CN101709503B - Method for prolonging service life of vacuum pump of single crystal furnace - Google Patents
Method for prolonging service life of vacuum pump of single crystal furnace Download PDFInfo
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- CN101709503B CN101709503B CN200910111783XA CN200910111783A CN101709503B CN 101709503 B CN101709503 B CN 101709503B CN 200910111783X A CN200910111783X A CN 200910111783XA CN 200910111783 A CN200910111783 A CN 200910111783A CN 101709503 B CN101709503 B CN 101709503B
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- vacuum pump
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- strainer
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- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
The invention relates to a method for prolonging the service life of a vacuum pump of a single crystal furnace. In the method, an oil filter is arranged on a vacuum pumping pipeline between the vacuum pump and a furnace chamber so as to filter various impurities carried by air flow from the furnace chamber. Before the air flow carrying various impurities leaves the furnace chamber and enters the vacuum furnace, the impurities are filtered through the oil filter to protect vacuum pump oil, so that the service life of the vacuum pump is correspondingly improved.
Description
Technical field
The present invention relates to a kind of method that prolongs service life of vacuum pump, relate to a kind of method that prolongs service life of vacuum pump used in the single crystal growing furnace particularly.
Background technology
Vertical pulling method is the main method of producing silicon single-crystal.In the crystal pulling process, the impurity and the Si oxide that evaporate owing to furnace high-temperature can be absorbed in the vacuum pump oil, mix with pump oil.Along with the growth of working hour, the viscosity of vacuum pump oil can constantly increase, and the efficient that causes vacuumizing reduces.Arrive to a certain degree, vacuum pump must regularly replace pump oil.Although often change pump oil, the efficient of vacuum pump still can significantly decrease with the increase of rate of utilization, and this mainly is because the impurity in the vacuum too much causes.In addition, because the viscosity of vacuum pump oil is also increasing, cause the vacuum pump load to increase, pumping speed descends, and serious meeting causes the vacuum pump cisco unity malfunction, thereby influences the life-span of vacuum pump.
The method that tradition adopts is the periodic replacement vacuum pump oil, can remove the impurity in the vacuum pump chamber like this, alleviates the vacuum pump load, keeps normal pumping speed.But frequent replacing vacuum pump oil, not only maintenance cost height but also servicing time are long.So generally be employed in now vacuum filter is installed in the vacuum system; Vacuum filter is installed between vacuum pump and the single crystal growing furnace; Pass through vacuum filter earlier again to vacuum pump from the impurity of extracting out in the burner hearth; Most like this impurity just is filtered in the vacuum filter, to reduce the influence to vacuum pump.But conventional vacuum strainer the inside has only the tiny wire netting of one deck, can only the bigger impurity of filtering particle, and for the more short grained impurity in the air-flow, be difficult to remove like dust etc., and therefore, still be difficult to avoid fine impurity to get in the vacuum pump oil.
Therefore, the periodic replacement vacuum pump oil can improve the stability of vacuum pumping speed to a certain extent with the installation vacuum filter, but a lot of defectives are arranged, particularly to being at a complete loss as to what to do in the decline of silicon monocrystal growth process intermediate pump pumping speed.In actual production, originally in half hour, can the vacuum tightness in the furnace chamber be taken out was 10 for vacuum pump
-1, and after operation in a year, at one and a half hours, can only vacuum tightness be taken out was 3 * 10
-1
Summary of the invention
The objective of the invention is to overcome the defective in the background technology, a kind of method that prolongs service life of vacuum pump of single crystal furnace is provided.
Technical scheme provided by the invention is following:
A kind of method that prolongs service life of vacuum pump of single crystal furnace is settled oil strainer on the vacuum suction pipeline between vacuum pump and the furnace chamber, the air-flow that carries various impurity of from furnace chamber, discharging gets into vacuum pump again behind this oil strainer impurity screening.
In the described oil strainer, contain the organosilicon oil reservoir that is useful on absorption impurity, filtering gas.
Described organic silicone oil is preferably vacuum pump oil.
Can know that by foregoing description the present invention has the following advantages:
1, leaves before furnace chamber gets into vacuum pump when air-flow carries various impurity,,, just can not jeopardize vacuum pump oil, corresponding work-ing life of also just having improved vacuum pump contaminant filter earlier through oil strainer.
2, the present invention compares with original vacuum filter; Only be equivalent in original vacuum filter, add the oil reservoir that one deck is used to adsorb impurity; The usage quantity of oil strainer intermediate pump oil is approximately about 5kg, and the usage quantity of the vacuum pump oil of vacuum pump is about about 30kg, need not in the existing equipment structure under the prerequisite of big change; Can practice thrift a large amount of vacuum pump oil costs, and not change the speed of vacuum pump.
Description of drawings
Fig. 1 is the oil strainer synoptic diagram.Wherein, 1, intake ducting, 2, strainer cover, 3 strainer cavitys, 4 filtering nets, 5, the organosilicon oil reservoir, 6, gas exhaust duct.
Embodiment
With reference to Fig. 1, oil strainer of the present invention is installed between vacuum pump and the body of heater, comprises that strainer cover 2, that a strainer cavity 3, is positioned at the cavity top is positioned at the intake ducting 1 of strainer central authorities, is used to connect the escape pipe of furnace chamber; One is positioned at the gas exhaust duct 6 of filter chamber body side surface, connects vacuum pump.Wherein said strainer cavity 3 inner bottom parts have an organosilicon oil reservoir 5, and this organosilicon oil reservoir is that vacuum pump oil is formed, and is used for the fine impurity of adsorbed gas; Organosilicon oil reservoir 5 tops have-stainless steel filtering net 4, are used to filter thicker granule foreign, and described intake ducting 1 outlet is between described organosilicon oil reservoir 5 and filter screen 4.Arrow among the figure is represented gas flow direction.
Above-mentionedly be merely a specific embodiment of the present invention, but design concept of the present invention is not limited thereto, allly utilizes this design that the present invention is carried out the change of unsubstantiality, all should belong to the behavior of invading protection domain of the present invention.
Claims (2)
1. method that prolongs service life of vacuum pump of single crystal furnace, it is characterized in that: on the vacuum suction pipeline between vacuum pump and the furnace chamber, oil strainer is installed, the air-flow that carries various impurity of from furnace chamber, discharging is behind this oil strainer impurity screening; Get into vacuum pump again, wherein, described oil strainer comprises a strainer cavity; One is positioned at the strainer cover at cavity top; One is positioned at the intake ducting of strainer central authorities, and one is positioned at the gas exhaust duct of filter chamber body side surface, and described strainer cavity inner bottom part has an organosilicon oil reservoir; There is a filter screen organosilicon oil reservoir top, and described intake ducting outlet is between described organosilicon oil reservoir and filter screen.
2. a kind of method that prolongs service life of vacuum pump of single crystal furnace as claimed in claim 1 is characterized in that: described organic silicone oil is a vacuum pump oil.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910111783XA CN101709503B (en) | 2009-05-11 | 2009-05-11 | Method for prolonging service life of vacuum pump of single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910111783XA CN101709503B (en) | 2009-05-11 | 2009-05-11 | Method for prolonging service life of vacuum pump of single crystal furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101709503A CN101709503A (en) | 2010-05-19 |
| CN101709503B true CN101709503B (en) | 2012-06-06 |
Family
ID=42402309
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200910111783XA Expired - Fee Related CN101709503B (en) | 2009-05-11 | 2009-05-11 | Method for prolonging service life of vacuum pump of single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101709503B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101831690A (en) * | 2010-05-31 | 2010-09-15 | 常州亿晶光电科技有限公司 | Primary dust suction and storage tank of crystal pulling furnace |
| CN105442036A (en) * | 2015-12-02 | 2016-03-30 | 上海汉虹精密机械有限公司 | Monocrystalline silicon growth furnace vacuum supporting system |
-
2009
- 2009-05-11 CN CN200910111783XA patent/CN101709503B/en not_active Expired - Fee Related
Non-Patent Citations (1)
| Title |
|---|
| JP昭59-195596A 1984.11.06 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101709503A (en) | 2010-05-19 |
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|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120606 Termination date: 20130511 |