CN2769850Y - Multifunction nano laser measuring head - Google Patents
Multifunction nano laser measuring head Download PDFInfo
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- CN2769850Y CN2769850Y CN 200520069705 CN200520069705U CN2769850Y CN 2769850 Y CN2769850 Y CN 2769850Y CN 200520069705 CN200520069705 CN 200520069705 CN 200520069705 U CN200520069705 U CN 200520069705U CN 2769850 Y CN2769850 Y CN 2769850Y
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- laser
- read head
- optical read
- collimation
- light
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Abstract
The utility model relates to a multifunction nanometer laser measurement head, which is characterized in that the utility model adopts an integrated optical read head, a polar light diode in the optical read head is used as a laser source component, and after a laser beam is diffracted by a grating, detection light is formed. A collimation light source is output through a spectroscope and a collimation lens, each component is fixedly arranged in a casing, a collimation light output port is arranged on a corresponding position on the casing, and simultaneously, the utility model adopts a four-quadrant photodiode sensor which receives reflectance light through a cylindrical surface astigmatic lens in the optical read head. A dismountable objective tube is arranged on the outer part of the casing and the collimation light output port, and a hololens is arranged in the objective tube and is coaxial with collimation light. The utility model has the advantages of high precision and good stability. Operation can be carried out in a mode of hand holding, and the utility model independently has the double functions of out-of-focus error detection and laser source collimation.
Description
Technical field:
The utility model relates to nanometer measuring device, more specifically says so to be applied in laser measuring head in nanometer positioning and the topography measurement.
Background technology:
Continuous progress along with Micrometer-Nanometer Processing Technology, microcircuit, micro optical element, micromechanics and other various microstructures constantly occur, need carry out nondestructive measurement to the micro-structure surface pattern, optical probe promptly can be used for realizing non-cpntact measurement, measuring method comprises: based on optical probe contour measuring method, difference interference optical probe method, the differential interference optical probe method of confocal microscope principle, and the defocus error detection method etc.In various measuring methods, the defocus error detection method has light path advantage simple, easy to use, and its longitudinal frame can reach 1nm.But at present the defocus error pick-up unit that uses all is to adopt discrete optical device to assemble, non-integrated version limited cost reduction, be unfavorable for the raising of precision also being not easy to adopt hand-held working method.
The collimation laser light source is applied in multiple occasion, and the defocus error pick-up unit needs the collimation laser light source no exceptionly, but also do not have up to now a kind of also can be independently as the defocus error pick-up unit of collimation laser light source.
Existing collimated light source comprises, gas laser, and He-Ne laser instrument for example, the CO2 laser instrument, semiconductor laser or the like, He-Ne and CO2 laser instrument volume are big, the trigger voltage height, the thermal value height, power consumption is big, is unfavorable for being integrated in miniature precision measurement system.And that semiconductor laser has a volume is little, low in energy consumption, operating voltage is low, power supply is simple, advantage such as can directly modulate, because the characteristic of semiconductor laser itself, the output beam of all semiconductor lasers is not complete sphere waveform, forms elliptical beam, for obtaining circular application collimated light, need carry out shaping to light beam, general semiconductor collimation laser device is the collimation lens that adds that behind semiconductor laser a focal power is identical, is sub-circular in a very little segment distance, and distance increases, light beam becomes ellipse gradually, the distance of using is quite little, and because the luminous power control accuracy is not high, makes semiconductor laser after use a period of time, light intensity occurs and die down gradually, even burn.
Summary of the invention:
The utility model is for avoiding the existing weak point of above-mentioned prior art, the multifunctional nano laser measuring head of a kind of precision height, good stability is provided, this measuring head can adopt hand-held mode to carry out work, independently possesses the dual-use function of defocus error detection and collimation laser light source.
The technical scheme that the utility model technical solution problem is adopted is:
Design feature of the present utility model is to adopt integrated optical read head, with aurora diode in its optical read head as the LASER Light Source device, laser beam forms behind optical grating diffraction and detects light, again through spectroscope and collimation lens output collimated light source, described each device is packed in the housing, and the collimated light output port is set on the housing correspondence position; Having of adopting simultaneously receives catoptrical four-quadrant photodiode sensor through the cylinder astigmatic lens in the described optical read head; In the outside of housing, be positioned on the described collimated light output port, the removable jew objective tube is set, holographic lens is arranged in the objective tube, and is coaxial with collimated light.
Compared with the prior art, the beneficial effects of the utility model are embodied in:
1, the optical read head in the utility model is the ingenious application to existing laser disc read head, removes voice coil motor wherein.Laser disc read head manufacturer can focus to minimum luminous point in order to make collimated laser beam behind holographic condenser lens, so that correctly read the data track of high-density capacity, necessarily require emitting laser to have extremely good high stable power, high collimation, and keep long distance to be still circular collimated light beam.Therefore, semiconductor collimated light source of the present utility model is except that the every advantage with general semiconductor laser, add that manufacturer's high precision lens orientation structure and calibrating semiconductor laser instrument elliptical beam are the change focal power collimation lens of circular light beam, and can be by power control circuit is set, obtain high stable power, the high depth of parallelism, long distance keeps circular high-quality semiconductor collimation laser device.
2, the utility model is because optical device integrated, and whole device volume is little, in light weight, can adopt hand-held working method, as hand-held vibration survey in industry and experimental study field.
3, the utility model is provided with the removable jew objective tube, can realize conversion, one-object-many-purposes in the measurement of micro element three-dimensional appearance and between as two kinds of functions of collimation laser light source by the mounting or dismounting objective tube.
Description of drawings:
Fig. 1 is the utility model structural representation.
Fig. 2 is the utility model light path principle figure.
Fig. 3 is the utility model power control circuit schematic diagram.
Fig. 4 amplifies the computing circuit schematic diagram for the utility model signal.
Number in the figure: 1 laser diode, 2 gratings, 3 spectroscopes, 4 catoptrons, 5 collimation lenses, 6 turnover catoptrons, 7 housings, 8 detachable objective tubes, 9 holographic object lens, 10 measured pieces, 11 cylinder astigmatic lenses, 12 four-quadrant photodiode sensors, 13 collimated light output ports.
Embodiment:
Referring to Fig. 1, Fig. 2, adopt integrated optical read head in the present embodiment measuring head, as the LASER Light Source device, laser beam forms behind grating 2 diffraction and detects light with laser diode 1 in its optical read head, again through spectroscope 3 and collimation lens 5 output collimated light sources.
In concrete the enforcement, above-mentioned each device all is packed in the housing 7, on housing 7 correspondence positions collimated light output port 13 is set, and this structure setting has promptly formed the collimation laser light source.
As shown in Figure 1 and Figure 2, in the present embodiment, also having of adopting simultaneously receives catoptrical four-quadrant photodiode sensor 12 through catoptron 4, cylinder astigmatic lens 11 in the optical read head.In the outside of housing 7, be positioned on the collimated light output port 13, removable jew objective tube 8 is set, holographic object lens 9 are arranged in the detachable objective tube 8, and are coaxial with collimated light, and this structure setting has promptly formed micro element measuring three-dimensional morphology head.
In order to make one-piece construction more compact, in the present embodiment, in housing 7, be positioned at after the collimation lens 5,90 degree turnover catoptrons 6 are set, such structure setting can make the device profile thinner.
Referring to Fig. 1, Fig. 2 and Fig. 3, the laser diode 1 in optical read head externally provides three terminals (shown in Figure 2), is respectively that signal input end LD, light detect feedback signal output terminal PD and earth terminal GND.At this laser diode 1 laser diode automatic optical power control circuit (shown in Figure 1) is set in the present embodiment, so that optical read head sends stable laser, shown in Fig. 3, the laser diode automatic optical power control circuit is made of operational amplifier U9 and power discharging transistor Q1, the positive input of operational amplifier U9 is the reference signal end, the light that connects laser diode 1 with the reverse input end of operational amplifier U9 detects feedback signal output terminal PD, and the collector of power discharging transistor Q1 meets the signal input end LD of laser diode 1 by inductance L 1.Shown in the figure, constitute potential regulator, reverse follower U8 is set, regulate the positive input reference signal of the output of reverse follower U8 by rheostat R15 as computing amplification U9 by resistance R 14, R16 and rheostat R15.This reference signal and PD signal carry out additive operation and amplify in operational amplifier U9, and luminous by power discharging transistor Q1 driving laser diode 1.When the Output optical power of laser diode 1 influenced and when changing, carry out FEEDBACK CONTROL by operational amplifier U9 and power discharging transistor Q1, automatically regulate the size of current of driving laser diode, make the luminous power of laser diode constant, reduce the interference and the influence of environment.Thereby realize utilizing the PD end signal to judge output power of laser, and be feedback sources thus, provide the power of the size of current FEEDBACK CONTROL of LD end to control automatically.
Referring to Fig. 4, in concrete the enforcement, voltage signal A, B, C, D output terminal at the four-quadrant photodiode sensor of optical read head are provided with the four-quadrant signal and amplify computing circuit, amplify U2, U3 by operational amplifier U1 with the two-stage that is serially connected in thereafter, and integration holding circuit U4 constitutes.Wherein, multistage amplification is to improve the stability of signal, and integration holding circuit can improve the signal to noise ratio (S/N ratio) that burnt signal is lost in output, and the feeder ear of every chip all connects a filter capacitor, to improve the anti-interference of power supply.The four-quadrant voltage signal inserts forward and reverse input end at operational amplifier U1 respectively according to the compute mode of (A+C)-(B+D), loses the output terminal output of burnt signal at integration holding circuit U4, and handles automatically by the signal of finishing of DSP signal processing system.
Measuring principle according to the defocus error detection method: with the measured piece is reflecting surface, when reflecting surface is positioned at the focal position, imaging luminous point on the four-quadrant photodiode sensor is circular, four-quadrant loses burnt signal (A+C)-(B+D) and is output as zero, when reflecting surface was in the out of focus position, it is non-vanishing that the four-quadrant of output loses burnt signal.By carrying out multistage processing and amplifying to improve the signal to noise ratio (S/N ratio) of signal Processing, obtain the burnt signal of mistake after the processing and amplifying to losing burnt signal.When the measured piece surface is mobile in the burnt range of signal of mistake, can obtains the burnt voltage signal of mistake of diverse location, thereby can obtain the surface topography of measured piece in losing burnt scope.
Claims (4)
1, multifunctional nano laser measuring head, it is characterized in that adopting integrated optical read head, with aurora diode (1) in its optical read head as the LASER Light Source device, laser beam forms behind grating (2) diffraction and detects light, again through spectroscope (3) and collimation lens (5) output collimated light source, described each device is packed in the housing (7), on housing (7) correspondence position collimated light output port (13) is set; Having of adopting simultaneously receives catoptrical four-quadrant photodiode sensor (12) through catoptron (4), cylinder astigmatic lens (11) in the described optical read head; Outside in housing (7) is positioned on the described collimated light output port (13), and removable jew objective tube (8) is set, and holographic object lens (9) are arranged in the objective tube interior (8), and are coaxial with collimated light.
2, multifunctional nano laser measuring head according to claim 1 is characterized in that being positioned at collimation lens (5) afterwards in described housing (7), and 90 degree turnover catoptrons (6) are set.
3, multifunctional nano laser measuring head according to claim 1, it is characterized in that power control circuit being set at described laser diode, constitute by operational amplifier (U9) and power discharging transistor (Q1), the positive input of operational amplifier (U9) is the reference signal end, the light that connects laser diode in the described optical read head with the reverse input end of operational amplifier (U9) detects feedback signal output terminal (PD), and the collector of power discharging transistor (Q1) connects the signal input end (LD) of laser diode by inductance (L1).
4, multifunctional nano laser measuring head according to claim 1, it is characterized in that voltage signal (A, B, C, D) output terminal at the four-quadrant photodiode sensor of described optical read head, signalization is amplified computing circuit, amplify (U2, U3) by operational amplifier (U1) and the two-stage that is serially connected in thereafter, and integration holding circuit (U4) constitutes, described four-quadrant voltage signal inserts forward and reverse input end at operational amplifier (U1) according to the compute mode of (A+C)-(B+D), loses the output terminal output of burnt signal at integration holding circuit U4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520069705 CN2769850Y (en) | 2005-03-07 | 2005-03-07 | Multifunction nano laser measuring head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520069705 CN2769850Y (en) | 2005-03-07 | 2005-03-07 | Multifunction nano laser measuring head |
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| CN2769850Y true CN2769850Y (en) | 2006-04-05 |
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| CN 200520069705 Expired - Fee Related CN2769850Y (en) | 2005-03-07 | 2005-03-07 | Multifunction nano laser measuring head |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101913105A (en) * | 2010-08-16 | 2010-12-15 | 合肥工业大学 | Non-contact three-dimensional optical measuring head and method for in-situ measurement of numerical control machine |
| CN102353333A (en) * | 2011-06-29 | 2012-02-15 | 安徽电气工程职业技术学院 | Large-measuring-range high-precision micro-nano scanning probe |
| CN101660900B (en) * | 2006-11-02 | 2012-10-17 | 松下电器产业株式会社 | Three dimensional shape measuring apparatus |
| CN105450949A (en) * | 2015-12-24 | 2016-03-30 | 深圳奥比中光科技有限公司 | Image information processing device with compact structure and laser module used therein |
-
2005
- 2005-03-07 CN CN 200520069705 patent/CN2769850Y/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101660900B (en) * | 2006-11-02 | 2012-10-17 | 松下电器产业株式会社 | Three dimensional shape measuring apparatus |
| CN101913105A (en) * | 2010-08-16 | 2010-12-15 | 合肥工业大学 | Non-contact three-dimensional optical measuring head and method for in-situ measurement of numerical control machine |
| CN102353333A (en) * | 2011-06-29 | 2012-02-15 | 安徽电气工程职业技术学院 | Large-measuring-range high-precision micro-nano scanning probe |
| CN105450949A (en) * | 2015-12-24 | 2016-03-30 | 深圳奥比中光科技有限公司 | Image information processing device with compact structure and laser module used therein |
| CN105450949B (en) * | 2015-12-24 | 2018-11-30 | 深圳奥比中光科技有限公司 | Compact-sized image information processing device and it is used for mode of laser group therein |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20060405 Termination date: 20100307 |