CN101586232A - 补正板形变监测系统 - Google Patents

补正板形变监测系统 Download PDF

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CN101586232A
CN101586232A CNA2008103017348A CN200810301734A CN101586232A CN 101586232 A CN101586232 A CN 101586232A CN A2008103017348 A CNA2008103017348 A CN A2008103017348A CN 200810301734 A CN200810301734 A CN 200810301734A CN 101586232 A CN101586232 A CN 101586232A
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简士哲
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Hongfujin Precision Industry Shenzhen Co Ltd
Hon Hai Precision Industry Co Ltd
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Hongfujin Precision Industry Shenzhen Co Ltd
Hon Hai Precision Industry Co Ltd
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    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
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    • C23C14/5833—Ion beam bombardment

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Abstract

一种补正板形变监测系统，其包括：一个传感元件，其固定在补正板的本体上，用于感测该补正板发生的形变并将其转化为电信号；一个处理器，该处理器预先存储有补正板形变参考值，该处理器包括：一个放大模块，其与该传感元件电性连接，用于放大该电信号；一个转换模块，用于将该电信号转换为该补正板的形变量；一个比较模块，用于将所获得的形变量与补正板形变参考值进行比较并判断；及一个报警器，与该处理器电性连接，当该比较模块判断该形变量大于该补正板形变参考值时，该报警器触发并进行报警。本发明的补正板形变监测系统可及时通知使用者更换补正板，避免了因使用不符合规格的补正板造成的镀膜不良。

Description

补正板形变监测系统
技术领域
本发明涉及一种镀膜设备，尤其涉及一种用于镀膜设备中的补正板形变监测系统。
背景技术
补正板是伞架式镀膜机里面的一个部件，其作用为补偿因镀膜源与镀膜基板的夹角不同而产生的镀膜层厚度偏差。
图1所示为镀膜机示意图，其包括镀膜源1，补正板11，伞架12，离子源14。所述伞架12上设置有多圈镀膜基板13。所述镀膜源1包括加热器101、镀膜药材102，所述加热器101将镀膜药材102加热至蒸汽状态，所述蒸汽附着于镀膜基板13上形成镀膜层。所述离子源14与伞架12的顶端相对，其用于辅助蒸镀以增加膜层的附着性及膜层的光学性质。该离子源14具有一定的发散角度并能轰击到补正板11，补正板11在离子源14长期轰击下会产生形变。当形变达到一定程度时，会导致镀膜层厚度的差异增大，甚至超出规格，此时，需更换补正板11。但是，目前的镀膜机没有设置提醒使用者更换补正板11的系统，使用者有可能在不知情的情况下继续使用形变过大的补正板11，从而造成镀膜基板13镀膜不良。
发明内容
有鉴于此，有必要提供一种能够提醒使用者及时更换补正板的补正板形变监测系统。
一种补正板形变监测系统，其包括：一个传感元件，其固定在补正板的本体上，用于感测该补正板发生的形变并将其转化为电信号；一个处理器，该处理器预先存储有补正板形变参考值，该处理器包括：一个放大模块，其与该传感元件电性连接，用于放大该电信号；一个转换模块，用于将该电信号转换为该补正板的形变量；一个比较模块，用于将所获得的形变量与补正板形变参考值进行比较并判断；及一个报警器，与该处理器电性连接，当该比较模块判断该形变量大于该补正板形变参考值时，该报警器触发并进行报警。
与现有技术相比，本发明的补正板形变监测系统，利用传感元件获取补正板的形变量，并通过所述处理器将该形变量与预先设定的补正板形变参考值进行比较。若所述形变量大于该补正板形变参考值，则及时通知使用者更换补正板，避免了因使用不符合规格的补正板造成的镀膜不良。
附图说明
图1是现有镀膜机的示意图；
图2是本发明实施方式提供的补正板形变监测系统的示意图。
具体实施方式
下面将结合附图对本发明作一具体介绍。
请参阅图2，本发明的补正板形变监测系统100包括：一个传感元件20，其固定在补正板10的本体上；一个处理器30，其与该传感元件20电性连接；以及一个与该处理器30电性连接的报警器40。
所述补正板10在使用过程中会因为受到镀膜机上的离子源14的轰击或其他原因产生形变。当该补正板10产生的形变达到一定的程度时，会严重影响镀膜的质量。
所述传感元件20用于感测该补正板10发生的形变并将其转化为电信号输出。本实施方式中，所述传感元件20为电阻式应变片，该电信号为微电压信号。该传感元件20的应变感测体是一栅栏状的应变阻抗材料或是用照相蚀刻法在一微小的面积上提供所需的电阻值，该电阻值会因被测体的应变而改变，从而产生电信号。将该传感元件20贴附在所述补正板10上，当该补正板10发生较明显的形变时，由变化的电阻值可计算出所述补正板10的应变量。由于传感元件20在产生形变过程中才会输出电信号，所以该传感元件20应从该补正板10未发生较明显形变时就一直贴在所述补正板10最容易发生形变的两端上，并保持紧密粘贴。本实施方式中，该传感元件20的数量为两个，其分别贴附在临近所述补正板10两端的位置上。
所述处理器30通过导线31与该传感元件20连接，其预先存储有补正板形变参考值。所述处理器30包括一个放大模块301，一个转换模块302以及一个比较模块303。
所述放大模块301与该传感元件20电性连接，其用于放大所述传感元件20的输出电信号。因为微电压信号直接输出很难测量，所以需要使用放大模块301将其放大为需要的电压值才方便利用。
所述转换模块302用于将该电信号转换为该补正板10的形变量。本实施方式中，该转换模块302根据电阻变化与形变量的关系获得补正板10的形变量。
所述比较模块303用于读取该补正板10的形变量，并将所获得的形变量与预先存储的补正板形变参考值进行比较。如形变量大于补正板形变参考值，则判断补正板10的形变已超出镀膜规格，并触发所述报警器40报警以提醒使用者更换补正板10。如形变量小于补正板形变参考值，则判断补正板10符合镀膜规格，不触发所述报警器40。本实施方式中，该报警器40为蜂鸣器，当其被触发时，发出警报声。
综上所述，本发明的补正板形变监测系统100，利用传感元件20获取补正板10的形变量，并通过所述处理器30将该形变量与预先设定的补正板形变参考值进行比较，若所述形变量大于补正板形变参考值，则及时通知使用者更换补正板10，从而避免了因使用不符合规格的补正板10造成的镀膜不良。
另外，本领域技术人员还可在本发明精神内做其它变化，当然，这些依据本发明精神所做的变化，都应包含在本发明所要求保护的范围之内。

Claims (4)

1.一种补正板形变监测系统，其特征在于，其包括：一个传感元件，固定在补正板的本体上，其用于感测该补正板发生的形变并将其转化为电信号；一个处理器，该处理器预先存储有补正板形变参考值，该处理器包括：
一个放大模块，其与该传感元件电性连接，用于放大该电信号；
一个转换模块，用于将该电信号转换为该补正板的形变量；
一个比较模块，用于将所获得的形变量与补正板形变参考值进行比较并判断；及
一个报警器，与该处理器电性连接，当该比较模块判断该形变量大于该补正板形变参考值时，该报警器触发并进行报警。
2.如权利要求1所述的补正板形变监测系统，其特征在于：所述传感元件为电阻式应变片。
3.如权利要求1所述的补正板形变监测系统，其特征在于：所述传感元件紧密贴附在临近该补正板两端的位置。
4.如权利要求1所述的补正板形变监测系统，其特征在于：该报警器为蜂鸣器。
CNA2008103017348A 2008-05-23 2008-05-23 补正板形变监测系统 Pending CN101586232A (zh)

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Cited By (5)

* Cited by examiner, † Cited by third party
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CN107267907A (zh) * 2017-06-02 2017-10-20 中国航发北京航空材料研究院 一种超音速火焰喷涂薄板形零件的变形补偿方法
CN107416378A (zh) * 2017-08-30 2017-12-01 南通中集罐式储运设备制造有限公司 罐式集装箱及用于管理罐式集装箱的监控系统
CN107809882A (zh) * 2017-09-21 2018-03-16 维沃移动通信有限公司 一种修复pcb板形变的方法和移动终端
CN109356651A (zh) * 2018-10-08 2019-02-19 安徽理工大学 一种巷道内位移变形监测装置及其监测系统
CN113465569A (zh) * 2021-06-02 2021-10-01 王艳彦 一种新型土木工程结构形变监测装置

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107267907A (zh) * 2017-06-02 2017-10-20 中国航发北京航空材料研究院 一种超音速火焰喷涂薄板形零件的变形补偿方法
CN107416378A (zh) * 2017-08-30 2017-12-01 南通中集罐式储运设备制造有限公司 罐式集装箱及用于管理罐式集装箱的监控系统
CN107809882A (zh) * 2017-09-21 2018-03-16 维沃移动通信有限公司 一种修复pcb板形变的方法和移动终端
CN107809882B (zh) * 2017-09-21 2019-10-15 维沃移动通信有限公司 一种修复pcb板形变的方法和移动终端
CN109356651A (zh) * 2018-10-08 2019-02-19 安徽理工大学 一种巷道内位移变形监测装置及其监测系统
CN113465569A (zh) * 2021-06-02 2021-10-01 王艳彦 一种新型土木工程结构形变监测装置
CN113465569B (zh) * 2021-06-02 2022-03-25 王艳彦 一种土木工程结构形变监测装置

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