CN101673786B - Preparation method of CdTe solar cells under magnetic field - Google Patents
Preparation method of CdTe solar cells under magnetic field Download PDFInfo
- Publication number
- CN101673786B CN101673786B CN2009102016126A CN200910201612A CN101673786B CN 101673786 B CN101673786 B CN 101673786B CN 2009102016126 A CN2009102016126 A CN 2009102016126A CN 200910201612 A CN200910201612 A CN 200910201612A CN 101673786 B CN101673786 B CN 101673786B
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- Prior art keywords
- cdte
- magnetic field
- glass substrate
- sputtering
- substrate
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 238000002360 preparation method Methods 0.000 title claims abstract description 17
- 229910004613 CdTe Inorganic materials 0.000 title claims abstract 25
- 239000000758 substrate Substances 0.000 claims abstract description 53
- 239000011521 glass Substances 0.000 claims abstract description 39
- 238000006243 chemical reaction Methods 0.000 claims abstract description 9
- 229910052751 metal Inorganic materials 0.000 claims abstract description 7
- 239000002184 metal Substances 0.000 claims abstract description 7
- 238000004544 sputter deposition Methods 0.000 claims description 34
- 238000000034 method Methods 0.000 claims description 25
- 239000010408 film Substances 0.000 claims description 21
- 238000000859 sublimation Methods 0.000 claims description 20
- 230000008022 sublimation Effects 0.000 claims description 20
- 239000012528 membrane Substances 0.000 claims description 18
- 238000000137 annealing Methods 0.000 claims description 14
- 239000010409 thin film Substances 0.000 claims description 14
- 230000008569 process Effects 0.000 claims description 13
- 229910052736 halogen Inorganic materials 0.000 claims description 9
- 150000002367 halogens Chemical class 0.000 claims description 9
- 238000004821 distillation Methods 0.000 claims description 8
- 230000001105 regulatory effect Effects 0.000 claims description 7
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 6
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 6
- 238000012545 processing Methods 0.000 claims description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 4
- 230000008021 deposition Effects 0.000 claims description 4
- 238000005477 sputtering target Methods 0.000 claims description 4
- 239000013077 target material Substances 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 230000001143 conditioned effect Effects 0.000 claims description 3
- 239000008367 deionised water Substances 0.000 claims description 3
- 229910021641 deionized water Inorganic materials 0.000 claims description 3
- 239000004519 grease Substances 0.000 claims description 3
- 239000012535 impurity Substances 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- 239000004411 aluminium Substances 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- FFBHFFJDDLITSX-UHFFFAOYSA-N benzyl N-[2-hydroxy-4-(3-oxomorpholin-4-yl)phenyl]carbamate Chemical compound OC1=C(NC(=O)OCC2=CC=CC=C2)C=CC(=C1)N1CCOCC1=O FFBHFFJDDLITSX-UHFFFAOYSA-N 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 238000012423 maintenance Methods 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 238000005092 sublimation method Methods 0.000 abstract 2
- 238000010521 absorption reaction Methods 0.000 abstract 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 abstract 1
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 description 41
- 239000000463 material Substances 0.000 description 15
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000006399 behavior Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000005012 migration Effects 0.000 description 2
- 238000013508 migration Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- XPDWGBQVDMORPB-UHFFFAOYSA-N Fluoroform Chemical compound FC(F)F XPDWGBQVDMORPB-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 150000002484 inorganic compounds Chemical class 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
Description
Step (2) molecular pump vacuumizes air pressure (Pa) | 10 -3 | 2×10 -3 | 2×10 -3 | 3×10 -3 | 3×10 -3 |
Step (2) feeds mixed gas flow (ml/min) | 30 | 40 | 45 | 50 | 60 |
Step (2) reaction pressure (Pa) | 0.2 | 0.3 | 0.35 | 0.4 | 0.5 |
Step (2) sputtering power (w) | 100 | 200 | 300 | 400 | 500 |
Step (2) sputtering time (h) | 0.5 | 0.8 | 1.2 | 1.6 | 2 |
Step (3) vacuum pump vacuumizes (Pa) | 5 | 3 | 2 | 2 | 1 |
Step (3) molecular pump vacuumizes (Pa) | 10 -3 | 2×10 -3 | 2×10 -3 | 3×10 -3 | 3×10 -3 |
Step (3) feeds mixed gas flow (ml/min) | 5 | 8 | 12 | 16 | 20 |
Step (3) reaction pressure (Pa) | 500 | 80 | 1200 | 1600 | 2000 |
Step (3) sublimation source temperature (℃) | 550 | 570 | 590 | 600 | 620 |
Step (3) underlayer temperature (℃) | 500 | 510 | 520 | 540 | 550 |
Step (3) source and substrate distance (mm) | 2 | 4 | 5 | 7 | 8 |
Step (3) distillation time (s) | 3 | 5 | 7 | 9 | 10 |
Step (5) vacuum pump vacuumizes air pressure (Pa) | 5 | 3 | 2 | 2 | 1 |
Step (5) molecular pump vacuumizes air pressure (Pa) | 10 -3 | 2×10 -3 | 2×10 -3 | 3×10 -3 | 3×10 -3 |
Step (5) feeds Ar throughput (ml/min) | 5 | 8 | 12 | 16 | 20 |
Step (5) reaction pressure (Pa) | 500 | 80 | 1200 | 1600 | 2000 |
Step (5) magnetic field intensity (T) | 1 | 4 | 8 | 12 | 15 |
Step (5) sublimation source temperature (℃) | 560 | 570 | 580 | 590 | 600 |
Step (5) underlayer temperature (℃) | 480 | 490 | 500 | 510 | 520 |
Step (5) source and substrate distance (mm) | 1 | 2 | 3 | 4 | 5 |
Step (5) distillation time (min) | 0.5 | 0.8 | 1.2 | 1.6 | 2 |
Step (6) underlayer temperature (℃) | 480 | 490 | 500 | 510 | 520 |
Step (6) magnetic field intensity (T) | 1 | 4 | 8 | 12 | 15 |
Step (6) processing time (min) | 30 | 35 | 40 | 45 | 50 |
Step (7) vacuum pump vacuumizes air pressure (Pa) | 5 | 3 | 2 | 2 | 1 |
Step (7) molecular pump vacuumizes air pressure (Pa) | 10 -3 | 2×10 -3 | 2×10 -3 | 3×10 -3 | 3×10 -3 |
Step (7) is regulated air pressure (Pa) | 0.3 | 0.35 | 0.4 | 0.45 | 0.5 |
Step (7) sputtering power (w) | 200 | 250 | 300 | 400 | 500 |
Step (7) sputtering time (mi n) | 20 | 25 | 30 | 35 | 40 |
Step (7) annealing in process time (h) | 1 | 1.2 | 1.6 | 1.8 | 2 |
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009102016126A CN101673786B (en) | 2009-10-12 | 2009-10-12 | Preparation method of CdTe solar cells under magnetic field |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009102016126A CN101673786B (en) | 2009-10-12 | 2009-10-12 | Preparation method of CdTe solar cells under magnetic field |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101673786A CN101673786A (en) | 2010-03-17 |
CN101673786B true CN101673786B (en) | 2012-05-23 |
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Application Number | Title | Priority Date | Filing Date |
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CN2009102016126A Expired - Fee Related CN101673786B (en) | 2009-10-12 | 2009-10-12 | Preparation method of CdTe solar cells under magnetic field |
Country Status (1)
Country | Link |
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CN (1) | CN101673786B (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102437206B (en) * | 2011-12-15 | 2014-05-07 | 湖北大学 | ZnO/CdSe/CdTe nanorod array photoelectrode and preparation method thereof |
CN103996609A (en) * | 2013-02-19 | 2014-08-20 | 中国科学院电工研究所 | Preparation method of magnetron sputtering CdTe polycrystalline film solar cell |
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2009
- 2009-10-12 CN CN2009102016126A patent/CN101673786B/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
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CN101673786A (en) | 2010-03-17 |
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Denomination of invention: Preparation method of CdTe solar cells under magnetic field Effective date of registration: 20131128 Granted publication date: 20120523 Pledgee: Bank of China Limited by Share Ltd. Shanghai Development Zone Pudong branch Pledgor: Shanghai Lianfu New Energy Science & Technology Co.,Ltd. Registration number: 2013310000066 |
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Owner name: SHANGHAI LIANFU NEW ENERGY TECHNOLOGY GROUP CO., L Free format text: FORMER NAME: SHANGHAI LIANFU NEW ENERGY SCIENCE AND TECHNOLOGY CO., LTD. |
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Address after: 201201 Pudong New Area, Shengli Road, No. 17, building 1, floor 836, Patentee after: SHANGHAI LIANFU NEW ENERGY SCIENCE & TECHNOLOGY GROUP Co.,Ltd. Address before: 201201 Shanghai city Pudong New Area King Road No. 1003 Patentee before: Shanghai Lianfu New Energy Science & Technology Co.,Ltd. |
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