CN101613174A - Water-cooled mold - Google Patents
Water-cooled mold Download PDFInfo
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- CN101613174A CN101613174A CN200910142295A CN200910142295A CN101613174A CN 101613174 A CN101613174 A CN 101613174A CN 200910142295 A CN200910142295 A CN 200910142295A CN 200910142295 A CN200910142295 A CN 200910142295A CN 101613174 A CN101613174 A CN 101613174A
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- water
- mould
- separate sections
- cooled mold
- internal surface
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
- C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
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- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Melting And Manufacturing (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention provides and a kind ofly be used to make quartz crucible and possess water-cooled mold in inside, the inner mould part that it comprises on outer mold part of being made by heat-conducting metal or alloy material and the internal surface that is closely arranged in described outer mold part and is made by heat-stable material for the gap of flow of cooling water.
Description
Technical field
The present invention relates to a kind of water-cooled mold that is used to make quartz crucible, and more particularly, relate to a kind of water-cooled mold with best mould structure.
Background technology
Quartz glass crucible is used to lift silicon single crystal as semiconductor material, as silicon crystal of solar cell (solarbattery) material etc.For instance, silicon single crystal mainly is to make by the following method: make polysilicon block (the polycrystalline silicon lump) fusing in the quartz glass crucible of packing into form silicon melt by heating, and then crystal seed is immersed in the described silicon melt and by it and lift.Though with compare monocrystalline degree (single-crystallinity) as the silicon single crystal of semiconductor material lower, it is to make by identical method of pulling up as the silicon crystal of solar cell material.
Rotating mold method (rotating mold method) is considered to a kind of method of making quartz glass crucible.In this method, use rotatable bowl-shape mould, and by using the centrifugal force that during the described mould of rotation, is produced that the silica powder raw material is deposited on the internal surface with the internal surface of specific thicknesses along mould.Subsequently, silica powder is heated to above the temperature (about 2000 ℃) of fusing point (temperature of fusion) by the arc-over of the electrode above mould and around the rotary middle spindle of mould, settled, thereby make silica powder fusing and vitrifying, have along the glass pot of the shape of the internal surface of mould with formation, and after this with the cooling of gained glass pot and from mould, take out.
So far, water-cooled mold has been considered to be used for making by the rotating mold method mould of quartz glass crucible.For instance, JP-A-H11-43394 discloses and to pack into the silica powder raw material in the rotation stainless steel water-cooled mold and make its fusing to make quartz glass crucible by arc-over.Similarly, JP-A-2002-154890 discloses and to pack into silica powder in the rotation stainless steel water-cooled mold and under reduced pressure make its moulding to make quartz glass crucible by arc-over.
In conventional stainless steel water-cooled mold, by gap that in the bottom of mould and inner peripheral portion, is formed for flow of cooling water and the cause thermal damage of in the environment of comparatively high temps heating, assigning to prevent mould with the bottom and the surrounding wall portion of water quench mould.Usually the internal surface with mould is cooled to about 100 ℃.On the other hand, the silica powder raw material that will be deposited on the mould inner surface by arc-over is heated to above the temperature of fusing point, thereby makes fusing of silica powder raw material and vitrifying.
In the cooling structure of conventional water-cooled mold, be heated to above fusing point and make silica powder fusing and vitrifying by will be deposited on silica powder on the mould inner surface in internal surface opposed outer surface side with mould, and the most of silica powder that is positioned at the inner surface side of mould keeps not vitrified not melted state, and this is because removed heat in the described part by cooling off described mould.In order to form vitrifying layer with target thickness with conventional water-cooled mould, about 2 times of the silica powder quantity of the use weight more required than target thickness.Therefore, problem be the silica powder quantity that is used to form product lack than used quantity and the loss of silica powder quantity bigger.
On the other hand, the carbon die all made of known existence by carbon.Although the thermotolerance of carbon is than stainless steel height, if use the time that prolongs under comparatively high temps, so owing to oxidation consumption, it can be through heat damage.Problem is that the mould of thermal damage causes the shape failure of quartz glass crucible and therefore will replace the mould of whole costliness with new die, and this significantly reduces economic benefit.
Summary of the invention
The invention reside in the problems referred to above that solve conventional water-cooled mold, and provide a kind of and have enough thermotolerances and significantly reduce the water-cooled mold of the not melt portions of silica powder raw material by the structure of optimizing water-cooled mold.
The invention provides a kind of water-cooled mold with following structure:
(1) a kind ofly is used to make quartz crucible and possesses water-cooled mold in inside, the inner mould part that it comprises on outer mold part of being made by heat-conducting metal or alloy material and the internal surface that is closely arranged in described outer mold part and is made by heat-stable material for the gap of flow of cooling water.
(2) according to the water-cooled mold of clauses and subclauses (1), the ventilating pit that wherein leads to the internal surface of mould forms in the inner mould part.
(3) according to the water-cooled mold of clauses and subclauses (1) or (2), wherein inner mould partly is to be made of a plurality of separate sections integral body, and described separate sections comprises that separate sections under the dish type on the bottom that places outer mold part and at least one removably are piled up on the described separate sections down and are closely arranged in separate sections on the annular on the internal surface of outer mold part.
(4) according to the water-cooled mold of clauses and subclauses (3), each in wherein said a plurality of separate sections is all made by carbon material.
(5) according to the water-cooled mold of clauses and subclauses (1), wherein outer mold partly is to constitute with water-cooling jacket (water-cooling jacket) form.
(6) according to the water-cooled mold of clauses and subclauses (1), wherein mould has and has end cylindrical shape is arranged and being used for making quartz crucible by the rotating mold method of upward opening part, in described method, the dotted line of central position that leads to described opening portion from the central position of bottom is as turning axle, and described mould is around the turning axle rotation.
Water-cooled mold according to the present invention is a kind of mould that is used to make quartz crucible, the outer mold part that wherein constitutes mould portion within it possesses the gap that is used for flow of cooling water and is made by heat-conducting metal or alloy material, and inner mould partly is to be closely arranged on the outer mold internal surface partly and by heat-stable material to make, so that the silica powder raw material does not directly contact with the internal surface of outer mold part.Therefore, even passing through outer mold part cooling die between heating period with comparatively high temps, also can make owing to the athermic effect of the inner mould made by heat-stable material part by mould internal surface from the silica powder raw material of heating remove hot less, and so keep not that the quantity of the silica powder raw material of melted state significantly reduces.
Description of drawings
The present invention will be described with reference to the accompanying drawings, wherein:
Fig. 1 is the longitudinal diagram according to water-cooled mold of the present invention.
Fig. 2 is crucible is made in explanation by the rotating mold method a cross-sectional view.
Fig. 3 is the cross-sectional view that shows the state of the silica powder raw material that heats when using conventional water-cooled mold to make quartz crucible.
Fig. 4 is the cross-sectional view that shows the state of the silica powder raw material that heats when use is made quartz crucible according to water-cooled mold of the present invention.
Embodiment
In Fig. 1, show typical structure example according to water-cooled mold of the present invention.
Shown water-cooled mold 10 is a kind ofly to be used to make the water-cooled mold of quartz crucible and mainly to comprise outer mold part 11 and inner mould part 12.
The water-cooling jacket that constitutes outer mold part 11 is made by stainless steel, wherein is used for flow of cooling water and/or round-robin gap are used for water coolant is delivered to described gap in inner formation of described chuck and connection member (not shown).Closely and integrally be arranged on the total inner surface of outer mold part 11 by the inner mould part of making such as carbon material heat-stable materials such as (for example carbon liners) 12.
Form a plurality of ventilating pits 13 that lead to inner lining surface in the inside of inner mould part 12.These ventilating pits 13 communicate with the set hole 14 in that mold bottom forms corresponding to turning axle, and connect external pressures by set hole 14 and reduce devices (not shown).Be in decompression state by the air of ventilating pit 13 in the outside is extracted silica powder raw material layer on the internal surface be deposited on inner mould part 12 out to keep the silica powder raw material layer.By during heat fused, removing the delay that the air that exists in the silica powder raw material layer prevents air entrapment when the silica powder vitrifying, can form the transparent glass layer that does not contain bubble in fact thus by suction.
The inner mould part 12 that constitutes water-cooled mold 10 can removably be made of to 24 a plurality of separate sections 20.For instance, the water-cooled mold shown in Fig. 1 10 removably is piled up in down on the separate sections 20 by separate sections under the dish type on the bottom that places outer mold part 11 20 and at least one and is closely arranged in the whole formation of separate sections (Fig. 1 is 4 and goes up separate sections 21 to 24) on the annular on the internal surface of outer mold part 11.These separate sections 20 to 24 form the inner mould part 12 of the internal surface that covers outer mold part 11.
Under dish type, form a plurality of ventilating pits 13 and the center that is positioned at the bottom and the set hole 14 of exterior that pass inside and lead to the internal surface of mould in the bottom in the separate sections 20.Last separate sections 21 to 23 also is the annular element with same inner diameter and external diameter, and each in the described section all possesses from upper surface leads to lower surface and lead to the ventilating pit 13 of the internal surface of mould.Go up most separate sections 24 and be annular element with the internal diameter identical and U-shaped cross-section with separate sections 21 to 23 on other and within it portion possess ventilating pit 13.Going up most separate sections 24 is upper ends of being fixed in outer mold part 11 by stationary member, described stationary member such as with the fixing part 25 of outwards opening notch part engagement of described section, screw 26 etc.Separate sections 20 and last separate sections 21 to 24 are integrally to interfix by stationary member under the dish type, and are detachably connected on the internal surface of outer mold part 11.
Therefore, inner mould part 12 is to construct by assembling a plurality of separate sections 20 to 24, and the inner mould part can easily be connected on the internal surface of outer mold part 11 thus.In addition because inner mould part 12 is to be detachably connected on the outer mold part, so if inner mould part 12 through heat damage, so can be easily with new inner mould partly with its replacement.In separate sections 20 to 24, only the separate sections of thermal damage can be partly replaced with new section, so that the mould maintenance cost can keep lower, and also can improve greatly the work-ing life of water-cooled mold generally.
As shown in Figure 2, water-cooled mold 10 according to the present invention have have upward opening part end cylindrical shape is arranged and around the dotted line rotation of the central position of leading to opening portion as the central position from the bottom of turning axle to produce centrifugal force, by the rotating mold method silica powder raw material is deposited on the internal surface of inner mould part 12 with specific thicknesses thus.Subsequently, the arc-over by the electrode 35 settled above mould 10 and around the rotary middle spindle of mould is heated to above the temperature (about 2000 ℃) of fusing point with the silica powder raw material, thereby makes the fusing of silica powder raw material to form the quartz layer 34 of fusing.
As shown in Figure 3, conventional water-cooled mold does not possess the inner mould part, so that the silica powder raw material directly is deposited on the internal surface 31 of water-cooled mold 10.The internal surface 31 of water-cooled mold is cooled to about 100 ℃, simultaneously the internal surface 32 of gained quartz layer 30 is heated to above the temperature (about 2000 ℃) of fusing point.Yet, because the thermal conductivity of quartz layer 30 is less, so big thermograde occurs in the inside of quartz layer 30 from the internal surface 32 of quartz layer 30 to the internal surface 31 of water-cooled mold 10.Therefore, in the sedimentary quartz layer part corresponding to the temperature province that is not higher than fusing point increase, and the ratio of the unfused quartz layer 33 that is therefore contained in the quartz layer 30 becomes big.In order to form the quartz layer of fusing, therefore be necessary to consider unfused quartz layer 33 and deposit certain thickness silica powder raw material with target thickness.
On the contrary, when using according to the water-cooled mold 10 that comprises outer mold part 11 and inner mould part 12 of the present invention, as shown in Figure 4, the silica powder raw material is deposited on the internal surface of inner mould part 12, and does not directly contact with the internal surface of outer mold part 11.Owing to there is inner mould part 12, the temperature that is deposited on the quartz layer on the internal surface of inner mould part 12 can keep higher, and the thickness of staying the unfused quartz layer 33 in the quartz layer 30 thus can reduce greatly.
Claims (6)
1, a kind ofly is used to make quartz crucible and possesses water-cooled mold in inside, comprising the inner mould part of making on outer mold part of making by heat-conducting metal or alloy material and the internal surface that is closely arranged in described outer mold part and by heat-stable material for the gap of flow of cooling water.
2, water-cooled mold according to claim 1, the ventilating pit that wherein leads to the internal surface of described mould is formed in the described inner mould part.
3, water-cooled mold according to claim 1 and 2, wherein said inner mould partly is to be made of a plurality of separate sections integral body, and described separate sections comprises that separate sections under the dish type on the bottom that places described outer mold part and at least one removably are piled up on the described separate sections down and are closely arranged in separate sections on the annular on the internal surface of described outer mold part.
4, water-cooled mold according to claim 3, each in wherein said a plurality of separate sections is all made by carbon material.
5, water-cooled mold according to claim 1, wherein said outer mold partly are to constitute with the water-cooling jacket form.
6, water-cooled mold according to claim 1, wherein said mould has and has end cylindrical shape is arranged and being used for making quartz crucible by the rotating mold mode of upward opening part, in described mode, the dotted line of central position that leads to described opening portion from the central position of bottom is as turning axle, and described mould is around described turning axle rotation.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008169702 | 2008-06-28 | ||
| JP2008169702 | 2008-06-28 | ||
| JP2009141301 | 2009-06-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101613174A true CN101613174A (en) | 2009-12-30 |
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ID=41493085
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200910142295A Pending CN101613174A (en) | 2008-06-28 | 2009-06-29 | Water-cooled mold |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101613174A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102219361A (en) * | 2011-05-13 | 2011-10-19 | 宁波宝斯达坩埚保温制品有限公司 | Metal die used for producing crucible |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000219524A (en) * | 1999-01-27 | 2000-08-08 | Toshiba Ceramics Co Ltd | Device for producing quartz crucible |
-
2009
- 2009-06-29 CN CN200910142295A patent/CN101613174A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000219524A (en) * | 1999-01-27 | 2000-08-08 | Toshiba Ceramics Co Ltd | Device for producing quartz crucible |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102219361A (en) * | 2011-05-13 | 2011-10-19 | 宁波宝斯达坩埚保温制品有限公司 | Metal die used for producing crucible |
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Application publication date: 20091230 |