CN101710667A - Laser resonant cavity automatic cavity adjusting system and method based on interference fringe picture skeleton line processing - Google Patents

Laser resonant cavity automatic cavity adjusting system and method based on interference fringe picture skeleton line processing Download PDF

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CN101710667A
CN101710667A CN200910227103A CN200910227103A CN101710667A CN 101710667 A CN101710667 A CN 101710667A CN 200910227103 A CN200910227103 A CN 200910227103A CN 200910227103 A CN200910227103 A CN 200910227103A CN 101710667 A CN101710667 A CN 101710667A
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cavity
resonant cavity
interference fringe
skeleton line
mirror
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CN101710667B (en
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伏思华
毛宏军
龙学军
胡永军
胡浩军
谢文科
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National University of Defense Technology
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Abstract

The invention discloses laser resonant cavity automatic cavity adjusting system and method based on interference fringe picture skeleton line processing. The automatic cavity adjusting system comprises a guide light laser, a laser resonant cavity, a coupling output mirror, a camera, a computer and a cavity mirror control system, wherein the laser resonant cavity comprises an adjustable cavity mirror. The invention also provides an automatic cavity adjusting method corresponding to the automatic cavity adjusting system, which can perform rapid and precise judgment on the alignment of the laser resonant cavity and provide a control signal in real time for the cavity mirror control system, thereby achieving the aim of rapidly and automatically adjusting a cavity. By adopting the cavity adjusting system and the cavity adjusting method, the precision, speed and repeatability of the traditional manual cavity adjusting method can be effectively improved. In addition, the method can be further popularized and applied to the automatic adjustment of an optical system with an interference fringe of an output light field.

Description

Laser resonant cavity automatic cavity adjusting system and method thereof based on the interference fringe picture skeleton line processing
Technical field
The present invention relates to fields such as laser technology, further be meant laser resonant cavity automatic cavity adjusting system and the method thereof handled based on interference fringe picture skeleton line.
Background technology
Whether the quality of Laser Output Beam and power output and laserresonator have collimated much relations.The imbalance of chamber mirror will cause the decline of laser beam quality and laser power, even produces extremely uneven intensity distributions.Therefore, before laser works, the collimation adjustment of resonant cavity is to guarantee one of important prerequisite of laser output high-power, high quality beam.
At present, the cavity adjustment method of laserresonator mainly is divided into people's wage adjustment chamber and autocollimation two general orientation.
Aspect people's wage adjustment chamber, the method that extensively adopts is by offering an aperture in chamber mirror central authorities, will collimate guide lights and be incorporated in the resonant cavity, after the repeatedly round reflection of guide lights through the chamber mirror, exporting by output coupling mirror more at present.Transfer the chamber personnel to judge and the imbalance situation of chamber mirror manually collimate adjustment more in view of the above according near field hot spot pattern (the circular interference fringe of the hollow) quality (as the striped symmetry) of output.Therefore the simplest also most convenient of this cavity adjustment method is usually used in the application of practical project.But owing to need artificial interpretation hot spot pattern, transfer the chamber precision limited, and owing to the subjective feeling with human eye, its accent chamber precision may be inconsistent because of the difference of transferring the chamber personnel, causes transferring the repeatable accuracy in chamber relatively poor.
Aspect autocollimation, mainly carry out at present along two kinds of thinkings, the one, by design transfer the chamber device special construction, utilize the autocollimation adjustment in chamber that realizes lacking of proper care of auxiliary optical instrument; The 2nd, measure the optical field distribution of output beam outside the chamber by interferometer or Wavefront sensor etc., set up the Mathematical Modeling between optical field distribution and the misalignment rate, by finding the solution the misalignment rate autocollimation adjustment in chamber that realizes lacking of proper care.Usually first method can cause the complex structure of resonant cavity, processing and manufacturing difficulty.Second method can cause the algorithm instability even find the solution difficulty owing to have nonlinear coupled relation between aberration and the cavity mirror misalignment amount.
In a word, in field, laser resonance intonation chamber, also do not form the simple and practical fast automatic cavity adjustment method of a cover at present.
Summary of the invention
Technical problem to be solved by this invention is, people's wage adjustment chamber is combined with automatic cavity-adjusting, overcome the deficiency of existing automatic cavity-adjusting technology, after finish in people's wage adjustment chamber, utilize digital image processing techniques to extract the interference fringe skeleton line of laserresonator output collimated light beam, set up a kind of resonant cavity collimation evaluation function on this basis, the start of using iterative control algolithm control chamber mirror makes evaluation function approach to extreme value, thereby realizes the High Precision Automatic collimation of resonant cavity.
For solving the problems of the technologies described above, the present invention adopts following technical proposals:
A kind of laser resonant cavity automatic cavity adjusting system of handling based on interference fringe picture skeleton line, video camera, computer that the laserresonator that comprises the guide lights laser, is made of adjustable chamber mirror, output coupling mirror, optical axis and laserresonator chamber axle are vertical and the chamber mirror control system that is connected with adjustable chamber mirror; Described video camera is connected with computer, computer connection chamber mirror control system.
Described laserresonator comprises all kinds of stable cavities and the unsteady cavity of existing Laser Study field definition.Laserresonator is made up of the concave mirror and the convex mirror that are positioned on the same optical axis in the embodiment of the invention.
One of adjustable chamber mirror is installed on the electronic adjustable mirror holder, and described electronic adjustable mirror holder and the control circuit that is attached thereto constitute chamber mirror control system.
Simultaneously, the present invention also provides a kind of laser resonant cavity automatic cavity adjusting method of handling based on interference fringe picture skeleton line, comprises the steps:
1) utilizes video camera that the interference fringe of the output collimated light beam of laserresonator is carried out record, and transmit it to computer;
2) computer carries out preliminary treatment to interference fringe image, extracts the striped skeleton line again, and calculates the relative displacement of striped skeleton line;
3) according to the relative displacement that obtains resonant cavity degree of collimating is judged;
4) according to the resonant cavity collimation, the mirror control system is sent control signal to the chamber, the autocollimation of actuator chamber mirror.
Interference fringe image preliminary treatment in the described step 2 can comprise greyscale transformation and filtering and noise reduction step.What the extracting method of described striped skeleton line preferably adopted is two-dimentional derived indice binary map method of the prior art.
The computational methods of described skeleton line relative displacement are: at first utilize the Hough conversion to estimate the general location (X of all skeleton line centre coordinates 0, Y 0), calculate each point distance center coordinate (X on the skeleton lines at different levels then 0, Y 0) between distance.Because the circular substantially distribution of interference fringe picture, so point on each grade skeleton line and (X 0, Y 0) between distance basic identical, this distance just can be similar to radius as this grade skeleton line annulus.Different length according to skeleton line radiuses at different levels can extract skeleton lines at different levels respectively.Utilize fitting of a polynomial to obtain the accurate coordinates (X in each grade skeleton line center of circle then i, Y i), calculate the relative displacement Δ d between each home position i, this is the relative displacement of skeleton lines at different levels.
The multinomial that described match is adopted is as follows:
p 1x 2+p 2xy+p 3y 2+p 4x+p 5y+p 6＝0 (1)
This is an oval expression formula, in the formula, and p 1, p 2, p 6Be multinomial coefficient undetermined, x and y are respectively on the striped skeleton line certain any abscissa and ordinate.By a plurality of points on the skeleton line are carried out match, can calculate multinomial coefficient p 1, p 2..., p 6, this moment is oval unique definite, thereby can determine the parameters of skeleton line place ellipse, as elliptical center coordinate (X i, Y i), major and minor axis length (a, b), oval inclination angle
Figure G2009102271030D0000031
Deng.In other optical systems, if the interference fringe of output is more complicated more than circle or ellipse, can adopt then more that the multinomial of high-order carries out match, polynomial exponent number is decided according to shape of stripes.
Described skeleton lines at different levels center of circle relative displacement Δ d iCalculating determine that with its distance each other computing formula is as follows:
Δ d i = ( X i - X i + 1 ) 2 + ( Y i - Y i + 1 ) 2 i = 1,2,3 , . . . , N - - - ( 2 )
In the formula, N is the skeleton line number that can be used for calculating, and i is that the level of skeleton line is inferior, and bosom (radius minimum) skeleton line is got i=1.The coordinate of its mid point and the calculating of radius length all are unit with the pixel.
Described resonant cavity collimation decision function adopts following form:
J = e - Σ i N - 1 Δ d i N - 1 - - - ( 3 )
Wherein N is the skeleton line number that can be used for calculating, and i is that the level of skeleton line is inferior, Δ d iBe skeleton lines at different levels center of circle relative displacement; When J 〉=0.99, can think no longer needs the resonant cavity collimation to regulate.
The calculating of described chamber mirror control signal adopts iterative algorithm to carry out, and adopts resonant cavity collimation decision function J as the performance evaluation function.The process of iteration is exactly constantly to satisfy the driving voltage of certain statistical law to each control channel transmission of electronic mirror holder, and corresponding start will take place the chamber mirror.The start of chamber mirror will cause the interference fringe picture of resonant cavity output to change, thereby resonant cavity collimation evaluation function J changes thereupon.The situation of change of J will play a decisive role to the size and Orientation that is applied to each control channel driving voltage in the next iteration (increase or reduce).So, form sensing, control and the reponse system of a closed loop.
Described iterative algorithm can make J restrain gradually to extreme value, just means that also chamber mirror structure approaching to collimating status gradually.When J converged to above-mentioned 0.99 threshold value, iteration finished.The voltage of keeping this moment is constant, and automatic cavity-adjusting finishes.
The laser resonant cavity automatic cavity adjusting system of handling based on interference fringe picture skeleton line of the present invention adopts the video camera that cooperates installation with laserresonator, computer and mirror control system formation have sensing, the closed-loop system of control and feedback function, and the laser resonant cavity automatic cavity adjusting method handled based on interference fringe picture skeleton line proposed in view of the above, utilize video camera that the interference fringe of the output collimated light beam of laserresonator is write down and transfer to computer by data wire, computer is handled bar graph, by data wire chamber mirror control system is transmitted control signal the autocollimation of actuator chamber mirror according to result.
Because the near field hot spot of the output collimated light beam of the resonant cavity of various structure types is interference fringe, therefore the cavity adjustment method that the present invention announced is equally applicable to the resonant cavity automatic cavity adjusting of other structure types, is applicable to also that further output facula is that the area of computer aided of the complicated optical system formed of many optical elements of circular interference fringe is debug.
Meaning of the present invention is:
1, existing general cavity adjustment method is to utilize interference fringe to carry out artificial interpretation, and the experience composition is many in the artificial interpretation, and the precision in accent chamber depends on staff's subjective judgement to a great extent.Human eye just can be discovered when generally speaking, having only cavity mirror misalignment to reach 25 rads of left and right sides.The present invention has effectively eliminated the subjectivity error that human eye brings by the quantitative analysis of interference fringe data result being judged the collimation of resonant cavity in the striped interpretation, greatly improved the precision and the accuracy of interpretation.
2, because factors such as the drift of device self and external interference all need the adjustment that collimates before laserresonator (especially being applied to the unsteady cavity of high power laser) is opened each time.The present invention can transfer laser resonant cavity the artificial cavity adjustment method in field, chamber to transfer the chamber technology to combine with autocollimation, shortcomings such as artificial cavity adjustment method length consuming time, repeatable difference have been overcome on the one hand, overcome existing autocollimation on the other hand and transferred deficiencies such as chamber technological system complex structure, dyscalculia, transferred the speed and the repeatability in chamber that bigger help is all arranged for improving.
3, the present invention does not make any change to the intra resonant cavity structure, is applicable to the resonant cavity of multiple structure type, and further also can apply to other output faculas is the collimation adjustment of the optical system of interference fringe.
4,, formed a cover comparative maturity and a complete theoretical system and a technical scheme for the processing of interference fringe in the videographic measurment field.The present invention introduces the method for videographic measurment among the technology of laser accent chamber, for the cavity adjustment method of laserresonator has been opened up new thinking.
Description of drawings
Fig. 1 is the laser resonant cavity automatic cavity adjusting system schematic diagram of handling based on the interference fringe skeleton line;
Fig. 2 is the flow chart based on the laser resonant cavity automatic cavity adjusting method of interference fringe skeleton line processing;
Fig. 3 is the collimated light beam interference fringe picture of laserresonator output;
Fig. 4 is the skeleton line chart that utilizes two-dimentional derived indice binary map method that the described interference fringe picture of Fig. 3 is extracted.
In above-mentioned accompanying drawing:
1-guiding laser 2-concave mirror 3-convex mirror 4-output coupling mirror 5-video camera 6-computer 7-chamber mirror control system
Embodiment
Laserresonator has multiple structure type, and present embodiment is an example with concavo-convex cavity configuration as shown in Figure 1.Concave mirror 2 and convex mirror 3 constitute laserresonator, and the distance between them satisfies the long requirement in chamber of resonant cavity.Convex mirror 3 is installed on five dimensions (all around, up and down, pitching, driftage) the adjustable electric mirror holder and by control circuit and drives, and adjustable electric mirror holder and control circuit constitute chamber mirror control system 7 jointly.Concave mirror 2 is maintained fixed motionless.Output coupling mirror 4 is installed on the adjustable optics support of machinery, becomes miter angle to place with the resonant cavity axle, and the center has rectangle or oval macropore; Output coupling mirror is placed near convex mirror; Described guiding laser 1 adopts the He-Ne laser, place after the concave mirror 2, its Laser emission mouth is aimed at the aperture that concavees lens 2 centers are provided with, the collimated light beam that makes it to send in the chamber through after the round-trip transmission repeatedly by output coupling mirror 4 outputs and enter among the video camera 5, video camera 5 optical axises are vertical with the chamber axle, and aligning output coupling mirror 4, take in real time and photographic images is transferred to computer 6, computer 6 is handled it, and, make convex mirror 3 autocollimations to the chamber of convex mirror 3 mirror control system 7 transmission drive signals.
Near field hot spot essence by the collimated light beam of output coupling mirror 4 output is the circular interference fringe of one group of hollow, and as shown in Figure 3, the image size is 768 * 576 pixels in the present embodiment.Collimate fully ideally at resonant cavity, stripeds at different levels form a series of concentric circles; When resonant cavity when a certain direction is lacked of proper care to some extent, interference fringe picture also can skew occur in the direction of correspondence, the center of circle no longer overlaps.
The cavity adjustment method that present embodiment adopted is divided into artificial coarse adjustment and automatic two stages of accurate adjustment with laser resonance intonation chamber process, existing general artificial cavity adjustment method is adopted in wherein artificial coarse adjustment, after artificial coarse adjustment finishes, adopt automatic cavity-adjusting method of the present invention that resonant cavity is carried out automatic accurate adjustment again and transfer the chamber precision to improve.As shown in Figure 2, concrete steps are as follows:
(1) video camera 5 is taken the interference fringe of collimated light beam continuously and is transferred to computer 6, and 6 pairs of interference fringe pictures of computer carry out preliminary treatment such as greyscale transformation, filtering and noise reduction.
(2) extract skeleton line according to two-dimentional derived indice binary map method, described two-dimentional derived indice binary map method was published by Science Press in 2002, works such as Yu Qifeng based in the accurate measurement of image and the motion measurement 51 to 53 pages have a detailed description.
One of gained result as shown in Figure 4.
(3) calculate the exact position (X of skeleton line centre coordinates at different levels i, Y i), and draw relative displacement Δ d between each home position i, this is the relative displacement of skeleton lines at different levels.
At first utilize the Hough conversion to estimate the general location (X of all skeleton line centre coordinates 0, Y 0), calculate each point distance center coordinate (X on the skeleton lines at different levels then 0, Y 0) between distance.Because the circular substantially distribution of interference fringe picture, so point on each grade skeleton line and (X 0, Y 0) between distance basic identical, this distance just can be similar to radius as this grade skeleton line annulus.Different length according to skeleton line radiuses at different levels can extract skeleton lines at different levels respectively.Utilize fitting of a polynomial to obtain the accurate coordinates (X in each grade skeleton line center of circle then i, Y i).Calculate the relative displacement Δ d between each home position i, this is the relative displacement of skeleton lines at different levels.
The multinomial that described match is adopted is as follows:
p 1x 2+p 2xy+p 3y 2+p 4x+p 5y+p 6＝0 (1)
Following formula is an oval expression formula, in the formula, and p 1, p 2..., p 6Be multinomial coefficient undetermined, x and y are respectively on the striped skeleton line certain any abscissa and ordinate.By a plurality of points on the skeleton line are carried out match, just can calculate multinomial coefficient p 1, p 2..., p 6, this moment, ellipse was also determined with regard to unique, also just can determine the parameters of skeleton line place ellipse, as elliptical center coordinate (X i, Y i), major and minor axis length (a, b), oval inclination angle Deng.In other optical systems, if the interference fringe of output is more complicated more than circle or ellipse, can adopt then more that the multinomial of high-order carries out match, polynomial exponent number is decided according to shape of stripes.
Above-mentioned skeleton lines at different levels center of circle relative displacement Δ d iCalculating determine that with its distance each other computing formula is as follows:
Δ d i = ( X i - X i + 1 ) 2 + ( Y i - Y i + 1 ) 2 i = 1,2,3 , . . . , N - - - ( 2 )
In the formula, in the formula, N is the skeleton line number that can be used for calculating, and i is that the level of skeleton line is inferior, and bosom (radius minimum) skeleton line is got i=1.
Described resonant cavity collimation decision function adopts following form:
J = e - Σ i N - 1 Δ d i N - 1 - - - ( 3 )
When J 〉=0.99, can think no longer needs the resonant cavity collimation to regulate.
In the present embodiment, among Fig. 4 from inside to outside the result of calculation of three grades of striped skeleton lines be (unit: pixel):
Centre coordinate general location: X 0=412, Y 0=288;
Exact position, one-level skeleton line center: X 1=412.6, Y 1=288.9;
Exact position, secondary skeleton line center: X 2=4138, Y 2=287.8;
Exact position, three grades of skeleton line centers: X 3=411.6, Y 3=283.8.
Calculate offset d according to aforementioned skeleton line side-play amount computing formula iIn the present embodiment, at The above results get (unit: pixel):
Δ d 1 = ( X 1 - X 2 ) 2 + ( Y 1 - Y 2 ) 2 = ( 412.6 - 413.8 ) 3 + ( 288.9 - 287.8 ) 2 = 1.628
Δ d 2 = ( X 2 - X 3 ) 2 + ( Y 2 - Y 3 ) 2 = ( 413.8 - 411.6 ) 2 + ( 287.8 - 283.8 ) 2 = 4.565
Calculate resonant cavity collimation J according to aforementioned resonant cavity collimation decision function.In the present embodiment, get at The above results:
J = e - Σ i 2 Δ d i 2 = e - Δ d 1 + Δ d 2 2 = e - 1.628 + 4.565 2 = 0.0452
As seen this moment, resonant cavity did not reach the collimation requirement.
According to iterative algorithm, computer transmits control signal to each passage of chamber mirror control system according to the result of calculation of J and regulates automatically with the actuator chamber mirror.
The process of iteration is exactly constantly to satisfy the driving voltage of certain statistical law to each control channel transmission of electronic mirror holder, and corresponding start will take place the chamber mirror.The action of chamber mirror will cause the interference fringe picture of resonant cavity output to change, thereby resonant cavity collimation evaluation function J changes thereupon.The situation of change of J will play a decisive role to the size and Orientation that is applied to each control channel driving voltage in the next iteration (increase or reduce).So, form sensing, control and the reponse system of a closed loop.
Described iterative algorithm can make J restrain gradually to extreme value, just means that also chamber mirror structure approaching to collimating status gradually.When J converged to above-mentioned 0.99 threshold value, iteration finished.The voltage of keeping this moment is constant, and automatic cavity-adjusting finishes.

Claims (10)

1. laser resonant cavity automatic cavity adjusting system of handling based on interference fringe picture skeleton line, it is characterized in that video camera (5), computer (6) that the laserresonator that comprises guide lights laser (1), is made of adjustable chamber mirror, output coupling mirror (4), optical axis and laserresonator chamber axle are vertical and the chamber mirror control system (7) that is connected with adjustable chamber mirror; Described video camera (5) is connected with computer (6), computer (6) connection chamber mirror control system (7).
2. according to the described laser resonant cavity automatic cavity adjusting system of handling based on interference fringe picture skeleton line of claim 1, it is characterized in that described adjustable chamber mirror comprises concave mirror (2) and the convex mirror (3) that is positioned on the same optical axis.
3. according to claim 1 or the 2 described laser resonant cavity automatic cavity adjusting systems of handling based on interference fringe picture skeleton line, it is characterized in that, one of adjustable chamber mirror is installed on the electronic adjustable mirror holder, and described electronic adjustable mirror holder and the control circuit that is attached thereto constitute chamber mirror control system (7).
4. a laser resonant cavity automatic cavity adjusting method of handling based on interference fringe picture skeleton line is characterized in that, comprises the steps:
1) utilizes video camera that the interference fringe of the output collimated light beam of laserresonator is carried out record, and transmit it to computer;
2) computer carries out preliminary treatment to interference fringe image, extracts the striped skeleton line again, and calculates the relative displacement of striped skeleton line;
3) according to the relative displacement that obtains resonant cavity degree of collimating is judged;
4) according to the resonant cavity collimation, the mirror control system is sent control signal to the chamber, the autocollimation of actuator chamber mirror.
5. according to the described laser resonant cavity automatic cavity adjusting method of handling based on interference fringe picture skeleton line of claim 4, it is characterized in that the interference fringe image preliminary treatment in the described step 2 comprises greyscale transformation and filtering and noise reduction step.
6. according to the described laser resonant cavity automatic cavity adjusting method of handling based on interference fringe picture skeleton line of claim 4, it is characterized in that what the extracting method of described striped skeleton line adopted is two-dimentional derived indice binary map method.
7. according to the described laser resonant cavity automatic cavity adjusting method of handling based on interference fringe picture skeleton line of claim 4, it is characterized in that, the computational methods of described striped skeleton line relative displacement are: at first adopt the Hough conversion to ask for skeleton lines at different levels center approximate coordinate, according to the skeleton line radius skeleton lines at different levels are extracted then, adopt the method for fitting of a polynomial to obtain the actual coordinate in the skeleton lines at different levels center of circle again, and calculate relative displacement between the skeleton lines at different levels center of circle, be the relative displacement of skeleton lines at different levels.
8. according to the described laser resonant cavity automatic cavity adjusting method of handling based on interference fringe picture skeleton line of one of claim 4-7, it is characterized in that, according to the relative displacement that obtains resonant cavity degree of collimating is judged, be meant according to relative displacement to calculate resonant cavity collimation decision function
Figure F2009102271030C0000021
Wherein N is the skeleton line number that can be used for calculating, and i is that the level of skeleton line is inferior, Δ d iBe skeleton lines at different levels center of circle relative displacement;
Judge again whether resonant cavity collimation decision function J reaches the threshold values of setting.
9. the described according to Claim 8 laser resonant cavity automatic cavity adjusting method of handling based on interference fringe picture skeleton line, it is characterized in that, described chamber mirror control system is sent control signal actuator chamber mirror and is adopted iterative algorithm to carry out, with resonant cavity collimation decision function J as the performance evaluation function, the process of iteration is exactly that continuous each control channel to electronic mirror holder sends driving voltage, make the chamber mirror that corresponding start take place, thereby resonant cavity collimation evaluation function J is restrained gradually to the threshold values of setting; When resonant cavity collimation evaluation function J converged to threshold value, iteration finished, and the voltage of keeping this moment is constant, and automatic cavity-adjusting finishes.
10. according to the described laser resonant cavity automatic cavity adjusting method of handling based on interference fringe picture skeleton line of claim 9, it is characterized in that the threshold values of described setting is 0.99.
CN2009102271030A 2009-12-04 2009-12-04 Laser resonant cavity automatic cavity adjusting system and method based on interference fringe picture skeleton line processing Expired - Fee Related CN101710667B (en)

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CN102545000A (en) * 2011-02-25 2012-07-04 北京国科世纪激光技术有限公司 Adjusting method of resonant cavity
CN103913299A (en) * 2014-04-10 2014-07-09 中国人民解放军国防科学技术大学 Optical resonant cavity mode and loss measurement device and method based on optical cavity ring-down method
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CN102545000A (en) * 2011-02-25 2012-07-04 北京国科世纪激光技术有限公司 Adjusting method of resonant cavity
CN102545000B (en) * 2011-02-25 2014-06-11 北京国科世纪激光技术有限公司 Adjusting method of resonant cavity
CN103913299A (en) * 2014-04-10 2014-07-09 中国人民解放军国防科学技术大学 Optical resonant cavity mode and loss measurement device and method based on optical cavity ring-down method
CN103913299B (en) * 2014-04-10 2016-08-17 中国人民解放军国防科学技术大学 Optical resonator pattern based on optical cavity ring-down method and loss measurement apparatus and method
CN110444998A (en) * 2019-08-02 2019-11-12 成都航天科工微电子系统研究院有限公司 A kind of method of unsteady cavity solid state laser alignment adjustment
CN110444998B (en) * 2019-08-02 2020-05-22 航天科工微电子系统研究院有限公司 Method for aligning, installing and adjusting unstable cavity solid laser
CN113639676A (en) * 2021-07-30 2021-11-12 哈尔滨工业大学 Two-dimensional photoelectric auto-collimation method and device based on wavefront measurement and correction
CN113639676B (en) * 2021-07-30 2023-10-20 哈尔滨工业大学 Two-dimensional photoelectric auto-collimation method and device based on wavefront measurement and correction

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