CN101593794A - The spray equipment of transparent conductive film for depositing large-area solar cell - Google Patents
The spray equipment of transparent conductive film for depositing large-area solar cell Download PDFInfo
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- CN101593794A CN101593794A CNA2009100327120A CN200910032712A CN101593794A CN 101593794 A CN101593794 A CN 101593794A CN A2009100327120 A CNA2009100327120 A CN A2009100327120A CN 200910032712 A CN200910032712 A CN 200910032712A CN 101593794 A CN101593794 A CN 101593794A
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- conductive film
- transparent conductive
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
The invention discloses a kind of spray equipment of transparent conductive film for depositing large-area solar cell, comprise shower nozzle, this shower nozzle comprises ultrasonic transducer, atomization of liquid maker and the connecting rod between ultrasonic transducer and atomization of liquid maker, be provided with liquid supplying passage in the described connecting rod, described atomization of liquid maker is provided with the atomizing face that is connected with described liquid supplying passage.Described ultrasonic transducer is piezoelectric ceramic or magnetostriction ultrasonic transducer; Between described ultrasonic transducer and connecting rod, be provided with a seal casinghousing, also be provided with the water-cooled body that constitutes by water cooling passageway in the sealing housing, this spray equipment also can be equipped with will heating substrate or the shower nozzle transmission device of at the uniform velocity advancing.The quality of the large-area transparent conductive film that spray equipment of the present invention deposited and excellent in uniform, simple in structure, the conductive film cost of producing is lower, is adapted at promoting the use of in the production of solar cell transparent conductive film.
Description
Technical field
The present invention relates to a kind of spray equipment, particularly a kind of spray deposited large-area solar cell spray equipment of transparent conductive film.
Background technology
At present, because thin film solar cell has good Semiconductor Optic Electronics performance, and can save expensive crystal silicon semi-conducting material greatly, cost is low than crystal silicon solar batteries, thereby more and more is used widely.And the photoelectric current of thin film solar cell is drawn the material that must pass through a kind of both transparent conduction, and the material that is called transparent conductive film is finished.Existing depositing large-area (10 * 10cm
2More than) device of transparent conductive film is radio frequency sputtering precipitation equipment and normal pressure Compressed Gas spray equipment (APCVD).The radio frequency sputtering precipitation equipment needs high vacuum system, and equipment is complicated and expensive, and the low-cost transparent conductive film is produced in inconvenience, and in addition, the square resistance minimum that the radio frequency sputtering precipitation equipment is produced transparent conductive film only is 70～90 Ω/; Quality factor reaches 10 (calculating to 1100nm wavelength incident light mean transmissivity with 300nm).The Compressed Gas spray equipment can be realized target cheaply, but the quality of film forming, uniformity and electricity etc. all can not satisfy the high requirement of thin film solar cell.Chinese invention patent, the patent No. is: ZL99116819.4, name is called: transparent conductive film and reflection reduction film spray coating equipment and method thereof, a kind of spray equipment of spray deposited transparent conductive film is provided, it adopts ultrasonic ultrasonic delay line memory, the solution for preparing was atomized before spraying in advance, carry down in carrier gas again and spray on the substrate that heats the formation transparent conductive film; Such spray equipment, because the gas of atomizing must be with carrying gas transport to the nozzle position in advance, no matter whether participate in reaction and carry gas, it all arrives substrate surface with atomization gas, cause the conductive film that forms inhomogeneous, in addition, the flow of gas of finishing the task of carrying is uncontrollable, and carry air-flow substrate is had cooling effect, thereby having reduced the quality and the large-area uniformity of film more, film forming quality factor can only reach 30 (calculating to 1100nm wavelength incident light mean transmissivity with 300nm).Another kind of more general spray equipment is used to prepare SnO
2Transparent conductive film, be by high pressure carrier gas by spray gun with the source solution atomization, and be carried into the substrate of heating, carry out pyrolytic reaction, as the publication Thin Solid Films 131 of people such as A.K.Saxena and R.Thangaraj publication in 1985, the 121st page, and 77, the 91～97 pages of the publication Thin Solid Films that people such as R.Pommier and C.Grill published in 1981 are disclosed; Chinese invention patent ZL01121721.9 discloses a kind of liquid jet coating, also be to be raw material with liquid, by high pressure carrier gas by spray gun with the source solution atomization, the design of nozzle is to have double-decker, inside is liquid storage unit, there is the gas blowing unit outside, weak point is that the size of atomized particles is directly relevant with gas flow, if compressed gas flow is too high, then can reduce the uniformity of the underlayer temperature that heats greatly, in addition, if the hole of nozzle also can reduce the effect of atomizing too greatly, therefore, formed film quality is difficult to guarantee.
Summary of the invention
The technical problem to be solved in the present invention provides a kind of quality of depositing large-area transparent conductive film and has good uniformity, and the lower-cost spray equipment of conductive film simple in structure, that produce.
For solving the problems of the technologies described above, the spray equipment of a kind of transparent conductive film for depositing large-area solar cell of the present invention, be used on the substrate surface of heating, forming the continuous transparent conductive film, comprise shower nozzle, this shower nozzle comprises ultrasonic transducer, atomization of liquid maker and the connecting rod between ultrasonic transducer and atomization of liquid maker, be provided with liquid supplying passage in the described connecting rod, described atomization of liquid maker is provided with the atomizing face that is connected with described liquid supplying passage.
Described ultrasonic transducer can be made of two piezoelectric ceramic ultrasonic transducers that are superimposed together, piezoelectric ceramic in the described piezoelectric ceramic ultrasonic transducer is disc shaped, and an end of contiguous atomization of liquid maker connects high-frequency electrode, the other end connects grounding electrode, and this piezoelectric ceramic ultrasonic transducer is electrically connected with supersonic generator by the lead on high-frequency electrode and the grounding electrode.
Described ultrasonic transducer also can be a kind of be the magnetostriction ultrasonic transducer.This magnetostriction ultrasonic transducer is slidingly connected by shell, an end and shell, the luffing bar that the other end is fixedlyed connected with described connecting rod, place magnetostrictive material spare, permanent magnet, coil and guide pillar in the shell to constitute, middle part and one end that described guide pillar is arranged on shell are fixedlyed connected with the bottom surface of shell, the other end penetrates in the groove of described luffing bar and with it and is slidingly connected, described permanent magnet is arranged on the two ends of magnetostrictive material spare, and described mounting coil is on the luffing bar.
After adopting such structure, on the one hand, because this spray equipment adopts ultrasonic transducer, the present invention is preferably piezoelectric ceramic or magnetostriction ultrasonic transducer, this ultrasonic transducer receive behind the signal of telecommunication of supersonic generator at piezoelectric ceramic or magnetostrictive material spare under the effect of the excitation field that bias magnetic field that permanent magnet provides and coil produce, convert electric energy to the high frequency ultrasound wave energy, the mechanical movement that makes the atomization of liquid maker of fixedlying connected and connecting rod make sonic oscillation with ultrasonic transducer, i.e. vibration, liquid is transported on the atomizing face by liquid supplying passage simultaneously, liquid is atomized into micro particles on atomizing face under the sonic oscillation effect, the spread of particles of atomizing is to substrate surface, therefore, the spray equipment of this structure, atomization gas can directly form on the atomizing face of shower nozzle, and the particulate of atomizing is to arrive the surface of substrate and do not need to use carrier gas by diffusion; On the other hand, when spraying, also need not to use Compressed Gas, the atomizing particle controlled in size is in the frequency of ultrasonic that ultrasonic transducer produced, and frequency of ultrasonic can be invariable, therefore, the size of atomizing particle is even, underlayer temperature is invariable in the forming process of film, thereby make the large-area transparent conductive film uniformity that deposits, quality greatly improves than prior art, its square resistance can reach 4 Ω/, and quality factor (Figure of Merits) reaches 40 (calculating to 1100nm wavelength incident light mean transmissivity with 300nm).In addition, the parts that spray equipment adopted are less, and it is simple in structure, and the conductive film cost of being produced is also lower.
As a kind of improvement of the present invention, between described ultrasonic transducer and connecting rod, also be provided with a seal casinghousing, be provided with the seal cover that is used to open or seal the sealing housing at a sidepiece of sealing housing.After adopting such structure, can prevent effectively that hydraulic fluid from overflowing from shower nozzle.
As a further improvement on the present invention, in described seal casinghousing, also be provided with the water-cooled body that constitutes by water cooling passageway.After adopting such structure, can effectively reduce the thermal radiation influence that shower nozzle is subjected to substrate heater, prolong the useful life of shower nozzle.
As another kind of improvement the of the present invention, described atomization of liquid maker is the chamfered edge spheroid, and the sphere of this chamfered edge spheroid constitutes described atomizing face.Adopt such sphere atomizing face, make the atomizing area bigger, improved the nebulization efficiency of liquid.
As of the present invention another improve, this device also comprises the transmission device that the substrate that will heat or shower nozzle are at the uniform velocity advanced.After adopting such structure, can with the atomizing liquid particle faster, large tracts of land is sprayed on the substrate that heats more equably, can increase work efficiency greatly.
Description of drawings
Below in conjunction with accompanying drawing the specific embodiment of the present invention is described in further detail.
Fig. 1 is a kind of structural representation of shower nozzle in the spray equipment of transparent conductive film for depositing large-area solar cell of the present invention.
Fig. 2 is along the cutaway view of A-A line among Fig. 1.
Fig. 3 is a kind of structural representation of magnetostriction ultrasonic transducer in the spray equipment of transparent conductive film for depositing large-area solar cell of the present invention.
Embodiment
Spray equipment referring to a kind of transparent conductive film for depositing large-area solar cell shown in Fig. 1 to 3, be used on the substrate surface of heating, forming the continuous transparent conductive film, it comprises shower nozzle, this shower nozzle comprises ultrasonic transducer 1, atomization of liquid maker 2 and the connecting rod 3 between ultrasonic transducer 1 and atomization of liquid maker 2, be provided with liquid supplying passage 4 in the described connecting rod 3, described atomization of liquid maker 2 is provided with the atomizing face 2-1 that is connected with described liquid supplying passage 4.
As shown in Figure 1, described ultrasonic transducer 1 is made of two piezoelectric ceramic ultrasonic transducer 1-1,1-2 that are superimposed together, piezoelectric ceramic in the described piezoelectric ceramic ultrasonic transducer is disc shaped, and an end of contiguous atomization of liquid maker 2 connects high-frequency electrode 1-1-1, the other end connects grounding electrode 1-2-1, and this piezoelectric ceramic ultrasonic transducer is electrically connected with supersonic generator by the lead on high-frequency electrode and the grounding electrode 7.Supersonic generator not shown in the figures.
As shown in Figure 3, described ultrasonic transducer 1 is a kind of magnetostriction ultrasonic transducer.This magnetostriction ultrasonic transducer is by shell 1a-1, one end and shell 1a-1 are slidingly connected, the luffing bar 1a-2 that the other end is fixedlyed connected with described connecting rod 3, place the magnetostrictive material spare 1a-3 in the shell 1a-1, permanent magnet 1a-4,1a-5, coil 1a-6 and guide pillar 1a-7 constitute, middle part and one end that described guide pillar 1a-7 is arranged on shell 1a-1 are fixedlyed connected with the bottom surface of shell 1a-1, the other end penetrates in the groove of described luffing bar 1a-2 and with it and is slidingly connected, free end at guide pillar 1a-7 can be provided with an adjusting nut 1a-8, between adjusting nut 1a-8 and luffing bar 1a-2, also be provided with a spring 1a-9, by adjusting nut 1a-8 and spring 1a-9, can apply different pretightning forces to magnetostrictive material spare 1a-3; Described permanent magnet 1a-4,1a-5 are arranged on the two ends of magnetostrictive material spare 1a-3, and described coil 1a-6 is sleeved on the luffing bar 1a-2.
As shown in Figure 1, between described ultrasonic transducer 1 and connecting rod 3, also be provided with a seal casinghousing 5, this housing 5 is by anti-corrosion material, and for example quartz glass is ceramic or erosion-resisting metal etc. made, and is provided with the seal cover 5-1 that is used to open or seal sealing housing 5 at an end of sealing housing 5.In described seal casinghousing 5, also be provided with the water-cooled body that constitutes by water cooling passageway 6 that is used for cooling spray.The water inlet 6-1 of this water cooling passageway 6 and delivery port 6-2 can be arranged on the same side of housing 5.Between housing 5 and the seal cover 5-1 and with connecting rod 3 between can adopt rubber seal realization to be tightly connected respectively.
For can with the atomizing liquid particle faster, large tracts of land is sprayed on the substrate that heats more equably, increase work efficiency, can on substrate that heats or shower nozzle, install and make it make the transmission device of at the uniform velocity advancing, this transmission device can be made of motor-driven chain, chain wheel driving mechanism, and is not shown in the figures.Certainly, also can adopt other transmission device, for example band, synchronizing wheel etc. synchronously.
The amplitude of the supersonic oscillations that ultrasonic transducer produced among the present invention can be controlled by the electrical power of input.Substrate of the present invention is a glass substrate, when this Substrate Area is excessive, and several the shower nozzles of can linearity arranging.
When spraying work, the liquid that participates in reaction is transported on the atomizing face 2-1 of shower nozzle by liquid supplying passage 4, liquid forms the uniform atomizing particulate under the vibration mechanical movement effect of ultrasonic high frequency, be deposited on the substrate that heats, and decomposition reaction forms continuous film under the temperature of setting uniform large-area.
The present invention has obtained good effect through on probation.
Claims (9)
1, a kind of spray equipment of transparent conductive film for depositing large-area solar cell, be used on the substrate surface of heating, forming the continuous transparent conductive film, it comprises shower nozzle, it is characterized in that: this shower nozzle comprise ultrasonic transducer (1), atomization of liquid maker (2) and be positioned at ultrasonic transducer (1) and atomization of liquid maker (2) between connecting rod (3), be provided with liquid supplying passage (4) in the described connecting rod (3), described atomization of liquid maker (2) is provided with the atomizing face (2-1) that is connected with described liquid supplying passage (4).
2, the spray equipment of transparent conductive film for depositing large-area solar cell according to claim 1, it is characterized in that: described ultrasonic transducer (1) is made of two piezoelectric ceramic ultrasonic transducers that are superimposed together (1-1,1-2), piezoelectric ceramic in the described piezoelectric ceramic ultrasonic transducer is disc shaped, and an end of contiguous atomization of liquid maker (2) connects high-frequency electrode (1-1-1), the other end connects grounding electrode (1-2-1), and this piezoelectric ceramic ultrasonic transducer is electrically connected with supersonic generator by the lead on high-frequency electrode and the grounding electrode.
3, the spray equipment of transparent conductive film for depositing large-area solar cell according to claim 1 is characterized in that: described ultrasonic transducer (1) is the magnetostriction ultrasonic transducer.
4, the spray equipment of transparent conductive film for depositing large-area solar cell according to claim 3, it is characterized in that: described magnetostriction ultrasonic transducer is by shell (1a-1), one end and shell (1a-1) are slidingly connected, the luffing bar (1a-2) that the other end is fixedlyed connected with described connecting rod (3), place the magnetostrictive material spare (1a-3) in the shell (1a-1), permanent magnet (1a-4,1a-5), coil (1a-6) and guide pillar (1a-7) constitute, a middle part and an end that described guide pillar (1a-7) is arranged on shell (1a-1) are fixedlyed connected with the bottom surface of shell (1a-1), the other end penetrates in the groove of described luffing bar (1a-2) and with it and is slidingly connected, described permanent magnet (1a-4,1a-5) be arranged on the two ends of magnetostrictive material spare (1a-3), described coil (1a-6) is sleeved on the luffing bar (1a-2).
5, the spray equipment of transparent conductive film for depositing large-area solar cell according to claim 2, it is characterized in that: between described ultrasonic transducer (1) and connecting rod (3), also be provided with a seal casinghousing (5), be provided with at a sidepiece of sealing housing (5) and be used for opening or the seal cover (5-1) of sealing sealing housing (5).
6, the spray equipment of transparent conductive film for depositing large-area solar cell according to claim 5 is characterized in that: be provided with the water-cooled body that is made of water cooling passageway (6) in described seal casinghousing (5).
7, according to the spray equipment of each described transparent conductive film for depositing large-area solar cell in the claim 1 to 6, it is characterized in that: described atomization of liquid maker (2) is the chamfered edge spheroid, and the sphere of this chamfered edge spheroid constitutes described atomizing face (2-1).
8, according to the spray equipment of each described transparent conductive film for depositing large-area solar cell in the claim 1 to 6, it is characterized in that: this device also comprise will heating substrate or the shower nozzle transmission device of at the uniform velocity advancing.
9, the spray equipment of transparent conductive film for depositing large-area solar cell according to claim 8 is characterized in that: described transmission device is made of motor-driven chain, chain wheel driving mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2009100327120A CN101593794A (en) | 2009-06-26 | 2009-06-26 | The spray equipment of transparent conductive film for depositing large-area solar cell |
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| Application Number | Priority Date | Filing Date | Title |
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| CNA2009100327120A CN101593794A (en) | 2009-06-26 | 2009-06-26 | The spray equipment of transparent conductive film for depositing large-area solar cell |
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| CN101593794A true CN101593794A (en) | 2009-12-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNA2009100327120A Pending CN101593794A (en) | 2009-06-26 | 2009-06-26 | The spray equipment of transparent conductive film for depositing large-area solar cell |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106137320A (en) * | 2016-07-11 | 2016-11-23 | 杨林 | A kind of it is applied to internal ultrasound lithotripter |
| CN117444215A (en) * | 2023-09-02 | 2024-01-26 | 南京航空航天大学 | Ultrasonic atomization deposition metal particle device and application method thereof |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2228810Y (en) * | 1995-06-20 | 1996-06-12 | 成百川 | Supersonic liquid atomized spray type transducer |
| CN2458091Y (en) * | 2000-12-27 | 2001-11-07 | 甘肃天星稀土功能材料有限公司 | Magnetostriction ultrasonic transducer |
| CN2737469Y (en) * | 2004-04-16 | 2005-11-02 | 天津理工学院 | Ultrasonic wave atomization producing device with nano TiO2 film |
-
2009
- 2009-06-26 CN CNA2009100327120A patent/CN101593794A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2228810Y (en) * | 1995-06-20 | 1996-06-12 | 成百川 | Supersonic liquid atomized spray type transducer |
| CN2458091Y (en) * | 2000-12-27 | 2001-11-07 | 甘肃天星稀土功能材料有限公司 | Magnetostriction ultrasonic transducer |
| CN2737469Y (en) * | 2004-04-16 | 2005-11-02 | 天津理工学院 | Ultrasonic wave atomization producing device with nano TiO2 film |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106137320A (en) * | 2016-07-11 | 2016-11-23 | 杨林 | A kind of it is applied to internal ultrasound lithotripter |
| CN117444215A (en) * | 2023-09-02 | 2024-01-26 | 南京航空航天大学 | Ultrasonic atomization deposition metal particle device and application method thereof |
| CN117444215B (en) * | 2023-09-02 | 2024-05-28 | 南京航空航天大学 | Ultrasonic atomization deposition metal particle device and application method thereof |
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Application publication date: 20091202 |