Background technology
Ultrasonic wave bonding wire machine is a kind of inner leading bonding device of semiconductor device, and it not only is suitable for universities and colleges, scientific research institutions use under study for action, and also is used widely in the production of semiconductor device.
Consult Fig. 1, at present, big, the higher manual ultrasonic wave gold thread bonding machine of complete machine height of commonly a kind of volume on the market.Driving mechanism up and down 120, carrying quilt weldering product that the main frame 100 of described bonding machine, the soldering tip 140 that comprises ultrasonic transducer, welding chopper and servicing unit composition, cabinet 110, control soldering tip 140 move up and down and slide plate 170 and the horizontal drive mechanism 150 that makes its horizontal movement.Described slide plate 170 is provided with anchor clamps 160, and anchor clamps 160 will be clamped by the weldering product and be beneficial to weld.
During work, the worm screw 122 of described up and down driving mechanism 120 drives worm gears 121 rotations, and belt 123 links to each other with worm gear 121, so belt 123 drive soldering tips 140 move up and down and weld; Motor 151 drive screws 152 rotations of described horizontal drive mechanism 150 make swivel nut (figure does not show) move left and right of the described screw rod 152 that is spirally connected.Swivel nut and slide plate 170 link, so slide plate 170 move left and right, make to be fastened on anchor clamps 160 move left and right on the slide plate 170 and to finish the span welding.
The shortcoming of a kind of ultrasonic wave gold thread of above-mentioned prior art bonding machine is: the component weight such as slide plate 170 that the span welding is moved are bigger, be about 4 times of soldering tip 140 weight, soldering tip 140 levels are motionless during welding, because the slide plate 170 and anchor clamps 160 weight of move left and right are big, its motion is quickened to be difficult for; And weight is big, just impacts during motion greatly, so the speed of production of having a strong impact on, bonding wire radian, quality of welding spot and reliability are not high.In addition, belt 123 moves up and down when stopping suddenly, can produce elastic stretching under the momentum of soldering tip 140, causes the difficulty of soldering tip control, and quality of welding spot is bad.
Another kind of prior art ultrasonic welding machine comprises driving mechanism up and down that cabinet, control soldering tip move up and down and the horizontal drive mechanism that controls the soldering tip horizontal movement, and the described control motor that moves up and down is arranged on the top of cabinet inside; On the pairing cabinet wall of ram travel scope, be provided with the inside and outside opening that connects; The horizontal drive mechanism of control soldering tip horizontal movement is arranged on cabinet inside, and is fixed together by described opening and slide block; The corresponding cabinet wall of the bottom of cabinet and cross sliding clock stroke range is provided with the inside and outside opening that connects, and soldering tip is fixedlyed connected with cross sliding clock by this opening.
The horizontal drive mechanism of described another kind of prior art ultrasonic welding machine must move up and down in overall under the driving of driving mechanism up and down, and horizontal drive mechanism comprises parts such as motor, therefore weight is still bigger, still impacts greatlyyer when welding, and influences precision; In addition, because up and down driving mechanism and horizontal drive mechanism all are contained in the cabinet, radiating effect is difficult to be guaranteed, and safeguards also inconvenient.
Summary of the invention
The technical problem that the present invention mainly solves provides a kind of bonding equipment and drive unit thereof, can control soldering tip and carry out up and down and horizontal movement, and welding efficiency, quality height, heat radiation are good and easy to maintenance simultaneously.
For solving the problems of the technologies described above, the technical scheme that the present invention adopts is: a kind of bonding equipment is provided, comprise the soldering tip support, control the driving mechanism up and down that described soldering tip moves up and down, and the horizontal drive mechanism that controls described soldering tip horizontal movement, described driving mechanism up and down and horizontal drive mechanism are separately fixed on the described soldering tip support, also comprise: rail brackets, described rail brackets connects the described output of driving mechanism up and down, and slide up and down with described soldering tip support and to be connected, described soldering tip is connected with described rail brackets horizontal slip, and described soldering tip also slides up and down with the output of described horizontal drive mechanism and is connected.
Wherein, described horizontal drive mechanism comprises horizontal drive motor, traversing screw rod, traversing swivel nut and first slide block up and down, described soldering tip comprises hollow bulb, side at the soldering tip hollow bulb is provided with first upper and lower slide rail, the output shaft of described horizontal drive motor connects described traversing screw rod, described traversing screw rod passes described hollow bulb and is screwed onto in the described traversing swivel nut, and described traversing swivel nut is fixed in described slide block about in the of first, described about in the of first slide block match with described first upper and lower slide rail.
Wherein, described traversing swivel nut comprises nut core, cutting ferrule and spring, described nut core and described traversing screw rod are spirally connected, and have two or more axially open, the end of described nut core axially open radially is provided with the stopper section, described cutting ferrule and spring concentric are enclosed within on the nut core, described both ends of the spring respectively with described about in the of first slide block and cutting ferrule replace, described cutting ferrule is between the stopper section and spring of described nut core.
Wherein, the stroke that wear the bulk up and down of the described hollow bulb of described traversing screw rod, slides up and down with described rail brackets and described soldering tip support is adaptive.
Wherein, described driving mechanism up and down comprises drive motors, vertical shift screw rod and vertical shift swivel nut up and down, the described output shaft and the described vertical shift screw rod of drive motors up and down are rotationally connected, described vertical shift screw rod is screwed onto in the described vertical shift swivel nut, described vertical shift swivel nut is connected with rail brackets, one side of described rail brackets is provided with slide block about in the of second, described about in the of second slide block match with described second upper and lower slide rail.
The described output shaft of drive motors up and down comprises with the structure that the vertical shift screw rod is rotationally connected: the output shaft of described drive motors up and down is parallel with described vertical shift screw rod, and is rotationally connected with vertical shift screw rod one end; Or the output shaft of described up and down drive motors and described vertical shift screw rod are in a straight line, and connect described vertical shift screw rod.
Wherein, described vertical shift swivel nut comprises nut core, cutting ferrule and spring, described nut core and described vertical shift screw rod are spirally connected, and have two or more axially open, the end of described nut core axially open radially is provided with the stopper section, described cutting ferrule and spring concentric are enclosed within on the nut core, and described both ends of the spring is replaced with described rail brackets and cutting ferrule respectively, and described cutting ferrule is between the stopper section and spring of described nut core.
Wherein, described rail brackets comprises at least two horizontal sliding bars, described soldering tip comprises at least two guide holes, described soldering tip is set on two horizontal sliding bars of described rail brackets respectively by two guide holes, be connected with described rail brackets horizontal slip, the position hollow of the corresponding described traversing screw rod of described soldering tip, the bulk up and down of described hollow bulb, the stroke that slides up and down with described rail brackets and described soldering tip support are adaptive.
Wherein, described soldering tip support has with rail brackets and slides up and down the side that is connected, described soldering tip has the side that is connected with the rail brackets horizontal slip, described rail brackets comprises opposing two sides, wherein one side slides up and down with the chute structure with the described side employing of soldering tip support slide rail and is connected, and the described side of another side and soldering tip adopts slide rail and chute structure level to be slidingly connected.
For solving the problems of the technologies described above, another technical solution used in the present invention is: a kind of bonding equipment drive unit is provided, comprise the driving mechanism up and down that the control soldering tip moves up and down, and the horizontal drive mechanism that controls described soldering tip horizontal movement, described driving mechanism up and down and horizontal drive mechanism are separately fixed on the support of described soldering tip, also comprise: rail brackets, described rail brackets connects the described output of driving mechanism up and down, and slide up and down with the support of described soldering tip and to be connected, described soldering tip is connected with described rail brackets horizontal slip, and described soldering tip also slides up and down with the output of described horizontal drive mechanism and is connected.
The invention has the beneficial effects as follows: the horizontal drive mechanism that is different from the prior art bonding equipment must move up and down in overall under the driving of driving mechanism up and down and cause when welding impact bigger, influence the situation of precision, the present invention adopts fixedly the rail brackets of soldering tip to slide up and down with the soldering tip support to be connected, described soldering tip is connected with described rail brackets horizontal slip, the function that realization can be up and down welded with level, simultaneously, because also sliding up and down with the output of described horizontal drive mechanism, described soldering tip is connected, when this bonding equipment is welded up and down, it is motionless that horizontal drive mechanism can keep on upper-lower position, and only move up and down rail brackets and soldering tip, the component weight that need to move is lighter, thereby impacts when realizing the above-below direction welding operation little, bonding wire speed height, solder joint precision and quality height, the effect that bonding wire camber line quality is high; And, moving horizontally when welding, it is motionless that horizontal drive mechanism can also keep on horizontal level, little, the bonding wire speed height of impact, solder joint precision and quality height, the high effect of bonding wire camber line quality when realizing the horizontal direction welding operation.
Embodiment
Consult Fig. 2 and Fig. 3 together, bonding equipment of the present invention comprises:
Soldering tip support 210;
Control the driving mechanism up and down 220 that described soldering tip 240 moves up and down;
Control the horizontal drive mechanism 230 of described soldering tip 240 horizontal movements, described driving mechanism 220 up and down and horizontal drive mechanism 230 are separately fixed on the described soldering tip support 210;
Rail brackets 280, described rail brackets 280 connects the described output of driving mechanism 220 up and down, and slide up and down with described soldering tip support 210 and to be connected, described soldering tip 240 is connected with described rail brackets 280 horizontal slips, and described soldering tip 240 also slides up and down with the output of described horizontal drive mechanism 230 and is connected.
During work, the described up and down driving mechanism 220 that is fixed on described soldering tip support 210 drives soldering tips 240 and rail brackets 280 moves up and down along described soldering tip support 210, and the described horizontal drive mechanism 230 that is fixed on soldering tip support 210 equally drives soldering tips 240 and moves horizontally to finish along described rail brackets 280 and stride weldering.Because also sliding up and down with the output of described horizontal drive mechanism 230, described soldering tip 240 is connected, at above-mentioned soldering tip about in the of 240, when moving horizontally, horizontal drive mechanism 230 keeps motionless owing to being fixed on the described soldering tip support 210, and only its output moves in the horizontal direction.
Be appreciated that, the horizontal drive mechanism 230 that is different from the prior art bonding equipment must move up and down in overall under the driving of driving mechanism 220 up and down and cause impacting greatly, influence the situation of precision when welding, the present invention adopts fixedly the rail brackets 280 of soldering tip 240 to slide up and down with soldering tip support 210 to be connected, described soldering tip 240 is connected with described rail brackets 280 horizontal slips, the function that realization can be up and down welded with level;
Simultaneously, because also sliding up and down with the output of described horizontal drive mechanism 230, described soldering tip 240 is connected, when this bonding equipment is welded up and down, it is motionless that horizontal drive mechanism 230 can keep on upper-lower position, and only move up and down rail brackets 280 and soldering tip 240, the component weight that need to move is lighter, thereby impacts little, bonding wire speed height, solder joint precision and quality height, the high effect of bonding wire camber line quality when realizing the above-below direction welding operation; And, moving horizontally when welding, it is motionless that horizontal drive mechanism 230 can also keep on horizontal level, little, the bonding wire speed height of impact, solder joint precision and quality height when realizing the horizontal direction welding operation, the effect that bonding wire camber line quality is high.
Consult Fig. 3 and Fig. 4 together, in the present invention more specifically among the embodiment, described horizontal drive mechanism 230 comprises horizontal drive motor 231, traversing screw rod 232, traversing swivel nut 233 and first is slide block 234 up and down, described soldering tip 240 comprises hollow bulb 241, side at soldering tip 240 hollow bulbs 241 is provided with first upper and lower slide rail 242, the output shaft of described horizontal drive motor 231 connects described traversing screw rod 232, described traversing screw rod 232 passes described hollow bulb 241 and is screwed onto in the described traversing swivel nut 233, described traversing swivel nut 233 is fixed in described slide block 234 about in the of first, described about in the of first slide block 234 match with described first upper and lower slide rail 242.Here, described traversing swivel nut 233 is promptly as the output of described horizontal drive mechanism 230.
The rotation under horizontal drive motor 231 drives of described traversing screw rod 232, and described traversing swivel nut 233 be fixed in described about in the of first slide block 234 not along with 232 rotations of traversing screw rod, therefore produce relative displacement between traversing screw rod 232 and the traversing swivel nut 233, promote slide block 234 horizontal displacements about in the of first.And described about in the of first slide block 234 promote soldering tip 240 horizontal displacements.
Described traversing swivel nut 233 comprises nut core, cutting ferrule and spring, described nut core and described traversing screw rod 232 are spirally connected, and have two or more axially open, the end of described nut core axially open radially is provided with the stopper section, described cutting ferrule and spring concentric are enclosed within on the nut core, described both ends of the spring respectively with described about in the of first slide block 234 replace with cutting ferrule, described cutting ferrule is between the stopper section and spring of described nut core.
The design of described nut core, cutting ferrule and spring can make between described traversing screw rod 232 and the traversing swivel nut 233 has suitable elasticity, neither make between described traversing screw rod 232 and the traversing swivel nut 233 to cooperate the relative displacement difficulty that too tightly causes between them, the screw thread that cooperates between described traversing screw rod 232 and the traversing swivel nut 233 can not be meshed and can not realize relative displacement between them when causing described traversing screw rod 232 rotations.
And, the stroke that wears the bulk up and down of the described hollow bulb 241 of described traversing screw rod 232, slides up and down with described rail brackets 280 and described soldering tip support 210 is adaptive, can make horizontal drive mechanism 230 can not hinder moving of soldering tip 240 when soldering tip 240 upper and lower displacements.
Consult Fig. 4 and Fig. 5 together, on concrete, described driving mechanism 220 up and down comprises drive motors 221, vertical shift screw rod 224 and vertical shift swivel nut 225 up and down, the output shaft 222 of described up and down drive motors 221 is parallel with described vertical shift screw rod 224, and be rotationally connected with vertical shift screw rod 224 1 ends, described vertical shift screw rod 224 is screwed onto in the described vertical shift swivel nut 225, described vertical shift swivel nut 225 is connected with rail brackets 280, one side of described rail brackets 280 is provided with slide block 282 about in the of second, described about in the of second slide block 282 match with described second upper and lower slide rail 211.Here, described vertical shift swivel nut 225 is promptly as the described output of driving mechanism 220 up and down.
Described vertical shift screw rod 224 rotates under the driving of drive motors 221 up and down, make and produce relative displacement between described vertical shift swivel nut 225 and the vertical shift screw rod 224, because vertical shift screw rod 224 is motionless at above-below direction, make vertical shift swivel nut 225 relative soldering tip supports 210 move up and down, and then the soldering tip 240 on rail brackets 280 and the rail brackets 280 is moved up and down.Do not adopt belt directly to draw soldering tip 240 owing to adopt vertical shift screw rod 224 and move up and down, avoid soldering tip 240 positions to be difficult to the accurately problem of control, so solder joint precision and quality height, bonding wire camber line quality height.
Described vertical shift swivel nut 225 comprises nut core, cutting ferrule and spring, described nut core and described vertical shift screw rod 224 are spirally connected, and have two or more axially open, the end of described nut core axially open radially is provided with the stopper section, described cutting ferrule and spring concentric are enclosed within on the nut core, described both ends of the spring is replaced with cutting ferrule with described rail brackets 280 respectively, and described cutting ferrule is between the stopper section and spring of described nut core.
The described output shaft and described vertical shift screw rod 224 1 ends of drive motors 221 up and down can be rotationally connected by belt 223.
Consult Fig. 4 and Fig. 6 together, aspect between described soldering tip 240 and rail brackets 280, being slidingly connected, comprise following structure: described rail brackets 280 comprises at least two horizontal sliding bars 281, described soldering tip 240 comprises at least two guide holes 243, described soldering tip 240 is set on two horizontal sliding bars 281 of described rail brackets 280 respectively by two guide holes 243, be connected with described rail brackets 280 horizontal slips, the position hollow of described soldering tip 240 corresponding described traversing screw rods 232, the bulk up and down of described hollow bulb 241, adaptive with the stroke that described rail brackets 280 and described soldering tip support 210 slide up and down.
As for soldering tip 240, then also comprise transducer, transducer holder frame component and wire clamp assembly, in an example, soldering tip 240 total weights are about 500G.When soldering tip 240 side-to-side movements, do not have to shake, impact owing in light weight, can be good at guaranteeing quality of welding spot, stable welding and soldering tip 240 translational speed height.
According to above diagram, the present invention also provides a kind of bonding equipment drive unit, comprising:
The driving mechanism up and down 220 that control soldering tip 240 moves up and down;
Control the horizontal drive mechanism 230 of described soldering tip 240 horizontal movements, described driving mechanism 220 up and down and horizontal drive mechanism 230 are separately fixed on the support of described soldering tip 240;
Rail brackets 280, described rail brackets 280 connects the described output of driving mechanism 220 up and down, and slide up and down with the support of described soldering tip 240 and to be connected, described soldering tip 240 is connected with described rail brackets 280 horizontal slips, and described soldering tip 240 also slides up and down with the output of described horizontal drive mechanism 230 and is connected.
Because described horizontal drive mechanism 230 and driving mechanism 220 up and down are positioned at the both sides of described rail brackets 280, described horizontal drive mechanism 230 and soldering tip can be positioned at the space outerpace outside the soldering tip support, can convection current with outside air, therefore heat radiation is good, and is convenient to very much safeguard.
What deserves to be explained is, described horizontal drive mechanism 230 can exchange with the position of driving mechanism 220 up and down, promptly fixing by described horizontal drive mechanism 230 and soldering tip support 210, described horizontal drive mechanism 230 is connected with rail brackets 280 horizontal slips, and soldering tip 240 then slides up and down with driving mechanism 220 up and down and is connected.
Consulting Fig. 7, is the decomposing schematic representation of bonding equipment second embodiment of the present invention.The main distinction of described second embodiment and above-mentioned first embodiment is that the wherein one side and the soldering tip of described rail brackets adopt slide rail and chute structure level to be slidingly connected.On concrete:
Described traversing screw rod 332 passes described hollow bulb 341 and is screwed onto in the described traversing swivel nut 333, and described traversing swivel nut 333 is fixed in described slide block 334 about in the of first, described about in the of first slide block 334 match with described first upper and lower slide rail 342.Here, described traversing swivel nut 333 is promptly as the output of described horizontal drive mechanism 330.
The rotation under horizontal drive motor 331 drives of described traversing screw rod 332, and described traversing swivel nut 333 be fixed in described about in the of first slide block 334 not along with 332 rotations of traversing screw rod, therefore produce relative displacement between traversing screw rod 332 and the traversing swivel nut 333, promote slide block 334 horizontal displacements about in the of first.And described about in the of first slide block 334 promote soldering tip 340 horizontal displacements.
And, wear the described hollow bulb 341 of described traversing screw rod 332 bulk up and down, and described rail brackets 380 and the described stroke that slides up and down between the slide block 382 about in the of second adaptive, can when soldering tip 340 upper and lower displacements, make horizontal drive mechanism 330 can not hinder moving of soldering tip 340.
Described driving mechanism 320 up and down comprises drive motors 321, vertical shift screw rod 324 and vertical shift swivel nut 325 up and down.In the output shaft of described up and down drive motors 321 and the structure that vertical shift screw rod 324 is rotationally connected, the output shaft of drive motors 321 and described vertical shift screw rod 324 and connect described vertical shift screw rod 324 in a straight line up and down.Described vertical shift screw rod 324 is screwed onto in the described vertical shift swivel nut 325, described vertical shift swivel nut 325 is connected with rail brackets 380 by slide block 382 about in the of second, a side that is described rail brackets 380 is provided with slide block 382 about in the of second, described about in the of second slide block 382 match with described second upper and lower slide rail 311.Here, described vertical shift swivel nut 325 is promptly as the described output of driving mechanism 320 up and down.
Described vertical shift screw rod 324 rotates under the driving of drive motors 321 up and down, make and produce relative displacement between described vertical shift swivel nut 325 and the vertical shift screw rod 324, because vertical shift screw rod 324 is motionless at above-below direction, make vertical shift swivel nut 325 relative soldering tip supports 310 move up and down, and then the soldering tip 340 on rail brackets 380 and the rail brackets 380 is moved up and down.Do not adopt belt directly to draw soldering tip 340 owing to adopt vertical shift screw rod 324 and move up and down, avoid soldering tip 340 positions to be difficult to the accurately problem of control, so solder joint precision and quality height, bonding wire camber line quality height.
Aspect between described soldering tip 340 and rail brackets 380, being slidingly connected, comprise following structure: as described above, except that described soldering tip support 310 has with rail brackets 380 slides up and down the side that is connected, described soldering tip 340 also has the side that is connected with rail brackets 380 horizontal slips, i.e. the side of slide block 382 about in the of second.Here, described rail brackets 380 is except that the holder part of fixing slide block 334 about in the of first, also comprise slide block 382 about in the of second, described about in the of second slide block 382 comprise opposing two sides, wherein one side slides up and down with the chute structure with soldering tip support 310 described sides employing slide rails 311 as the aforementioned and is connected, another side then adopts slide rail and chute 381 structure levels to be slidingly connected with the side of the rail brackets 380 of soldering tip 340, promptly adopts rail brackets 380 to fix that the chute 381 of slide block 382 sides is slidingly connected about the side slide rail and second of holder part of slide block 334 about in the of first.
The above only is embodiments of the invention; be not so limit claim of the present invention; every equivalent structure or equivalent flow process conversion that utilizes specification of the present invention and accompanying drawing content to be done; or directly or indirectly be used in other relevant technical fields, all in like manner be included in the scope of patent protection of the present invention.