CN101592601A - High-efficiency infrared gas sensor with small volume - Google Patents

High-efficiency infrared gas sensor with small volume Download PDF

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Publication number
CN101592601A
CN101592601A CN 200810113178 CN200810113178A CN101592601A CN 101592601 A CN101592601 A CN 101592601A CN 200810113178 CN200810113178 CN 200810113178 CN 200810113178 A CN200810113178 A CN 200810113178A CN 101592601 A CN101592601 A CN 101592601A
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light
light source
gas sensor
detector
small volume
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CN101592601B (en
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陈明彻
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BRIGHTEN OPTICS Ltd
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BRIGHTEN OPTICS Ltd
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Abstract

The invention belongs to a kind of high-efficiency infrared gas sensor with small volume of the explosion-proof detection of gas equipment scope of mine safety.The absorbing cavity of described infrared gas sensor is made of relatively two spherical reflector concave surfaces up and down, being placed on each other on the conjugate position of light source and detector, lower peripheral surface catoptron, light source and detector are fixed on the inner support, on the base, last spherical reflector was fixed on the sensor outer housing in inner support was fixed on.The present invention has adopted the quasi-optical resonator design, make light source and detector coincidence imaging relation after light path folding repeatedly, making the light beam that is imaged on the detector is the disperse picture, make the beam distribution on the detector even, thereby the light beam that arrives receiver satisfies aplanatic requirement substantially, has improved the signal to noise ratio (S/N ratio) of light signal.Both dwindled the volume of absorbing cavity, also improved the assimilation effect of tested gas, realized the requirement of high-efficiency infrared gas sensor with small volume light.

Description

High-efficiency infrared gas sensor with small volume
Technical field
The invention belongs to the explosion-proof detection of gas equipment scope of mine safety, particularly a kind of high-efficiency infrared gas sensor with small volume.
Background technology
Utilize the absorption characteristic of gas to be measured to infrared spectrum, the technology that detects object gas concentration has very big development in recent years.The infrared-gas detection technique is applied in usually to be needed in real time, the occasion of high precision monitoring objective gas concentration.As the monitoring of each point gas density under the above-mentioned coal mine, the refinery of petrochemical industry, the monitoring of oil pipeline, the occasion that gas production and conveyance conduit etc. need monitoring to leak.But along with the development of technology, the reduction of cost and people can progress into the existence and the concentration thereof of family's monitoring room harmful gas to the raising of daily life environmental quality requirement, also have the monitoring of quality of air environment on the vehicles etc.
The overwhelming majority's that current China adopts in domestic colliery probe is a catalytic combustion type.Its shortcoming is to cause wrong report or inefficacy because of intoxicating phenomenon, its poor reliability, cycle nominal time is short, and the calibration cost height needs in the work to work under aerobic environment, advanced country in the world adopts the alarm of infrared detection class more, but some technology that is adopted is not suitable for the national conditions of China, and the small product size that has is big, as the alarm of generalmonitor ' s, some product efficiency of light energy utilization is not high, the long partially CH4 infrared sensor like City of response time.In these products almost without exception be expensive, cause alarm to cost an arm and a leg, be difficult to popularize.
The common detector selects the light structure of two different wave lengths can become difference detecting by bandpass filter, object gas is bigger to the light absorption of a wavelength, light signal increases with object gas concentration and reduces, object gas does not have absorption substantially to the light of another wavelength, can be used to monitor the reference signal of infrared light Strength Changes.Key for this class gas sensor is to improve high sensitivity, improves and surveys degree of accuracy, thereby have the ability of surveying lower concentration.Simultaneously to the portability of sensor, little power consumption, microbody is long-pending and low-cost also to propose higher requirement.For improving detection sensitivity, can increase the physical distance between light source and detector, just increase effectively absorption light path, the sampling precision that can improve air chamber improves sensitivity.But the drawback that the luminous energy that increase physics bulk can bring volume to increase, need strengthens.
Next is to utilize a plurality of detectors to improve sensitivity, for example, US, 7,132,657 B2 improve sensitivity by a plurality of detector cumulative signals, but the difference of each detector can be influential to the raising of sensitivity, and topmost key is to have increased cost and volume.
The 3rd is to utilize reflection to make light repeatedly pass through gas in absorption chamber, increases effective optical absorption length.For example, at US, among 6,469,303 B1, to absorb air chamber and be designed to afocal, and utilize optical integration ball notion, the absorbing cavity internal optical density is reached unanimity, light intensity is even, signal stabilization is good, is not subjected to the influence of light path skew, and the temperature working range is wide, and production technology is simple.But its shortcoming is that the efficiency of light energy utilization is low, and signal to noise ratio (S/N ratio) is low in the light signal.Or be designed to focus on class optical absorption chamber, usually with the light source be thing by optical system imaging on receiver, the length but the effective light path of this type of absorbing cavity is not easy to do, owing to selected imaging, the one, optics is adjusted complicated, and the 2nd, bigger to the light path bias effect, with the variation of working environment, its stability is sacrificed to some extent, but the efficiency of light energy utilization is very high.
The present invention takes into account the advantage of above-mentioned two class absorbing cavities, quasi-optical resonator design by uniqueness, select for use two gold-plated spherical reflectors to form absorbing cavity, make light source and receiver coincidence imaging relation after light path folding repeatedly, and the light that folding times is few leaks out absorbing cavity, and the light that arrives receiver satisfies aplanatic requirement substantially, and this measure has improved the signal to noise ratio (S/N ratio) of light signal.The efficiency of light energy utilization also has raising, is imaged on the only disperse picture on the receiver, and the light on the receiver is evenly distributed, and has reduced the influence of light path skew to system stability.Light path adjustment and production technology there is not specific (special) requirements.
Summary of the invention
The objective of the invention is at the absorbing cavity detection sensitivity of prior art and the low deficiency of the efficiency of light energy utilization and a kind of high-efficiency infrared gas sensor with small volume is provided, described infrared gas sensor mainly is made up of absorbing cavity, light source and infrared eye, it is characterized in that, be made up of two spherical reflectors up and down, absorbing cavity is designed to quasi-optical resonator; Lower peripheral surface catoptron, light source and infrared eye are fixed on the support, last spherical reflector is fixed on the sensor outer housing, the light beam that described light source sends shines the reflecting surface of spherical reflector reflecting surface and lower peripheral surface catoptron, this light beam enters infrared eye after repeatedly reflecting between two spherical reflectors; Make light source and detector coincidence imaging relation after light path folding repeatedly, make the beam distribution that is imaged on the detector even, both dwindled the volume of absorbing cavity, also improved the assimilation effect of tested gas light.Top cover is installed on sensor outer housing, and support and sensor outer housing are installed on the base.
Described upward spherical reflector and lower peripheral surface catoptron are concave spherical mirror, and concave surface is relative.
Described upward spherical reflector and lower peripheral surface catoptron are the catoptron of high reflectance.
Two symmetrical light holes are arranged on the described lower peripheral surface catoptron, light source is installed in an interior unthreaded hole, and the photosurface of infrared eye is aimed at another light hole and is somebody's turn to do, and the infrared light window is installed on this light hole, intercept tested gas and lead to infrared eye, influence measuring accuracy; The electrode of light source and infrared eye all is connected on the circuit board, and circuit board is installed on the base.
On the position that is placed on conjugation each other of described infrared eye and light source.
Two light holes are arranged on the described lower peripheral surface catoptron, and light source is installed in the light hole or is fixed near the reflecting surface of this catoptron; The photosurface of infrared eye is aimed at another light hole, and the infrared light window is installed on this light hole, intercepts tested gas and leads to infrared eye, influences measuring accuracy; The electrode of light source and infrared eye all is connected on the circuit board, and circuit board is installed on the base.
Described light source places near the reflecting surface of spherical reflector one side, and is placed on another conjugate position of infrared eye.
The invention has the beneficial effects as follows to solving the low quasi-optical resonator that has designed a kind of new uniqueness of the efficiency of light energy utilization in the absorbing cavity, select two gold-plated spherical mirrors for use, make light source and detector coincidence imaging relation after light path folding repeatedly, and the light beam that folding times is few leaks out absorbing cavity, the light beam that is imaged on the detector is the disperse picture, make the beam distribution on the detector even, thereby the light beam that arrives receiver satisfies aplanatic requirement substantially, this measure has improved the signal to noise ratio (S/N ratio) of light signal.In absorbing cavity light path folding repeatedly, light is fully absorbed, and has both dwindled the volume of absorbing cavity, has also improved the assimilation effect of tested gas to light, has realized the requirement of high-efficiency infrared gas sensor with small volume.
Description of drawings
Fig. 1 is embodiment 1 a sensor construction synoptic diagram.
Fig. 2 is the absorbing cavity light path principle figure.
Fig. 3 is embodiment 2 sensor construction synoptic diagram.
Embodiment
The invention provides a kind of high-efficiency infrared gas sensor with small volume.Below in conjunction with accompanying drawing the present invention is illustrated.In embodiment shown in Figure 11 sensor construction synoptic diagram, absorbing cavity is made up of lower peripheral surface catoptron 1 and last spherical reflector 2, light source 3 is positioned at lower peripheral surface catoptron 1 one sides with infrared eye 4, the light that sends from light source 3, after last spherical reflector 2 reflections, get back to lower peripheral surface catoptron 1 earlier, reflex to spherical reflector 2 through lower peripheral surface catoptron 1 again, this light beam enters infrared eye 4 after repeatedly reflecting between two spherical reflectors; Make light source 3 and detector 4 coincidence imaging relation after light path folding repeatedly, make the beam distribution that is imaged on the detector 4 even, thereby the light beam that arrives detector satisfies aplanatic requirement substantially, has both dwindled the volume of absorbing cavity, has also improved the assimilation effect of tested gas to light.Lower peripheral surface catoptron 1, light source 3 and detector 4 are fixed on the support 8, and inner support 8 is fixed on the base 10, and last spherical reflector 2 is fixed on sensor outer housing 6 tops, and top cover 11 is installed on the sensor outer housing 6, and sensor outer housing 6 is installed on the base 10.Last spherical reflector 2 and lower peripheral surface catoptron 1 are concave spherical mirror, and concave surface is relative, are typically chosen in the spherical reflector of high reflectance, and gold-plated or not gold-plated or other reflectance coatings of its reflecting surface can.Two symmetrical light holes are arranged on the lower peripheral surface catoptron 1, light source 3 is installed in right light hole, the photosurface of infrared eye 4 is aimed at left light hole, infrared light window 5 is installed on the left light hole, intercept tested gas and lead to infrared eye 4, the electrode of light source 3 and infrared eye 4 all is connected on the circuit board 9, and circuit board 9 is installed on the base 10.The placement location of infrared eye 4 and light source 3 is conjugate position each other.Infrared eye 4 is two infrared electro elements, and infrared eye 4 is two infrared electro elements, an output reference signal, the measuring-signal of another export target gas.On the circumference on sensor outer housing 6 tops, on the top cover or on the circumference with on the top cover equally distributed air hole 7 is arranged, make the inside and outside gas energy real-time exchange of absorbing cavity.Infrared eye 4 can be selected model for use to be the infrared sensor of Infra LIM122 or to adopt other high sensitivity infrared sensors.Light source 3 is chosen as pulse modulated thin tungsten lamp or other light sources, requires warming and cooling rate fast, produces periodically infrared light, and the light source warming and cooling rate is fast, and inspection speed is improved greatly.Evenly the air hole 7 of distribution sensor makes gas therefore improve the reaction velocity of sensor in the inner formation of air absorbing cavity convection current.
Fig. 2 is the absorbing cavity light path principle figure.Light source 3 is positioned at lower peripheral surface catoptron 1 one sides with infrared eye 4, from the light that light source sends, after the upper reflector reflection, get back to down mirror surface earlier, mirror surface reflexes to the upper reflector face under the warp again, so the circulation light beam enters infrared eye 4 after repeatedly reflecting between two spherical reflectors; Infrared eye 4 will receive light signal and be converted to electric signal, for this reason, infrared eye 4 and light source 3 accurately enters infrared eye 4 for the light that makes repeatedly reflection, and the two is placed on the position into conjugation each other, makes light source 3 and infrared eye 4 coincidence imaging relation after light path folding repeatedly; And be the light and shade that the makes the light source picture unlikely homogeneity of light beam on infrared eye 4 that influence that distribute, the position of described infrared eye 4 on the position that is arranged on suitable out of focus on the light path,
Fig. 3 is embodiment 2 sensor construction synoptic diagram.Light source 3 places near another conjugate position of spherical reflector 2 infrared eyes 4, the light source incident angle almost reaches 360 degree, it is the highest a kind of design of the efficiency of light energy utilization, simultaneously owing to adopt the concave mirror reflection, make light have the imaging converging action, than the better advantage in optical integration chamber be, light path satisfies aplanatism and energy directional concentrates on the receiver, has improved the signal to noise ratio (S/N ratio) of light signal and the output signal at zero point of detector greatly.
The structure of described infrared gas sensor can also adopt single light source, double detector structure, the two light sources of employing, double detector structure or two light source, simple detector structure.Place the band pass filter of an object gas corresponding wavelength in the front of a detector, place the band pass filter of a corresponding reference wavelength in the front of another detector.Described infrared gas sensor band pass filter can be placed on the front of detector, also can be placed on the front of light source.

Claims (9)

1. high-efficiency infrared gas sensor with small volume, described infrared gas sensor mainly is made up of absorbing cavity, light source and infrared eye, it is characterized in that, and described absorbing cavity is made up of two spherical reflectors up and down, and absorbing cavity is designed to quasi-optical resonator; Lower peripheral surface catoptron, light source and infrared eye are fixed on the support, last spherical reflector is fixed on the sensor outer housing, the light beam that described light source sends shines the reflecting surface of spherical reflector reflecting surface and lower peripheral surface catoptron, this light beam enters infrared eye after repeatedly reflecting between two spherical reflectors; Make light source and detector coincidence imaging relation after light path folding repeatedly, make the beam distribution that is imaged on the detector even, on the position that is placed on conjugation each other of infrared eye and light source.Top cover is installed on sensor outer housing, and support and sensor outer housing are installed on the base.
2. according to the described high-efficiency infrared gas sensor with small volume of claim 1, it is characterized in that described upward spherical reflector and lower peripheral surface catoptron are concave spherical mirror, and concave surface is relative.
3. according to the described high-efficiency infrared gas sensor with small volume of claim 1, it is characterized in that described upward spherical reflector and lower peripheral surface catoptron are the catoptron of high reflectance.
4. according to the described high-efficiency infrared gas sensor with small volume of claim 1, it is characterized in that, two light holes are arranged on the described lower peripheral surface catoptron, light source is installed in an interior unthreaded hole, the photosurface of infrared eye is aimed at another light hole, the electrode of light source and infrared eye all is connected on the circuit board, and circuit board is installed on the base.
(existing in the claim 1).
5. according to the described high-efficiency infrared gas sensor with small volume of claim 1, it is characterized in that equally distributed air hole is arranged at described sensor outer housing top.
6. according to the described high-efficiency infrared gas sensor with small volume of claim 1, it is characterized in that described light source places near the reflecting surface of spherical reflector one side, and be placed on another conjugate position of infrared eye.
7. according to the described high-efficiency infrared gas sensor with small volume of claim 1, it is characterized in that the position of described infrared eye is arranged on the out of focus position on the light path, make the light and shade of light source picture distribute the unlikely homogeneity of light beam on infrared eye that influence.
8. according to the described high-efficiency infrared gas sensor with small volume of claim 1, it is characterized in that, described infrared gas sensor adopts single light source, the double detector structure, place the band pass filter of an object gas corresponding wavelength in the front of a detector, place the band pass filter of a corresponding reference wavelength in the front of another detector.
9. according to the described high-efficiency infrared gas sensor with small volume of claim 1, it is characterized in that described infrared gas sensor adopts two light sources, the double detector structure, or the simple detector structure, band pass filter can be placed on the front of detector, also can be placed on the front of light source.
CN 200810113178 2008-05-28 2008-05-28 High-efficiency infrared gas sensor with small volume Expired - Fee Related CN101592601B (en)

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Cited By (10)

* Cited by examiner, † Cited by third party
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CN102230882A (en) * 2011-04-12 2011-11-02 朱坚磊 Air testing platform adopting Herroitt multiple-reflection specimen chamber
CN103954577A (en) * 2014-05-11 2014-07-30 西安安通测控技术有限公司 Miniature infrared gas detection sensor
CN104062251A (en) * 2014-07-11 2014-09-24 刘颖东 Optical fiber transmission type long-optical length laser gas sensor adopting space reflection structure
CN104280358B (en) * 2014-09-05 2017-11-21 汉威科技集团股份有限公司 Miniature infrared gas sensor
CN108593587A (en) * 2018-07-03 2018-09-28 青岛海纳光电环保有限公司 A kind of non-dispersion infrared gas sensor
CN109470644A (en) * 2018-12-29 2019-03-15 汉威科技集团股份有限公司 Compact infrared optics gas absorption cell and infrared gas sensor
CN109597192A (en) * 2018-12-21 2019-04-09 徐州旭海光电科技有限公司 Efficient light path folded device and the highly sensitive gas sensor of miniaturization
CN109709075A (en) * 2018-12-11 2019-05-03 华南理工大学 A kind of device and method obtaining face spectrum based on spectroscopic detector
CN111781303A (en) * 2020-07-01 2020-10-16 深圳市步锐生物科技有限公司 Handheld exhaled air collection multi-parameter classification collection mechanism
CN115266625A (en) * 2022-08-26 2022-11-01 上海翼捷工业安全设备股份有限公司 Laser methane gas sensor based on direct absorption method

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DE10015615C2 (en) * 2000-03-29 2002-07-11 Draegerwerk Ag Gas Detection System
US6469303B1 (en) * 2000-05-17 2002-10-22 Rae Systems, Inc. Non-dispersive infrared gas sensor
CN100460860C (en) * 2005-12-28 2009-02-11 华东师范大学 Portable infrared semiconductor laser absorbing type gas detection method and detection apparatus therefor
CN101105449B (en) * 2007-08-08 2010-09-15 天地科技股份有限公司 Double light source double sensitive element infra-red multiple gas detection sensor
CN201203577Y (en) * 2008-05-29 2009-03-04 北京市加华博来科技有限公司 Infrared detection device for mash gas

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102230882A (en) * 2011-04-12 2011-11-02 朱坚磊 Air testing platform adopting Herroitt multiple-reflection specimen chamber
CN102230882B (en) * 2011-04-12 2013-03-13 朱坚磊 Air testing platform adopting Herroitt multiple-reflection specimen chamber
CN103954577A (en) * 2014-05-11 2014-07-30 西安安通测控技术有限公司 Miniature infrared gas detection sensor
CN104062251A (en) * 2014-07-11 2014-09-24 刘颖东 Optical fiber transmission type long-optical length laser gas sensor adopting space reflection structure
CN104062251B (en) * 2014-07-11 2018-06-26 刘颖东 A kind of optical fibre transmission type long light path laser gas sensor using space reflection structure
CN104280358B (en) * 2014-09-05 2017-11-21 汉威科技集团股份有限公司 Miniature infrared gas sensor
CN108593587A (en) * 2018-07-03 2018-09-28 青岛海纳光电环保有限公司 A kind of non-dispersion infrared gas sensor
CN109709075A (en) * 2018-12-11 2019-05-03 华南理工大学 A kind of device and method obtaining face spectrum based on spectroscopic detector
CN109597192A (en) * 2018-12-21 2019-04-09 徐州旭海光电科技有限公司 Efficient light path folded device and the highly sensitive gas sensor of miniaturization
CN109597192B (en) * 2018-12-21 2024-02-06 江苏旭海光电科技有限公司 High-efficiency optical path folding device and miniaturized high-sensitivity gas sensor
CN109470644A (en) * 2018-12-29 2019-03-15 汉威科技集团股份有限公司 Compact infrared optics gas absorption cell and infrared gas sensor
CN109470644B (en) * 2018-12-29 2024-05-03 汉威科技集团股份有限公司 Compact infrared optical gas absorption cell and infrared gas sensor
CN111781303A (en) * 2020-07-01 2020-10-16 深圳市步锐生物科技有限公司 Handheld exhaled air collection multi-parameter classification collection mechanism
CN111781303B (en) * 2020-07-01 2023-02-10 深圳市步锐生物科技有限公司 Handheld exhaled air collection multi-parameter classification collection mechanism
CN115266625A (en) * 2022-08-26 2022-11-01 上海翼捷工业安全设备股份有限公司 Laser methane gas sensor based on direct absorption method

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