CN101682978A - A bar type electrostatic charge remover using piezo ceramic element - Google Patents
A bar type electrostatic charge remover using piezo ceramic element Download PDFInfo
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- CN101682978A CN101682978A CN200880014781A CN200880014781A CN101682978A CN 101682978 A CN101682978 A CN 101682978A CN 200880014781 A CN200880014781 A CN 200880014781A CN 200880014781 A CN200880014781 A CN 200880014781A CN 101682978 A CN101682978 A CN 101682978A
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- 239000000919 ceramic Substances 0.000 title claims abstract description 50
- 239000002245 particle Substances 0.000 claims abstract description 8
- 239000007921 spray Substances 0.000 claims description 36
- 230000001953 sensory effect Effects 0.000 claims description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 239000000523 sample Substances 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 4
- 230000000694 effects Effects 0.000 claims description 3
- 238000002347 injection Methods 0.000 claims description 3
- 239000007924 injection Substances 0.000 claims description 3
- 239000012530 fluid Substances 0.000 claims description 2
- 238000005259 measurement Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 claims description 2
- 230000008569 process Effects 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 abstract description 7
- 150000002500 ions Chemical class 0.000 abstract 2
- 238000009826 distribution Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 5
- 239000000428 dust Substances 0.000 description 5
- 206010001557 Albinism Diseases 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000002789 length control Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
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- 239000004065 semiconductor Substances 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000000844 transformation Methods 0.000 description 1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
- H05F1/00—Preventing the formation of electrostatic charges
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
- H01T23/00—Apparatus for generating ions to be introduced into non-enclosed gases, e.g. into the atmosphere
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
- H05F3/00—Carrying-off electrostatic charges
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- Elimination Of Static Electricity (AREA)
- Disinfection, Sterilisation Or Deodorisation Of Air (AREA)
Abstract
The present invention relates to a bar type electrostatic charge remover. The remover at least comprises a control unit, a discharge needle, a main socket in order to prevent particles from generationon the needle, and an air body. The control unit comprises piezo ceramic elements generating high voltage with high frequency; a sensing plate measuring electric charge quantity, a piezo driver making the piezo ceramic elements continuously generate high voltage with high frequency, an alarm generation means generating alarm if piezo ceramic elements operate abnormally and a DC source. And a control unit and a jet socket are combined with an air body of the remover respectively and the remover is made up of one or more combined air body blocks. The remover has piezo ceramic element control unit and fewer needles than former. The needle cleaning cycle is long, ion balance range is low and it is possible to remove electric ions in the far distance.
Description
Technical field
The present invention relates to a kind of bar type electrostatic charge remover.More specifically, the present invention relates to a kind of bar type electrostatic charge remover that uses piezo ceramic element, also relate to a kind of by using an application process with high-frequency and high-voltage to eliminate the technology of performance and pin cleaning cycle to improve electrostatic charge.
Background technology
As prior art of the present invention, have korean patent application to disclose " being equipped with air chamber to use the bar type corona discharge Xelminator of pulsed AC high voltage power source " for 10-512137 number, and korean patent application has disclosed " bar type electrostatic charge remover " for 10-2005-32534 number.The korean patent application 10-660461 Kyence of another prior art has disclosed " free equipment and as the bar of sparking electrode ".
In the prior art, also do not expose when applying high voltage, use the situation of the bar type electrostatic charge remover of piezo ceramic element.Therefore, the very difficult cleaning cycle that improves spray point prevents that with execution dust in air is attached on the spray point.
Again, because it is lower to produce the speed of ion in general DC or the AC bar type electrostatic charge remover, so the Balance Control that is difficult to the ion that will produce is at lower grade, and since spray point be subjected to very soon pollute, so periodically the work of cleaner discharge pin becomes very complicated.
In addition, owing to will use many spray points, be difficult to maintenance and manage these spray points.Along with commercial AC input system is used so far, install and be not easy and fail safe is difficult to be protected again.Because many up to now sockets have inserted pin, so consumed very many air.And be difficult to the length of control Xelminator in the past.
Summary of the invention
Technical problem
The present invention is mainly used in the problem that solves in the prior art, and it can improve the generation ratio of ion and have the high pressure that is lower than the high frequency in the existing bar type electrostatic charge remover by generation, maintain low-down level with balance with this plasma, and the purpose of this invention is to provide and have a kind of Xelminator that uses piezo ceramic element, with by using low relatively " high pressure " to improve the cleaning cycle of a lot of pins.
To in description subsequently, illustrate for the extra advantage of the present invention, purpose and characteristics, and partial content will be apparent from describe, perhaps can recognize by implementing the present invention.Purpose of the present invention and other advantage will realize and obtain by the structure of pointing out in description especially with in this claim and appended graphic explanation.
Technological means
For solving the problems of the technologies described above, the invention provides an a kind of bar type electrostatic charge remover, the high pressure with high frequency that wherein is used to discharge produces by piezo ceramic element, comprises a control unit at least, is used to control this piezoelectric ceramic type Xelminator; One spray point, the high pressure that has high frequency by application is carried out discharge; One baseplug is antiparticle probe anchor clamps, is used to prevent to be present on the spray point of baseplug inside produce particle; And a pneumatic body, be used to supply air to this Xelminator.
Beneficial effect
Expected Results of the present invention is as follows:
The first, the frequency among the present invention is about 72KHz, and the ion of its more existing ion bar produces fast dozens of Hz of cycle, and it is feasible so remaining in ionic equilibrium low-level.Therefore, see through piezo ceramic element among the present invention and use the high pressure with high frequency, its static is eliminated that performance is improved and ionic equilibrium is controlled in low-level is easy.
The second, according to the voltage of using on spray point, described cleaning cycle can be different from the cycle that produces particle in the Xelminator.Promptly be, by using low-voltage to reduce the generation of particle.Therefore among the present invention by using ceramic component and adopting the baseplug 350 of antiparticle probe anchor clamps style, compare with previous particle bar, can obtain long cleaning cycle by using low voltage.
Especially, the present invention has a structure, and it sees through baseplug air input hole 351 leaked-in airs that 4b figure described and flows out to baseplug air delivery nozzle 352, has a plurality of airports around the spray point 340 to prevent that the end that dust is attached on spray point from being feasible.Therefore, the cleaning cycle of described pin can become about 6 months, and its cycle before is longer.
The 3rd, obtain to spray the injection nozzle effect.Find out that from result of the present invention the consumption of air reduces.
The 4th, in the pneumatic body inside of air body block 300 combinations place, air flows glibly.
The 5th, the length of Xelminator can be controlled easily.
The 6th, prevent escape of air in combination place of air body block 300.
The 7th, according to the hydromechanics principle, by using probe anchor clamps air consumption seldom.This reason is to have 1 ~ 5kg/cm usually when providing to the air of air body block 300
2Air pressure, and baseplug air delivery nozzle 352 outflows that air sees through among the 4b figure have very fast speed, the air of this outflow is compared with surrounding air has relatively low pressure, and the surrounding air with relative elevated pressures accumulates in the end of baseplug 350.Jet socket 360 makes the surrounding air that accumulates in baseplug 350 ends a plurality ofly be formed on the air that groove flowed out that baseplug 350 lower ends also are formed on the circular port place that spray point 340 inserts and together flow out together with seeing through, thereby and has taper shape and obtain faster rate.Therefore, in the present invention, can not increase the air capacity that flows into Xelminator itself by the environment for use air obtains bigger air capacity.
The 8th, when setting up true supervisory control system, the Xelminator maximum is controlled at 256.
The 9th, install simply, by using low pressure input program (24 volts of DC), guaranteed safety.
The tenth, to compare with prior art, the quantity of spray point can be reduced to 1/6, and M R is more convenient.Promptly be, in the present invention, to compare ion production rate very fast with prior art, and it is feasible only utilizing 1/6 spray point to obtain as previous identical effect.Although and because the body piece has the structure of socket, and the quantity of Xelminator is reduced to 1/6 of prior art, it is feasible making the one piece have two or more socket according to performance.
The 11, it is feasible eliminating the static that is present in distance 50 ~ 2000mm.
Brief description of drawings
Fig. 1 is a kind of structure of using the bar type electrostatic charge remover assembly disassembled form of piezo ceramic element of the present invention.
Fig. 2 is a kind of structure of using the normal confined state of bar type electrostatic charge remover of piezo ceramic element of the present invention.
Fig. 3 is the structure of the air body block used in Xelminator according to Fig. 2;
Fig. 4 is the assembly of the air body block used in Xelminator according to Fig. 2;
Fig. 5 is the pin that uses in Xelminator according to Fig. 2 and the assembled state of socket;
Fig. 6 is the cross section of Fig. 5;
Fig. 7 is the internal structure of assembled state shown in Figure 5;
Fig. 8 is the enlarged drawing of " L " part among Fig. 7;
Fig. 9 is the structure according to the control unit of the Xelminator of Fig. 2;
Figure 10-the 13rd, the schematic diagram of circuit connecting relation in the control unit shown in Figure 9;
Figure 14 is according to the example that produces the high pressure with high frequency in the piezoelectric type Xelminator of the present invention;
Figure 15 is the ion distribution schematic diagram according to piezoelectric type Xelminator of the present invention;
Figure 16 is the ion distribution schematic diagram of pulse AC type Xelminator.
Figure 17 is the ion distribution schematic diagram of DC type Xelminator.
Figure 18 is the ion distribution schematic diagram of AC type Xelminator.
Preferred forms of the present invention
According to the most preferred embodiment combination of the present invention's one bar type electrostatic charge remover 1000, the high pressure with high frequency that wherein is used to discharge produces by piezo ceramic element, comprises a control unit 600 at least, is used to control this piezoelectric ceramic type Xelminator; One spray point 340, the high pressure that has high frequency by application is carried out discharge; One baseplug 350 is antiparticle probe anchor clamps, is used to prevent to be present on the spray point of baseplug inside produce particle; And a pneumatic body 300, be used to supply air to this Xelminator.
At this moment, the invention is characterized in the pneumatic body 300 of Xelminator, the jet socket 360 that is used for strengthening from the air of control unit 600 and 350 outflows of described baseplug makes up with each control unit and baseplug respectively, and described Xelminator is made up of one or more combined pneumatic pieces 300 with said structure.
In the present embodiment, the situation of the best is that described control unit 600 is fixed by a combination sensory panel 310 and a screw 380 that is used for fixing this sensory panel, and the metal of described spray point 340 and air body block inserts unit 390 through making up needle socket 320 and being combined in together.
In the present embodiment, best situation is that a plurality of projections are formed on outside the side of air body block 300, and form groove in the inside of opposite side, locking a plurality of projections, and a silicon cap 370 and a silicon chip 375 are combined to prevent the escape of air when air body block 300 makes up.
In the present embodiment, Zui Jia situation is that the length control of the bar of described Xelminator sees through this air body block 300 of combination and reaches.
In the present embodiment, best situation is the structure that forms described pneumatic body, so that when air body block 300 is combined, the air path of the inside of pneumatic body is connected to each other, air is flowed in pneumatic body glibly, and the air of pneumatic body flows into from baseplug air input hole 351, and through 352 outflows of baseplug air delivery nozzle, these baseplug air delivery nozzles are to have the long-pending a plurality of nozzles of same cross-sectional, wherein, described baseplug air delivery nozzle contacts equably with it in the direction of principal axis of a spray point 340, rather than be looped around whole spray point 340 around.
In the present embodiment, best situation one jet socket 360 is installed in below the baseplug 350 according to fluid mechanics principle, thereby has increased from baseplug 350 below along the amount of the air of primary air delivery nozzle outflow, and thereby has prolonged the arrival distance.
In the present embodiment, Zui Jia situation is that described control unit 600 further comprises and is used for a stable device that is included in the ripple composition in the dc voltage.
In the present embodiment, the coverage the best that is used to eliminate electric charge is 50 ~ 2000mm, and when the coverage that be used to eliminate electric charge be under the situation of 300mm, the peak to peak value is ± 10V or less than ± 10V.
In the present embodiment, the coverage the best that is used to eliminate electric charge is 50 ~ 2000mm, and when the coverage that be used to eliminate electric charge be under the situation of 300mm, ionic equilibrium is ± 7V or less than ± 7V.
In the present embodiment, according in the Xelminator of use piezo ceramic element of the present invention, one control unit 600 is attached on the air body block 300, and within described baseplug 350, has the needle socket 320 that is used for fixing pin, and stick jet socket 360 in described baseplug 350 outsides, to strengthen from the air of baseplug 350 outputs.
The present invention again in Xelminator, the one or more air body block with said structure are combined in together.
Can recognize the front for general description of the present invention and under regard to detailed description of the present invention and have exemplary and explanatory, and will provide further explanation to embodiments of the invention as claim.
Now, structure of describing among the present invention and operating principle will be with reference to appended graphic being elaborated.At first, Fig. 1 and 2 shows a kind of basic structure of using the bar type electrostatic charge remover of piezo ceramic element.In the Xelminator of Fig. 1, a plurality of air body block 300 are combined.The both sides of the air body block 300 of this combination exist an air body block left side fixed cap 200 and an air body block right side fixed cap 400.The air body block 300 of this combination is combined through a sliding system and a shell 500, and makes up a side cover 100 in the both sides of shell 500, and a control unit 600 is attached on the air body block 300.
Fig. 3 shows the structure of air body block 300.Begin discharge along with an air body block 300 combination one control unit 600 produces high pressure and pin 340 with high frequency, and silicon O-ring 330 inserts under the air column of baseplugs 350 to prevent escape of air.
And control unit 600 inserts unit 390 combinations with a metal of air body block 300, and see through the screw and sensory panel 310 combinations that are used for fixing described sensory panel, and have a protrusion unit 308 that is used for fixing control unit at place, the two ends of an air body block 300, and therefore can change fixing direction fixes described control unit 600.Another spray point 340 makes up with the needle socket 320 that the metal that will be connected to an air body block inserts unit 390.
Fig. 4 illustrates the assembly of an air body block 300.One side of air body block 300 has the protrusion unit 305 that is used to make up an air body block, and has the chase unit 306 that is used to make up an air body block at opposite side.The described protrusion unit that is used for the combined pneumatic piece 305 is inserted described chase unit 306 that is used to make up an air body block and rotation and fixing after, silicon cap 370 and silicon chip 375 and a combination zone are combined, to prevent escape of air.In the present invention, the control of the pole length of Xelminator is reached through the one or more air body block 300 of combination.Form the structure according to an air body block 300 of the present invention, so that in the combined pneumatic piece, described inner air path is connected with each other and air is flowed therein glibly.
The assembled state of Fig. 5-8 explanation pin 340 and socket 350,360.In the present invention, pin 340 has the needle socket 320 of baseplug 350 combined with combination, then, air sees through the baseplug input air hole 351 that forms and flows in baseplug 350, and through a plurality of baseplug delivery air nozzles 352 outflows, these baseplug air delivery nozzles 352 make up with pin towards the end of baseplug 350 equably along the direction of principal axis of described pin, and last a large amount of air sees through a following orifice flow that outwards is installed in the jet socket 360 of baseplug 350 bottoms and goes out.
Fig. 9-13 explanation is according to the structure of the control unit 600 of the present invention's Xelminator.5a figure explanation is according to the composition of the control unit 600 of the present invention's piezoelectric type Xelminator 1000; 5b figure shows its detailed circuit.
If use 24 volts of DC on control unit 600, described control unit 600 comes into operation.Side is depicted the device that is used for stablizing the DC power supply in the lower-left of 5b figure.This device is provided for the stable ripple composition that is included in the dc voltage.5b figure is made of two parts: top and lower part, and this top utilizes the output signal of a sensing cell 310 sensing piezoelectric ceramic, and utilize comparator 620 and reference voltage to compare and determine described output signal for normal, if results abnormity relatively then produces alarm signal.Described alarm signal sees through alarm generator 640 and transfers to alarm device.Promptly be that the present invention determines whether the described output signal that senses is correct, if sense operation is wrong, then its output alarm signal.
At this moment, the reason of alarm generation is as follows:
1. when the high pressure output signal is lower than normal condition
2. when the state high pressure of induction is unusual
3. when because albinism, dust is in spray point or during discharge instability.
The lower part of described circuit has the feedback that a structure is used for pottery, is normal if obtain output signal among the result by foregoing description, then will be sent to piezoelectric ceramic again to produce high pressure constantly via an amplifier 630 amplified output signal.It is corresponding to piezoelectric actuator 700.
Sensing cell 310 sees through the output of spray point 340 monitoring potteries 610.Promptly be, the quantity of electric charge that sensing cell 310 is responded to by the high pressure with high frequency that utilizes application on the spray point 340, whether the described output voltage of sensing is normal.
Piezoelectric ceramic 610 is connected to spray point 340, and the described output signal of sensing cell 310 is connected to piezoelectric actuator 700 and alarm generator 640, and described piezoelectric actuator 700 is connected to pottery 610.
As mentioned above, employed piezoelectric system pressure-electronic ceramic by name or piezoelectric element among the present invention, if at the given electric energy of described system, then this electric energy be converted to mechanical energy then mechanical energy be converted to electric energy again.In the present invention, be feasible by the form that pressure-electronic ceramic is fabricated to multilayer with the high pressure that generation has low input.And when being employed along with the high AC voltage with high frequency (about 72KHz), a little dust is attached on the end of spray point, and along with the ionic weight that produces is higher relatively, the described system that only has some spray points can have a high static and eliminate ability.
Figure 14 illustrates the example that produces the high pressure with high frequency according to piezoelectric type Xelminator of the present invention.From the 6th figure, we can understand the piezoelectric type Xelminator and produce the high pressure with high frequency and have amplitude about frequency place ± 2.5KV of 72KHz.
Figure 15-18 shows the ion distribution and the existing pulse AC/DC/AC formula Xelminator of piezoelectric type Xelminator.Promptly be, Figure 15 illustrates the ion distribution according to the present invention's piezoelectric type Xelminator, Figure 16 illustrates the ion distribution of pulse AC formula Xelminator, and Figure 17 illustrates the ion distribution of DC formula Xelminator, and Figure 18 illustrates the ion distribution of AC formula Xelminator.When the piezoelectric system intermediate ion in Figure 15-18 very alternately produces, the ionic equilibrium performance is much better than the performance of existing pulse AC formula, DC formula and AC formula.
On the other hand, compared to existing Xelminator, the present invention's maximum characteristics are albinism differences of building up according to particle, and described albinism is less than common bar type electrostatic charge remover.This fact means that separated problem in one obtained great improvement by own wt or vibration after dust was built up.
Consider the present invention from the angle of die-away time, with reference to on-the-spot processing service speed, be referenced as below 3 seconds or 3 seconds the common die-away time of product conversion, and one fixedly be referenced as below 5 seconds or 5 seconds the common die-away time of product, so, can find that the present invention is gratifying according to the measurement result of Xelminator of the present invention.
And the angle of peak value is considered the present invention from ionic equilibrium and peak, the present invention shows the low-down ionic equilibrium characteristic compared to existing bar type electrostatic charge remover, and to peak value, it demonstrates fabulous result the index of the external electrical field that occurs from high voltage source about the peak.These results are most important for the safety operation aspect of Xelminator, and compared to existing Xelminator, superiority of the present invention is apparent.
So; the present invention can carry out different transformations and have various ways; about the above only is in order to explain the present invention's preferred embodiment; be not that attempt is done any formal restriction to the present invention according to this; be with; all have in following any modification or change of doing relevant the present invention of identical invention spirit, all must be included in the category that the invention is intended to protection.
The industry practicality
The present invention can be applicable to comprise that LCD makes and semiconductor is manufactured on interior multiple industrial field.
Claims (10)
1. bar type electrostatic charge remover that uses piezo ceramic element, wherein
The high pressure with high frequency that is used to discharge produces by piezo ceramic element, and described Xelminator comprises at least:
One control unit is controlled described piezoelectric ceramic type Xelminator;
One spray point, the high pressure that has high frequency by application is carried out discharge;
One baseplug is antiparticle probe anchor clamps, produces particle to prevent to be present on the described spray point within the described baseplug inside; And
One pneumatic body provides air to described Xelminator, and described control unit comprises:
Piezo ceramic element produces the high pressure with high frequency;
One sensory panel is by using from the high pressure with high frequency of described piezo ceramic element output the quantity of electric charge that the described spray point of measurement generation ion is responded to;
One piezoelectric actuator if it is normal to judge described piezo ceramic element operation from the sensing result of described sensory panel, then amplifies the output signal of described sensory panel also by a sensing amplifier
These amplifying signals are fed back to the process of described piezo ceramic element, make described piezo ceramic element produce high pressure constantly with high frequency;
One alarm generating device if judge described piezo ceramic element operation exception from the sensing result of described sensory panel, then produces alarm; And
One DC power supply is used for dc voltage is provided to each described assembly,
And it is characterized in that a jet socket, to amplify and the air-flow that comes from described control unit, and
The described control unit combination of described baseplug and each, and described baseplug is respectively in the pneumatic body of described Xelminator, and described Xelminator is made up of one or more air body block with said structure.
2. the bar type electrostatic charge remover of use piezo ceramic element according to claim 1, wherein, described control unit is by with described sensory panel be used for fixing the described screw combination of described sensory panel and fix, and the metal of described spray point and described air body block inserts the unit through combining with the combination of needle socket.
3. the bar type electrostatic charge remover of use piezo ceramic element according to claim 1, wherein, a plurality of projections form in a side outside of described air body block, and in opposite side inside, form groove, to lock these a plurality of projections, then silicon cap and silicon chip group are lumped together, in order to prevent the escape of air when air body block is combined.
4. the bar type electrostatic charge remover of use piezo ceramic element according to claim 1, wherein, the control of the pole length of described Xelminator sees through the combination of air body block and reaches.
5. the bar type electrostatic charge remover of use piezo ceramic element according to claim 1, wherein, form pneumatic body structure, so that when air body block makes up, the air path of the inside of pneumatic body is connected with each other, thereby air is flowed glibly in pneumatic body inside, then, the air in these pneumatic bodies flows into from the baseplug input hole, sees through a plurality of long-pending baseplug air delivery nozzle outflows of same cross-sectional that have, wherein
Described baseplug air delivery nozzle in one direction of a spray point with it equably the contact, rather than be looped around whole described spray point around.
6. the bar type electrostatic charge remover of use piezo ceramic element according to claim 1, wherein, seeing through described baseplug air input hole leaked-in air flows along the baseplug air delivery nozzle that described spray point forms on every side, flow out with end towards described baseplug, and described jet socket is installed in the bottom of described baseplug, so that increase the moving air amount and obtain injection injection effect.
7. the bar type electrostatic charge remover of use piezo ceramic element according to claim 1 wherein, according to fluid mechanics principle, is installed a jet socket so that prolong the arrival distance that flows out air.
8. the bar type electrostatic charge remover of use piezo ceramic element according to claim 1, wherein, described control unit further comprises:
Be used for a stable device that is included in the interior ripple composition of dc voltage.
9. the bar type electrostatic charge remover of use piezo ceramic element according to claim 1, wherein, the coverage that is used to eliminate electric charge is 50 ~ 2000mm, and when the coverage that is used to eliminate electric charge is under the situation of 300mm, described peak to peak value is ± 10V or less than ± 10V.
10. the bar type electrostatic charge remover of use piezo ceramic element according to claim 1, wherein, the coverage that is used to eliminate electric charge is 50 ~ 2000mm, when the coverage that is used to eliminate electric charge is under the situation of 300mm, described ionic equilibrium is ± and 7V or less than ± 7V.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020070047942 | 2007-05-17 | ||
| KR1020070047942A KR100885176B1 (en) | 2007-05-17 | 2007-05-17 | A bar type electrostatic remover using piezo ceramic element |
| PCT/KR2008/002723 WO2008143426A1 (en) | 2007-05-17 | 2008-05-16 | A bar type electrostatic charge remover using piezo ceramic element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101682978A true CN101682978A (en) | 2010-03-24 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200880014781A Pending CN101682978A (en) | 2007-05-17 | 2008-05-16 | A bar type electrostatic charge remover using piezo ceramic element |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP2010527106A (en) |
| KR (1) | KR100885176B1 (en) |
| CN (1) | CN101682978A (en) |
| TW (1) | TW200847852A (en) |
| WO (1) | WO2008143426A1 (en) |
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| CN112616232A (en) * | 2020-12-23 | 2021-04-06 | 西安奕斯伟硅片技术有限公司 | Silicon wafer processing equipment |
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| JP5479780B2 (en) * | 2009-05-29 | 2014-04-23 | スリーエム イノベイティブ プロパティズ カンパニー | Static eliminator and static eliminator system |
| KR101247514B1 (en) * | 2011-04-22 | 2013-03-26 | (주)선재하이테크 | A socket for a discharging electrode |
| KR101421012B1 (en) * | 2012-11-21 | 2014-07-23 | (주)선재하이테크 | Bracket apparatus for a bar-type ionizer |
| CN112083774B (en) * | 2020-09-14 | 2022-05-27 | 重庆精鸿益科技股份有限公司 | Dust protected computer machine case |
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| JP2880427B2 (en) | 1995-06-29 | 1999-04-12 | 株式会社テクノ菱和 | Air ionization apparatus and air ionization method |
| JP2001085191A (en) * | 1999-09-14 | 2001-03-30 | Sony Corp | Ion generating device |
| JP2001085188A (en) | 1999-09-14 | 2001-03-30 | Sony Corp | Ion generating device |
| JP4170844B2 (en) * | 2002-11-29 | 2008-10-22 | サンクス株式会社 | Static eliminator |
| JP4573631B2 (en) * | 2003-12-02 | 2010-11-04 | 株式会社キーエンス | Ionizer |
| JP4540043B2 (en) * | 2004-04-05 | 2010-09-08 | 一雄 岡野 | Corona discharge ionizer |
| JP4589174B2 (en) * | 2004-08-31 | 2010-12-01 | サンクス株式会社 | Static eliminator |
| JP2006156276A (en) | 2004-12-01 | 2006-06-15 | Shishido Seidenki Kk | Air nozzle type ion generation device |
-
2007
- 2007-05-17 KR KR1020070047942A patent/KR100885176B1/en not_active IP Right Cessation
-
2008
- 2008-05-16 CN CN200880014781A patent/CN101682978A/en active Pending
- 2008-05-16 TW TW097118123A patent/TW200847852A/en unknown
- 2008-05-16 JP JP2010507338A patent/JP2010527106A/en active Pending
- 2008-05-16 WO PCT/KR2008/002723 patent/WO2008143426A1/en active Application Filing
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112616232A (en) * | 2020-12-23 | 2021-04-06 | 西安奕斯伟硅片技术有限公司 | Silicon wafer processing equipment |
| CN112616232B (en) * | 2020-12-23 | 2024-01-26 | 西安奕斯伟材料科技股份有限公司 | Silicon wafer processing equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2008143426A1 (en) | 2008-11-27 |
| KR20080101328A (en) | 2008-11-21 |
| TW200847852A (en) | 2008-12-01 |
| JP2010527106A (en) | 2010-08-05 |
| KR100885176B1 (en) | 2009-02-23 |
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Application publication date: 20100324 |