CN101660900A

CN101660900A - Three dimensional shape measuring apparatus

Info

Publication number: CN101660900A
Application number: CN200910175503A
Authority: CN
Inventors: 吉住惠一; 久保圭司; 望月博之; 舟桥隆宪
Original assignee: Matsushita Electric Industrial Co Ltd
Current assignee: Panasonic Holdings Corp
Priority date: 2006-11-02
Filing date: 2007-09-29
Publication date: 2010-03-03
Anticipated expiration: 2027-09-29
Also published as: KR100921847B1; CN101660900B; TW200821539A; CN101173854A; CN101173854B; JP4260180B2; JP2008116279A; KR20080040563A; TWI345047B

Abstract

Provided is a measuring probe for a three dimensional shape measuring apparatus, which has a laser light source (31); a lens (14), which focuses the laser generated from the laser light source onto areflector (9) integrally linked with a contact pin (5); a concentric circle shaped diffraction grating (8), which is configured in the laser light path of the laser reflected by the reflecting plane after light is gathered through the lens on the reflector reflecting plane of the reflector, and formed in a position where the concentric circle center biases from the laser light path; a first photodetector group (34D, 34E, 34F), receiving the positive primary diffraction light generated by the diffraction grating; and a second photodetector group (34A , 34B, 34C), receiving the negative primarydiffraction light generated by the diffraction grating. The measuring probe for a three dimensional shape measuring apparatus is configured to take the output of the first photodetector group and thesecond photodetector group as the focused error signal, and is at least built-in with the lens.

Description

Three dimensional shape measuring apparatus

The application divides an application, and the application number of its female case is 2007101624178; The applying date is on September 29th, 2007; Denomination of invention is " 3 d shape testing device ".

Technical field

The present invention relates generally to and utilizes the nanoscale superhigh precision to measure the mensuration probe of device usefulness that non-spherical lens etc. is measured the shape etc. of things.

Background technology

Non-spherical lens must be made into error range in the high-precision lenses below 0.1 micron according to the design load that optical design requires, and can not process the processing machine that reaches this precision but only do not exist in the processing operation of non-spherical lens.Therefore, the inventor has invented the three-dimensional measurement machine of the superhigh precision of 0.01 micron level in the past.This mensuration machine is widely utilized as the necessity of developing, make non-spherical lens.Its content is put down in writing in patent documentation 1～4 grade.Utilize this mensuration machine,, can under the precision below 0.1 micron, make the mould or the non-spherical lens of non-spherical lens by measurement result being fed back to the processing operation of non-spherical lens.

But the non-spherical lens that recent digital camera etc. use for ultra-thinization, high image qualityization, wide-angleization and high zoom multiplying powerization etc., requires more and more strictness, not only requires the form accuracy height, also requires best in quality.Particularly, existing mensuration machine can not be measured the inclination of table back side optical axis of non-spherical lens and eccentric problem displays.In addition, can only from the mensuration machine that the side the non-spherical lens table back side is measured, also require more high precision int, and, also require the miniaturization and the cheap of mensuration machine for the operator can be used simply at the scene of factory to Nano grade.

As the 3 d shape testing machine of existing non-spherical lens, such as described, measure the shape of non-spherical lens or its mould with the superhigh precision of 0.01 micron level from the one side of table among the back side.With reference to patent documentation 1～4 simple declaration.

Figure 10 is the integrally-built figure of the superhigh precision three-dimensional measurement machine put down in writing of expression patent documentation 1.In Figure 10, last stone platform 106 is equipped with oscillation frequency stabilization laser instrument 138, measurement length cell, the Z slide block 111 that is used to measure XYZ coordinate and pops one's head in 110, should go up stone platform 106 under the effect of XY objective table (stage) 120,121, move in the XY direction.Be fixed with X with reference to mirror 103 on the stone platform 123 down, Y is with reference to mirror 104, with Z fixing on the fixing door type frame platform 107 of following stone platform 123 with reference to mirror 108, on the axle of the measuring point of measuring thing 101, respectively by measuring mechanism 114,115,112, (X is with reference to mirror 103 from oscillation frequency stabilization laser instrument 138 to these high level crossings for 113 mensuration, Y is with reference to mirror 104, last Z is with reference to mirror 108) the variation of distance, even thereby XY objective table 120,121 mobile linearity is 1 micron a rank, also can obtain with reference to mirror 103,104,108 flatness is the coordinate axis precision of 10 Nano grades.

Figure 11 represents is the probe of the three directional measuring device put down in writing of patent documentation 2 and the pie graph of Z axle.Comprise the movable part on probe 210 the Z direction, by a pair of lamellar spring members 217 of the reeling own wt of slinging.Compare with volute spring,, thereby be called the dead load spring because length is short, the spring force variation is few with respect to length variations.The Z movable part that comprises probe 210 is driven up and down under the effect of coil 213.According to such structure, can make probe 210 follow the concavo-convex of mensuration face with lighter power and move up and down swimmingly.And coil 213 is because apply driving force near the center of gravity of the Z movable part that comprises probe 210, so will be limited in Min. to the harmful effect of the mobile linearity of Z aerodynamic slider 211 by driving force.

What Figure 12 represented is the three-dimensional measurement probe of patent documentation 3 records.With measure fixing little sliding part 306 on the contact pilotage (stylus) 305 that thing 301 joins, under the effect of the movable part that contains little air bearing 307, can move along the Z direction, by leaf spring 350 supportings, be pasted with reflective mirror 309, the light of semiconductor laser 334 is reflected by reflective mirror 309, drive by 344 pairs of probes of linear motor integral body, so that little sliding part 306 is certain with respect to the displacement of little air bearing 307.The oscillation frequency stabilization laser that the Z coordinate measuring is used to same reflective mirror 309, is measured Z coordinate according to reflected light by same lens 314 light harvestings.

What Figure 13 represented is the shape measuring apparatus of patent documentation 4 records.Though with patent documentation 1 is identical idea, pop one's head in and 405 on the XY direction, do not move, measure thing 401 and become one with reference to mirror 403,404,402 but constitute with XYZ, on the XY direction, moving under the effect of XY mobile device 421.

What Figure 14 represented is the 3 d shape testing device of patent documentation 5 records.It is the device that to measure the shape of lens 501 from these both sides of upside and downside.

Figure 15 is the key diagram of patent documentation 6, has put down in writing the assay method of following lens face shape,, will measure probe after the enterprising line focusing of lens face is servo that is, and the summit is promptly searched at the center of finding out, with its mensuration initial point as mensuration face 601.

Patent documentation 7 has been put down in writing a kind of process for measuring shape and device, and its use has the lens stationary fixture of three spheroids, measures non-spherical lens and three spheroids at table, the back of the body respectively, thereby can measure the inclination and the off-centre of non-spherical lens.

Patent documentation

8 and 9 has been put down in writing and made lens is the method that the center rotates, measures from both sides shape with the optical axis direction.

What Figure 16 A and Figure 16 B represented is the deadweight bearing method of the contact probe of record in the patent documentation 10.

[patent documentation 1] Japan special permission No. 3046635 communique (the 6th page, Fig. 1)

[patent documentation 2] Japan special permission No. 2973637 communique (the 5th page, Fig. 6)

[patent documentation 3] Japan special permission No. 3000819 communique (the 3rd page, Fig. 1)

[patent documentation 4] Japanese kokai publication hei 10-170243 communique (the 11st page, Fig. 3)

[patent documentation 5] Japan special permission No. 3486546 communique (the 13rd page, Fig. 3)

[patent documentation 6] Japan special fair 07-69158 communique (the 5th page, Fig. 1)

[patent documentation 7] TOHKEMY 2002-71344 communique

No. 3604996 communique of [patent documentation 8] Japan special permission

[patent documentation 9] TOHKEMY 2005-069775 communique

[patent documentation 10] TOHKEMY 2003-42742 communique (the 19th page, Fig. 6)

(1) the described the problem to be solved in the present invention of technical scheme of absolute version is described

In the structure of described existing patent documentation 1～4, because can't the mensuration table back side measuring that the thing back side just turns over, so the problem that exists is in order to make the mensuration coordinate system of showing the back side identical, if do not use such anchor clamps of record in the patent documentation 7 for example, just can't measure and off-centre.In addition, owing to except the mensuration of mensuration face, must measure anchor clamps again, there is the problem of the reason increase of error generation in institute so that minute becomes very long.

The structure of patent documentation 5 is, from measuring the last planar survey upper surface of thing 501, simultaneously from measuring the following planar survey lower surface of thing 501.In order to reach the mensuration precision below the sub-micron, because the mobile linearity of XYZ objective table and verticality are difficult to reach below the sub-micron, so it is the same with patent documentation 1, use X with reference to mirror 204u, X with reference to mirror 204d, Y with reference to mirror (diagram is expression), Z with reference to mirror 206u, Z with reference to mirror 206d, with these with reference to the flatness of mirror benchmark as the XYZ coordinate axle.But, because dispose up and down different with reference to mirror, so become different up and down XYZ coordinate systems.

But,, then can not measure the inclination and the off-centre of the top and bottom of thing 501 if in different coordinate systems, measure the top and bottom of thing 501.Therefore, by from measuring three balls fixing up and down, calculate, thereby the deviation of coordinate system of the top and bottom of thing 501 is measured in revisal according to the determination data of three balls with measuring thing 501 one.

And, patent documentation 5 use six high prices with reference to mirror, so extremely complicated, hugeization of not only becoming and high priceization, and also must three spheres of other mensuration except the mensuration face be suitable spended time.Owing to add the sterad or the error at measurment of ball, exist inclination and eccentric measurement result to produce the problem of error.

In Figure 14 of patent documentation 5, use two sides X with reference to

mirror

204u and 204d, two sides Z with reference to

mirror

206u and 206d and two sides Y with reference to mirror (not diagram), use six altogether with reference to mirror.

In addition, for measured length, X-axis is used 207u, 208u, four laser length measurement unit of 207d, 208d, and Y-axis is also used four laser length measurement unit, and the Z axle uses two laser length measurement unit of 209u, 209d, uses 10 laser length measurement unit altogether.In the laser length measurement unit, just an axle just needs multiple precision opticss such as prism, corner cube (corner cube), wavelength plate, if be equipped with ten, just need a large amount of precision opticss, be the device that sizable cost but is difficult to practicability.

In the structure of patent documentation 5,, can not reduce in any case all need six with reference to mirror, 10 laser length measurement unit.Below give reasons.

At first, the Z axle is described.The Z axle utilizes the upside Z mensuration interferometer 209u as an example of laser length measurement unit, to measuring with reference to the distance of mirror 206u to upside Z from the upside reflective mirror 208u in the configuration of the back side of probe 221u.Under pop one's head in 221d too, utilize another routine downside Z as the laser length measurement unit to measure and use interferometer 209d, the downside reflective mirror 208d that disposes from the back side at the 221d that pops one's head in is down measured with reference to the distance of mirror 206d to downside Z.Each

interferometer

209u, 209d, for distance from reflective mirror 208u, the 208d at probe 221u, the 221d back side to

reference mirror

206u, 206d, directly measure by

laser interferometer

209u, 209d, so no matter save Z with reference to

mirror

206u, 206d which, the Z coordinate that saves all can not be measured.

About X-axis, in the structure of patent documentation 5, on the 221u that pops one's head in move up and down along the guiding piece 226u of upside, following probe 226d moves up and down along the guiding piece 226d of downside.Each guiding piece 226u, 226d use the guiding piece of rolling bearing, and ball-

screw

227u, 227d are driven by

motor

229u, 229d and move up and down.In such structure, the linearity that reaches below 0.1 micron also is impossible.Therefore, for the deficiency of the mobile linearity of revisal guiding piece 226u, 226d,, only use two places that probe 226u measures distance X 1u and distance X 2u, the tilt variation when revisal Z axle guiding piece moves for the X coordinate.In addition, because the distance from guiding piece 226u, 226d to contact pilotage also can depart from, for the influence of getting rid of thermal expansion etc., near measured

X coordinate probe

221u, 221d as far as possible.

221d pop one's head in down because move up and down, so near the two identical places the 221d that pops one's head in down measure distance X 1d and distance X 2d on the guiding piece 226d of other downside.If the whichever reflective mirror, for example save the X coordinate measuring data that the reflective mirror 204d of downside serves as the 221u that pops one's head in, the linearity deficiency of the following side guides 226d of probe 221d then, degree of tilt, thermal expansion equal error increase, and can not carry out high-precision measuring.Therefore, any all can not omit upside X with reference to mirror 204d with reference to mirror 204u and downside X.

For Y-axis too, based on the reason same, can not omit the wherein side of two Y with reference to mirror with X-axis.

Consequently, in the mode of patent documentation 5, become different XYZ coordinate up and down.That is to say that upside Z forms upside XY coordinate plane with reference to mirror 206u, downside Z forms downside XY coordinate plane with reference to mirror 206d, is difficult to make both to reach consistent.Upside X is with reference to the YZ coordinate plane of mirror 204u formation upside, and downside X forms downside YZ coordinate plane with reference to mirror 204d, is difficult to make both to reach consistent.Y with reference to mirror too.Therefore, in this example,, come revisal coordinate system inconsistent up and down by measuring three balls with up and down probe 221u, 221d.Therefore, except that measuring determinand, also to measure three balls, also will carry out extra 3 times mensuration except measuring except that measuring thing.

Patent documentation 7 has been put down in writing, and lens and three balls are fixed in anchor clamps, measures lens and three balls from face side, anchor clamps is turned over measure lens and three balls from dorsal part, according to calculating inclination and the off-centre that can measure lens.This has the advantage of the superhigh precision three-dimensional measurement machine of can direct like this use putting down in writing in existing patent documentation 1～4, also need to measure this extra mensuration of 3 times of increase of three balls the thing but remove to measure.

Patent documentation 8 be with two probes from up and down or about measure the two sides of lens, thereby measure the inclination and the off-centre of lens.Possess down thereon the Z that has nothing in common with each other with reference to mirror and X with reference on the mirror this point, have the problem identical, but different points is that the mensuration coordinate system is not a rectangular coordinate system with patent documentation 5, be that to make lens be center rotation with the optical axis direction, the polar coordinate system of measuring according to the anglec of rotation and radius.In this document, not only use rotational angle detecting, in the vibration measurement of universal stage, use two groups of laser length measurement unit.

Polar mensuration, because the position that makes two probes is to being combined in rotation center, and the rotation center that the optical axis that will make non-spherical lens and polar coordinates are measured is consistent, compares so measure with rectangular coordinate, necessary adjustment project is many, and the factor that error takes place is also many.And, also exist and can not measure four directions or elongated lens problem such, that in rectangular coordinate system, do not have.

Patent documentation 9 also be utilize two probes by polar coordinates measure from about measure the two sides of lens, thereby measure the inclination and the off-centre of lens.But because be that polar coordinates are measured, thus have described problem, add because be not used in above objective table precision gauge with reference to mechanisms such as mirrors, so think the two sides that on the precision of Nano grade, can't measure non-spherical lens.

Described problem of the present invention solves described these problems exactly.

(2) problem to be solved by this invention of the technical scheme record of subform is described.

Though the mode of patent documentation 1～4 is the good structures that are suitable for measuring non-spherical lens on the precision of Nano grade, but in order to measure on the two sides from non-spherical lens, in the structure of patent documentation 1, the Z axial region of packing into and comprising probe between thing and the stone platform must measured.In the structure of patent documentation 4, thing and the Z probe of packing between with reference to mirror must measured.

But,, measure between thing and the stone platform so probe is difficult to be inserted into because probe is very long on the Z direction.Measure between thing and the stone platform if obstinately probe is encased in, then measure thing with will be elongated with reference to the distance between mirror or the stone platform, just can not ignore and vibrate or thermal expansion etc. causes the reason of precision deterioration.

To pop one's head in the vertical by big and longly become little and lack, become the problem to be solved by this invention that the subform technical scheme is put down in writing.In addition, probe being dwindled the mensuration machine of measuring from one side, also is to measure response, the miniaturization that realizes the mensuration machine, the important topic of cost degradation in order to improve.

(3) problem to be solved by this invention of the technical scheme record of subform is described.

In the structure of patent documentation 1～4,, sling with spring from top in order to support the deadweight of probe.In the structure with the dead load spring-loaded of patent documentation 2, the spring of being made by thin plate that utilizes two coilings is from top pulling.But, in the structure of this existing apparatus, measure between thing and the stone platform if will be inserted into from the probe that downside will be measured, then exist because this spring minister, thereby problem that the Z axial region is elongated and because the problem that spring portion at the probe upside, causes and the mensuration thing interferes with each other.

On the other hand, in patent documentation 10, with the deadweight of lever 616 or pulley 618 supporting probes 602.But so, the quality of the movable part of probe 602 has become 2 times.

The driving of probe is to add coil at movable part, makes coil pass through space part at the magnetic loop of fixed part, and the electromagnetic force that the circulating current utilization produces comes method of driving better.Be to be zero,, make mensuration power certain, fast the method for sweep measuring face by carrying out focus servo in order to make focus error signal.Do not carry gap (backlash), can not bring harmful effect yet mobile linearity.But coil can not produce very big power.

That is, the method for patent documentation 10 in order to reach balance, because the quality of the movable part of probe becomes 2 times, can not be carried out problem than short scan based on coil thereby exist.Therefore, in patent documentation 10, drive probe with motor and ball-screw.But, in ball-screw is carried, though there is bad response in the bigger power of output, because cause the problem of linearity deterioration etc. when the gap of leading screw or leading screw rotation to horizontal power.

In addition, with the structure of the dead load spring-loaded in the patent documentation 2, because the characteristic of two springs that formed by the thin plate of reeling is inconsistent, so produce the power beyond the Z direction sometimes, this power makes the mobile linearity deterioration of Z axle.

Summary of the invention

Therefore, the purpose of this invention is to provide a kind of making probe that solves in the described variety of issue and lighten, improve response, and can miniaturization and and 3 d shape testing device cheaply.

In addition, as the objective of the invention is that the technical scheme of subform is put down in writing, except described purpose, solve remaining problem in the described variety of issue, provide a kind of can be in common coordinate system superhigh precision ground measure the table back of the body of thing simultaneously, can calculate the inclination at the table back side of measuring thing and the 3 d shape testing device of off-centre superhigh precision.

In order to reach described purpose, the following formation of the present invention.

(1) first mode of putting down in writing according to the technical scheme of absolute version of the present invention provides a kind of 3 d shape testing device, and it has:

First module, its in XYZ coordinate of mutually orthogonal system, to the XY direction be the Z on plane with reference to mirror, with the YZ direction be the X on plane with reference to mirror, with the XZ direction be the Y on plane with reference to mirror and the mensuration thing holding member that keeps measuring thing at least these four position component relations fix;

Unit second, it has at least: first of built-in first contact pilotage measure probe, built-in and described first contact pilotage across described mensuration thing mutually relatively second of second contact pilotage of configuration measure probe, integratedly be fixed on Zf mirror portion on described first contact pilotage, be fixed on the Zb mirror portion on described second contact pilotage and can on the Z direction, distinguish integratedly and move mensuration that described two mensuration the pop one's head in mobile devices of popping one's head in independently;

XY direction mobile device, it relatively moves described first module or described Unit second;

The XYZ coordinate that disposes on described Unit second is measured and is used generating device of laser;

The X coordinate measuring apparatus, the laser radiation that will send from described generating device of laser with reference on the mirror, according to by the reflected light of described X with reference to mirror reflection, is measured the X coordinate of described first module to described X;

The Y coordinate measuring apparatus, the laser radiation that will send from described generating device of laser with reference on the mirror, according to by the reflected light of described Y with reference to mirror reflection, is measured the Y coordinate of described first module to described Y;

Z ₁Coordinate measuring apparatus, the laser radiation that will send from described generating device of laser with reference on the mirror, according to by the reflected light of described Z with reference to mirror reflection, measure that the displacement on the Z direction is the Z of described first module in the moving of described XY direction mobile device to described Z ₁Coordinate;

Z ₂Coordinate measuring apparatus, the laser radiation that will send from described generating device of laser be to described Zf reflective mirror portion, and according to the reflected light by the reflection of described Zf reflective mirror portion, measuring described first contact pilotage is Z with respect to the displacement of described Unit second on the Z direction ₂Coordinate;

Z ₃Coordinate measuring apparatus, the laser radiation that will send from described generating device of laser be to described Zb reflective mirror portion, and according to the reflected light by the reflection of described Zb reflective mirror portion, measuring described second contact pilotage is Z with respect to the displacement on the Z direction of described Unit second ₃Coordinate;

Front-back Z coordinate computation device, its Z coordinate of obtaining the front of the described mensuration thing relative with described first contact pilotage is Zf=Z ₂+ Z ₁, be Zb=Z with the Z coordinate of the back of the described mensuration thing relative with described second contact pilotage ₃+ Z ₁

According to this structure, can be in same XYZ three-dimensional system of coordinate with Nano grade, measure simultaneously from the table back of the body (front and back) two sides with two probes as for example non-spherical lens of measuring thing, the shape of each face of non-spherical lens of not only can measuring that can practicability be can constitute, inclination and eccentric 3 d shape testing device between the two sides also can be measured.

According to second mode of the present invention, provide as the described 3 d shape testing device of first mode, to make described two measure described mensuration probe mobile device that probe moves to the Z direction, described two rail portion along two movable part channeling conducts of Z direction of measuring probe of supporting are made of same processing plane.

According to Third Way of the present invention, provide as the described 3 d shape testing device of first or second mode,

Also have:

Ball, it can remain in described mensuration thing holding member and can measure probe by described two and measure the two sides, front and back;

Aligning gear, its with described determination data coordinate transform on the XYZ direction, so that the difference minimum of the determination data of the described ball that obtains based on described mensuration probe and design load;

Offset testing agency, it will be based on the difference of the coordinate transform amount of each comfortable XY direction among the correction result of the described aligning gear position offset as the XY direction, by adding the diameter of the above ball on separately the difference of coordinate transform amount of Z direction in described correction result, detect the offset of Z direction.

According to cubic formula of the present invention, provide as the described 3 d shape testing device of Third Way,

Has operational part, it adds the above position offset on the XYZ coordinate of measuring the determination data that any one mensuration probe obtains in the probe based on described two, to make to become the determination data in same XYZ coordinate is by described two determination datas that the mensuration probe obtains

And described aligning gear also has: tilt to calculate mechanism, it measures the determination data of the described mensuration thing front that probe obtains and the determination data of the described mensuration thing back that obtained by described second probe reaches minimum with the deviation of design load separately in order to make by described first, the parallel coordinate transform of six of the matters of fundamental importance of moving and be the sense of rotation ABC axle at center of carrying out the XYZ direction with the XYZ axle, on the other hand, the difference of the value of the correction result's of the front and back that will be obtained by described aligning gear sense of rotation A, B, C axle is calculated as the inclination of front and back;

Off-centre is calculated mechanism, any face of front or back is defined as reference field, the face that is not reference field is defined as second, obtain the center of described reference field by described correction result, it for the center with described reference field of having added described second determination data behind the position offset of the described measuring point in the coordinate system of initial point, correction result according to described reference field carries out coordinate transform, calculates with respect to the off-centre of described reference field as described second with the XY coordinate at described second center of this moment.

(2) the 5th mode of putting down in writing according to the technical scheme of subform of the present invention provides the described 3 d shape testing device of arbitrary mode as the first～the cubic formula,

Described mensuration probe has:

LASER Light Source;

Lens, it accumulates on the reflective mirror that links with described contact pilotage one the laser that sends from described LASER Light Source;

Diffraction grating, it is configured in by this lens light gathering on the reflecting surface of described reflective mirror in back, the laser optical path by described reflecting surface laser light reflected, and is concentric circles, is formed on concentrically ringed center from position that described laser optical path departs from;

The first photodetector group, it receives a positive diffraction light that is generated by this diffraction grating; With

The second photodetector group, it receives the negative diffraction light that is generated by described diffraction grating,

On the other hand, on described 3 d shape testing device, also have described first photodetector group and the described second photodetector group's output focus error signal test section as focus error signal,

In described mensuration probe mobile device, based on focus error signal, make the described first mensuration probe or second measure probe and on described Z direction, move from described focus error signal test section, carry out focus servo.

According to such structure, can reduce to shorten probe.

(3) the 6th mode of putting down in writing according to the technical scheme of subform of the present invention provides as the described 3 d shape testing device of first mode,

Also have:

Tinsel, it supports the weight of described mensuration probe and movable part, and described movable part utilizes described mensuration probe mobile device, makes described probe movable on described Z direction;

Pulley, it prevents and the offset of the transverse direction of described length direction quadrature wiry, guides described tinsel simultaneously;

The dead load spring, it constitutes by being rolled into Vorticose thin plate, links by described pulley and described tinsel, and produces equiponderant tension force with described probe and described movable part in the whole zone of the movable range of described movable part.

According to such structure, when the downside of measuring thing is measured, the spring that can prevent to support probe with measure the situation that thing is interfered.

According to the 7th mode of the present invention, a kind of three dimensional shape measuring apparatus is provided,

It has:

LASER Light Source;

Lens, it accumulates on the reflective mirror that links with the contact pilotage one laser that sends from described LASER Light Source;

Diffraction grating, it is configured in by this lens light gathering on the reflective mirror reflecting surface of described reflective mirror in back, the laser optical path by described reflecting surface laser light reflected, and is concentric circles, is formed on concentrically ringed center from position that described laser optical path departs from;

Described three dimensional shape measuring apparatus constitutes output with described first photodetector group and the described second photodetector group as focus error signal, and built-in at least described lens.

According to such structure, can reduce to shorten probe.

The above is according to the present invention, because be three with reference to mirror, coordinate measuring apparatus is five, all is half of number of existing example, so probe lightens, response improves, simultaneously can realize miniaturization and, the cost of 3 d shape testing device is reduced by half.

In addition, according to a mode of the present invention, by make based on the mensuration coordinate system of two probes with reference to the mirror sharing, it is in full accord to make XYZ measure coordinate system, thereby can obtain measuring the determination data of the front-back (table back of the body two sides) of thing (for example non-spherical lens) with identical coordinate system, needn't also must measure three balls except that measuring thing as conventional example, minute also reduces by half, the essential factor that error at measurment takes place also reduces, and improves the very large effect of measuring precision so have.In other words, in existing determinator, when the table back of the body of measuring thing is measured with two probes, because the coordinate system of the table back of the body does not have the unanimity of superhigh precision, therefore can not correctly measure the inclination and the off-centre at the surface and the back side, and complex structure, maximize, compare with the device of measuring from single side face, makes extremely difficult, mode according to the present invention still, by described structure, measure the coordinate system superhigh precision unanimity of the table back of the body of thing, particularly by measure the table back side of non-spherical lens simultaneously with superhigh precision at the same coordinate system, can be correctly, superhigh precision with Nano grade is measured the surface of non-spherical lens and the inclination and the off-centre at the back side, and simple structure, can reach miniaturization,, also can play to make being easy to excellent results even compare with the device of measuring from single face.

In addition, according to the of the present invention the 5th and the 7th mode, because can reduce to shorten probe, thus making when measuring the mensuration machine that thing measures up and down, can shorten with reference to mirror and the distance of measuring thing, so can reduce the error that produces by thermal expansion or vibration.Even the mensuration machine that begins to measure from a side of measuring thing, also can obtain the probe lighting, response well reaches mensuration machine miniaturization and and effect cheaply.

And, according to the of the present invention the 6th and the formula from all directions, when the downside of measuring thing is upwards measured, can prevent to support the spring and the phenomenon of measuring the thing interference of probe, inconsistent because of the characteristic of the dead load spring that constitutes by two thin plates that are rolled into, and when having produced horizontal power with respect to lead, even with coupling position wiry to laterally departing from, also because the position of tinsel after by pulley can not depart from the horizontal, so the power of traction Z axial region only fully facing one direction always, can not bring harmful effect to the mobile linearity of Z axle.

Because prior art can not be measured inclination and off-centre between the table back side of thing, can not realize good quality, but as described above, by 3 d shape testing device of the present invention, the inclination and the off-centre of widely used lens, particularly non-spherical lens in the every field such as digital camera, Digital Video, band camera mobile phone, DVD or huge capacity compact discs of future generation, laser printer, projector, wide-angle monitor can be determined at, the quality made for the exploitation of such optics and the raising of yield rate can be realized.

In addition, even the device of the face shape of measuring thing from a side, also can reach miniaturization, cost degradation, the high precision int of mensuration machine.

Description of drawings

These purposes of the present invention and its feature can be clear and definite from the following explanation relevant with preferred implementation that accompanying drawing is carried out.In the drawings:

Fig. 1 is the front view of the 3 d shape testing device in first and second embodiment of the present invention;

Fig. 2 is the right cross sectional side view of the 3 d shape testing device in first embodiment of the present invention;

Fig. 3 A is the stereographic map (diagram of a spring among a pair of dead load spring of upside is omitted) of the 3 d shape testing device in first embodiment of the present invention;

Fig. 3 B is the local amplification stereogram of Fig. 3 A;

Fig. 3 C is used for illustrating measuring the sectional view that the mensuration thing of mensuration thing holding member that the thing mounting remains on the 3 d shape testing device of first embodiment of the present invention keeps the state on the board;

Fig. 3 D is used for illustrating that the mensuration thing of mensuration thing holding member that reference sphere is remained on the 3 d shape testing device of first embodiment of the present invention keeps the sectional view of the state on the board;

Fig. 4 A is a key diagram of measuring reference sphere in the 3 d shape testing device in the 3rd embodiment of the present invention;

Fig. 4 B is the key diagram of the initial stage determination data of the reference sphere in the 3 d shape testing device in the 3rd embodiment of the present invention;

Fig. 4 C is the key diagram of the determination data after the revisal of the reference sphere in the 3 d shape testing device in the 3rd embodiment of the present invention;

Fig. 5 A is the key diagram of the determination data of the lens in the 3 d shape testing device in the 4th embodiment of the present invention;

Fig. 5 B is the key diagram in the coordinate transform of the front surface benchmark of lens in the 3 d shape testing device in the 4th embodiment of the present invention;

Fig. 5 C is the key diagram in the coordinate transform of the rear surface of lens benchmark in the 3 d shape testing device in the 4th embodiment of the present invention;

Fig. 5 D is the block diagram of the calculation handling part of the 3 d shape testing device in the 4th embodiment of the present invention;

Fig. 6 is the part section key diagram that is illustrated in the sonde configuration in the 5th embodiment of the present invention;

Fig. 7 is the key diagram of the diffraction grating in the 5th embodiment of the present invention;

Fig. 8 A is in the integrated element of the 3 d shape testing device of the 5th embodiment of the present invention, the key diagram when reflective mirror portion is positioned at the focal position of zero degree light;

Fig. 8 B is in the integrated element of the 3 d shape testing device of the 5th embodiment of the present invention, the key diagram when reflective mirror portion is positioned at than position far away, the focal position of zero degree light;

Fig. 8 C is in the integrated element of the 3 d shape testing device of the 5th embodiment of the present invention, and reflective mirror portion is positioned at the key diagram than on the near position, the focal position of zero degree light the time;

Fig. 9 is the front view of the 3 d shape testing device in the 6th embodiment of the present invention;

Figure 10 is the structural drawing of existing superhigh precision three-dimensional measurement machine;

Figure 11 is the probe of existing three directional measuring device and the structural drawing of Z axle;

Figure 12 is the key diagram of existing three-dimensional measurement probe;

Figure 13 is the structural drawing of existing superhigh precision three-dimensional measurement machine;

Figure 14 is the structural drawing of existing 3 d shape testing device;

Figure 15 is the key diagram of the assay method of existing lens face shape;

Figure 16 A is the key diagram of existing contact probe;

Figure 16 B is the key diagram of existing another kind of contact probe.

Embodiment

Before continuing record of the present invention, in the accompanying drawings for same parts, the reference marks that mark is same.

Below with reference to the accompanying drawings, describe embodiments of the present invention in detail.

(first embodiment)

Fig. 1 is the front view that is illustrated in the structure of the 3 d shape testing device in first embodiment of the present invention, and Fig. 2 is the right cross sectional side view of observing from the right side from the cut-out back, center of Fig. 1, and Fig. 3 A and Fig. 3 B are stereographic map and partial enlarged drawing thereof.

Described 3 d shape testing device constitutes to be possessed: following stone platform 23; Side stone platform 24, it erects the rear side that the upper surface that is fixed on down stone platform 23 is set; First module A, it has the thing of mensuration holding member 98, (the Z direction is with reference to mirror with reference to mirror for Z, hereinafter to be referred as " Z is with reference to mirror ") 2, X with reference to mirror (directions X is with reference to mirror, hereinafter to be referred as " X is with reference to mirror ") 3 and Y with reference to mirror (the Y direction is with reference to mirror, hereinafter to be referred as " Y is with reference to mirror ") 4; Second unit B, it has the Zf reflective mirror 9f of portion, the Zb reflective mirror 9b of portion at least, measures probe 10 and measures probe mobile device 93; XY direction mobile device 99, it moves first module A on the XY direction; Measure the He-Ne stabilization laser instrument 38 of an example of using generating device of laser as XYZ coordinate; X coordinate measuring apparatus 27; Y coordinate measuring apparatus 36; Z ₁Coordinate measuring apparatus 35; Z ₂Coordinate measuring apparatus 28; Z ₃Coordinate measuring apparatus 37; Operational part 94 as an example of front-back Z coordinate computation device; Control part 96.In addition, the described Zf reflective mirror 9f of portion is fixed in the first contact pilotage 5f by one.In addition, the described Zb reflective mirror 9b of portion is fixed in the second contact pilotage 5b by one.And mensuration probe mobile device 93 is to drive described two devices of measuring probe 10f, 10b, and described two mensuration probes 10f, 10b are moved along the Z direction independently of one another.

XY direction mobile device 99 is configured in down on the stone platform 23, and base station 97 is moved on the XY direction.

Z is configured to be fixed on the base station 97 with reference to mirror 2, and reflecting surface is downward, and with Z direction (short transverse) quadrature (in other words, in the XYZ coordinate of mutually orthogonal system, with the XY direction is plane (reflecting surface)), base station 97 is configured on the XY direction mobile device of measuring under the thing 1 99.

X is configured on the fixation wall 3a with reference to mirror 3, this fixation wall 3a is fixed on the base station 97 and from measuring the observation of thing 1 face side and is positioned at left side (left side of the mensuration thing 1 of Fig. 1), X be configured in reference to mirror 3 on face top and that measure thing 1 an opposite side of this fixation wall 3a and with directions X quadrature (being plane (reflecting surface) with the YZ direction in other words).

Y is configured in the top of fixation wall 4a with reference to mirror 4, this fixation wall 4a is fixed on and is positioned at the rear side of measuring thing 1 on the base station 97, described Y be configured in reference to mirror 4 on face top and that measure thing 1 an opposite side of this fixation wall 4a and with Y direction quadrature (being plane (reflecting surface) with the XZ direction in other words).

For the fixing thing 1 of will measuring remains on the mensuration thing holding member 98 of measuring the word of the falling L shape in the through hole 98e that thing keeps board 98d and Z and concerns with reference to the position of mirror 4 with reference to mirror 3 and Y with reference to mirror 2 and X, these

parts

98,2,3,4 are fixed on the base station 97 by one.These are measured thing holding members 98 and Z is that fixation wall 3a and fixation wall 4a and base station 97 be called " first module A " with reference to mirror 3 and Y with reference to mirror 4 and the fixed part that also comprises them with reference to mirror 2 and X.In this first embodiment, first module A moves on the XY direction under the effect of XY direction mobile device 99.In this first module A, Z with reference to mirror 2, with the YZ direction be the X on plane with reference to mirror 3, with the XZ direction be the Y on plane with reference to mirror 4, with the mensuration thing holding member 98 that keeps measuring thing 1, this described at least four position component relation is fixed.

In addition, in the mensuration thing of measuring thing holding member 98 keeps the through hole 98e of board 98d, shown in detailed among Fig. 3 C, from the top embedding thing of mensuration support plate 1e is arranged, this is measured thing support plate 1e mounting in central through hole 1f and keeps mensuration thing 1.

XY direction mobile device 99 is made of Y objective table 22 and X objective table 21, and Y objective table 22 is configured in down on the stone platform 23, can move along the Y direction, and X objective table 21 is configured on the Y objective table 22, can move along directions X, and mounting has been fixed base station 97.

Control part 96 be connected as the lower part, that is: XY direction mobile device 99 is the not shown drive unit of X objective table 21 and the not shown drive unit of Y objective table 22; He-Ne stabilization laser instrument 38; X coordinate measuring apparatus 27; Y coordinate measuring apparatus 36; Z ₁Coordinate measuring apparatus 35; Z ₂Coordinate measuring apparatus 28; Z ₃Coordinate measuring apparatus 37; Operational part 94 as an example of front-back Z coordinate computation device; Mensuration probe mobile device 93 with focus servo mechanism 95; And integrated element 34 (semiconductor laser 31 and focusing light accepting part 34A, focusing light accepting part 34B, focusing light accepting part 34C, focusing light accepting part 34D, focusing light accepting part 34E, focusing light accepting part 34F) etc., carry out each action and control.

These three with reference to mirror promptly with reference to mirror 2, with reference to mirror 3, with reference to mirror 4, be polished and have fabulous flatness separately, these planes form the XY coordinate axis, fix with measuring thing 1 one by base station 97 grades, therefore formed the XY coordinate axis of superhigh precision of the Nano grade of the mensuration face shape that is used to measure thing 1.

In this first embodiment, measure the mensuration probe 10 of thing 1 shape from fore-and-aft direction (left and right directions of Fig. 2) scanning of measuring thing 1, be installed in as the upside of the big air bearing 11 of an example of Z pneumatic slide guide portion and the position of downside, independent separately can moving up and down.Big air bearing 11 up and down constitutes, to movable part (guide portion) 11f, the 11b of the approximate cubic tubular up and down of supporting mensuration probe 10f, 10b up and down support respectively, with respect to the shared rail portion 11g of the quadrangular that possesses four sliding guidance faces, movable part (guide portion) 11f, 11b can slide along the Z direction.When difference mensuration probe 10 up and down describes, the mensuration probe of upside is called 10f, the mensuration probe of downside is called 10b, adds that like this a literal " f " and " b " of front (upper face side is a face side) and back (following side is a rear side) is illustrated.But, in the following description, even, omit f and b particularly not distinguishing under the also passable situation of up and down mensuration probe 10.In addition, in claims, so-called " first of built-in first contact pilotage is measured probe ", be meant the either party of " the mensuration probe 10f of built-in contact pilotage 5f " and " the mensuration probe 10b of built-in contact pilotage 5b ", so-called " built-in second contact pilotage and relatively dispose second of described first contact pilotage and described second contact pilotage mutually across described mensuration thing and measure probe " is meant that " the mensuration probe 10f of built-in contact pilotage 5f " reach any the opposing party of " mensuration of built-in contact pilotage 5b pop one's head in 10b ".

Measure in the probe 10 at each, as shown in Figure 6, be built-in with: contact pilotage 5; Little slip axial region 6, described little slip axial region 6 are configured in an end of measuring probing shell 10a and link fixing with described contact pilotage 5; Little air bearing 7, described little air bearing 7 determined probing shell 10a supportings and this little slip axial region 6 of guiding can move along the Z direction with respect to measuring probing shell 10a; Spring force generation device 50, described spring force generation device 50 is made of leaf spring etc., determined probing shell 10a supporting, and will move forward and backward in the position that described little air bearing 7 is in little slip axial region 6 time, produce the spring force that little slip axial region 6 is pushed back equilibrium point; Reflective mirror portion 9, described reflective mirror portion 9 are configured in the side opposite with described contact pilotage 5 on the described little slip axial region 6; Integrated element 34, described integrated element 34 are configured in the other end of mensuration probing shell 10a and form one with semiconductor laser and focusing light accepting part; Dichronic mirror 15, described dichronic mirror 15 is configured in the bend of mensuration probing shell 10a and the semiconductor laser that sends from integrated element 34 is carried out total reflection, make He-Ne stabilization laser Fz full impregnated mistake on the other hand, described He-Ne stabilization laser Fz is that the He-Ne stabilization laser instrument 38 (with reference to Fig. 2) as an example of oscillation frequency stabilization laser instrument from the side stone platform 24 that is configured in second unit B sends; With lens 14, the 14 determined probing shell 10a supportings of described lens, and make the described He-Ne stabilization laser Fz that seen through described dichronic mirror 15 and be converged in reflective mirror portion 9 by the semiconductor laser of described dichronic mirror 15 total reflections in the mode that roughly is aggregated in focus.In addition, in described each device or parts, when difference is up and down, additional respectively f and b.That is to say, when difference up and down, be called: the 9f of reflective mirror portion of the little air bearing 7f of the little slip axial region 6f of the contact pilotage 5f of upside, the contact pilotage 5b of downside, upside, the little slip axial region 6b of downside, upside, the little air bearing 7b of downside, upside, the 9b of reflective mirror portion of downside, the integrated element 34f of upside, integrated element 34b, the upside four dichronic mirror 15f of downside, the dichronic mirror 15b of downside, the lens 14f of upside, the lens 14b of downside.

In addition, in Fig. 6, the 32nd, make diverging light change the lens of directional light into; The 8th, be used to carry out the diffraction grating that focus error signal detects; S is a mensuration face of measuring thing 1; The 48th, be used for to little air bearing 7 air fed air hoses.

Integrated element 34 for example shown in Fig. 8 A～Fig. 8 C, is made of semiconductor laser 31 and a plurality of light accepting

part

34A, 34B, 34C, 34D, 34E, 34F as an example of LASER Light Source.On a plurality of light accepting part 34A of described

integrated element

34,34B, 34C, 34D, 34E, 34F, be connected with the focus servo mechanism 95 that measures probe mobile device 93.

Measuring probe mobile device 93 roughly is made of linear motor driving device 43 and coil 13 (13f, 13b), described linear motor driving device 43 is as an example of the mensuration probe drive device of a part that constitutes focus servo mechanism 95, described coil 13 (13f, 13b) is configured in the magnetic loop 12, and produce faraday's power by circulating current, the movable part 11 (11f, 11b) that makes supporting measure the big air bearing 11 of probe 10 integral body by linear motor driving device 43 moves on the Z direction along rail portion 11g respectively.

Described focus servo mechanism 95 is made of focus error signal test section 42 and described linear motor driving device 43, described focus error signal test section 42, be connected in a plurality of light accepting

part

34A, 34B, 34C, 34D, 34E, 34F, to become focus error signal from the signal transition of light accepting

part

34A, 34B, 34C, 34D, 34E, 34F, the focus error signal of described linear motor driving device 43 error signal of self-focusing in the future test sections 42 is transformed into electric current.By producing faraday's power to described coil 13 (13f, 13b) circulating current from described linear motor driving device 43, the movable part 11 (11f, 11b) that makes supporting measure the big air bearing 11 of probe 10 integral body moves respectively in the Z direction along rail portion 11g, thereby carries out focus servo.In addition, when difference is up and down, additional respectively f and b.That is to say, when difference up and down, be called: the coil 13f of the magnetic loop 12f of upside, the magnetic loop 12b of downside, upside, the coil 13b of downside.

As an example, when contact pilotage 5 joins with mensuration thing 1 with the small mensuration power about 0.15mN, set the position of lens 14, at this so that described semiconductor laser roughly focuses in reflective mirror portion 9 with respect to the shell 10a that measures probe 10.By the reflected light of reflective mirror portion 9 reflection, turn back to semiconductor laser and focus on the integrated element 34 of light accepting part light accepting part, be specially a plurality of light accepting part 34A, 34B, 34C, 34D, 34E, 34F.If make by XY direction mobile device 99 and to measure thing 1 and move on the XY direction, then because height changes along the mensuration face of measuring thing 1, so the contact pilotage 5 that contacts with the mensuration face moves up and down, so reflective mirror portion 9 also moves up and down.At this moment, owing to distributing, the light that turns back to the described semiconductor laser of a plurality of light accepting part 34A, 34B, 34C, 34D, 34E, 34F from 9 reflections of reflective mirror portion changes, thereby will become focus error signal from the signal transformation of light accepting part 34A, 34B, 34C, 34D, 34E, 34F by focus error signal test section 42, further focus error signal is transformed into electric current, to coil 13 circulating currents by linear motor driving device 43.Coil 13 is because by in the magnetic loop 12, so produce and the proportional faraday's power of electric current.The result is that movable part 11f, the 11b of supporting mensuration probe 10 integral body is mobile on the Z direction along the rail portion 11g of big air bearing 11.This is called " focus servo ".

Measure probe 10 and come balance to measure the weight of probe 10 self by a pair of dead load spring 17, this a pair of dead load spring 17 is to make its structure of configuration relatively after the spring material with thin plate is rolled into vortex shape, and with respect to flexible and produce roughly certain spring force.

Contact pilotage 5 along the mensuration face S that measures things 1 on the Z direction when mobile, because under the effect of described focus servo mechanism 95, movable part 11f, the 11b of supporting mensuration probe 10 integral body moves on the Z direction along the rail portion 11g of big air bearing 11, therefore in the time of will moving forward and backward in the position of the little slip axial region 6 in described little air bearing 7 places, the spring force by 50 generations of spring force generation device that pushes back equilibrium point is roughly certain, so mensuration power is also roughly certain.

Dispose described two by

movable part

11f, 11b and

measure probe

10f, 10b,, thereby can measure the mensuration face S of the table back of the body (in Fig. 1 etc. about) of described mensuration thing 1 so that

mutual contact pilotage

5f, 5b are relative along the Z direction in described big air bearing 11.

Five He-Ne stabilization laser Fz from He-Ne stabilization LASER Light Source 38 is sent use as follows.In addition, in order to form five He-Ne stabilization laser Fz that send from He-Ne stabilization LASER Light Source 38, also can dispose five LASER Light Source, perhaps, also can dispose the LASER Light Source below or four, make laser branch, form five He-Ne stabilization laser Fz of total from LASER Light Source.

First the He-Ne stabilization laser Fz that sends from He-Ne stabilization LASER Light Source 38 shines the reflecting surface (with the face of measuring thing 1 an opposite side) of X with reference to mirror 3, is 25 with reference to the reflected light of the reflecting surface of mirror 3 reflection through the X interferometric optical by X, the X coordinate measuring unit (X coordinate laser length measurement unit) 27 that is used as an example of X coordinate measuring apparatus receives, based on the laser that receives, measure the X coordinate of described first module A by X coordinate measuring unit 27.At this because regard X as complete plane with reference to mirror 3, so measure X with reference to the X coordinate of mirror 3 also just meaning measure the X interferometric optical be 25 and X with reference to the addendum modification of the distance X between the reflecting surface of mirror 3 (with reference to figure 1).

Equally, second the He-Ne stabilization laser Fz that sends from He-Ne stabilization LASER Light Source 38 shines Y with reference on the mirror 4, be used as Y coordinate measuring unit (Y coordinate laser length measurement unit) 36 receptions of an example of Y coordinate measuring apparatus with reference to the reflected light of mirror 4 reflections by Y, based on the laser that receives, measure the Y coordinate of described first module A by Y coordinate measuring unit 36.Because regard Y as complete plane with reference to mirror 4, also just mean mensuration reflective mirror and Y addendum modification with reference to the distance Y between the reflecting surface of mirror 4 (with reference to figure 2) so measure the Y coordinate.

On the other hand, the 3rd He-Ne stabilization laser Fz from He-Ne stabilization LASER Light Source 38 is sent shines on the described Zf reflective mirror 9f of portion, according to the reflected light that is reflected by the described Zf reflective mirror 9f of portion, by Z ₂The described first contact pilotage 5f of coordinate measuring apparatus 28 mensuration is Z with respect to the displacement on the Z direction of described second unit B ₂Coordinate.More particularly, the 3rd He-Ne stabilization laser Fz, 16f reflects by reflective mirror, shines the 9f of reflective mirror portion, is reflected by reflective mirror 16f once more by the reflected light of the 9f of reflective mirror portion reflection, is used as Z ₂The Z of one example of coordinate measuring apparatus ₂Coordinate measuring unit (Z ₂Coordinate laser length measurement unit) 28 receives, pass through Z based on the laser that receives ₂The Z of the reflective mirror 9f of portion is measured in coordinate measuring unit 28 ₂Coordinate.Measure Z ₂Coordinate also just meaning measure reflecting surface from the reflecting surface of reflection reflective mirror 16f to the 9f of reflective mirror portion apart from Z ₂The addendum modification of (with reference to Fig. 2).

The 4th the He-Ne stabilization laser Fz that sends from He-Ne stabilization LASER Light Source 38 shines on the described Zb reflective mirror 16b of portion, according to the reflected light that is reflected by the described Zb reflective mirror 16b of portion, by Z ₃The described second contact pilotage 5b of coordinate measuring apparatus 37 mensuration is Z with respect to the displacement on the Z direction of described second unit B ₃Coordinate.More particularly, the 4th He-Ne stabilization laser Fz, penetration sees through mirror 24j and is reflected by reflective mirror 16b, be radiated at the 9b of reflective mirror portion, the laser that is radiated at the 9b of reflective mirror portion is reflected by the 9b of reflective mirror portion, this reflected light is reflected by reflective mirror 16b once more, and is reflected through mirror 24j reflection, is used as Z ₃The Z of one example of coordinate measuring apparatus ₃Coordinate measuring unit (Z ₃Coordinate laser length measurement unit) 37 receives, pass through Z based on the laser that receives ₃The Z of the reflective mirror 9b of portion is measured in coordinate measuring unit 37 ₃Coordinate.Measure Z ₃Coordinate also just meaning measure reflecting surface from the reflecting surface of reflection reflective mirror 16b to the 9b of reflective mirror portion apart from Z ₃The addendum modification of (with reference to Fig. 2).

At this, because measuring point and the 9f of reflective mirror portion, the 9b of

contact pilotage

5f, 5b front end are the structure of one, so even have the focus servo error, also without any error at measurment at described focus servo mechanism 95 places.

The 5th He-Ne stabilization laser Fz from He-Ne stabilization LASER Light Source 38 is sent shines described Z with reference on the mirror 2, according to the reflected light that is reflected with reference to mirror 2 by described Z, by Z ₁Coordinate measuring apparatus 35 measures that the displacement on the Z direction is the Z of described first module A in the moving of described XY direction mobile device 99 ₁Coordinate.More particularly, described the 5th He-Ne stabilization laser Fz after reflective mirror 20 reflection, is the reflecting surface reflection by Z with reference to the lower surface of mirror 2, reflexes to once more on the reflective mirror 20, is used as Z ₁The Z of one example of coordinate measuring apparatus ₁Coordinate measuring unit (Z ₁Coordinate laser length measurement unit) 35 receives, pass through Z based on the laser that receives ₁ Determination unit 35 is measured the Z of described first module A ₁Coordinate.Measure Z ₁Coordinate, also just meaning measure from the reflecting surface that is fixed on down the reflective mirror 20 on the stone platform 23 to Z with reference to the reflecting surface of mirror 2 apart from Z ₁The addendum modification of (with reference to Fig. 1 and Fig. 2).

In addition, make probe 10 and move, carry out the center (center goes out) of finding out described later simultaneously with respect to measuring thing 1, be positioned at the center of measuring thing 1 at probe 10 after, with X coordinate, Y coordinate, Z ₂Coordinate, Z ₃Coordinate, Z ₁Coordinate makes zero, and measures distance X, distance Y then, apart from Z ₂, apart from Z ₃, apart from Z ₁Addendum modification separately.

As mentioned above, keep the mensuration thing holding member 98 and the X that measure thing 1 to fasten with reference to the pass, position that mirror 2 is fixed on one with reference to mirror 4 and Z, form the XY coordinate axis, and constitute first module A with reference to mirror 3 and Y.This first module A, one moves on the XY direction under the effect of X objective table 21 and Y objective table 22, is that Nano grade hardly may but make the mobile linearity of X objective table 21 and Y objective table 22.Its reason is, on the addition calculation basis of the linearity of the circularity of the rolling bearing that X objective table 21 and Y objective table 22 use respectively and guiding piece, and on Y objective table 22 mounting X objective table 21, follow mobile loading center also to change, two parts produce etc. sometimes relatively a little.

Therefore, even X objective table 21 and Y objective table 22 are owing to pitching (pitching) or vacillate now to the left, now to the right (yawing) produces inclination, do not form by X objective table 21 and Y objective table 22 owing to the XY coordinate axis yet, but form with reference to

mirror

2,3,4 by three, and be the structure of on the axle of the measuring point of measuring thing 1, measuring XYZ coordinate, so can make error at measurment minimum.

On the other hand, the Z coordinate axis by these with reference to

mirror

2,3,4 decision, but by the linearity decision of the rail portion 11g of big air bearing 11.Little air bearing 7 can move up and down as described like that hardly.

Big air bearing 11 because sliding guidance face and the reflective mirror of its rail portion 11g are same, can be made high flatness by polishing, so can make the mirror plane degree of mobile linearity near Nano grade.In addition, big air bearing 11 can be designed to have with respect to tilting force the structure of higher rigidity.But if in moving inclined to one side loading is arranged, big air bearing 11 will be created in the inclination on the Nano grade.Therefore, roughly center of gravity place at movable part 11f, the 11b of big air bearing 11, support movable part 11f, the 11b of big air bearing 11 respectively with a pair of

dead load spring

17f, 17b, by on the Z direction, driving roughly center of gravity, can be designed to eliminate as far as possible the structure of the inclination in moving with

coil

13f, 13b.

Little air bearing 7 and the little slip axial region 6 that slides therein are small air bearing of the unexistent degree of other similar examples.The quality of

movable part

11f, 11b has only 0.2 gram.Thus, even the small like this mensuration power of 0.15mN (15mg) also can realize the acceleration responsive of enough measuring.

The mensuration that regards to the Z coordinate down describes.

Be fixed on Z on the base station 97 integratedly with reference to mirror 2 with mensuration thing holding member 98 that keep to measure thing 1, under the effect of XY direction mobile device 99, on the XY direction, move, but be fixed on reference to the reflective mirror 20 mirror 2 below on time stone platform 23 and can not move at Z.As mentioned above, from first laser of He-Ne stabilization laser Fz branch, after reflective mirror 20 reflections,, turn back to Z by the reflecting surface reflection of Z with reference to mirror 2 ₁ Determination unit 35 is by Z ₁Determination unit 35 is measured Z ₁Coordinate.Because regard Z as complete plane with reference to mirror 2, so measure Z ₁Coordinate, measure the mobile linearity of X objective table 21 and Y objective table 22 exactly.

The 4th laser Fz of branch is that the displacement of the Zf reflective mirror 9f of portion on the Z direction of probe 10f on measuring is Z ₂(promptly descend the displacement of stone platform 23 and side stone platform 24 with respect to the fixed part of 3 d shape testing device is Z to coordinate ₂Coordinate) utilizes the time.The 5th laser of branch is that the displacement of the Zb reflective mirror 9b of portion on the Z direction of probe 10b under measuring is Z ₃(promptly descend the displacement of stone platform 23 and side stone platform 24 with respect to the fixed part of 3 d shape testing device is Z to coordinate ₃Coordinate) utilizes the time.The Z coordinate of the front of the described mensuration thing 1 relative with the described first contact pilotage 5f, the top Z coordinate measuring data Zf that for example measures thing 1 is by Z ₂+ Z ₁Try to achieve, the Z coordinate of the back of the described mensuration thing 1 relative with the described second contact pilotage 5b, the following Z coordinate measuring data Zb that for example measures thing 1 is by Z ₃+ Z ₁Try to achieve.This calculates as shown below, is undertaken by the operational part 94 as an example of front-back Z coordinate computation device.Operational part 94 is by control part 96 and X coordinate measuring apparatus 27 and Y coordinate measuring apparatus 36 and Z ₁Coordinate measuring apparatus 35 and Z ₂Coordinate measuring apparatus 28 and Z ₃Coordinate measuring apparatus 37 connects, and each coordinate measuring data are input in the operational part 94.On the other hand, the data that obtain at operational part 94 can be by control part 96 from output unit 90 outputs (for example, in display etc. demonstration or print with printing equipment).The XY coordinate all is shared at upside and the downside of measuring thing 1.In addition, in output unit 90, can export (for example, in display etc., show or print) various operation results in other embodiments etc. with printing equipment.

Described X coordinate, Y coordinate, Z ₁Coordinate, Z ₂Coordinate, Z ₃Coordinate, the determination data (measured value) that amounts to five coordinates is input in the control part 96 at interval simultaneously with certain hour.According to value, calculate Z by operational part 94 as the determination data of the Zf coordinate of the Z coordinate on the surface of measuring thing 1 to control part 96 input ₂The determination data of coordinate and Z ₁The determination data sum of coordinate; Determination data as the Zb coordinate of the Z coordinate at the back side of measuring thing 1 calculates Z by operational part 94 ₃The determination data of coordinate and Z ₁The determination data sum of coordinate obtains determination data row (X by operational part 94 _i, Y _i, Zf _i, Zb _i).At this, measure the determination data on thing 1 surface and classify (X as _i, Y _i, Zf _i), measure the determination data at thing 1 back side and classify (X as _i, Y _i, Zb _i).At this, be 1,2 at i ... the time, expression be the measured value of importing at interval with certain hour.For example, at i=1,2 o'clock, the determination data row of measuring thing 1 surface were (X ₁, Y ₁, Zf ₁), (X ₂, Y ₂, Zf ₂), the determination data row of measuring thing 1 back side are (X ₁, Y ₁, Zb ₁), (X ₂, Y ₂, Zb ₂).

To comprise that the part of measuring probe 10 and big air bearing 11 grades is called " second unit B ", in this first embodiment, first module A is positioned on X objective table 21 and the Y objective table 22, under the effect of XY direction mobile device 99, on the XY direction, move, but it is opposite, can also constitute first module A is fixed on side stone platform 24 and following stone platform 23 fixed parts such as grade, on the other hand second unit B is positioned on X objective table 21 and the Y objective table 22, drives second unit B by XY direction mobile device 99 and on the XY direction, move.

Before the 3 d shape testing of mensuration thing 1 begins, leave the mensuration face S that measures thing 1 owing to measure contact pilotage 5f, the 5b of thing about in the of 1, so do not carry out described focus servo.Measuring on the probe 10, though it is not shown but the position detector of Z direction is installed, position signalling from this position detector, become by the operator and stir the command value that manual drives changes with dial plate, under the control of control part 96, by linear motor driving device 43 mensuration probe 10 is moved (in other words on the Z direction, based on stir the input information that manual drives generates with dial plate by the operator, drive linear motor driving device 43, the position that the mensuration face S that makes the end of measuring probe 10 move to and measure thing 1 approximately joins).Be referred to as " position servo ".

When contact pilotage 5 not being applied mensuration power, the deadweight of little slip axial region 6 is only by 50 supportings of spring force generation device.At this moment, on the Z direction, lens 14 are carried out the position adjustment with respect to measuring probing shell 10a in advance, make reflective mirror portion 9 leave about 10 microns of focal positions, be in the position of the focus that staggers that departs from.For sensitivity detects focus error signal well, as shown in Figure 6, make semiconductor laser be injected into the whole of lens 14 openings from integrated element 34, but because the He-Ne stabilization laser Fz that the Z coordinate measuring is used injects with the beam diameter thinner than the opening of lens 14, even so Z reflective mirror portion 9 (Zf reflective mirror 9f of portion or the Zb reflective mirror 9b of portion) be positioned at the depth of focus dark, with stagger position about 10 microns of focus, also can measure the Z coordinate fully according to reflected light.

Measure the mensuration of the 3D shape of thing 1, be to be installed in the through hole 98e that the mensuration thing of measuring thing holding member 98 keeps board 98d with measuring thing 1, in order to make contact pilotage 5 reach the approximate center of measuring thing 1, mobile X objective table 21 or Y objective table 22, stir described manual drives dial plate, make

contact pilotage

5f, 5b up and down near the mensuration face S up and down that measures thing 1, so that both gaps are in 5mm.

Then, press the focusing button of measuring probe mobile device 93, remove, switch to automatic control, thereby contact pilotage 5 is slowly close to the mensuration face S that measures thing 1 based on the manual drives of described manual drives with dial plate by the operator.Focus error signal keeps certain voltage, and it is monitored.As mentioned above, contact pilotage 5 is close to the mensuration face S that measures thing 1 lentamente, behind the mensuration face S of contact pilotage 5 contact measurement things 1, because reflective mirror portion 9 is to the focus direction motion of semiconductor laser under the effect of the mensuration power of contact pilotage 5, so when going out reflective mirror portion 9 to the focus direction motion of semiconductor laser according to the change-detection of focus error signal by calculation portion (in other words, if reflective mirror portion 9 arrives near the focal position), position servo is switched to focus servo.Like this, till the focus error signal vanishing, under the control of control part 96, mensuration probe 10 is moved by linear motor driving device 43.This is the state that applies focus servo.

Then, find out the center automatically by operational part.。So-called this found out the center automatically, is meant that measuring thing 1 be under the situation of spheroid, lens or lens die, mobile X objective table 21 or Y objective table 22, the summit of thing 1 is measured in search, with the summit that searches as measuring initial point.This principle is put down in writing in patent documentation 6, and elusive part in the record is in this simple explanation.

For the purpose of simplifying the description, in Figure 15, the mensuration face S that will measure thing 1 (601 among Figure 15) is made as sphere.The coordinate measuring data of the initial position of

contact pilotage

5f, 5b are made as S.(0,0), the coordinate measuring data of vertex position of establishing the mensuration face S of the mensuration thing of desiring to ask 1 are S ₁(Xa, Za).

Then, be determined at the coordinate measuring data S of initial position by the 3 d shape testing device of described first embodiment.The point (X of front and back ₁, Z ₁) and (X ₁, Z ₂).Like this, the X coordinate Xa of the vertex position of the mensuration face S of the mensuration thing of being asked 1 uses formula

[mathematical expression 1]

Xa＝R·(Z ₂-Z ₁)÷((2X ₁) ²+(Z ₂-Z ₁) ²) ^1/2

By operational part 94 can in the hope of.In addition, in patent documentation 6, also can use approximate more formula

[mathematical expression 2]

Xa＝R·(Z ₂-Z ₁)÷(2X ₁)

Try to achieve by operational part 94.Wherein, " R " is for measuring the radius of thing.

Automatically finding out the center is to be undertaken by any one determination data up and down of measuring thing 1.Automatically find out the result at center as this, contact pilotage 5 is positioned at the center of the mensuration face S that measures thing 1.By operational part 94, with X coordinate measuring data and Y coordinate measuring data and Z ₂Coordinate measuring data and Z ₃The coordinate measuring data are measured initial point after making zero respectively.In addition, by operational part 94 the constant mechanical origin of origin position being set, can will be that the location records of the mensuration initial point in the coordinate system at center is in the not shown memory portion that is connected with operational part 94 with this mechanical origin by operational part 94 in advance.

Then, divide a word with a hyphen at the end of a line to measuring action.By XY direction mobile device 99 mensuration thing 1 is moved in the XY direction along the path that desire is measured from measuring initial point, simultaneously by operational part 94 acquisition X coordinate measuring data and Y coordinate measuring data and Z ₂Coordinate measuring data and Z ₃The coordinate measuring data.

When the mensuration action was finished, under the effect of XY direction mobile device 99, mensuration thing 1 turned back to the initial position on the XY direction, and when the operator pressed the focusing button, contact pilotage 5 left the mensuration face S up and down of mensuration thing 1 under operational part 94 effects.

More than, according to the 3 d shape testing device of described first embodiment, be Z with reference to mirror 2 and X with reference to mirror 3 and Y with reference to mirror 4 with reference to mirror, add up to three with reference to mirror; The laser length measurement unit is X coordinate measuring apparatus 27 and Y coordinate measuring apparatus 36 and Z ₁Coordinate measuring apparatus 35 and Z ₂Coordinate measuring apparatus 28 and Z ₃Coordinate measuring apparatus 37 adds up to five; No matter which all is half of quantity of conventional example, so the cost of device reduces by half, since the common uses of two

probe

10f, 10b measure coordinate systems with reference to mirror, so it is in full accord to make XYZ measure coordinate system, can obtain measuring the determination data of face S by the same coordinate system as the front and back of the non-spherical lens of an example of measuring thing 1.Therefore, owing to needn't also need to measure three balls except that measuring thing as conventional example, minute also reduces by half, and the factor that error at measurment produces also reduces, so can also be improved the very big effect of measuring precision.

(second embodiment)

In the first embodiment, structure itself for big air bearing 11 has carried out detailed especially explanation, but, in the 3 d shape testing device of second embodiment of the present invention, move described two guide portion of measuring the described mensuration probe mobile device 93 of

probe

10f, 10b, be the rail portion 11g of big air bearing 11 to the Z direction, constituting by same processing plane up and down along the Z direction.Be specially, as shown in Figure 1, the rail portion 11g of big air bearing 11 is in order to prevent and measure that thing 1 interferes with each other and the part (with reference to 11p) of cutting away the left side of its central portion that the right of rail portion 11g is connected to one up and down with the face parallel with paper.In addition, so the rail portion 11g of air bearing 11 is owing to be that quadrangular has four faces greatly, they are being formed by same processing plane up and down.

By forming such structure, the inclination in Z-direction up and down also can be consistent with below 0.05 minute.This is 1 minute for the mensuration precision of necessity in the inclination of described top and bottom, is enough precision.

(the 3rd embodiment)

In first and second embodiment, illustrated that the direction of the coordinate axis that can make the surface that measure to measure thing 1 and the back side is in full accord.But, with the precision below 0.1 micron, make

contact pilotage

5f and 5b to being combined on the same Z axle, under different situations, be actually extremely difficult.

So, in the 3 d shape testing device in the 3rd embodiment of the present invention, shown in Fig. 4 A and Fig. 3 D, the reference sphere 91 that the spheroid degree is good is bearing in the through hole 98e that the mensuration thing of measuring thing holding member 98 keeps board 98d, the reference sphere 91 that is supported is measured from reference sphere 91 surfaces (upper surface or front) and the back side (lower surface or the back) that are supported by contact pilotage 5 and 5b.As reference sphere 91, the spheroid degree is can making than being easier to of 30nm.In addition, in the mensuration thing of measuring thing holding member 98 keeps the through hole 98e of board 98d, replacement keeps measuring the mensuration thing support plate 1e of thing 1 in central through hole 1f place mounting, shown in detailed among Fig. 3 D, by embedding reference sphere 91 is entrenched in two support plate 91a, the support plate 91b that central through hole 91f engages maintenance, thereby reference sphere 91 is bearing on the mensuration thing holding member 98 from the top.

Suppose, shown in Fig. 4 B, contact pilotage 5f up and down and 5b position on the directions X size d that staggers.Two

probe

10f and 10b are under the drive of XY direction mobile device 99, and the surface and the back side to reference sphere 91 is scanned on the XY direction simultaneously, is located by described 3 d shape testing device.Determination data row as the surface of reference sphere 91 obtain (X _i, Y _i, Zf _i), and obtain (X as the determination data row at the back side of reference sphere 91 _i, Y _i, Zb _i).Before reference sphere 91 is measured, carry out the described center of finding out automatically by the determination data of contact pilotage 5f.Measuring initial point all is (0,0,0), but the determination data of contact pilotage 5b departs from size d in the horizontal, as Fig. 4 B.This size d is off-centre (offset) value of directions X.

Automatically the mensuration initial point is tried to achieve simply by near the two point examination the center before mensuration in the center of finding out, in order correctly to try to achieve initial point, then, by aligning gear 89 with the determination data coordinate transform to the XYZ direction, so that measure the determination data of described reference sphere 91 and the difference of design load reaches minimum value by described

mensuration probe

10f, 10b, specifically, make reference sphere 91 determination data (measured value), reach minimum from the mean square of error root deviation (RMS:Root Mean Square) of design load.Be referred to as " correction ".Proofread and correct and be described in detail in record in the patent documentation 7.Aligning gear 89 and X coordinate measuring apparatus 27 and Y coordinate measuring apparatus 36 and Z ₁Coordinate measuring apparatus 35 and Z ₂Coordinate measuring apparatus 28 and Z ₃Coordinate measuring apparatus 37 connects.

By the correction that aligning gear 89 carries out, be meant and carry out the XYZ direction and be that the ABC axle of the sense of rotation at center amounts to 6 coordinate transform with each of XYZ direction.But, be under the rotational symmetric aspheric situation measuring thing 1, even,, amount to five so save the C direction because also do not change to C direction rotation shape around the axle of Z direction.In addition, be under the situation of sphere measuring thing 1, become XYZ direction only or ABZ direction three.

Among the correction result of aligning gear 89 each at the difference of the coordinate transform amount of the XY direction position offset as the XY direction, by proofreading and correct, correctly calculated position offset d.Utilize this position offset d that correctly calculates, by the offset testing agency 88 that is connected with aligning gear 89, for example with the determination data X of downside _iRevisal is X _i+ d, (its position offset d is the eccentricity value of Y direction equally also revisal to be carried out in the skew of Y direction.)。Then, because know the diameter of reference sphere 91 in advance, by the operational part 94 that is connected with offset testing agency 88, on the difference of the coordinate transform amount of Z direction, add the diameter of the above reference sphere 91 by in described correction result each, detect the offset on the Z direction.Do not carry out such additive operation, the radius of reference sphere 91 can be added on the determination data Zf of upside yet, from the determination data Zb of downside, deduct radius.In a word, relative poor as between the determination data Zb of the determination data Zf of upside and downside is as long as the diameter amount that enlarges described reference sphere 91 just can (the diameter amount of this reference sphere 91 be eccentricity values of Z direction).As such operation result, shown in Fig. 4 C, can obtain the determination data of the reference sphere 91 in the same coordinate system up and down.To keep the coordinate system of same initial point as absolute coordinate system by this mensuration probe 10f, 10b up and down.

In addition, for the method for the initial point unanimity that makes coordinate axis, measure the method for said reference ball 91 and also considered additive method in addition.For example, mensuration probe 10f, the 10b directly contact mutually about making, the operator also can the measuring position side-play amount from transversely using the position of microscope

adjustment mensuration probe

10f, 10b up and down while observing.Replace, can also change reference sphere 91, measure the plate of known thickness, measure the distance between

mensuration probe

10f, 10b up and down.On the known plate of thickness, stamp the mint-mark mark of following distortion, or open little through hole, about described plate, measure its position with up and down

mensuration probe

10f, 10b, also can measure the skew of the XY position of up and down

mensuration probe

10f, 10b.

(the 4th embodiment)

In Fig. 5 A～Fig. 5 C, the 3 d shape testing device of the 4th embodiment of the present invention is described.At first, when measuring thing 1 and be lens, begin explanation from the inclination at the surface of lens and the back side and eccentric definition.

The two sides that the optical axis of lens is positioned at the approximate center of mensuration face S rotate symmetrical non-spherical lens for the situation of measuring thing 1 under, because determine the front (surface) of lens and the optical axis at back (back side) singly, so so-called inclination can be described as the angle that forms between these optical axises, so-called eccentric, shown in Fig. 5 B and Fig. 5 C, when can be described as with front or back as reference field, as the coordinate of second center of another one face.

A sphere one one side rotate symmetrical non-spherical lens for the situation of measuring thing 1 under because can't determine the optical axis of a sphere side, thus with the aspheric surface side as reference field, can define the inclination or the off-centre of sphere, wherein any one party.Under the situation of two sides spherical lens, can not be defined in the inclination and the off-centre of face benchmark for mensuration thing 1.

The asymmetrical surface of revolution lens for the situation of measuring thing 1 under because also have the XY axle except described optical axis, thus two sides asymmetrical surface of revolution lens for the situation of measuring thing 1 under, also can define this inclination around the difference of the rotation angle of Z axle.

Then, inclination and the eccentric determination method to non-spherical lens describes.

Shown in Fig. 5 A, measure the front and back that thing 1 is a non-spherical lens simultaneously by described 3 d shape testing device, obtain the determination data row (X of the front of non-spherical lens by operational part 94 _i, Y _i, Zf _i) and the determination data of back row (X _i, Y _i, Zb _i).At this moment Z origin adopts at described absolute coordinates and fastens the relative coordinate system that has off-centre, so that the Z origin of this moment is the center of each face.At this moment, there are the mensuration coordinate system of front of non-spherical lens and these two coordinate systems of mensuration coordinate system of back.These coordinate systems, shared on the XY direction, only initial point differs the amount of thickness of about mensuration thing 1 on the Z direction.

Non-spherical lens is by design formula Z=f (X, Y) expression.If deduct design load Z by operational part 94 from the determination data row, with the error of each point, the front of non-spherical lens is made as Zfd _i, the back of non-spherical lens is made as Zbd _i, then by formula

[mathematical expression 3]

Zfd _i＝Zf _i-f(X _i，Y _i)

Zb?d _i＝Zbd _i-f(X _i，Y _i)

Try to achieve the error of the sum of errors back of front by operational part 94.

Carry out coordinate transform with least square method by aligning gear 89 so that the error of this each point square after the summation minimum.Be referred to as " correction ".Be (Xb, Yb, Zb, Ab, Bb, Cb) if establish the correcting value of the front of this moment for (Xf, Yf, Zf, Af, Bf, Cf), the correcting value of establishing the back, then the inclination of being asked is tried to achieve by operational part 94 according to formula (Af-Ab, Bf-Bb, Cf-Cf).

As previously mentioned, the inclination when for the rotation symmetric lens is tried to achieve by operational part 94 according to formula (Af-Ab, Bf-Bb).

The tilt quantity of this moment is by formula

[mathematical expression 4]

((Af-Ab) ²+(Bf-Bb) ²) ^1/2

Try to achieve by operational part 94.

The one side is being the situation of sphere, for example, the back is under the situation of sphere, the movable axis of the correction of back can select (Xb, Yb, Zb) or (Ab, Bb, Zb) wherein any one.When selecting (Xb, Yb, Zb), can't define inclination, but as described later, can calculate off-centre.Inclination when selecting (Ab, Bb, Zb) can be calculated in the same manner with both-sided aspherical, but can not be defined off-centre.In addition, three-dimensional coordinate system has X, Y, Z axle and around each turning axle A, B, C.When carrying out coordinate transform with correction, be not limited to make whole axle actions, if set movable axis, only movable axis is carried out coordinate transform and get final product.

Then eccentric order is asked in explanation.Measure the center of coordinate system, because carry out describedly finding out the center automatically, so be positioned at the summary center of front or back, this just thoroughly finds summit or the end point of measuring thing 1, if measure thing 1 inclination, then departs from the center of measuring thing 1.Therefore, the XY coordinate of described coordinate transform amount can be described as the center of measuring thing 1 with respect to measure coordinate system skew, the mensuration face of promptly measuring thing 1 is with respect to the off-centre of measuring coordinate system.

The off-centre of the XY direction of front and back, shown in Fig. 5 A, in measuring coordinate system, (Xf-Xb, Yf-Yb) tried to achieve by operational part 94 by formula.But,, can not be defined as off-centre because this amount changes along with the variation of the posture of lens without exception.Therefore, such as described, so-called eccentric, as Fig. 5 B and Fig. 5 C, be defined as the coordinate of second center of back when being reference field or front with front or back.As Fig. 5 B and Fig. 5 C, as reference field, off-centre changes with different faces.When being reference field with some, other face is called described " second face ".

As previously mentioned, reference field and second 's determination data, represent by different relative coordinate in the off-centre of Z direction, but because this eccentricity value is measured in advance, so by adding this eccentricity value O (position offset) by operational part 94 on the Z of second determination data coordinate, two determination datas become the determination data that is based on same XYZ coordinate thus.Be referred to as " the full determination data of eccentric revisal ".In addition, in the 4th embodiment, the described embodiment that is connected in control part 96 with aligning gear 89 and offset testing agency 88 is different, shown in Fig. 5 D, control part 96 and operational part 94 and aligning gear 89 and inclination are calculated mechanism 86 and are calculated mechanism 85 with off-centre and be connected, and the calculation process in the 4th embodiment can be implemented under the control of control part 96.

At first, in described aligning gear 89, the determination data of the back of the described mensuration thing 1 that records for the determination data of the front that makes the described mensuration thing 1 that records according to described mensuration probe 10f with according to described mensuration probe 10b, with the deviation of separately design load be minimum, that carries out the XYZ direction parallelly moves and is that the maximum of the sense of rotation ABC axle at center amounts to six coordinate transform with the XYZ axle.Then, will calculate mechanism 86 by inclination and calculate based on the inclination of the difference of the value of the correction result's of the front and back of described aligning gear 89 sense of rotation A, B, C axle as the front and back.Then, any face of former or back is reference field, not being that the face of reference field is during as second, obtain the center of reference field by described correction result, center with this reference field forms a coordinate system as initial point, second determination data for the position offset that has added the described measuring point in this coordinate system, correction result according to described reference field carries out coordinate transform, the XY coordinate at second center of this moment as described second off-centre with respect to described reference field, is calculated mechanism 85 by off-centre and calculated.

For example, the centre coordinate of the back in the full determination data of eccentric revisal when face is as reference field afterwards usefulness (Xb ,-Yb ,-Zb) expression, precedence centre coordinate usefulness (Xf ,-Yf ,-Zf+O) expression.At first, with back correcting value (Xb, Yb, Zb) it is carried out coordinate transform by aligning gear 89.So the centre coordinate of back becomes (0,0,0), the precedence centre coordinate becomes (Xb-Xf, Yb-Yf, Zb-Zf+O).

Then, calculate mechanism 86 by inclination and make this precedence centre coordinate, the rotation angle around X-axis and Y-axis (Ab, Bb) in the correcting value of rotation back.In order to simplify, establish

(Xb-Xf、Yb-Yf、Zb-Zf+O)＝(x，y，z)，(Ab、Bb)＝(A，B)，

Then postrotational second coordinate (u, v, w), according to the formula of coordinate transform

[mathematical expression 5]

u＝xcosB+zsinB，

v＝xsinAsinB+ycosA-zsinAcosB，

w＝-xcosAsinB+ysinA+zcosAcosB，

Calculating mechanism 86 by inclination can be in the hope of tilting.That is to say, the inclination as the front and back of the difference of the value of the correction result's of this front and back sense of rotation A, B, C axle can be calculated mechanism 86 by inclination and calculated.

Second off-centre with respect to the reference field of being asked is that (u, v), offset utilizes formula

[mathematical expression 6]

(u ²+v ²) ^1/2

Can calculate mechanism 85 by off-centre tries to achieve.That is to say, with any one side of front or back as reference field, to not that the face of reference field is during as second, obtain the center of reference field by described correction result, center with this reference field forms a coordinate system as initial point, second determination data for the position offset that has added the described measuring point in this coordinate system, correction result according to described reference field carries out coordinate transform, the XY coordinate at second center of this moment as described second off-centre with respect to described reference field, is calculated mechanism 85 by off-centre and calculated.

(the 5th embodiment)

What Fig. 6 represented is the formation of the probe 10 of the 3 d shape testing device in the 5th embodiment of the present invention.Minitype pneumatic slide block at supporting contact pilotage 5 is a stickup reflective mirror portion 9 above the little slip axial region 6, and little slip axial region 6 is linked by spring force generation device 50 and little air bearing 7.

Oscillation frequency stabilization He-Ne Lasers (He-Ne stabilization laser) Fz, wavelength is 633nm, sees through the dichronic mirror 15 that this wavelength full impregnated is crossed, and in reflective mirror portion 9 (9f, 9b) reflection, turns back to original direction, at Z ₂Coordinate measuring unit (Z ₂Coordinate laser length measurement unit) 28 and Z ₃Coordinate measuring unit (Z ₃Coordinate laser length measurement unit) in 37,, measures the Z coordinate of reflective mirror portion 9 (9f, 9b) respectively by laser length measurement based on interferometric method.

Integrated element 34 in other words, at the luminous light accepting part of semiconductor laser, shown in Fig. 8 A～8C, is built-in with semiconductor laser 31 and six

photodetector

34A, 34B, 34C, 34D, 34E, 34F.Diffraction grating 8, be configured in by lens 14 optically focused on the reflecting surface of described reflective mirror portion 9 back, in the laser optical path of described reflecting surface laser light reflected, and diffraction grating 8 is concentric circles, for concentrically ringed center is formed on from the position that described laser optical path departs from, as shown in Figure 7, diffraction grating 8 forms and is arranged with the diffraction grating that a plurality of roughly concentrically ringed parts are circular-arc groove 8a.From the light that semiconductor laser 31 sends, under the effect of diffraction grating 8, the light of its about half becomes the zero degree light that directly passes through, and the half light of remaining other becomes diffraction light.The wavelength of these semiconductor lasers is about 780nm, in dichronic mirror 15 reflections to this wavelength total reflection, has only zero degree light to be injected in the reflective mirror portion 9 by lens 14 optically focused.Because diffraction light becomes converging light and diverging light, so can not be injected in the reflective mirror portion 9 by optically focused.

At the zero degree light of reflective mirror portion 9 reflections, in dichronic mirror 15 reflections, be divided into zero degree light and diffraction light once more at diffraction grating 8.Though zero degree light turns back to semiconductor laser 31 sides,, just can eliminate because back light and harmful effect that power variation etc. is brought as long as use the multi-mode semiconductor laser of anti-back light.

When reflective mirror portion 9 is positioned at the focal position of the zero degree light that penetrates from semiconductor laser 31, in Fig. 6, owing to the positive diffraction light of the zero degree light that reflects in reflective mirror portion 9 at diffraction grating 8, position at the downside of semiconductor laser 31, front at photodetector 34D～34F, promptly in the left side by optically focused, negative diffraction light is in the position of the upside of semiconductor laser 31, on the right side of photodetector 34A～34C by optically focused.That is, shown in Fig. 8 A, ± diffraction light, the circle of identical size is shone in the position of the photodetector 34A～34F about semiconductor laser 31.

In the time of on reflective mirror portion 9 is positioned at away from the position of the focal position of described zero degree light, in the position of photodetector 34A～34F, a positive diffraction light change is big, negative diffraction light diminish (with reference to Fig. 8 B).When reflective mirror portion 9 was positioned on the position of the focal position of approaching described zero degree light, in the position of photodetector 34A～34F, a positive diffraction light diminished, a negative diffraction light change big (with reference to Fig. 8 C).

Therefore, shown in Fig. 8 A～Fig. 8 C, in the photodetector that is divided into 34A, 34B, 34C, 34D, 34E, 34F, can be with (output signal of the output signal of the output signal of photodetector 34A+photodetector 34C+photodetector 34E)-(output signal of the output signal of the output signal of photodetector 34B+photodetector 34D+photodetector 34F) as focus error signal.

This structure is compared with the conventional example of Figure 12, not only the length of light probe 10 can be shortened to below half significantly, and needn't need individually adjust the position of pin-and-hole as existing structure, can reduce cost significantly.

(the 6th embodiment)

What Fig. 9 represented is the lower portion of the 3 d shape testing device in the 6th embodiment of the present invention.Probe 10 is under the effect of the movable part 11b of big air bearing 11, can on the Z direction, move along rail portion 11g, the weight of probe 10 and movable part 11b is by upwards traction of tinsel 19, in the horizontal offset that prevents with the length direction quadrature of tinsel 19, make described tinsel 19 by to the pulley 18 of its channeling conduct and from this tinsel 19 of lateral traction, tinsel 19 is attached on a pair of dead load spring 17.

Dead load spring 17 as an example, can use the dead load spring of record in patent documentation 2 shown in Figure 11.Dead load spring 17 forms by rolling thin plate, dispose a pair ofly relative to each other, compare with volute spring, even do not extend total length, also can be on the whole at the movable range of Z direction, produce equiponderant, certain force of strain roughly with described probe 10 and described movable part 11b.

Probe 10 constitutes, because coil 13 is by the clearance portion of magnetic loop 12, so if to coil 13 circulating currents, then under the effect of electromagnetic force, movable part 11b moves up and down with respect to rail portion 11g in the Z direction along big air bearing 11, but when usually using, this electromagnetic force probe 10 deadweights 1/10th in.

Its reason is because mensuration power be little slip axial region 6 weight about 1/10th, so that the motion of little slip axial region 6 can the force of gravity acceleration is 1/10th faster.

Therefore, because the electromagnetic force supporting that 10 the weight of popping one's head in can not be produced by coil 13, so need be with the deadweight of spring traction probe 10.And, use be the almost constant dead load spring 17 of tension force at the whole regional upper spring of the movable range of Z direction.

Owing to use dead load spring 17, can the quality of probe 10 be increased when in the patent documentation 10 shown in Figure 16 A and Figure 16 B, using damper weight, just can obtain sufficient driving response based on coil 13.

In patent documentation shown in Figure 11 2, because directly be connected the dead load spring on the probe, if so the characteristic of two relative coiled springs is not quite identical, power also can be applied to transversely, the deterioration of the mobile linearity on the Z direction that therefore causes sometimes popping one's head in.

But, in the 6th embodiment, because by pulley 18 usefulness tinsels 19 traction probes 10, so the tension direction that is applied on the probe 10 is always certain, so there is not the situation that the mobile linearity of probe 10 on the Z direction worsened.

Therefore, according to the 6th embodiment, when measuring thing 1 from bottom to top, can prevent that a pair of spring 17 that supports probe 10 from interfering with mensuration thing 1, because the characteristic of two dead load springs 17 that formed by the thin plate that curls is inconsistent, and when producing horizontal power with respect to lead, even with the coupling position of tinsel 19 to lateral alternate, can or not be to lateral alternate because of the position of the tinsel 19 of tinsel 19 after by pulley 18 yet, so always fully only towards a direction, can not bring harmful effect to 10 the mobile linearitys on Z-direction of popping one's head in by the power of tinsel 19 traction movable part 11b.

In addition, by the arbitrarily embodiment of appropriate combination in described various embodiments, can play the effect that has separately.

3 d shape testing device of the present invention, can be in the same coordinate system for example carry out measuring shape in the table back side of non-spherical lens with the superhigh precision of Nano grade to measuring thing simultaneously, consequently, can realize inclination between the table back side of non-spherical lens and eccentric, the mensuration of the superhigh precision that does not have in the existing technology, with the mensuration in and the shorter time simpler than prior art, consequently, can realize showing the inclination between the back side and the volume production of eccentric few high-quality non-spherical lens, can expect camera, DVD, film, the performance that light such as band camera mobile phone are used commodity improves, miniaturization and, improve aspect such as the rate that manufactures a finished product bigger help is arranged.

The present invention has proved absolutely and the embodiment associated content with reference to accompanying drawing, but for the personnel of skilled this technology, should be understood that various distortion or correction.Such distortion or correction only otherwise break away from by the additional determined scope of the present invention of claim, should be understood to be also contained among the present invention.

Claims

1. three dimensional shape measuring apparatus, it has:

LASER Light Source (31);

Lens (14), it accumulates on the reflective mirror (9) that links with contact pilotage (5) one the laser that sends from described LASER Light Source;

Diffraction grating (8), it is configured in by in the laser optical path after this lens light gathering is on the reflective mirror reflecting surface of described reflective mirror, by described reflecting surface laser light reflected, and be concentric circles, be formed on concentrically ringed center from position that described laser optical path departs from;

The first photodetector group (34D, 34E, 34F), it receives a positive diffraction light that is generated by this diffraction grating; With

The second photodetector group (34A, 34B, 34C), it receives the negative diffraction light that is generated by described diffraction grating;