CN101608615B - System and method for automatically measuring property of vapor stream vacuum pump - Google Patents
System and method for automatically measuring property of vapor stream vacuum pump Download PDFInfo
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- CN101608615B CN101608615B CN2009100125453A CN200910012545A CN101608615B CN 101608615 B CN101608615 B CN 101608615B CN 2009100125453 A CN2009100125453 A CN 2009100125453A CN 200910012545 A CN200910012545 A CN 200910012545A CN 101608615 B CN101608615 B CN 101608615B
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Abstract
The invention relates to a system and a method for automatically measuring the property of a vapor stream vacuum pump, which belong to the technical field of vacuum test. The invention can be in strict accordance with the test principle and the method specified in national and international standards to automatically complete the test of parameters of the vapor stream vacuum pump. The system comprises a test cover, a gas flow testing unit, a fore pipe gas flow adjusting unit, and the like, wherein the gas flow testing unit comprises a dropper, a dropper magnetic valve is arranged at a gas inlet of the upper part of the dropper, and the outer side of the dropper is provided with an upper liquid level switch and a lower liquid level switch; a test cover gas flow adjusting unit and the fore pipe gas flow adjusting unit both comprise stepping motors, needle type micrometering valves and high-vacuum magnetic valves, drive buttons of the needle type micrometering valves are connected with the stepping motors, and gas outlets of the needle type micrometering valves are connected with the high-vacuum magnetic valves; and the liquid level switches, the dropper magnetic valve, and the like are connected with a computer control unit. The measuring method comprises the following steps of measurement of limit pressure of the vapor stream vacuum pump, measurement of volume flow rate, and measurement of critical fore pressure.
Description
Technical field:
The invention belongs to the vacuum test technical field, particularly a kind of property of vapor stream vacuum pump automatic measuring system and method for measurement.
Background technique:
Vapor stream vacuum pump comprises oil diffusion pump, oil ejector pump and oily suction booster, is the widely used vacuum-pumping equipment of a class.It is widely used in industrial fields such as machinery, electronics, metallurgy, nuclear energy, spatial simulation and the scientific and technical research, plays an important role in the modern development in science and technology and the development of the national economy.The ultimate pressure of vapor stream vacuum pump, the speed of exhaust and three performance index of critical forepressure can reflect the pumping performance of this pump comprehensively, particularly; Therefore, the special formulation has relevant country and international standard (property of vapor stream vacuum pump method of measurement section 1: the measurement GB/T 19955.1-2005/ISO 1608-1:1993 of volume flow rate (pumping speed) and property of vapor stream vacuum pump method of measurement part 2: the measurement GB/T 19955.2-2005/ISO 1608-2:1989 of critical forepressure), stipulated the performance measurement method of vapor stream vacuum pump.
On the other hand, be subjected to the restriction of working principle and structural type, the actual pumping performance parameter of each vapor stream vacuum pump rated performance index deviation common and its nominal is very big, and the stability and the conformity of performance are relatively poor.Show as: model of the same race but by the difference that different manufacturers is produced make batch so that with batch in each vapor stream vacuum pump, its actual performance parameter all has very big-difference.Therefore, the actual test before being necessary each or each batch vapor stream vacuum pump product dispatched from the factory provides its actual performance parameter (particularly pumping speed curve), and this will correctly, reasonably use this product very useful to the user.
But with respect to the manufacturing enterprise's quantity and the production product population of vapor stream vacuum pump, domestic vapor stream vacuum pump is also backward relatively in the product performance context of detection.Except that the vacuum equipment quality control pickup potential energy of a few countries CMA mechanism appointment is enough normally carried out the product performance detection of vapor stream vacuum pump, at present a lot of enterprises still do not have the property of vapor stream vacuum pump measuring system of oneself, and the performance parameter of vapor stream vacuum pump product before dispatching from the factory lacked actual detected.Its main cause is: domestic existing correlation-detection system all adopts full manual manipulation mode, and operator are had higher professional knowledge and experimental skill requirement, needs just can finish through special training the product performance testing of vapor stream vacuum pump; And the survey data precision is subjected to many artificial factor, and these all are that manufacturer oneself independently carries out the property of vapor stream vacuum pump measurement and increased difficulty.
Summary of the invention:
At this present situation, the invention provides a kind of can in strict accordance with country and international standard (property of vapor stream vacuum pump method of measurement section 1: the measurement GB/T 19955.1-2005/ISO 1608-1:1993 of volume flow rate (pumping speed) and property of vapor stream vacuum pump method of measurement part 2: test philosophy and the method stipulated the measurement GB/T 19955.2-2005/ISO1608-2:1989 of critical forepressure), finish the vapor stream vacuum pump ultimate pressure automatically, the property of vapor stream vacuum pump automatic measuring system and the method for measurement of the test of volume flow rate (pumping speed) and three performance parameters of critical forepressure.
To achieve these goals, the present invention adopts following technological scheme, a kind of property of vapor stream vacuum pump automatic measuring system comprises test cover, tested vapor stream vacuum pump, backing line, prime mechanical pump, gas flow test cell, test cover gas flow regulon and backing line gas flow regulon; Described gas flow test cell is taken over test cover gas flow regulon by vacuum and is linked to each other, test cover gas flow regulon links to each other with the air inlet nozzle of test cover, tested vapor stream vacuum pump links to each other successively with backing line, prime mechanical pump, and backing line gas flow regulon directly links to each other with backing line; Described gas flow test cell comprises oil groove and measures oil and dropper, is provided with the dropper solenoid valve at the suction port place on dropper top, in the arranged outside of dropper liquid-level switch is arranged; Described liquid-level switch comprises liquid-level switch and following liquid-level switch, and last liquid-level switch and following liquid-level switch are separately fixed at the setting height place in the dropper outside; Described test cover gas flow regulon and backing line gas flow regulon are formed by stepper motor, pin type reset valve and high-vacuum electromagnetic valve, the drive knob of pin type reset valve links to each other with stepper motor, and the air outlet of pin type reset valve links to each other with the high-vacuum electromagnetic valve; Described liquid-level switch, dropper solenoid valve, stepper motor and high-vacuum electromagnetic valve all link to each other with computer control unit, and direct and computer control unit communication is its control also.
The method of measurement of described property of vapor stream vacuum pump automatic measuring system, this method comprise the measurement of vapor stream vacuum pump ultimate pressure, the measurement of volume flow rate and the measurement of critical forepressure.
The detailed process of the measurement of described ultimate pressure is as follows:
From tested vapor stream vacuum pump heating beginning, behind the continuous operation scheduled time, the force value of beginning read test cover vacuum gauge; Upper PC writes down a pressure data automatically every certain time interval, and deposits in the computer control unit; Recording occurring continuously one hour is got the last ultimate pressure of the mean value of each time record as tested vapor stream vacuum pump.
The detailed process of the measurement of described volume flow rate is as follows:
Working state at tested vapor stream vacuum pump satisfies under the regulation requirement situation of concerned countries standard, sends open command by computer control unit to the high-vacuum electromagnetic valve of test cover gas flow regulon; The corresponding inlet pressure of setting, the aperture that computer control unit is regulated its pin type reset valve by the stepper motor of test cover gas flow regulon, the degree of closeness that test is covered between the setting pressure of interior real balance pressure and this inlet pressure reaches License Value, finishes the adjusting operation of this gas flow and balance pressure; Then, send out code by computer control unit to the dropper solenoid valve, the oil column liquid level begins to rise in the dropper, when liquid level rises to down height ^ place, liquid-level switch place, following liquid-level switch is to signal of computer control unit output, and computer control unit begins to clock; When liquid level rises to liquid-level switch place height h
2During the place, last liquid-level switch is to signal of computer control unit output, and computer control unit finishes to clock, and record oil column liquid level rises to the needed time lag t of liquid-level switch from following liquid-level switch; Computer control unit calculates volume flow rate S that should inlet pressure according to following formula:
In the formula, the tested vapor stream vacuum pump speed of exhaust of S-, Q-flows through the gas flow of pumping hole; The balance pressure of assigned position in the p-test cover; Height between the upper and lower liquid-level switch of h-, h=h
2-h
1, h
1The height of the initial pasta of-following liquid-level switch distance, h
2The height of the initial pasta of-last liquid-level switch distance, oil column liquid level rising h section needed time in the t-dropper, K-dropper function;
Computer control unit is stored in the volume flow rate of this inlet pressure in the upper PC automatically, send instruction by computer control unit, make the dropper solenoid valve be in opening state again, oil column falls back to initial pasta in the dropper, finish the volume flow rate of this inlet pressure and measure, close the high-vacuum electromagnetic valve of test cover gas flow regulon; Then, be adjusted to next inlet pressure, repeat said process, measure until the volume flow rate of finishing all inlet pressures.
The measurement of described critical forepressure comprises the measurement of unloaded critical forepressure and the measurement of fully loaded critical forepressure, and its detailed process is as follows:
The measurement of unloaded critical forepressure: the working state at tested vapor stream vacuum pump satisfies under the regulation requirement situation of concerned countries standard, send instruction by computer control unit, open the high-vacuum electromagnetic valve of backing line gas flow regulon, by its pin type reset valve of step motor drive of backing line gas flow regulon, the gas pressure in the backing line that slowly raises; Gas pressure rising 10% in the test cover or the moment of sharply rising suddenly, the pressure reading value of the backing line vacuum gauge that this moment is corresponding, be unloaded critical forepressure, close the high-vacuum electromagnetic valve of backing line gas flow regulon after test is finished.
The measurement of fully loaded critical forepressure: the working state at tested vapor stream vacuum pump satisfies under the regulation requirement situation of concerned countries standard, send instruction by computer control unit, open the high-vacuum electromagnetic valve of test cover gas flow regulon, its pin type reset valve of step motor drive by test cover gas flow regulon, regulate the gas pressure in the test cover, make near its maximum service pressure that is stabilized in tested vapor stream vacuum pump; Send instruction by computer control unit then, open the high-vacuum electromagnetic valve of backing line gas flow regulon, by its pin type reset valve of step motor drive of backing line gas flow regulon, the gas pressure in the backing line that slowly raises; Gas pressure rising 10% in the test cover or the moment of sharply rising suddenly, the pressure reading value of the backing line vacuum gauge that this moment is corresponding, be fully loaded critical forepressure, close the high-vacuum electromagnetic valve of test cover gas flow regulon and the high-vacuum electromagnetic valve of backing line gas flow regulon after test is finished.
Beneficial effect of the present invention:
The formation of measuring system of the present invention meets the regulation of relevant national standard fully, and the strict NBS of carrying out of method of measurement has authority; The work parameter of system can accurately be measured and control, and assurance test data error can be controlled and calculate, thereby guarantees the reliability and stability of measuring accuracy.The present invention is by computer control unit automatic editing testing process and handle test data, and test operation personnel's the professional knowledge base and the requirement of experimental skill level are reduced greatly, helps ordinary enterprises and independently finishes surveying work; And test process cancelled large amount of complex, manual working that difficulty is big, not only reduced labor intensity, the personal factor that produces measurement error greatly reduced, thereby improved the precision of measurement result greatly.
The present invention replaces manual rotary fine adjustment valve with step motor drive pin type reset valve in test cover gas flow adjustment process and backing line gas flow adjustment process; According to the pressure reading of automatic measurement,, replace artificial observation to judge by the direction and the size of computer judgement Flow-rate adjustment.In the gas flow test process, arrive the moment of this liquid-level switch place height with the oil column liquid level in the photoelectricity liquid-level switch mensuration dropper, and send instruction to computer, realize automatic and write down the oil column liquid level rising to the needed time of liquid-level switch, to replace the oil column liquid level height mobile in the naked-eye observation dropper and the manual work of manual manual time-keeping from following liquid-level switch.Sentence the dropper solenoid valve at the suction port on dropper top and substitute manual dropper suction valve; The place installs the high-vacuum electromagnetic valve additional in the air outlet of pin type reset valve, the tightness when guaranteeing that it is closed.
Description of drawings:
Fig. 1 is the structural representation of measuring system of the present invention;
Wherein, 1. oil groove is oily with measurement; 2. play liquid-level switch; 3. dropper; 4. go up liquid-level switch; 5. dropper solenoid valve; 6. vacuum is taken over; 7. first stepper motor; 8. the first pin type reset valve; 9. the first high-vacuum electromagnetic valve; 10. air inlet nozzle; 11. test cover; 12. test cover vacuum gauge; 13. tested vapor stream vacuum pump; 14. backing line vacuum gauge; 15. the second high-vacuum electromagnetic valve; 16. the second pin type reset valve; 17. second stepper motor; 18. backing line; 19. prime mechanical pump; 20. computer control unit.
Wherein, oil groove with measure oil 1, down liquid-level switch 2, dropper 3, go up liquid-level switch 4 and dropper solenoid valve 5 constitutes the gas flow test cells; First stepper motor 7, the first pin type reset valve 8 and the first high-vacuum electromagnetic valve 9 constitute test cover gas flow regulon; The second high-vacuum electromagnetic valve 15, the second pin type reset valve 16 and second stepper motor 17 constitute backing line gas flow regulon.
Embodiment:
As shown in Figure 1, a kind of property of vapor stream vacuum pump automatic measuring system comprises test cover 11, tested vapor stream vacuum pump 13, backing line 18, prime mechanical pump 19, gas flow test cell, test cover gas flow regulon and backing line gas flow regulon; Tested vapor stream vacuum pump 13 links to each other successively with backing line 18, prime mechanical pump 19.
The internal diameter of test cover 11 is identical with the inlet diameter of tested vapor stream vacuum pump 13, and the two connects by flange.Be connected with test cover vacuum gauge 12 on test cover 11, computer control unit 20 is by the real balance force value in the test cover vacuum gauge 12 read test covers 11.
Described gas flow test cell comprises oil groove and measures oil 1 and dropper 3, is provided with dropper solenoid valve 5 at the suction port place on dropper 3 tops, in the arranged outside of dropper 3 liquid-level switch is arranged; The bottom of dropper 3 is immersed in the measurement oil of oil groove; Described liquid-level switch comprises liquid-level switch 4 and following liquid-level switch 2, and last liquid-level switch 4 and following liquid-level switch 2 are separately fixed at the setting height place in dropper 3 outsides.
Described test cover gas flow regulon is made up of first stepper motor 7, the first pin type reset valve 8 and the first high-vacuum electromagnetic valve 9, the drive knob of the first pin type reset valve 8 links to each other with first stepper motor 7, the suction port of the first pin type reset valve 8 is taken over 6 by vacuum and is communicated with dropper 3, the air outlet of the first pin type reset valve 8 links to each other with the input end of the first high-vacuum electromagnetic valve 9, and the output terminal of the first high-vacuum electromagnetic valve 9 links to each other with the air inlet nozzle 10 of test cover 11.
Described backing line gas flow regulon is made up of second stepper motor 17, the second pin type reset valve 16 and the second high-vacuum electromagnetic valve 15; The drive knob of the second pin type reset valve 16 links to each other with second stepper motor 17, and the air outlet of the second pin type reset valve 16 links to each other with the input end of the second high-vacuum electromagnetic valve 15, and the output terminal of the second high-vacuum electromagnetic valve 15 directly links to each other with backing line 18; On backing line 18, be connected with backing line vacuum gauge 14.Described backing line 18 and prime mechanical pump 19 will be chosen according to the regulation of GB.
Described upward liquid-level switch 4, following liquid-level switch 2, dropper solenoid valve 5, first stepper motor 7, second stepper motor 17, the first high-vacuum electromagnetic valve 9 all link to each other with computer control unit 20 with the second high-vacuum electromagnetic valve 15, and direct and computer control unit 20 communications are its control also.Described computer control unit 20 is made of the twin-stage control system of upper PC and the next single-chip microcomputer.The model of the stepper motor that present embodiment is selected for use is 42HS03, and its drive model is M415-64/M515.Light on the driver links to each other with single-chip microcomputer respectively every power end, pulse signal end, direction signal end and motor Enable Pin, and can revise the stepped parameter of motor by upper PC, reaches the requirement of regulating throughput.
Test philosophy of the present invention, test method and test condition also have specific description in standard GB/T 19955.1-2005 " property of vapor stream vacuum pump method of measurement section 1: the measurement of volume flow rate (pumping speed) " and GB/T 19955.2-2005 " property of vapor stream vacuum pump method of measurement part 2: the measurement of critical forepressure ".
Whole hardware such as the air inlet nozzle 10 in the measuring system of the present invention, test cover 11, vacuum gauge, tested vapor stream vacuum pump 13, prime mechanical pump 19 and backing line 18 constitute and the determining of structural parameter, carry out according to the regulation among standard GB/T19955.1-2005 " property of vapor stream vacuum pump method of measurement section 1: the measurement of volume flow rate (pumping speed) " and the GB/T 19955.2-2005 " property of vapor stream vacuum pump method of measurement part 2: the measurement of critical forepressure " fully.
Gas flow test cell in the measuring system of the present invention has adopted the principle and the structure of the burette type flow meter measurements and calculations gas flow of recommending among standard GB/T 19955.1-2005 " property of vapor stream vacuum pump method of measurement section 1: the measurement of volume flow rate (pumping speed) ".
The function of test cover gas flow regulon is as follows:
In the volume flow rate process of measuring the corresponding different inlet pressures of tested vapor stream vacuum pump, adjusting charges into the gas flow of test cover and the balance pressure that test is covered.Wherein, in the process of the ultimate pressure of measuring tested vapor stream vacuum pump and unloaded critical forepressure, the first high-vacuum electromagnetic valve cuts out; In the process of the volume flow rate of measuring tested vapor stream vacuum pump and fully loaded critical forepressure, the first high-vacuum electromagnetic opening of valves.
In the process of measuring tested vapor stream vacuum pump volume flow rate, the method of work that test cover gas flow regulon is finished test cover gas flow and balance pressure adjusting operation is: the inlet pressure of corresponding each setting, computer control unit covers the interior real balance force value of vacuum gauge read test cover by test, and compares with the setup pressure value of this inlet pressure; If the real balance force value is higher than the force value of setting, computer control unit sends to first stepper motor and turns instruction down, first step motor drive, the first pin type reset valve reduces valve opening, the gas flow that charges in the test cover by the first pin type reset valve is reduced, thereby the real balance force value in the test cover is reduced; Otherwise, if the real balance force value is lower than the force value of setting, computer control unit sends to first stepper motor and transfers big instruction, first step motor drive, the first pin type reset valve intensifying valve aperture, the gas flow that charges in the test cover by the first pin type reset valve is increased, thereby the real balance force value in the test cover is raise.Carry out so repeatedly, the degree of closeness between the real balance force value in the test cover and the setup pressure value of this inlet pressure reaches License Value, finishes the adjusting operation of this gas flow and balance pressure.Next, test job enters the volume flow rate measurement procedure of this inlet pressure.After the volume flow rate of finishing this inlet pressure is measured, test job will enter the volume flow rate measurement procedure of next inlet pressure; Therefore, test cover gas flow regulon will continue to finish the adjusting operation of the test cover gas flow and the balance pressure of next inlet pressure.
The function of backing line gas flow regulon is as follows:
In the unloaded critical forepressure of measuring tested vapor stream vacuum pump and fully loaded critical forepressure process, regulate the gas flow and the balance pressure that charge into backing line.Wherein, the effect in test cover gas flow regulon of the effect of the second high-vacuum electromagnetic valve and the first high-vacuum electromagnetic valve is identical; The second high-vacuum electromagnetic valve is opened in the process of measuring critical forepressure, and other stage closes.
In measuring the critical forepressure process of tested vapor stream vacuum pump, the method of work that backing line gas flow regulon is finished backing line gas flow and balance pressure adjusting operation is: computer control unit at first sends instruction and opens the first high-vacuum electromagnetic valve, and regulates the gas flow and the balance pressure of testing in covering of the first pin type reset valve by first stepper motor; Balance pressure in test cover and gas stability of flow are in test point condition following time, send instruction by computer control unit, open the second high-vacuum electromagnetic valve, send the big instruction of accent to second stepper motor, second stepper motor slowly drives the second pin type reset valve intensifying valve aperture, the gas flow that charges into backing line by the second pin type reset valve is increased gradually, thereby the real balance pressure in the backing line is raise; When computer control unit observes by test cover vacuum gauge, when the balance pressure in the test cover rising occurs and reaches the ratio degree of regulation, the reading of computer control unit record backing line vacuum gauge is the fully loaded critical forepressure of tested vapor stream vacuum pump under this test point.
The effect of computer control unit is that whole measuring system and measuring phase are realized control automatically.Its function comprises: the pressure reading of collecting test cover vacuum gauge and backing line vacuum gauge; The signal that liquid-level switch, following liquid-level switch send in the reception; Monitor the related work parameter (as: heating power) of tested vapor stream vacuum pump; Control the operation of tested vapor stream vacuum pump and prime mechanical pump; Automatically carry out testing procedure successively according to the presumptive test flow process; Record, store test data also calculate test result according to formula; Generate and export test report etc.
Described computer control unit 20 is as follows at the control function of executive component in this measuring system:
(1) control dropper solenoid valve 5 cuts out when utilizing dropper 3 beginning test gas flows at every turn automatically, opens automatically when treating this time EOT;
(2) control high-vacuum electromagnetic valve, to need gas stream out-of-date when residing (test cover or backing line) gas flow regulon, this high-vacuum electromagnetic opening of valves; Not need gas stream out-of-date when residing (test cover or backing line) gas flow regulon, and this high-vacuum electromagnetic valve cuts out;
(3) first stepper motor 7 in the control test cover gas flow regulon, drive the first pin type reset valve 8, according to the gas pressure measurement value in the test cover 11, change the aperture of the first pin type reset valve 8 and charge into test and cover 11 interior gas flows, and then regulate test and cover 11 interior gas pressures, make it near the gas pressure value that sets;
(4) second stepper motor 17 in the control backing line gas flow regulon, drive the second pin type reset valve 16, thereby regulate the gas flow charge in the backing line 18 and the gas pressure in the backing line 18, until the measurement operation of finishing critical forepressure.
The method of measurement of property of vapor stream vacuum pump automatic measuring system of the present invention, carry out according to the following steps:
Preparatory stage: before beginning measurement, make the first pin type reset valve 8 and the second pin type reset valve 16 be in (maximum close) state that screws; The first high-vacuum electromagnetic valve 9 and the second high-vacuum electromagnetic valve 15 are closed; Select the dropper 3 of suitable types, and make the gas flow test cell ready; Dropper solenoid valve 5 is opened; Tested vapor stream vacuum pump 13 and prime mechanical pump 19 (if desired) lead to cooling water.
Bleed the stage: open prime mechanical pump 19, tested vapor stream vacuum pump 13 and test cover 11 are carried out forvacuum; Behind the breakout pressure of pressure that test cover vacuum gauge 12 shows, open tested vapor stream vacuum pump 13, prime mechanical pump 19 maintenance work simultaneously less than tested vapor stream vacuum pump 13.
The ultimate pressure of a pump measuring phases: from tested vapor stream vacuum pump 13 heating beginnings, behind the continuous operation scheduled time, the force value of beginning read test cover vacuum gauge 12; Upper PC writes down a pressure data automatically every certain time interval, and deposits in the computer control unit; Recording occurring continuously one hour is got the last ultimate pressure of the mean value of each time record as tested vapor stream vacuum pump 13.The method of measurement of described ultimate pressure and process are carried out according to the regulation of concerned countries standard fully.In test process, the high-vacuum electromagnetic valve in test cover gas flow regulon and the backing line gas flow regulon all is in closed condition.
The measuring phases of the volume flow rate of pump (pumping speed): treat that tested vapor stream vacuum pump 13 reaches capacity behind the pressure, can begin the measurement of volume flow rate (pumping speed).On upper PC, set inlet pressure, begin to measure successively, determine each inlet pressure is all selected identical liquid level difference h=h from minimum inlet pressure
2-h
1Send instruction by computer control unit 20, open the first high-vacuum electromagnetic valve 9, slowly regulate the first pin type reset valve 8, make the pressure reading of test cover vacuum gauge 12 reach the force value that this inlet pressure is set by first stepper motor 7; Computer control unit 20 sends instruction, closes dropper solenoid valve 5, and the oil column liquid level in the dropper 3 begins to rise; When liquid level rises to down liquid-level switch 2 place height h
1During the place, following liquid-level switch 2 is to signal of computer control unit 20 outputs, and computer control unit 20 begins to clock; When liquid level rises to liquid-level switch 4 place height h
2During the place, last liquid-level switch 4 is also to signal of computer control unit 20 output, computer control unit 20 ends of clocking, and writing time interval t; According to the measured clean lifting height h=h of liquid level
2-h
1With the liquid level required time lag t that rises, computer control unit 20 can calculate volume flow rate (pumping speed) that should inlet pressure automatically by correlation formula, and this test result is stored in the upper PC automatically; Send instruction by computer control unit 20, make dropper solenoid valve 5 be in opening state again, oil column falls back to initial pasta in the dropper 3, finishes the volume flow rate (pumping speed) of this inlet pressure and measures, and closes the first high-vacuum electromagnetic valve 9.Then, be adjusted to next inlet pressure, repeat said process, measure until the volume flow rate of finishing all inlet pressures (pumping speed).
The critical forepressure measuring phases of pump: reach in the cover 11 to be tested or near after the ultimate pressure, can carry out the measurement of unloaded and fully loaded critical forepressure.The method of measurement of unloaded critical forepressure is: open the second high-vacuum electromagnetic valve 15, drive the second pin type reset valve 16, the gas pressure in the backing line 18 that slowly raises by second stepper motor 17; Cover gas pressure rising 10% in 11 or the moment of sharply rising suddenly up to test, the pressure reading value of the backing line vacuum gauge 14 of correspondence is unloaded critical forepressure at this moment, closes the second high-vacuum electromagnetic valve 15 after test is finished.The method of measurement of fully loaded critical forepressure is: at first send instruction by computer control unit 20, open the first high-vacuum electromagnetic valve 9, drive the first pin type reset valve 8 by first stepper motor 7, regulate the gas pressure in the test cover 11, make near its maximum service pressure that is stabilized in tested vapor stream vacuum pump 13; Send instruction by computer control unit 20 then, open the second high-vacuum electromagnetic valve 15, drive the second pin type reset valve 16, the gas pressure in the backing line 18 that slowly raises by second stepper motor 17; Cover gas pressure rising 10% in 11 or the moment of sharply rising suddenly up to test, the pressure reading value of the backing line vacuum gauge 14 of correspondence is fully loaded critical forepressure at this moment; After finishing, test closes the first high-vacuum electromagnetic valve 9 and the second high-vacuum electromagnetic valve 15.
Stopping phase: after finishing test jobs, make tested vapor stream vacuum pump 13 outages; Gas flow test cell, test cover gas flow regulon and backing line gas flow regulon restPose; Keep cooling water and prime mechanical pump 19 to continue operation; After extremely tested vapor stream vacuum pump 13 temperature reach safety range, stop cooling water and prime mechanical pump 19; Complete machine outage shutdown.
In whole measuring phase, the sequence of operation of the measurement of the measurement of vapor stream vacuum pump ultimate pressure and the measurement of volume flow rate, critical forepressure can be exchanged.
Claims (2)
1. a property of vapor stream vacuum pump automatic measuring system comprises test cover (11), tested vapor stream vacuum pump (13), backing line (18), prime mechanical pump (19), gas flow test cell, test cover gas flow regulon and backing line gas flow regulon; Described gas flow test cell is taken over (6) by vacuum and is linked to each other with test cover gas flow regulon, test cover gas flow regulon links to each other with the air inlet nozzle (10) of test cover (11), tested vapor stream vacuum pump (13) links to each other successively with backing line (18), prime mechanical pump (19), and backing line gas flow regulon directly links to each other with backing line (18); Described gas flow test cell comprises oil groove and measures oil (1) and dropper (3), it is characterized in that, is provided with dropper solenoid valve (5) at the suction port place on dropper (3) top, in the arranged outside of dropper (3) liquid-level switch is arranged; Described liquid-level switch comprises liquid-level switch (4) and following liquid-level switch (2), and last liquid-level switch (4) and following liquid-level switch (2) are separately fixed at the setting height place in dropper (3) outside; Described test cover gas flow regulon and backing line gas flow regulon are formed by stepper motor, pin type reset valve and high-vacuum electromagnetic valve, the drive knob of pin type reset valve links to each other with stepper motor, and the air outlet of pin type reset valve links to each other with the high-vacuum electromagnetic valve; Described liquid-level switch, dropper solenoid valve (5), stepper motor and high-vacuum electromagnetic valve all link to each other with computer control unit (20), and direct and computer control unit (20) communication is its control also.
2. the method for measurement of the described property of vapor stream vacuum pump automatic measuring system of claim 1 is characterized in that, this method comprises the measurement of vapor stream vacuum pump ultimate pressure, the measurement of volume flow rate and the measurement of critical forepressure;
The detailed process of the measurement of described ultimate pressure is as follows:
From tested vapor stream vacuum pump heating beginning, behind the continuous operation scheduled time, the force value of beginning read test cover vacuum gauge; Upper PC writes down a pressure data automatically every certain time interval, and deposits in the computer control unit; Recording occurring continuously one hour is got the last ultimate pressure of the mean value of each time record as tested vapor stream vacuum pump;
The detailed process of the measurement of described volume flow rate is as follows:
The regulation that satisfies standard GB/T 19955.1-2005/ISO 1608-1:1993 in the working state of tested vapor stream vacuum pump requires under the situation, sends open command by computer control unit to the high-vacuum electromagnetic valve of test cover gas flow regulon; The corresponding inlet pressure of setting, the aperture that computer control unit is regulated its pin type reset valve by the stepper motor of test cover gas flow regulon, the degree of closeness that test is covered between the setting pressure of interior real balance pressure and this inlet pressure reaches License Value, finishes the adjusting operation of this gas flow and balance pressure; Then, send out code by computer control unit to the dropper solenoid valve, the oil column liquid level begins to rise in the dropper, when liquid level rises to down liquid-level switch place height h
1During the place, following liquid-level switch is to signal of computer control unit output, and computer control unit begins to clock; When liquid level rises to liquid-level switch place height h
2During the place, last liquid-level switch is to signal of computer control unit output, and computer control unit finishes to clock, and record oil column liquid level rises to the needed time lag t of liquid-level switch from following liquid-level switch; Computer control unit calculates volume flow rate S that should inlet pressure according to formula, and the volume flow rate of this inlet pressure is stored in the upper PC automatically, send instruction by computer control unit, make the dropper solenoid valve be in opening state again, oil column falls back to initial pasta in the dropper, finish the volume flow rate of this inlet pressure and measure, close the high-vacuum electromagnetic valve of test cover gas flow regulon; Then, be adjusted to next inlet pressure, repeat said process, measure until the volume flow rate of finishing all inlet pressures;
The measurement of described critical forepressure comprises the measurement of unloaded critical forepressure and the measurement of fully loaded critical forepressure, and its detailed process is as follows:
The measurement of unloaded critical forepressure: the regulation that satisfies standard GB/T19955.2-2005/ISO 1608-2:1989 in the working state of tested vapor stream vacuum pump requires under the situation, send instruction by computer control unit, open the high-vacuum electromagnetic valve of backing line gas flow regulon, by its pin type reset valve of step motor drive of backing line gas flow regulon, the gas pressure in the backing line that slowly raises; Gas pressure rising 10% in the test cover or the moment of sharply rising suddenly, the pressure reading value of the backing line vacuum gauge that this moment is corresponding, be unloaded critical forepressure, close the high-vacuum electromagnetic valve of backing line gas flow regulon after test is finished;
The measurement of fully loaded critical forepressure: the regulation that satisfies standard GB/T19955.2-2005/ISO 1608-2:1989 in the working state of tested vapor stream vacuum pump requires under the situation, send instruction by computer control unit, open the high-vacuum electromagnetic valve of test cover gas flow regulon, its pin type reset valve of step motor drive by test cover gas flow regulon, regulate the gas pressure in the test cover, make near its maximum service pressure that is stabilized in tested vapor stream vacuum pump; Send instruction by computer control unit then, open the high-vacuum electromagnetic valve of backing line gas flow regulon, by its pin type reset valve of step motor drive of backing line gas flow regulon, the gas pressure in the backing line that slowly raises; Gas pressure rising 10% in the test cover or the moment of sharply rising suddenly, the pressure reading value of the backing line vacuum gauge that this moment is corresponding, be fully loaded critical forepressure, close the high-vacuum electromagnetic valve of test cover gas flow regulon and the high-vacuum electromagnetic valve of backing line gas flow regulon after test is finished.
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| CN1122909A (en) * | 1995-06-09 | 1996-05-22 | 冯玉国 | Method and apparatus for measuring the partial pressure of water vapor in vacuum |
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