CN101710133A - capacitive accelerometer - Google Patents
capacitive accelerometer Download PDFInfo
- Publication number
- CN101710133A CN101710133A CN200910198629A CN200910198629A CN101710133A CN 101710133 A CN101710133 A CN 101710133A CN 200910198629 A CN200910198629 A CN 200910198629A CN 200910198629 A CN200910198629 A CN 200910198629A CN 101710133 A CN101710133 A CN 101710133A
- Authority
- CN
- China
- Prior art keywords
- end cover
- lead
- out terminal
- sub
- mass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000001133 acceleration Effects 0.000 claims abstract description 104
- 238000005259 measurement Methods 0.000 claims description 35
- 238000009413 insulation Methods 0.000 claims description 19
- 239000003990 capacitor Substances 0.000 claims description 15
- 239000007787 solid Substances 0.000 claims description 6
- 238000005516 engineering process Methods 0.000 description 6
- 239000007769 metal material Substances 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 210000003739 neck Anatomy 0.000 description 4
- 238000012360 testing method Methods 0.000 description 3
- 238000009827 uniform distribution Methods 0.000 description 3
- 238000011161 development Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000013519 translation Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Images
Landscapes
- Pressure Sensors (AREA)
Abstract
A capacitive accelerometer comprises an upper end cover with an upper end cover polar plate, a lower end cover with a lower end cover polar plate, a mass block with a mass block polar plate upper polar plate and a mass block lower polar plate, a cylinder body and eight elastic support rods, wherein the upper end cover and the lower end cover are combined with the cylinder body to fix the elastic support rods, and the mass block is connected with the cylinder body through the elastic support rods to form a sensitive movement mechanism; the upper end cover polar plate, the lower end cover polar plate, the mass block upper polar plate and the mass block lower polar plate are all provided with a plurality of mutually spaced fan-shaped sub-electrodes, and the fan-shaped sub-electrodes enable the upper end cover polar plate and the lower end cover polar plate to respectively form a differential capacitance structure with the mass block upper polar plate and the mass block lower polar plate. The invention can simultaneously measure the longitudinal acceleration and the angular acceleration.
Description
Technical field
The invention belongs to MEMS (micro electro mechanical system) (MEMS) inertial sensor field.Relate to a kind of capacitive accelerometer, what be specifically related to is the capacitive accelerometer that can measure longitudinal acceleration and longitudinal angle acceleration simultaneously.
Background technology
Along with science and technology development, the measurement of object moving state and control are more and more come into one's own, in some big, accurate high-tech devices, small motion may cause very tremendous influence especially.And therefore accelerometer Measuring Object motion state a kind of very commonly used and effective instrument just, have been subjected to the scientific research personnel and have paid close attention to widely.Because capacitive accelerometer is highly sensitive, temperature is floated little, and is simple and compact for structure, receives much concern especially, and development rapidly.
As its name suggests, the principle of capacitance type sensor all realizes by changing electric capacity.The electric capacity that changes capacitor has two methods, and a kind of is the spacing that changes pole plate, and another kind is the useful area that changes pole plate.At present, the sensor of dual mode has, as the Chinese patent publication number is that CN101089625A, name are called the patent of " metal capacitance microaccelerator ", it then is the principle of utilizing the capacitor plate spacing to change, the Chinese patent publication number is that CN101187674A, name are called " a kind of differential capacitance type micro-mechanical accelerometer ", utilization then be the variation of pole plate area.
Find that by prior art documents present capacitive accelerometer has only single accelerometer or angular accelerometer, still for finding the capacitance type sensor of not only energy measurement acceleration but also energy measurement angular acceleration.Be existing capacitive accelerometer, or can only measure the acceleration of 1 dimension, 2 dimensions or 3 dimensions, or can only the measured angular acceleration, also there is not method can measure acceleration and angular acceleration motion simultaneously.Yet the motion of object had both comprised translation, also comprised rotation.Particularly in the middle of some large scale structures, rotate more important than translation.Therefore, the instrument that can measure acceleration and angular accelerometer simultaneously is short of very much.
Summary of the invention
The objective of the invention is to remedy the blank of present capacitance acceleration sensor technology, propose a kind of capacitive accelerometer, it is the energy measurement longitudinal acceleration both, and energy measurement longitudinal angle acceleration again is to satisfy required measurement requirement.
The present invention is achieved through the following technical solutions:
A kind of capacitive accelerometer, its characteristics are to comprise:
Upper end cover, the insulation of the inside surface of upper end cover the upper end cover pole plate that is sticked, and have the scotch of an outstanding insulation at the center of the inside surface of upper end cover;
Bottom end cover, the insulation of the inside surface of bottom end cover the bottom end cover pole plate that is sticked, and have the scotch of an outstanding insulation at the center of the inside surface of bottom end cover;
Mass is that up and down two ends have the solid cylinder of necking down " king " font respectively, upper and lower side at this solid cylinder is provided with mass top crown and mass bottom crown with insulating respectively, is provided with the jack of four mutually insulateds around the last necking down of this mass and the following necking down respectively symmetrically;
Cylinder is respectively equipped with the groove of four insulation symmetrically on four limits, two ends up and down of this cylinder, corresponding with the jack that is provided with four insulation on every side respectively symmetrically of the last necking down of described mass and following necking down;
First elastic fulcrum bar, second elastic fulcrum bar, the two ends of the 3rd elastic fulcrum bar and the 4th elastic fulcrum bar are separately fixed in four grooves of upper end of described cylinder and in four jacks of necking down on the described mass, the 5th elastic fulcrum bar, the 6th elastic fulcrum bar, the two ends of the 7th elastic fulcrum bar and the 8th elastic fulcrum bar are separately fixed in four grooves of lower end of described cylinder and in four jacks of necking down under the described mass, described upper end cover and bottom end cover combine with described cylinder, described elastic fulcrum bar is fixed, described mass is connected with described cylinder by described elastic fulcrum bar, forms responsive motion;
Described upper end cover pole plate and bottom end cover pole plate are identical, described mass top crown and mass bottom crown are identical, described upper end cover pole plate, bottom end cover pole plate, mass top crown, mass bottom crown all have the fan-shaped sub-electrode of polylith space, and these fan-shaped sub-electrodes make described upper end cover pole plate, bottom end cover pole plate constitute the differential capacitance type structure with mass top crown, mass bottom crown respectively.
The outer end of four grooves that described first elastic fulcrum bar, second elastic fulcrum bar, the 3rd elastic fulcrum bar, the 4th elastic fulcrum bar stretch out the upper end of described cylinder forms first lead-out terminal, second lead-out terminal, the 3rd lead-out terminal and the 4th lead-out terminal respectively, and the outer end of four grooves that described the 5th elastic fulcrum bar, the 6th elastic fulcrum bar, the 7th elastic fulcrum bar and the 8th elastic fulcrum bar stretch out the lower end of described cylinder forms the 5th lead-out terminal, the 6th lead-out terminal, the 7th lead-out terminal and the 8th lead-out terminal respectively;
Described upper end cover pole plate has 4 segment angle acceleration analysis sub-electrodes, 2 segment angle velocity survey sub-electrodes and a plurality of guard electrode, and described bottom end cover pole plate has 4 segment angle acceleration analysis sub-electrodes, 2 segment angle velocity survey sub-electrodes and a plurality of guard electrode; Described mass top crown has 2 segment angle acceleration analysis sub-electrodes, 2 segment angle velocity survey sub-electrodes and a plurality of guard electrode, and described mass bottom crown has 2 segment angle acceleration analysis sub-electrodes, 2 segment angle velocity survey sub-electrodes and a plurality of guard electrode;
Two angular acceleration of described upper end cover pole plate are measured sub-electrode and are linked to each other with described first lead-out terminal, and two angular velocity measurement sub-electrodes link to each other with described second lead-out terminal in addition; Two angular acceleration of described upper end cover pole plate are measured sub-electrode and are linked to each other with described the 3rd lead-out terminal;
Two angular acceleration of described bottom end cover pole plate are measured sub-electrode and are linked to each other with described the 5th lead-out terminal, and two angular acceleration measurement sub-electrodes link to each other with described the 7th lead-out terminal in addition; Two angular velocity measurement sub-electrodes of described bottom end cover pole plate link to each other with described the 6th lead-out terminal;
Two angular acceleration measurement sub-electrodes that two angular acceleration of described mass top crown are measured sub-electrode and described mass bottom crown link to each other with described the 4th lead-out terminal; Two angular velocity measurement sub-electrodes of two angular velocity measurement sub-electrodes of described mass top crown and described mass bottom crown link to each other with described the 8th lead-out terminal.
Two angular acceleration in the described upper end cover pole plate are measured the angular acceleration of just in time dividing the mass top electrode equally in the projection of described mass top electrode in the slit between the sub-electrode and are measured sub-electrode; Two angular acceleration are measured the angular acceleration of just in time dividing the mass bottom electrode equally in the projection of mass bottom electrode in the slit between the sub-electrode and are measured sub-electrode in the bottom end cover pole plate.
Capacitive accelerometer of the present invention is installed on the object under test, capacitor C 2 between capacitor C 1 between described second lead-out terminal and the 8th lead-out terminal and the 6th lead-out terminal and the 8th lead-out terminal changes, equal and opposite in direction, direction is opposite, and the difference of C1 and C2 is represented the longitudinal acceleration of object under test; Capacitor C r6 between the capacitor C r5 between the 3rd lead-out terminal and the 7th lead-out terminal and first lead-out terminal and the 5th lead-out terminal changes, equal and opposite in direction, and direction is opposite, and the difference of Cr5 and Cr6 is represented the longitudinal angle acceleration of object under test.
Advantage of the present invention is:
1, described mass is a cylindrical inertia mechanism in this system.Its rigidity, density are big, with mass top crown and the insulation of mass bottom crown.Its profile is broad in the middle, is locating near two ends, and the right cylinder radius reduces, and respectively forms a similar and neck structure at two ends, and is uniform-distribution with four circular holes at each neck, and each circular hole is fixed the other end of an elastic fulcrum bar.
2, described elastic fulcrum bar is identical, by conduct electricity very well, good toughness and the suitable material of rigidity make, and is generally cylindrical bar, specifically can be according to performance design.They are the flexible member in the whole motion, are again the leads of pole plate electrode.The end that each elastic fulcrum bar is connected with cylinder directly is made into lead-out terminal.This structure has been saved the influence of extra lead to the mass motion, has reduced the degree of difficulty of lead-in wire processing technology again.
3, mass is under the effect of acceleration, and the variation of displacement causes the electric capacity of mass top crown and upper end cover pole plate and mass bottom crown and bottom end cover pole plate to change, and two changes in capacitance amount equal and opposite in directions, and direction is opposite.Under the effect of angular acceleration, mass twists, cause the parton electrode of mass top crown, mass bottom crown to divide sub-electrode, the interelectrode useful area of bottom end cover blade portion molecule to change with the upper end cover blade portion respectively, thereby cause capacitance variations, wherein, the variable quantity equal and opposite in direction, direction is opposite.Dual mode has all formed differential mode, has improved sensitivity, precision, and has suppressed noise.
Measure when 4, having realized longitudinal acceleration and longitudinal angle acceleration.
5, processing technology is simple, and similar elements is many, easily produces in batches.
6, the present invention both can make of MEMS technology, can make of traditional handicraft again.
7, the present invention is provided with scotch, can effectively prevent overload.
Description of drawings
Fig. 1 is the cross-sectional view of capacitive accelerometer of the present invention;
Fig. 2 is the A-A direction cross-sectional schematic of Fig. 1;
Fig. 3 is a upper end cover pole plate synoptic diagram of the present invention;
Fig. 4 is a mass top crown synoptic diagram of the present invention;
Fig. 5 is an angular acceleration potential electrode line synoptic diagram of the present invention;
Fig. 6 is an acceleration analysis electrode connecting line synoptic diagram of the present invention.
Embodiment
The capacitive accelerometer that the present invention proposes reaches embodiment in conjunction with the accompanying drawings and is described in detail as follows:
See also Fig. 1, Fig. 2, Fig. 3 and Fig. 4 earlier, as seen from the figure, capacitive accelerometer of the present invention, formation comprises:
Upper end cover 1, the insulation of the inside surface of upper end cover the upper end cover pole plate 2 that is sticked, and have the scotch of an outstanding insulation at the center of the inside surface of upper end cover;
Mass 8 is that up and down two ends have the solid cylinder of " king " font of necking down respectively, upper and lower side at this solid cylinder is provided with mass top crown 3 and mass bottom crown 14 with insulating respectively, is provided with the jack of four mutually insulateds around the last necking down of this mass 8 and the following necking down respectively symmetrically;
Cylinder 9 is respectively equipped with the groove of four insulation symmetrically on four limits, two ends up and down of this cylinder 9, corresponding with the jack that is provided with four insulation on every side respectively symmetrically of the last necking down of described mass 8 and following necking down;
First elastic fulcrum bar 4, second elastic fulcrum bar 5, the two ends of the 3rd elastic fulcrum bar 6 and the 4th elastic fulcrum bar 7 are separately fixed in four grooves of upper end of described cylinder 9 and in four jacks of necking down on the described mass 8, the 5th elastic fulcrum bar 10, the 6th elastic fulcrum bar 11, the two ends of the 7th elastic fulcrum bar 12 and the 8th elastic fulcrum bar 13 are separately fixed in four grooves of lower end of described cylinder 9 and in four jacks of 8 times necking downs of described mass, described upper end cover 1 and bottom end cover 16 combine with described circle simplified 9, described elastic fulcrum bar is fixed, described mass 8 is connected with described cylinder 9 by described elastic fulcrum bar, forms responsive motion;
Described upper end cover pole plate 2 is identical with bottom end cover pole plate 15, described mass top crown 3 and mass bottom crown 14 are identical, described upper end cover pole plate 2, bottom end cover pole plate 15, mass top crown 3, mass bottom crown 14 all have the fan-shaped sub-electrode of polylith space, and these fan-shaped sub-electrodes make described upper end cover pole plate 2, bottom end cover pole plate 15 constitute the differential capacitance type structure with mass top crown 3, mass bottom crown 14 respectively.
Described first elastic fulcrum bar 4, second elastic fulcrum bar 5, the 3rd elastic fulcrum bar 6, the outer end of four grooves that the 4th elastic fulcrum bar 7 stretches out the upper end of described cylinder 9 forms first lead-out terminal 17 respectively, second lead-out terminal 18, the 3rd lead-out terminal 19 and the 4th lead-out terminal 20, described the 5th elastic fulcrum bar 10, the 6th elastic fulcrum bar 11, the outer end of four grooves that the 7th elastic fulcrum bar 12 and the 8th elastic fulcrum bar 13 stretch out the lower end of described cylinder 9 forms the 5th lead-out terminal 21 respectively, the 6th lead-out terminal 22, the 7th lead-out terminal 23 and the 8th lead-out terminal 24;
Referring to Fig. 3, Fig. 5 and Fig. 6, described upper end cover pole plate 2 has 4 segment angle acceleration analysis sub-electrode 2a1,2a2,2c1,2c2,2 segment angle velocity survey sub-electrode 2b1,2b2 and a plurality of guard electrode 2d1,2d2,2d3,2d4,2d5,2d6, and described bottom end cover pole plate 15 has 4 segment angle acceleration analysis sub-electrode 2a ' 1,2a ' 2,2c ' 1,2,2 segment angle velocity survey sub-electrodes of 2c ' 2b ' 1,2b ' 2 and a plurality of guard electrode 2d ' 1,2d ' 2,2d ' 3,2d ' 4,2d ' 5,2d ' 6;
Referring to Fig. 4, Fig. 5 and Fig. 6, described mass top crown 3 has 2 segment angle acceleration analysis sub-electrode 3a1,3a2,2 segment angle velocity survey sub-electrode 3b1,3b2 and a plurality of guard electrode 3c1,3c2,3c3,3c4,3c5, and described mass bottom crown 14 has 2 segment angle acceleration analysis sub-electrode 3a ' 1,2,2 segment angle velocity survey sub-electrodes of 3a ' 3b ' 1,3b ' 2 and a plurality of guard electrode 3c ' 1,3c ' 2,3c ' 3,3c ' 4,3c ' 5;
Two angular acceleration of described upper end cover pole plate 2 are measured sub-electrode 2a1,2c2 and are linked to each other with described first lead-out terminal 17, and two angular acceleration measurement sub-electrode 2a2,2c1 link to each other with described the 3rd lead-out terminal 19 in addition; 2 two angular velocity measurement sub-electrodes of described upper end cover pole plate 2b1,2b2 link to each other with described second lead-out terminal 18;
15 two angular acceleration of described bottom end cover pole plate are measured sub-electrode 2a ' 1,2c ' 2 and are linked to each other with described the 5th lead-out terminal 21, two angular acceleration measurement sub-electrode 2a ' 2,2c ' 1 link to each other with described the 7th lead-out terminal 23 in addition, and 15 two angular velocity measurement sub-electrodes of described bottom end cover pole plate 2b ' 1,2b ' 2 link to each other with described the 6th lead-out terminal 22;
Two angular acceleration measurement sub-electrode 3a ' 1,3a ' 2 that 3 two angular acceleration of described mass top crown are measured sub-electrode 3a1,3a2 and described mass bottom crown 14 link to each other with described the 4th lead-out terminal 20; 3 two angular velocity measurement sub-electrodes of described mass top crown 3b1,14 two angular velocity measurement sub-electrodes of 3b2 and described mass bottom crown 3b ' 1,3b ' 2 link to each other with described the 8th lead-out terminal 24.
Referring to Fig. 3 and Fig. 4, two angular acceleration in the described upper end cover pole plate 2 are measured the angular acceleration of just in time dividing mass top electrode 3 equally in the projection of described mass top electrode 3 in the slit between sub-electrode 2a1, the 2a2 and are measured sub-electrode 3a1; Two angular acceleration are measured the angular acceleration of just in time dividing mass bottom electrode 14 equally in the projection of mass bottom electrode 14 in the slit between sub-electrode 2a ' 1, the 2a ' 2 and are measured sub-electrode 3a ' 1 in the bottom end cover pole plate 15.
As shown in Figure 1, upper end cover 1 and bottom end cover 15 are made by the big material of rigidity.Can be metal material but be not limited to metal material.For the distortion of end cap in guaranteeing to move does not influence acceleration analysis, the thickness of end cap can not be too thin.
As shown in Figure 1, mass 8 is big by rigidity, and the material that density is big is made.Can be metal material but be not limited to metal material.The neck at mass two ends is uniform-distribution with four holes, and an end of elastic fulcrum bar just can be inserted in each hole.
As shown in Figure 1, cylinder 9 is made by the big material of rigidity.Can be metal material but be not limited to metal material.The two ends of cylinder 9 are uniform-distribution with 4 grooves respectively, just can put into an end of elastic fulcrum bar.
As shown in Figure 2, an end of described elastic fulcrum bar inserts the jack of mass 8 necks, and the other end is placed in the groove of cylinder, and described upper end cover 1 and bottom end cover 16 fix with cylinder 9, also fix each elastic fulcrum bar simultaneously, thus the fixing motion sensitive mechanism that forms.
Operation principle of the present invention: the electric capacity (being the electric capacity between lead-out terminal 19 and the lead-out terminal 20) that makes upper end cover pole plate angular acceleration measure sub-electrode 2a2 and 2c1 and mass top crown angular acceleration measurement sub-electrode 3a1 and 3a2 formation is Cr1; The electric capacity (being the electric capacity between lead-out terminal 17 and the lead-out terminal 20) that upper end cover pole plate angular acceleration is measured sub-electrode 2a1 and 2c2 and mass top crown angular acceleration measurement sub-electrode 3a1 and 3a2 formation is Cr2; The electric capacity (being the electric capacity between lead-out terminal 23 and the lead-out terminal 20) that bottom end cover pole plate angular acceleration is measured sub-electrode 2a ' 2 and 2c ' 1 and mass bottom crown angular acceleration measurement sub-electrode 3a ' 1 and 3a ' 2 formation is Cr3, and the electric capacity (being the electric capacity between lead-out terminal 21 and the lead-out terminal 20) that bottom end cover pole plate angular acceleration measurement sub-electrode 2a ' 1 and 2c ' 2 and mass bottom crown angular acceleration measurement sub-electrode 3a ' 1 and 3a ' 2 form is Cr4. Make Cr1 that connect with the Cr3 electric capacity ( being the electric capacity between lead-out terminal 19 and the lead-out terminal 23 ) of output is Cr5； the Cr2 electric capacity of exporting ( being the electric capacity between lead-out terminal 17 and the lead-out terminal 21 ) of connecting with Cr4 is Cr6.The electric capacity ( being the electric capacity between lead-out terminal 18 and the lead-out terminal 24 ) that makes upper end cover pole plate acceleration analysis sub-electrode 2b1 and 2b2 and mass top crown acceleration analysis sub-electrode 3b1 and 3b2 form is C1； and the electric capacity ( being the electric capacity between lead-out terminal 22 and the lead-out terminal 24 ) that bottom end cover pole plate acceleration analysis sub-electrode 2b ' 1 and 2b ' 2 and mass bottom crown acceleration analysis sub-electrode 3b ' 1 and 3b ' 2 form is C2.The useful area that makes upper end cover pole plate angular acceleration measure between sub-electrode 2a2 and 2c1 and mass top crown angular acceleration measurement sub-electrode 3a1 and the 3a2 is Sr1； the useful area that upper end cover pole plate angular acceleration is measured between sub-electrode 2a1 and 2c2 and mass top crown angular acceleration measurement sub-electrode 3a1 and the 3a2 is Sr2； the useful area that bottom end cover pole plate angular acceleration is measured sub-electrode 2a ' 2 and 2c ' 1 and mass bottom crown angular acceleration measurement sub-electrode 3a ' 1 and 3a ' 2 is Sr3； the useful area that bottom end cover pole plate angular acceleration is measured sub-electrode 2a ' 1 and 2c ' 2 and mass bottom crown angular acceleration measurement sub-electrode 3a ' 1 and 3a ' 2 is Sr4； the useful area of upper end cover pole plate acceleration analysis sub-electrode 2b1 and 2b2 and mass top crown acceleration analysis sub-electrode 3b1 and 3b2 is S1； the useful area of bottom end cover pole plate acceleration analysis sub-electrode 2b ' 1 and 2b ' 2 and mass bottom crown acceleration analysis sub-electrode 3b ' 1 and 3b ' 2 is S2； distance between upper end cover pole plate 2 and the mass top crown 3 is d1, and the distance between bottom end cover pole plate 15 and the mass bottom crown 14 is d2.
According to described assembling, under any circumstance, all satisfy: Sr1=Sr3, Sr2=Sr4, S1=S2.
For capacity plate antenna, capacitance is directly proportional with useful area, and distance is inversely proportional between flat board, makes its expression formula be
Wherein p is a constant.Then
Under no acceleration situation, Sr1=Sr2, d1=d2.At this moment, C1=C2, Cr5=Cr6.
When this accelerometer was subjected to longitudinal acceleration, relative displacement Δ d can take place, thereby cause d1, d2 to be changed to d1+ Δ d, d2-Δ d respectively under the effect of inertial force in mass 8 with cylinder 9, upper end cover 1, bottom end cover 16.Be the variation equal and opposite in direction of d1 and d2, direction is opposite.Corresponding capacitor C 1, the variation of C2 be equal and opposite in direction also, and direction is opposite, thereby forms difference structure, by measuring the value of C1 and C2, can obtain the longitudinal acceleration value.By analysis as can be known, when acceleration made progress, C1 reduced, and C2 increases; When acceleration was downward, C1 increased, and C2 reduces, their variable quantity equal and opposite in directions, and direction is opposite.At this moment, Sr1, Sr 2, Sr 3, Sr 4 no changes, the distance between upper end cover pole plate 2 and the bottom end cover pole plate 15 does not change, and therefore, Cr5 and Cr6 do not change
When this accelerometer is subjected to the longitudinal angle acceleration, mass 8 is under the effect of inertial force, can produce relative rotation with cylinder and end cap, thereby cause Sr1 and Sr3 to be changed to Sr1+ Δ S, Sr3-Δ S respectively, wherein Δ S is the useful area variable quantity of rotation generation, at this moment, Sr1 and Sr3 variable quantity equal and opposite in direction, direction is opposite.Therefore, corresponding Cr5 and the variable quantity of Cr6 be equal and opposite in direction also, and direction is opposite, thereby forms difference structure.By measuring the value of Cr5 and Cr6, can obtain the longitudinal angle accekeration.By analysis as can be known, when angular acceleration made progress, Cr5 increased, and Cr6 reduces; When angular acceleration was downward, Cr5 reduced, and Cr6 increases.At this moment, d1, d2 do not change, when angular acceleration in range, useful area S1, S2 do not change yet, promptly C1, C2 do not change.
By above analysis as can be known: when longitudinal acceleration, the capacitor C 2 between capacitor C 1 between second lead-out terminal 18 and the 8th lead-out terminal 24 and the 6th lead-out terminal 22 and the 8th lead-out terminal 24 changes, equal and opposite in direction, and direction is opposite.When the longitudinal angle acceleration, the capacitor C r6 between the capacitor C r5 between the 3rd lead-out terminal 19 and the 7th lead-out terminal 23 and first lead-out terminal 17 and the 5th lead-out terminal 21 changes, equal and opposite in direction, and direction is opposite.Because the variation of the difference of the variation of the difference of C1 and C2 and Cr5 and Cr6 is separate, so, can measure longitudinal acceleration and longitudinal angle acceleration simultaneously and do not have coupling phenomenon.
Claims (4)
1. capacitive accelerometer is characterized in that comprising:
Upper end cover (1), the insulation of the inside surface of upper end cover the upper end cover pole plate (2) that is sticked, and have the scotch of an outstanding insulation at the center of the inside surface of upper end cover;
Bottom end cover (16), the insulation of the inside surface of bottom end cover (16) the bottom end cover pole plate (15) that is sticked, and have the scotch of an outstanding insulation at the center of the inside surface of bottom end cover;
Mass (8) is that up and down two ends have the solid cylinder of " king " font of necking down respectively, upper and lower side at this solid cylinder is provided with mass top crown (3) and mass bottom crown (14) with insulating respectively, is provided with the jack of four mutually insulateds around last necking down of this mass (8) and the following necking down respectively symmetrically;
Cylinder (9) is respectively equipped with the groove of four insulation symmetrically on four limits, two ends up and down of this cylinder (9), corresponding with the jack that is provided with four insulation on every side respectively symmetrically of the last necking down of described mass (8) and following necking down;
First elastic fulcrum bar (4), second elastic fulcrum bar (5), the two ends of the 3rd elastic fulcrum bar (6) and the 4th elastic fulcrum bar (7) are separately fixed in four grooves of upper end of described cylinder (9) and described mass (8) is gone up in four jacks of necking down, the 5th elastic fulcrum bar (10), the 6th elastic fulcrum bar (11), the two ends of the 7th elastic fulcrum bar (12) and the 8th elastic fulcrum bar (13) are separately fixed in four grooves of lower end of described cylinder (9) and described mass (8) down in four jacks of necking down, described upper end cover (1) and bottom end cover (16) combine with described cylinder (9), described elastic fulcrum bar is fixed, described mass (8) is connected with described cylinder (9) by described elastic fulcrum bar, forms responsive motion;
Described upper end cover pole plate (2) is identical with bottom end cover pole plate (15), described mass top crown (3) and mass bottom crown (14) are identical, described upper end cover pole plate (2), bottom end cover pole plate (15), mass top crown (3), mass bottom crown (14) all have the fan-shaped sub-electrode of polylith space, and these fan-shaped sub-electrodes make described upper end cover pole plate (2), bottom end cover pole plate (15) constitute the differential capacitance type structure with mass top crown (3), mass bottom crown (14) respectively.
2. capacitive accelerometer according to claim 1, it is characterized in that described first elastic fulcrum bar (4), second elastic fulcrum bar (5), the 3rd elastic fulcrum bar (6), the outer end of four grooves that the 4th elastic fulcrum bar (7) stretches out the upper end of described cylinder (9) forms first lead-out terminal (17) respectively, second lead-out terminal (18), the 3rd lead-out terminal (19) and the 4th lead-out terminal (20), described the 5th elastic fulcrum bar (10), the 6th elastic fulcrum bar (11), the outer end of four grooves that the 7th elastic fulcrum bar (12) and the 8th elastic fulcrum bar (13) stretch out the lower end of described cylinder (9) forms the 5th lead-out terminal (21) respectively, the 6th lead-out terminal (22), the 7th lead-out terminal (23) and the 8th lead-out terminal (24);
Described upper end cover pole plate (2) has 4 segment angle acceleration analysis sub-electrodes (2a1,2a2,2c1,2c2), 2 segment angle velocity survey sub-electrodes (2b1,2b2) and a plurality of guard electrode (2d1,2d2,2d3,2d4,2d5,2d6), and described bottom end cover pole plate (15) has 4 segment angle acceleration analysis sub-electrodes (2a ' 1,2a ' 2,2c ' 1,2c ' 2), 2 segment angle velocity survey sub-electrodes (2b ' 1,2b ' 2) and a plurality of guard electrode (2d ' 1,2d ' 2,2d ' 3,2d ' 4,2d ' 5,2d ' 6); Described mass top crown (3) has 2 segment angle acceleration analysis sub-electrodes (3a1,3a2), 2 segment angle velocity survey sub-electrodes (3b1,3b2) and a plurality of guard electrode (3c1,3c2,3c3,3c4,3c5), and described mass bottom crown (14) has 2 segment angle acceleration analysis sub-electrodes (3a ' 1,3a ' 2), 2 segment angle velocity survey sub-electrodes (3b ' 1,3b ' 2) and a plurality of guard electrode (3c ' 1,3c ' 2,3c ' 3,3c ' 4,3c ' 5);
Two angular acceleration of described upper end cover pole plate (2) are measured sub-electrode (2a1,2c2) and are linked to each other with described first lead-out terminal (17), and two angular acceleration measurement sub-electrodes (2a2,2c1) link to each other with described the 3rd lead-out terminal (19) in addition; (2) two angular velocity measurement sub-electrodes of described upper end cover pole plate (2b1,2b2) link to each other with described second lead-out terminal (18);
(15) two angular acceleration of described bottom end cover pole plate are measured sub-electrode (2a ' 1,2c ' 2) and are linked to each other with described the 5th lead-out terminal (21), two angular acceleration measurement sub-electrodes (2a ' 2,2c ' 1) link to each other with described the 7th lead-out terminal (23) in addition, and (15) two angular velocity measurement sub-electrodes of described bottom end cover pole plate (2b ' 1,2b ' 2) link to each other with described the 6th lead-out terminal (22);
Two angular acceleration measurement sub-electrodes (3a ' 1,3a ' 2) that (3) two angular acceleration of described mass top crown are measured sub-electrode (3a1,3a2) and described mass bottom crown (14) link to each other with described the 4th lead-out terminal (20); (14) two angular velocity measurement sub-electrodes of (3) two angular velocity measurement sub-electrodes of described mass top crown (3b1,3b2) and described mass bottom crown (3b ' 1,3b ' 2) link to each other with described the 8th lead-out terminal (24).
3. capacitive accelerometer according to claim 1 is characterized in that two angular acceleration in the described upper end cover pole plate (2) measure the angular acceleration of just in time dividing mass top electrode (3) equally in the projection of described mass top electrode (3) in the slit between the sub-electrodes (2a1,2a2) and measure sub-electrode (3a1); Two angular acceleration are measured the angular acceleration of just in time dividing mass bottom electrode (14) equally in the projection of mass bottom electrode (14) in the slit between the sub-electrode (2a ' 1,2a ' 2) and are measured sub-electrode (3a ' 1) in the bottom end cover pole plate (15).
4. capacitive accelerometer according to claim 1, it is characterized in that capacitor C 1 between described second lead-out terminal (18) and the 8th lead-out terminal (24) and the capacitor C 2 between the 6th lead-out terminal (22) and the 8th lead-out terminal (24) change, equal and opposite in direction, direction is opposite, and the difference of C1 and C2 is represented the longitudinal acceleration of Measuring Object; Capacitor C r6 between capacitor C r5 between the 3rd lead-out terminal (19) and the 7th lead-out terminal (23) and first lead-out terminal (17) and the 5th lead-out terminal (21) changes, equal and opposite in direction, direction is opposite, and the difference of Cr5 and Cr6 is represented the longitudinal angle acceleration of Measuring Object.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009101986290A CN101710133B (en) | 2009-11-11 | 2009-11-11 | Capacitive accelerometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009101986290A CN101710133B (en) | 2009-11-11 | 2009-11-11 | Capacitive accelerometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101710133A true CN101710133A (en) | 2010-05-19 |
| CN101710133B CN101710133B (en) | 2011-07-13 |
Family
ID=42402930
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009101986290A Expired - Fee Related CN101710133B (en) | 2009-11-11 | 2009-11-11 | Capacitive accelerometer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101710133B (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102879607A (en) * | 2012-09-20 | 2013-01-16 | 北京金禾天晟高新技术有限责任公司 | Micro-electro-mechanical accelerometer and manufacturing method thereof |
| CN106629571A (en) * | 2016-09-20 | 2017-05-10 | 西北工业大学 | Weakly coupled MEMS resonance type accelerometer based on mode localization effect |
| CN106918720A (en) * | 2017-04-10 | 2017-07-04 | 浙江大学 | A kind of filament restricted type acceleration transducer |
| CN107132372A (en) * | 2017-06-29 | 2017-09-05 | 四川知微传感技术有限公司 | Structure for capacitance detection of capacitive micro-mechanical accelerometer |
| CN107247159A (en) * | 2017-07-25 | 2017-10-13 | 中国地震局工程力学研究所 | MEMS rotation accelerations sensor and rotation acceleration measurement apparatus |
| CN110376400A (en) * | 2019-06-27 | 2019-10-25 | 浙江大学 | A kind of liquid under the environment applied to ground survey floats electrostatic support accelerometer device |
| CN111580605A (en) * | 2020-05-06 | 2020-08-25 | 维沃移动通信有限公司 | Electronic device |
-
2009
- 2009-11-11 CN CN2009101986290A patent/CN101710133B/en not_active Expired - Fee Related
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102879607A (en) * | 2012-09-20 | 2013-01-16 | 北京金禾天晟高新技术有限责任公司 | Micro-electro-mechanical accelerometer and manufacturing method thereof |
| CN102879607B (en) * | 2012-09-20 | 2014-08-06 | 北京金禾天晟高新技术有限责任公司 | Micro-electro-mechanical accelerometer and manufacturing method thereof |
| CN106629571A (en) * | 2016-09-20 | 2017-05-10 | 西北工业大学 | Weakly coupled MEMS resonance type accelerometer based on mode localization effect |
| CN106629571B (en) * | 2016-09-20 | 2019-04-09 | 西北工业大学 | A kind of weak coupling MEMS resonant formula accelerometer based on mode localization effect |
| CN106918720A (en) * | 2017-04-10 | 2017-07-04 | 浙江大学 | A kind of filament restricted type acceleration transducer |
| CN106918720B (en) * | 2017-04-10 | 2019-05-14 | 浙江大学 | A kind of filament restricted type acceleration transducer |
| CN107132372A (en) * | 2017-06-29 | 2017-09-05 | 四川知微传感技术有限公司 | Structure for capacitance detection of capacitive micro-mechanical accelerometer |
| CN107132372B (en) * | 2017-06-29 | 2023-03-17 | 四川知微传感技术有限公司 | Structure for capacitance detection of capacitive micro-mechanical accelerometer |
| CN107247159A (en) * | 2017-07-25 | 2017-10-13 | 中国地震局工程力学研究所 | MEMS rotation accelerations sensor and rotation acceleration measurement apparatus |
| CN107247159B (en) * | 2017-07-25 | 2023-04-18 | 中国地震局工程力学研究所 | MEMS (micro-electromechanical system) rotational acceleration sensor and rotational acceleration measuring device |
| CN110376400A (en) * | 2019-06-27 | 2019-10-25 | 浙江大学 | A kind of liquid under the environment applied to ground survey floats electrostatic support accelerometer device |
| CN111580605A (en) * | 2020-05-06 | 2020-08-25 | 维沃移动通信有限公司 | Electronic device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101710133B (en) | 2011-07-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101710133B (en) | Capacitive accelerometer | |
| CN106597016B (en) | Capacitive MEMS (micro-electromechanical system) double-axis accelerometer | |
| EP3239723B1 (en) | Inertia measurement module and three-axis accelerometer | |
| CN101319899B (en) | Capacitor type horizontal shaft micro-mechanical tuning fork gyroscope | |
| CN102323449B (en) | Dual mass block-based triaxial micro accelerometer | |
| CN101639487A (en) | Triaxial acceleration sensor | |
| CN102636162B (en) | Three-axis micro-mechanical gyroscope | |
| CN101386400A (en) | Capacitance single mass three-shaft acceleration transducer and preparation method | |
| CN102062604A (en) | Capacitive micromachined tuning fork gyroscope | |
| CN102495236A (en) | High-sensitivity dual-axis silicon-micro resonance accelerometer | |
| CN103900546A (en) | Micro-electromechanical six-axis inertial sensor | |
| CN109311656B (en) | Micromechanical component for a pressure sensor device | |
| CN109798886A (en) | A kind of gyroscope arrangement | |
| CN107356785B (en) | MEMS torsion type accelerometer with flexible hinge structure | |
| CN113624991A (en) | Z-axis accelerometer | |
| CN112748258A (en) | Triaxial accelerometer based on single mass block | |
| CN114487483B (en) | MEMS triaxial accelerometer | |
| CN113532408A (en) | Lever structure-based in-plane sensitive axis micromechanical gyroscope | |
| CN110531109A (en) | A kind of optical fibre grating acceleration sensor and its measurement method of the hardened structure of mini elastic | |
| US10899603B2 (en) | Micromechanical z-inertial sensor | |
| CN117907633A (en) | Acceleration sensor | |
| CN211206555U (en) | Three-axis accelerometer | |
| CN111071982B (en) | Micromechanical inertial sensor | |
| CN117537795A (en) | Triaxial gyroscope with lever | |
| CN103454450B (en) | Mems sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110713 Termination date: 20131111 |