CN101722362A - Laser direct writing method of grid pattern formed by intersected latitude lines of deep concave spherical surface - Google Patents
Laser direct writing method of grid pattern formed by intersected latitude lines of deep concave spherical surface Download PDFInfo
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- CN101722362A CN101722362A CN 200910218070 CN200910218070A CN101722362A CN 101722362 A CN101722362 A CN 101722362A CN 200910218070 CN200910218070 CN 200910218070 CN 200910218070 A CN200910218070 A CN 200910218070A CN 101722362 A CN101722362 A CN 101722362A
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Abstract
The invention relates to a laser direct writing method of a grid pattern formed by intersected latitude lines of a deep concave spherical surface. Firstly, a vertical axis, a horizontal axis and a work piece rotating axis are set, and the included angle between the rotating axis and the vertical axis is alpha; a direct writing object lens rotates around the horizontal axis, and a spherical work piece rotates around the vertical axis, thus, the scoring of latitude lines between the top point and the lowest point of the concave surface of the spherical work piece is accomplished; then the spherical work piece rotates 180 degrees around the rotating axis, to score latitude lines in the zone formed by the latitude line passing through the top point of the concave surface of the spherical work piece and the edge of the caliber of the spherical work piece; and then the spherical work piece rotates 90 degrees around the rotating axis, and the processes are repeated till intersected grids of full aperture latitude lines of the concave surface of the spherical work piece are generated, and then laser direct writing is finished. The method solves the problem that when the direct writing object lens rotates to the top of the spherical surface, the linear speed is zero, therefore, the light exposure can not be controlled, the processing scope is extended to hemisphere or even hyper-hemisphere, and the problem of the intersected grids of full aperture latitude lines of the hemispherical or over hyper-hemispherical work piece is effectively solved.
Description
Technical field
The present invention relates to a kind of method that on curved surface elements, prepares fine bargraphs, particularly a kind of laser direct writing method of concave spherical surface grid pattern formed by intersected latitude lines.
Background technology
Spherical radome fairing also becomes the main thoroughfare of outside electromagnetic interference (or internal electromagnetic radiation) when seeing through guidance (or observation) optical region, effectively shield electromagnetic interference of preparation metallic mesh film is gone up on surface (deep concave spherical surface) within it, satisfy the cabling requirement of making the metallic mesh film on the deep concave spherical surface, at first will on deep concave spherical surface, generate the grid pattern of fine lines.
The method of traditional mechanical scratching grating also is not suitable for the generation of Micropicture on the spherical radome fairing.Reason has two: one, and this method can be damaged the radome fairing substrate; The 2nd, the general cutting of grating ruling very shallow (tens nanometers), the degree of depth that can't satisfy the net grating routing requires (generally requiring groove depth hundreds of nanometer at least).And the single-point diamond turning technology that diffraction optical element is used always in making can only generate Micropicture in substrate, is not a kind of wiring technique (Specification Of Wiring increases metal wire on Micropicture).
In the curved surface substrate making of Micropicture also common resins shift modulus method and planar graph is transplanted to curved surface gets on.Its major advantage is that technology is simple, and cost is low; Major defect is generally to be used for little dark coke ratio curved surface elements, and precision is low, and error can reach tens of micron dimensions.And according to the basic theories of metallic mesh film, the net grid line is wide more little with the ratio cycle, and its performance is high more, and the live width of metallic mesh film is narrow more often good more, generally is less than 10 μ m.So this method also is not suitable for being used for making the grid pattern of metallic mesh film requirement on curved surface.
Adopt mask projection exposure rule to need high accuracy mask of preparation earlier, aim at exposure, etching then.Yet, being subjected to the influence of slit diffraction, the mask projection exposure technique requires mask and substrate to coincide well.Adopting the mask projection exposure method to make grid pattern on sphere need be with sphere mask and spherical substrate to repairing, and this just very easily damages expensive radome fairing substrate, and this method is sphere mask of requirement making at first also.
Directly write exposure method and be a kind of photochemical method that directly adopts laser (or electron beam, X ray) focal spot to delineate.Compare with the mask projection exposure method, directly write exposure method precision higher (shortcoming is that productivity ratio is low, the equipment cost costliness), it is divided into laser direct-writing, electron-beam direct writing, the straight literary style of X ray etc. again.With the laser direct-writing ratio, electron-beam direct writing, X ray write directly that precision is higher, technical difficulty is bigger, and equipment cost is more expensive, is not suitable for national conditions and actual needs.And the laser direct-writing technology acuracy can reach 1 μ m live width, and equipment cost is low, and domestic have a mature technology, is suitable for the first-selected photoetching technique as generating mesh figure on the sphere.
" optical precision engineering " discloses one piece of paper " scanning method is made the error analysis of the equidistant net grid of concave spherical surface with one heart " (2006 the 2nd phases of magazine), wherein briefly introduced and adopted concentric scan laser directly to write motion mode is made equidistant net grid at the spherical work-piece inner surface principle and device, but direct writing means that paper is mentioned and principle device (workpiece is edge-on) only can generate the crossing grid of parallel on less than the workpiece concave spherical surface of hemisphere, can not solve the delineation problem of the unified pattern of hemisphere (even super hemisphere).And, in real system,, adopt the edge-on mounting means of workpiece the constructive interference problem of objective shaft seat also to occur directly writing through regular meeting even less than the hemisphere workpiece.
Summary of the invention
The technical problem to be solved in the present invention provides a kind of laser direct writing method of grid pattern formed by intersected latitude lines of deep concave spherical surface.
In order to solve the problems of the technologies described above, the laser direct writing method of grid pattern formed by intersected latitude lines of deep concave spherical surface of the present invention comprises the steps:
(1) sets vertical axis AA ', horizontal axis C C ' and rotating shaft BB '; Described vertical axis AA ', horizontal axis C C ' and rotating shaft BB ' intersect at the centre of sphere O of spherical work-piece, and the angle between rotating shaft BB ' and the vertical axis AA ' is α, 90 ° of 0 ∠ α ∠;
(2) directly writing object lens rotates in the minimum point of the spherical work-piece angle beta scope corresponding with the concave surface summit around horizontal axis C C '; Directly write object lens and whenever turn to a set angle, the control spherical work-piece is rotated around vertical axis AA '; In the spherical work-piece rotation process, the opening and closing of control laser shutter make and directly write the object lens focal spot depict a parallel on the spherical work-piece concave surface; Repeat the delineation of this process parallel between concave surface summit of finishing spherical work-piece and minimum point;
(3) make spherical work-piece rotate 180 ° around rotating shaft BB ';
(4) directly writing object lens rotates in the minimum point of the spherical work-piece angle beta scope corresponding with the concave surface summit around horizontal axis C C '; Directly write object lens and whenever turn to a set angle, the control spherical work-piece is rotated around vertical axis AA '; In the spherical work-piece rotation process, the opening and closing of control laser shutter make and directly write object lens focal spot delineation parallel in the zone that the parallel and the spherical work-piece bore edge on the concave surface summit of passing through spherical work-piece constitute; Repeat the delineation of this process parallel in finishing this zone;
(5) spherical work-piece is rotated 90 ° around rotating shaft BB ', the process of repeating step (2)～step (4) intersects grid until generating the unified parallel of spherical work-piece concave surface, and laser direct-writing finishes.
The form that the present invention adopts spherical work-piece to tilt to install, by single group parallel delineation 180 ° of rotational workpieces when generating a parallel by spherical work-piece concave surface summit, continue again to carrying out the parallel delineation by the parallel on spherical work-piece concave surface summit and the zone of spherical work-piece bore edge formation, solved that linear velocity is the zero uncontrollable problem of light exposure when directly writing object lens and going to the sphere dome, the range of work is extended to hemisphere, even super hemisphere, solved the problem that hemisphere and the unified parallel of super hemisphere workpiece intersect the grid delineation effectively.The present invention is applicable to that also smaller part ball workpiece concave spherical surface parallel intersects the delineation of grid.
Description of drawings
Below in conjunction with the drawings and specific embodiments the present invention is described in further detail.
Fig. 1 (a), Fig. 1 (b) are for directly writing object lens in the laser direct writing method of grid pattern formed by intersected latitude lines of deep concave spherical surface of the present invention and the spherical work-piece position concerns schematic diagram.
Fig. 2 (a), Fig. 2 (b), Fig. 2 (c), Fig. 2 (d) are the perspective view that generates the parallel process on the spherical work-piece concave surface.
Fig. 3 is the front view of the apparatus structure of realization grid pattern formed by intersected latitude lines of deep concave spherical surface laser direct writing method of the present invention.
Fig. 4 is the vertical view of the apparatus structure of realization grid pattern formed by intersected latitude lines of deep concave spherical surface laser direct writing method of the present invention.
Fig. 5 is the rearview of the apparatus structure of realization grid pattern formed by intersected latitude lines of deep concave spherical surface laser direct writing method of the present invention.
The specific embodiment
Delineation with the crossing grid of hemispherical workpiece parallel is an example below, the present invention is elaborated, but this can not limit protection scope of the present invention.
(1) shown in Fig. 1 (a), Fig. 1 (b), sets vertical axis AA ', horizontal axis C C ' and rotating shaft BB '; Described vertical axis AA ', horizontal axis C C ' and rotating shaft BB ' intersect at the centre of sphere O of spherical work-piece 5, and the angle between rotating shaft BB ' and the vertical axis AA ' is α, α=45 °; (α can also be any angle in 0～90 ° of scope);
(2) shown in Fig. 2 (a), close laser shutter, directly write object lens 6 and rotate counterclockwise to the setting position more than spherical work-piece 5 minimum points around horizontal axis C C '; Then spherical work-piece 5 around vertical axis AA ' clockwise (overlooking) first A turning to edge, lower-left outside the delineation bore with directly write the object lens focal spot and overlap;
(3) open laser shutter, spherical work-piece 5 around vertical axis AA ' counterclockwise (overlooking) second B turning to bottom right edge outside the spherical work-piece delineation bore with directly write the object lens focal spot and overlap;
(4) close laser shutter, directly write object lens 6 and rotate counterclockwise a set angle around horizontal axis C C ', spherical work-piece 5 is around vertical axis AA ' (overlooking) rotation clockwise, and the thirdly C that extremely directly writes outside object lens focal spot and the spherical work-piece delineation bore edge overlaps;
(5) open laser shutter, spherical work-piece 5 around vertical axis AA ' clockwise (overlooking) go to outside the delineation bore edge the 4th D with directly write the object lens focal spot and overlap;
(6) process of repeating step (2), (3), (4) goes out a parallel by spherical work-piece concave surface summit until laser grooving and scribing, closes laser shutter; Constitute a border circular areas by the parallel on the concave surface summit of spherical work-piece 5 and the edge of spherical work-piece 5 this moment;
(7) shown in Fig. 2 (b), spherical work-piece 5 is rotated 180 ° around rotating shaft BB ' counterclockwise (or clockwise);
(8) directly write object lens 6 and clockwise rotate a set angle around horizontal axis C C '; Spherical work-piece 5 around vertical axis AA ' counterclockwise (overlooking) go to and directly write the object lens focal spot and overlap with the 5th P on the border circular areas edge; Open laser shutter, spherical work-piece 5 goes to directly to be write the object lens focal spot and overlaps with the 6th M on this border circular areas edge, closes laser shutter;
(9) directly write object lens 6 and clockwise rotate a set angle around horizontal axis C C '; Spherical work-piece 5 is rotated around vertical axis AA ', overlaps with the 7th N on the border circular areas edge to directly writing the object lens focal spot; Open laser shutter, spherical work-piece 5 goes to directly to be write the object lens focal spot and overlaps with the 8th Q on this border circular areas edge, closes laser shutter;
(11) repeating step (8), step (9), laser shutter is closed in the delineation of parallel in finishing border circular areas;
(12) shown in Fig. 2 (c), Fig. 2 (d), spherical work-piece 5 is rotated 90 ° around rotating shaft BB ' counterclockwise (or clockwise), repeating step (2)～step (11) process intersects grid until finishing the unified generation parallel of spherical work-piece concave surface, and laser direct-writing finishes.
Shown in Fig. 3,4,5, the device of realizing the laser direct writing method of grid pattern formed by intersected latitude lines of deep concave spherical surface comprises pedestal 1, horizontal revolving stage 2, column 3, workpiece rotating shaft 4, directly writes object lens 6, objective shaft seat 7, counterweight 8, speculum 9, object lens calibration rotating shaft 10, speculum 11 and speculum 12.
The axes intersect of workpiece rotating shaft 4, horizontal revolving stage 2 and object lens calibration rotating shaft 10 is in the centre of sphere of spherical work-piece 5; Spherical work-piece 5 is installed and is positioned in the workpiece rotating shaft 4, workpiece rotating shaft 4 is installed on the column 3, (the angle α between the axis of the axis of workpiece rotating shaft 4 and horizontal revolving stage 2 is between 0 ° and 90 ° on the column 3 installation position level turntables 2, this angle depends on the size in deep concave spherical surface geometric parameter and apparatus structure space, and present embodiment adopts α=45 °); Spherical work-piece 5 can be rotated around the axis of workpiece rotating shaft 4, also can rotate around the axis of horizontal revolving stage 2 by workpiece rotating shaft 4 and column 3; For mechanical balance, counterweight 8 is fixed on the horizontal revolving stage 2 on the position with column 3 symmetries.Horizontal revolving stage 2 is installed on the pedestal 1, by radially steel ball and axially steel ball and pedestal 1 flexible connection, can rotate with respect to pedestal 1; Directly write object lens 6 and speculum 9 and install and be positioned in the object lens calibration rotating shaft 10, object lens calibration rotating shaft 10 is installed on the objective shaft seat 7, directly writes object lens 6, speculum 9 and object lens calibration rotating shaft 10 and can rotate around the axis of object lens calibration rotating shaft 10; Speculum 11 and speculum 12 are fixed on the objective shaft seat 7, and objective shaft seat 7 is fixed with one with pedestal 1; Laser direct-writing and calibration system 14 emitting lasers incide speculum 11 through laser shutter 13, import and directly write object lens 6 through speculum 12, speculum 9 again, focus on the concave surface of spherical work-piece 5.
Close laser shutter, directly write object lens 6 and rotate counterclockwise to the setting position more than the spherical work-piece minimum point with object lens calibration rotating shaft 10; Then spherical work-piece 5 first A turning to the outer edge, lower-left of delineation bore with horizontal revolving stage 2 with directly write the object lens focal spot and overlap; Open laser shutter, spherical work-piece 5 turns to the outer bottom right edge of spherical work-piece 5 delineation bores with horizontal revolving stage 2 counterclockwise (overlooking) second B with directly write the object lens focal spot and overlap; Close laser shutter, directly write object lens 6 and rotate counterclockwise a set angle with object lens calibration rotating shaft 10, spherical work-piece 5 is rotated with horizontal revolving stage 2 clockwise (overlooking), overlaps with the thirdly C that spherical work-piece 5 is delineated outside the bore edges to directly writing the object lens focal spot; Open laser shutter, spherical work-piece 5 with horizontal revolving stage 2 clockwise (overlooking) go to outside the delineation bore edge the 4th D with directly write the object lens focal spot and overlap; Repeat this process,, close laser shutter until depicting a parallel by spherical work-piece concave surface summit; This moment, parallel and the spherical work-piece edge by spherical work-piece concave surface summit constituted a border circular areas;
Spherical work-piece 5 is rotated 180 ° with workpiece rotating shaft 4 counterclockwise (or clockwise);
Directly write object lens 6 and rotate a set angle with object lens calibration rotating shaft 10; Spherical work-piece 5 goes to horizontal revolving stage 2 counterclockwise (overlooking) and directly writes the object lens focal spot and overlap with the 5th P on the border circular areas edge; Open laser shutter, spherical work-piece 5 goes to horizontal revolving stage 2 and directly writes the object lens focal spot and overlap with the 6th M on this border circular areas edge, closes laser shutter; Directly write object lens 6 and clockwise rotate a set angle with object lens calibration rotating shaft 10; Spherical work-piece 5 is rotated with horizontal revolving stage 2, overlaps with the 7th N on the border circular areas edge to directly writing the object lens focal spot; Open laser shutter, spherical work-piece 5 goes to directly to be write the object lens focal spot and overlaps with the 8th Q on this border circular areas edge, closes laser shutter; Repeat this process, laser shutter is closed in the delineation of parallel in finishing border circular areas;
Spherical work-piece is rotated 90 ° around rotating shaft BB ' counterclockwise (or clockwise), repeat said process, intersect grid until finishing the unified generation parallel of spherical work-piece concave surface, the laser direct-writing end.
Claims (1)
1. the laser direct writing method of a grid pattern formed by intersected latitude lines of deep concave spherical surface is characterized in that comprising the steps:
(a) set vertical axis (AA '), trunnion axis (CC ') and rotating shaft (BB '); Described vertical axis (AA '), trunnion axis (CC ') and rotating shaft (BB ') intersect at the centre of sphere (O) of spherical work-piece (5), and the angle between rotating shaft (BB ') and the vertical axis (AA ') is α, 90 ° of 0 ∠ α ∠;
(b) directly writing object lens (6) rotates in the minimum point of spherical work-piece (5) the angle beta scope corresponding with the concave surface summit around trunnion axis (CC '); Directly write object lens (6) and whenever turn to a set angle, control spherical work-piece (5) is rotated around vertical axis (AA '); In spherical work-piece (5) rotation process, the opening and closing of control laser shutter make and directly write the object lens focal spot depict a parallel on the concave surface of spherical work-piece (5); Repeat this process until the delineation of finishing parallel between spherical work-piece (5) concave surface summit and the minimum point;
(c) make spherical work-piece (5) rotate 180 ° around rotating shaft (BB ');
(d) directly writing object lens (6) rotates in the minimum point of spherical work-piece (5) the angle beta scope corresponding with the concave surface summit around trunnion axis (CC '); Directly write object lens (6) and whenever turn to a set angle, control spherical work-piece (5) is rotated around vertical axis (AA '); In spherical work-piece (5) rotation process, the opening and closing of control laser shutter make and directly write object lens focal spot delineation parallel in the zone that the parallel and the spherical work-piece bore edge on the concave surface summit of passing through spherical work-piece (5) constitute; Repeat the delineation of this process parallel in finishing this zone;
(e) spherical work-piece (5) is rotated 90 ° around rotating shaft (BB '), the process of repeating step (2)～step (4) intersects grid until generating the unified parallel of spherical work-piece concave surface, and laser direct-writing finishes.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 200910218070 CN101722362B (en) | 2009-12-22 | 2009-12-22 | Laser direct writing method of grid pattern formed by intersected latitude lines of deep concave spherical surface |
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| CN 200910218070 CN101722362B (en) | 2009-12-22 | 2009-12-22 | Laser direct writing method of grid pattern formed by intersected latitude lines of deep concave spherical surface |
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| CN101722362A true CN101722362A (en) | 2010-06-09 |
| CN101722362B CN101722362B (en) | 2011-12-28 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103439762A (en) * | 2013-08-28 | 2013-12-11 | 上海理工大学 | Method for ruling and manufacturing concave blazed gratings |
| CN108161230A (en) * | 2018-01-30 | 2018-06-15 | 苏州德龙激光股份有限公司 | A kind of devices and methods therefor of quasi- 3D processing spherical crown aperture plate |
| CN108919478A (en) * | 2018-07-27 | 2018-11-30 | 电子科技大学 | A kind of tunable F-P optical filter and preparation method thereof |
| CN114051372A (en) * | 2021-11-05 | 2022-02-15 | 中国航空工业集团公司洛阳电光设备研究所 | Manufacturing method of concave metal mesh grid of fairing |
-
2009
- 2009-12-22 CN CN 200910218070 patent/CN101722362B/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103439762A (en) * | 2013-08-28 | 2013-12-11 | 上海理工大学 | Method for ruling and manufacturing concave blazed gratings |
| CN103439762B (en) * | 2013-08-28 | 2016-04-13 | 上海理工大学 | The delineation method for making of concave surface blazed grating |
| CN108161230A (en) * | 2018-01-30 | 2018-06-15 | 苏州德龙激光股份有限公司 | A kind of devices and methods therefor of quasi- 3D processing spherical crown aperture plate |
| CN108161230B (en) * | 2018-01-30 | 2023-07-21 | 苏州德龙激光股份有限公司 | Device and method for processing spherical crown grid net in quasi-3D mode |
| CN108919478A (en) * | 2018-07-27 | 2018-11-30 | 电子科技大学 | A kind of tunable F-P optical filter and preparation method thereof |
| CN114051372A (en) * | 2021-11-05 | 2022-02-15 | 中国航空工业集团公司洛阳电光设备研究所 | Manufacturing method of concave metal mesh grid of fairing |
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