CN101644476A - Exhaust system of dust free room and construction method thereof - Google Patents
Exhaust system of dust free room and construction method thereof Download PDFInfo
- Publication number
- CN101644476A CN101644476A CN200810178830A CN200810178830A CN101644476A CN 101644476 A CN101644476 A CN 101644476A CN 200810178830 A CN200810178830 A CN 200810178830A CN 200810178830 A CN200810178830 A CN 200810178830A CN 101644476 A CN101644476 A CN 101644476A
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- CN
- China
- Prior art keywords
- dust free
- free room
- rib
- extraction system
- gas extraction
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/02—Ducting arrangements
- F24F13/0227—Ducting arrangements using parts of the building, e.g. air ducts inside the floor, walls or ceiling of a building
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/02—Ducting arrangements
- F24F13/0245—Manufacturing or assembly of air ducts; Methods therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/02—Ducting arrangements
- F24F13/0254—Ducting arrangements characterised by their mounting means, e.g. supports
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Civil Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Ventilation (AREA)
- Floor Finish (AREA)
- Building Environments (AREA)
- Forms Removed On Construction Sites Or Auxiliary Members Thereof (AREA)
Abstract
The present invention provides an exhaust system of a dust free room and a construction method thereof; the method does not need other construction, and forms suction holes on a concrete floor by concrete pouring; the suction hole has a cylindric sleeve and a large opening used for sucking, and the suction hole is provided with a circular plate cover made by aluminum; so that compared with a vertical flow dust free room, the dust free room in the invention improves the endurance capacity of vibrating and earthquake load, and has low cost. The exhaust system of the dust free room for manufacturing room of highly integrated circuit, a genetic engineering laboratory and a particulate manufacturing room comprises: exhaust pipes arranged on the floor at a certain space, a cylindric sleeve (4) with the upper section formed with air suction ports, the lower section connected to the exhaust pipe, an annular support frame (3) arranged in the inner edge of the upper section of the sleeve (4), anarced guard ring (2) arranged at the bottom of the annular support frame (3); and a circular plate cover (1) arranged on the annular support frame (3) by the guard ring (2) and provided with a plurality of suction holes and formed with a plurality of ribs for improving the supporting force at the surround of the suction hole.
Description
Technical field
The present invention relates to the gas extraction system and the construction method thereof of dust free room, in more detail, the gas extraction system and the construction method thereof that relate to following such dust free room, promptly, do not use double deck construction, need not to process separately, on concrete floor, form suction hole by concrete cast (beating Let), this suction hole has sleeve pipe cylindraceous and air-breathing required big opening, and the discoideus lid that is made of aluminium is set, compare with perpendicular layers flow pattern dust free room structure thus, to the tolerance raising of vibration and earthquake loading, and with low cost.
Background technology
As everyone knows, usually make places such as chamber, in order to make the environment that is fit to manufacturing process, and perpendicular layers flow pattern dust free room is set at manufacturing chamber, genetic engineering research department, the particulate of the such high density integrated circuit having of semiconductor.In the perpendicular layers flow pattern dust free room, on the top of the concrete floor face certain altitude of distance dust free room movable floor (access floor) is set, and utilizes associated component to make the structure that paired movable floor carries out access.Because the hypomere at the movable floor that is made of double floor is discharged indoor dusty gas, so can keep the clean state of this dust free room.
But, problem points is, utilizes the double deck construction of above-mentioned movable floor owing to be made of movable floor and associated component at high price, so equipment is certainly as high price, because need be making movable floor leave the accurate work progress of firmly fixing under the state of floor, so construction cost improves.
In addition, be dust tight construction even finished the double floor system construction of the movable floor of construction, when in fact the above earthquake of shock resistance took place, supporting force also can weaken and may cause movable floor to damage.In addition, have the following problems point, that is, when the situation that movable floor damages takes place, be disposed at the related equipment breakage of semiconductor of the top high price of this movable floor, therefore, the amount of loss sharply increases.
Summary of the invention
With reference to the objective of the invention is to of present problem points, the gas extraction system and the construction method thereof of dust free room are provided, do not use double deck construction, need not to process separately, form suction hole by the concrete cast on concrete floor, this suction hole has sleeve pipe cylindraceous and air-breathing required big opening, and the discoideus lid that is made of aluminium is set, compare with perpendicular layers flow pattern dust free room structure thus, to the tolerance raising of vibration and earthquake loading, and with low cost.
Other purpose of the present invention is, the gas extraction system and the construction method thereof of dust free room are provided, covering formation larger area suction hole, and form cancellate rib to give high supporting force, and between the scaffold that covers and be disposed on the sleeve pipe, guard ring is set, can prevent swing and noise thus.
To achieve these goals, the invention provides a kind of gas extraction system of dust free room, its manufacturing chamber, genetic engineering research department, particulate that is used for high density integrated circuit having is made the chamber, it is characterized in that, comprise: sleeve pipe cylindraceous, uprightly at certain intervals be located at the blast pipe that is provided with on the ground, and epimere is formed with air entry, hypomere is linked to described blast pipe; The scaffold of ring-type is located at the epimere inner peripheral of described sleeve pipe; Circular-arc guard ring is disposed at described scaffold bottom surface; Discoideus lid is equipped on the described scaffold via described guard ring, possesses a plurality of suction holes, and is formed with a plurality of ribs that are used to improve supporting force around this suction hole.
At this, preferably, described scaffold has step-like cross section, with described guard ring of mounting and described lid.
In addition, preferably, described scaffold is attached to the epimere inner peripheral of concrete ground sheet structure by the encapsulant that is made of silicone.
In addition, preferably, described guard ring is made of the synthetic resin material, and is formed with the groove of the gabarit rib that plugs the back side that is formed at lid in the above.
In addition, preferably, described lid is divided and is formed horizontal 9 main ribs that strengthen that reach vertical 9, and forms the additional ribs of 5 of horizontal strokes betwixt.
In addition, preferably, described lid forms with the crosswise rib, and to be the center be scattered in the main rib that strengthens of periphery with loading, and the loading after disperseing and the whole main stress that the strengthens rib interior side rib by the circle shape is absorbed to prevent distortion.
In addition, preferably, described lid is in order to strengthen the loading supporting possesses the outer peripheral edges of being formed at the intensity of outermost suburb rib outer peripheral edges enhancing rib.
In addition, preferably, described lid possesses the interior side rib that abuts to form with described outermost suburb rib filling with identical time and pressure all sidedly, and left and right symmetrically is formed with the neck part of regulating flow velocity between described outermost suburb rib and interior side rib.
Others of the present invention provide a kind of construction method of gas extraction system of dust free room, its gas extraction system that the manufacturing chamber, genetic engineering research department, the particulate that are used for high density integrated circuit having are made the dust free room of chamber is constructed, it is characterized in that, comprising: the process that blast pipe is set on ground; After will being disposed on the described blast pipe at certain intervals at the sleeve pipe cylindraceous that epimere is formed with air entry, its hypomere be linked to the process of described blast pipe; With the mode cast concrete of the epimere that arrives described sleeve pipe, form the process of the concrete ground sheet structure of imbedding sleeve pipe; In the epimere inner peripheral coating encapsulant of described concrete ground sheet structure, the process of adhering to the scaffold of ring-type; Process at the guard ring of the bottom surface of described scaffold layout circle arcuation; The gabarit rib that is formed at the back side of described lid is inserted in the groove that forms on described guard ring, lid is equipped on process on the scaffold; Laying ceramic tile or coating epoxy coating on described concrete ground sheet structure, the process on formation top layer.
Gas extraction system and construction method thereof according to dust free room of the present invention, because it is textural highly stable, be arranged with the enhancing rib of the most compatibly cutting apart being formed with covering of suction hole, therefore, supporting force height to concentrated load, and so that top opening and the mode that effectively sucks the air-flow of dust free room inside forms maximum 55% aperture area, exhaust performance is very superior.In addition, a kind of dust free room can be provided, be absorbed between the scaffold that covers and be configured on the sleeve pipe because of the noise and the vibration of swinging and impact takes place by guard ring, therefore, compare with the deck construction of the present dust free room that possesses movable floor, the vibration and the noise that take place during walking are very little, and the maintenance cost of construction cost and system is cheap.
Description of drawings
Fig. 1 is the exploded perspective view of the gas extraction system of the dust free room of expression an embodiment of the present invention;
Fig. 2 is the profile of the installment state of the gas extraction system of the dust free room of expression an embodiment of the present invention;
The stereogram of the surface of the lid that comprises in the gas extraction system of Fig. 3 for the dust free room of expression an embodiment of the present invention and the structure at the back side;
The vertical view of the structure of the lid that comprises in the gas extraction system of Fig. 4 for the dust free room of expression an embodiment of the present invention;
The partial perspective view of the structure of the guard ring that comprises in the gas extraction system of Fig. 5 for the dust free room of expression an embodiment of the present invention.
Symbol description
1 lid
2 guard rings
3 scaffolds
4 sleeve pipes
5 top layers
6 encapsulants
7 concrete ground sheet structures
The specific embodiment
Below, preferred embodiment be elaborated to of the present invention with reference to accompanying drawing.
Fig. 1 is the exploded perspective view of the gas extraction system of the dust free room of expression an embodiment of the present invention, Fig. 2 is the profile of the installment state of the gas extraction system of the dust free room of expression an embodiment of the present invention, the stereogram of the surface of the lid that comprises in the gas extraction system of Fig. 3 for the dust free room of expression an embodiment of the present invention and the structure at the back side, the vertical view of the structure of the lid that comprises in the gas extraction system of Fig. 4 for the dust free room of expression an embodiment of the present invention, the partial perspective view of the structure of the guard ring that comprises in the gas extraction system of Fig. 5 for the dust free room of expression an embodiment of the present invention.
With reference to these figure, in the gas extraction system of the dust free room of an embodiment of the present invention, do not use double deck construction, need not to process separately, form suction hole by the concrete cast on concrete floor, this suction hole has sleeve pipe cylindraceous and air-breathing required big opening, and the discoideus lid that is made of aluminium is set, compare with perpendicular layers flow pattern dust free room structure thus, to the tolerance raising of vibration and earthquake loading, and with low cost.
In addition, in the gas extraction system of the dust free room of an embodiment of the present invention, covering formation larger area suction hole, and forming cancellate rib to give high supporting force, and between the scaffold that covers and be disposed on the sleeve pipe, guard ring is set, can prevent swing and noise thus.
That is, the gas extraction system of the dust free room of an embodiment of the present invention possesses: be located at the upward upright sleeve pipe of establishing 4 of the ground blast pipe of dust free room (diagram is omitted), the lid 1 of being located at the scaffold 3 on this sleeve pipe 4 and being made of discoideus aluminium sheet.Form horizontal 9 vertical 9 ribs in lid 1 back, form the grid system of square, and in the central array additional ribs of grid, provide maximum 55% aperture area to the entire area of discoideus panel, and give high supporting force.In addition, in lid 1 bottom, and scaffold 3 between dispose the guard ring 2 of plastic material, therefore, can prevent to cover 1 and scaffold 3 between the swing and the noise that take place.
In more detail, when manufacturing chamber, genetic engineering research department, the particulate of the such high density integrated circuit having of semiconductor were made the chamber construction, the gas extraction system of the dust free room of an embodiment of the present invention was provided with blast pipe on the ground.After having disposed epimere on this blast pipe at certain intervals and being formed with the sleeve pipe 4 of air entry, utilize common connected mode that the hypomere of sleeve pipe 4 is linked to blast pipe.
Then, cast concrete is until the epimere that arrives sleeve pipe 4.Like this, can not construct separately and sleeve pipe 4 is located at the floor of building, thus, finish concrete ground sheet structure 7.
Under this state, at the epimere inner peripheral of sleeve pipe 4 scaffold 3 in conjunction with ring-type.Scaffold 3 its cross sectional shapes form step-like, when the discoideus lid 1 of the epimere mounting of sleeve pipe 4, can be maintained the height of the top of this lid 1 and concrete ground sheet structure 7 identical.
That is, because scaffold 3 is to prolong the state of certain-length amount to the epimere outside of sleeve pipe 4, therefore, scaffold 3 its outer peripheral edges extend the certain-length amount to the inside of concrete ground sheet structure 7.
At this moment, encapsulant 6 such as coating silicone etc. between scaffold 3 and concrete ground sheet structure 7.Encapsulant 6 is fixed in scaffold 3 on the concrete ground sheet structure 7.
In addition, at the guard ring 2 of the bottom surface of scaffold 3 layout circle arcuation, gabarit rib (the outermost Guo リ one Block) 1-b of chimeric lid 1 in being formed at this groove 2-c above guard ring 2.This guard ring 2 is owing to manufactured by the synthetic resin material, so prevent to cover 1 because of vibration directly is connected to scaffold 3, thereby with impact absorption, prevents owing to swing and produce noise.
Secondly, the discoideus lid 1 that forms a plurality of suction holes and be formed with a plurality of ribs that are used to improve supporting force around suction hole is incorporated into above the guard ring 2.
On the other hand, cover 1 direction for contaminated air and dust etc. is sent to effectively, laying ceramic tile or coating epoxy coating form top layer 5 on concrete ground sheet structure 7.
Therefore, the gas extraction system of the dust free room of an embodiment of the present invention is compared with the technology that the movable floor that utilizes present technology is made the floor of dust free room, and construction is fast, and is required with low cost.In addition, owing to only utilize concrete tectosome self, and other tectosome or device are not provided with on floor, therefore, have highly stable performance for vibration and the such external force of loading.
On the other hand, on lid 1, be formed with the suction hole of a plurality of slotted hole shapes.In embodiments of the present invention, will lid 1 the back side divide and form horizontal 9 and vertical 9 s' the main rib 1-b that strengthen, between them, arrange 5 additional ribs 1-c and after forming the space, the part opening of residual long hole shape.Thus, can guarantee minimum 17% to maximum 55% aperture area according to the size of peristome and for the area of lid 1.
In addition, it is center and loading is scattered in the main rib 1-b that strengthens of periphery that lid 1 forms with crosswise rib 1-d, and loading after the dispersion and the whole main stress that strengthens rib 1-b are absorbed by the interior side rib 1-f of circle shape and prevents distortion.
And, be formed with the groove 2-c that is embedded in the guard ring 2 that on scaffold 3, disposes on 1 and absorb outermost suburb rib (the outermost suburb リ one Block) 1-e that covers impact that 1 loading causes etc. at lid.In addition, lid 1 also comprises the outer peripheral edges that are formed at outer peripheral edges and strengthens rib 1-g for the loading of auxiliary outermost suburb rib 1-e.At this moment, consider preferably to be constituted by the formability of the lid 1 of aluminum dipping form casting manufacturing, the number that the outer peripheral edges of upper and lower sides strengthen rib 1-g is more than the number of the outer peripheral edges enhancing rib 1-g of left and right sides.
Consider the formability of aluminum dipping form casting, cover 1 shaping and fill with identical time and pressure comprehensively for the flow velocity of regulating molten aluminum makes, possess the interior side rib 1-f that abuts to form with outermost suburb rib 1-e, left and right symmetrically forms the neck part 1-a that regulates flow velocity between outermost suburb rib 1-e and interior side rib 1-f.Therefore, the formability of discoideus aluminum deck improves, and covers 1 integral body and has uniform intensity.
In addition, lid 1 have for correspondence step-like cross section scaffold 3 profile size and give suitable swing, form the interval 1-h that can utilize lathe to process in the outside of gabarit rib 1-e, improve the precision of size thus.
Utilizability on the industry
As mentioned above, according to the present invention, can provide a kind of dust free room, owing to be absorbed in by guard ring Lid and be disposed between the scaffold on the sleeve pipe because of swing and impact noise and the vibration that takes place, because of This compares the vibration that takes place during walking with the deck construction of the present dust free room that possesses movable floor And noise is very little, and the maintenance cost of construction cost and system is cheap. Therefore, of the present invention Industry applications is high.
On the other hand, by several preferred enforcements the present invention is narrated in this specification, but To those skilled in the art, certainly can in not breaking away from additional right application range, open and show Category of the present invention and the situation of thought under carry out various deformation and correction.
Claims (9)
1, a kind of gas extraction system of dust free room, its manufacturing chamber, genetic engineering research department, particulate that is used for high density integrated circuit having is made the chamber, it is characterized in that, comprising:
Sleeve pipe cylindraceous (4) uprightly at certain intervals is located at the blast pipe that is provided with on the ground, and epimere is formed with air entry, and hypomere is linked to described blast pipe;
The scaffold of ring-type (3) is located at the epimere inner peripheral of described sleeve pipe (4);
Circular-arc guard ring (2) is disposed at described scaffold (3) bottom surface;
Discoideus lid (1) is equipped on the described scaffold (3) via described guard ring (2), possesses a plurality of suction holes, and is formed with a plurality of ribs that are used to improve supporting force around this suction hole.
2, the gas extraction system of dust free room as claimed in claim 1 is characterized in that,
Described scaffold (3) has step-like cross section, with described guard ring of mounting (2) and described lid (1).
3, the gas extraction system of dust free room as claimed in claim 1 is characterized in that,
Described scaffold (3) is attached to the epimere inner peripheral of concrete ground sheet structure (7) by the encapsulant (6) that is made of silicone.
4, the gas extraction system of dust free room as claimed in claim 1 is characterized in that,
Described guard ring (2) is made of the synthetic resin material, and is formed with the groove (2-c) of the gabarit rib (1-e) that plugs the back side that is formed at lid (1) in the above.
5, the gas extraction system of dust free room as claimed in claim 1 is characterized in that,
Described lid (1) is divided and is formed horizontal 9 main ribs (1-b) that strengthen that reach vertical 9, and forms the additional ribs (1-c) of 5 of horizontal strokes betwixt.
6, the gas extraction system of dust free room as claimed in claim 1 is characterized in that,
Described lid (1) forms with crosswise rib (1-d), and to be the center be scattered in the main rib (1-b) that strengthens of periphery with loading, and the loading after disperseing and the whole main stress that strengthens rib (1-b) the interior side rib (1-f) by the circle shape is absorbed to prevent distortion.
7, the gas extraction system of dust free room as claimed in claim 1 is characterized in that,
Described lid (1) is in order to strengthen the loading supporting possesses the outer peripheral edges of being formed at the intensity of outermost suburb rib (1-e) outer peripheral edges enhancing rib (1-g).
8, the gas extraction system of dust free room as claimed in claim 1 is characterized in that,
Described lid (1) possesses the interior side rib (1-f) that abuts to form with described outermost suburb rib (1-e) filling with identical time and pressure all sidedly, and left and right symmetrically is formed with the neck part (1-a) of regulating flow velocity between described outermost suburb rib (1-e) and interior side rib (1-f).
9, a kind of construction method of gas extraction system of dust free room, its gas extraction system that the manufacturing chamber, genetic engineering research department, the particulate that are used for high density integrated circuit having are made the dust free room of chamber is constructed, and it is characterized in that, comprising:
The process of blast pipe is set on ground;
After will being disposed on the described blast pipe at certain intervals at the sleeve pipe cylindraceous (4) that epimere is formed with air entry, its hypomere be linked to the process of described blast pipe;
With the mode cast concrete of the epimere that arrives described sleeve pipe (4), form the process of the concrete ground sheet structure (7) of imbedding sleeve pipe (4);
In the epimere inner peripheral coating encapsulant of described concrete ground sheet structure (7), the process of adhering to the scaffold (3) of ring-type;
Process at the guard ring (2) of the bottom surface of described scaffold (3) layout circle arcuation;
The gabarit rib (1-e) that will be formed at the back side of described lid (1) is inserted in the groove (2-c) that forms on described guard ring (2), will cover (1) and be equipped on process on the scaffold (3);
Laying ceramic tile or coating epoxy coating on described concrete ground sheet structure (7), the process on formation top layer (5).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020080076599A KR101004008B1 (en) | 2008-08-05 | 2008-08-05 | Air exhausting apparatus for clean-room and method for establishing a system |
| KR1020080076599 | 2008-08-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101644476A true CN101644476A (en) | 2010-02-10 |
Family
ID=41656464
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200810178830A Pending CN101644476A (en) | 2008-08-05 | 2008-12-01 | Exhaust system of dust free room and construction method thereof |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4500871B2 (en) |
| KR (1) | KR101004008B1 (en) |
| CN (1) | CN101644476A (en) |
| TW (1) | TW201007098A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104314189A (en) * | 2014-08-26 | 2015-01-28 | 中国直升机设计研究所 | Complete anechoic chamber for rotor noise test |
| CN105276781A (en) * | 2014-07-24 | 2016-01-27 | 惠亚科技（苏州）有限公司 | Sleeve seats used for positioning |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI759777B (en) * | 2020-06-20 | 2022-04-01 | 惠亞工程股份有限公司 | Cleanroom waffle bucket anti-fall device |
| CN113548071B (en) * | 2021-06-28 | 2024-03-26 | 重庆科筑城市运营服务(集团)有限公司 | Special internal window type fresh air purification ventilator installation device for rail transit |
| CN117329526A (en) * | 2023-11-28 | 2024-01-02 | 江苏博泰环保工程有限公司 | Environment-friendly solid waste treatment device |
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| CN1177828A (en) * | 1996-08-28 | 1998-04-01 | 索尼株式会社 | Superclean workshop for production of semiconductor device |
| CN1201514A (en) * | 1995-09-07 | 1998-12-09 | 大金工业株式会社 | Outlet unit for underfloor air conditionor and underfloor air conditioning system using same |
| CN2486606Y (en) * | 2001-06-13 | 2002-04-17 | 黄清标 | Well cover sleeve base |
| JP3365526B2 (en) * | 1994-03-01 | 2003-01-14 | 新日本製鐵株式会社 | Air conditioning method in floor air-conditioning system and floor air-conditioning system |
| JP2003219535A (en) * | 2002-01-24 | 2003-07-31 | Tadahiro Omi | Wiring storage pit for clean room |
| JP2004205080A (en) * | 2002-12-24 | 2004-07-22 | Kanden Industries Inc | Floor air outlet device |
-
2008
- 2008-08-05 KR KR1020080076599A patent/KR101004008B1/en active IP Right Grant
- 2008-10-14 TW TW097139303A patent/TW201007098A/en unknown
- 2008-10-29 JP JP2008278465A patent/JP4500871B2/en active Active
- 2008-12-01 CN CN200810178830A patent/CN101644476A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58123142U (en) * | 1982-02-16 | 1983-08-22 | 協同機材株式会社 | Clean. grating for room |
| JPS6284708A (en) * | 1985-10-11 | 1987-04-18 | 横浜ゴム株式会社 | Antistatic mat |
| CN2079090U (en) * | 1990-11-22 | 1991-06-19 | 青岛市崂山区节能设备厂 | Power saving temp. controlled purifying baking room for automobile spraying paint and baking finish |
| JP3365526B2 (en) * | 1994-03-01 | 2003-01-14 | 新日本製鐵株式会社 | Air conditioning method in floor air-conditioning system and floor air-conditioning system |
| CN1201514A (en) * | 1995-09-07 | 1998-12-09 | 大金工业株式会社 | Outlet unit for underfloor air conditionor and underfloor air conditioning system using same |
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| CN2486606Y (en) * | 2001-06-13 | 2002-04-17 | 黄清标 | Well cover sleeve base |
| JP2003219535A (en) * | 2002-01-24 | 2003-07-31 | Tadahiro Omi | Wiring storage pit for clean room |
| JP2004205080A (en) * | 2002-12-24 | 2004-07-22 | Kanden Industries Inc | Floor air outlet device |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105276781A (en) * | 2014-07-24 | 2016-01-27 | 惠亚科技（苏州）有限公司 | Sleeve seats used for positioning |
| CN105276781B (en) * | 2014-07-24 | 2017-12-15 | 惠亚科技（苏州）有限公司 | A kind of positioning block set |
| CN104314189A (en) * | 2014-08-26 | 2015-01-28 | 中国直升机设计研究所 | Complete anechoic chamber for rotor noise test |
| CN104314189B (en) * | 2014-08-26 | 2017-12-29 | 中国直升机设计研究所 | A kind of rotor noise tests whole elimination room |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101004008B1 (en) | 2010-12-31 |
| JP2010037931A (en) | 2010-02-18 |
| TW201007098A (en) | 2010-02-16 |
| JP4500871B2 (en) | 2010-07-14 |
| KR20100016940A (en) | 2010-02-16 |
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Application publication date: 20100210 |