CN101615599A - The process of ceramic shell for six-inch ultrahigh power silicon-controlled element - Google Patents
The process of ceramic shell for six-inch ultrahigh power silicon-controlled element Download PDFInfo
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- CN101615599A CN101615599A CN200910162411A CN200910162411A CN101615599A CN 101615599 A CN101615599 A CN 101615599A CN 200910162411 A CN200910162411 A CN 200910162411A CN 200910162411 A CN200910162411 A CN 200910162411A CN 101615599 A CN101615599 A CN 101615599A
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Abstract
The process of ceramic shell for six-inch ultrahigh power silicon-controlled element comprises the steps: a) feedstock production; B) moulding; C) de-waxing; D) sintering; E) glazing; In the step a), before ball milling, add vegetable oil acid 0.3%, carry out ball milling, the time is 12 hours; Ball milling began back 2 hours, added vegetable oil acid 0.3%; Ball milling began back 4 hours, added vegetable oil acid 0.2% again; In the step b), slurry temperature 70-75 ℃, pressure 0.6-0.8MPa, dwell time 8-10 second; Use the cylinder compaction mold, more than the mold cavity thickness 15mm; In the step c), the supporting program-controlled intelligent table of controllable silicon adds thermal control; In the step d), sintering temperature is 1700 ℃, and the time is 30 hours; In the step e), the place that is difficult for being sprayed onto earlier between porcelain spare skirt muscle is coated with glaze, again in its surperficial glaze spraying.Its advantage is, has improved operating efficiency, has reduced the fission that produces when the product sintering shrinks.
Description
Technical field
The present invention relates to the process in the manufacturing field, particularly ceramic shell for six-inch ultrahigh power silicon-controlled element of semiconductor device.
Background technology
Traditional hot-injection molding technology, be characterized in solving baroque ceramic one-shot forming, but the shortcoming of hot-injection molding is, can only the less ceramic body of production specification, it is very big to produce big part product difficulty with the method, and the highest level of present domestic controllable silicon ceramic package is 5 inches.Be accompanied by thyristor to the development of major diameter, high power, the manufacturing technology of ceramic package is also in continuous progress, and diameter develops into present 6 inches from initial half inch, and very big variation has also taken place structure, and manufacturer also progressively move towards specialization.The highest level of production of thyristor is 6 inches, 8500V/4000A at present in the world, and external production adopted the isostatic pressing method simple annular base substrate of processing earlier, utilizes precision machine tool to be processed into required shape again.This method equipment has high input, and technology is loaded down with trivial details, the cost of manufacture height.And traditional hot-injection molding technological work efficient is low and its product is easy to generate fission.
Summary of the invention
Technical problem to be solved by this invention is, at above-mentioned prior art present situation, and provides that a kind of technology is simple, cost is low but the process of the little ceramic shell for six-inch ultrahigh power silicon-controlled element of high efficiency, product fission.
The present invention solves the problems of the technologies described above the technical scheme that is adopted: make the process of ceramic shell for six-inch ultrahigh power silicon-controlled element, it is characterized in that, comprise the steps: a) feedstock production; B) moulding; C) de-waxing; D) sintering; E) glazing;
In the described step a), before ball milling, adding vegetable oil acid is 0.3% of powder weight, carries out ball milling, and the time is 12 hours; Ball milling began back 2 hours, added vegetable oil acid 0.3%; Ball milling began back 4 hours, added vegetable oil acid 0.2% again;
In the described step b), slurry temperature is 70-75 ℃, and pressure is 0.6-0.8MPa, dwell time 8-10 second; Use the cylinder compaction mold, mold cavity thickness is more than the 15mm;
In the described step c), heating control system uses the supporting program-controlled intelligent table of controllable silicon to control;
In the described step d), sintering temperature is 1700 ℃, and the time is 30 hours;
In the described step e), the place that is difficult for being sprayed onto earlier between porcelain spare skirt muscle is coated with glaze, again in its surperficial glaze spraying.
Compared with prior art, the invention has the advantages that, reduced the ball milling time, not only improved operating efficiency but also be convenient to the de-waxing of postorder stable; Vegetable oil acid as activator applies by stages, is absorbed by powder easilier, has guaranteed the flowability of slip, is convenient to big product of moulding; Improved the temperature and the pressure of slip moulding, increased the thickness of mould,, the slip of injection has fully been solidified and enough coolings and indeformable when being convenient to the demoulding to guarantee enough caloric receptivities; Lower sintering temperature but add for a long time, reduced the fission that produces when sintering shrinks.
Embodiment
According to embodiment the present invention is described in further detail below.
Make the process of ceramic shell for six-inch ultrahigh power silicon-controlled element, comprise the steps: a) feedstock production; B) moulding; C) de-waxing; D) sintering; E) glazing;
In the described step a), before ball milling, elder generation carries out ball milling according to 0.3% interpolation vegetable oil acid of the weight of powder; Ball milling began back 2 hours, added vegetable oil acid 0.3%; Ball milling began back 4 hours, added vegetable oil acid 0.2% again; Total ball milling time is 12 hours;
In the described step b), slurry temperature is 70-75 ℃, and pressure is 0.6-0.8MPa, dwell time 8-10 second; Use the cylinder compaction mold, mold cavity thickness is greater than 15mm;
In the described step c), heating control system uses the supporting program-controlled intelligent table of controllable silicon to control;
In the described step d), sintering temperature is 1700 ℃, and the time is 30 hours.
In the described step e), earlier between porcelain spare skirt muscle, be difficult for being sprayed onto the local glaze that is coated with, again in its surperficial glaze spraying.
Claims (2)
1, the process of ceramic shell for six-inch ultrahigh power silicon-controlled element is characterized in that, comprises the steps: a) feedstock production; B) moulding; C) de-waxing; D) sintering; E) glazing;
In the described step a), before ball milling, add vegetable oil acid 0.3% (powder weight), carry out ball milling, the time is 12 hours; Ball milling finishes back 2 hours, adds vegetable oil acid 0.3%; Ball milling finishes back 4 hours, adds vegetable oil acid 0.2% again;
In the described step b), slurry temperature is 70-75 ℃, and pressure is 0.6-0.8MPa, dwell time 8-10 second; Use the cylinder compaction mold, mold cavity thickness is more than the 15mm;
In the described step c), heating control system uses the supporting program-controlled intelligent table of controllable silicon to control;
In the described step d), sintering temperature is 1700 ℃, and the time is 30 hours.
2, the process of ceramic shell for six-inch ultrahigh power silicon-controlled element according to claim 1 is characterized in that, in the described step e), the place that is difficult for being sprayed onto earlier between porcelain spare skirt muscle is coated with glaze, again in its surperficial glaze spraying.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910162411A CN101615599A (en) | 2009-08-04 | 2009-08-04 | The process of ceramic shell for six-inch ultrahigh power silicon-controlled element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910162411A CN101615599A (en) | 2009-08-04 | 2009-08-04 | The process of ceramic shell for six-inch ultrahigh power silicon-controlled element |
Publications (1)
| Publication Number | Publication Date |
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| CN101615599A true CN101615599A (en) | 2009-12-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN200910162411A Pending CN101615599A (en) | 2009-08-04 | 2009-08-04 | The process of ceramic shell for six-inch ultrahigh power silicon-controlled element |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102757228A (en) * | 2011-04-26 | 2012-10-31 | 中国科学院声学研究所 | Preparation method of piezoelectric ceramic spherical shell |
-
2009
- 2009-08-04 CN CN200910162411A patent/CN101615599A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102757228A (en) * | 2011-04-26 | 2012-10-31 | 中国科学院声学研究所 | Preparation method of piezoelectric ceramic spherical shell |
| CN102757228B (en) * | 2011-04-26 | 2014-08-06 | 中国科学院声学研究所 | Preparation method of piezoelectric ceramic spherical shell |
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Open date: 20091230 |