CN101609259A - The cabinet of taking in pressure stabilization function - Google Patents
The cabinet of taking in pressure stabilization function Download PDFInfo
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- CN101609259A CN101609259A CNA2008101252019A CN200810125201A CN101609259A CN 101609259 A CN101609259 A CN 101609259A CN A2008101252019 A CNA2008101252019 A CN A2008101252019A CN 200810125201 A CN200810125201 A CN 200810125201A CN 101609259 A CN101609259 A CN 101609259A
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Abstract
The invention relates to a kind of cabinet of taking in pressure stabilization function, be meant that especially a kind of optical mask box inside that prevents forms the cabinet of taking in of negative pressure in exhaust process, it is made of a framework, this framework is provided with an at least one air inlet loop and an exhaust loop, and be provided with one or most bearings unit in the framework, each bearing unit has the air inlet valve member at least one connection air inlet loop and the voltage stabilizing valve member at least one connection exhaust loop, optical mask box then has the air valve of corresponding aforementioned bearing unit air inlet valve member and voltage stabilizing valve member, wherein voltage stabilizing valve member gas channel can stride be located at corresponding air valve gas passage orifice in, outward, make the gas of voltage stabilizing valve member suction synchronously optical mask box inner space and external environment condition, allow take in cabinet can be by the effect of voltage stabilizing valve member, avoid the optical mask box inner space to produce negative pressure greater than air inflow because of air capacity, open and can be convenient to optical mask box, and the unlikely moment air-flow that produces brute force can avoid air-flow to injure the surface of optical mask box interior lights mask.
Description
Technical field
The present invention relates to a kind of inner cabinet that forms the technical field of negative pressure of optical mask box that prevents; particularly relate to a kind of optical mask box of avoiding and take in cabinet because of what negative pressure can't be opened; and can prevent in the optical mask box photomask because of moment powerful air-flow be subjected to stainedly, can effectively protect the cabinet of taking in pressure stabilization function on photomask surface.
Background technology
In recent years, along with the manufacture of semiconductor technology is day by day constantly progressive, the size of wafer is by early stage 3 o'clock, 4 o'clock, 6 o'clock, proceeded at 12 o'clock at 8 o'clock, then constantly miniaturization of line footpath as for the integrated circuit on the wafer, its line footpath then has been developed to 90～45 rice how, therefore wafer (Die) quantity on same wafer (Wafer) also significantly increases, the usefulness of wafer also is raised with value, in other words, when having defective products to produce in the processing procedure, loss for manufacturer also significantly enlarges, and therefore how further to improve the processing procedure acceptance rate, is that each semiconductor manufacturer is constantly thought deeply, the direction of research and development.
Influence the key of its processing procedure acceptance rate, particulate in dust free room and the operational error, as photomask (Reticle, photomask is a light shield, this paper all is called photomask) surface attachment has stained problems such as particulate, atomizing, then in the gold-tinted processing procedure of a large amount of repeated exposure, can constantly be attached to these mistakes on the wafer, cause the defective products of huge amount.And photomask is being made at present, clean, operation and storage, in the process of transportation, no matter be the environment that places optical mask box or dust free room, all have many particulates, aqueous vapor, gas, objectionable impuritiess such as chemical solvent molecule, these objectionable impuritiess can be attached to the surface of photomask, and after the heating of long-time storage or exposure manufacture process, can produce particulate on the surface of photomask adheres to, crystallization, again or phenomenon such as atomizing, these phenomenons all can cause the reduction of wafer acceptance rate, and cleaning and the time of improving have been increased, cause turnout to reduce the relative cost that also can improve operation.
In order to improve the cleanliness factor of integrated operation environment; industry is then developed just like United States Patent (USP) US4; 532; No. 970 and United States Patent (USP) US 4; 534; the airtight transfer system that No. 389 grades are used for that wafer, light put is unlikely in the environment that enters next-door neighbour's photomask and wafer with particulate or the objectionable impurities of guaranteeing the Zhou Yuanhuan border.And owing to the stained reason of photomask except particulate, further comprise sulfide that aqueous vapor, toxic gas, plastic cement system optical mask box in the environment disengaged and the objectionable impurities in the manufacturing process, it can cause the phenomenon of atomizing and crystallization.So in order to address these problems, industry has been developed again to install additional on optical mask box and has been filled, fill out the structure of gas, clean inert gas can be injected in this optical mask box to extrude harmful gas, further promote the impermeability of this optical mask box simultaneously, to prevent that outer particle from entering, and prevent that clean inert gas runs off, for example No. the 223680th, TaiWan, China patent announcement and I262164 number etc., it is all in the change by this optical mask box structure, improve the impermeability of optical mask box, but structurally carry out bubble-tight improvement is a great engineering, not only need to increase exploitation, the cost of molding and assembling, and be subjected to material, cover the influence of factors such as power and contact area, it also can't reach airtight effect fully, therefore the inventor once developed a kind of optical mask box of circulating current in the past, by the circulating current of synchronous gas injection and exhaust, keep the cleanliness factor of optical mask box inside.
But in practical operation, the inventor finds that this optical mask box is when inlet and outlet synchronously, may be because the runner of optical mask box inside be full of twists and turns and assembly and photomask such as stop at factor affecting, cause the phenomenon of its air inflow less than air capacity, so will make the inner space and the external environment condition of optical mask box form negative pressure, so when optical mask box during in unlatching, may be because of the influence of negative pressure, can't be effectively and open optical mask box smoothly; Moreover, when the optical mask box inner space forms negative pressure, the moment that it is being opened, outer gas stream can produce inwardly mobile powerful air-flow of one moment, this brute force air-flow not only can cause kicking up of particulate and objectionable impurities, and possible scratch or be attached to the figure on photomask surface, thereby have influence on the acceptance rate in the successive process.
This shows that above-mentioned existing optical mask box obviously still has inconvenience and defective, and demands urgently further being improved in structure and use.In order to solve the problem of above-mentioned existence, relevant manufacturer there's no one who doesn't or isn't seeks solution painstakingly, but do not see always that for a long time suitable design finished by development, and common product does not have appropriate structure to address the above problem, this obviously is the problem that the anxious desire of relevant dealer solves.Therefore how to found a kind of cabinet of taking in of new structure with pressure stabilization function, real one of the current important research and development problem that belongs to, also becoming the current industry utmost point needs improved target.
Because the existing in the use defective of above-mentioned existing optical mask box, the inventor is based on being engaged in this type of product design manufacturing abundant for many years practical experience and professional knowledge thereof, and the utilization of cooperation scientific principle, actively studied innovation, in the hope of founding a kind of cabinet of taking in of new structure with pressure stabilization function, can improve general existing optical mask box, use to overcome having inconvenience and the puzzlement that optical mask box forms because of negative pressure easily now after filling exhaust, make it have more practicality.Through constantly research, design, and, create the present invention who has practical value finally through after studying sample and improvement repeatedly.
Summary of the invention
The objective of the invention is to, overcome the defective that existing optical mask box exists, and provide a kind of cabinet of taking in of new structure with pressure stabilization function, technical matters to be solved is to make its inside that can allow optical mask box fill in taking in cabinet to avoid optical mask box in the process of exhaust produce negative pressure, is very suitable for practicality.
Another object of the present invention is to; a kind of cabinet of taking in pressure stabilization function of new structure is provided; technical matters to be solved is to make it can prevent that optical mask box from producing powerful air-flow of moment when opening, with the surface of protection photomask, thereby be suitable for practicality more.
The object of the invention to solve the technical problems realizes by the following technical solutions.A kind of cabinet of taking in according to the present invention's proposition with pressure stabilization function, its inside can be for putting one or more for the optical mask box that stores photomask, and this optical mask box has the air valve of plural number for inlet and outlet, wherein: this is taken in cabinet and is made of a framework, and this framework has at least one air inlet loop and at least one exhaust loop; This is taken in cabinet and has at least one for the bearing unit of placing optical mask box, this bearing unit is provided with the air inlet valve member and at least one voltage stabilizing valve member that is connected the exhaust loop at least one connection air inlet loop, wherein this voltage stabilizing valve member has one or most runner holes, the runner hole of this voltage stabilizing valve member is to stride to be located at the inside and outside of optical mask box air valve, makes the gas of voltage stabilizing valve member suction synchronously optical mask box accommodation space and external environment condition.
The object of the invention to solve the technical problems also can be applied to the following technical measures to achieve further.
The aforesaid cabinet of taking in pressure stabilization function, the wherein said bearing unit of taking in cabinet have for the bearing that supports optical mask box, form on the bearing and are provided with plural open-work, pile up to avoid particulate.
The aforesaid cabinet of taking in pressure stabilization function, wherein said bearing are provided with one or most for the spacing setting element of optical mask box clip.
The aforesaid cabinet of taking in pressure stabilization function, wherein said bearing is provided with one or most inductive switch, for detecting or the recording light mask box.
The aforesaid cabinet of taking in pressure stabilization function, the wherein said air inlet valve member of taking in cabinet has a hollow valve body, and this valve inner stage casing is formed with a partition that has than small through hole, be provided with the floating lever that slides of partition through hole relatively in this valve body, the two ends of this floating lever have the neck that big top and directly can pass partition respectively, and bundle is provided with the packing washer of an alternative sealing partition through hole on this neck, and shore between the top of floating lever and the partition spring is arranged, allow the packing washer of floating lever can be relatively away from or be close to partition, reach and allow air inlet valve member can be bullied conducting of valve action selectivity or sealing.
The aforesaid cabinet of taking in pressure stabilization function, the wherein said voltage stabilizing valve member of taking in cabinet has a hollow valve body, and the end face of this valve body forms and is provided with the bulge loop sheet in big footpath together, and the inside of valve body forms and is provided with a partition, and the runner hole of the inside and outside portion of cross-over connection optical mask box air valve is to be arranged on the partition synchronously.
The aforesaid cabinet of taking in pressure stabilization function, the end face of the partition of wherein said voltage stabilizing valve member also has push rod protruding upward, the air valve of selective property keying optical mask box.
The aforesaid cabinet of taking in pressure stabilization function, the air valve of wherein said optical mask box has a hollow valve body, and the stage casing, inside of this valve body forms and is provided with a partition that has than small through hole, be provided with the floating lever that slides of partition through hole relatively in this valve body, the two ends of this floating lever have the neck that big top and directly can pass partition respectively, and bundle is provided with the packing washer of an alternative sealing partition through hole on this neck, and shore between the top of floating lever and the partition spring is arranged, allow the packing washer of floating lever can be relatively away from or be close to partition, reach the effect that allows air valve can be subjected to air inlet valve member and voltage stabilizing valve member effect selectivity conducting or sealing.
The present invention compared with prior art has tangible advantage and beneficial effect.By technique scheme, the cabinet of taking in that the present invention has pressure stabilization function has following advantage and beneficial effect at least: by representing of aforementioned techniques means, the present invention takes in cabinet and can stride by the gas channel of voltage stabilizing valve member and be located in the corresponding air valve gas passage orifice, outer design, make the gas of voltage stabilizing valve member suction synchronously optical mask box inner space and external environment condition, can be and allow this take in cabinet by the effect of voltage stabilizing valve member, can avoid the optical mask box inner space to produce negative pressure, the unlikely unlatching that influences optical mask box, and can avoid injuring the surface of interior lights mask because of the powerful air-flow that moment inwardly flows.
In sum, the present invention is relevant a kind of cabinet of taking in pressure stabilization function, be meant that especially a kind of optical mask box inside that prevents forms the cabinet of taking in of negative pressure in exhaust process, it is made of a framework, this framework is provided with an at least one air inlet loop and an exhaust loop, and be provided with one or most bearing unit in the framework, each bearing unit has the air inlet valve member at least one connection air inlet loop and the voltage stabilizing valve member at least one connection exhaust loop, optical mask box then has the air valve of corresponding aforementioned bearing unit air inlet valve member and voltage stabilizing valve member, wherein the gas channel of voltage stabilizing valve member can stride be located at corresponding air valve gas passage orifice in, outward, make the gas of voltage stabilizing valve member suction synchronously optical mask box inner space and external environment condition, allow take in cabinet can be by the effect of voltage stabilizing valve member, avoid the optical mask box inner space to produce negative pressure greater than air inflow because of air capacity, so can be convenient to the unlatching of optical mask box, and the unlikely moment air-flow that produces brute force injures the surface of optical mask box interior lights mask to avoid air-flow.Therefore; the inside that the present invention can allow optical mask box fill in taking in cabinet and avoid optical mask box in the process of exhaust produces negative pressure; can prevent also that in addition optical mask box from producing powerful air-flow of moment when opening, can effectively protect the surface of photomask, be very suitable for practicality.The present invention has above-mentioned plurality of advantages and practical value, no matter it all has bigger improvement on product structure or function, obvious improvement is arranged technically, and produced handy and practical effect, and more existing optical mask box has the outstanding effect of enhancement, thereby being suitable for practicality more, really is a new and innovative, progressive, practical new design.
Above-mentioned explanation only is the general introduction of technical solution of the present invention, for can clearer understanding technological means of the present invention, and can be implemented according to the content of instructions, and for above-mentioned and other purposes, feature and advantage of the present invention can be become apparent, below especially exemplified by preferred embodiment, and conjunction with figs., be described in detail as follows.
Description of drawings
Fig. 1 is the stereoscopic synoptic diagram that the present invention takes in cabinet.
Fig. 2 is the inner structure synoptic diagram that the present invention takes in cabinet, illustrates that structure of the present invention constitutes and relativeness.
Fig. 3 is exploded and the diagrammatic cross-section that the present invention takes in cabinet, and the structure that further specifies its air inlet valve member and voltage stabilizing valve member constitutes.
Fig. 4 is applied to the exploded perspective synoptic diagram that the present invention takes in the optical mask box of cabinet.
Fig. 5 is applied to decomposition and the diagrammatic cross-section that the present invention takes in the optical mask box air valve of cabinet.
Fig. 6 is that the present invention takes in cabinet keeps optical mask box inner space voltage stabilizing when reality is used structure cut-open view.
Fig. 7 A, Fig. 7 B are the partial structurtes diagrammatic cross-sections before the present invention takes in cabinet air inlet valve member and voltage stabilizing valve member dock with the optical mask box air valve in actual use.
Fig. 8 A, Fig. 8 B are that the present invention takes in cabinet air inlet valve member and voltage stabilizing valve member and partial structurtes diagrammatic cross-section after the optical mask box air valve docks in actual use.
10: take in cabinet 11: the air inlet loop
12: exhaust loop 15: door-plate
20: filter module 30: the bearing unit
31: bearing 32: open-work
33: setting element 34: inductive switch
35: lockhole 36: screw
40: air inlet valve member 41: valve body
42: partition 43: floating lever
44: neck 45: spring
46: packing washer 47: top
470: open-work 471: push rod
50: voltage stabilizing valve member 51: valve body
52: bulge loop sheet 53: partition
54: runner hole 55: push rod
56: thread segment 60: optical mask box
61: base 62: hold to piece
63: paste and support piece 65: clamshell
70: air valve 71: valve body
72: partition 73: floating lever
74: top 75: neck
76: spring 77: packing washer
Embodiment
Reach technological means and the effect that predetermined goal of the invention is taked for further setting forth the present invention, below in conjunction with accompanying drawing and preferred embodiment, to foundation the present invention propose have a pressure stabilization function take in its embodiment of cabinet, structure, feature and effect thereof, describe in detail as after.
Relevant aforementioned and other technology contents, characteristics and effect of the present invention can be known to present in the following detailed description that cooperates with reference to graphic preferred embodiment.By the explanation of embodiment, when can being to reach technological means that predetermined purpose takes and effect to get one more deeply and concrete understanding to the present invention, yet appended graphic only provide with reference to the usefulness of explanation, be not to be used for the present invention is limited.
See also Fig. 1, shown in Figure 2, Fig. 1 is the stereoscopic synoptic diagram that the present invention takes in cabinet, and Fig. 2 is the inner structure synoptic diagram that the present invention takes in cabinet, illustrates that structure of the present invention constitutes and relativeness.The present invention is a kind of inner and outside cabinet of taking in that keeps the voltage stabilizing state of optical mask box that allows, this is taken in cabinet and is made up of a framework 10, framework 10 can be selected from photomask management system storage cabinet or the ccontaining cabinet of photomask etc., and one or more can be put for the optical mask box 60 that stores photomask in the inside of this framework 10;
The detailed structure of preferred embodiment of the present invention constitutes, and sees also Fig. 1, Fig. 2 and shown in Figure 3, and Fig. 3 is exploded and the diagrammatic cross-section that the present invention takes in cabinet, and the structure that further specifies its air inlet valve member and voltage stabilizing valve member constitutes.The above-mentioned framework of taking in cabinet 10 has and connects factory be engaged in the air inlet loop 11 and exhaust loop 12 of end, and framework 10 has more the alternative door-plate 15 that opens and closes, and places optical mask box 60 in the framework 10 with further protection;
Framework 10 is provided with the filtration module 20 of or most air inlet types again, and framework 10 is inner to form malleations to keep, and the cleanliness factor of lift frame 10 inside;
Have one or most bearing unit 30 for bearing optical mask box 60 again in the framework 10, each bearing unit 30 has respectively for the bearing 31 that supports optical mask box 60, and has the open-work 32 that complex matrix is arranged on this bearing 31, piles up to avoid particulate; Moreover bearing 31 is provided with one or most for the spacing setting element 33 of optical mask box 60 clips; In addition, bearing 31 is provided with one or most for the inductive switch 34 that detects with recording light mask box 60; Have one or most lockholes 35,36 again on the bearing 31 of bearing unit 30, different lockholes 35,36 can be provided with an air inlet valve member 40 or a voltage stabilizing valve member 50 for locking respectively, but the air inlet loop 11 of these air inlet valve member 40 connecting frames 10 wherein, but the voltage stabilizing valve member 50 exhaust loop 12 of connecting frame 10 then; Wherein:
This air inlet valve member 40, has a hollow valve body 41, the hypomere outer rim of this valve body 41 forms the thread segment that is provided with corresponding lockhole 35, be locked on the bearing 31 of bearing unit 30 for air inlet valve member 40 alternatives, and the formation of the stage casing, inside of valve body 41 is provided with a partition 42 that has than small through hole; This valve body 41, be provided with the floating lever 43 that slides of partition 42 through holes relatively in it, these floating lever 43 two ends have one respectively can pass the neck 44 and of partition 42 than big top 47 directly, wherein bundle is provided with an alternative packing washer 46 that seals partition 42 through holes on the neck 44, and shore between the top 47 of floating lever 43 and the partition 42 spring 45 is arranged, allow compression that the packing washer 46 of floating lever 43 can utilize spring 45 relatively away from or be close to partition 42, reach and allow the purpose of air-flow selectivity circulation; Moreover, have at least one open-work 470 on the aforementioned top 47, and the end face of top 47 has push rod protruding upward 471, the corresponding gas channel (as Fig. 7, shown in Figure 8) of selective property keying optical mask box 60;
This voltage stabilizing valve member 50, has a hollow valve body 51, the end face of this valve body 51 forms and is provided with the bulge loop sheet 52 in big footpath together, and valve body 51 inner formation are provided with a partition 53, the partition 53 contiguous bulge loop sheets 52 inner edge places of this valve body 51 form and are provided with one or most runners hole 54, and described runner hole 54 also can be crossed over the inside and outside (as Fig. 6, shown in Figure 8) of optical mask box 60 corresponding gas channels simultaneously, aforementioned partition 53 end faces also have push rod protruding upward 55, the corresponding gas channel (as Fig. 7, shown in Figure 8) of selective property keying optical mask box 60; Moreover the hypomere outer rim of valve body 51 also forms the thread segment 56 that is provided with corresponding lockhole 35, and valve body 51 alternatives of this voltage stabilizing valve member 50 are locked on the bearing 31 of bearing unit 30;
Combined by said structure, formation one can effectively keep the cabinet body structure of inside and outside ambient pressure balance of optical mask box.
See also Fig. 4, shown in Figure 5, Fig. 4 is applied to the exploded perspective synoptic diagram that the present invention takes in the optical mask box of cabinet, and Fig. 5 is applied to decomposition and the diagrammatic cross-section that the present invention takes in the optical mask box air valve of cabinet.By aforesaid structural design, the present invention takes in cabinet when reality is used, be to cooperate ccontaining optical mask box 60, the formation of relevant this optical mask box 60, then be as Fig. 4, shown in Figure 5, this optical mask box 60 has the base 61 of a bearing photomask, and base 61 end faces and be provided with group and establish and be two of ㄇ supporter and hold to piece 62 and and paste to support piece 63, for supporting and replace photomask; Be covered with a clamshell 65 on this base 61 again, form the alternative accommodation space that opens and closes for optical mask box 60; Optical mask box 60 is provided with one or most air valve 70 that is communicated with aforementioned accommodation space in the bottom surface of base 61 again, and different air valve 70 and the corresponding respectively aforementioned air inlet valve member 40 and voltage stabilizing valve member 50 of taking in the bearing unit 30 of cabinet;
See also shown in Fig. 6, Fig. 7 A, Fig. 7 B and Fig. 8 A, Fig. 8 B, Fig. 6 is that the present invention takes in cabinet keeps optical mask box inner space voltage stabilizing when reality is used structure cut-open view, Fig. 7 A, Fig. 7 B are the partial structurtes diagrammatic cross-sections before the present invention takes in cabinet air inlet valve member and voltage stabilizing valve member dock with the optical mask box air valve in actual use, and Fig. 8 A, Fig. 8 B are that the present invention takes in cabinet air inlet valve member and voltage stabilizing valve member and partial structurtes diagrammatic cross-section after the optical mask box air valve docks in actual use.The present invention is in practical operation, when this optical mask box 60 does not place on the bearing unit 30 of framework 10, the air valve 70 of optical mask box 60 bases 61 is not owing to be subjected to the pushing and pressing of any external force, therefore the floating lever 73 in the air valve 70 is shored and downward location by the pre-power of spring 76 answers, make packing washer 77 subsides on the floating lever 73 be butted on partition 72, allow the inner space of optical mask box 60 ccontaining photomasks be airtight shape (shown in Fig. 7 A, Fig. 7 B).The air inlet valve member 40 of this bearing unit 30 is not owing to also be subjected to the pushing and pressing of any external force, therefore the floating lever 43 in the air inlet valve member 40 is shored and downward location by the pre-power of spring 45 answers, make packing washer 46 subsides on the floating lever 43 be butted on partition 42, allow the air inlet loop 11 (as shown in Figure 1) of framework 10 export clean gas by air inlet valve member 40.
Otherwise, as Fig. 6, Fig. 8 A, shown in Fig. 8 B, when optical mask box 60 places on the bearing 31 of bearing unit 30, the different air valves 70 of these optical mask box 60 bases 61 fit can with the air inlet valve member 40 and 50 relative bondings of voltage stabilizing valve member on the bearing 31, wherein the floating lever 73 of air valve 70 is subjected to the pushing and pressing of the push rod 471 of air inlet valve member 40, make the floating lever 43 of air inlet valve member 40 and air valve 70,73 synchronous compression springs 45,76, make the floating lever 43 of air inlet valve member 40 and air valve 70, packing washer 46 on 73,77 away from partition 42,72, allow air inlet loop 11 interior pure airs can inject the inner space of optical mask boxes 60 by air inlet valve member 40 and air valve 70.And air valve 70 floating levers 73 of optical mask box 60 corresponding voltage stabilizing valve members 50 are subjected to the pushing and pressing of the push rod 55 of voltage stabilizing valve member 50, make floating lever 73 compression springs 76 of this air valve 70, and make packing washer 77 on the floating lever 73 of air valve 70 away from partition 72, optical mask box 60 interior air can be discharged by the exhaust loop 12 (as shown in Figure 1) of framework 10 through air valve 70 and voltage stabilizing valve member 50, and because the valve body 51 runner holes 54 of this voltage stabilizing valve member 50 are crossed over simultaneously in the outside of air valve 70, make voltage stabilizing valve member 50 can suck the gas of optical mask box 60 outsides synchronously (as Fig. 8 A, shown in Fig. 8 B), so can avoid allowing optical mask box 60 inner spaces form negative pressure appearance greater than air inflow because of air capacity, make optical mask box 60 before not opening, in it, the air pressure of external environment keeps balance, the unlikely unlatching that influences optical mask box 60, and the further unlikely generation outer gas stream inwardly powerful phenomenon that flows of moment, prevent its scratch optical mask box 60 interior lights mask surface or make particulate and objectionable impurities is kicked up because of air-flow, and then be attached to the photomask surface, and can promote the efficient and the acceptance rate of overall process.
The above, it only is preferred embodiment of the present invention, be not that the present invention is done any pro forma restriction, though the present invention discloses as above with preferred embodiment, yet be not in order to limit the present invention, any those skilled in the art, in not breaking away from the technical solution of the present invention scope, when the technology contents that can utilize above-mentioned announcement is made a little change or is modified to the equivalent embodiment of equivalent variations, in every case be the content that does not break away from technical solution of the present invention, according to technical spirit of the present invention to any simple modification that above embodiment did, equivalent variations and modification all still belong in the scope of technical solution of the present invention.
Claims (8)
1, a kind of cabinet of taking in pressure stabilization function, its inside can be for putting one or more for the optical mask box that stores photomask, and optical mask box has the air valve of plural number for inlet and outlet, it is characterized in that:
This is taken in cabinet and is made of a framework, and this framework has at least one air inlet loop and at least one exhaust loop;
This is taken in cabinet and has at least one for the bearing unit of placing optical mask box, this bearing unit is provided with the air inlet valve member and at least one voltage stabilizing valve member that is connected the exhaust loop at least one connection air inlet loop, wherein this voltage stabilizing valve member has one or most runner holes, the runner hole of this voltage stabilizing valve member is to stride to be located at the inside and outside of optical mask box air valve, makes the gas of voltage stabilizing valve member suction synchronously optical mask box accommodation space and external environment condition.
2, the cabinet of taking in pressure stabilization function according to claim 1 is characterized in that the wherein said bearing unit of taking in cabinet has for the bearing that supports optical mask box, forms on the bearing and is provided with plural open-work, piles up to avoid particulate.
3, the cabinet of taking in pressure stabilization function according to claim 2 is characterized in that wherein said bearing is provided with one or most for the spacing setting element of optical mask box clip.
4, according to claim 2 or the 3 described cabinets of taking in, it is characterized in that wherein said bearing is provided with one or most inductive switch, for detecting or the recording light mask box with pressure stabilization function.
5, the cabinet of taking in pressure stabilization function according to claim 1, it is characterized in that the wherein said air inlet valve member of taking in cabinet has a hollow valve body, and this valve inner stage casing is formed with a partition that has than small through hole, be provided with the floating lever that slides of partition through hole relatively in this valve body, the two ends of this floating lever have the neck that big top and directly can pass partition respectively, and bundle is provided with the packing washer of an alternative sealing partition through hole on this neck, and shore between the top of floating lever and the partition spring is arranged, allow the packing washer of floating lever can be relatively away from or be close to partition, reach and allow air inlet valve member can be bullied conducting of valve action selectivity or sealing.
6, the cabinet of taking in pressure stabilization function according to claim 1, it is characterized in that the wherein said voltage stabilizing valve member of taking in cabinet has a hollow valve body, and the end face of this valve body forms and is provided with the bulge loop sheet in big footpath together, and the inside of valve body forms and is provided with a partition, and the runner hole of the inside and outside portion of cross-over connection optical mask box air valve is to be arranged on the partition synchronously.
7, the cabinet of taking in pressure stabilization function according to claim 6, it is characterized in that wherein said voltage stabilizing valve member partition end face and have push rod protruding upward, the air valve of selective property keying optical mask box.
8, according to claim 1,5 or the 6 described cabinets of taking in pressure stabilization function, the air valve that it is characterized in that wherein said optical mask box has a hollow valve body, and the stage casing, inside of this valve body forms and is provided with a partition that has than small through hole, be provided with the floating lever that slides of partition through hole relatively in this valve body, the two ends of this floating lever have the neck that big top and directly can pass partition respectively, and bundle is provided with the packing washer of an alternative sealing partition through hole on this neck, and shore between the top of floating lever and the partition spring is arranged, allow the packing washer of floating lever can be relatively away from or be close to partition, reach the effect that allows air valve can be subjected to air inlet valve member and voltage stabilizing valve member effect selectivity conducting or sealing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2008101252019A CN101609259A (en) | 2008-06-16 | 2008-06-16 | The cabinet of taking in pressure stabilization function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2008101252019A CN101609259A (en) | 2008-06-16 | 2008-06-16 | The cabinet of taking in pressure stabilization function |
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| Publication Number | Publication Date |
|---|---|
| CN101609259A true CN101609259A (en) | 2009-12-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2008101252019A Pending CN101609259A (en) | 2008-06-16 | 2008-06-16 | The cabinet of taking in pressure stabilization function |
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| CN (1) | CN101609259A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110824861A (en) * | 2019-11-26 | 2020-02-21 | 武汉新芯集成电路制造有限公司 | Reticle box positioning device and photoetching equipment |
-
2008
- 2008-06-16 CN CNA2008101252019A patent/CN101609259A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110824861A (en) * | 2019-11-26 | 2020-02-21 | 武汉新芯集成电路制造有限公司 | Reticle box positioning device and photoetching equipment |
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Open date: 20091223 |