CN101704508B - Method for storing carbon nano-tubes by categories and method for assembling carbon nano-tubes - Google Patents
Method for storing carbon nano-tubes by categories and method for assembling carbon nano-tubes Download PDFInfo
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- CN101704508B CN101704508B CN2009102369217A CN200910236921A CN101704508B CN 101704508 B CN101704508 B CN 101704508B CN 2009102369217 A CN2009102369217 A CN 2009102369217A CN 200910236921 A CN200910236921 A CN 200910236921A CN 101704508 B CN101704508 B CN 101704508B
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Abstract
The invention discloses a method for storing carbon nano-tubes by categories and a method for assembling carbon nano-tubes. The method for storing carbon nano-tubes by categories comprises the following steps: cutting a carbon nano-tube into a plurality of carbon nano-tube subsections; covering with a polymer film; making a marker pattern visible under an optical microscope on the polymer film, wherein the marker pattern is used for uniquely confirming the position of each carbon nano-tube subsection; dissolving a substrate or the surface layer of the substrate away; and fishing the polymer film carried with the categorized carbon nano-tube subsections to a hollow frame to obtain the suspended polymer film storing the categorized carbon nano-tube subsections. The invention realizes the large-scale categorized storage and the precise positioning assembly of the carbon nano-tubes.
Description
Technical field
The present invention relates to micro-nano-scale processing and manufacturing, relate in particular to a kind of method of the storing carbon nano-tubes of classifying and the method for assemble nanometer carbon pipe.
Background technology
Be different from diamond crystal and graphite crystal that lattice structure is confirmed, CNT is the general name of one big type of material that complex structure is various, performance varies.Specifically; Not only single SWNT by curling vector (m, n) structure of uniquely tagged have in theory infinite multiple (in fact receive stability restriction, diameter can not be too big; So m and n can be very not big; The diameter of single-wall carbon tube is generally in～1nm magnitude), be the basis with the SWNT, also extensively exist combining structures such as double-walled carbon pipe, many walls carbon pipe, single-wall carbon tube bundle, the tube bank of many walls carbon.With regard to simple single-wall carbon tube, they can be seal or opening, chemism is not quite similar; Minute differences on its curling vector can cause far different electrical characteristic again, possibly be the semiconductor of metal mold conductor or different energy gaps; Various doping consciously or unconsciously and inevitable topological defect also can bring all difference on the measured performance.The character of many walls carbon pipe and tube bank is just more complicated, not only will consider the wherein performance of every single-wall carbon tube, interaction and coupling between also will considering to manage since between managing adhesion a little less than, the displacement between adjacent carbons pipe/carbon pipe layer also can take place sometimes.In a word, reach the research in 18 years, do not have which laboratory can provide the CNT of specified structure on request so far as yet though passed through.Experimental study field at CNT; Common flow process remains the unknown carbon pipe sample of serviceability, repeats in a large number to do same device or experiment, though what obtain is attribute carbon pipe at random; But, still can analyze useful scientific conclusion through to result's classification or average.Carbon pipe research compared with early stage comes, and progress experimentally is mainly reflected in from using the carbon pipe pad/clump of a tangled skein of jute, develops into the carbon pipe array of research orientation growth regularity, further can study device or phenomenon based on single CNT again.But it is, progressive then little with regard to randomness, the uncertainty of selection and the angle that is difficult to accurate repetition.Also just therefore, many good characteristics of carbon pipe are difficult to walk out laboratory scope and realize that large-scale the application---the homogeneous of device performance reliably is the most basic requirement of suitability for industrialized production after all.In order to solve this difficult problem, many research groups have carried out a large amount of unremitting efforts, but also do not obtain a perfect solution.Present solution route mainly is divided into two big types: the one, and the growth mechanism of continuation research CNT is accurately controlled growth conditions, and the carbon pipe that directly grows required ad hoc structure or character comes, but these class methods are difficult to control, fail so far to realize fully; The 2nd, be mingled in the growth product together at multiple CNT and carry out follow-up separation and purification, the carbon pipe that obtains required ad hoc structure or character comes.But the problem that this type scheme exists is: lock out operation is that the mixture to a large amount of polytype CNTs carries out; Product after the separation is still the mixture of a large amount of carbon pipes of rude classification, realizes far away coming precise classification according to single CNT character and structure.
And, want really to use the carbon pipe as the elementary cell that makes up nano-device, except will obtaining the controlled carbon pipe of performance homogeneous, also having the problem of a no less important how accurately, on a large scale is to assemble them.One of approach that addresses this problem is a direct growth, let the carbon pipe directly grow required structure even device according to the direction of designing requirement, but the difficulty of this approach is huge, does not have good implementation so far; The basic thought of second approach is to transfer to the place that needs to the carbon pipe of handling.But the defective of this approach is: the operation under the macro-scale is difficult in the interior root that pursues in zone of micro-meter scale and lays the CNT of particular type; The probe device of the action need complex and expensive under the micro-scale, and efficient and success rate are all very low; No matter macroscopic view or microtechnique, being subject to does not have reliable CNT classification save scheme, all can't in the micro-meter scale scope, carry out easily accurately assembling with the batch of kind CNT.
Summary of the invention
The object of the present invention is to provide a kind of method of the storing carbon nano-tubes of classifying and the method for location assemble nanometer carbon pipe, with extensive classification and storage and the accurately location assembling that realizes CNT.
Though the kind of CNT is varied, character varies, with regard to (or a branch of) carbon Guan Eryan; Its character is clear and definite and certain really, so when we needed two duplicate carbon pipes, the simplest directly way was looked for a carbon pipe exactly; Being cut into two sections from the centre goes to use---in the same way; If with very long carbon pipe is raw material, just can be cut into more than two sections but thousands of sections to them, store usefulness in order to future; This ten million root is on all four from the performance of the segment of same carbon pipe, need only take out wherein several samples and do sufficient rerum natura sign and measurement, stick a very detailed performance label just can for remaining spare unit.
Based on this thinking; The invention provides a whole set of technology; Consequently accumulated gradually one huge, classification is good and the known CNT sample stock of performance, needs arrive among this stock retrieval and taking of the carbon pipe of what particular characteristic or even ad hoc structure to get final product in the later work; And the carbon pipe unit in certain device can also be brought same spare unit and go replacement and reparation just in case damaged from this stock.
CNT is very tiny material, and single CNT is normally sightless under light microscope, and is difficult to handle.Observations Means to single carbon pipe mainly contains SEM, transmission electron microscope, AFM, PSTM etc. at present; The manipulation of single carbon pipe then not only needs the said equipment, also will use high-precision mobile needle point, and condition harshness, time and effort consuming, success rate are low, are difficult to build on a large scale reliable carbon tube device.
The present invention provides a slice thin polymer film as carrier for sorted each section CNT; The length width of this film is all in 10 micron dimensions; Under light microscope, can see; And can use the glass spinning tip of machinery or hydraulic control to handle easily, through shifting and locating transfer and the location assembling that the visible polymer supported body thin film of assembling has been realized single CNT indirectly, can select to dissolve away or keep thin polymer film as required at last.
According to a first aspect of the invention; The invention provides a kind of method of the storing carbon nano-tubes of classifying; This method comprises the steps: the CNT of smooth substrate growth is cut into a plurality of nano-sized carbon pipe sections, and is divided into one type to the son section of cutting from identical CNT; Cover the nano-sized carbon pipe section of classifying on the said substrate with thin polymer film; Making visible indicia patterns under the light microscope on the said thin polymer film, said indicia patterns is used for unique position of confirming said each nano-sized carbon pipe section; Dissolve said substrate or underlayer surface with solution, the said thin polymer film of the nanometer segment of tube that is loaded with said classification is reaped on the framework of hollow, obtain the thin polymer film of the nanometer segment of tube of the said classification of unsettled storage.
In prior art, the classify method of storing carbon nano-tubes of the present invention has following beneficial effect:
What the first, adopt is not the method that mixes the separation and purification of carbon pipe to large quantities of; But CNT is cut one by one; Obtain the nano-sized carbon pipe section that a large amount of classification are accurate, character is consistent, and then store the CNT of strictness classification on a large scale, make each class all comprise a large amount of precise classification; The single CNT backup that character is identical can supply repeatedly to take.
The second, through making visible indicia patterns under the light microscope on the thin polymer film, can confirm the definite position of each nano-sized carbon pipe section.
Three, the CNT that obtains according to this storage means can use thin polymer film under light microscope, to choose and handle invisible single CNT, and is easy and simple to handle.
Generally speaking; The classify method of storing carbon nano-tubes of the present invention has realized that the extensive classification of single CNT stores; Based on this storage mode, can set up one huge, classification is good and the known carbon pipe sample stock of performance, needs the carbon pipe of what particular characteristic or even ad hoc structure in the later work; Only need to retrieve and take among this stock to get final product; And the carbon pipe unit in certain device has been just in case damaged, and can also from this stock, bring same spare unit and go replacement and repair, and application prospect is very wide.
According to a second aspect of the invention; The present invention also provides a kind of method of assemble nanometer carbon pipe; This method comprises the steps: the CNT of smooth substrate growth is cut into a plurality of nano-sized carbon pipe sections, and is divided into one type to the son section of cutting from identical CNT; Cover the nano-sized carbon pipe section of classifying on the said substrate with thin polymer film; Making visible indicia patterns under the light microscope on the said thin polymer film, said indicia patterns is used for unique position of confirming said each nano-sized carbon pipe section; Said indicia patterns is divided into a plurality of polymer membranes with said thin polymer film, and the shape of said polymer membrane is one by one corresponding to the position of carrying nano-sized carbon pipe section; Dissolve said substrate or underlayer surface with solution, the said thin polymer film of the nanometer segment of tube that is loaded with said classification is reaped on the framework of hollow, obtain the thin polymer film of the nanometer segment of tube of the said classification of unsettled storage; Under light microscope, select to comprise the polymer membrane of required nano-sized carbon pipe section, this diaphragm to be taken from said thin polymer film, the polymer membrane that will be loaded with said nano-sized carbon pipe section by desired location and direction places on the target substrate; Select dissolve polymer diaphragm step, after assembling is accomplished, select to keep or dissolve the said polymer membrane that is loaded with nano-sized carbon pipe section.
With respect to prior art; The method of assemble nanometer carbon pipe of the present invention: behind method storage CNT according to the classification storing carbon nano-tubes; Acquisition is a plurality of CNTs of carrier with the polymer membrane of a large amount of micro-meter scales, and the specific CNT of selection under light microscope is transferred to the substrate or the device that need them according to the position of designing requirement and direction and got on; After the assembled, dissolve diaphragm again and retain CNT.This method is only by the operation of observation by light microscope and glass needle point, and cheap, accurate location assembling that realized CNT simply, has fast and efficiently realized the accurate transfer and the location assembling of CNT.
Description of drawings
Fig. 1 is the classify flow chart of steps of method embodiment of storing carbon nano-tubes of the present invention;
Fig. 2 is the electron beam exposure pattern that is used for the PMMA mask of oxygen plasma etch CNT;
Fig. 3 is used for classified the electron beam exposure pattern of the PMMA film of CNT, the PMMA diaphragm array that is embedded with the nano-sized carbon pipeline section on this free standing structure film of unsettled storage;
Fig. 4 locatees the flow chart of steps of the method embodiment of assemble nanometer carbon pipe for the present invention.
The specific embodiment
For make above-mentioned purpose of the present invention, feature and advantage can be more obviously understandable, below in conjunction with accompanying drawing and the specific embodiment the present invention done further detailed explanation.
With reference to Fig. 1, Fig. 1 comprises the steps: for the classify flow chart of steps of method embodiment of storing carbon nano-tubes of the present invention
Step 110: classifying step, the CNT that smooth substrate is grown is cut into a plurality of nano-sized carbon pipe sections, and is divided into one type to the son section of cutting from identical CNT.
Step 120: thin polymer film covers step, covers the nano-sized carbon pipe section of classifying on the said substrate with thin polymer film.
Step 130: the position mark step, making visible indicia patterns under the light microscope on the said thin polymer film, said indicia patterns is used for unique position of confirming said each nano-sized carbon pipe section.
Step 140: the substrate dissolving step, dissolve said substrate or underlayer surface with solution, the said thin polymer film of the nanometer segment of tube that is loaded with said classification is reaped on the framework of hollow, obtain the thin polymer film of the nanometer segment of tube of the said classification of unsettled storage.
Above-mentioned steps has realized that the extensive classification of single CNT stores; This scheme is similar to second classpath that CNT is classified of the prior art; But maximum difference is: but employing is not the method that mixes the separation and purification of carbon pipe to large quantities of; But the CNT that disperses growth is cut one by one; Segmentation is used, thereby classification is accurately strict more, selection when also being more conducive to subsequent use and accurately assembling.
Present embodiment has been through providing thin polymer film visible under a slice light microscope carrier as sightless CNT under the light microscope for every section nano-sized carbon pipe section, thereby can under light microscope, choose and handle invisible single CNT by thin polymer film; Based on this storage mode; Very help the accurate location assembling of CNT; Easy and simple to handle, usage is flexible, and application prospect is very wide; For example, can be applied to the nanometer circuit built based on the carbon pipe, make thinner afm tip and an emission needle point, make technical fields such as nano level biomolecule detection probe and sensor with CNT with CNT with the nano-device of a large amount of manufacturing property homogeneous of carbon pipe of particular community.
Below, the preferred implementation of above-mentioned each step is further explained.
In above-mentioned position mark step 130, indicia patterns is divided into a plurality of polymer membranes with said thin polymer film, and the shape of polymer membrane is one by one corresponding to the position of carrying nano-sized carbon pipe section.
In this improved embodiment; Be loaded with the shape of the polymer membrane of nano-sized carbon pipe section through design; The shape of polymer membrane is one by one corresponding to the position of carrying nano-sized carbon pipe section, makes that people can be in the judge position of the CNT that it carries of light microscope.
On the basis of the step 130 after the above-mentioned improvement, limit each polymer membrane that carries nano-sized carbon pipe section and be connected with said thin polymer film through the empty limit of stamp-like.
Through above-mentioned further improvement, can be separately take off and the nano-sized carbon pipe section that do not influence other diaphragm and carried from monolithic film membrane.
In above-mentioned further improved embodiment, each polymer membrane is provided with pilot hole, with convenient operation to nano-sized carbon pipe section.
The preferred polymethyl methacrylate of above-mentioned thin polymer film (PMMA) film.Above-mentioned classifying step further can realize through following mode: at first, with making mask with the polymethyl methacrylate film that has pattern of process electron beam exposure and development, using oxygen plasma is the CNT etching said a plurality of nano-sized carbon pipe section; Then, soak with acetone, to dissolve away the polymethyl methacrylate mask of said a plurality of nano-sized carbon pipe sections.
The method instance of classification storing carbon nano-tubes
The thin polymer film of mask when commonly used polymethyl methacrylate (PMMA) is as oxygen plasma etching CNT in the embodiment preferred electron bundle exposure technique provided by the present invention during with storage, carrying nano-sized carbon pipe section.The PMMA film obtains through the whirl coating of electron beam exposure known, roasting adhesive process, and its thickness is at 50 nanometers～1 micrometer range.The CNT of the smooth substrate growth of the preferred chemical vapor deposition (CVD) method of present embodiment is as original CNT material, and wherein the substrate preferred surface is covered with silicon dioxide layer and has specifically labelled silicon chip.
Under ESEM, take the photo of the CNT of smooth substrate growth, measure the position of CNT according to the telltale mark on the substrate.According to the mask pattern of data measured designing electron beam exposure usefulness, adopt the electron beam exposure technology whirl coating of standard, roasting glue, exposure, development, obtain being used for the PMMA mask of oxygen plasma etch CNT, as shown in Figure 2.P is the PMMA film among Fig. 2, and C is a CNT, and E is the zone of electron beam exposure and development.It is to well known to a person skilled in the art technology that oxygen plasma etch blocks CNT, and the concrete process conditions that present embodiment adopts are: oxygen flow 40sccm, air pressure 2Pa, power 80W, 4 inches of etching platform diameters, etch period 5～20 seconds.
Soak the molten PMMA mask that goes with acetone after the etching; Diaphragm pattern according to the CNT position data designing electron beam of previous measurement exposure usefulness; Once more according to the electron beam exposure technology whirl coating of standard, roasting glue, exposure, development; Obtain being used for unsettled storage and classified and be embedded with the PMMA diaphragm array of nano-sized carbon pipeline section on PMMA film and the monolithic film membrane of nano-sized carbon pipe section, as shown in Figure 3.P is the PMMA film among Fig. 3, and C is a CNT, and E is the zone of electron beam exposure and development.Corner point among Fig. 3 on the diaphragm shapes makes CNT can under light microscope, be come out by the position judgment of diaphragm corner point in the position on the PMMA diaphragm; Asymmetric chamfering also can be judged the positive and negative of diaphragm by shape; Circular hole is then for easy to operate and design with the glass needle point.The length and width of diaphragm and the size in hole all can be adjusted according to actual situation and purpose, and parameter area commonly used is: the diaphragm length and width are all at 2～100 microns, and the diameter in hole is at 1～50 micron.
Since present embodiment adopts be the surface be covered with 0.1～1 micron thick silicon dioxide layer silicon chip as substrate, so next select for use concentration to be about the silicon dioxide layer that 5%～15% the HF aqueous solution dissolves substrate surface.The dissolving of substrate surface layer makes the PMMA film integral swim in solution surface; There is the empty limit of stamp-like as shown in Figure 3 to link to each other because be loaded with the diaphragm of CNT section on the film with film integral; So still be connected as a single entity, and can not be scattering in the solution with film integral.
Metal or plastic frame with (cavity more smaller than whole PMMA film) of hollow out are pulled the PMMA film that floats in the solution out; Make the unsettled support of PMMA film on the cavity of framework, promptly obtained a large amount of classified nano-sized carbon pipe section on the unsettled PMMA of the being stored in diaphragm.
With reference to Fig. 4, Fig. 4 is the flow chart of steps that the present invention locatees the method embodiment of assemble nanometer carbon pipe, comprises as washing step:
Step 410: classifying step, the CNT that smooth substrate is grown is cut into a plurality of nano-sized carbon pipe sections, and is divided into one type to the son section of cutting from identical CNT;
Step 420: thin polymer film covers step, covers the nano-sized carbon pipe section of classifying on the said substrate with thin polymer film;
Step 430: the position mark step, making visible indicia patterns under the light microscope on the said thin polymer film, said indicia patterns is used for unique position of confirming said each nano-sized carbon pipe section; Said indicia patterns is divided into a plurality of polymer membranes with said thin polymer film, and the shape of said polymer membrane is one by one corresponding to the position of carrying nano-sized carbon pipe section;
Step 440: the substrate dissolving step, dissolve said substrate or underlayer surface with solution, the said thin polymer film of the nanometer segment of tube that is loaded with said classification is reaped on the framework of hollow, obtain the thin polymer film of the nanometer segment of tube of the said classification of unsettled storage;
Step 450: number of assembling steps; Under light microscope; Selection comprises the polymer membrane of required nano-sized carbon pipe section, and this diaphragm is taken from said thin polymer film, and the polymer membrane that will be loaded with said nano-sized carbon pipe section by desired location and direction places on the target substrate;
Step 460: select dissolve polymer diaphragm step, after assembling is accomplished, select to keep or dissolve the said polymer membrane that is loaded with nano-sized carbon pipe section.
In above-mentioned position mark step 430; Preferred each polymer membrane that carries nano-sized carbon pipe section is connected with said thin polymer film through the empty limit of stamp-like, can be separately takes off and the nano-sized carbon pipe section that do not influence other diaphragm and carried from monolithic film membrane; And the shape of polymer membrane is one by one corresponding to the position of carrying nano-sized carbon pipe section.Be handled easily, can also on each polymer membrane, pilot hole be set.
In number of assembling steps 450, the polymer membrane that will be loaded with said nano-sized carbon pipe section through glass needle point of mechanical-hydraulic two-stage displacement platform manipulation places on the target substrate by desired location and direction.
Pass through above-mentioned steps; Behind method storage CNT according to the classification storing carbon nano-tubes; Be loaded with the polymer membrane of CNT through assembling earlier; Dissolve diaphragm again and retain the method for carbon pipe, only by the operation of observation by light microscope and glass needle point, cheap, accurate location assembling that realized CNT simply, has fast and efficiently realized the accurate transfer and the location assembling of CNT.
The method embodiment of location assemble nanometer carbon pipe
Behind the method instance of the described classification storing carbon nano-tubes of face, obtained a large amount of classified nano-sized carbon pipe section on the unsettled PMMA of the being stored in diaphragm on the implementation.Specify below and how to assemble out the structure and the device of various complicacies by actual design as " building unit " with above-mentioned nano-sized carbon pipe section of having classified.
This process relates to selection, transfer and the last assembling of the PMMA diaphragm that is loaded with nano-sized carbon pipe section, and main mode is to place on the target substrate by desired location and direction through the polymer membrane that glass needle point of mechanical-hydraulic two-stage displacement platform manipulation will be loaded with said nano-sized carbon pipe section.The mechanical-hydraulic two-stage displacement platform control glass needle point of preferred three degree of freedom is handled the polymer membrane that is loaded with CNT.Wherein, the glass needle point can be drawn through the tungsten filament heating by the about 1 millimeter glass capillary of diameter and form, and changing technology is existing glass processing technology, no longer specifies at this.
Be contained in by on the two-stage precision displacement table that three-dimensional machinery displacement platform-three-dimensional hydraulic displacement platform is formed drawing good glass needle point, place under the light microscope, can carry out the manipulation of micron precision the glass needle point.Above-mentioned displacement platform and light microscope all adopt commercial conventional equipment.
Under light microscope, pass the hole on the PMMA diaphragm through three-D displacement platform operation glass needle point; Tear it down from whole PMMA film as tearing the diaphragm that the stamp handle chooses; Shift diaphragm then to the top, position of hoping this root CNT of assembling; Placement angle according to the indicated CNT position adjustment diaphragm of diaphragm shapes reduces the glass needle point then, and the diaphragm that is carrying CNT is attached on the position of hope; Detach the glass needle point, promptly accomplished the accurate assembling of a PMMA diaphragm.According to actual needs, can keep PMMA diaphragm, perhaps be statically placed in and dissolve the PMMA diaphragm in the acetone and only remaining CNT as the CNT carrier.Aforesaid operations repeatedly, promptly available CNT is assembled out the structure and the device of various complicacies by actual design.
In the above-described embodiments; Behind the method storage CNT according to the classification storing carbon nano-tubes; Acquisition is a plurality of CNTs of carrier with the polymer membrane of a large amount of micro-meter scales, and the specific CNT of selection under light microscope is transferred to the substrate or the device that need them according to the position of designing requirement and direction and got on; After the assembled, dissolve diaphragm again and retain CNT.This method is only by the operation of observation by light microscope and glass needle point, and cheap, accurate location assembling that realized CNT simply, has fast and efficiently realized the accurate transfer and the location assembling of CNT.
Each embodiment in this specification all adopts the mode of going forward one by one to describe, and what each embodiment stressed all is and the difference of other embodiment that identical similar part is mutually referring to getting final product between each embodiment.The method of location assemble nanometer carbon pipe and the relevant part reference mutually of classification storing carbon nano-tubes.
More than the method for the method of classification storing carbon nano-tubes provided by the present invention and location assemble nanometer carbon pipe has been carried out detailed introduction; Used concrete example among this paper principle of the present invention and embodiment are set forth, the explanation of above embodiment just is used for helping to understand method of the present invention and core concept thereof; Simultaneously, for one of ordinary skill in the art, according to thought of the present invention, the part that on the specific embodiment and range of application, all can change, in sum, this description should not be construed as limitation of the present invention.
Claims (7)
1. the method for the storing carbon nano-tubes of classifying is characterized in that, comprises the steps:
Classifying step, the CNT that smooth substrate is grown is cut into a plurality of nano-sized carbon pipe sections, and is divided into one type to the son section of cutting from identical CNT;
Thin polymer film covers step, covers the nano-sized carbon pipe section of classifying on the said substrate with thin polymer film;
The position mark step; Making visible indicia patterns under the light microscope on the said thin polymer film; Said indicia patterns is used for unique position of confirming said each nano-sized carbon pipe section; Comprise that indicia patterns is divided into a plurality of polymer membranes with said thin polymer film, the shape of said polymer membrane is one by one corresponding to the position of carrying nano-sized carbon pipe section;
The substrate dissolving step dissolves said substrate or underlayer surface with solution, and the said thin polymer film of the nano-sized carbon pipe section that is loaded with said classification is reaped on the framework of hollow, obtains the thin polymer film of the nano-sized carbon pipe section of the said classification of unsettled storage.
2. the method for classification storing carbon nano-tubes according to claim 1 is characterized in that, in the said position mark step, the polymer membrane of said each carrying nano-sized carbon pipe section is connected with said thin polymer film through the empty limit of stamp-like.
3. the method for classification storing carbon nano-tubes according to claim 2 is characterized in that, said each polymer membrane is provided with pilot hole.
4. the method for classification storing carbon nano-tubes according to claim 3 is characterized in that, said thin polymer film is a polymethyl methacrylate film.
5. the method for classification storing carbon nano-tubes according to claim 4 is characterized in that, said classifying step further comprises:
The etching substep, with making mask through the polymethyl methacrylate film that has pattern of electron beam exposure and development, using oxygen plasma is the CNT etching said a plurality of nano-sized carbon pipe section;
Mask dissolves away substep, soaks with acetone, to dissolve away the polymethyl methacrylate mask of said a plurality of nano-sized carbon pipe sections.
6. the method for classification storing carbon nano-tubes according to claim 5 is characterized in that, in the said classifying step:
Said substrate is for having the silica top layer and having specifically labelled silicon chip; In said substrate dissolving step, said solution is hydrofluoric acid solution.
7. the method for an assemble nanometer carbon pipe is characterized in that, obtain the thin polymer film of nanometer segment of tube of the said classification of unsettled storage through the method for the described classification storing carbon nano-tubes of claim 1 to 7 after, further comprise the steps:
Number of assembling steps under light microscope, selects to comprise the polymer membrane of required nano-sized carbon pipe section, and this diaphragm is taken from said thin polymer film, and the polymer membrane that will be loaded with said nano-sized carbon pipe section by desired location and direction places on the target substrate;
Select dissolve polymer diaphragm step, after assembling is accomplished, select to keep or dissolve the said polymer membrane that is loaded with nano-sized carbon pipe section.
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| CN101417257A (en) * | 2007-10-26 | 2009-04-29 | 中国科学院沈阳自动化研究所 | Single-wall carbon nano tube and multi-wall carbon nano tube separation method |
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| CN101171372A (en) * | 2005-03-04 | 2008-04-30 | 西北大学 | Separation method of carbon nanotubes in density gradients |
| CN101417257A (en) * | 2007-10-26 | 2009-04-29 | 中国科学院沈阳自动化研究所 | Single-wall carbon nano tube and multi-wall carbon nano tube separation method |
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