CN101701795A - Spherical pit thickness gauge - Google Patents

Abstract

The invention relates to a coating thickness gauge, belonging to the technical field of material testing. The gauge has the characteristics of accurate and fast detection, intuitive measuring image and simple and convenient operation. The technical scheme of the invention is as follows: a spherical pit thickness gauge comprises a mechanical lapping unit and a detecting unit, wherein the mechanical lapping unit comprises a rotating shaft which is horizontally positioned on a base and is driven by a motor, a sample holder which is positioned on the base for fixing the tested samples and a grinding ball which is positioned between the rotating shaft and the sample holder in a rotary manner and is driven by the rotating shaft; and the detecting unit comprises an optical microscope.

Description

Spherical pit thickness gauge

Technical field

The present invention relates to a kind of coating thickness meter device, belong to the testing of materials technical field.

Background technology

Thickness of coating is the essential characteristic of coating material.Measuring thickness of coating at present has multiple modes such as electricity, optics, machinery, but each tool relative merits.What have can only survey conduction or optical coating, and what have can only measure the bigger coating of thickness, and can only measure the thickness of individual layer coating mostly.When multilayer coating was superimposed together, it is powerless that existing metering system seems mostly, brings considerable influence for research work and production and operation.

Summary of the invention

The objective of the invention is to overcome the deficiency of above-mentioned background technology, a kind of coating thickness meter is provided, this measuring instrument should be able to be measured the thickness of various coating simultaneously, have and detect accurately quick, measurement characteristics visual in image, simple to operation, to satisfy experimental study and coating production scene measurement requirement.

Technical scheme provided by the invention is: spherical pit thickness gauge, form by mechanical lapping unit and detecting unit; Described mechanical lapping unit comprises that a horizontal location is at the abrading-ball that is positioned at the specimen mounting that is used for fixing sample on the base and is rotatably positioned between rotating shaft and specimen mounting and is driven by rotating shaft on the base and by motor-driven rotating shaft; Described detecting unit comprises an optical microscope.

Described rotating shaft middle part is shaped on a groove that is used for the abrading-ball location around periphery, and described specimen mounting is obliquely installed in rotating shaft one side, and specimen mounting is provided with elongated slot and is positioned at the securing member that is used for fixing sample in the elongated slot; Described abrading-ball is supported by the both sides trough rim and the sample of groove, and by the rotating shaft friction-driven.

Described specimen mounting is positioned on the sliding seat, and sliding seat then is positioned on the base slidably by a straight line guide rail, and the guide rail direction of extension is vertical with shaft axis; Other has a support and the adjustable bolt of a horizontal location on support that vertically is fixed on the base, and this adjustable bolt passed through after the screw that matches on the support, and its front end is hinged with sliding seat again, and the pivot center of pin joint is coaxial with adjustable bolt.

Be shaped on the described sliding seat and the matched straight trough in specimen mounting bottom, regulate bolt by helicitic texture horizontal location one on the riser of sliding seat; The bottom of described specimen mounting embeds in the described straight trough, and the roof pressure that the bolt top is regulated at the back side of specimen mounting supports.

The axis of the direction of extension of described guide rail, the axis of adjustable bolt and adjusting bolt is parallel mutually.

The xsect of described groove is a rectangle.

Also be coated with abrasive pastes on the described abrading-ball.

Principle of the present invention is to grind a round pool with mechanical method at tested coating surface, utilization light microscope determining mill hole geometric parameter, each that obtain layer ball hole diameter, the utilization geometric relationship calculates a kind of method of thickness of coating under known ball radius prerequisite.

The geometry principle of ball hole method measurement of coating thickness instrument is:

Fig. 1, Fig. 2 represent coated ball hole section on the sample matrices 6, if two corresponding respectively diameters in interface are D and d, the degree of depth that makes the hole that grinds on the matrix is t ₁, the coating thickness is t ₂, known abrading-ball 3 diameters are R _bAmong the figure:

$H1={{[R}_b^2-{(D/2)}^2]}^{1/2}$ $H2={[R_b^2-{(d/2)}^2]}^{1/2}$

Get according to triangle Pythagorean theorem:

$R_b^2-{\left(\frac{d}{2}\right)}^2={(R_b-t_1)}^2$

$R_b^2-{\left(\frac{D}{2}\right)}^2={[R_b-({\mathrm{<figure-callout\; id="1"\; label="t"\; filenames="H2009101537817E0000013.png"\; state="\{\{state\}\}">t</figure-callout>}}_1+t_2)]}^2$

Put in order:

$\left(1\right),{\left(\frac{d}{2}\right)}^2=2R_b{t}_1-{\mathrm{<figure-callout\; id="1"\; label="t"\; filenames="H2009101537817E0000013.png"\; state="\{\{state\}\}">t</figure-callout>}}_1^2$

$\left(2\right),{\left(\frac{D}{2}\right)}^2=2R_b({\mathrm{<figure-callout\; id="1"\; label="t"\; filenames="H2009101537817E0000013.png"\; state="\{\{state\}\}">t</figure-callout>}}_1+t_2)-{({\mathrm{<figure-callout\; id="1"\; label="t"\; filenames="H2009101537817E0000013.png"\; state="\{\{state\}\}">t</figure-callout>}}_1+t_2)}^2$

Generally speaking, t ₁, t ₂R _b, ignore quadratic term and get

${\mathrm{<figure-callout\; id="1"\; label="t"\; filenames="H2009101537817E0000013.png"\; state="\{\{state\}\}">t</figure-callout>}}_1=\frac{{\left(\frac{d}{2}\right)}^2}{2R_b}---\left(3\right)$

So: ${\mathrm{<figure-callout\; id="2"\; label="t"\; filenames="H2009101537817E0000012.png,H2009101537817E0000013.png"\; state="\{\{state\}\}">t</figure-callout>}}_2=\frac{{\left(\frac{D}{2}\right)}^2-{\left(\frac{d}{2}\right)}^2}{2R_b}=\frac{(\frac{D}{2}-\frac{d}{2})(\frac{D}{2}+\frac{d}{2})}{2R_b}---\left(4\right)$

Can calculate thickness of coating t fast according to above-mentioned formula of reduction ₂, for sandwich construction coating, also can derive by above-mentioned geometrical principle draws.

The invention has the beneficial effects as follows:

(1) can be used for analyzing the thickness of coating that comprises individual layer, stratified film and composite deposite.

(2) arc section that grinds also can be in using other technologies, as Auger spectrometer or scanning electron microscope, tissue, structure, the composition of coating carried out along depth analysis.

(3) measuring accuracy is higher, and metering system is visual in image, and is simple to operation and practical, can satisfy the needs of practical application.

Description of drawings

Fig. 1 is the main TV structure synoptic diagram in the ball hole on sample matrices coating.

Fig. 2 is that A-A among Fig. 1 is to the sectional structure synoptic diagram.

Fig. 3 is the main TV structure synoptic diagram of spherical pit thickness gauge.

Fig. 4 is the left TV structure synoptic diagram of spherical pit thickness gauge.

Fig. 5 is a spherical pit thickness gauge electric control circuit synoptic diagram.

Fig. 6, Fig. 7, Fig. 8 are respectively that the gross thickness and the measurement of every layer thickness of the embodiment of the invention one, two described sandwich construction coating cheated photo with ball.

To be that the embodiment of the invention three is described combine the inefficacy photo by what ball hole Faxian showed coating and basal body interface to Fig. 9.

Embodiment

The primary structure of the mechanical lapping unit of the thick instrument of ball hole side is as shown in Figure 3, Figure 4: horizontally disposed rotating shaft 1 is supported (being positioned at bearing by rolling bearing) by the bearing 9 that is fixed on the base 12, and is driven by motor 4 (normally servomotor); Sample 7 places on the specimen mounting 2, fixes by set bolt that (be shaped on elongated slot on the specimen mounting, it is fixing with sample 7 that other has set bolt to pass elongated slot; Set bolt and elongated slot all omit among the figure).

Specimen mounting 2 is positioned on the sliding seat 8; Concrete location structure is: be shaped on threaded hole on the riser 8-1 of sliding seat, regulate bolt 5 these threaded holes of screw-in and level and passed through this riser 8-1; The upper surface of sliding seat 8 also is shaped on a straight trough 8-11, straight trough direction of extension and shaft parallel; The bottom of specimen mounting embeds among the straight trough 8-11, and the roof pressure that bolt 5 tops are regulated at the back side of specimen mounting supports; Obviously, bolt is regulated in rotation, and specimen mounting 2 just can rotate around the straight trough center line, thereby makes its inclination angle adjusted.

The bottom of sliding seat 8 is positioned on the base 12 slidably by a straight line guide rail (guide rail that shows among the figure is an oat tail groove structure, also can select other conventional structure for use), and the guide rail direction of extension is vertical with shaft axis; Support 11 vertically is fixed on the base 12, and 10 of adjustable bolts match with screw on the support, and level is positioned on this support after passing through; The front end of adjustable bolt is hinged with the riser 8-1 of sliding seat again, the pivot center of pin joint and adjustable bolt coaxial (among the figure as can be known: after the front end of adjustable bolt directly passes the pin-and-hole of riser 8-1, prick periphery at the adjustable bolt external part with the jump ring hoop again).Like this, rotation adjustable bolt 10 just can drive sliding seat 8 and move (near rotating shaft or leave rotating shaft) along line slideway, and then make the contact point of abrading-ball 3 and sample 7 change.

The middle part of described rotating shaft 1 is shaped on a groove 1-1 around periphery, and (it is the groove of rectangle that xsect is selected in recommendation for use; The groove of other shape of cross section also can use), abrading-ball 3 and this groove shapes fit (after in the abrading-ball 3 embedding grooves, should contact with the both sides trough rim of groove simultaneously); Described abrading-ball 3 is supported by groove 1-1 and sample, the frictional force drives that the steel abrading-ball 3 of certain diameter is applied by rotating shaft, roll at sample surfaces, under abrasive pastes (abrasive pastes buyable) condition of adding certain particle size, through grinding after a while, sample surfaces just is ground with the round pool of certain diameter.

Obviously, the distance between the both sides trough rim of described groove is less than the diameter of abrading-ball; The rubbing contact point of described abrading-ball and the arbitrary trough rim of groove is to the distance of abrading-ball and the sample rubbing contact point diameter less than abrading-ball.

By data D and d that Thickness Measurement by Microwave can record according to metaloscope, substitution formula (4) calculates, and can obtain the thickness of tested coating.

The calculating of formula also can be undertaken by software; This software can be write by the common software technician, narrates no longer one by one at this.

Optical microscope in the described detecting unit (generally using metaloscope) directly outsourcing obtains.

Fig. 5 is a spherical pit thickness gauge electric wiring schematic diagram.Direct supply of its electric controling line route, a timer, a speed governing turn-knob and some switches and pilot lamp are formed by connecting.External 220V alternating current carries out break-make by switch; Directly power through alternating current to timer system; Convert the power supply of 24V direct current to by Switching Power Supply, be connected to start stop switch, pause switch, relay and pilot lamp on the 24V direct current, adjust motor speed by the resistance of regulating speed adjusting plate as motor.Obviously, this is a simple basic circuit, and common electric technician can design and produce.

Components and parts label among Fig. 5 is: the 10-time relay, 11-run indicator, 12-insurance, 13-power on switch, the 14-power light, the 15-transformer, the 16-time relay (normally closed contact), 17-opens/guard's valve, the 18-circuit block, 19-speed regulator, 20-motor.In addition, L is a power lead, and N is a zero line, and Pe is a ground wire.

The present invention can grind the hole to plane, column and spherical surface and test.As measure big test specimen, can fix by the elongated slot of reserving on the specimen mounting.Also can select the abrading-ball of different materials according to different needs, as tungsten carbide, corundum etc.For thicker coating, should select the less abrading-ball of diameter.

[embodiment one] uses the gross thickness that spherical pit thickness gauge is measured sandwich construction coating.

Fig. 6 is the pattern in composite three-layer TiN+TiCN+DLC coating mill hole; Adopt size d and the y of metaloscope measurements in publishing picture, according to thickness of coating calculating formula (4), and with the relation of size d and y

Can derive three layers total thickness t:

[embodiment two] use the thickness that spherical pit thickness gauge is measured certain one deck coating.

Fig. 7, Fig. 8 are respectively the coating of three-decker, and the thickness of each layer coating adopts metaloscope to record respectively from same ball hole, gets the thickness that different d and y value can record each coating in the drawings:

Each layer thickness

[embodiment three] use spherical pit thickness gauge and analyze the coating interfacial failure.

Grind a round pool with ball hole instrument near the arrow indication zone on Fig. 9 metallograph; Can judge that by pattern arrow indication zone has been the matrix of coating sample, therefore show herein and peeled off, finally can be judged as coating and matrix bond interfacial failure from matrix for coating.

Claims (7)

1. spherical pit thickness gauge is made up of mechanical lapping unit and detecting unit; Described mechanical lapping unit comprises the abrading-ball (3) that a horizontal location goes up and is positioned at the specimen mounting (2) that is used for fixing sample on the base and is rotatably positioned between rotating shaft and specimen mounting and driven by rotating shaft by the rotating shaft (1), that motor (4) drives at base (12); Described detecting unit comprises an optical microscope.

2. spherical pit thickness gauge according to claim 1, it is characterized in that described rotating shaft (1) middle part is shaped on a groove (1-1) that is used for the abrading-ball location around periphery, described specimen mounting (2) is obliquely installed in rotating shaft one side, and specimen mounting is provided with elongated slot and is positioned at the securing member that is used for fixing sample in the elongated slot; Described abrading-ball is supported by the both sides trough rim and the sample of groove, and by the rotating shaft friction-driven.

3. spherical pit thickness gauge according to claim 1 and 2 is characterized in that described specimen mounting (2) is positioned on the sliding seat (8), and sliding seat then is positioned on the base (12) slidably by a straight line guide rail, and the guide rail direction of extension is vertical with shaft axis; Other has a support (11) and the adjustable bolt (10) of a horizontal location on support that vertically is fixed on the base, this adjustable bolt passed through after the screw that matches on the support, its front end is hinged with sliding seat (8) again, and the pivot center of pin joint is coaxial with adjustable bolt.

4. spherical pit thickness gauge according to claim 3 is characterized in that being shaped on the described sliding seat (8) and the matched straight trough in specimen mounting bottom (8-11), and the riser of sliding seat (8-1) is gone up by helicitic texture horizontal location one and regulated bolt (5); The bottom of described specimen mounting embeds in the straight trough (8-11), and the roof pressure that bolt (5) top is regulated at the back side of specimen mounting supports.

5. spherical pit thickness gauge according to claim 4, it is characterized in that described guide rail direction of extension, adjustable bolt (10) axis and to regulate the axis of bolt (5) parallel mutually.

6. spherical pit thickness gauge according to claim 5 is characterized in that the xsect of described groove (1-1) is a rectangle.

7. spherical pit thickness gauge according to claim 6 is characterized in that also being coated with abrasive pastes on the described abrading-ball (3).

Images