-monolayer wavelength metal grating device of the present invention's design can change externally-applied magnetic field B by adopting methods such as electromagnet 0Size, electromagnetic wave transmission characteristic adjustable of realizing polarization irrelevant.Can utilize this device, in certain wavelength coverage, realize different em filtering requirements.
Beneficial effect of the present invention: simple in structure, can adopt now mature process technology to prepare; Physical dimension is little, is easy to miniaturization and integrated; Material obtains easily.Can realize not having the filtering of the polarization irrelevant of high order diffraction; Can under all incident angles, move; Can realize accurate fine setting to the Electromgnetically-transparent wavelength; The active adjustability in magnetic field can realize multiple transmission result in single structure.Wavelength is applied widely, can be from the microwave region to the visible light wave range.
Description of drawings
Dark-coloured part is represented metal among Fig. 1, and red part is represented the medium of magnetic activity.
D is the grating cycle, and a is that the grating seam is wide, and h is a grating thickness,
Embodiment
The present invention can realize by following technical measures.Material involved in the present invention is low-loss metal and the electromagnetic magnetoactive medium of transmissive, and wherein low-loss metal generally can be with gold, silver or aluminium etc.; Magnetoactive medium generally can be used microwave ferrite material YIG and microwave ferrite etc. in microwave region, generally can generally can use magneto-optic memory technique Bi:GdIG and magnetic semiconductor material CdMnTe etc. at infrared and visible light wave range at terahertz wave band with semiconductor material InSb and InAs etc.
For the described device of microwave region and terahertz wave band, because corresponding electromagnetic wavelength is longer, the values of the structural parameters of grating is bigger.Can adopt technologies such as metal etch or femtosecond laser parallel micromachining to produce one dimension cycle sub-wave length metal grating, adopt fine setting control system directly in slit, to fill methods such as magnetoactive medium rod or employing pulsed laser deposition then and in slit, fill magnetoactive medium.The structural parameters of grating are controlled according to designing requirement.Regulate externally-applied magnetic field B by adopting methods such as electromagnet 0Size.For the described device of microwave region, the structural parameters of typical grating are (width of phase weekly): 10-20mm, and the thickness h of grating is 8-16mm; For the described device of terahertz wave band, the structural parameters of typical grating are (width of phase weekly): 100-200 μ m, the thickness h of grating is 120-160 μ m.The position of stitching wide a is a magnetoactive medium.
For the described device of infrared band and visible light wave range, because corresponding electromagnetic wavelength is shorter, the values of the structural parameters of grating is less, can adopt technology such as magnetron sputtering to produce the single-layer metal film earlier; Adopt focused-ion-beam lithography methods such as (FIB) to produce the individual layer grating then; Adopt methods such as pulsed laser deposition in the metal grating slit, to fill the medium of magnetic activity again.The structural parameters of grating are controlled according to designing requirement.Regulate externally-applied magnetic field B by adopting methods such as electromagnet 0Size.The structural parameters of typical grating are (width of phase weekly): 500-2000nm, and the thickness h of grating is 1000-2000nm.
To insert microwave ferrite material YIG in the metal grating slit is example, and the cycle d of grating is 15mm, and stitching wide a is 3mm, and the thickness h of grating is 12mm.As externally-applied magnetic field B 0When being 0.059 tesla, the enhancing transmission has taken place at wavelength 24.46mm place in the incident electromagnetic wave of the incident electromagnetic wave of s-polarization and p-polarization simultaneously, the electromagnetic transmitance of two kinds of polarizations all approaches 100%, has promptly realized the electromagnetic anomaly transmission of polarization irrelevant at wavelength 24.46mm place; When we change externally-applied magnetic field B 0During to 0.117 tesla, the enhancing transmission has taken place at another wavelength 20.41mm place in the incident electromagnetic wave of the incident electromagnetic wave of s-polarization and p-polarization simultaneously, the electromagnetic transmitance of two kinds of polarizations also all approaches 100%, and the wavelength of the electromagnetic wave abnormality transmission of polarization irrelevant has been transformed into 20.41mm from 24.46mm.
The structural parameters of described device can be determined the value direct ratio of concrete structure parameter and the value of operation wavelength according to the operating wavelength range of design.For the described device of microwave region and terahertz wave band, values of the structural parameters is bigger, in the magnitude of millimeter and micron; For infrared and described device visible light wave range, values of the structural parameters is less, in the magnitude of nanometer.The concrete micro-nano process technology that adopts will decide according to the concrete condition of values of the structural parameters.
This device comprises the sub-monolayer wavelength metal grating and is filled in the interior magnetoactive medium of sub-wave length metal grating slit; The externally-applied magnetic field B of this device 0The direction and its adjustable size that are parallel to the grating slit; The metal part of this device partly has identical thickness with magnetoactive medium, and this thickness size satisfies the requirement of the Fabry-Perot chamber resonance of the lowest-order of minimum support design effort wavelength in the grating slit; The externally-applied magnetic field B of this device 0Big I wait by electromagnet and regulate; This device is realized the required external magnetic field B that applies of function 0Scope depend on selected magnetoactive medium, scope in 0 tesla to 1 tesla; The slit width that this light is deleted satisfies the simultaneous condition of waveguide mode of two kinds of polarized electromagnetic waves; This device can move under all incident angles; This device can be realized the accurate fine setting to the Electromgnetically-transparent wavelength.

Claims (8)

1. the device based on the polarization irrelevant Electromgnetically-transparent of the controllable magnetic field of sub-monolayer wavelength metal grating is characterized in that this device comprises the sub-monolayer wavelength metal grating and is filled in the interior magnetoactive medium of sub-wave length metal grating slit; The metal part of this device partly has identical thickness with magnetoactive medium, and this thickness size satisfies the requirement of the Fabry-Perot chamber resonance of the lowest-order of minimum support design effort wavelength in the grating slit; The cycle of described grating and slit are less than described electromagnetic wavelength.
2. the device of the polarization irrelevant Electromgnetically-transparent of a kind of controllable magnetic field based on the sub-monolayer wavelength metal grating according to claim 1, the metal material that it is characterized in that described grating is gold, silver or aluminium; The magnetoactive medium material of described grating is the electromagnetic magnetoactive medium of transmissive, in microwave region, for microwave ferrite material YIG, at terahertz wave band, is semiconductor material InSb and InAs; At infrared and visible light wave range, be magneto-optic memory technique Bi:GdIG and magnetic semiconductor material CdMnTe.
3. the device of the polarization irrelevant Electromgnetically-transparent of a kind of controllable magnetic field based on the sub-monolayer wavelength metal grating according to claim 1 and 2, the transmissison characteristic that it is characterized in that this device is based on the waveguide mode in the grating slit, and regulatable incident electromagnetic wave is s-polarization or p-polarization; The slit width of this grating satisfies the simultaneous condition of waveguide mode of two kinds of polarized electromagnetic waves.
4. the device of the polarization irrelevant Electromgnetically-transparent of a kind of controllable magnetic field based on the sub-monolayer wavelength metal grating according to claim 1 and 2 is characterized in that this device realizes the required external magnetic field B that applies of function 0Scope depend on selected magnetoactive medium, scope in 0 tesla to 1 tesla; Along with externally-applied magnetic field B 0Increase, corresponding to the transmission peaks generation blue shift or the red shift of the polarization of the active waveguide mode of magnetic.
5. the device of the polarization irrelevant Electromgnetically-transparent of a kind of controllable magnetic field based on the sub-monolayer wavelength metal grating according to claim 1 and 2 is characterized in that the big I of the externally-applied magnetic field B0 of this device is regulated by electromagnet; This device can move under all incident angles; This device can be realized the accurate fine setting to the Electromgnetically-transparent wavelength.
6. the device of the polarization irrelevant Electromgnetically-transparent of a kind of controllable magnetic field based on the sub-monolayer wavelength metal grating according to claim 1 and 2, the applicable wavelengths scope that it is characterized in that this device is from the microwave region to the visible light wave range; The range of size of this metal grating and concrete values of the structural parameters depend on the operating wavelength range of designing requirement, and for microwave region and terahertz wave band, range of size and values of the structural parameters are bigger, in the magnitude of millimeter and micron; For infrared and visible light wave range, range of size and values of the structural parameters are less, in the magnitude of nanometer.
7. the preparation of devices method of the polarization irrelevant Electromgnetically-transparent of the controllable magnetic field based on the sub-monolayer wavelength metal grating according to claim 1, it is characterized in that described device for microwave and terahertz wave band, adopt metal etch or femtosecond laser parallel micromachining technology to produce one dimension cycle sub-wave length metal grating, employing fine setting control system directly fills the magnetoactive medium rod or adopts pulse laser sediment method to fill magnetoactive medium in slit in slit then; The structural parameters of grating are controlled according to designing requirement.
8. the preparation of devices method of the polarization irrelevant Electromgnetically-transparent of the controllable magnetic field based on the sub-monolayer wavelength metal grating according to claim 1, it is characterized in that for infrared and described device visible light wave range, adopt magnetron sputtering technique to produce the single-layer metal film earlier; Adopt the focused-ion-beam lithography method to produce the individual layer grating then; Adopt pulse laser sediment method in the metal grating slit, to fill the medium of magnetic activity again; The structural parameters of grating are controlled according to designing requirement.
CN2009102346234A 2009-11-25 2009-11-25 Electromagnetic wave transmission device with regulative and controllable magnetic field based on sub-monolayer wavelength metal grating and preparation Expired - Fee Related CN101750651B (en)

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