CN101738250B - 矢量水听器的t形敏感体 - Google Patents
矢量水听器的t形敏感体 Download PDFInfo
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- CN101738250B CN101738250B CN2009102618309A CN200910261830A CN101738250B CN 101738250 B CN101738250 B CN 101738250B CN 2009102618309 A CN2009102618309 A CN 2009102618309A CN 200910261830 A CN200910261830 A CN 200910261830A CN 101738250 B CN101738250 B CN 101738250B
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- rectangular parallelepiped
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Description
长方体立柱长度(μm) | 1500 | 2000 | 2500 | 3000 |
固有频率(Hz) | 12335.0 | 6929.4 | 4430.9 | 3075.3 |
长方体立柱上最大应力(pa) | 1.723e4 | 2.919e4 | 4.847e4 | 7.007e4 |
横向干扰应力(pa) | 506.787 | 624.807 | 566.854 | 400.997 |
长方体立柱宽度(μm) | 90 | 110 | 130 | 150 |
固有频率(Hz) | 6919.3 | 6924.8 | 6929.4 | 6934.0 |
长方体立柱上最大应力(pa) | 2.926e4 | 2.921e4 | 2.919e4 | 2.899e4 |
横向干扰应力(pa) | 476.098 | 368.169 | 624.807 | 708.371 |
长方体立柱厚度(μm) | 10 | 20 | 30 | 40 |
固有频率(Hz) | 3465.5 | 6929.4 | 10386. | 13846.0 |
长方体立柱上最大应力(pa) | 1.251e5 | 2.919e4 | 1.367e4 | 0.7472e4 |
横向干扰应力(pa) | 541.824 | 624.807 | 398.705 | 689.038 |
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CN2009102618309A CN101738250B (zh) | 2009-12-30 | 2009-12-30 | 矢量水听器的t形敏感体 |
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CN2009102618309A CN101738250B (zh) | 2009-12-30 | 2009-12-30 | 矢量水听器的t形敏感体 |
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CN101738250A CN101738250A (zh) | 2010-06-16 |
CN101738250B true CN101738250B (zh) | 2011-09-07 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107085627A (zh) * | 2017-03-20 | 2017-08-22 | 上海传输线研究所(中国电子科技集团公司第二十三研究所) | 一种光纤水听器声压灵敏度的仿真计算方法 |
Families Citing this family (7)
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CN102006535B (zh) * | 2010-12-10 | 2013-04-10 | 中北大学 | 矢量水听器用封装结构 |
CN102176006A (zh) * | 2011-01-24 | 2011-09-07 | 中北大学 | 一种硅基单片集成声纳基阵 |
CN103557926B (zh) * | 2013-10-26 | 2016-04-13 | 中北大学 | 基于丁腈橡胶帽封装的高灵敏度宽量程仿生水听器 |
CN107063430B (zh) * | 2017-04-10 | 2019-05-10 | 中北大学 | 基于压阻效应的mems同振型球形振子矢量水听器 |
CN108344496A (zh) * | 2018-02-06 | 2018-07-31 | 山西大学 | 压电式mems矢量振动传感器 |
CN109579975B (zh) * | 2018-12-19 | 2020-10-27 | 中北大学 | X、y方向振动抑制的压阻式三维矢量水听器 |
CN114485909A (zh) * | 2022-01-20 | 2022-05-13 | 中国兵器工业集团第二一四研究所苏州研发中心 | 一种mems矢量水听器芯片及mems矢量水听器 |
Citations (7)
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GB997394A (en) * | 1961-04-25 | 1965-07-07 | Western Electric Co | Improvements in and relating to piezoresistive semiconductor strain gauges |
US4809552A (en) * | 1987-11-23 | 1989-03-07 | Allied-Signal, Inc. | Multidirectional force-sensing transducer |
JP2000074733A (ja) * | 1998-09-02 | 2000-03-14 | Sumitomo Metal Ind Ltd | センサ装置、ピエゾ抵抗型センサ装置、及び振動波検出装置 |
RO115827B1 (ro) * | 1994-12-28 | 2000-06-30 | Inst Cercetare Si Proiectare T | Traductor de vibratii, piezorezistiv |
CN1851472A (zh) * | 2006-05-29 | 2006-10-25 | 东南大学 | 基于微机械技术的压阻非热式流速流向传感器 |
CN1912554A (zh) * | 2006-07-26 | 2007-02-14 | 中北大学 | 共振隧穿仿生矢量水声传感器 |
CN101514919A (zh) * | 2009-03-24 | 2009-08-26 | 中北大学 | 微机电矢量水听器 |
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2009
- 2009-12-30 CN CN2009102618309A patent/CN101738250B/zh not_active Expired - Fee Related
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB997394A (en) * | 1961-04-25 | 1965-07-07 | Western Electric Co | Improvements in and relating to piezoresistive semiconductor strain gauges |
US4809552A (en) * | 1987-11-23 | 1989-03-07 | Allied-Signal, Inc. | Multidirectional force-sensing transducer |
RO115827B1 (ro) * | 1994-12-28 | 2000-06-30 | Inst Cercetare Si Proiectare T | Traductor de vibratii, piezorezistiv |
JP2000074733A (ja) * | 1998-09-02 | 2000-03-14 | Sumitomo Metal Ind Ltd | センサ装置、ピエゾ抵抗型センサ装置、及び振動波検出装置 |
CN1851472A (zh) * | 2006-05-29 | 2006-10-25 | 东南大学 | 基于微机械技术的压阻非热式流速流向传感器 |
CN1912554A (zh) * | 2006-07-26 | 2007-02-14 | 中北大学 | 共振隧穿仿生矢量水声传感器 |
CN101514919A (zh) * | 2009-03-24 | 2009-08-26 | 中北大学 | 微机电矢量水听器 |
Non-Patent Citations (2)
Title |
---|
乔慧,等.一种新型压阻式硅微仿生矢量水听器的设计.《传感技术学报》.2008,第21卷(第2期), * |
谢斌,等.硅微仿生矢量水声传感器研制.《传感技术学报》.2006,第19卷(第5期), * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107085627A (zh) * | 2017-03-20 | 2017-08-22 | 上海传输线研究所(中国电子科技集团公司第二十三研究所) | 一种光纤水听器声压灵敏度的仿真计算方法 |
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Inventor after: Zhang Wendong Inventor after: Zhang Guojun Inventor after: Li Hanqing Inventor after: Wang Hongliang Inventor after: He Changde Inventor after: Guan Linggang Inventor after: Xu Jiao Inventor after: Wang Xiaoyao Inventor after: Wang Peng Inventor before: Zhang Wendong Inventor before: Li Hanqing Inventor before: Zhang Guojun Inventor before: Wang Hongliang Inventor before: He Changde Inventor before: Guan Linggang Inventor before: Xu Jiao Inventor before: Wang Xiaoyao Inventor before: Wang Peng |
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