CN101698304B - Magnetic inductive magnetic transmitter - Google Patents
Magnetic inductive magnetic transmitter Download PDFInfo
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- CN101698304B CN101698304B CN2009103079315A CN200910307931A CN101698304B CN 101698304 B CN101698304 B CN 101698304B CN 2009103079315 A CN2009103079315 A CN 2009103079315A CN 200910307931 A CN200910307931 A CN 200910307931A CN 101698304 B CN101698304 B CN 101698304B
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- 230000001939 inductive effect Effects 0.000 title claims abstract description 17
- 239000000696 magnetic material Substances 0.000 claims abstract description 7
- 238000007789 sealing Methods 0.000 claims abstract description 4
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 4
- 238000000926 separation method Methods 0.000 claims 1
- 230000006698 induction Effects 0.000 abstract description 9
- 230000001360 synchronised effect Effects 0.000 abstract description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 abstract 2
- 230000003044 adaptive effect Effects 0.000 abstract 2
- QJVKUMXDEUEQLH-UHFFFAOYSA-N [B].[Fe].[Nd] Chemical compound [B].[Fe].[Nd] QJVKUMXDEUEQLH-UHFFFAOYSA-N 0.000 abstract 1
- 229910052742 iron Inorganic materials 0.000 abstract 1
- 229910001172 neodymium magnet Inorganic materials 0.000 abstract 1
- 229910052761 rare earth metal Inorganic materials 0.000 abstract 1
- 150000002910 rare earth metals Chemical class 0.000 abstract 1
- 230000005540 biological transmission Effects 0.000 description 20
- 238000000034 method Methods 0.000 description 13
- 238000005516 engineering process Methods 0.000 description 7
- 238000011161 development Methods 0.000 description 5
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 230000005347 demagnetization Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 230000005389 magnetism Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052755 nonmetal Inorganic materials 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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Abstract
The invention relates to a magnetic inductive magnetic transmitter for a vacuum robot, belonging to the technical field of industrial robots; the magnetic transmitter is characterized in that the magnetic transmitter comprises a power input part, a power output part, a shell and a magnetic path part and can realize radial outward-to-inward movement of turning moment; meanwhile, as a sealing coveris arranged, the magnetic transmitter has a sealing and compressing function; wherein, the permanent magnet of an outer magnetic pole adopts a rare earth permanent magnet neodymium iron boron with a blocky cuboid shape, the inner magnetic pole adopts industrial pure iron belonging to soft magnetic material, has an integrative tooth type structure and is adaptive to high-temperature working environment. Inner and outer shafts realize complete closed magnetic induction return circuit after being processed and assembled, so as to realize synchronous magnetic action, and the rotation synchronization performance of the inner and outer rotating shafts is good when the inner and outer rotating shafts are started, and the inner and outer rotating shafts have Overload protection function. The magnetic transmitter in the invention has compact structure, dense magnetic-field distribution, small volume, stable operation, convenient assembly and disassembly and small self-rotating inertia, can be adaptive to both high-temperature environment and normal temperature environment and can be applied to the vacuum robot.
Description
Technical field
The invention belongs to the industrial robot technical field, relate to a kind of magnetic inductive magnetic transmitter, mainly be meant at integrated circuit (Integrated Circuit, IC) in the manufacturing industry, in vacuum environment, play a kind of magnetic inductive magnetic transmitter that can be applied to hot environment that the chip transmission robot of chip transmission and positioning action uses.
Background technology
Integrated circuit is the core of electronics and information industry, is one of the topmost new and high technology of development of promoting the IT development for national economic and social development.Along with the fast development of IC manufacturing industry, Robotics has been introduced into the IC manufacture process.The manufacturing characteristics of IC are ultrapreciseization, super clean environment and granular, and some technology is still carried out under vacuum environment.Robot directly embodies the automaticity and the reliability of machine system as the high accuracy of IC production line, high-speed and high clean automation transmission equipment.Therefore the vacuum robot that is used for such environment has become the key equipment that IC makes equipment.
Its key technology of the robot of under vacuum environment, working need realize power from atmospheric environment to the vacuum environment transmission.The magnetic drives technology can realize that as a kind of the method for contactless transmission of power is highly suitable for this kind occasion between the different medium.But because in ultra-high vacuum environment, the acquisition of ultrahigh vacuum degree need be taked high-temperature baking to the vacuum space, present magneto magnetic driver can be because the high-temperature baking process makes the vacuum internal magnetic pole produce the demagnetization phenomenon, and it is irrecoverable, cause power to transmit, the magnetic driver effect was lost efficacy.Therefore, taking magnetic transmission method to realize in the power transmission process of vacuum robot, must study and a kind ofly can adapt to the magnetic driver of under the high-temperature vacuum environment, working.
Because soft magnetic materials can be by magnetic field magnetisation near magnetic field the time, thereby and produce the coupling magneticaction between the former magnetic field, and in the process of high-temperature baking, can not produce the demagnetization phenomenon.Therefore, thus utilize magnetic induction between soft magnetic materials and the permanent-magnet material to produce magnetic field and realize that magneto motive magnetic inductive drive method can be used as a kind of magnetic drives means of effectively working under hot environment.
In existing technology, most of magnetic drives technology all is to launch around the magneto magnetic transmission method, the content of magnetic inductive magnetic transmission method research seldom, and the patent of invention and the utility model patent of several magnetic drives aspects few in number, nearly all be applied on pump and the stirred tank, be not applied to the induction type magnetic force drive apparatus on the vacuum robot.
Chinese patent: permanent magnet induction magnetic drive device, license number: ZL200420025250.2, thereby be on inductor, to produce current vortex generation magnetic field when utilizing the external magnetic field motion to be coupled, utilize said method to produce the purpose that magneticaction reaches transmission of power, solve the problem of permanent magnet high temperature demagnetization, be applicable to hot environment.But the magnetic field that this kind of one side method need be moved causes the startability of magnetic driver relatively poor, thereby causes product not to be suitable for low speed transmission occasion; Owing to need utilize the current vortex principle of induction, produce a large amount of heat loss in the time of can causing product work, thereby reduced the efficient of magnetic drives on the other hand, make product also not be suitable for the occasion of high-frequency high-speed.The present invention compares with foregoing invention, on the one hand because magnetic force of the present invention generation is by static magnetic field of permanent magnet induction soft magnetic materials tooth type structures principle, thereby can when static state, just obtain the interaction that induced field obtains magnetic force, make that startability of the present invention is good, the hysteresis of driven rotor is very little when the low speed transmission, and self load capacity is strong; Owing to do not need the current vortex induction, add the use of nonmetal isolating sleeve simultaneously, make the present invention not have the heat loss of current vortex when transmission, transmission efficiency improves greatly.As seen by above-mentioned, the method and apparatus of mentioning in the transmission principle of patent magnetic inductive magnetic transmitter of the present invention and structure and the above-mentioned document is visibly different.
Summary of the invention
The present invention proposes a kind of radial mode drum type brake magnetic inductive magnetic transmitter, be applied to vacuum robot, can realize Synchronous Transmission, no current vortex heat loss, and play certain sealing function simultaneously in transmission.
For achieving the above object, the technical solution used in the present invention is as follows:
A kind of magnetic inductive magnetic transmitter mainly is made up of the power importation of realizing the torque input, the power output of realizing torque output, housing and four parts of magnetic circuit part.Four parts are relatively independent, and power input shaft and power output shaft need not be accurately to the hearts; Wherein: the input of external torque mainly is responsible in the power importation; The power output mainly is responsible for the outside output of torque that realization obtains by the internal rotor magnetic coupling; Housing mainly is responsible for whole magnetic drive device is positioned and supports; The main responsible transmission of torque between inner and outer rotors that realize of magnetic circuit part.
The power importation mainly comprises power shaft and outer rotor, and both are connected by A type wedge key, and outer rotor and shell body are located mutually by two deep groove ball bearings.
The power output mainly comprises output shaft and internal rotor, and both are connected with internal rotor by A type wedge key.
Housing is made up of shell body, front end cover plate, seal closure and rear-end plate four parts.Wherein, seal closure is connected with shell body by screw, and seal closure is connected with rear-end plate by screw, and seal closure is located mutually by two deep groove ball bearings on the output shaft and internal rotor; Shell body positions by the deep groove ball bearing that is fixed on the outer rotor, and shell body is connected with the front end cover plate by screw; Seal closure can adopt nonmetallic materials to make.
The magnetic circuit part mainly comprises outer rotor, permanent magnet, seal closure and internal rotor composition, also comprises the pole configuration mode of permanent magnet.Each permanent magnet is the block unit of a cuboid, radial groove and the magnetic of self by outer rotor are adsorbed on the outer rotor, the magnetizing direction of permanent magnet is a radial magnetizing, polarity is opposite between two adjacent magnetic poles, and closely arrange for even number, be evenly distributed on the outer rotor, realize the magnetic induction return circuit of complete closure by the method.Internal rotor is a soft magnetic materials, the flute profile integral structure, the number of teeth is identical with permanent magnet number on the outer rotor, and for to be evenly distributed along circumferential, realizes the radially fixing shaft shoulder and two deep groove ball bearings and output shaft realization axial restraint of utilizing simultaneously by A type wedge key and output shaft.Seal closure is installed between internal rotor and the outer rotor, can adopt nonmetallic materials to make, and can play the pressure-bearing effect.
During work, drive motors drives power shaft by deceleration device and is rotated, thereby the outer rotor that drives the magnetic circuit part is rotated, meanwhile, internal rotor is responded to and is realized the coupling rotation and output power by output shaft by self soft magnetism flute profile integral structure and the permanent magnet on the outer rotor.
Beneficial effect of the present invention a kind of magnetic inductive magnetic transmitter of the present invention is by four most of compositions, and compact conformation has improved the utilization rate of permanent magnet.The proposition of internal rotor soft magnetism flute profile integral structure has solved a difficult problem that causes magnetic driver to lose efficacy because of the permanent magnet demagnetization under the hot conditions, has also improved the load capacity of output simultaneously.Use nonmetal seal closure and avoided the generation of current vortex, making does not have heat-energy losses in the transmission process, has improved the transmission efficiency of product greatly.Body of the present invention machines the back test data of experiment and shows that ambient operating temperature can reach 600 degrees centigrade, equally also is applicable to normal temperature environment.Therefore the present invention has at first proposed a kind of magnetic inductive magnetic drive device that is applied to vacuum robot at home, and is significant for the development of IC industry.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Fig. 2 is an A-A cutaway view of the present invention.
Fig. 3 is a radially magnetic circuit schematic diagram of the present invention.
Among the figure: I power importation; II power output; The III housing; IV magnetic circuit part; 1 outer rotor; 2 power shafts; 3 shell bodies; 4 internal rotors; 5 output shafts; 6 seal closures; 7 rear-end plates; 8 front end cover plates; 9 permanent magnets.
The specific embodiment
Be described in detail specific embodiments of the invention below in conjunction with technical scheme and accompanying drawing.
As Fig. 1, Fig. 2 and shown in Figure 3, a kind of magnetic inductive magnetic transmitter of the present invention comprises power importation I, power output II, housing parts III and magnetic circuit part IV.Initiatively motor drives power shaft 2 rotations by deceleration device and A type wedge key, power shaft 2 drives outer rotor 1 by A type wedge key and rotates, permanent magnet 9 parts that are assemblied on the outer rotor 1 are rotated thereupon, and then the magnetic induction coupling by magnetic circuit part drives internal rotor 4 and rotates, internal rotor 4 is fixedlyed connected with output shaft 5 by A type wedge key, and the rotation of final internal rotor 4 is finished the output of torque to vacuum environment by output shaft 5.In this whole process, seal closure 6, rear-end plate 7, front end cover plate 8, shell body 3 play the whole device of fixed support.
Claims (3)
1. magnetic inductive magnetic transmitter, it is characterized in that: this magnetic driver comprises the power importation of realizing the torque input, power output, housing and magnetic circuit part four parts that realize torque output, four parts are relatively independent, and power input shaft and power output shaft need not be accurately to the hearts;
Power importation (I) comprises outer rotor (1) and power shaft (2); Wherein, outer rotor (1) is connected by A type wedge key with power shaft (2), and outer rotor (1) and shell body (3) are located mutually by two deep groove ball bearings;
Power output (II) comprises internal rotor (4) and output shaft (5); Internal rotor (4) is connected by A type wedge key with output shaft (5);
Housing (III) comprises seal closure (6), shell body (3), rear-end plate (7) and front end cover plate (8); Wherein, seal closure (6) is connected with shell body (3) by screw, and seal closure (6) is connected with rear-end plate (7) by screw, and seal closure (6) is located mutually by two deep groove ball bearings on the output shaft (5) and internal rotor; Shell body (3) positions by the deep groove ball bearing that is fixed on the outer rotor (1), and shell body (3) is connected with front end cover plate (8) by screw;
Magnetic circuit part (IV) mainly comprises outer rotor (1), permanent magnet (9), seal closure (6) and internal rotor (4); Each permanent magnet (9) is the block unit of a cuboid, radial groove and the magnetic of self by outer rotor (1) are adsorbed on the outer rotor, the magnetizing direction of permanent magnet (9) is a radial magnetizing, polarity is opposite between two adjacent magnetic poles, and closely arrange for even number, be evenly distributed on the outer rotor (1); Internal rotor (4) is a soft magnetic materials, the flute profile integral structure, the number of teeth is identical with permanent magnet (9) number on the outer rotor (1), and for to be evenly distributed along circumferential, realize radially fixingly by A type wedge key and output shaft (5), utilize the shaft shoulder and two deep groove ball bearings and output shaft (5) realization axial restraint simultaneously; The seal closure (6) that plays the dust-separation sealing function is installed between internal rotor (4) and outer rotor (1).
2. according to the described a kind of magnetic inductive magnetic transmitter of claim 1, it is characterized in that: what magnetic circuit part (IV) was taked is that permanent magnet (9) is the cuboid bulk, internal rotor (4) is the flute profile integral structure, by the soft magnetic materials manufacturing, the complete closed-loop path of magnetic inductive that permanent magnet (9) and internal rotor (4) are formed.
3. according to the described a kind of magnetic inductive magnetic transmitter of claim 1, it is characterized in that: seal closure (6) adopts nonmetallic materials.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009103079315A CN101698304B (en) | 2009-09-29 | 2009-09-29 | Magnetic inductive magnetic transmitter |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009103079315A CN101698304B (en) | 2009-09-29 | 2009-09-29 | Magnetic inductive magnetic transmitter |
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| Publication Number | Publication Date |
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| CN101698304A CN101698304A (en) | 2010-04-28 |
| CN101698304B true CN101698304B (en) | 2011-04-27 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2009103079315A Expired - Fee Related CN101698304B (en) | 2009-09-29 | 2009-09-29 | Magnetic inductive magnetic transmitter |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102152318A (en) * | 2011-05-04 | 2011-08-17 | 中国科学院等离子体物理研究所 | Robot drive mechanism used in high temperature vacuum environment |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101956891B (en) * | 2010-09-26 | 2013-09-25 | 上海交通大学 | Self-driven joint |
| JP5899660B2 (en) * | 2011-06-03 | 2016-04-06 | ソニー株式会社 | Actuator device, multi-axis drive device, and robot device |
| CN105656285A (en) * | 2014-11-11 | 2016-06-08 | 中国科学院沈阳科学仪器股份有限公司 | Magnetic actuator capable of effectively preventing effect exerted by magnetic field on life of bearings |
| CN104482212A (en) * | 2014-11-29 | 2015-04-01 | 洛阳康耀电子有限公司 | High-vacuum magnetic-coupling dynamic seal drive device and applying method |
| CN106272565A (en) * | 2016-09-27 | 2017-01-04 | 昆山穿山甲机器人有限公司 | Robot preventer |
| CN107888021B (en) * | 2017-12-28 | 2024-05-17 | 上海亨通海洋装备有限公司 | Double-shaft underwater motor suitable for coaxial magnetic drive of full sea depth |
| CN110274028A (en) * | 2019-05-20 | 2019-09-24 | 清华大学 | A kind of magnetic coupling transmission device for sealing magnetic fluid |
| CN112516934A (en) * | 2020-11-12 | 2021-03-19 | 衡阳丰联精细化工有限公司 | Stirring device for strong corrosion container with flange interface |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4163164A (en) * | 1977-10-11 | 1979-07-31 | Micropump Corporation | Split magnet drive |
| CN1730982A (en) * | 2005-08-08 | 2006-02-08 | 浙江长城减速机有限公司 | Thermostable magnetic transmission apparatus |
| CN1937374A (en) * | 2006-09-29 | 2007-03-28 | 江苏大学 | High-temperature-resistance solid-rotor permanent-magnet induction electric-vortex magnetic transmission method and device |
| CN101325360A (en) * | 2008-07-14 | 2008-12-17 | 大连理工大学 | Magnetic force driver |
-
2009
- 2009-09-29 CN CN2009103079315A patent/CN101698304B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4163164A (en) * | 1977-10-11 | 1979-07-31 | Micropump Corporation | Split magnet drive |
| CN1730982A (en) * | 2005-08-08 | 2006-02-08 | 浙江长城减速机有限公司 | Thermostable magnetic transmission apparatus |
| CN1937374A (en) * | 2006-09-29 | 2007-03-28 | 江苏大学 | High-temperature-resistance solid-rotor permanent-magnet induction electric-vortex magnetic transmission method and device |
| CN101325360A (en) * | 2008-07-14 | 2008-12-17 | 大连理工大学 | Magnetic force driver |
Non-Patent Citations (1)
| Title |
|---|
| JP特开平5-157122A 1993.06.22 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102152318A (en) * | 2011-05-04 | 2011-08-17 | 中国科学院等离子体物理研究所 | Robot drive mechanism used in high temperature vacuum environment |
| CN102152318B (en) * | 2011-05-04 | 2012-07-11 | 中国科学院等离子体物理研究所 | Robot drive mechanism used in high temperature vacuum environment |
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| CN101698304A (en) | 2010-04-28 |
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