CN101644691B - Mercurial probe device for electrical test - Google Patents
Mercurial probe device for electrical test Download PDFInfo
- Publication number
- CN101644691B CN101644691B CN2008101180133A CN200810118013A CN101644691B CN 101644691 B CN101644691 B CN 101644691B CN 2008101180133 A CN2008101180133 A CN 2008101180133A CN 200810118013 A CN200810118013 A CN 200810118013A CN 101644691 B CN101644691 B CN 101644691B
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- mercury
- cell
- pedestal
- push rod
- mercury cell
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Abstract
The invention discloses a mercurial probe device for electrical test, which is characterized by comprising a pedestal, a left push rod and a right push rod, wherein the pedestal is a flat cylinder, the center of the pedestal is longitudinally provided with a thin mercury tank, and the circumference of the thin mercury tank in the center of the pedestal is provided with an annular mercury tank; the side wall of the left cylinder of the pedestal is provided with a left mercury tank, and the left mercury tank is communicated with the annular mercury tank; the position opposite to the left mercury tank is provided with a right mercury tank, and the right mercury tank is vertically communicated with the thin mercury tank; the upside of the pedestal is provided with a left mercury passage and a right mercury passage which are communicated with the left mercury tank and the right mercury tank and are vertical to the left mercury tank and the right mercury tank respectively; one end of the left push rod is inserted into the left mercury tank; and one end of the right push rod is inserted into the right mercury tank.
Description
Technical field
The present invention relates to the electrical testing field of semiconductor material, particularly a kind of device that adopts the mercury probe test.
Background technology
The electric conductivity of semiconductor material and impurity, temperature, crystal defect etc. are closely related.With impurity is example, if in 105 silicon atoms, mix a boron atom, just can make the electric conductivity of pure silicon increase by 103 times, so impurity has very big influence to the semiconductor electric property.When making different semiconductor devices, also be different to the requirement of material.In order to satisfy the needs of various devices, must test the material electrical parameter, these parameters are generally resistivity, carrier concentration, conduction type, mobility, life-span and carrier concentration profile etc.Semiconductor material is contacted with certain metal electrode, draw lead from metal electrode then and be connected to corresponding electrical testing testing equipment.Usually make metal electrode and all can produce certain damage and the test back metal electrode material that finishes to semiconductor material itself and be difficult for being removed (like vapor deposition), this can cause behind the electrical testing that carries out necessity semiconductor material can't satisfy the requirement of element manufacturing.Because mercury metal at room temperature is liquid, only need contacts and to form metal electrode, so adopt mercury metal can carry out undamaged electrical testing to tested semiconductor material as metal electrode material with material to be tested.
Summary of the invention
The objective of the invention is to, a kind of mercury probe device of electrical testing is provided, it can carry out undamaged electrical testing to tested semiconductor material.
The present invention provides a kind of mercury probe device of electrical testing, it is characterized in that, comprising:
One pedestal, this pedestal are the right cylinder of flat, vertically have a thin mercury cell in the center of pedestal, the mercury cell that has annular on every side of thin mercury cell in the center of pedestal; On the left circles column side wall of pedestal, have a left mercury cell, this left side mercury cell is communicated with the mercury cell of annular; The position relative with left mercury cell has a right mercury cell, this right side mercury cell and thin mercury cell vertical connection; Vertical with left and right mercury cell, on pedestal, have the left and right mercury channel that is communicated with left and right mercury cell;
One left push rod, an end of this left side push rod is inserted in the left mercury cell;
One right push rod, an end of this right side push rod is inserted in the right mercury cell.
Wherein also comprise compressing tablet folder, an end of this compressing tablet folder is the upper surface that movably is fixed in pedestal, in order to fixing material to be tested.
Wherein also comprise a left mercury tube, this left side mercury tube be positioned at left mercury channel above, be communicated with left mercury channel; One right mercury tube, this right side mercury tube be positioned at right mercury channel above, be communicated with right mercury channel.
The diameter of wherein said thin mercury cell is 300 microns-500 microns.
Description of drawings
For further specifying concrete technology contents of the present invention, below in conjunction with embodiment and accompanying drawing specifies as after, wherein:
Fig. 1 is that the master of the mercury probe device of electrical testing of the present invention looks diagrammatic cross-section.
Fig. 2 is the schematic top plan view of the mercury probe device of electrical testing of the present invention.
Embodiment
See also shown in Figure 1ly, the mercury probe device of a kind of electrical testing of the present invention is characterized in that, comprising:
One pedestal 2, this pedestal 2 is the right cylinder of flat, and according to the shape and the size of material to be tested 100, this pedestal 2 also can be made into rectangular parallelepiped or other shapes, and present embodiment is a right cylinder; Have a thin mercury cell 6 in the center of pedestal 2; The diameter of this thin mercury cell 6 is 300 microns-500 microns; Around the vertically thin mercury cell 6 in the center of pedestal 2, have the mercury cell 5 of annular; Make thin mercury cell 6 at the area of pedestal 2 upper surfaces much smaller than the area of annular mercury cell 5 at pedestal 2 upper surfaces; Guarantee that mercury and material to be tested 100 in the thin mercury cell 6 form Schottky contacts, the mercury in the annular mercury cell 5 forms Ohmic contact with material to be tested 100, the assurance precision of test result; On the left circles column side wall of pedestal 2, have a left mercury cell 4, this left side mercury cell 4 is communicated with the mercury cell 5 of annular; Have a right mercury cell 7 with left mercury cell 4 relative positions, this right side mercury cell 7 and thin mercury cell 6 vertical connections; Vertical with left and right mercury cell 4,7, on pedestal 2, have the left and right mercury channel 41,71 that is communicated with left and right mercury cell 4,7;
Wherein also comprise a left mercury tube 1, this left side mercury tube 1 be positioned at left mercury channel 41 above, be communicated with left mercury channel 41; One right mercury tube 9, this right side mercury tube 9 be positioned at right mercury channel 71 above, be communicated with right mercury channel 71, left and right mercury tube 1,9 will have enough height, guarantees that mercury is pushed into Shi Buhui and in managing, overflows; Can closely contact with material 100 to be tested when guaranteeing that mercury is pushed into; The height of mercury in left and right mercury tube 1,9 in the time of can before test, repeatedly pushing mercury and record and reach tight contact; The height that when official testing, only needs to be pushed into mercury record gets final product, and has saved the test duration;
The mercury cell 5 of above-mentioned left mercury tube 1, left mercury cell 4, left mercury channel 41, annular and right mercury tube 9, right mercury cell 7, right mercury channel 71, thin mercury cell 6 have constituted the mutual Uncrossed mercury flow system of two covers respectively.
One left push rod 3, an end of this left side push rod 3 are inserted in the left mercury cell 4; One right push rod 8; One end of this right side push rod 8 is inserted in the right mercury cell 7; Control the turnover of mercury in two cover mercury flow systems respectively through left and right push rod 3,8, mercury is closely contacted with material 100 formation to be tested when being pushed into, guarantee the correctness of test; The time draw the both positive and negative polarity that two leads are connected to corresponding electrical testing equipment from this left and right push rod 3,8 respectively in test, the material of push rod should be metal material, the electric signal in the time of can conduction test.
Wherein also comprise compressing tablet folder 10; This compressing tablet folder 10 is the upper surfaces that movably are fixed in pedestal 2; In order to fixing material 100 to be tested; Make after when test, mercury was pushed into and can from the mercury cell 5 of annular or thin mercury cell 6, not overflow, and the mercury cell 5 of this compressing tablet folder 10 and annular to there be suitable distance with thin mercury cell 6, guarantee not influence the placement of material to be tested 100.
The above-mentioned good enforcement example that discloses is with its framework of character narrate and is aided with illustration; So be not in order to restriction the present invention, have common knowledge the knowledgeable under the present invention in the technical field when not carrying out various changes and retouching under spirit of the present invention and the category in departing from.Therefore, protection scope of the present invention is when looking being as the criterion that claim defines.
Claims (4)
1. the mercury probe device of an electrical testing is characterized in that, comprising:
One pedestal, this pedestal are the right cylinder of flat, vertically have a thin mercury cell in the center of pedestal, the mercury cell that has annular on every side of thin mercury cell in the center of pedestal; On the left circles column side wall of pedestal, have a left mercury cell, this left side mercury cell is communicated with the mercury cell of annular; The position relative with left mercury cell has a right mercury cell, this right side mercury cell and thin mercury cell vertical connection; Vertical with left and right mercury cell, on pedestal, have the left and right mercury channel that is communicated with left and right mercury cell;
One left push rod, an end of this left side push rod is inserted in the left mercury cell;
One right push rod, an end of this right side push rod is inserted in the right mercury cell.
2. the mercury probe device of electrical testing as claimed in claim 1 is characterized in that, wherein also comprises compressing tablet folder, and an end of this compressing tablet folder is the upper surface that movably is fixed in pedestal, in order to fixing material to be tested.
3. the mercury probe device of electrical testing as claimed in claim 1 is characterized in that, wherein also comprises a left mercury tube, this left side mercury tube be positioned at left mercury channel above, be communicated with left mercury channel; One right mercury tube, this right side mercury tube be positioned at right mercury channel above, be communicated with right mercury channel.
4. the mercury probe device of electrical testing as claimed in claim 1 is characterized in that, the diameter of wherein said thin mercury cell is 300 microns-500 microns.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101180133A CN101644691B (en) | 2008-08-06 | 2008-08-06 | Mercurial probe device for electrical test |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101180133A CN101644691B (en) | 2008-08-06 | 2008-08-06 | Mercurial probe device for electrical test |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101644691A CN101644691A (en) | 2010-02-10 |
| CN101644691B true CN101644691B (en) | 2012-06-27 |
Family
ID=41656663
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008101180133A Expired - Fee Related CN101644691B (en) | 2008-08-06 | 2008-08-06 | Mercurial probe device for electrical test |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101644691B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110286310B (en) * | 2019-07-30 | 2021-04-27 | 河北普兴电子科技股份有限公司 | Testing device based on semiconductor wafer surface |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4021735A (en) * | 1974-11-20 | 1977-05-03 | Wacker-Chemitronic Gesellschaft Fur Elektronik Grundstoffe Mbh | Method and apparatus for making a metal to semiconductor contact |
-
2008
- 2008-08-06 CN CN2008101180133A patent/CN101644691B/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4021735A (en) * | 1974-11-20 | 1977-05-03 | Wacker-Chemitronic Gesellschaft Fur Elektronik Grundstoffe Mbh | Method and apparatus for making a metal to semiconductor contact |
Non-Patent Citations (2)
| Title |
|---|
| 丛众 等.双汞探针C-V法测试硅材料杂质浓度分布.《辽宁大学学报 自然科学版》.1992,第19卷(第1期),43-48. * |
| 王才康 等.硅外延层载流子浓度测定汞探针电容-电压法.《中华人民共和国国家标准GB/T14146-93》.1993,533-536. * |
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| Publication number | Publication date |
|---|---|
| CN101644691A (en) | 2010-02-10 |
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| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120627 Termination date: 20130806 |