CN101714357A - Method for making magnetic heads and processing clamp thereof - Google Patents
Method for making magnetic heads and processing clamp thereof Download PDFInfo
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- CN101714357A CN101714357A CN200810169653A CN200810169653A CN101714357A CN 101714357 A CN101714357 A CN 101714357A CN 200810169653 A CN200810169653 A CN 200810169653A CN 200810169653 A CN200810169653 A CN 200810169653A CN 101714357 A CN101714357 A CN 101714357A
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- long strips
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- machining
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Abstract
The invention aims to provide a method for making magnetic heads, which can form the magnetic heads with MR height and neck height precisely by simple and quick processing, and provides a processing clamp used for the making method. The method for making magnetic heads comprises the following steps of: installing a long strip on the processing clamp having a plurality of optical clamp marks, wherein a plurality of magnetic heads with read elements and write elements are formed on the long strip; detecting the positions of the optical clamp marks on the processing clamp provided with the long strip, and detecting the positions of the optical long strip marks arranged on the long strip; and calculating the actual distortion of the long strip according to the relative position relationship between the positions of the optical clamp marks and the optical long strip marks, removing and reinstalling the long strip when the actual distortion of the long strip exceeds the permissible range, then processing the long strip installed on the processing clamp, and then cutting into individual magnetic heads.
Description
Technical field
The clamp for machining that the present invention relates to a kind of manufacture method of magnetic head and be used for this manufacture method.
Background technology
Recording mode in the hard disk unit equimagnetic read-write equipment comprises: the signal direction of magnetization is the longitudinal magnetic recording mode of direction (longitudinal direction) in the recording medium face, and the signal direction of magnetization is the perpendicular magnetic recording perpendicular to recording medium face direction.Compare with the longitudinal magnetic recording mode, perpendicular magnetic recording has the influence that is not vulnerable to the recording medium heat fluctuation, and can realize advantages such as high line recording density.
In general magnetic head manufacturing method, at first go up and form some magnetic heads at substrate (wafer), this magnetic head has the write element that is used to read the read element of magnetic information and is used to write magnetic information, cut off this substrate then, form the some long strips (bar) (being also referred to as row (or row row)) that comprised some magnetic heads respectively, and each long strips ground, afterwards, the long strips after will grinding again cuts into single magnetic head (with reference to patent documentation 1,2).In the magnetic head of the longitudinal magnetic recording mode of prior art,, high precision ground stipulated amount of grinding for forming the magnetic pole length (MR height) of read element.For the amount of grinding that reaches expectation for example can adopt following method: use as MR highly to reach suitable determining instrument that will output signal when big or small, observed the signal of determining instrument output while what grind long strips by abrasive surface (finish when grinding above magnetic recording media and towards the flying surface of magnetic recording media), and when output signal, finish grinding.
In the method for patent documentation 1 record, when on substrate, forming read element and write element, form simultaneously and be known as the resistive element of electric lapping guide (ELG, Electrical Lapping Guide), and stipulated the position relation of described resistive element with respect to each element.Then, long strips is installed on the clamp for machining and while grinding the resistance of measuring ELG or the resistance of each element self, obtain warpage (the being also referred to as Row Bow) state of long strips again by this resistance, apply to clamp for machining according to the warpage state of this long strips then and correct load and make the clamp for machining distortion, and then the warpage of correcting long strips.
In the magnetic head of longitudinal magnetic recording mode, the true reading and recording of MR height alignment faint magnetic force on magnetic recording media has considerable influence.Therefore, propose to apply to clamp for machining the method for suitable rectification load in the patent documentation 1 for high precision ground forms the MR height.But in the magnetic head of longitudinal magnetic recording mode,, and unlike the precision of MR height, be strict with the magnetic pole length (neck height, Neck height) of write element.
Relative with it, owing to compare with the longitudinal magnetic recording mode, the magnetic head density of perpendicular magnetic recording is higher, so the neck height is bigger to the influence of recording characteristic.Therefore, highly identical with MR, the formation neck height of necessary high precision.Therefore, disclose a kind of MR height and neck height in the patent documentation 2, regulated long strips by the method for abrasive surface angle according to practical measurement.
Used scanning electron microscope devices such as (SEM) to come practical measurement MR height and neck height in the method for patent documentation 2 records, calculated the degree of tilt of long strips again according to measured value, therefore on handling, will take a long time.And, ask the error at measurment when calculating the neck height bigger, cause the error of long strips degree of tilt also to become big.Therefore be difficult to reach the high precision of required degree.
Further, identical with patent documentation 1, even apply the rectification load to clamp for machining, make the clamp for machining distortion to correct the warpage of long strips according to the warpage state of long strips, and then processing such as grind, can not obtain appropriate MR height and appropriate neck height sometimes simultaneously.On a long strips, there are some read elements and some write elements, even adjust the angle of inclination of being fixed in the long strips on the clamp for machining, perhaps apply and correct load to clamp for machining, and then processing such as grind, concerning all read element and write element, also be difficult to obtain appropriate MR height and appropriate neck height.
Patent documentation 1: Japanese patent laid-open becomes the 10-14658 communique
Patent documentation 2: the Jap.P. spy opens the 2006-331562 communique
Summary of the invention
Therefore, the object of the present invention is to provide simple just also the processing rapidly of a kind of process to form the magnetic head manufacturing method of MR height and neck height in high precision ground, and a kind of clamp for machining that is used for this manufacture method is provided.
The present invention relates to a kind of manufacture method with magnetic head of read element and write element, this method may further comprise the steps: prepare the step of long strips, formed some magnetic heads on long strips; Long strips is mounted and fixed on the step on the clamp for machining with some anchor clamps optical markings; Detect the step of the position of some anchor clamps optical markings, above-mentioned some anchor clamps optical markings are arranged on the clamp for machining that long strips has been installed; Ask the distortion of calculating clamp for machining according to the position of detected some anchor clamps optical markings, when the distortion of clamp for machining is in permissible range, continue fixedly long strips with clamp for machining, when the distortion of clamp for machining is outside permissible range, unload the step of long strips; The long strips that is installed on the clamp for machining is carried out processing steps; Long strips after will processing cuts into the step of single magnetic head.
The present invention relates to the manufacture method that another kind has the magnetic head of read element and write element, this method may further comprise the steps: prepare the step of long strips, formed some magnetic heads and be provided with some long strips optical markings on long strips; Long strips is mounted and fixed on the step on the clamp for machining with some anchor clamps optical markings; Detect the step of the position of some anchor clamps optical markings, some anchor clamps optical markings are arranged on the clamp for machining that long strips has been installed; Detection is arranged on the step of the position of the some long strips optical markings on the long strips; Relative position relation according to detected anchor clamps optical markings and long strips optical markings, ask the practical distortion of calculating long strips, when the practical distortion of long strips is in permissible range, continue fixedly long strips with clamp for machining, when the practical distortion of long strips is outside permissible range, unload the step of long strips; The long strips that is installed on the clamp for machining is carried out processing steps; Long strips after will processing cuts into the step of single magnetic head.
The invention further relates to a kind of manufacture method with magnetic head of read element and write element, this method may further comprise the steps: prepare the step of long strips, formed some magnetic heads and be provided with some long strips optical markings on long strips; Long strips is mounted and fixed on the step on the clamp for machining with some anchor clamps optical markings; Detect the step of the position of some anchor clamps optical markings, some anchor clamps optical markings are arranged on the clamp for machining that long strips has been installed; Detection is arranged on the step of the position of the some long strips optical markings on the long strips; According to the relative position relation of detected anchor clamps optical markings and long strips optical markings, clamp for machining is applied the step of the rectification load of pushing or stretching; Carry out processing steps to being installed in the long strips that has applied on the clamp for machining of correcting load; Long strips after will processing cuts into the step of single magnetic head.
In addition, the present invention preferably with some long strips optical markings, is configured on the long strips in the mode of arranging along the long strips longitudinal direction; With some anchor clamps optical markings, the mode of arranging along the long strips longitudinal direction during with the described long strips of installation on clamp for machining is configured on the clamp for machining; According to the relative position relation of anchor clamps optical markings and long strips optical markings, can obtain the distortion of long strips Width again.
The invention still further relates to a kind of in magnetic head is made employed clamp for machining, this clamp for machining is used for fixing and has formed some long strips with magnetic head of read element and write element, wherein, above-mentioned clamp for machining has some anchor clamps optical markings.
According to the present invention, by utilizing the some anchor clamps optical markings that on the clamp for machining of having fixed long strips, are provided with, can be in the hope of calculating the distortion of clamp for machining self.Then, according to the distortion of asking the clamp for machining self of calculating, can appropriately correct its distortion.And, when the distortion of clamp for machining self is outside permissible range, also can temporarily long strips be unloaded from clamp for machining.
In addition, from utilizing the long strips optical markings that long strips is provided with and can ask the apparent deflection of the long strips of calculating, deduct the deflection that utilizes the some anchor clamps optical markings that are provided with on the clamp for machining and ask the clamp for machining self of calculating, can obtain the practical distortion amount (true value deflection) of long strips.Therefore, perhaps can adjust the installment state of long strips on clamp for machining, perhaps can dismantle, simultaneously the warpage and the practical distortion of the reality of long strips be resolved, and then can obtain long strips appropriate installation method on clamp for machining.
Thus,, can carry out appropriate processing to long strips easily, therefore, can produce and have appropriate read element magnetic pole length the high precision magnetic head of (MR height) and write element magnetic pole length (neck height) according to the present invention.
Description of drawings
Fig. 1 is the approximate three-dimensional map that is used for the substrate of magnetic head manufacturing in the expression embodiment of the present invention.
Fig. 2 is the sectional view that is formed at the magnetic head on the substrate shown in Figure 1.
Fig. 3 is the side view schematic of the flying surface side of magnetic head shown in Figure 2.
Fig. 4 is the stereographic map that cuts off the long strips that obtains behind the substrate shown in Figure 1.
Fig. 5 (a) is illustrated on the clamp for machining of the present invention the state skeleton diagram, (b) that install before the long strips shown in Figure 4 to be illustrated in the state skeleton diagram of long strips shown in Figure 4 being installed and being ground on the clamp for machining of the present invention.
Fig. 6 is the mode chart of the detection method of expression long strips optical markings of the present invention and anchor clamps optical markings.
Fig. 7 is the stereographic map that cuts off the magnetic head that obtains behind the long strips shown in Figure 4.
Fig. 8 (a) is illustrated in the chart that produces the distortion that can correct in the subregion of clamp for machining, (b) is to be illustrated in the chart that produces immedicable distortion in the subregion of clamp for machining.
Fig. 9 is the chart of expression long strips deflection, clamp for machining deflection and long strips true value deflection.
Embodiment
Below, with reference to accompanying drawing embodiment of the present invention is specifically described.
According to the magnetic head manufacturing method of present embodiment, at first, on substrate (wafer) 1 as shown in Figure 1 and Figure 2, form a plurality of magnetic heads 2.For example, as shown in Figure 2 by aluminum oxide-titanium carbide-titanium compound (Al
2O
3TiC) etc. the matrix 1a and the aluminium oxide (Al of lamination thereon
2O
3) on the substrate 1 formed of the substrate layer 1b that makes of the insulating material that waits, form the magnetic head 2 that contains reading part 3 and write section 4 of rectangular (Matrix).Reading part 3 is the structures that clip read element 7 between following screen layer 5 on the substrate 1 and upper shielding layer 6.Read element 7 for example can be the giant magnetoresistance (GMR that clips nonmagnetic layer between pair of magnetic body layer, Giant Magneto Resistance) element, it also can be tunnel magnetoresistive (TMR, the Tunneling Magneto Resistance) element that between pair of magnetic body layer, clips insulation course.On the other hand, write section 4 is to carry out the parts of magnetic recording in perpendicular magnetic recording (PMR, Perpendicular Magnetic Recording) mode, mainly is made of the main pole that forms write element 8, auxiliary magnetic pole 9, film coil 10.In addition, as shown in Figure 3, read element 7 and write element 8 are disposed on the same position after planar overlapping.
Then, in the present embodiment, as shown in Figure 3,, form long strips optical markings 11 near the position of magnetic head 2 or in magnetic head 2.Corresponding with the some magnetic heads 2 that are rectangular configuration in the substrate 1 shown in Figure 1, long strips optical markings 11 also is rectangular configuration.
Then, cut off to have being arranged in the rectangular some magnetic heads 2 and the substrate 1 of long strips optical markings 11, obtain some elongated long strips 14 (with reference to Fig. 4, Fig. 5 (a), Fig. 5 (b)).In this long strips 14, some magnetic heads 2 and long strips optical markings 11 are arranged in rows respectively.In addition, in embodiment as shown in the figure, magnetic head 2 and long strips optical markings 11 can form a line, and also can line up some row.When magnetic head 2 is lined up some row, also these parts are called stick (block) sometimes.
Though there is not the position of the long strips optical markings 11 in the particular determination long strips 14, but the optical sensor that does not show by figure can detect its position, and can obtain the position of the distortion of long strips 14 according to the position of detected long strips optical markings 11.In addition, the formation method of long strips optical markings 11 is not had particular determination, can use known method.For example, when using sputtering method (sputtering) to wait any one deck to formation read element 7 or write element 8 to carry out film forming, can be near read element 7 or write element 8 while film forming and form long strips optical markings 11.At this moment, because each layer of magnetic head 2 has light transmission, therefore can be by detect the transmission image of long strips optical markings 11 from the optical sensor of magnetic head 2 outsides.Perhaps, can form long strips optical markings 11 by using film forming on magnetic head 2 top layers such as sputtering method.
Afterwards, shown in Fig. 5 (b), use bonding agent (figure does not show) etc. is installed to long strips 14 on the clamp for machining 15.The clamp for machining 15 of present embodiment has the some long strips optical markings 11 corresponding some anchor clamps optical markings 12 with long strips 14.At this, the anchor clamps optical markings 12 of clamp for machining 15 and the long strips optical markings of long strips 14 11 corresponding being meant, under the state that long strips 14 has been installed on the clamp for machining 15, each long strips optical markings 11 is towards each anchor clamps optical markings 12, in order to make the relative position relation (at interval etc.) between each long strips optical markings 11 and each the anchor clamps optical markings 12 in full accord, with long strips optical markings 11 corresponding configuration anchor clamps optical markings 12.Therefore, the anchor clamps optical markings 12 of the clamp for machining 15 of long strips optical markings 11 similar numbers of a setting and long strips 14.But when the relative position relation according to anchor clamps optical markings 12 and long strips optical markings 11, in the time of can obtaining the distortion of clamp for machining 15 and long strips 14, the number of anchor clamps optical markings 12 and long strips optical markings 11 also can be inequality.In order to apply rectification described later load to clamp for machining 15, the hole 17 of the actuator (actuator) that can insertion figure show can be set on clamp for machining 15.
Position to the anchor clamps optical markings 12 in the clamp for machining 15 does not have particular determination, as long as can detect its position by the optical sensor that figure does not show, and can get final product according to the position that the distortion of clamp for machining 15 is obtained in the position of detected anchor clamps optical markings 12.In addition, the formation method of anchor clamps optical markings 12 is not had particular determination yet, can use known method.For example, can form anchor clamps optical markings 12 with the surface of physical force Carving Machining anchor clamps 15 such as the heat of generations such as laser or cutter.
But when substrate 1 was cut into elongated long strips 14, warpage (Row Bow) or distortion took place in long strips 14 after the cutting sometimes.Further, when on clamp for machining 15 long strips 14 being installed, clamp for machining 15 also deforms along with the warpage of this long strips 14 possibly.Therefore, in the present embodiment, by the optical sensor that do not show of figure, optical detection is carried out in each position of some long strips optical markings 11 of long strips 14, also optical detection is carried out in each position of some anchor clamps optical markings 12 of clamp for machining 15 simultaneously.Then, adjust long strips 14 and clamp for machining 15 according to these testing results, thereby the distortion of long strips 14 and clamp for machining 15 is in the permissible range.This adjustment is one of principal character of the present invention, and the back will be described in detail.In addition, in embodiments of the present invention, as shown in Figure 6, each long strips optical markings 11 and each anchor clamps optical markings 12 all are rectangles, and the optical sensor that figure does not show can detect the center C of these marks.If but can optical detection go out its position, long strips optical markings 11 and anchor clamps optical markings 12 also can be Any shape.
Use long strips optical markings 11 and anchor clamps optical markings 12 to adjust long strips 14 and clamp for machining 15, when the distortion of long strips 14 and clamp for machining 15 is in permissible range, long strips 14 is processed.Specifically, shown in Fig. 5 (b), move towards abrasive disk 16 by making clamp for machining 15, be installed on long strips 14 on the clamp for machining 15 by abrasive surface 13 (with reference to Fig. 4) by being pressed on the abrasive disk 16 and grinding.For example, confirm on long strips 14 the preformed ELG resistance of (figure do not show) on one side, grind on one side, reach the time point of setting in the resistance of ELG, judge the amount of grinding that has obtained expectation and finish to grind.In addition, the flying surface 13 (ABS:Air BearingSurface) of magnetic recording media is also faced in the top that is positioned at magnetic recording media (figure does not show) when finishing the manufacturing of magnetic head 2 that is meant by abrasive surface 13 of long strips 14.
At last, by the long strips after the above-mentioned grinding 14 is cut into single magnetic head 2 and can obtain some magnetic heads 2 as shown in Figure 7.
In the manufacture method of aforesaid magnetic head 2, present embodiment has the feature of the distortion that can significantly improve long strips 14 and clamp for machining 15.To carry out following explanation about this point.
Below the background that the present invention relates to is described.The applicant considers that at first the long strips that will be provided with the long strips optical markings is installed on the clamp for machining, warpage and distortion can take place in long strips, thereby studied or adjusted the setting angle of long strips on clamp for machining, perhaps use some actuators to apply and correct the warpage that load makes the clamp for machining distortion and then corrects long strips, and then carry out abrasive method to clamp for machining.Then, as mentioned above, when reaching setting, the resistance of ELG finishes to grind.Yet even carry out such control, some read elements and write element also probably can not get the element heights (MR height and neck height) expected separately in the long strips.
Therefore, design a lot of ways for MR height and the neck height the applicant who obtains expecting.At first, be not one or two long strips to be installed grind again on a clamp for machining, but the stick of installing on clamp for machining as some long strips aggregates (block) (is piled, stack) is ground again.This stick is the parts from the zone that comprises some row magnetic head groups that substrate cuts out, and is the incorporate states of some long strips.At this moment, particularly compare with elongated long strips, stick has the advantage that is difficult for taking place warpage, but obtains single long strips because the stick after will grinding earlier cuts off, and again each long strips is cut into single magnetic head, so production efficiency reduces.And said method does not substantially improve distortion.
Infer that after the inventor further studies just warpage can not take place long strips, the clamp for machining self that long strips is installed along the warpage of long strips also can deform, and this also is one of the MR height that can not get expecting and reason of neck height.Then the inventor has studied: make that employed bonding agent be out of shape the method that reduces when on the clamp for machining long strips being installed when bonding, and the little material of use temperature distortion forms the method for clamp for machining etc.Though adopt above-mentioned improvement method to obtain effect to a certain degree, not talkative from having solved the problem on deformation of long strips and clamp for machining in essence, and solve also fully inadequately.
Further study by the inventor, clamp for machining can form following shape and structure: crooked easily shape and the structure of pressure because of being subjected to when grinding is installed in long strips on the clamp for machining, and when grinding shape that the long strips that is installed on the clamp for machining can be crooked on some points and structure etc.Therefore, clamp for machining is subjected to from the pressure of abrasive disk and bending during grinding, thereby has produced and make the easier effect that contacts with abrasive disk more equably of whole long strips.But because clamp for machining becomes crooked easily, the problem of microdeformation easily takes place in the stress (bound stress) in the time of also can existing because of the installation long strips.
Though adopt said method to obtain effect to a certain degree, it is not obtain well-content effect.In above-mentioned example, can ask the warpage of calculating long strips by the position that detection is arranged on the some long strips optical markings on the long strips, but reckon without the distortion of clamp for machining self.Therefore, in order to obtain expecting MR height and neck height and in order further to improve above-mentioned effect, the inventor has proposed to ask the effective idea of deformation state of calculating clamp for machining, and then has finished the present invention.
Specifically, the present invention is being used to install and fixedly on the clamp for machining 15 of long strips 14 some anchor clamps optical markings 12 is being set.Anchor clamps optical markings 12 is arranged on and long strips optical markings 11 corresponding positions, and this long strips optical markings 11 is arranged on the above-mentioned clamp for machining 15 that long strips 14 has been installed.That is to say that anchor clamps optical markings 12 is identical with long strips optical markings 11 quantity, each anchor clamps optical markings 12 disposes in opposite directions with each long strips optical markings 11.Have the clamp for machining 15 of above-mentioned some anchor clamps optical markings 12, before the present invention, never be used.In addition, in the time can obtaining the distortion of clamp for machining 15 and long strips 14 according to anchor clamps optical markings 12 with the relative position relation of long strips optical markings 11, anchor clamps optical markings 12 also can be inequality with the number of long strips optical markings 11.
In first embodiment of the present invention, be installed in long strips 14 on the clamp for machining 15 after, the optical sensor that use figure does not show detects the position of the some anchor clamps optical markings 12 on the clamp for machining 15 respectively.Then, according to the position of detected some anchor clamps optical markings 12, ask the deformation state of calculating clamp for machining 15 self.When the distortion of this clamp for machining 15 is in permissible range, does not pull down long strips 14, but continue fixedly long strips 14, and begin to carry out grinding step from clamp for machining 15.But actuator that as required can insertion figure does not show in the hole 17 of clamp for machining 15 is corrected distortion thereby the work by this actuator applies the rectification load of pushing or stretching to clamp for machining 15.On the other hand, when the self-deformation of clamp for machining is outside permissible range, also can temporarily long strips be pulled down and then reinstall from clamp for machining.Above-mentioned permissible range is the standard of setting arbitrarily, and for example, permissible range can be to cause the MR height of all magnetic heads 2 in the long strips 14 and the standard that the neck height all can not carry out high precision processing again when exceeding this scope usually.Otherwise, as long as permissible range also can be to be in the MR height of common long strips 14 interior all magnetic heads 2 within this scope and the standard that the neck height all can carry out high precision processing, that is to say, can be to have at least one can not carry out the standard that high precision is processed in each MR height of some magnetic heads when exceeding this scope and the neck height.Except the yield rate degree of consideration requirement and the magnetic head performance of requirement etc., also to consider production safety, can set relatively stricter permissible range by operator's judgement, also can set looser permissible range.
Whether the distortion to clamp for machining 15 is in the judgement within the permissible range or outside permissible range, can judge often than predefined standard according to the number of occurrence that the deflection of clamp for machining 15 in specialized range increases and reduce.For example, when the point that clamp for machining is applied the rectification load of pushing or stretching has a plurality of (for example 9 points), if between adjacent 2, do not comprise the part of two above extreme values (maximal value or minimum value) of clamp for machining 15 distortion, perhaps, if it is almost consistent with the point that applies the rectification load to become the part of extreme value shown in Fig. 8 (a), can correct the distortion that load is corrected clamp for machining 15 by applying.Therefore, can judge that in this case the distortion of clamp for machining 15 is in permissible range, there is no need long strips 14 is unloaded from clamp for machining 15.Under situation as Fig. 8 (a) illustrated embodiment, apply as the pressing force of correcting load (from the power of figure top to figure below) at an A, apply as the tensile force of correcting load (from the power of figure below to top), by correcting the distortion of clamp for machining like this at a B simultaneously.
Relative with it, if between adjacent 2, comprise two above extreme values (maximal value or minimum value) part of clamp for machining 15 distortion, that is to say, if have two above crests and trough among the figure shown in Fig. 8 (b), no matter on regulation point (for example putting A and some B), apply pressing force (from the power of figure top to figure below) respectively, still apply tensile force (from the power of figure below to top), the distortion that all can not correct clamp for machining 15.That is to say, shown in Fig. 8 (b), even an A and some B both sides are increased pressing force, also can not correct the distortion of clamp for machining 15, and, even if any one party among an A and the some B is applied pressing force and the opposing party is applied tensile force, perhaps an A and some B both sides are increased tensile force, also all can not correct the distortion of clamp for machining 15.Therefore, when how an A and some B being applied when correcting load and all can not correct the distortion of clamp for machining 15, the distortion that can judge clamp for machining 15 is outside permissible range, long strips 14 temporarily unloaded from the clamp for machining 15 again reinstall, again detect the position of anchor clamps optical markings 12 then, and obtain the deformation state of clamp for machining 15 self according to this testing result.Before the distortion of clamp for machining 15 is in the permissible range, before the degree that promptly is able to correct, carry out repeatedly long strips 14 install again and to the detection of anchor clamps optical markings 12 positions.When the distortion of final decision clamp for machining 15 reaches within the permissible range, clamp for machining 15 is applied correct load as required, thereby finish adjustment long strips 14 and clamp for machining 15.Then, begin to carry out the grinding step and the cut-out operation of long strips 14.
In the above-described embodiments, we can say and utilized clamp for machining 15, be used as representing the index of clamp for machining 15 deflection sizes in the narrow range internal strain amount increase of regulation and the number of occurrence that reduces.But, also can be in the following ways: can adopt the standard value that is predetermined maximum deformation quantity, whether be in judgement in the following scope of above-mentioned standard value according to the maximum deformation quantity of clamp for machining 15 again, determine whether unloading long strips 14 from clamp for machining 15; Perhaps ask respectively and calculate the relative position between each anchor clamps optical markings 12 in long strips 14 interior each long strips optical markings 11 and the clamp for machining 15, whether basis maximum deformation quantity in these relative positions is in the judgement in the following scope of above-mentioned standard value again, determines whether unloading long strips 14 from clamp for machining 15.Definition to above-mentioned maximum deformation quantity does not have particular determination, can set arbitrarily according to the state of distortion.For example, can ask the calculation average centerline according to the mean value of deflection, with apart from this average centerline value farthest as maximum deformation quantity, perhaps can interconnect the straight line that forms with the mark that is positioned at two ends in some anchor clamps optical markings 12 is center line, being maximum deformation quantity apart from this center line value farthest.
In addition, present embodiment is to obtain the deformation state of clamp for machining 15 self, the method that this distortion is corrected again.Therefore, when being provided with the long strips 14 of long strips optical markings 11, processing can not adopt this method yet.
Then, for the MR that obtains expecting height and neck height, whether the inventor has proposed to obtain long strips 14 except the distortion of clamp for machining 15 actual deformed state more effective idea, and has finished the present invention.Therefore, in second embodiment of the present invention, after being installed in long strips 14 on the clamp for machining 15, detect the position of the some long strips optical markings 12 on the clamp for machining 15 respectively, detect the position of the some long strips optical markings 11 on the long strips 14 simultaneously respectively.According to the relative position relation between detected anchor clamps optical markings 12 and the long strips optical markings 11, obtain the actual deformed state of long strips 15 then.As shown in Figure 9, the value that deducts the deflection of clamp for machining 15 with the deflection of the long strips optical markings 11 of long strips 14 is the practical distortion amount (true value deflection) of long strips 14.When the practical distortion of long strips 14 is in permissible range, do not unload long strips 14 from clamp for machining 15, continue fixedly long strips 14, and begin to carry out grinding step.And, correct load rectification distortion thereby can apply to push or stretch to clamp for machining 15 as required.On the other hand, when the practical distortion of long strips 14 is outside permissible range, long strips 14 is temporarily unloaded from clamp for machining 15.Again the long strips 14 that unloads is reinstalled.And, can maintain the original state and heat long strips 14 and clamp for machining 15, change the deflection of long strips 14 by the tacky state that changes bonding agent.
To the practical distortion of long strips 14 are judgements in permissible range or outside permissible range, identical with above-mentioned first embodiment, can by clamp for machining 15 is applied push or the multiple spot of correcting load that stretches in adjacent 2 between, whether exist two above crests and trough (plural extreme value) to judge when illustrating the true value deflection of representing long strips 14.In addition, above-mentioned judgement also can be adopted the standard value that is predetermined maximum true value deflection, again according to the maximum true value deflection of judging long strips 14 whether the mode in the following scope of above-mentioned standard value judge.
Present embodiment is to obtain the actual deformed state of long strips 14, corrects the method for this distortion by clamp for machining 15.Therefore, when being provided with the long strips 14 of long strips optical markings 11, processing also can adopt this method.
In addition, as the variant embodiment of above-mentioned embodiment, also can apply the rectification load to clamp for machining 15 according to the relative position relation between detected anchor clamps optical markings 12 and the long strips optical markings 11.In addition, also can not have and apply the structure (detent and hole 17) of correcting load,, not need that long strips 14 and clamp for machining 15 are carried out any change and just can process as long as within permissible range; If outside permissible range then directly long strips is unloaded from clamp for machining, perhaps also can maintain the original state heating long strips 14 and clamp for machining 15 change the deflection of long strips 14 by the tacky state that changes bonding agent.
Ask the method for the deflection of calculating clamp for machining 15 not have particular determination to position probing result according to some anchor clamps optical markings 12.For example, obtain the curve of approximation of the line that connects the formation of some anchor clamps optical markings 12 positions with polynomial of degree n, and connect two end points of above-mentioned curve and form straight line (center line), above-mentioned curve and above-mentioned straight line are compared, can regard the deflection of clamp for machining 15 as to the separating distance of curve of approximation and center line (the center line two ends are the maximum separation distance sum separately).For the deflection of long strips 14, also can take same method to ask the position of calculating some long strips optical markings 11.
As mentioned above, according to the present invention, on the clamp for machining 15 of fixing long strips 14, some anchor clamps optical markings 12 are set.By utilizing this anchor clamps optical markings 12, can obtain the deflection of clamp for machining 15 self.According to the deflection of the clamp for machining 15 of asking calculation thus, the distortion that can correct clamp for machining 15.At this moment,, also can apply and correct load (pressing force or tensile force) and carry out, also can be undertaken in addition by other method by several regions to the clamp for machining 15 of regulation to the rectification of clamp for machining 15 distortion.To such an extent as to when judging that deflection reaches the degree of impossible rectification clamp for machining too greatly, long strips 14 is reinstalled after clamp for machining 15 unloads again.When being reinstalled in long strips 14 on the clamp for machining 15, owing in installment state before, obtained the deflection of clamp for machining 15, therefore to select to eliminate as far as possible the installation method of this distortion, specifically, can adjust the installation site of long strips 14 on the clamp for machining 15 and attitude is installed, perhaps consider bonding distortion, can adjust the distribution of bonding agent coating etc.
In addition, as mentioned above, can utilize anchor clamps optical markings 12 to ask and calculate clamp for machining 15 deflections, also can utilize long strips optical markings 11 to ask the deflection of calculating long strips 14 simultaneously.At this moment, ask the deflection of calculating long strips 14 in fact also to comprise the deflection of clamp for machining 15 according to long strips optical markings 11.Therefore, ask the deflection of long strips 14 of calculation, deduct the deflection of the clamp for machining 15 that utilizes anchor clamps optical markings 12 to ask calculation, thereby obtain the true value deflection of long strips 14 from utilizing long strips optical markings 11.By above method, the warpage and the distortion of grasp long strips 14 that can be more accurate, and then can resolve the warpage and the distortion of long strips 14 reality.Owing to can resolve the warpage and the distortion of this long strips 14 reality, so the bond condition of long strips 14 on clamp for machining 15 can reach optimization, simultaneously can be by rapidly and simple control the MR height and the neck height that obtain expecting.
Claims (5)
1. the manufacture method with magnetic head of read element and write element is characterized in that: comprise
Prepare the step of long strips, on described long strips, formed some described magnetic heads;
Described long strips is mounted and fixed on the step on the clamp for machining with some anchor clamps optical markings;
Detect the step of the position of some described anchor clamps optical markings, some described anchor clamps optical markings are arranged on the described clamp for machining that described long strips has been installed;
Ask the distortion of calculating clamp for machining according to the described position of detected some described anchor clamps optical markings, when the distortion of described clamp for machining is in permissible range, continue fixing described long strips with described clamp for machining, when the distortion of described clamp for machining is outside permissible range, unload the step of described long strips;
The described long strips that is installed on the described clamp for machining is carried out processing steps;
Described long strips after will processing cuts into the step of single described magnetic head.
2. the manufacture method with magnetic head of read element and write element is characterized in that: comprise
Prepare the step of long strips, on described long strips, formed some described magnetic heads and be provided with some long strips optical markings;
Described long strips is mounted and fixed on the step on the clamp for machining with some anchor clamps optical markings;
Detect the step of the position of some described anchor clamps optical markings, some described anchor clamps optical markings are arranged on the described clamp for machining that described long strips has been installed;
Detect the step of the position of some described long strips optical markings, some described long strips optical markings are arranged on the described long strips;
Relative position relation according to detected described anchor clamps optical markings and described long strips optical markings, ask the practical distortion of calculating long strips, when the practical distortion of described long strips is in permissible range, continue fixing described long strips with described clamp for machining, when the practical distortion of described long strips is outside permissible range, unload the step of described long strips;
The described long strips that is installed on the described clamp for machining is carried out processing steps;
Described long strips after will processing cuts into the step of single described magnetic head.
3. the manufacture method with magnetic head of read element and write element is characterized in that: comprise
Prepare the step of long strips, on described long strips, formed some magnetic heads and be provided with some long strips optical markings;
Described long strips is mounted and fixed on the step on the clamp for machining with some anchor clamps optical markings;
Detect the step of the position of some described anchor clamps optical markings, some described anchor clamps optical markings are arranged on the described clamp for machining that described long strips has been installed;
Detect the step of the position of some described long strips optical markings, some described long strips optical markings are arranged on the described long strips;
According to the relative position relation of detected described anchor clamps optical markings and described long strips optical markings, described clamp for machining is applied the step of the rectification load of pushing or stretching;
The described long strips that is installed on the described clamp for machining that has applied described rectification load is carried out processing steps;
Described long strips after will processing cuts into the step of single described magnetic head.
4. as the manufacture method of magnetic head as described in claim 2 or 3, it is characterized in that: comprise
With some described long strips optical markings, the mode to arrange along described long strips longitudinal direction is configured on the described long strips;
With some described anchor clamps optical markings, the mode of arranging along described long strips longitudinal direction during with the described long strips of installation on described clamp for machining is configured on the described clamp for machining;
According to the relative position relation of described anchor clamps optical markings and described long strips optical markings, obtain the distortion of described long strips.
5. employed clamp for machining in magnetic head is made, described clamp for machining is used for fixing long strips, has formed some described magnetic heads with read element and write element on the described long strips, it is characterized in that:
Described clamp for machining has some anchor clamps optical markings.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810169653A CN101714357A (en) | 2008-10-07 | 2008-10-07 | Method for making magnetic heads and processing clamp thereof |
| JP2008307150A JP2010092576A (en) | 2008-10-07 | 2008-12-02 | Method for manufacturing magnetic head and machining tool used in the method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810169653A CN101714357A (en) | 2008-10-07 | 2008-10-07 | Method for making magnetic heads and processing clamp thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101714357A true CN101714357A (en) | 2010-05-26 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200810169653A Pending CN101714357A (en) | 2008-10-07 | 2008-10-07 | Method for making magnetic heads and processing clamp thereof |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2010092576A (en) |
| CN (1) | CN101714357A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5842353B2 (en) | 2010-04-13 | 2016-01-13 | Jnc株式会社 | Bulky nonwoven fabric |
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2008
- 2008-10-07 CN CN200810169653A patent/CN101714357A/en active Pending
- 2008-12-02 JP JP2008307150A patent/JP2010092576A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JP2010092576A (en) | 2010-04-22 |
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Application publication date: 20100526 |