CN101726844B - Interference phase difference microscope - Google Patents
Interference phase difference microscope Download PDFInfo
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- CN101726844B CN101726844B CN2008101716013A CN200810171601A CN101726844B CN 101726844 B CN101726844 B CN 101726844B CN 2008101716013 A CN2008101716013 A CN 2008101716013A CN 200810171601 A CN200810171601 A CN 200810171601A CN 101726844 B CN101726844 B CN 101726844B
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Abstract
The invention discloses an interference phase difference microscope which is suitable for detecting to-be-detected objects in a measurement zone. The microscope comprises a light source, a beam-splitter and an image sensor, wherein the beam-splitter reflects light beams from the light source to the measurement zone and the reflected light beams penetrate through the beam-splitter and enter the image sensor. The microscope is provided with a first polarized piece, a second polarized piece, a first interference phase difference prism, a wave plate and a second interference phase difference prism, wherein the first polarized piece is arranged between the light source and the beam-splitter and the second polarized piece is arranged between the beam-splitter and the image sensor; the first interference phase difference prism, the wave plate and the second interference phase difference prism are arranged in sequence between the beam-splitter and the measurement zone. The main shaft of the first interference phase difference prism and the main shaft of the second interference phase difference prism form an included angle of 90 degrees.
Description
Technical field
The invention relates to a kind of microscope, and particularly relevant for a kind of interference phase difference microscope (Differential Interference Contrast Microscope, DIC Microscope).
Background technology
One of technology of current thin film transistor display is that thin film transistor (TFT) is formed on the transparent glass substrate, and detects in the mode of interference phase difference.
Figure 1A is the structural representation of existing a kind of interference phase difference microscope, and is exposed in the 6th, 034, No. 814 patents of the U.S..Please refer to Figure 1A, existing interference phase difference microscope 100 is to be used to detect the defective whether determinand 50 has in the making, and interference phase difference microscope 100 comprises light source 110, the first polar biased sheet 120, spectroscope 130, interference phase difference prism 140, the second polar biased sheet 150 and image sensor 160, wherein spectroscope 130 light beam 112 that light source 110 can be produced reflexes on the determinand 50, and can passed spectroscope 130 back incidental image image-position sensors 160, and the first polar biased sheet 120 by determinand 50 beam reflected 112, the interference phase difference prism 140 and the second polar biased sheet 150 all are positioned on the light path of light beam 112.
Prior art can define reference axis (not illustrating) to light beam 112, and the reference axis of light beam 112 is to spend the angle with the main shaft folder 0 of the first interference phase difference prism 140, that is the reference axis of light beam 112 just is equal to the main shaft that is aligned in interference phase difference prism 140.Thus, just can dispose the first polar biased sheet 120 and the second polar biased sheet 150 relatively from the reference axis of light beam 112.It should be noted that, light beam 112 all is the vertical incidence first polar biased sheet 120, interference phase difference prism 140 and the second polar biased sheet 150, therefore aforesaid reference axis or main shaft all is to be positioned on the plane of normal beam 112, the people who is familiar with this technology ought be able to understand the meaning of reference axis or main shaft easily and unlikelyly obscure.In addition, for promoting image quality, prior art can dispose a plurality of lens 170 in addition on the light path of light beam 112.
Refer again to Figure 1A, interference phase difference prism 140 generally is made up of twin shaft (biaxial) refracting crystal of two unlike materials, arbitrary optical axis of another one twin shaft refracting crystal and arbitrary optical axis of one of them twin shaft refracting crystal can align.Therefore light beam 112 can be divided into light beam 112a, the 112b of the different optical path differences of twice after by interference phase difference prism 140 and incident determinand 50, then, light beam 112a, 112b can be combined into light beam 112c by interference phase difference prism 140 after by determinand 50 reflection, wherein light beam 112c has the information that light beam 112a, 112b interfere and incidental image image-position sensor 160 is resolved.
Figure 1A distinguishes light beam 112a, 112b especially for emphasizing, yet actually, light beam 112a, 112b almost are superimposed together and are incident to the identical position of determinand 50.
Figure 1B is the synoptic diagram of determinand, and Fig. 1 C synoptic diagram that to be the interference phase difference microscope that utilizes Figure 1A measure the determinand of Figure 1B, wherein determinand 50 surfaces have the structure of rectangle square, and clear being presented among Figure 1B.In the synoptic diagram of Fig. 1 C, vertical image of resolving axle x all is perfectly clear and presents contrast than bright area, therefore can know the profile lines of finding out the rectangle square left and right sides.But parallel image of resolving axle x all can't be resolved and be presented dark state, therefore is difficult to see the rectangle square profile lines of both sides up and down, and resolves the main shaft that axle x is interference phase difference prism 140.In other words, interference phase difference prism 140 singles only can be to specific vertical axially the resolving of axle of resolving, and resolve axially just can't resolving of axle to parallel.
Fig. 2 is the structural representation of existing another kind of interference phase difference microscope, and is exposed in the 6th, 433, No. 876 patents of the U.S..Please refer to Fig. 2, existing interference phase difference microscope 200 also is to be used to detect the defective whether determinand 50 has in the making, and interference phase difference microscope 200 mainly is that built-in two cover interference systems are to obtain two independent information of resolving axle respectively.Specifically, interference phase difference microscope 200 comprises first light source 210, the first interference phase difference prism 220, first image sensor 230, secondary light source 240, the second interference phase difference prism 250, second image sensor 260, a plurality of spectroscope 270 and control module 280, wherein first light source 210, the first interference phase difference prism 220 and first image sensor 230 can be considered the first cover interference system, and secondary light source 240, the second interference phase difference prism 250 and second image sensor 260 can be considered the second cover interference system.
The parsing axle of the first interference phase difference prism 220 is vertical mutually with the parsing axle of the second interference phase difference prism 250, and the image of first image sensor 230 and second image sensor 260 all has the part that can't resolve.See through control module 280 and connect first image sensor 230 and second image sensor 260, just image lamination can be supplied the part that can't resolve, use and reach the defective that detects determinand 50.
Fig. 3 is the structural representation of existing another interference phase difference microscope, and is exposed in ThinSolid Film periodical 462-463 (2004) 257-262 page or leaf.Please refer to Fig. 3, existing interference phase difference microscope 300 is similar with the interference phase difference microscope 100 of Figure 1A, its difference is that interference phase difference microscope 300 more comprises the one 1/4 ripple plate 380 and the 2 1/4 ripple plate 390, and rotatable interference phase difference prism 140 is to adjust the direction of interference phase difference prism 140 main shafts.Specifically, the one 1/4 ripple plate 380 and the 2 1/4 ripple plate 390 also are to be configured on the light path of light beam 112, and the one 1/4 ripple plate 380 is to be configured between the first polar biased sheet 120 and the spectroscope 130, and the 2 1/4 ripple plate 390 is to be configured between the spectroscope 130 and the second polar biased sheet 150.
The main shaft of the one 1/4 ripple plate 380 and the first polar biased sheet, 120 folder miter angles transfer circular polarization to incident interference phase difference prism 140 with the polarization state with light beam 112.Thus, rotation interference phase difference prism 140 just can be adjusted the direction of parsing axle to obtain detection information, and behind the image that obtains two vertical mutually parsing axles, just these two image laminations can be supplied the part that can't resolve separately, to reach the defective that detects determinand 50.
Summary of the invention
In view of this, disclose an exemplifying embodiment according to the technology of the present invention: interference phase difference microscope, fechtable have two vertical images of resolving axis information simultaneously, to reach the effect of robotization fast detecting.
In addition, disclose another exemplifying embodiment according to the technology of the present invention: interference phase difference microscope, its structure is simple relatively, assembles easily and build to be set to this cheaply.
Interference phase difference microscope one exemplifying embodiment according to the technology of the present invention exposure, comprise light source, spectroscope, image sensor, the first polar biased sheet, the second polar biased sheet, the first interference phase difference prism (DIC prism), the ripple plate and the second interference phase difference prism, wherein spectroscope is that the beam reflection that light source is produced is distinguished to measuring, and light beam can pass spectroscope and the incidental image image-position sensor from measuring after the district is reflected, and the first polar biased sheet, the second polar biased sheet, the first interference phase difference prism (DIC prism), the ripple plate and the second interference phase difference prism all are disposed on the light path of light beam.Specifically, the first polar biased sheet is between light source and spectroscope, and the second polar biased sheet is between spectroscope and image sensor.The first interference phase difference prism is between spectroscope and determinand, and the ripple plate is at the first interference phase difference prism and measures between the district, and the second interference phase difference prism is at the ripple plate and measures between the district.In addition, the main shaft of the main shaft of the first interference phase difference prism and second interference phase difference prism folder an angle of 90 degrees.Another exemplifying embodiment of interference phase difference microscope according to the technology of the present invention exposure, be suitable for detecting determinand, this interference phase difference microscope comprises light source, image sensor, the first polar biased sheet, the first interference phase difference prism, the first ripple plate, the second interference phase difference prism, the 3rd interference phase difference prism, the second ripple plate, the four interference phase difference prisms and the second polar biased sheet, wherein the light beam that light source produced can pass and measure the district and the incidental image image-position sensor, and the first polar biased sheet, the first interference phase difference prism, the first ripple plate, the second interference phase difference prism, the 3rd interference phase difference prism, the second ripple plate, the four interference phase difference prisms and the second polar biased sheet all are disposed on the light path of light beam.Specifically, the first polar biased sheet is at light source and measures between the district, and the first interference phase difference prism is at the first polar biased sheet and measures between the district, and the first ripple plate is at the first interference phase difference prism and measures between the district that the second interference phase difference prism is at the first ripple plate and measures between the district again.The 3rd interference phase difference prism is to measure between district and the image sensor, and the second ripple plate is between the 3rd interference phase difference prism and image sensor, and the 4th interference phase difference prism is between the second ripple plate and image sensor, and the second polar biased sheet is between the 4th interference phase difference prism and image sensor again.In addition, the major axes orientation of the first interference phase difference prism is identical with the major axes orientation of the 4th interference phase difference prism, and the main shaft of the main shaft of the first interference phase difference prism and second interference phase difference prism folder an angle of 90 degrees, and the major axes orientation of the 3rd interference phase difference prism is identical with the major axes orientation of the second interference phase difference prism.
In sum, implement example in the interference phase difference microscope that the present invention discloses, one can be reflect system, or can be the penetration system.With reflect system, the present invention's one example configuration main shaft (resolving axle) orthogonal first interference phase difference prism and two interference phase difference prisms, and the ripple plate of arranging in pairs or groups suitable, just can obtain two vertical information of resolving axle in individual image simultaneously in acquisition and be arranged in the determinand that measures the district, carry out fast automatic scanning by this and significantly improve detection rates with detection.With the penetration system, it is the symmetry extension of reflect system, with orthogonal first interference phase difference prism of main shaft (the 4th interference phase difference prism) and two interference phase difference prisms (the 3rd interference phase difference prism), the suitable ripple plate of arranging in pairs or groups just can be obtained two vertical information of axle of resolving simultaneously to detect determinand in individual image of acquisition.In addition, the present invention only needs additional configuration interference phase difference prism or the ripple plate just can reach the effect of resolving twin shaft simultaneously, so interference phase difference microscope is simple in structure, and assembling makes cost of manufacture relatively cheap easily.
For above and other objects of the present invention, feature and advantage can be become apparent, a plurality of exemplifying embodiments cited below particularly, and cooperate appended graphicly, be described in detail below.
Description of drawings
Figure 1A is the structural representation of existing a kind of interference phase difference microscope;
Figure 1B is the synoptic diagram of determinand;
Fig. 1 C synoptic diagram that to be the interference phase difference microscope that utilizes Figure 1A measure the determinand of Figure 1B;
Fig. 2 is the structural representation of existing another kind of interference phase difference microscope;
Fig. 3 is the structural representation of existing another interference phase difference microscope;
Fig. 4 A is the structural representation according to interference phase difference microscope one embodiment of the technology of the present invention;
Fig. 4 B synoptic diagram that to be the interference phase difference microscope that utilizes example of the present invention measure the determinand of Figure 1B;
Fig. 4 C～4E is respectively the interference phase difference microscope actual detected picked image figure of existing and example of the present invention;
Fig. 5 A is the structural representation according to another embodiment of interference phase difference microscope of the technology of the present invention;
Fig. 5 B and Fig. 5 C are respectively the synoptic diagram of the light beam of Fig. 5 A by the polarization state of each member.
[primary clustering symbol description]
50,60: determinand
100,200,300: interference phase difference microscope
110: light source
112,112a, 112b, 112c: light beam
120: the first polar biased sheets
130: spectroscope
140: the interference phase difference prism
150: the second polar biased sheets
160: image sensor
210: the first light sources
212: the first light beams
220: the first interference phase difference prisms
230: the first image sensors
240: secondary light source
242: the second light beams
250: the second interference phase difference prisms
260: the second image sensors
270: spectroscope
280: control module
380: the 1 ripple plates
390: the 2 1/4 ripple plates
400,500: interference phase difference microscope
410,510: light source
412,412a, 412b, 412aa, 412ab, 412ba, 412bb, 412c, 512,512a, 512b, 512aa, 512ab, 512ba, 512bb, 512c, 512d, 512e: light beam
420: spectroscope
430,520: image sensor
440,530: the first polar biased sheets
450,540: the second polar biased sheets
460,550a: the first interference phase difference prism
470: the ripple plate
480,570a: the second interference phase difference prism
490a, 580a: first lens
490b, 580b: second lens
490c, 580c: the 3rd lens
550b: the 4th interference phase difference prism
560a: the first ripple plate
560b: the second ripple plate
570b: the 3rd interference phase difference prism
580d: the 4th lens
S: measure the district
Embodiment
Fig. 4 A is the structural representation according to the interference phase difference microscope example of the technology of the present invention, and this interference phase difference microscope is a reflect system.Please refer to Fig. 4 A, the interference phase difference microscope 400 of this example is to be used to detect the defective flaw whether determinand 50 have in the making shelter, and determinand 50 can be the silicon substrate of semiconductor technology or glass substrate or the like, but the present invention does not limit the kind of determinand 50.
In the present embodiment, interference phase difference microscope 400 has the district of measurement S to put determinand 50.After narration in, understand based on narration determinand 50 for asking convenient, but the personnel that are familiar with this technology measure the meaning of distinguishing S and are equivalent to determinand 50 when understanding easily.
Accept above-mentioned, interference phase difference microscope 400 comprises light source 410, spectroscope 420, image sensor 430, the first polar biased sheet 440, the second polar biased sheet 450, the first interference phase difference prism 460, the ripple plate 470 and the second interference phase difference prism 480, wherein spectroscope 420 is that the light beam 412 that light source 410 is produced is reflexed to determinand 50, and light beam 412 can pass spectroscope 420 and 430 imagings of incidental image image-position sensor after being reflected by determinand 50, and the first polar biased sheet 440, the second polar biased sheet 450, the first interference phase difference prism 460, the ripple plate 470 and the second interference phase difference prism 480 all are disposed on the light path of light beam 412.
Specifically, the first polar biased sheet 440 is between light source 410 and spectroscope 420, and the second polar biased sheet 450 is between spectroscope 420 and image sensor 430, wherein the main shaft of the first polar biased sheet 440 and the main shaft of the second polar biased sheet 450 for example are vertical mutually, with respectively as the usefulness of inclined to one side and analyzing.In addition, one of characteristics of the present invention are to dispose the first interference phase difference prism 460, ripple plate 470 and the second interference phase difference prism 480 between spectroscope 420 and determinand 50 in regular turn, the wherein first interference phase difference prism, 460 adjacent sub light microscopics 420, and the main shaft of the main shaft of the first interference phase difference prism 460 and the second interference phase difference prism 480 folder an angle of 90 degrees.
By the orthogonal first interference phase difference prism 460 of main shaft and the second interference phase difference prism 480, and collocation ripple plate 470 is adjusted the polarization state of light beam 412, make light beam 412 have two vertical parsing axis informations simultaneously, by this incidental image image-position sensor 430 imagings and detect determinand 50 through behind the first interference phase difference prism 460 and the second interference phase difference prism 480.
Particularly, light beam 412 can be divided into light beam 412a, the 412b of the different optical path differences of twice after passing the first interference phase difference prism 460 being reflected by spectroscope 420.Then, light beam 412a, 412b can be divided into light beam 412aa, the 412ab of the different optical path differences of twice and light beam 412ba, 412bb again separately with incident determinand 50 after passing the second interference phase difference prism 480.Chat slightly earlier and bright be, because the main shaft of the first interference phase difference prism 460 is vertical mutually with the main shaft of the second interference phase difference prism 480, therefore light beam 412aa, 412ab should be the direction of superimposed vertical paper, and light beam 412ba, 412bb also are the direction of superimposed vertical paper.But for asking explanation clear, diagram is still emphasized the effect of beam split with four road light beams.In addition actually, light beam 412aa, 412ab, 412ba, 412bb almost are superimposed together and are incident to the identical position of determinand 50, and are to emphasize interference and intended distinction light beam 412aa, 412ab, 412ba, 412bb in icon.
Accept above-mentioned, light beam 412aa, 412ab, 412ba, 412bb can pass the second interference phase difference prism 480 after by determinand 50 reflections, so that light beam 412aa, 412ab are combined into light beam 412a, and make light beam 412ba, 412bb be combined into light beam 412b, wherein light beam 412a has the information that light beam 412aa, 412ab interfere, and light beam 412b has the information that light beam 412ba, 412bb interfere.That is light beam 412a and light beam 412b have the parsing axis information of the second interference phase difference prism 480 respectively.
Then, light beam 412a and light beam 412b can pass the second interference phase difference prism 480 being combined into light beam 412c, and light beam 412c has the information that light beam 412a, 412b interfere.That is light beam 412c has the parsing axis information of the first interference phase difference prism 460.In other words, light beam 412c is except having the parsing axis information of the first interference phase difference prism 460, the parsing axis information that also has the second interference phase difference prism 480, therefore the image of light beam 412c incidental image image-position sensor 430 just can show two vertical full details of resolving axle simultaneously, by this with rapid detection determinand 50.
Interference phase difference microscope 400 need not to carry out the image that any numerical evaluation just can directly obtain complete information, and then can significantly promote the speed of acquisition complete image, and increases the whole efficiency that detects determinand 50, in order to the carrying out of automatic scanning.
In addition, interference phase difference microscope 400 is only set up the ripple plate 470 and the second interference phase difference prism 480 (interference phase difference microscope 100 that please compare the prototype of Figure 1A), there is no complicated light path design, also need not the wheelwork of additional configuration precision.Therefore the structure of interference phase difference microscope 400 is simple relatively, and assembling easily and build and be set to that this is also relatively cheap.
Main shaft that it should be noted that aforementioned alleged member all is for light beam 412, is not with respect to absolute coordinate system, and the people who is familiar with this technology is when understanding easily.Therefore present embodiment can define reference axis to light beam 412 earlier, removes the major axes orientation of all members of adjustment again with this reference axis.For simplicity, present embodiment is the lineshaft registration with the reference axis of light beam 412 and the first interference phase difference prism 460, that is the main shaft of the reference axis of light beam 412 and the first interference phase difference prism 460 folder 0 degree angle.Thus, the angle of relative light beam 412 reference axis of other member main shaft of adjustment just is equal to the angle of the relative first interference phase difference prism of other member main shaft of adjustment 460 main shafts.
According to aforementioned because the main shaft folder an angle of 90 degrees of the main shaft of the first interference phase difference prism 460 and two interference phase difference prisms 480, so the main shaft of the second interference phase difference prism just can with benchmark axle clamp an angle of 90 degrees.In addition, in the present embodiment, the main shaft of the first polar biased sheet 440 and benchmark axle clamp miter angle, and the main shaft of the second polar biased sheet 450 and benchmark axle clamp 135 degree angles are with respectively as the usefulness that plays inclined to one side and analyzing.
In addition, the effect of ripple plate 470 is to adjust the polarization state of light beam 412, and with present embodiment, ripple plate 470 for example is 1/4 ripple plate, and the main shaft of 1/4 ripple plate and reference axis are the folder miter angles.But, in other embodiments, ripple plate 470 also can be 1/2 ripple plate, and the main shaft of 1/2 ripple plate and reference axis are folder 22.5 degree angles.
Fig. 4 B synoptic diagram that to be the interference phase difference microscope that utilizes this example measure the determinand of Figure 1B.Please also refer to Figure 1B, 1C, 4B,,, so can know the complete profile lines of demonstration rectangle square because Fig. 4 B can show two information of resolving axial (x parsing axle is resolved axle with y) simultaneously compared to the synoptic diagram of Fig. 1 C.
In addition, Fig. 4 C～4E is respectively the interference phase difference microscope actual detected picked image figure of existing and this example, wherein Fig. 4 C is 100 picked image figure of existing interference phase difference microscope, disposes 1/4 ripple plate and 1/4 ripple plate respectively and picked image figure and Fig. 4 D and Fig. 4 E are interference phase difference microscope 400.Please also refer to Fig. 4 C～4E, Fig. 4 C only can show the axial information of single parsing (in the icon for vertical direction), profile that therefore can't a plurality of strip squares of complete representation, and only can find out the border of the strip square left and right sides.On the contrary, Fig. 4 D and Fig. 4 E can show simultaneously that all two are resolved axial information, therefore can know the profile of expressing these strip squares, whether have defective or flaw in the making with detection determinand 50.
Embodiment that it should be noted that above-mentioned as 1/4 ripple plate or 1/2 ripple plate illustrates, and 1/4 ripple plate or 1/2 ripple plate be the ripple plate of using always, thus describe with this, but the present invention does not limit the kind and the phase-delay quantity of ripple plate 470.The people who is familiar with this technology is when can be according to aforementioned and adjust the kind and the main shaft angle of ripple plate, but it still belongs in the category of the present invention.
Refer again to Fig. 4 A, for promoting the collimation focusing degree of accuracy of light beam, in the present embodiment, interference phase difference microscope 400 more can dispose the first lens 490a, the second lens 490b and the 3rd lens 490c again on the light path of light beam 412, wherein the first lens 490a is between the light source 410 and the first polar biased sheet 440, and the second lens 490b is between the determinand 50 and the second interference phase difference prism 480, and the 3rd lens 490c is between the second polar biased sheet 450 and image sensor 430.Subsidiary one what carry is that the configuration mode of said lens is only for for example, and the present invention does not limit the quantity and the equipping position of these lens.In addition, image sensor 430 can be Charged Coupled Device (Charged Coupled Device, CCD) or complementary metal oxide semiconductor (CMOS) (Complementary Metal-Oxide Semiconductor, CMOS), but the present invention does not also limit the kind of image sensor 430.
Under some specific situation, what need detection is not the structure on determinand surface, but the structure of determinand inside, therefore the interference phase difference microscope that just needs the penetration framework, wherein the penetration interference phase difference microscope generally is that the symmetry that is designed to reflective interference phase difference microscope is extended.Below will for embodiment penetration interference phase difference microscope of the present invention be described in addition again, and, incite somebody to action again defined label system again, but the member of same names still has similar function for avoiding confusion.
Fig. 5 A is the structural representation according to the interference phase difference microscope of another enforcement example of the technology of the present invention, and this interference phase difference microscope is the penetration system.Please refer to Fig. 5 A, the interference phase difference microscope 500 of present embodiment is to be used to detect determinand 60 inner structures whether to have the defective flaw in the making
, and determinand 60 is suitable for allowing light beam pass through.
In the present embodiment, interference phase difference microscope 500 has the district of measurement S to put determinand 60.After narration in, understand based on narration determinand 60 for asking convenient, but the people who is familiar with this technology measures the meaning of distinguishing S and is equivalent to determinand 60 when understanding easily.
Accept above-mentioned, interference phase difference microscope 500 comprises light source 510, image sensor 520, the first polar biased sheet 530, the second polar biased sheet 540, the first interference phase difference prism 550a, the first ripple plate 560a, the second interference phase difference prism 570a, the 3rd interference phase difference prism 570b, the second ripple plate 560b and the 4th interference phase difference prism 550b, the light beam 512 that wherein light source 510 produced can pass determinand 60 and incidental image image-position sensor 520, and the first polar biased sheet 530, the second polar biased sheet 540, the first interference phase difference prism 550a, the first ripple plate 560a, the second interference phase difference prism 570a, the 3rd interference phase difference prism 570b, the second ripple plate 560b and four interference phase difference prism 550b all are disposed on the light path of light beam.
It is first lens set (lens set) that the first interference phase difference prism 550a, the first ripple plate 560a, the second interference phase difference prism 570a can be considered, and and the first polar biased sheet 530 be arranged in regular turn between light source 510 and the determinand 60, wherein the first polar biased sheet 530 is contiguous light sources 510, and the first interference phase difference prism 550a is the contiguous first polar biased sheet 530.Similarly, it is second lens set that the 3rd interference phase difference prism 570b, the second ripple plate 560b and the 4th interference phase difference prism 550b can be considered, and the symmetry that is first lens set is extended, so second lens set is and the second polar biased sheet 540 is to be arranged in regular turn between determinand 60 and the image sensor 520, wherein the second polar biased sheet 540 is contiguous image sensors 520, and the 4th interference phase difference prism 550b is the contiguous second polar biased sheet 540.
Similar aforementioned, this example mainly is to utilize the orthogonal interference phase difference prism collocation of main shaft ripple plate to adjust the polarization state of light beam, makes light beam can have two vertical axis informations of resolving simultaneously.Therefore, the main shaft of Dui Cheng first interference phase difference prism 550a and the 4th interference phase difference prism 550b can be vertical with the main shaft of the second interference phase difference prism 570a of symmetry and the 3rd interference phase difference prism 570b.In other words, if the main shaft with the first interference phase difference prism 550a is a benchmark, then the main shaft of the 4th interference phase difference prism 550b can be spent the angle with the main shaft folder 0 of the first interference phase difference prism 550a, and the main shaft of the second interference phase difference prism 570a and the 3rd interference phase difference prism 570b can press from both sides an angle of 90 degrees with the main shaft of the first interference phase difference prism 550a.
Accept above-mentionedly, light beam 512 can be divided into light beam 512a, the 512b of the different optical path differences of twice after passing the first interference phase difference prism 550a.Then, light beam 512a, 512b can be divided into light beam 512aa, the 512ab of the different optical path differences of twice and light beam 512ba, 512bb again separately with incident determinand 50 after passing the second interference phase difference prism 570a.Afterwards, light beam 512aa, 512ab will be polymerized to light beam 512c after passing the 3rd interference phase difference prism 570b, and light beam 512ba, 512bb will be polymerized to light beam 512d after passing the 3rd interference phase difference prism 570b, wherein light beam 512c has the information that light beam 512aa, 512ab interfere, and light beam 512d has the information that light beam 512ba, 512bb interfere.That is light beam 512c and light beam 512d have the parsing axis information of the second interference phase difference prism 570a and the 3rd interference phase difference prism 570b respectively.
At last, light beam 512c and light beam 512d can pass the 4th interference phase difference prism 550b being combined into light beam 512e, and light beam 512e has the information that light beam 512c, 512d interfere.That is light beam 512e has the parsing axis information of the first interference phase difference prism 550a and the 4th interference phase difference prism 550b.In other words, the image of light beam 512e incidental image image-position sensor 430 just can show two vertical full details of resolving axle simultaneously, by this with rapid detection determinand 60.
Similar aforementioned, present embodiment can define reference axis to light beam 512 earlier, and for asking convenient, present embodiment is the lineshaft registration with the reference axis of light beam 512 and the first interference phase difference prism 550a, that is the main shaft of the reference axis of light beam 512 and first interference phase difference prism 550a folder 0 degree angle.Thus, the angle of relative light beam 512 reference axis of other member main shaft of adjustment just is equal to the angle of the relative first interference phase difference prism 550a main shaft of other member main shaft of adjustment.
According to aforementioned, then the main shaft of the second interference phase difference prism 570a and the 3rd interference phase difference prism 570b all can with benchmark axle clamp an angle of 90 degrees, and the main shaft of the 4th interference phase difference prism 550b can with benchmark axle clamp 0 degree angle.In addition, in the present embodiment, the main shaft of the first polar biased sheet 530 and benchmark axle clamp miter angle, and the main shaft of the second polar biased sheet 540 and benchmark axle clamp 135 degree angles are with respectively as the usefulness that plays inclined to one side and analyzing.
In addition, the effect of the first ripple plate 560a and the second ripple plate 560b is to adjust the polarization state of light beam 512, and with present embodiment, the first ripple plate 560a and the second ripple plate 560b can be 1/4 ripple plate simultaneously, and the main shaft of 1/4 ripple plate all with benchmark axle clamp miter angle.But, in other embodiments, the first ripple plate 560a and the second ripple plate 560b also can be 1/2 ripple plate, and the main shaft of 1/2 ripple plate is all spent angles with benchmark axle clamp 22.5.
Fig. 5 B and Fig. 5 C are respectively the synoptic diagram of the light beam of Fig. 5 A by the polarization state of each member, and wherein the first ripple plate of Fig. 5 B and the second ripple plate are 1/2 ripple plate, and the first ripple plate of Fig. 5 C and the second ripple plate are 1/4 ripple plate.Please also refer to Fig. 5 A～5C, just can understand the change of the polarization state of light beam 512, and know the effect of ripple plate more, wherein 1/2 ripple plate (the first ripple plate) is that polarization direction with light beam 512a, 512b transfers miter angle and 135 degree angles to incident two interference phase difference prism 570a, and 1/4 ripple plate (the first ripple plate) to be polarization direction with light beam 512a, 512b transfer circular polarization to incident two interference phase difference prism 570a (the 1/4 ripple plate of the similar Fig. 3 of its effect).In addition, be familiar with the people of this technology when can just repeating no more in this according to the detailed situation of the reflect system of analogizing Fig. 4 A.
Refer again to Fig. 5 A, for promoting the collimation focusing degree of accuracy of light beam, in the present embodiment, interference phase difference microscope 500 more can dispose the first lens 580a again on the light path of light beam 512, the second lens 580b, the 3rd lens 580c and the 4th lens 580d, wherein the first lens 580a is between the light source 510 and the first polar biased sheet 530, and the second lens 580b is between the second interference phase difference prism 570a and determinand 60, and the 3rd lens 580c is that the 4th lens 580d is between the second polar biased sheet 540 and image sensor 520 again between determinand 60 and the 3rd interference phase difference prism 570b.Subsidiary one what carry is that the configuration mode of said lens is only for for example, and the present invention does not limit the quantity and the equipping position of these lens.
In sum, interference phase difference microscope of the present invention has following characteristics at least:
One, utilizes the orthogonal interference phase difference prism of two main shafts (resolving axle), and the ripple plate of arranging in pairs or groups suitable, just can obtain two vertical information of resolving axle in individual image simultaneously to detect determinand in acquisition, carry out fast automatic scanning by this and significantly improve detection rates.
Two, interference phase difference microscope is simple in structure, and assembling makes cost of manufacture relatively cheap easily.
Though the present invention discloses as above with preferred embodiment; right its is not in order to limit the present invention; under the situation that does not deviate from spirit of the present invention and essence thereof; those of ordinary skill in the art work as can make various corresponding changes and distortion according to the present invention, but these corresponding changes and distortion all should belong to the protection domain of the appended claim of the present invention.
Claims (10)
1. an interference phase difference microscope is characterized in that, comprising:
One light source is suitable for producing a light beam;
One spectroscope reflects this light beam to one and measures the district;
One image sensor, this light beam can pass this spectroscope and this image sensor of incident after being reflected from this measurement district;
One first polar biased sheet is disposed on the light path of this light beam, and between this light source and this spectroscope;
One second polar biased sheet is disposed on the light path of this light beam, and between this spectroscope and this image sensor;
One first interference phase difference prism is disposed on the light path of this light beam, and measures between the district at this spectroscope and this;
One ripple plate is disposed on the light path of this light beam, and measures between the district at this first interference phase difference prism and this; And
One second interference phase difference prism is disposed on the light path of this light beam, and measures between the district at this ripple plate and this, and the main shaft of the main shaft of this first interference phase difference prism and this second interference phase difference prism folder an angle of 90 degrees.
2. interference phase difference microscope as claimed in claim 1 is characterized in that, this ripple plate is one 1/4 ripple plates.
3. interference phase difference microscope as claimed in claim 2, it is characterized in that, this light beam has a reference axis, the main shaft of this first polar biased sheet and this benchmark axle clamp miter angle, the main shaft of this second polar biased sheet and this benchmark axle clamp 135 degree angles, the main shaft of this first interference phase difference prism and this benchmark axle clamp 0 degree angle, the main shaft of this second interference phase difference prism and this benchmark axle clamp an angle of 90 degrees, the main shaft of this 1/4 ripple plate and this benchmark axle clamp miter angle.
4. interference phase difference microscope as claimed in claim 1 is characterized in that, this ripple plate is one 1/2 ripple plates.
5. interference phase difference microscope as claimed in claim 2, it is characterized in that, this light beam has a reference axis, the main shaft of this first polar biased sheet and this benchmark axle clamp miter angle, the main shaft of this second polar biased sheet and this benchmark axle clamp 135 degree angles, the main shaft of this first interference phase difference prism and this benchmark axle clamp 0 degree angle, the main shaft of this second interference phase difference prism and this benchmark axle clamp an angle of 90 degrees, the main shaft of this 1/4 ripple plate and this benchmark axle clamp 22.5 degree angles.
6. an interference phase difference microscope is characterized in that, comprising:
One light source is suitable for producing a light beam;
One image sensor, this light beam pass one and measure the district and this image sensor of incident;
One first polar biased sheet is disposed on the light path of this light beam, and measures between the district at this light source and this;
One first interference phase difference prism is disposed on the light path of this light beam, and measures between the district at this first polar biased sheet and this;
One first ripple plate is disposed on the light path of this light beam, and measures between the district at this first interference phase difference prism and this;
One second interference phase difference prism is disposed on the light path of this light beam, and measures between the district at this first ripple plate and this, and the main shaft of the main shaft of this first interference phase difference prism and this second interference phase difference prism folder an angle of 90 degrees;
One the 3rd interference phase difference prism is disposed on the light path of this light beam, and measures between district and this image sensor at this, and the main shaft of the main shaft of this second interference phase difference prism and the 3rd interference phase difference prism folder 0 degree angle;
One second ripple plate is disposed on the light path of this light beam, and between the 3rd interference phase difference prism and this image sensor;
One the 4th interference phase difference prism is disposed on the light path of this light beam, and between this second ripple plate and this image sensor, and the main shaft of the main shaft of this first interference phase difference prism and the 4th interference phase difference prism folder 0 degree angle; And
One second polar biased sheet is disposed on the light path of this light beam, and between the 4th interference phase difference prism and this image sensor.
7. interference phase difference microscope as claimed in claim 6 is characterized in that, this first ripple plate is one the 1 ripple plate, and this second ripple plate is one the 2 1/4 ripple plate.
8. interference phase difference microscope as claimed in claim 7, it is characterized in that, this light beam has a reference axis, the main shaft of this first polar biased sheet and this benchmark axle clamp miter angle, the main shaft of this second polar biased sheet and this benchmark axle clamp 135 degree angles, the main shaft of this first interference phase difference prism and this benchmark axle clamp 0 degree angle, the main shaft of this second interference phase difference prism and this benchmark axle clamp an angle of 90 degrees, the main shaft of the 3rd interference phase difference prism and this benchmark axle clamp an angle of 90 degrees, the main shaft of the 4th interference phase difference prism and this benchmark axle clamp 0 degree angle, the main shaft of the one 1/4 ripple plate and this benchmark axle clamp miter angle, the main shaft of the 2 1/4 ripple plate and this benchmark axle clamp miter angle.
9. interference phase difference microscope as claimed in claim 6 is characterized in that, this first ripple plate is one the 1 ripple plate, and this second ripple plate is one the 2 1/2 ripple plate.
10. interference phase difference microscope as claimed in claim 9, it is characterized in that, this light beam has a reference axis, the main shaft of this first polar biased sheet and this benchmark axle clamp miter angle, the main shaft of this second polar biased sheet and this benchmark axle clamp 135 degree angles, the main shaft of this first interference phase difference prism and this benchmark axle clamp 0 degree angle, the main shaft of this second interference phase difference prism and this benchmark axle clamp an angle of 90 degrees, the main shaft of the 3rd interference phase difference prism and this benchmark axle clamp an angle of 90 degrees, the main shaft of the 4th interference phase difference prism and this benchmark axle clamp 0 degree angle, the main shaft of the one 1/2 ripple plate and this benchmark axle clamp 22.5 degree angles, the main shaft of the 2 1/2 ripple plate and this benchmark axle clamp 22.5 degree angles.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101716013A CN101726844B (en) | 2008-10-21 | 2008-10-21 | Interference phase difference microscope |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2008101716013A CN101726844B (en) | 2008-10-21 | 2008-10-21 | Interference phase difference microscope |
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| CN101726844A CN101726844A (en) | 2010-06-09 |
| CN101726844B true CN101726844B (en) | 2011-11-23 |
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| CN2008101716013A Expired - Fee Related CN101726844B (en) | 2008-10-21 | 2008-10-21 | Interference phase difference microscope |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102519909B (en) * | 2011-11-14 | 2013-08-21 | 重庆大学 | Air-space low-interference phase microscope based on liquid crystal tunable filter |
| TWI463175B (en) * | 2012-11-07 | 2014-12-01 | Ind Tech Res Inst | Optical rotation device and differential interference contrast microscope |
| WO2017172324A1 (en) * | 2016-03-29 | 2017-10-05 | Applied Materials, Inc. | Metrology systems for substrate stress and deformation measurement |
| DE102017122413A1 (en) * | 2017-09-27 | 2019-03-28 | Abberior Instruments Gmbh | Device for selectively shaping phase fronts of a light beam and their use |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030043459A1 (en) * | 2001-06-27 | 2003-03-06 | Kumiko Matsui | Differential interference microscope |
| CN1862219A (en) * | 2006-06-21 | 2006-11-15 | 中国科学院力学研究所 | Long working distance interference microscope system |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030043459A1 (en) * | 2001-06-27 | 2003-03-06 | Kumiko Matsui | Differential interference microscope |
| CN1862219A (en) * | 2006-06-21 | 2006-11-15 | 中国科学院力学研究所 | Long working distance interference microscope system |
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